CN103762887A - Cylindrical driven clamping type piezoelectric wriggle linear motor - Google Patents
Cylindrical driven clamping type piezoelectric wriggle linear motor Download PDFInfo
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Abstract
The invention relates to a piezoelectric drive device, in particular to a cylindrical driven clamping type piezoelectric wriggle linear motor to solve the problems that an existing drive clamping type wriggle motor cannot be powered off or self-locked and is not suitable for a compact, thin and long motion mechanism, and a driven clamping type wriggle motor is large in axial size and low in concentricity and control precision and needs an independent guide mechanism. The cylindrical driven clamping type piezoelectric wriggle linear motor comprises a guide rail, a drive mechanism, two annular gaskets and two sets of clamping mechanisms. The drive mechanism comprises a drive sleeve, a first piezoelectric stack and two clipping bodies. Each set of clamping mechanism comprises a clamping body, three second piezoelectric stacks and three flexible bodies. The middle of the drive sleeve is provided with the first piezoelectric stack, the clipping bodies, the gaskets and the clamping bodies are installed inside the drive sleeve from interior to exterior in a left-and-right symmetrical mode, the clipping bodies are in threaded connection with the drive sleeve, and the three flexible bodies are respectively and evenly distributed on the inner surfaces of the clamping bodies in the circumferential direction of the clamping bodies. The piezoelectric drive device is applied to the precise positioning and driving field.
Description
Technical field
The present invention relates to a kind of Piexoelectric actuator, be specifically related to a kind of clamp passively formula piezoelectricity wriggling linear electric motors, belong to Precision Piezoelectric and drive field.
Background technology
Along with scientific and technological development, optical field, semiconductor applications and mechanical processing industry etc. are the urgent ultraprecise straight line anchor drive of demand all.Traditional positioner has certain deficiency, such as gap and stick-slip.The driving arrangement in many hard-core technologies field is to small-size light-weight, high accuracy and high performance future development, and traditional electromagnetic machine is difficult to competent present requirement.The feature of the Bionic inchworm driver based on Creeping Principle has determined that it is at submicron order or nano-precision, and stroke is that millimetre-sized precision drives the application of aspect, location to have obvious superiority.
Piezoelectricity inchworm motor is through the development of decades, and the motor size of design is bigger than normal, and axially power output is less than normal, and mostly is the inchworm motor of active clamping formula, and the motor of this structure cannot cut off self-lock, and is not suitable in the motion of compact elongate; Another kind is the inchworm motor of clamp passively formula, motor axial dimension guiding mechanism and the concentricity large, need to be independent of this structure be low, control precision is low, therefore, how better applying piezoelectric Driving technique designs that a kind of small size, high control precision, low speed directly drive and the accurate motor driving of micron order that is applicable to the motion of compact elongate has very important real value.
Summary of the invention
The present invention cannot cut off self-lock for solving the inchworm motor of existing active clamping formula, be not suitable in the motion of compact elongate, and the inchworm motor axial dimension of clamp passively formula is large, need independent guiding mechanism and concentricity low, the problem that control precision is low, and then a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors are provided.
The present invention solves the problems of the technologies described above taked technical scheme: a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors of the present invention comprise guide rail, driving mechanism, two annular packing rings and two cover clamping institutions, described in each, packing ring is annular, and described guide rail is cylindrical;
Described driving mechanism comprises drive sleeve, the first piezoelectric stack and two clamping bodies; Described drive sleeve is cylindrical, and the first piezoelectric stack is hollow cylinder, and each clamping body is hollow cylinder;
Every cover clamping institution comprises clamp body, three the second piezoelectric stacks and three flexible bodies; Each clamp body is hollow cylinder, and each second piezoelectric stack is cuboid, and the cross section of each flexible body is { shape;
Middle part in drive sleeve is provided with the first piezoelectric stack, the symmetrical clamping body that is provided with from inside to outside in drive sleeve, packing ring and clamp body, and described clamping body, packing ring and clamp body are closely posted by connecting and are integrated, clamping body is threaded with drive sleeve, the first piezoelectric stack is by two clamping body axial grips, clamp body is inserted in drive sleeve, on the inner surface of each clamp body, along clamp body circumferential uniform, be provided with three flexible bodies, three flexible bodies are made into integration with corresponding clamp body, the notch of each flexible body points to the inner surface of corresponding clamp body, in the groove of each flexible body, be fixed with second piezoelectric stack, the length direction of the second piezoelectric stack is axial vertical with clamp body, guide rail stretches in drive sleeve and passes the centre bore of the first piezoelectric stack, the centre bore of the centre bore of two clamping bodies and two packing rings, and the bottom of three flexible bodies on each clamp body and guide rail interference fit.
