CN103616531B - Based on the three-axis piezoresistance formula acceleration transducer that two-way circulation electric bridge detects - Google Patents
Based on the three-axis piezoresistance formula acceleration transducer that two-way circulation electric bridge detects Download PDFInfo
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- CN103616531B CN103616531B CN201310669325.4A CN201310669325A CN103616531B CN 103616531 B CN103616531 B CN 103616531B CN 201310669325 A CN201310669325 A CN 201310669325A CN 103616531 B CN103616531 B CN 103616531B
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- electric bridge
- circulation electric
- testing circuit
- elastic cantilever
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Abstract
The present invention is a kind of three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge, this detection method of this sensor has been broken common three-axis piezoresistance formula acceleration transducer and has at least been used 12 voltage dependent resistor (VDR)s, every 4 connect into " unidirectional detection " rule that a Wheatstone bridge detects a direction output signal, propose the cycle detection bridge method that a kind of output signal to 3-axis acceleration sensor three directions carries out detecting in real time, this cycle detection electric bridge shares brachium pontis by 8 voltage dependent resistor (VDR)s and forms.The unidirectional detection method of the two-way circulation electric bridge detection method and ordinary sensors that contrast sensor of the present invention can draw, adopts two-way circulation electric bridge detection method effectively to improve the sensitivity of 3-axis acceleration sensor, reduces its transverse coupling simultaneously.
Description
Technical field
The present invention relates to a kind of MEMS sensor, specifically a kind of three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge.
Background technology
Based on the silicon micro mechanical sensor of MEMS technology with little, lightweight, the anti-intense radiation of its volume, be easy to the parent that the advantages such as mass production are subject to people and look at.Especially silicon micro-acceleration sensor is as a kind of inertia device, has been widely used in the daily life fields such as space flight and aviation, control automatically, vibration-testing, biology, chemistry and medical analysis.
Silicon micromachined accelerometer is divided into pressure resistance type because its sensitive mechanism is different, piezoelectric type, condenser type etc., wherein little, low in energy consumption, the advantages of simple structure and simple of piezoresistance type acceleration sensor nonlinearity has very large attractive force to researchist, but highly sensitive not as piezoelectric type and capacitance acceleration transducer of its sensitivity.Existing three-axis piezoresistance formula acceleration transducer, the detection of its output signal usually adopts and at least uses 12 voltage dependent resistor (VDR)s, every 4 connect into " unidirectional detection " method that a Wheatstone bridge detects a direction output signal, adopt its detection sensitivity of three-axis piezoresistance formula acceleration transducer of this kind of detection method lower, and have higher transverse coupling.
Summary of the invention
The object of the invention is to solve above-mentioned problems of the prior art, and a kind of three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge is provided.
The present invention is achieved by the following technical solutions:
A kind of three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge, comprise supporting frame, elastic cantilever and propped up the centroplasm gauge block being suspended from supporting frame center by elastic cantilever, four limits of centroplasm gauge block are fixed respectively by two parallel elastic cantilevers and supporting frame, the lower surface of the lower surface overcenter mass of supporting frame, and supporting frame lower surface is bonded with silicon pedestal by silicon-silicon bond technology of closing; On eight elastic cantilevers of connection supporting frame and centroplasm gauge block, symmetry is evenly equipped with the equal strain voltage dependent resistor (VDR) of 16 resistances: R
x11, R
x12, R
x13, R
x14, R
x21, R
x22, R
x23, R
x24, R
y11, R
y12, R
y13, R
y14, R
y21, R
y22, R
y23, R
y24, wherein, R
x13and R
x21be arranged on X-direction four upper left elastic cantilevers of elastic cantilever, R
x14and R
x22be arranged on X-direction four top-right elastic cantilevers of elastic cantilever, R
x23and R
x11be arranged on the elastic cantilever of X-direction four elastic cantilever lower lefts, R
x24and R
x12be arranged on X-direction four bottom-right elastic cantilevers of elastic cantilever, R
y23and R
y11be arranged on Y-direction four upper left elastic cantilevers of elastic cantilever, R
