CN103575657A - Optical measuring device - Google Patents
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- CN103575657A CN103575657A CN201310237895.6A CN201310237895A CN103575657A CN 103575657 A CN103575657 A CN 103575657A CN 201310237895 A CN201310237895 A CN 201310237895A CN 103575657 A CN103575657 A CN 103575657A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 189
- 238000005259 measurement Methods 0.000 claims abstract description 77
- 238000012545 processing Methods 0.000 claims abstract description 16
- 239000000084 colloidal system Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000000741 silica gel Substances 0.000 claims description 2
- 229910002027 silica gel Inorganic materials 0.000 claims description 2
- 230000035515 penetration Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 14
- 239000012530 fluid Substances 0.000 description 6
- 230000001066 destructive effect Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004441 surface measurement Methods 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 238000013461 design Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
The invention provides an optical measuring device for measuring the surface characteristics of an object, which comprises an optical penetration module, an optical measuring module and a data processing module. The optical penetration module is arranged in front of the object and has at least one optical coefficient. The optical measurement module transmits at least one optical signal to penetrate through the optical penetration module and emit to the surface of the object, the optical signal reflected by the surface penetrates through the optical penetration module to form a feedback signal, and the optical measurement module receives the feedback signal. The data processing module is coupled to the optical measurement module, wherein the data processing module obtains the surface characteristic according to the feedback signal and at least one optical coefficient.
Description
Technical field
The invention relates to a kind of optical measuring device; Particularly, the invention relates to a kind of optical measuring device that can be applied to tool highly reflective object and reduce measuring error.
Background technology
It is that not destroy determinand be object that non-destructive detects (Nondestructive Testing, NDT), by medium (Medium) inspected object such as sound, electric wave, magnetic force, light.In addition, non-destructive detection has advantages of does not directly touch determinand, is not only applied to building and accurate industry, be widely used by raw doctor field.Generally speaking, non-destructive detects and comprises ultrasonic detection, the detection of magnetic grain, infrared detection, detections of radar, optical detection or other detections.In fact, part detection mode is still perfect not to the utmost, similarly is that vectorial capacity is not enough, accuracy is not high, sensing range is limited etc.
In actual conditions, optical detection has expansionary, is enough to make up above-mentioned shortcoming.In addition, research staff constantly improves optical detection apparatus, and expectation promotes and detects quality, and then expands fields of measurement.Further and opinion, optical detection except have that non-destructive detects and the instant advantage of measuring, have more standby pinpoint accuracy.Particularly, it is to be existing common method that optical interference detects, by optical path difference characteristic to carry out various precision measurements.
Yet, when the former optical interference pick-up unit detecting for raw doctor is used for industrial circle, because determinand has high reflectance, is difficult for printing opacity or completely light tight, often improve the degree of difficulty of measuring, produce larger measuring error.How comprehensive above-mentioned factors, design with pinpoint accuracy and be applicable to the optical detection apparatus of various determinands, especially can measure the optical detection apparatus of tool high reflectance determinand, is main contributions of the present invention.
Summary of the invention
Because the problem of above-mentioned prior art, the present invention proposes a kind of optical measuring device that can be used in metal object and promote detection yield.
In on the one hand, the invention provides a kind of optical measuring device that optics penetrates module that has, can reduce measuring error.
In on the one hand, the invention provides a kind of optical measuring device of capable of regulating measurement pattern, to promote detection yield.
In on the other hand, the invention provides a kind of optical measuring device that reduces light reflectivity, can measure high reflectance determinand.
An aspect of of the present present invention is to provide a kind of optical measuring device, for measuring the character of surface of object, especially comprises the object on highly reflective surface.Optical measuring device comprises optics and penetrates module, optical measurement module and data processing module.
It should be noted that, optics penetrates module and is arranged at the place ahead of object and has at least one optical coefficient.Optical measurement module transmits the surface that at least one light signal penetrates optics spigot die piece and is incident upon object, and at least one light signal after surface reflection penetrates optics spigot die piece and forms feedback signal, optical measurement module reception feedback signal.Data processing module is coupled to optical measurement module, and wherein data processing module obtains character of surface according to feedback signal and at least one optical coefficient.