The invention has the beneficial effects as follows:
1, the drive sleeve of motor of the present invention, the first piezoelectric stack, clamp body, clamping body, the second piezoelectric stack are cylindrical, and the whole volume of the present invention is little, compact conformation, and axial dimension is little, is applicable in elongated motion.
2, utilized triangle amplification principle, three flexible bodies on clamp body, can be when cuboid the second piezoelectric stack no power clamping guide-rail, the triangle of realizing three flexible body distortion when cuboid the second piezoelectric stack energising amplifies, offset and be greater than value of interference fit, thereby remove the clamping action to guide rail, therefore can improve clamp power by improving the magnitude of interference of the flexible body on guide rail and clamp body, realize large axial force output.Clamp body and three flexible bodies not only can play clamping action but also can play the guiding role, and the inchworm motor that has solved existing clamp passively formula needs to increase separately the problem of guiding mechanism.
3, utilize the interference fit of the flexible body on guide rail and clamp body that clamp power is provided, when cuboid the second piezoelectric stack is not switched on, just formed clamp, during the energising of cuboid piezoelectric stack, remove clamp, thereby reach the function cutting off self-lock.
4, very close to each other in the guide rail of motor of the present invention and the assembling of the flexible body of clamping institution, be interference fit, relatively static, concentricity is high, can realize micron-sized accurate location.
5, experiment showed, that piezoelectricity inchworm motor design principle of the present invention is feasible, reached the object of clamp passively, guaranteed the smooth conversion of motor clamp and non-clamp, realized the vermicular movement of new construction motor.In frequency, be 80Hz, during rated voltage 150V, the movement velocity of motor has reached 364 μ m/s.When driving voltage is 40V, motor has reached higher displacement resolution 0.05 μ m.Motor has higher displacement multiplication factor, and multiplication factor has good consistency, has realized well the concentric clamp of two ends clamping institution to guide rail.Bilateral clamp power when motor is not switched on is 5N, and one-sided clamp power is 2.5N, and maximum continuous driving power is 1N, can be used for the occasion that accurate position and shape are controlled.
Accompanying drawing explanation
Fig. 1 is the main cross-sectional schematic of the overall structure of motor of the present invention, Fig. 2 is the end view of Fig. 1, Fig. 3 is the main sectional structure schematic diagram of drive sleeve of the present invention, Fig. 4 is the end view of clamping body, Fig. 5 is the end view of clamp body and flexible body syndeton, Fig. 6 is the view that one of them clamping institution is removed clamp, Fig. 7 is driving mechanism elongation state schematic diagram, Fig. 8 is the view that one of them clamping institution in Fig. 6 recovers clamp, Fig. 9 is the view that another clamping institution is removed clamp, Figure 10 is the view that the driving mechanism in Fig. 7 recovers former length, Figure 11 is the view that another clamping institution in Fig. 9 recovers clamp, Figure 12 is the voltage of the second piezoelectric stack and the curve chart of clamping institution radial displacement on the clamping institution of motor of the present invention, Figure 13 is the frequency of the second piezoelectric stack and the curve chart of clamping institution displacement amplitude on the clamping institution of motor of the present invention, Figure 14 is the voltage of the second piezoelectric stack and the curve chart of clamping institution displacement error on the clamping institution of motor of the present invention, Figure 15 is motor of the present invention at different loads situation place an order step displacement and driving voltage curve chart, Figure 16 is the graph of relation of motor of the present invention actuating force and output displacement under different driving voltage, Figure 17 is measurement number of times and the displacement motor curve chart of motor of the present invention under different driving voltage.