y13and R
y21be arranged on Y-direction four top-right elastic cantilevers of elastic cantilever, R
y24and R
y12be arranged on the elastic cantilever of Y-direction four elastic cantilever lower lefts, R
y14and R
y22be arranged on Y-direction four bottom-right elastic cantilevers of elastic cantilever; Two voltage dependent resistor (VDR)s on every root elastic cantilever lay respectively at the two ends of elastic cantilever, wherein, and R
x13, R
x14, R
x23, R
x24, R
y23, R
y13, R
y24, R
y14be positioned at one end near centroplasm gauge block on elastic cantilever, R
x21, R
x22, R
x11, R
x12, R
y11, R
y21, R
y12, R
y22be positioned at one end near supporting frame on elastic cantilever; R
x11, R
x12, R
x13, R
x14, R
y11, R
y12, R
y13, R
y14eight strain voltage dependent resistor (VDR)s connect into first via circulation electric bridge testing circuit, wherein, and R
x11and R
x13be connected into the first branch road up and down, R
x12and R
x14be connected into the second branch road up and down, R
y14and R
y12be connected into the 3rd branch road up and down, R
y13and R
y11be connected into the 4th branch road up and down, first branch road, the second branch road, to be connected in parallel between the 3rd branch road and the 4th branch road, first branch road, the second branch road, the 3rd branch road and the upper end of the 4th branch road are connected an input end Vcc for first via circulation electric bridge testing circuit jointly, first branch road, the second branch road, the 3rd branch road and the lower end of the 4th branch road are connected another input end GND for first via circulation electric bridge testing circuit jointly, the R of the first branch road
x11, R
x13between and the R of the second branch road
x12, R
x14between be first output terminal X of first via circulation electric bridge testing circuit
1, the R of the second branch road
x12, R
x14between and the R of the 3rd branch road
y14, R
y12between be second output terminal Z of first via circulation electric bridge testing circuit
11, the R of the 3rd branch road
y14, R
y12between and the R of the 4th branch road
y13, R
y11between be the 3rd output terminal Y of first via circulation electric bridge testing circuit
1, the R of the 4th branch road
y13, R
y11between and the R of the first branch road
x11, R
x13between be the 4th output terminal Z of first via circulation electric bridge testing circuit
12; R
x21, R
x22, R
x23, R
x24, R
y21, R
y22, R
y23, R
y24eight strain voltage dependent resistor (VDR)s connect into the second tunnel circulation electric bridge testing circuit, wherein, and R
x21and R
x23be connected into the 5th branch road up and down, R
x22and R
x24be connected into the 6th branch road up and down, R
y24and R
y22be connected into the 7th branch road up and down, R
y23and R
y21be connected into the 8th branch road up and down, 5th branch road, the 6th branch road, to be connected in parallel between the 7th branch road and the 8th branch road, it is an input end Vcc of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the upper end of the 8th branch road are connected jointly, it is another input end GND of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the lower end of the 8th branch road are connected jointly, the R of the 5th branch road
x21, R
x23between and the R of the 6th branch road
x22, R
x24between be first output terminal X of the second tunnel circulation electric bridge testing circuit
2, the R of the 6th branch road
x22, R
x24between and the R of the 7th branch road
y24, R
y22between be second output terminal Z of the second tunnel circulation electric bridge testing circuit
21, the R of the 7th branch road
y24, R
y22between and the R of the 8th branch road
y23, R
y21between be the 3rd output terminal Y of the second tunnel circulation electric bridge testing circuit
2, the R of the 8th branch road
y23, R
y21between and the R of the 5th branch road
x21, R
x23between be the 4th output terminal Z of the second tunnel circulation electric bridge testing circuit
22.
In first via circulation electric bridge testing circuit, four strain voltage dependent resistor (VDR) R
x11, R
x12, R
x13, R
x14form an electric bridge, be used for detecting the output voltage V of X-direction
outx1; Four strain voltage dependent resistor (VDR) R
y11, R
y12, R
y13, R
y14form an electric bridge, be used for detecting the output voltage V of Y-direction
outy1; Four strain voltage dependent resistor (VDR) R
x12, R
y14, R
y12, R
x14form an electric bridge, be used for detecting the output voltage V of Z-direction
outz11; Four strain voltage dependent resistor (VDR) R
x11, R
y13, R
y11, R
x13form an electric bridge, be used for detecting the output voltage V of Z-direction
outz11, and the V obtained after these two output voltage superpositions
outz11+V
outz11=V
outz1 is exactly the output voltage of Z-direction.