In actual applications, optical measuring device further comprises control module, and wherein control module is coupled to data processing module and optics penetrates module, according to character of surface, determines measurement pattern.In other words, the surface appearance that control module can be looked object changes the mode of measuring, to determine optimized measurement pattern.It should be noted that optics penetrates module and has different optical coefficients, and control module can be exported suitable measurement pattern according to known optical coefficient and the feedback signal recording.
Compared to prior art, optical measuring device according to the present invention is to utilize optics to penetrate module to have at least one optical coefficient, and control module comparison feedback signal and optical coefficient are to obtain character of surface.In addition, optical measuring device penetrates module controls intensity of reflected light by optics, therefore can measure the determinand on tool highly reflective surface.In actual applications, optical measuring device, according to character of surface, not only can optionally change measurement pattern, effectively carries out optimized metering system, therefore can measure the body surface of various reflectivity.
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Accompanying drawing explanation
Fig. 1 is the embodiment schematic diagram of optical measuring device of the present invention;
Fig. 2 is the embodiment schematic diagram of optical measurement module of the present invention;
Fig. 3 is another embodiment schematic diagram of optical measuring device of the present invention;
Fig. 4 is another embodiment schematic diagram of optical measuring device of the present invention;
Fig. 5 is another embodiment schematic diagram that optics of the present invention penetrates module;
Fig. 6 is another embodiment schematic diagram of optical measuring device of the present invention;
Fig. 7 is another embodiment schematic diagram of optical measuring device of the present invention.
Main element symbol description:
1,1A～1D: optical measuring device 700: rotation axis
2: object
10,10A: optics penetrates module
20: optical measurement module
22: surface
30: data processing module
40: control module
50: light signal
50A: the first light signal
50B: the second light signal
51B: the second optical path difference signal
60: mobile module
70: rotating module
110: optical layers
120A: fluid optical layers
120B: colloid optics layer
120C: Film Optics layer
210: spectrophotometric unit
220: optical path difference unit
Embodiment
According to a specific embodiment of the present invention, provide a kind of optical measuring device, for measuring the character of surface of object.In this embodiment, optical measuring device can be optical surface measurement mechanism, especially optical interdferometer surface measurement device.
Please refer to Fig. 1, Fig. 1 is the embodiment schematic diagram of optical measuring device 1 of the present invention.As shown in Figure 1, optical measuring device 1 comprises optics and penetrates module 10, optical measurement module 20 and data processing module 30.In this embodiment, optics penetrates module 10 and is arranged at the place ahead of object 2 and has at least one optical coefficient.It should be noted that, object 2 is measuring object.As for the kind of object 2, can be arbitrary objects, especially comprise the object on highly reflective surface, comprise metal, biosome, plant, biologic-organ, there is no specific restriction.In other words, optics penetrates the reflected light signal intensity that module 10 can reduce object 2, therefore can measure the character of surface on highly reflective surface.In actual conditions, it is better adjacent or be in close proximity to the surface 22 of object 2 that optics penetrates the setting position of module 10, but not as limit.It should be noted that, optics penetrates the better translucent material that is selected from of module 10, including but not limited to the combination in any of acrylic, plastics, glass, silica gel, photoresist and above-mentioned material.In addition, at least one optical coefficient comprises penetrating coefficient, absorption coefficient, reflection coefficient or its combination.For example, if penetrating coefficient, it is better between 0.1 to 0.75 between 0 to 0.99, but not as limit.
In actual applications, optical measurement module 20 transmits the surface 22 that at least one light signal penetrates optics spigot die piece 10 and is incident upon object 2, and at least one light signal after 22 reflections of surface penetrates optics spigot die piece 10 and forms feedback signal, and optical measurement module 20 receives feedback signal.As shown in Figure 1, data processing module 30 is coupled to optical measurement module 20, and wherein data processing module 30 obtains character of surface according to feedback signal and at least one optical coefficient.In other words, optical measuring device 1 is by the relation of data processing module 30 contrast feedback signals and optical coefficient, and then the character of surface result of calculating object 2.It should be noted that character of surface can be surface profile, roughness, each skin depth or thickness.