Embodiment
Embodiment one: in conjunction with Fig. 1-Fig. 5 explanation, a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors of present embodiment comprise guide rail 11, driving mechanism A, two annular packing rings 6 and two cover clamping institution B, described in each, packing ring 6 is annular, and described guide rail 11 is cylindrical;
Described driving mechanism A comprises drive sleeve 1, the first piezoelectric stack 4 and two clamping bodies 3; Described drive sleeve 1 is cylindrical, and the first piezoelectric stack 4 is hollow cylinder, and each clamping body 3 is hollow cylinder;
Every cover clamping institution B comprises clamp body 2, three the second piezoelectric stacks 10 and three flexible bodies 12; Each clamp body 2 is hollow cylinder, and each second piezoelectric stack 10 is cuboid, and the cross section of each flexible body 12 is { shape;
Middle part in drive sleeve 1 is provided with the first piezoelectric stack 4, the symmetrical clamping body 3 that is provided with from inside to outside in drive sleeve 1, packing ring 6 and clamp body 2, and described clamping body 3, packing ring 6 and clamp body 2 are closely posted by connecting and are integrated, clamping body 3 is threaded with drive sleeve 1, the first piezoelectric stack 4 is by two clamping body 3 axial grips, clamp body 2 is inserted in drive sleeve 1, on the inner surface of each clamp body 2, along clamp body 2 circumferential uniform, be provided with three flexible bodies 12, three flexible bodies 12 are made into integration with corresponding clamp body 2, the notch of each flexible body 12 points to the inner surface of corresponding clamp body 2, in the groove of each flexible body 12, be fixed with second piezoelectric stack 10, the length direction of the second piezoelectric stack 10 is axial vertical with clamp body 2, guide rail 11 stretches in drive sleeve 1 and passes the centre bore of the first piezoelectric stack 4, the centre bore of the centre bore of two clamping bodies 3 and two packing rings 6, and the bottom of three flexible bodies 12 on each clamp body 2 and guide rail 11 interference fit.
Embodiment two: in conjunction with Fig. 2 explanation, clamp body 2 and drive sleeve 1 matched in clearance of present embodiment.So arrange, guaranteed the relative motion of clamp body and drive sleeve.Other is identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 explanation, present embodiment packing ring 6 and drive sleeve 1 matched in clearance.So arrange, the axial compression of clamping body, clamp body and packing ring can not affect the circumferential deformation of compliant mechanism on clamp elastomer, is beneficial to the three angular displacements amplifications that realize flexible body on clamp body.Other is identical with embodiment one or two.
Embodiment four: in conjunction with Fig. 2 explanation, the bottom of three flexible bodies 12 and the contact-making surface of guide rail 11 on each clamp body 2 of present embodiment are plane or V-arrangement face.So arrange, guaranteed that three flexible bodies are all tangent with cylindrical slideway, contact is good, is conducive to the clamping to cylindrical slideway.Other is identical with embodiment one.
Embodiment five: in conjunction with Fig. 3 explanation, described in present embodiment, the middle part of the lateral surface of drive sleeve 1 is circumferentially processed with a circle groove 1-1 along it, the bottom of groove 1-1 circumferentially offers six oblong openings 1-2 along it, and drive sleeve 1 medial surface that is positioned at groove 1-1 both sides is mainly comprised of inner threaded surface and light face respectively from inside to outside.So arrange, the setting of six oblong openings, can reduce the axial rigidity of drive sleeve, is beneficial to the stretching motion of drive sleeve; The setting of flank and light face, is conducive to the layout of packing ring and clamping body.Other is identical with embodiment one, two or four.
In order further to guarantee the good contact of packing ring and clamping body, between the groove in drive sleeve and light face, can set up escape.