In the second tunnel circulation electric bridge testing circuit, four strain voltage dependent resistor (VDR) R
x21, R
x22, R
x23, R
x24form an electric bridge, be used for detecting the output voltage V of X-direction
outx2; Four strain voltage dependent resistor (VDR) R
y21, R
y22, R
y23, R
y24form an electric bridge, be used for detecting the output voltage V of Y-direction
outy2; Four strain voltage dependent resistor (VDR) R
x22, R
y24, R
y22, R
x24form an electric bridge, be used for detecting the output voltage V of Z-direction
outz21; Four strain voltage dependent resistor (VDR) R
x21, R
y23, R
y21, R
x23form an electric bridge, be used for detecting the output voltage V of Z-direction
outz22, and the V obtained after these two output voltage superpositions
outz21+V
outz22=V
outz2 is exactly the output voltage of Z-direction.
Sensor of the present invention is that 16 voltage dependent resistor (VDR)s on 8 beams of the 3-axis acceleration sensor of " 8 beams-mass " structure are divided into two groups, 8 voltage dependent resistor (VDR)s of each group form a cycle detection electric bridge (first and second road circulation electric bridge testing circuit), the output signal of two cycle detection electric bridge X, Y, Z-direction is connected anti-phase adding circuit respectively by LM224 amplifier integrated chip superpose, as final output signal.
For the 3-axis acceleration sensor of " 8 beams-mass " structure, from 16 voltage dependent resistor (VDR)s, reasonably select 8 voltage dependent resistor (VDR)s to form a single channel cycle detection electric bridge (first and second road circulation electric bridge testing circuit), just can realize the detection to 3-axis acceleration sensor three direction output signals.If 16 voltage dependent resistor (VDR)s are divided into two groups, form a two-way cycle detection electric bridge (first via circulation electric bridge testing circuit+the second tunnel circulation electric bridge testing circuit), output voltage by two single channel cycle detection electric bridge X, Y, Z-direction is added respectively as final output voltage, adopts the output voltage of this two-way cycle detection electric bridge to be 2 times of single channel cycle detection bridge output voltage.Compared with " unidirectional detection method ", the sensitivity that Two-way Cycle electric bridge detection method can improve sensor reduces its transverse coupling simultaneously.
In order to verify that two-way circulation electric bridge detection method of the present invention is improving the superiority in 3-axis acceleration sensor sensitivity, Ansys finite element emulation software is adopted to carry out model foundation and force analysis to 3-axis acceleration sensor, the acceleration load of 1g is applied respectively in acceleration transducer three directions, obtain the deformation map of sensor construction, as Fig. 5,6,7.By defining path on a cantilever beam, extracting path data, analyzing data and finding out the position that on semi-girder, two voltage dependent resistor (VDR) variable quantities are equal, being the physical location of voltage dependent resistor (VDR) on processed 3-axis acceleration sensor semi-girder.Voltage dependent resistor (VDR) position on semi-girder is forced through path extraction, then through calculating sensitivity and the transverse coupling of acceleration transducer.Table 1 is sensitivity and the transverse coupling of the acceleration transducer adopting circulation electric bridge detection method.
Table 1
The simulation result of analytical table 1 can draw, adopt single channel (first via circulation electric bridge testing circuit or the second tunnel circulation electric bridge testing circuit) cycle detection electric bridge can complete the detection outputed signal 3-axis acceleration sensor X, Y, Z tri-directions, and the sensitivity of X and Y-direction is almost equal, the sensitivity of Z-direction is about 8.8 times of X and Y-direction sensitivity.The sensitivity in three directions of circulation electric bridge detection method improves 1 times, and transverse coupling degree is less than the greater in single channel circulation electric bridge detection method in respective direction to adopt two-way circulation electric bridge detection method to compare single channel (first via circulation electric bridge testing circuit or the second tunnel circulation electric bridge testing circuit).Therefore, it is higher that sensor of the present invention detects gained sensitivity, and have lower transverse coupling.
Accompanying drawing explanation
Fig. 1 is the structural representation of sensor of the present invention.
Fig. 2 is the distribution schematic diagram of voltage dependent resistor (VDR) and line in sensor of the present invention.
Fig. 3 is first via circulation electric bridge testing circuit in sensor of the present invention.
Fig. 4 is the second tunnel circulation electric bridge testing circuit in sensor of the present invention.
Fig. 5 is the stress and deformation figure of sensor of the present invention when X-direction is subject to independent acceleration load.