It should be noted that optical measurement module 20 can be the optical measuring device of arbitrary form, comprise optical interdferometer, near field optic frequency microscope, optical spectrum instrument, wherein light source can be LASER Light Source, LED source, infrared light sources.In this embodiment, optical measurement module 20 is optical interdferometer measurement mechanism, but with this example, is not limited.
Please refer to Fig. 2, Fig. 2 is the embodiment schematic diagram of optical measurement module 20 of the present invention.As shown in Figure 2, optical measurement module 20 comprises spectrophotometric unit 210 and optical path difference unit 220.For example, spectrophotometric unit 210 is divided into the first light signal 50A and the second light signal 50B by least one light signal 50, and wherein the first light signal 50A penetrates optics spigot die piece 10 and is incident upon surface 22 to produce the first reflected light signal.In actual conditions, spectrophotometric unit 210 can be the beam splitter of arbitrary form, and for example spectroscope or prism, there is no specific restriction.In addition, the second light signal 50B is incident upon optical path difference unit 220 to produce the second optical path difference signal 51B, the second optical path difference signal 51B penetrates optics spigot die piece 10 and is incident upon surface 22 to produce the second reflected light signal, and the first reflected light signal and the second reflected light signal penetrate optics spigot die piece 10 to form feedback signal.It should be noted that,, in order to produce the phase differential of light signal, interfere to form by the light signal that out of phase is poor optical path difference unit 220, and then reach the surperficial effect of measurement.In addition, optical path difference unit 220 can be the combination in any of liquid crystal cell, electric driven color-changing part, piezoelectric element, polarizer or above-mentioned material, but not as limit.
In other words, optical measurement module 20 is used spectrophotometric units 210 to carry out light splitting and is produced optical path differences by optical path difference unit 220, and by the first reflected light signal and the second reflected light signal to form feedback signal, and then obtain the character of surface of object 2.It should be noted that, in Fig. 2, optical measurement module 20 is to carry out surface measurement based on optical path difference characteristic.Yet in other embodiments, optical measurement module 20 can be used different optical characteristics to reach and measure surperficial effect, there is no specific restriction.
In other embodiments, optical measurement module 20 can be the former optical interference module detecting for raw doctor, can measure the determinand that comprises high light transmittance surface.For example, above-mentioned determinand can be the determinand of eyes or other easy printing opacities.Yet if optical measuring device 1 only uses optical measurement module 20 to measure comprises high reflectance surface, while being difficult for printing opacity or complete lighttight determinand, measurement result easily produces error.Further and opinion, optical measuring device 1 is by optics, to penetrate module 10 to reduce intensities of reflected light, to have the measurement result of pin-point accuracy.In addition, optics of the present invention penetrates module 10 can directly apply to general biomedical detection device or general printing opacity tissue detection device, not only need not significantly revise the measurement structure of above-mentioned detection device, has more the effect that reduces costs and improve easy-to-use degree.
Please refer to Fig. 3, Fig. 3 is another embodiment schematic diagram of optical measuring device 1A of the present invention.As shown in Figure 3, optical measuring device 1A further comprises control module 40, and wherein control module 40 is coupled to data processing module 30 and penetrates module 10 with optics, according to character of surface, determines measurement pattern.In actual conditions, the mode that determines measurement pattern can be manual measurement or automatically measure.For example, user can manually control survey pattern, or according to the character of surface result of measuring manual control survey pattern.In addition, optical measuring device 1A can determine measurement pattern according to the character of surface of measuring automatically by control module 40.In this embodiment, measurement pattern is including but not limited to plane surveying pattern and measurement in space pattern, and above-mentioned measurement pattern preferred application is in large-area surface.In addition, control module 40 can be adjusted optical property according to character of surface.In other words, optical measuring device 1A can adjust by control module the optical texture that optics penetrates module 10 according to surperficial optical characteristics, so that more suitably metering system to be provided.
