CN103575213B - Optical measuring device - Google Patents
Optical measuring device Download PDFInfo
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- CN103575213B CN103575213B CN201210281702.2A CN201210281702A CN103575213B CN 103575213 B CN103575213 B CN 103575213B CN 201210281702 A CN201210281702 A CN 201210281702A CN 103575213 B CN103575213 B CN 103575213B
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Abstract
Disclosure optical measuring device, it includes measuring instrument body, light source, the W shape optical fiber with at least 5 ports and spectrogrph；The present invention is simple to operate, the optical measuring device provided comprises two measurement apparatus of vertical incidence and oblique incidence, can be used to measure the thickness of three dimensional structure, critical dimension (Critical Dimension), space pattern and the material behavior that single or multiple lift thin film is formed, improve the precision that sample is measured.It addition, vertical incidence part can also tilt to 54.7 degree, it is used for measuring mono-crystalline silicon solar sample.Oblique incidence part also can realize the switching of multi-angle, and friction plate can make whole switching engineering more steady.
Description
Technical field
The application relates to optical technical field, particularly to a kind of optical measuring device.
Background technology
Along with the fast development of semicon industry, utilize optical measuring technique accurately to measure the critical dimension (CriticalDimension) of three dimensional structure of single or multiple lift thin film formation, space pattern and material behavior on wafer and become particularly significant.In order to make measurement result effective, measurement system used should be able to high accuracy measure thickness and/or thin film is constituted.Being photometry and ellipsometric measurement method at well-known non-destructive detection technique, the electromagnetic radiation that they are reflected by measuring samples obtains reflectivity data.In spectroscopic ellipsometers, there is the incident illumination determining polarization state to be reflected (generally with bigger angle of incidence) by sample, the characteristic of sample can be obtained by analyzing the polarization state of reflection light.Owing to incident illumination comprises multi-frequency composition, then can obtain spectral curve.Particularly, the polarization state of incident illumination has time dependence (making incident illumination pass through the polarizer rotated), or the method analyzing reflection light has time dependence (making reflection light by an analyzer rotated).
Generally, semiconductive thin film needs to measure the thickness d drawing thin film, refractive index n and extinction coefficient k.And Ellipsometric can only measure two ellipsometric parameters, it may be assumed that φ and Δ, then cannot accurately providing the optical parametric (Acta Physica Sinica Vol.59, No.4) of sample thin film according only to two ellipse folk prescription journeys, the method only by computer fitting solves.In order to increase certainty of measurement, it is thus achieved that the additional information of target sample, researcher in this field proposes the spectroscopic ellipsometers (VASE, variableanglespectroscopicEllipsometry) of a kind of variable-angle.This measurement apparatus can provide the ellipse folk prescription journey under multiple angle in theory, can increase certainty of measurement to a certain extent.But, actually so often produce effects little, as described in CriticalReviewsofOpticalScienceandTechnologyVolumeCR72,14-16 page, the discovery when film thickness carries out data fitting, film thickness existsScope in can obtain essentially the same matched curve.For a film thickness assumed, the optical constant of thin film can compensatory change be thus obtaining a same good fitting result therewith, and this is owing to the thickness of thin film and the optical constant of thin-film material are correlated with often in matching.Therefore want accurately to measure film thickness only by Ellipsometric and optical constant can be relatively difficult.For accurate measuring samples, such as, the thickness of measuring samples thin film and optical parametric, generally integrated multiple optical measuring devices in the optical measuring device of a compound, namely two optical measuring devices measuring samples (referring to US Patent No. 5608526, US6713753) simultaneously of vertical incidence and oblique incidence is utilized.In general, the measurement systematic comparison of integrated multiple optical measuring devices is complicated, and needs multiple wideband light source and detection device, relatively costly.If as described in US Patent No. 6713753, beam splitter is adopted to carry out coupling optical path, although can also reach to reduce light source and spectrometer, reduce the requirement of cost, but in actual applications, optical path adjusting also not easily realizes, and, when carrying out light splitting with conjunction light by beam splitter, its light leads to inefficient, light beam for vertical incidence, then at least need to pass twice through spectroscope, then its theoretical throughput is only up to 25%, the light beam of oblique incidence, it is also required to by a spectroscope, the accuracy of systematic survey can be reduced, therefore this optical measuring device comprising vertical incidence and oblique incidence is not widely popularized in actual applications.
