CN103887710A - Laser multi-beam combining device and method thereof - Google Patents
Laser multi-beam combining device and method thereof Download PDFInfo
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- CN103887710A CN103887710A CN201410076073.9A CN201410076073A CN103887710A CN 103887710 A CN103887710 A CN 103887710A CN 201410076073 A CN201410076073 A CN 201410076073A CN 103887710 A CN103887710 A CN 103887710A
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Abstract
The invention discloses a laser multi-beam combining device. The laser multi-beam combining device comprises a first laser, at least one second laser and dichroscopes, wherein the number of the dichroscopes is matched with the number of the second lasers. The first laser is arranged on transmission light paths of all the dichroscopes, each second laser is arranged on a reflected light path of one dichroscope corresponding to the second laser, and light rays emitted out from the first laser and the second lasers are transmitted and reflected by the dichroscopes respectively and then coincide to form an output light path. The output light path is sequentially provided with an achromatic lens, a pinhole diaphragm, a beam combining mirror and a collimator. By means of the laser multi-beam combining device, light rays with two or more wave lengths are combined in a high precision mode, spatial filtering is achieved, beam quality is improved, meanwhile, the implementation size is small, and performance is stable.
Description
Technical field
The invention belongs to semiconductor laser field, relate in particular to a kind of multi-beam laser device beam merging apparatus and method thereof.
Background technology
Photoelectronic imaging technology is the important component part that eye is looked light research field, have great significance, help Clinical Ophthalmology diagnosis treatment ophthalmology disease, improving ophthalmic medical level, obtain the aspects such as human eye surface or inner biological tissue images with scientific research personnel and playing the part of important role, greatly promote the development of Liao Yan optometry section.Nearly ten years, arouse widespread concern with the development of wave-front optical aberration measurement, the positively related technical research in school and photoelectronic imaging instrument, the combination of adaptive optical technique and optical coherent chromatographic imaging instrument, confocal surface sweeping laser ophthalmoscope, make doctor can obtain cell, blood vessel and the optic disk sieve plate image in the cell magnitude of living human eye eyeground, thereby the ophthalmology disease super early diagnosis of realization and treatment are had to far-reaching influence.
Along with the continuous ripe development of laser technology, be more and more used in the research and development of Medical Instruments, as utilize the monochromaticjty of laser beam, different wave length can inspire different wavelength of fluorescence, thereby realizes the observation to nanoscale cell, i.e. flow cytometer; Phasic difference by different wave length is different, realizes the amphiblestroid imaging in eyeground, i.e. fundus imaging instrument.The instrument using at present, closing bundle is all generally the shortcomings such as the two-beam of free space is coupled through speculum, and bundle low precision is closed in existence, and temperature reliability is bad, and background noise is large, cannot meet the inspection requirements to the cause of disease.
Summary of the invention
In view of the defect of above-mentioned prior art existence, the object of the invention is to propose a kind of multi-beam laser device beam merging apparatus and method thereof based on laser fiber coupling principle, the light beam of more than two and two laser of wavelength is closed to bundle, can be applicable to the biologic medical such as flow cytometer and fundus imaging system.