Fig. 6 is the stress and deformation figure of sensor of the present invention when being subject to independent acceleration load in the Y direction.
Fig. 7 is the stress and deformation figure of sensor of the present invention when Z-direction is subject to independent acceleration load.
In figure: 1-supporting frame, 2-elastic cantilever, 3-centroplasm gauge block.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described:
As shown in Figures 1 to 4, a kind of three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge, comprise supporting frame 1, elastic cantilever 2 and be suspended from the centroplasm gauge block 3 of supporting frame 1 center by elastic cantilever 2, four limits of centroplasm gauge block 3 are fixed with supporting frame 1 respectively by two parallel elastic cantilevers 2, the lower surface of the lower surface overcenter mass 3 of supporting frame 1, and supporting frame 1 lower surface is bonded with silicon pedestal by silicon-silicon bond technology of closing, on eight elastic cantilevers 2 of connection supporting frame 1 and centroplasm gauge block 3, symmetry is evenly equipped with the equal strain voltage dependent resistor (VDR) of 16 resistances: R
x11, R
x12, R
x13, R
x14, R
x21, R
x22, R
x23, R
x24, R
y11, R
y12, R
y13, R
y14, R
y21, R
y22, R
y23, R
y24, wherein, R
x13and R
x21be arranged on the upper left elastic cantilever 2 of X-direction four elastic cantilevers 2, R
x14and R
x22be arranged on the top-right elastic cantilever 2 of X-direction four elastic cantilevers 2, R
x23and R
x11be arranged on the elastic cantilever 2 of X-direction four elastic cantilever 2 lower lefts, R
x24and R
x12be arranged on the bottom-right elastic cantilever 2 of X-direction four elastic cantilevers 2, R
y23and R
y11be arranged on the upper left elastic cantilever 2 of Y-direction four elastic cantilevers 2, R
y13and R
y21be arranged on the top-right elastic cantilever 2 of Y-direction four elastic cantilevers 2, R
y24and R
y12be arranged on the elastic cantilever 2 of Y-direction four elastic cantilever 2 lower lefts, R
y14and R
y22be arranged on the bottom-right elastic cantilever 2 of Y-direction four elastic cantilevers 2, two voltage dependent resistor (VDR)s on every root elastic cantilever 2 lay respectively at the two ends of elastic cantilever 2, wherein, and R
x13, R
x14, R
x23, R
x24, R
y23, R
y13, R
y24, R
y14be positioned at one end near centroplasm gauge block 3 on elastic cantilever 2, R
x21, R
x22, R
x11, R
x12, R
y11, R
y21, R
y12, R
y22be positioned at one end near supporting frame 1 on elastic cantilever 2, R
x11, R
x12, R
x13, R
x14, R
y11, R
y12, R
y13, R
y14eight strain voltage dependent resistor (VDR)s connect into first via circulation electric bridge testing circuit, wherein, and R
x11and R
x13be connected into the first branch road up and down, R
x12and R
x14be connected into the second branch road up and down, R
y14and R
y12be connected into the 3rd branch road up and down, R
y13and R
y11be connected into the 4th branch road up and down, first branch road, the second branch road, to be connected in parallel between the 3rd branch road and the 4th branch road, first branch road, the second branch road, the 3rd branch road and the upper end of the 4th branch road are connected an input end Vcc for first via circulation electric bridge testing circuit jointly, first branch road, the second branch road, the 3rd branch road and the lower end of the 4th branch road are connected another input end GND for first via circulation electric bridge testing circuit jointly, the R of the first branch road
x11, R
x13between and the R of the second branch road
x12, R
x14between be first output terminal X of first via circulation electric bridge testing circuit
1, the R of the second branch road
x12, R
x14between and the R of the 3rd branch road
y14, R
y12between be second output terminal Z of first via circulation electric bridge testing circuit
11, the R of the 3rd branch road
y14, R
y12between and the R of the 4th branch road
y13, R
y11between be the 3rd output terminal Y of first via circulation electric bridge testing circuit
1, the R of the 4th branch road
y13, R
y11between and the R of the first branch road
x11, R
x13between be the 4th output terminal Z of first via circulation electric bridge testing circuit
12, R
x21, R
x22, R
x23, R
x24, R
y21, R
y22, R
y23, R
y24eight strain voltage dependent resistor (VDR)s connect into the second tunnel circulation electric bridge testing circuit, wherein, and R
x21and R
x23be connected into the 5th branch road up and down, R
x22and R
x24be connected into the 6th branch road up and down, R
y24and R
y22be connected into the 7th branch road up and down, R
y23and R
y21be connected into the 8th branch road up and down, 5th branch road, the 6th branch road, to be connected in parallel between the 7th branch road and the 8th branch road, it is an input end Vcc of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the upper end of the 8th branch road are connected jointly, it is another input end GND of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the lower end of the 8th branch road are connected jointly, the R of the 5th branch road
x21, R
x23between and the R of the 6th branch road
x22, R
x24between be first output terminal X of the second tunnel circulation electric bridge testing circuit
2, the R of the 6th branch road
x22, R
x24between and the R of the 7th branch road
y24, R
y22between be second output terminal Z of the second tunnel circulation electric bridge testing circuit
21, the R of the 7th branch road
y24, R
y22between and the R of the 8th branch road
y23, R
y21between be the 3rd output terminal Y of the second tunnel circulation electric bridge testing circuit
2, the R of the 8th branch road
y23, R
y21between and the R of the 5th branch road
x21, R
x23between be the 4th output terminal Z of the second tunnel circulation electric bridge testing circuit
22.