Application content
Technical problems to be solved in this application are to provide a kind of optical measuring device improving sample certainty of measurement.
For solving above-mentioned technical problem, this application provides a kind of simple in construction, the optical measuring device comprising vertical incidence and oblique incidence easy to operate, lower-cost, including measuring instrument body, light source, the W shape optical fiber with at least 5 ports and spectrogrph；Described measuring instrument body includes mirror assembly, incident arm, reflection arm, sample stage assembly and lateral plate component composition；
First port of described optical fiber is connected with described incident arm；Second port of described optical fiber is connected with described light source；3rd port of described optical fiber is connected with described mirror assembly；4th port of described optical fiber is connected with described spectrogrph；The fifth port of described optical fiber is connected with described reflection arm；Described reflection arm and described incident arm are connected with described lateral plate component respectively；Described lateral plate component is connected with described sample stage assembly.
A kind of optical measuring device that the application provides, oblique incidence part can regulate the angle of incident arm and reflection arm symmetrically, it is achieved the handover measurement of multi-angle, and in handoff procedure, also can realize incident arm coaxial with reflection arm；It addition, regulate locking handwheel, the frictional force between friction plate of controlling well can make whole handoff procedure proceed smoothly.This optical measuring device can be used to accurately measure the thickness of three dimensional structure, critical dimension (CriticalDimension), space pattern and the material behavior that single or multiple lift thin film is formed.Additionally, the mirror assembly in the application can switch to 54.7 degree measures monocrystalline solar silicon wafers, and mirror assembly can being made in vertical survey and when measuring for 54.7 degree, height of specimen is consistent.Only need to hold handle during switching to move, magnetic attraction after putting in place, simple to operate.
Accompanying drawing explanation
The structural representation of the optical measuring device that Fig. 1 provides for the embodiment of the present application；
The W shape optical fiber structure schematic diagram that Fig. 2 provides for the embodiment of the present application；
The measuring instrument body three dimensional structure schematic diagram that Fig. 3 provides for the embodiment of the present application；
The measuring instrument body three dimensional structure exploded perspective view that Fig. 4 provides for the embodiment of the present application；
The mirror assembly three dimensional structure exploded perspective view that Fig. 5 provides for the embodiment of the present application；
The shaft coupling piece structural representation that Fig. 6 provides for the embodiment of the present application；
The U-shaped Mirror frame structure schematic diagram that Fig. 7 provides for the embodiment of the present application；
The incident arm, three-D structural blast schematic diagram that Fig. 8 provides for the embodiment of the present application；
The reflection arm three dimensional structure exploded perspective view that Fig. 9 provides for the embodiment of the present application；
The wave plate rotary components structural representation that Figure 10 provides for the embodiment of the present application；
The wave plate rotary components three dimensional structure exploded perspective view that Figure 11 provides for the embodiment of the present application；
The sample stage modular construction schematic diagram that Figure 12 provides for the embodiment of the present application；
The sample stage structural representation that Figure 13 provides for the embodiment of the present application；
The lateral plate component three dimensional structure schematic diagram that Figure 14 provides for the embodiment of the present application；
The lateral plate component rearview that Figure 15 provides for the embodiment of the present application；
The reflection arm supporting structure schematic diagram that Figure 16 provides for the embodiment of the present application；