Object of the present invention will be achieved by the following technical programs:
A kind of multi-beam laser device beam merging apparatus, comprise first laser and the second laser of at least one, also comprise the dichroscope matching with the quantity of described second laser, described the first laser is arranged on the transmitted light path of all described dichroscopes, described second laser is arranged on the reflected light path of corresponding separately described dichroscope, the light that described the first laser sends with second laser overlaps into an output light path through described dichroscope transmission with after reflection respectively, on described output light path, be provided with successively achromatic lens, aperture, light combination mirror and collimater.Collimater comprises collimating lens and collimater sleeve, selects suitable collimating mirror to obtain the collimated light beam of different spot sizes, regulates collimating mirror can improve coupling efficiency, and then improves the polarization characteristic of green glow.After focusing on by common achromatic lens, enter aperture, thus implementation space filtering, and interception stray light, improves beam quality, realizes the output of the same wave front of different wave length, the difference of the different wave length of avoiding, the object that reaches high accuracy and close bundle.Utilize achromatic lens, make the light high accuracy of two or more wavelength close bundle, in very wide temperature range, the variable quantity that closes bundle is negligible.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: between described the first laser and the described dichroscope of transmission at first, be provided with one for collimating the coupling mirror of spot size, and/or be respectively equipped with one for collimating the collimating mirror of spot size between described second laser and corresponding separately described dichroscope.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: the light that described the first laser sends enters in described coupling mirror by the first coupling fiber, and/or the light that described second laser sends enters in described collimating mirror by the second coupling fiber.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: the light through described light combination mirror is coupled in described collimater by common fiber.By the collimater at common fiber end, realize the collimation of red-green glow, the size that can obtain hot spot is 0.4mm ~ 0.5mm.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: also comprise slab guide, the light that described the first laser and second laser send enters described slab guide by the first optical fiber and the second coupling fiber respectively, through overlapping into an output light path after described slab guide, on described output light path, be provided with successively light combination mirror and collimater, be coupled in described collimater by common fiber through the light of described light combination mirror.Can adopt the mode of slab guide, realize the high accuracy of the light of different wave length and close bundle implementation space filtering, the output of the same wave front of different wave length.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: described the first laser and described second laser are respectively frequency double laser or semiconductor laser.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: described light combination mirror adopts the method for laser welding to make, have unstressed, the feature that reliability is strong.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: described the first optical fiber, the second optical fiber and common fiber are respectively monomode fiber or photonic crystal fiber, realize further filtering, by the surrounding layer of optical fiber, effectively reduce stray light, suppress the background noise in light path, improve beam quality.
Preferably, above-mentioned multi-beam laser device beam merging apparatus, wherein: the thickness of described dichroscope is 1mm ~ 4mm, its wedge angle is more than or equal to 0.5 °.
A kind of multi-beam laser device closes Shu Fangfa, comprises the following steps:
The first step, the light that the first laser sends carries out beam shaping by coupling mirror, and spot size is met the demands;
Second step, the light that second laser sends carries out beam shaping by collimating mirror, and spot size is met the demands;
The 3rd step, utilizes dichroscope, and the light that the first laser after beam shaping and second laser are sent, through reflection and transmission, enters aperture after focusing on by same achromatic lens, and implementation space filtering, makes the same wave front output of different wave length;
The 4th step, the light the first laser after aperture and second laser being sent by light combination mirror focuses on and is coupled into common fiber, common fiber plays further space filtering effect simultaneously, realize the high accuracy of many light and close bundle, the two separates angle and is no more than 0.05mrad, utilize the feature of optical fiber simultaneously, make the polarization direction of the two in full accord;
The 5th step utilizes collimater the light of common fiber output to be collimated simultaneously, is met the light of the spot size of requirement.
Outstanding effect of the present invention is:
A kind of multi-beam laser device beam merging apparatus of the present invention and method thereof, by selecting suitable collimating mirror to obtain the collimated light beam of different spot sizes, regulate collimating mirror can improve coupling efficiency, and then improve the polarization characteristic of green glow.After focusing on by common achromatic lens, enter aperture, thus implementation space filtering, and interception stray light, improves beam quality, realizes the output of the same wave front of different wave length, the difference of the different wave length of avoiding, the object that reaches high accuracy and close bundle.Utilize achromatic lens, make the light high accuracy of two or more wavelength close bundle, in very wide temperature range, the variable quantity that closes bundle is negligible.Or, can adopt the mode of slab guide, realize the high accuracy of the light of different wave length and close bundle implementation space filtering, the output of the same wave front of different wave length.Optical fiber can be realized further filtering, by the surrounding layer of optical fiber, effectively reduce stray light, suppress the background noise in light path, improve beam quality, meet Medical Instruments to low noise instructions for use, the overall precision of the instrument improving, reduce the probability of doctor's erroneous judgement, realized volume little, stable performance simultaneously.