When specifically detecting, the present invention is the first via circulated electric bridge testing circuit and the superposition of the second tunnel circulation electric bridge testing circuit, composition two-way circulation electric bridge testing circuit, the output voltage by two single channel cycle detection electric bridge X, Y, Z-direction superposes respectively and obtains final output voltage.
Claims (1)
1. the three-axis piezoresistance formula acceleration transducer detected based on two-way circulation electric bridge, comprise supporting frame (1), elastic cantilever (2) and to be suspended from the centroplasm gauge block (3) of supporting frame (1) center by elastic cantilever (2), four limits of centroplasm gauge block (3) are fixed with supporting frame (1) respectively by two parallel elastic cantilevers (2), the lower surface of the lower surface overcenter mass (3) of supporting frame (1), and supporting frame (1) lower surface is bonded with silicon pedestal by silicon-silicon bond technology of closing, it is characterized in that: the upper symmetry of eight elastic cantilevers (2) connecting supporting frame (1) and centroplasm gauge block (3) is evenly equipped with the equal strain voltage dependent resistor (VDR) of 16 resistances: R
x11, R
x12, R
x13, R
x14, R
x21, R
x22, R
x23, R
x24, R
y11, R
y12, R
y13, R
y14, R
y21, R
y22, R
y23, R
y24, wherein, R
x13and R
x21be arranged on the X-direction four upper left elastic cantilever of elastic cantilevers (2) (2), R
x14and R
x22be arranged on the X-direction four top-right elastic cantilever of elastic cantilevers (2) (2), R
x23and R
x11be arranged on the elastic cantilever (2) of X-direction four elastic cantilever (2) lower lefts, R
x24and R
x12be arranged on the X-direction four bottom-right elastic cantilever of elastic cantilevers (2) (2), R
y23and R
y11be arranged on the Y-direction four upper left elastic cantilever of elastic cantilevers (2) (2), R
y13and R
y21be arranged on the Y-direction four top-right elastic cantilever of elastic cantilevers (2) (2), R
y24and R
y12be arranged on the elastic cantilever (2) of Y-direction four elastic cantilever (2) lower lefts, R
y14and R
y22be arranged on the Y-direction four bottom-right elastic cantilever of elastic cantilevers (2) (2), two voltage dependent resistor (VDR)s on every root elastic cantilever (2) lay respectively at the two ends of elastic cantilever (2), wherein, and R
x13, R
x14, R
x23, R
x24, R
y23, R
y13, R
y24, R
y14be positioned at the upper one end near centroplasm gauge block (3) of elastic cantilever (2), R
x21, R
x22, R
x11, R
x12, R
y11, R
y21, R
y12, R
y22be positioned at the upper one end near supporting frame (1) of elastic cantilever (2), R
x11, R
x12, R
x13, R
x14, R
y11, R
y12, R
y13, R
y14eight strain voltage dependent resistor (VDR)s connect into first via circulation electric bridge testing circuit, wherein, and R
x11and R
x13be connected into the first branch road up and down, R
x12and R
x14be connected into the second branch road up and down, R
y14and R
y12be connected into the 3rd branch road up and down, R
y13and R
y11be connected into the 4th branch road up and down, first branch road, the second branch road, to be connected in parallel between the 3rd branch road and the 4th branch road, first branch road, the second branch road, the 3rd branch road and the upper end of the 4th branch road are connected an input end Vcc for first via circulation electric bridge testing circuit jointly, first branch road, the second branch road, the 3rd branch road and the lower end of the 4th branch road are connected another input end GND for first via circulation electric bridge testing circuit jointly, the R of the first branch road
x11, R
x13between and the R of the second branch road
x12, R
x14between be first output terminal X of first via circulation electric bridge testing circuit