The reflection arm support detonation configuration schematic diagram that Figure 17 provides for the embodiment of the present application；
The incident arm support structural representation that Figure 18 provides for the embodiment of the present application；
The incident arm support that Figure 19 provides for the embodiment of the present application and reflection arm support connection structure schematic diagram；
The incident arm configuration schematic diagram that Figure 20 provides for the embodiment of the present application；
The mirror assembly that Figure 21 provides for the embodiment of the present application tilts structural representation when using；
Wherein, 1 measuring instrument body, 2 W shape optical fiber, 3 light sources, 4 spectrogrphs, 5 controllers, 6 control cable, 7 spectroscopic data cables, 8 control data cable, 9 computers, 2-1 the first port, 2-2 the second port, 2-3 the 3rd port, 2-4 the 4th port, 2-5 fifth port, 1-1 mirror assembly, 1-2 incidence arm, 1-3 reflection arm, 1-4 sample stage assembly, 1-5 lateral plate component, 1-1-1 L-shaped framework, 1-1-2 riser, 1-1-3 crossbeam, 1-1-4 the first connecting plate, 1-1-5 the first two-dimension adjustment frame, 1-1-6 the first spherical reflector, 1-1-7 U-shaped mirror holder, 1-1-8 the second spherical reflector, 1-1-9 plane mirror, 1-1-10 fibre-optical splice, 1-1-11 the second two-dimension adjustment frame, 1-1-12 the first keyset, the one-dimensional translation stage of 1-1-13 first, the one-dimensional translation stage of 1-1-14 second, 1-1-15 the second keyset, 1-1-16 fiber fixed frame, 1-1-17 shaft coupling piece, 1-1-18 locating stop piece, 1-1-19 hands handle, 1-1-20 cover plate, 1-1-21 shade, 1-2-1 incidence arm framework, 1-2-2 optical fiber jacket, 1-2-3 structure of fiber_optic, 1-2-4 screw thread pair, 1-2-5 lens carrier, 1-2-6 polariser support, 1-2-7 diaphragm component, 1-2-8 locks swivel nut, 1-2-9 lens mount, 1-2-10 lens, 1-2-11 lens fixed mount, 1-2-12 lens clamp nut, 1-2-13 fiber fixed frame, 1-2-14 shell, 1-2-15 V-shaped groove, 1-3-1 reflection arm framework, 1-3-2 wave plate rotary components, 1-3-2-1 core motor, 1-3-2-2 the first adaptor, 1-3-2-3 the second adaptor 1-3-2-4 photoelectric sensor, 1-3-2-5 sensor catch, 1-3-2-6 wave plate seat, 1-3-2-7 wave plate, 1-3-2-8 connects sheet, 1-3-2-9 stator, 1-3-2-10 first adjusts screw, 1-3-2-11 trip bolt, 1-4-1 base, 1-4-2 electric lifting platform, 1-4-3 two-dimension adjustment platform, 1-4-4 sample stage, 1-4-5 the second connecting plate, 1-4-6 footing, 1-4-4-1 reference line, 1-4-4-2 vacuum tank, 1-5-1 side plate, 1-5-2 right angle muscle, 1-5-3 reflection arm support, 1-5-4 incidence arm support, 1-5-5 the first friction plate, 1-5-6 the first axle, the vertical magnetic of 1-5-7, 1-5-8 tilts magnetic, 1-5-9 the second axle, 1-5-10 slotted eye, 1-5-3-1 rocking arm, 1-5-3-2 framework, the movable pin of 1-5-3-3 first, 1-5-3-4 locks hands wheel, 1-5-3-5 the second friction plate, 1-5-3-6 cylinder, 1-5-3-7 adjusts screw thread pair, 1-5-3-8 fixes screw, 1-5-3-9 second adjusts screw, 1-5-3-10 second adjusts screw hole, 1-5-3-11 the 3rd adjusts screw, 1-5-3-12 the 3rd adjusts screw hole, 1-5-4-1 the 3rd keyset, the movable pin of 1-5-4-2 second.
Detailed description of the invention
As it is shown in figure 1, the application is made up of measuring instrument body 1, optical fiber 2, light source 3, spectrogrph 4, controller 5, control cable 6, spectroscopic data cable 7, control data cable 8, computer 9.As shown in Figure 2, the preferred W shape of optical fiber, there are 5 ports such as the first port, the second port, the 3rd port, the 4th port, fifth port, second port 2-2 is connected with light source 3,4th port 2-4 is connected with spectrogrph 4,3rd port 2-3 is connected with mirror assembly 1-1, and the first port 2-1 is connected with incident arm 1-2, and fifth port 2-5 is connected with reflection arm 1-3.Controller 5 one end is connected with measuring instrument body 1 by controlling cable 6, and the other end is connected with computer 9 by controlling data cable 8, and spectrogrph 4 is connected with computer 9 by spectroscopic data cable 7.
As shown in Figure 3, Figure 4, measuring instrument body 1 includes mirror assembly 1-1, incident arm 1-2, reflection arm 1-3, sample stage assembly 1-4 and lateral plate component 1-5.