Below just accompanying drawing in conjunction with the embodiments, is described in further detail the specific embodiment of the present invention, so that technical solution of the present invention is easier to understand, grasp.
Accompanying drawing explanation
Fig. 1 is the optical arrangement block diagram of the embodiment of the present invention 1;
Fig. 2 is the optical arrangement block diagram of the embodiment of the present invention 2;
Fig. 3 is the optical arrangement block diagram of the embodiment of the present invention 3;
Fig. 4 is the optical arrangement block diagram of the embodiment of the present invention 4.
Embodiment
A kind of multi-beam laser device beam merging apparatus of the present embodiment, as shown in Figure 1, comprises first laser 1 and a second laser 2, and optional, the first laser 1 and second laser 2 are respectively frequency double laser or semiconductor laser.Also comprise a dichroscope 3, the first laser 1 is arranged on the transmitted light path of dichroscope 3, second laser 2 is arranged on the reflected light path of dichroscope 3, between the first laser 1 and dichroscope 3, be provided with the coupling mirror 4 for collimating spot size, between second laser 2 and dichroscope 3, be provided with the collimating mirror 5 for collimating spot size.The light that the first laser 1 sends with second laser 2 overlaps into an output light path through dichroscope 3 transmissions with after reflection respectively, is provided with successively achromatic lens 6, aperture 7, light combination mirror 8 and collimater 9 on output light path.The light that the first laser 1 sends is coupled in coupling mirror 4 by the first optical fiber 10, and the light that second laser 2 sends is coupled in collimating mirror 5 by the second optical fiber 11.Light through light combination mirror 8 is coupled in collimater 9 by common fiber 12.Wherein, the thickness of dichroscope 3 is 1mm ~ 4mm, and its wedge angle is more than or equal to 0.5 °.Light combination mirror 8 adopts the method for laser welding to make.The first optical fiber 10, the second optical fiber 11 and common fiber 12 are respectively monomode fiber or photonic crystal fiber.
The multi-beam laser device of the present embodiment closes Shu Fangfa, comprises the following steps:
The first step, the light that the first laser 1 sends is coupled in coupling mirror 4 by the first optical fiber 10, carry out beam shaping by coupling mirror 4 again, spot size is met the demands, after thering are dichroscope 3 transmissions of the angle of wedge, focus on and enter aperture 7 through achromatic lens 6, enter common fiber 12 finally by light combination mirror 8;
Second step, the light that second laser 2 sends is coupled in collimating mirror 5 by the second optical fiber 11, carry out beam shaping by collimating mirror 5 again, spot size is met the demands by focusing on and enter aperture 7 through achromatic lens 6 after the reflection of dichroscope 3, enter common fiber 12 finally by light combination mirror 8;
The 3rd step, the light that utilizes collimater 9 simultaneously common fiber 12 to be exported collimates, and according to different hot spot requirements, can realize the collimation hot spot of different spot sizes.
A kind of multi-beam laser device beam merging apparatus of the present embodiment, as shown in Figure 2, comprises first laser 1 and a second laser 2, and optional, the first laser 1 and second laser 2 are respectively frequency double laser or semiconductor laser.Also comprise a dichroscope 3, the first laser 1 is arranged on the transmitted light path of dichroscope 3, second laser 2 is arranged on the reflected light path of dichroscope 3, between the first laser 1 and dichroscope 3, be provided with the coupling mirror 4 for collimating spot size, between second laser 2 and dichroscope 3, be provided with the collimating mirror 5 for collimating spot size.The light that the first laser 1 sends with second laser 2 overlaps into an output light path through dichroscope 3 transmissions with after reflection respectively, is provided with successively achromatic lens 6, aperture 7, light combination mirror 8 and collimater 9 on output light path.Light through light combination mirror 8 is coupled in collimater 9 by common fiber 12.Wherein, the thickness of dichroscope 3 is 1mm ~ 4mm, and its wedge angle is more than or equal to 0.5 °.Light combination mirror 8 adopts the method for laser welding to make.Common fiber 12 is monomode fiber or photonic crystal fiber.