1, the R of the second branch road
x12, R
x14between and the R of the 3rd branch road
y14, R
y12between be second output terminal Z of first via circulation electric bridge testing circuit
11, the R of the 3rd branch road
y14, R
y12between and the R of the 4th branch road
y13, R
y11between be the 3rd output terminal Y of first via circulation electric bridge testing circuit
1, the R of the 4th branch road
y13, R
y11between and the R of the first branch road
x11, R
x13between be the 4th output terminal Z of first via circulation electric bridge testing circuit
12, R
x21, R
x22, R
x23, R
x24, R
y21, R
y22, R
y23, R
y24eight strain voltage dependent resistor (VDR)s connect into the second tunnel circulation electric bridge testing circuit, wherein, and R
x21and R
x23be connected into the 5th branch road up and down, R
x22and R
x24be connected into the 6th branch road up and down, R
y24and R
y22be connected into the 7th branch road up and down, R
y23and R
y21be connected into the 8th branch road up and down, 5th branch road, the 6th branch road, to be connected in parallel between the 7th branch road and the 8th branch road, it is an input end Vcc of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the upper end of the 8th branch road are connected jointly, it is another input end GND of the second tunnel circulation electric bridge testing circuit that 5th branch road, the 6th branch road, the 7th branch road and the lower end of the 8th branch road are connected jointly, the R of the 5th branch road
x21, R
x23between and the R of the 6th branch road
x22, R
x24between be first output terminal X of the second tunnel circulation electric bridge testing circuit
2, the R of the 6th branch road
x22, R
x24between and the R of the 7th branch road
y24, R
y22between be second output terminal Z of the second tunnel circulation electric bridge testing circuit
21, the R of the 7th branch road
y24, R
y22between and the R of the 8th branch road
y23, R
y21between be the 3rd output terminal Y of the second tunnel circulation electric bridge testing circuit
2, the R of the 8th branch road
y23, R
y21between and the R of the 5th branch road
x21, R
x23between be the 4th output terminal Z of the second tunnel circulation electric bridge testing circuit
22.
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| CN107271720B (en) * | 2017-05-18 | 2019-04-19 | 中北大学 | Eight beam 3-axis acceleration sensors of low inter-axis coupling degree |
| CN107290567A (en) * | 2017-05-18 | 2017-10-24 | 中北大学 | Pressure resistance type 3-axis acceleration sensor and preparation method with anti-overload ability |
| CN116143062B (en) * | 2023-04-21 | 2023-06-23 | 中北大学 | H-shaped monocrystalline film piezoelectric vibration sensor and preparation method thereof |
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|---|---|---|---|---|
| US6895817B2 (en) * | 2003-07-02 | 2005-05-24 | The Boeing Company | Dual bridge angular accelerometer |
| CN101042411A (en) * | 2007-04-19 | 2007-09-26 | 中北大学 | Three-axis piezoresistance micro-accelerometer |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
-
2013
- 2013-12-11 CN CN201310669325.4A patent/CN103616531B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6895817B2 (en) * | 2003-07-02 | 2005-05-24 | The Boeing Company | Dual bridge angular accelerometer |
| CN101042411A (en) * | 2007-04-19 | 2007-09-26 | 中北大学 | Three-axis piezoresistance micro-accelerometer |
| CN101430340A (en) * | 2008-12-06 | 2009-05-13 | 中北大学 | Silicon micro-piezoresistive accelerometer capable of reducing temperature excursion |
Non-Patent Citations (1)
| Title |
|---|
| MEMS压阻式加速度传感器的优化设计;杜春晖等;《压电与声光》;20121231;第34卷(第6期);848-852 * |
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| CN103616531A (en) | 2014-03-05 |
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