Mirror assembly 1-1 includes L-shaped framework 1-1-1 as shown in Figure 5, riser 1-1-2, crossbeam 1-1-3, first connecting plate 1-1-4, first two-dimension adjustment frame 1-1-5, first spherical reflector 1-1-6, U-shaped mirror holder 1-1-7, second spherical reflector 1-1-8, plane mirror 1-1-9, fibre-optical splice 1-1-10, second two-dimension adjustment frame 1-1-11, first keyset 1-1-12, first one-dimensional translation stage 1-1-13, second one-dimensional translation stage 1-1-14, second keyset 1-1-15, fiber fixed frame 1-1-16, shaft coupling piece 1-1-17, locating stop piece 1-1-18, handle 1-1-19, cover plate 1-1-20 and shade 1-1-21.L-shaped framework 1-1-1, riser 1-1-2, crossbeam 1-1-3, the first connecting plate 1-1-4 are interconnected to constitute an annular frame, and cover plate 1-1-20 has two pieces, is connected with this annular frame by screw, constitute a cavity.
In order to well control the installation accuracy requirement of optical element, as it is shown in fig. 7, U-shaped mirror holder 1-1-7 is integrated processing part, the installation accuracy requirement of optical element can be controlled well.Second spherical reflector 1-1-8, plane mirror 1-1-9 are individually fixed in two sides of U-shaped mirror holder 1-1-7, and are positioned by bottom surface；The bottom surface of U-shaped mirror holder 1-1-7 and the laminating of L-shaped framework 1-1-1 inner side one end, the installed surface of the second spherical reflector 1-1-8 is fitted with the one side of riser 1-1-2；First spherical reflector 1-1-6 is connected with the first two-dimension adjustment frame 1-1-5 by a mirror holder, and the first two-dimension adjustment frame 1-1-5 is connected with riser 1-1-2 top；Fibre-optical splice 1-1-10 and the second two-dimension adjustment frame 1-1-11 connects, second two-dimension adjustment frame 1-1-11 is connected by the first one-dimensional translation stage 1-1-13 of keyset 1-1-12 and the first, first one-dimensional translation stage 1-1-13 is connected by the second one-dimensional translation stage 1-1-14 of keyset 1-1-15 and the second, and the second one-dimensional translation stage 1-1-14 is fixed on the first connecting plate 1-1-4；Handle 1-1-19 and the first connecting plate 1-1-4 connects；Fiber fixed frame 1-1-16 is fixed on the side of L-shaped framework 1-1-1.W shape optical fiber the 3rd port 2-3 is connected through the circular hole of L-shaped framework 1-1-1 one end with fibre-optical splice 1-1-10, adjust the first two-dimension adjustment frame 1-1-11, the first one-dimensional translation stage 1-1-13, the second one-dimensional translation stage 1-1-14 and the second two-dimension adjustment frame 1-1-5, the 3rd port 2-3 light out can be made successively through the second spherical reflector 1-1-8, plane mirror 1-1-9, reflex on the first spherical reflector 1-1-6, and finally vertically beat on sample stage 1-4-4；First one-dimensional translation stage 1-1-13, the second one-dimensional translation stage 1-1-14 direction of motion are mutually perpendicular to, and all vertical with the emergent ray primary optical axis of fiber port 2-3；For ensureing stablizing of the 3rd port 2-3, the optical fiber at the 3rd port 2-3 rear portion is fixed on fiber fixed frame 1-1-16.
As shown in Figure 6, shaft coupling piece 1-1-17 is connected with L-shaped framework 1-1-1 with one, side screw hole by 4, bottom screw hole；Shaft coupling piece 1-1-17 has axis hole, and is connected with the axle 1-5-6 in lateral plate component 1-5 with side screw by end face screw.