The multi-beam laser device of the present embodiment closes Shu Fangfa, comprises the following steps:
The first step, the light that the first laser 1 sends carries out beam shaping by coupling mirror 4, and spot size is met the demands, and after having dichroscope 3 transmissions of the angle of wedge, focuses on and enters aperture 7 through achromatic lens 6, enters common fiber 12 finally by light combination mirror 8;
Second step, the light that second laser 2 sends carries out beam shaping by collimating mirror 5, and spot size is met the demands by focusing on and enter aperture 7 through achromatic lens 6 after the reflection of dichroscope 3, enters common fiber 12 finally by light combination mirror 8;
The 3rd step, the light that utilizes collimater 9 simultaneously common fiber 12 to be exported collimates, and according to different hot spot requirements, can realize the collimation hot spot of different spot sizes.
A kind of multi-beam laser device beam merging apparatus of the present embodiment, as shown in Figure 3, comprises first laser 1 and three second lasers 21,22 and 23.Optionally, the first laser 1 and second laser 21,22 and 23 are respectively frequency double laser or semiconductor laser.Also comprise three and second laser 21, 22 and 23 corresponding dichroscope 31, 32 and 33, the first laser 1 is arranged on dichroscope 31, on 32 and 33 transmitted light path, second laser 21 is arranged on the reflected light path of dichroscope 31, second laser 22 is arranged on the reflected light path of dichroscope 32, second laser 23 is arranged on the reflected light path of dichroscope 33, between the first laser 1 and dichroscope 31, be provided with the coupling mirror 4 for collimating spot size, between second laser 21 and dichroscope 31, be provided with the collimating mirror 51 for collimating spot size, between second laser 22 and dichroscope 32, be provided with the collimating mirror 52 for collimating spot size, between second laser 23 and dichroscope 33, be provided with the collimating mirror 53 for collimating spot size.The light that the first laser 1 and second laser 21,22 and 23 send passes through respectively dichroscope 31,32 and overlaps into an output light path with 33 transmissions with after reflection, is provided with successively achromatic lens 6, aperture 7, light combination mirror 8 and collimater 9 on output light path.The light that the first laser 1 sends is coupled in coupling mirror 4 by the first optical fiber 10, is coupled in collimater 9 by common fiber 12 through the light of light combination mirror 8.Wherein, the thickness of dichroscope 31,32 and 33 is 1mm ~ 4mm, and its wedge angle is more than or equal to 0.5 °.Light combination mirror 8 adopts the method for laser welding to make.The first optical fiber 10 and common fiber 12 are respectively monomode fiber or photonic crystal fiber.
The multi-beam laser device of the present embodiment closes Shu Fangfa, comprises the following steps:
The first step, the light that the first laser 1 sends is coupled in coupling mirror 4 by the first optical fiber 10, carry out beam shaping by coupling mirror 4 again, spot size is met the demands, by thering is the dichroscope 31 of the angle of wedge, after 32 and 33 transmissions, focus on and enter aperture 7 through achromatic lens 6, enter common fiber 12 finally by light combination mirror 8;
Second step, the light that second laser 21 sends carries out beam shaping by collimating mirror 51, spot size is met the demands after the transmission of reflection by dichroscope 31, dichroscope 32 and 33 and focus on and enter aperture 7 through achromatic lens 6, enter common fiber 12 finally by light combination mirror 8;
The 3rd step, the light that second laser 22 sends carries out beam shaping by collimating mirror 52, spot size is met the demands after the transmission of reflection by dichroscope 32 and 33 and focus on and enter aperture 7 through achromatic lens 6, enter common fiber 12 finally by light combination mirror 8;
The 4th step, the light that second laser 23 sends carries out beam shaping by collimating mirror 53, and spot size is met the demands by focusing on and enter aperture 7 through achromatic lens 6 after the reflection of dichroscope 33, enters common fiber 12 finally by light combination mirror 8;
The 5th step, the light that utilizes collimater 9 simultaneously common fiber 12 to be exported collimates, and according to different hot spot requirements, can realize the collimation hot spot of different spot sizes.