Embodiment six: in conjunction with Fig. 1 explanation, each clamping body 3 of present embodiment comprises large-diameter hollow cylinder 3-1 and minor diameter hollow cylinder 3-2, the setting that large diameter cylinder 3-1 and small-diameter circular cylinder 3-2 are coaxial is also made into integration, the lateral surface threading of large-diameter hollow cylinder 3-1, the inner surface of drive sleeve 1 is processed with internal thread, it is upper that the first piezoelectric stack 4 is sleeved on minor diameter hollow cylinder 3-2, and the first piezoelectric stack 4 clamps by two large-diameter hollow cylinder 3-1 that are threaded with drive sleeve 1.So arrange, be conducive to the axial compression of annular piezoelectric stack.Other is identical with embodiment five.
Embodiment seven: in conjunction with Fig. 1 explanation, described in present embodiment, driving mechanism A also comprises six the first screws 7, and the clamping body 3, packing ring 6 and clamp body 2 threes that are arranged in the both sides, middle part in drive sleeve 1 are closely posted by connecting and are integrated by three the first screws 7.So arrange, being conducive to, by clamp body axial compression, can not affect the circumferential deformation of flexible body.Other is identical with embodiment one, two, four or six.
Embodiment eight: in conjunction with Fig. 2 explanation, described in present embodiment, every cover clamping institution B also comprises three the second screws 8 and three pads 9, in the groove of each flexible body 12, be fixedly mounted with pad 9, pad 9 reclines mutually with one end of the second piezoelectric stack 10, and each second piezoelectric stack 10 compresses by the second screw 8 that leans on pad 9 and be threaded with clamp body 2.So arrange, by compression and then the pretension of realization to the second piezoelectric stack of pad.Other is identical with embodiment seven.
Embodiment nine: in conjunction with Fig. 1 explanation, driving mechanism A also comprises two the 3rd screws 5 described in present embodiment, and each clamping body 3 is by the 3rd screw 5 radial locations and the axial locking being threaded with drive sleeve 1.Other is identical with embodiment one, two, four, six or eight.
Embodiment ten: in conjunction with Fig. 1 and Fig. 5 explanation, clamp body 2 and three flexible bodies 12 are made by duralumin, hard alumin ium alloy or spring steel described in present embodiment.So arrange, there is good physical and mechanical property, there is good elasticity, under load repeated action, there is long useful life.Other is identical with embodiment six.
The course of work
In conjunction with Fig. 1-Figure 11 explanation, piezoelectricity inchworm motor is moved and is realized rectilinear motion by the stretch sequential of three parts of clamp.Clamping institution is used to provide static system and dynamically exports required frictional force, and driving mechanism is used for producing output displacement.When the second piezoelectric stack energising of clamping institution is extended, due to the displacement amplification of the flexible body on clamp body, clamp body is loosened to cylindrical slideway clamp; During power-off, under the effect of elastic restoring force, the compliant mechanism on clamp body recovers the clamp to guide rail, and the elongation of the first piezoelectric stack on driving mechanism realizes driving mechanism along the axial motion of guide rail with shortening.
Basic exercise process in a circulation is (as Fig. 6-Figure 11):
(1) the second piezoelectric stack energising of one of them clamping institution, this one of them clamping institution is removed clamp;
(2) the first piezoelectric stack energising of driving mechanism, driving mechanism extends;
(3) the second piezoelectric stack power-off of one of them clamping institution, this one of them clamping institution recovers clamp;
(4) the second piezoelectric stack energising of another clamping institution, this second clamping institution removed clamp;
(5) the first piezoelectric stack power-off of driving mechanism, driving mechanism recovers former length;
(6) the second piezoelectric stack power-off of another clamping institution, this second clamping institution recovers clamp.
Below in conjunction with drawings and Examples, the present invention will be further described.