As shown in Figure 8, incident arm 1-2 includes incident arm framework 1-2-1, optical fiber jacket 1-2-2, structure of fiber_optic 1-2-3, screw thread pair 1-2-4, lens carrier 1-2-5, polariser support 1-2-6, diaphragm component 1-2-7, locking swivel nut 1-2-8, lens mount 1-2-9, lens 1-2-10, lens fixed mount 1-2-11, lens clamp nut 1-2-12, fiber fixed frame 1-2-13, shell 1-2-14；Wherein, the inside bottom of incident arm framework 1-2-1 is coaxial installs structure of fiber_optic 1-2-3, lens carrier 1-2-5, polariser support 1-2-6, diaphragm component 1-2-7, lens 1-2-10 successively；Structure of fiber_optic 1-2-3 there are fibre-optical splice, bottom screw thread pair 1-2-4 is installed, regulate screw thread pair 1-2-4 and can realize the axial fine setting of structure of fiber_optic 1-2-3；Lens carrier 1-2-5 is provided with lens；Being provided with Miniature turntable on polariser support 1-2-6, Miniature turntable is installed polariser, polariser is lockable after having adjusted angle；Diaphragm component 1-2-7 there are plug type diaphragm, diaphragm component 1-2-7 are fixed on inside the end face of incident arm framework 1-2-1；Lens 1-2-10 is fixed on inside lens mount 1-2-9 by lens clamp nut 1-2-12, and lens mount 1-2-9 passes through threaded engagement in the endoporus of lens fixed mount 1-2-11, by screwing the axial location of lens mount 1-2-9 adjustable lens 1-2-10；Lens fixed mount 1-2-11 front end has 4 axial gaps, and periphery is tapered, and lens fixed mount 1-2-11 root has external screw thread；Locking swivel nut 1-2-8 can screw with lens fixed mount 1-2-11 root external screw thread, and by the locked lens mount 1-2-9 of cone match, locking swivel nut 1-2-8 radially has screwed hole simultaneously, can add the further locked lens mount 1-2-9 of holding screw；Optical fiber jacket 1-2-2 is preferably elastomeric material, is embedded in the hole of incident arm framework 1-2-1 other end；Fiber fixed frame 1-2-13 is fixed on the incident arm framework 1-2-1 on optical fiber jacket 1-2-2 limit；Shell 1-2-14 is fixed on incident arm framework 1-2-1.
As shown in Fig. 1, Fig. 8, the fiber port 2-1 of W shape optical fiber 2 is connected through the fibre-optical splice of optical fiber jacket 1-2-2 and structure of fiber_optic 1-2-3, and fiber port 2-1 rear portion optical fiber is fixed on fiber fixed frame 1-2-13.
As shown in Figure 9, it is preferable that the structure of the structure of reflection arm 1-3 and incident arm 1-2 is symmetrical, and institute does not have diaphragm component the difference is that reflection arm 1-3, adds wave plate rotary components 1-3-2 in the position of diaphragm component.Additionally, the polariser on incident arm is as the polarizer, the polariser in reflection arm is as analyzer.
As shown in Figure 10, Figure 11, wave plate rotary components 1-3-2 includes core motor 1-3-2-1, adaptor 1-3-2-2, adaptor 1-3-2-3, photoelectric sensor 1-3-2-4, sensor catch 1-3-2-5, wave plate seat 1-3-2-6, wave plate 1-3-2-7, connects sheet 1-3-2-8, stator 1-3-2-9, adjusts screw 1-3-2-10, trip bolt 1-3-2-11；Wherein, core motor 1-3-2-1 is hollow type 5 phase step motor, and aperture is 9mm, and its two ends connect the first adaptor 1-3-2-2, the second adaptor 1-3-2-3 respectively；Wave plate 1-3-2-7 one end is fixed with connection sheet 1-3-2-8, it is placed in wave plate seat 1-3-2-6, wave plate 1-3-2-7 is compressed by stator 1-3-2-9 by trip bolt 1-3-2-11, wave plate seat 1-3-2-6 is fixed on the rotary end surface of core motor 1-3-2-1, and core motor 1-3-2-1 rotates can drive wave plate 1-3-2-7 synchronous axial system.
As shown in figure 12, sample stage assembly 1-4 includes base 1-4-1, electric lifting platform 1-4-2, two-dimension adjustment platform 1-4-3, sample stage 1-4-4, the second connecting plate 1-4-5 and footing 1-4-6.Wherein, electric lifting platform 1-4-2 is fixed on base 1-4-1 central authorities, and two-dimension adjustment platform 1-4-3 end face is connected with sample stage 1-4-4, and underrun the second connecting plate 1-4-5 is connected with electric lifting platform 1-4-2.By regulating the two-dimentional pitching of two-dimension adjustment platform 1-4-3 scalable sample stage 1-4-4.The lifting of electric lifting platform 1-4-2 it is accurately controlled by computer 9.In order to measure the placement reference of monocrystalline solar silicon wafers and associated sample, as shown in figure 13, sample stage 1-4-4 having a plurality of reference line 1-4-4-1, arranged direction is preferably in 45 degree；Additionally sample stage 1-4-4 also includes vacuum tank 1-4-4-2, be suitable for the sample vac sorb of 4 inches and 6 inches.