Fig. 4 is another embodiment schematic diagram of optical measuring device of the present invention.As shown in Figure 4, the optics of optical measuring device 1B penetrates module 10A and comprises at least one optical layers 110, and wherein each optical layers 110 has respectively at least one optical coefficient, and at least one optical layers 110 is controlled or adjusted to control module 40 according to character of surface.In practical application, at least one optical layers 110 comprises fluid optical layers, Film Optics layer, colloid optics layer, Solid–state Optics layer or its combination.Further and opinion, the character of surface that optical measuring device 1B can measure according to wish and the suitable optical layers 110 of choice for use, wherein each optical layers 110 has different optical characteristics.For example and opinion, in addition, each optical layers 110 can be stratiform housing, and enclosure interior has accommodation space, wherein accommodation space can accommodating fluid, solid, colloid or its combination, to form optical layers 110 of different nature.
For example, as shown in Figure 4, fluid and colloid are placed in respectively different optical layers 110 to form fluid optical layers 120A and colloid optics layer 120B, and wherein fluid optical layers 120A and colloid optics layer 120B have different optical coefficients.In other words, when optical measuring device 1B measures surface 22, according to found that of feedback signal and optical coefficient, surpassing measurement range, similarly is that reflectivity is too high, absorptivity is too high, and optical layers 110 is manually adjusted or automatically adjust to control module 40 according to character of surface.It should be noted that, the optical coefficient of optical layers 110 comprises penetrating coefficient, absorption coefficient, reflection coefficient or its combination.For example, in this embodiment, the scope of penetrating coefficient is between 0.01～0.99; If the reflectivity of object 2 is too high, surpass the measurement range of optical measuring device 1B, control module 40 is adjusted optical layers 110, to provide tool compared with the optical layers 110 of low penetration coefficient (similarly being 0.3), and then obtains measurement result.
In other embodiments, optics penetrates the conformal surface that is covered in of mode that module can attach or be coated with.In other words, optics penetrates module and surperficial how much common shapes of exterior contour tool.Please refer to Fig. 5, Fig. 5 is another embodiment schematic diagram that optics of the present invention penetrates module; As shown in Figure 5, optics penetrates module and comprises Film Optics layer 120C, and wherein Film Optics layer 120C is the conformal surface 22 that is covered in of mode attaching.In other words, Film Optics layer 120C be by being attached at surface 22, not only significantly reduces gap that optics penetrates module and object 2 to avoid air impact measurement, more can improve the accuracy of measurement.In addition,, when Film Optics layer 120C or other types optical layers are covered in surperficial 22, for optical measuring device 1, Film Optics layer 120C and object 2 are simulated in the measuring object of the several organized layers of tool.In other words, the optical coefficient of Film Optics layer 120C is known parameters, and optical measuring device 1 can be deducted the optical coefficient of Film Optics layer 120 to obtain the character of surface of object 2.
Please refer to Fig. 6, another embodiment schematic diagram that Fig. 6 is optical measuring device of the present invention.As shown in Figure 6, optical measuring device 1C further comprises mobile module 60, and wherein mobile module 60 is coupled to optical measurement module 20 and control module 40.In this embodiment, mobile module 60 is more connected to optics and penetrates module 10.In actual conditions, mobile module 60 can be electric sliding rail group, electric carrier or other electronic mobile devices, there is no specific restriction.In actual conditions, optical measurement module 20 and optics penetrate module 10 to be needed mobile to measure larger area surface.In this embodiment, if the measurement pattern that control module 40 determines is plane surveying pattern, control module 40 output plane measurement patterns, to mobile module 60, make optical measurement module 20 and optics penetrate module 10 and 22 move and carry out plane surveying for surface 22 surfacewise.For example, mobile module 60 can connect and drive optical measurement module 20 and optics to penetrate module 10 to move, simultaneously by control module 40 output plane measurement patterns, so that optical measurement module 20 is along with the displacement of mobile module 60 is to measure surperficial zones of different.Compared to other optical measuring devices, optical measuring device 1C can move by mobile module 60, can carry out one-dimensional square to scan measurement, more can carry out perfect measurement for large-area surface.