Three the second piezoelectric stacks 10 are placed on the cylindrical clamp elastomer 2 that has three symmetrical compliant mechanisms, on every cuboid the second piezoelectric stack 10, pass through the second screw 8 pretensions through clamp body 2, wherein the outer hole of clamp body 2 is through hole, hole on flexible body 12 is screwed hole, flexible body 12 and clamp body 2 can adopt duralumin, hard alumin ium alloy or spring steel, the piezoelectric stack of clamp part is long, wide, height is respectively 18 millimeters, 6 millimeters, the cuboid piezoelectric stack 10 of 6 millimeters, the piezoelectric stack of drive part is external diameter, internal diameter, length is respectively 14.5 millimeters, 13.5 millimeters, the annular piezoelectric stack 4 of 9 millimeters, clamp body 2 coordinates with drive sleeve 1, and packing ring 6 is matched in clearance with coordinating of drive sleeve 1, the compliant mechanism of clamp body 2 is interference fit with coordinating of guide rail 11.The first screw 7 connects clamp body 2, packing ring 6 and clamping body 3 successively, by clamp body 2 axial compression.Wherein, the hole on clamp body 2 and packing ring 6 is through hole, and the excircle side of each clamping body 3 is screw thread, has two through holes for assembling on each clamping body 3.Drive sleeve 1 can adopt duralumin, hard alumin ium alloy or spring steel.
What the drive part of piezoelectricity inchworm motor adopted is annular the first piezoelectric stack 4, and its diameter of bore is greater than the external diameter of the minor diameter hollow cylinder of clamping body 3, and its excircle diameter is less than the inner edges diameter of two installing holes of clamping body 3.Axially the clamping body 3 of both sides has the characteristic that axial rigidity is large, and the internal diameter of its minor diameter hollow cylinder is slightly larger than the external diameter of guide rail, and motor is not only contacted with guide rail in clamp body 2 parts when switching on.Clamping body 3 excircle steering vehicles have external screw thread, have internal thread to be threaded connection to compress annular the first piezoelectric stack 4, thereby realize the axial location of the first piezoelectric stack 4 with drive sleeve 1 car.Drive sleeve 1 has been opened six openings, can reduce the axial rigidity of drive sleeve, is beneficial to the stretching motion of drive sleeve.Drive sleeve 1 arranges the columniform structure of groove and both sides symmetry in the middle of being, both sides clamping institution and driving mechanism be portion within it all.Drive sleeve 1 has internal thread with clamping body 3 junction cars, there is no screw thread with clamp body 2 and packing ring 6 junctions, slightly larger in diameter is in there being screw thread place diameter herein, and the length sum of reach and escape is less than the thickness of clamping body 3, to guarantee that packing ring 6 contacts with clamping body 3.The bottom surface of the intermediate groove of drive sleeve 1 is to the thinner thickness of the inner surface of drive sleeve 1, and axial rigidity is little, is mainly used in bearing elongation strain, and the diameter of bore of this part is greater than the excircle diameter of the first piezoelectric stack 4.Cylindrical slideway 11 except with flexible body 12 are interference fit, all do not coordinate with remainder.
Each circulation can form step-wise displacement, and constantly circulation can realize the rectilinear motion of motor, can regulate by changing the size of driving voltage and response frequency the movement velocity of motor.
The characteristic of motor is set forth as Figure 12-Figure 17: 1, the displacement of clamping institution, the displacement multiplication factor of clamping institution is to realize the important parameter of motor clamp function, can it is directly connected to clamp part successfully remove clamp with guide rail, and is determining flexibility and adequacy that clamp is removed.While switching on for clamp piezoelectric stack as shown in figure 12, the displacement in the flexible portion diametric(al) in clamping institution and the relation between clamping voltage.As can be seen from the figure, between the displacement in the flexible portion diametric(al) in clamping institution and clamping voltage, present the trend increasing progressively, the linearity is also better, and when clamping voltage is 150V, it is maximum that radial displacement reaches, and maximum is 61.4 μ m.
2, the frequency response of clamping institution, the frequency response characteristic of clamping institution is mainly manifested in the displacement amplitude of clamping institution with the variation relation of clamping voltage frequency, is directly connected to the clamp effect of clamping institution.As shown in figure 13, what in figure, represent is the indications of five different driving voltage 10V(■ lines to the test result of clamping institution frequency response characteristic), 40V(● lines indication), the indication of 70V(▲ lines), the indication of 110V(▼ lines), 145V(◆ lines indication) under clamping institution displacement amplitude and the relation of clamp signal frequency.The trend that clamping institution displacement amplitude tapers off along with the increase of frequency substantially.In 20Hz frequency range, the amplitude of successively decreasing of amplitude is larger; In about 20Hz, reach a lower value, surpass after 20Hz the variation of amplitude just relatively slow, the frequency response characteristic of this and driving mechanism is similar, be all during due to high frequency the deformation response of mechanical structure slow compared with the electroresponse of piezoelectric stack due to.