A kind of multi-beam laser device beam merging apparatus of the present embodiment, as shown in Figure 4, comprises the first laser 1 and second laser 2, and optional, the first laser 1 and second laser 2 are respectively frequency double laser or semiconductor laser.Also comprise slab guide 13, the light that the first laser 1 and second laser 2 send is coupled into slab guide 13 by the first optical fiber 10 and the second optical fiber 11 respectively, through overlapping into an output light path after slab guide 13, on output light path, be provided with successively light combination mirror 8 and collimater 9, be coupled in collimater 9 by common fiber 12 through the light of light combination mirror 8.
The multi-beam laser device of the present embodiment closes Shu Fangfa, comprises the following steps: the light that the first laser 1 and second laser 2 send is coupled into slab guide 13 by the first optical fiber 10 and the second optical fiber 11 respectively; The light that slab guide 13 is exported is coupled into common fiber 12 through light combination mirror 8; The light that utilizes collimater 9 simultaneously common fiber 12 to be exported collimates, and is met the light of the spot size of requirement.
The present invention still has numerous embodiments, and all employing equivalents or equivalent transformation and all technical schemes of forming, within all dropping on protection scope of the present invention.
Claims (10)
1. a multi-beam laser device beam merging apparatus, comprise first laser and the second laser of at least one, it is characterized in that: also comprise the dichroscope matching with the quantity of described second laser, described the first laser is arranged on the transmitted light path of all described dichroscopes, described second laser is arranged on the reflected light path of corresponding separately described dichroscope, the light that described the first laser sends with second laser overlaps into an output light path through described dichroscope transmission with after reflection respectively, on described output light path, be provided with successively achromatic lens, aperture, light combination mirror and collimater.
2. multi-beam laser device beam merging apparatus according to claim 1, it is characterized in that: between described the first laser and the described dichroscope of transmission at first, be provided with one for collimating the coupling mirror of spot size, and/or be respectively equipped with one for collimating the collimating mirror of spot size between described second laser and corresponding separately described dichroscope.
3. multi-beam laser device beam merging apparatus according to claim 2, it is characterized in that: the light that described the first laser sends enters in described coupling mirror by the first coupling fiber, and/or the light that described second laser sends enters in described collimating mirror by the second coupling fiber.
4. multi-beam laser device beam merging apparatus according to claim 1, is characterized in that: the light through described light combination mirror is coupled in described collimater by common fiber.
5. a multi-beam laser device beam merging apparatus, comprise the first laser and second laser, it is characterized in that: also comprise slab guide, the light that described the first laser and second laser send enters described slab guide by the first optical fiber and the second coupling fiber respectively, through overlapping into an output light path after described slab guide, on described output light path, be provided with successively light combination mirror and collimater, be coupled in described collimater by common fiber through the light of described light combination mirror.
6. multi-beam laser device beam merging apparatus according to claim 1 or 5, is characterized in that: described the first laser and described second laser are respectively frequency double laser or semiconductor laser.
7. multi-beam laser device beam merging apparatus according to claim 1 or 5, is characterized in that: described light combination mirror adopts the method for laser welding to make.
8. according to the multi-beam laser device beam merging apparatus described in claim 3 or 5, it is characterized in that: described the first optical fiber, the second optical fiber and common fiber are respectively monomode fiber or photonic crystal fiber.