Please refer to Fig. 7, another embodiment schematic diagram that Fig. 7 is optical measuring device of the present invention.As shown in Figure 7, optical measuring device 1D comprises rotating module 70, and wherein rotating module 70 is coupled to control module 40 and has rotation axis 700.It should be noted that, rotation axis 700 is connected in object 2.Specifically, rotation axis can be connected in object 2 with clamping, snap fit or other engaging modes, there is no specific restriction.In addition, if the measurement pattern that control module 40 determines is measurement in space pattern, control module 40 output measurement in space patterns are to rotating module 70, and the rotation axis 700 of rotating module 70 rotarily drives object 2, makes optical measurement module 20 carry out measurement in space for surface 22.With respect to optical measuring device 1～1C, optical measuring device 1D can scan measurement on a large scale, more for the surface 22 of object 2, carries out the measurement in a plurality of regions.
Compared to prior art, optical measuring device according to the present invention is to utilize optics to penetrate module to have at least one optical coefficient, and control module comparison feedback signal and optical coefficient are to obtain character of surface.In actual applications, optical measuring device, according to character of surface, not only can optionally change measurement pattern, effectively carries out optimized metering system, therefore can measure the body surface of various reflectivity.
By the above detailed description of preferred embodiments, be to wish more to know to describe feature of the present invention and spirit, and not with above-mentioned disclosed preferred embodiment, category of the present invention limited.On the contrary, its objective is that hope can contain in the category of the scope of the claims of being arranged in of various changes and tool equality institute of the present invention wish application.
Claims (10)
1. an optical measuring device, for measuring a character of surface of an object, is characterized in that, this optical measuring device comprises:
One optics penetrates module, is arranged at the place ahead of this object and has at least one optical coefficient;
One optical measurement module, transmit at least one light signal and penetrate the surface that this optics penetrates module and is incident upon this object, and this at least one light signal after this surface reflection penetrates this optics and penetrates module and form a feedback signal, and this optical measurement module receives this feedback signal; And
One data processing module, is coupled to this optical measurement module, and wherein this data processing module obtains this character of surface according to this feedback signal and this at least one optical coefficient.
2. optical measuring device as claimed in claim 1, is characterized in that, this optical measuring device further comprises:
One control module, is coupled to this data processing module and this optics penetrates module, according to this character of surface, determines a measurement pattern.
3. optical measuring device as claimed in claim 2, is characterized in that, this optics penetrates module and comprises:
At least one optical layers, this at least one optical layers has respectively this at least one optical coefficient, and this at least one optical layers is controlled or adjusted to this control module according to this character of surface.
4. optical measuring device as claimed in claim 3, is characterized in that, this at least one optical layers comprises first-class bulk optics layer, a Film Optics layer, colloid optical layers, a Solid–state Optics layer or its combination.
5. optical measuring device as claimed in claim 1, is characterized in that, the material that this optics penetrates module can be selected from the combination in any of acrylic, plastics, glass, silica gel, photoresist and above-mentioned material.
6. optical measuring device as claimed in claim 1, is characterized in that, this at least one optical coefficient comprises penetrating coefficient, absorption coefficient, reflection coefficient or its combination.
7. optical measuring device as claimed in claim 1, is characterized in that, this optics penetrates conformal this surface that is covered in of mode that module can attach or be coated with.
8. optical measuring device as claimed in claim 1, is characterized in that, this optical measurement module comprises:
One spectrophotometric unit, is divided into one first light signal and one second light signal by this at least one light signal, and wherein this first light signal penetrates this optics and penetrates module and be incident upon this surface to produce one first reflected light signal; And
One optical path difference unit, wherein this second light signal is incident upon this optical path difference unit to produce one second optical path difference signal, this the second optical path difference signal penetrates this optics and penetrates module and be incident upon this surface to produce one second reflected light signal, and this first reflected light signal and this second reflected light signal penetrate this optics, penetrates module to form this feedback signal.