Because the vibration in clamping institution and driving mechanism is all the forced vibration of non-harmonic excitation, so the consistency of both mechanical structure frequency responses is conducive to whole motor and reaches maximum motion frequency.In addition, in the situation that frequency is certain, voltage is larger, and the displacement amplitude of clamping institution is also larger.
Clamping institution and driving mechanism are assembled to the test feature of research complete machine.The parameter of analysis of experiments comprises static clamp frictional force, clamp stability, a single step displacement under no-load condition, single step displacement and actuating speed, and a single step displacement in band year situation, continuous single step displacement and actuating speed continuously, resolution etc.
3, clamp stability, what clamp stability reflected is that clamp motion is to the straight-line influence degree of guide rail, can be with motor from the non-conversion process that is clamped to clamp, the guide rail that clamping institution causes the clamping action of guide rail represents in axial play displacement.Figure 14 shows that displacement error and clamping voltage relation.Displacement error increases along with the increase of clamping voltage, and this is that the distortion of flexible hinge is larger, during clamping institution clamp, the impulsive force of guide rail is greater than the clamp frictional force of opposite side clamping institution because clamping voltage is larger, and displacement error is just larger.Therefore clamp error is difficult to avoid, and can attempt to reduce clamp error by pretension repeatedly.
4, unloaded single step displacement is carried single step displacement with band, and single step displacement direct relation movement velocity and the kinematic accuracy of piezoelectricity inchworm motor.The motor displacement of a step that travels forward when unloaded single step displacement refers in empty load of motor situation to the pulse that drives piezoelectric stack one-period.Band carry single step displacement refer under the effect of certain load to drive piezoelectric stack one-period pulse time motor the travel forward displacement of a step.Figure 15 shows that under 10Hz frequency that load is respectively the indication of 0N(▼ lines), the indication of 0.25N(■ lines), 0.5N(● lines indication), the indication of 0.7N(▲ lines) time single step displacement and driving voltage relation curve.
As can be seen from the figure, regularly, single step displacement increases with the increase of driving voltage load one; Regularly, load is larger for driving voltage one, and single step displacement is less.The no-load condition that motor is 150V at voltage is issued to a single step displacement of the maximum 4.8 μ m under 10Hz frequency.
5, continuous driving power and resolution, continuous driving power is the driving force that motor has in the process of motion continuously, is one of important output characteristic of piezoelectricity inchworm motor.Shown in Figure 16, be frequency while being 10Hz magnitude of voltage in the indication of 150V(■ lines) and 130V(● lines indication) situation under the graph of relation of actuating force and output displacement.As can be seen from the figure, output displacement significantly reduces along with the increase of actuating force, and when actuating force is 1N, output displacement goes to zero substantially.The maximum continuous driving power of motor is 1N, and the inertia force that motor produces is also little, is applicable to precision positioning field.
The minimum value of the continuous single step displacement of motor recording with laser displacement sensor is the resolution of motor, is the important performance indexes of piezoelectricity inchworm motor.The displacement resolution curve repeatedly measuring under the frequency of 10Hz while Figure 17 shows that empty load of motor.Motor is in 50V(■ lines indications), 45V(● lines indication) and 40V(▲ lines indicate) under the mean value of resolution be respectively 0.08 μ m, 0.07 μ m and 0.05 μ m, the measured value of the following laser displacement sensor of 40V is zero, so the resolution of this motor is 0.05 μ m.