9. multi-beam laser device beam merging apparatus according to claim 1, is characterized in that: the thickness of described dichroscope is 1mm ~ 4mm, its wedge angle is more than or equal to 0.5 °.
10. multi-beam laser device closes a Shu Fangfa, it is characterized in that comprising the following steps:
The first step, the light that the first laser sends carries out beam shaping by coupling mirror, and spot size is met the demands;
Second step, the light that second laser sends carries out beam shaping by collimating mirror, and spot size is met the demands;
The 3rd step, utilizes dichroscope, and the light that the first laser after beam shaping and second laser are sent, through reflection and transmission, enters aperture after focusing on by same achromatic lens, and implementation space filtering, makes the same wave front output of different wave length;
The 4th step, the light the first laser after aperture and second laser being sent by light combination mirror focuses on and is coupled into common fiber;
The 5th step utilizes collimater the light of common fiber output to be collimated simultaneously, is met the light of the spot size of requirement.
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| CN104505707A (en) * | 2015-01-06 | 2015-04-08 | 北京镭宝光电技术有限公司 | High-power semiconductor laser beam combining fiber coupling output device and method |
| CN104808351A (en) * | 2015-05-13 | 2015-07-29 | 中国人民解放军国防科学技术大学 | Shared aperture mixed beam synthesis system |
| CN106569331A (en) * | 2016-11-17 | 2017-04-19 | 上海无线电设备研究所 | Laser leading beacon optical system |
| CN107134714A (en) * | 2016-11-01 | 2017-09-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Laser beam merging apparatus |
| CN108333787A (en) * | 2018-05-03 | 2018-07-27 | 无锡厦泰生物科技有限公司 | A kind of light path system of telescope tube for cytoanalyze |
| CN108597544A (en) * | 2018-05-10 | 2018-09-28 | 上海理工大学 | A kind of miniaturization light path system of multiple beam super-resolution optical storage |
| CN109449743A (en) * | 2018-10-24 | 2019-03-08 | 无锡市大华激光设备有限公司 | A kind of solid state laser and semiconductor laser light combination beam system |
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| CN104505707A (en) * | 2015-01-06 | 2015-04-08 | 北京镭宝光电技术有限公司 | High-power semiconductor laser beam combining fiber coupling output device and method |
| CN104808351A (en) * | 2015-05-13 | 2015-07-29 | 中国人民解放军国防科学技术大学 | Shared aperture mixed beam synthesis system |
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| CN108333787A (en) * | 2018-05-03 | 2018-07-27 | 无锡厦泰生物科技有限公司 | A kind of light path system of telescope tube for cytoanalyze |
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| CN108597544A (en) * | 2018-05-10 | 2018-09-28 | 上海理工大学 | A kind of miniaturization light path system of multiple beam super-resolution optical storage |
| CN109449743A (en) * | 2018-10-24 | 2019-03-08 | 无锡市大华激光设备有限公司 | A kind of solid state laser and semiconductor laser light combination beam system |
| CN109526101A (en) * | 2018-11-22 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of lighting device illuminated with Yu Haiyang |
| CN109490248A (en) * | 2018-12-27 | 2019-03-19 | 四川精方智慧科技有限公司 | A kind of blood glucose spectral detection system and detection method based on modulation reverse phase cancellation |
| CN110687054A (en) * | 2019-10-09 | 2020-01-14 | 浙江多普勒环保科技有限公司 | Large-light-spot beam combining method for remote measurement of motor vehicle exhaust |
| CN112394528A (en) * | 2020-11-25 | 2021-02-23 | 上海思量量子科技有限公司 | High-resolution multicolor beam splitting system and photon filtering method thereof |
| CN113204124A (en) * | 2021-04-28 | 2021-08-03 | 苏州赛源光学科技有限公司 | Wave mixer |
| CN113552725A (en) * | 2021-07-20 | 2021-10-26 | 中国工程物理研究院激光聚变研究中心 | Laser beam coaxial co-wave surface control system and method |
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