9. optical measuring device as claimed in claim 2, is characterized in that, this optical measuring device further comprises:
One mobile module, be coupled to this optical measurement module and this control module, if this measurement pattern that this control module determines is a plane surveying pattern, this control module is exported this plane surveying pattern to this mobile module, makes this optical measurement module along this surface, move and carry out plane surveying for this surface.
10. optical measuring device as claimed in claim 2, is characterized in that, this optical measuring device further comprises:
One rotating module, be coupled to this control module and there is a rotation axis, wherein this rotation axis is connected in this object, if this measurement pattern that this control module determines is a measurement in space pattern, this control module is exported this measurement in space pattern to this rotating module, this rotation axis of this rotating module rotarily drives this object, makes this optical measurement module carry out a measurement in space for this surface.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101127229 | 2012-07-27 | ||
| TW101127229A TWI475210B (en) | 2012-07-27 | 2012-07-27 | Optical detection apparatus |
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| Publication Number | Publication Date |
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| CN103575657A true CN103575657A (en) | 2014-02-12 |
| CN103575657B CN103575657B (en) | 2016-09-07 |
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| CN201310237895.6A Expired - Fee Related CN103575657B (en) | 2012-07-27 | 2013-06-17 | Optical measuring device |
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| CN (1) | CN103575657B (en) |
| TW (1) | TWI475210B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI588492B (en) * | 2015-02-06 | 2017-06-21 | 財團法人國家實驗研究院 | Near-field array detection method for detecting optically high scatter material |
| US9835449B2 (en) | 2015-08-26 | 2017-12-05 | Industrial Technology Research Institute | Surface measuring device and method thereof |
| TWI705243B (en) * | 2019-08-30 | 2020-09-21 | 海華科技股份有限公司 | Detecting method for high transmittance glass and glass detection apparatus by excitation |
Citations (6)
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| WO1998053733A1 (en) * | 1997-05-26 | 1998-12-03 | Hitachi, Ltd. | Inspection apparatus using optical interferometer |
| US20070291277A1 (en) * | 2006-06-20 | 2007-12-20 | Everett Matthew J | Spectral domain optical coherence tomography system |
| CN201247199Y (en) * | 2008-06-17 | 2009-05-27 | 苏州大学 | Non-linear 4f phase coherent imaging apparatus for measuring optics |
| CN101561401A (en) * | 2009-05-23 | 2009-10-21 | 青岛大学 | Real-time observation method of crystal growing surface microstructure |
| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
| JP2012002631A (en) * | 2010-06-16 | 2012-01-05 | Mitsutoyo Corp | Optical interference measurement device and shape measurement device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004017232A1 (en) * | 2004-04-05 | 2005-10-20 | Bosch Gmbh Robert | Interferometric measuring device |
| JP2006266687A (en) * | 2005-03-22 | 2006-10-05 | Advanced Mask Inspection Technology Kk | Sample inspection device and sample inspection method |
-
2012
- 2012-07-27 TW TW101127229A patent/TWI475210B/en active
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2013
- 2013-06-17 CN CN201310237895.6A patent/CN103575657B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998053733A1 (en) * | 1997-05-26 | 1998-12-03 | Hitachi, Ltd. | Inspection apparatus using optical interferometer |
| US20070291277A1 (en) * | 2006-06-20 | 2007-12-20 | Everett Matthew J | Spectral domain optical coherence tomography system |
| CN201247199Y (en) * | 2008-06-17 | 2009-05-27 | 苏州大学 | Non-linear 4f phase coherent imaging apparatus for measuring optics |
| CN101561401A (en) * | 2009-05-23 | 2009-10-21 | 青岛大学 | Real-time observation method of crystal growing surface microstructure |
| JP2012002631A (en) * | 2010-06-16 | 2012-01-05 | Mitsutoyo Corp | Optical interference measurement device and shape measurement device |
| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
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| Publication number | Publication date |
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| TWI475210B (en) | 2015-03-01 |
| CN103575657B (en) | 2016-09-07 |
| TW201405115A (en) | 2014-02-01 |
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