Claims (10)
1. cylindrical clamp passively formula piezoelectricity wriggling linear electric motors, it is characterized in that: it comprises guide rail (11), driving mechanism (A), two annular packing rings (6) and two cover clamping institutions (B), packing ring described in each (6) is annular, and described guide rail (11) is cylindrical;
Described driving mechanism (A) comprises drive sleeve (1), the first piezoelectric stack (4) and two clamping bodies (3); Described drive sleeve (1) is cylindrical, and the first piezoelectric stack (4) is hollow cylinder, and each clamping body (3) is hollow cylinder;
Every cover clamping institution (B) comprises clamp body (2), three the second piezoelectric stacks (10) and three flexible bodies (12); Each clamp body (2) is hollow cylinder, and each second piezoelectric stack (10) is cuboid, and the cross section of each flexible body (12) is { shape;
Middle part in drive sleeve (1) is provided with the first piezoelectric stack (4), the symmetrical clamping body (3) that is provided with from inside to outside in drive sleeve (1), packing ring (6) and clamp body (2), and described clamping body (3), packing ring (6) and clamp body (2) are closely posted by connecting and are integrated, clamping body (3) is threaded with drive sleeve (1), the first piezoelectric stack (4) is by two clamping bodies (3) axial grip, clamp body (2) is inserted in drive sleeve (1), on the inner surface of each clamp body (2) along circumferential uniform three flexible bodies (12) that are provided with of clamp body (2), three flexible bodies (12) are made into integration with corresponding clamp body (2), the notch of each flexible body (12) points to the inner surface of corresponding clamp body (2), in the groove of each flexible body (12), be fixed with second piezoelectric stack (10), the length direction of the second piezoelectric stack (10) is axial vertical with clamp body (2), guide rail (11) stretches in drive sleeve (1) and passes the centre bore of the first piezoelectric stack (4), the centre bore of the centre bore of two clamping bodies (3) and two packing rings (6), and the bottom of three flexible bodies (12) on each clamp body (2) and guide rail (11) interference fit.
2. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 1, is characterized in that: clamp body (2) and drive sleeve (1) matched in clearance.
3. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 1 and 2, is characterized in that: packing ring (6) and drive sleeve (1) matched in clearance.
4. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 1, is characterized in that: the bottom of three flexible bodies (12) on each clamp body (2) and the contact-making surface of guide rail (11) are plane or V-arrangement face.
5. according to a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors described in claim 1,2 or 4, it is characterized in that: the middle part of the lateral surface of described drive sleeve (1) is circumferentially processed with a circle groove (1-1) along it, the bottom of groove (1-1) circumferentially offers six oblong openings (1-2) along it, drive sleeve (1) medial surface that is positioned at groove (1-1) both sides is mainly comprised of inner threaded surface and light face respectively from inside to outside, and described drive sleeve 1 is made by duralumin, hard alumin ium alloy or spring steel.
6. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 5, it is characterized in that: each clamping body (3) comprises large-diameter hollow cylinder (3-1) and minor diameter hollow cylinder (3-2), the setting that large diameter cylinder (3-1) and small-diameter circular cylinder (3-2) are coaxial is also made into integration, the lateral surface threading of large-diameter hollow cylinder (3-1), the first piezoelectric stack (4) is sleeved on minor diameter hollow cylinder (3-2), the first piezoelectric stack (4) clamps by two the large-diameter hollow cylinders (3-1) that are threaded with drive sleeve (1).
7. according to a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors described in claim 1,2,4 or 6, it is characterized in that: described driving mechanism (A) also comprises six the first screws (7), the clamping body (3), packing ring (6) and clamp body (2) three that are arranged in the both sides, middle part in drive sleeve (1) are closely posted by connecting and are integrated by three the first screws (7).
8. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 7, it is characterized in that: described every cover clamping institution (B) also comprises three the second screws (8) and three pads (9), in the groove of each flexible body (12), be fixedly mounted with pad (9), pad (9) reclines mutually with one end of the second piezoelectric stack (10), and each second piezoelectric stack (10) compresses by leaning the second screw (8) upper at pad (9) and that be threaded with clamp body (2).
9. according to a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors described in claim 1,2,4,6 or 8, it is characterized in that: described driving mechanism (A) also comprises two the 3rd screws (5), each clamping body (3) is by the 3rd screw (5) radial location and the axial locking being threaded with drive sleeve (1).
10. a kind of cylindrical clamp passively formula piezoelectricity wriggling linear electric motors according to claim 6, is characterized in that: described clamp body (2) and three flexible bodies (12) are made by duralumin, hard alumin ium alloy or spring steel.
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| CN109347363A (en) * | 2018-11-16 | 2019-02-15 | 哈尔滨工业大学 | A kind of creeping motion type flexible hinge combination piezoelectric actuator |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194813B1 (en) * | 1999-09-29 | 2001-02-27 | Jacob Israelachvili | Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications |
| CN101207344A (en) * | 2007-11-13 | 2008-06-25 | 哈尔滨工业大学深圳研究生院 | Creeping motion type piezoelectricity straight line driver |
| WO2012047939A2 (en) * | 2010-10-04 | 2012-04-12 | Ind Platforms Llc | Expandable devices, rail systems, and motorized devices |
| CN102664553A (en) * | 2012-05-11 | 2012-09-12 | 哈尔滨工业大学 | Peristaltic-type passive clamping piezoelectric driver |
-
2014
- 2014-02-14 CN CN201410051781.7A patent/CN103762887B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6194813B1 (en) * | 1999-09-29 | 2001-02-27 | Jacob Israelachvili | Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications |
| CN101207344A (en) * | 2007-11-13 | 2008-06-25 | 哈尔滨工业大学深圳研究生院 | Creeping motion type piezoelectricity straight line driver |
| WO2012047939A2 (en) * | 2010-10-04 | 2012-04-12 | Ind Platforms Llc | Expandable devices, rail systems, and motorized devices |
| CN102664553A (en) * | 2012-05-11 | 2012-09-12 | 哈尔滨工业大学 | Peristaltic-type passive clamping piezoelectric driver |
Cited By (12)
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|---|---|---|---|---|
| CN104167953A (en) * | 2014-08-26 | 2014-11-26 | 哈尔滨工业大学 | Inner driving type passive clamping piezoelectric actuator |
| CN104167953B (en) * | 2014-08-26 | 2016-06-15 | 哈尔滨工业大学 | Drive-type clamp passively piezoelectric actuator in a kind of |
| CN104734559A (en) * | 2015-03-17 | 2015-06-24 | 西安交通大学 | Marching type piezoceramic actuator and method having displacement measurement function and large push-pull force |
| CN105416614A (en) * | 2016-01-08 | 2016-03-23 | 哈尔滨工业大学 | Piezoelectric driving type sleeve folding and unfolding mechanism |
| CN105450083A (en) * | 2016-01-08 | 2016-03-30 | 哈尔滨工业大学 | Multi-feet peristaltic drive type sleeve folding and unfolding mechanism |
| CN105610345A (en) * | 2016-01-08 | 2016-05-25 | 哈尔滨工业大学 | Two-degree-of-freedom sleeve folding-unfolding mechanism adopting single piezoelectric vibrator |
| CN105450083B (en) * | 2016-01-08 | 2018-03-16 | 哈尔滨工业大学 | The driving sleeve folding and unfolding mechanism of polypody wriggling |
| CN109347363A (en) * | 2018-11-16 | 2019-02-15 | 哈尔滨工业大学 | A kind of creeping motion type flexible hinge combination piezoelectric actuator |
| CN110138265A (en) * | 2019-04-30 | 2019-08-16 | 宁波大学 | A kind of self-centering type piezoelectricity looper linear motor |
| CN110086374A (en) * | 2019-05-07 | 2019-08-02 | 江西理工大学 | A kind of Inchworm type precision rotation microdrive based on compliant mechanism |
| CN112271952A (en) * | 2020-09-29 | 2021-01-26 | 北京空间飞行器总体设计部 | Inchworm type piezoelectric driving mechanism with compact structure |
| CN112271952B (en) * | 2020-09-29 | 2021-06-29 | 北京空间飞行器总体设计部 | Inchworm type piezoelectric driving mechanism |
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