As shown in Figure 14, Figure 15, lateral plate component 1-5 includes side plate 1-5-1, right angle muscle 1-5-2, reflection arm support 1-5-3, incident arm support 1-5-4, friction plate 1-5-5, axle 1-5-6, vertical magnetic 1-5-7, tilts magnetic 1-5-8, axle 1-5-9；Its latus inframedium 1-5-1 is circular arc platy structure, and top has arc-shaped slot 1-5-10, side plate 1-5-1 to be connected by screw and two right angle muscle 1-5-2 and base 1-4-1；Reflection arm support 1-5-3 is symmetrically arranged with incident arm support 1-5-4, and can swing around axle 1-5-9, and the side plate 1-5-1 tow sides at reflection arm support 1-5-3 with the wobble area of incident arm support 1-5-4 are all embedded with rustless steel friction plate 1-5-5, and the arc surface of side plate 1-5-1 has pin-and-hole；Axle 1-5-9 is positioned at side plate 1-5-1 home position；The side of axle 1-5-9 is used for installing mirror assembly 1-1 arranged above with axle 1-5-6；Vertical magnetic 1-5-7 is installed near axle 1-5-6 and tilts magnetic 1-5-8, for mirror assembly 1-1 location vertically and during inclined work with fixing；Vertical magnetic 1-5-7 and the fixing hole tilting magnetic 1-5-8 are slotted hole, and its position can be finely tuned.
As shown in Figure 16, Figure 17, reflection arm support 1-5-3 includes rocking arm 1-5-3-1, framework 1-5-3-2, movable pin 1-5-3-3, locking handwheel 1-5-3-4, the first friction plate 1-5-3-5, cylinder 1-5-3-6, adjusts screw thread pair 1-5-3-7, fixing screw 1-5-3-8, the first adjustment screw 1-5-3-9, adjusts screw hole 1-5-3-10, adjusts screw 1-5-3-11, adjusts screw hole 1-5-3-12；Wherein, rocking arm 1-5-3-1 is F shape structure; framework 1-5-3-2 can be inserted in the F shape opening of rocking arm 1-5-3-1; regulate and can realize framework 1-5-3-2 relative to the one-dimensional straight line of rocking arm 1-5-3-1 and beat position through four the adjustment screw 1-5-3-11 adjusting screw hole 1-5-3-12, adjust 4 screws that can pass through on limit after properly locked；The first friction plate 1-5-3-5 is respectively embedded; the first friction plate 1-5-3-5 on rocking arm 1-5-3-1 can by regulating through three the adjustment screw 1-5-3-9 adjusting screw hole 1-5-3-10; makes the second friction plate 1-5-5 on the first friction plate 1-5-3-5 and side plate 1-5-1 fit tightly, the movement of the first friction plate 1-5-3-5 on adjustment locking handwheel 1-5-3-4 scalable framework 1-5-3-2 in the middle of framework 1-5-3-2 and rocking arm 1-5-3-1；First movable pin 1-5-3-3 is installed on rocking arm 1-5-3-1 top, coordinates with the pin-and-hole on side plate 1-5-1 arc surface；Cylinder 1-5-3-6 is arranged in the V-shaped groove of framework 1-5-3-2, is used for installing and regulating reflection arm 1-3.
As shown in figure 18, the structure of incident arm support 1-5-4 is similar with the structure of reflection arm support 1-5-3, be first arranged on the 3rd keyset 1-5-4-1 the difference is that the second movable pin 1-5-4-2 of incident arm support 1-5-4,3rd keyset 1-5-4-1 is being arranged on incident arm support 1-5-4 by screw, second movable pin 1-5-4-2 can carry out the direction as shown in Figure 18 and carry out the fine setting of position, to make up the mismachining tolerance of pin-and-hole on side plate 1-5-1 arc surface.As shown in figure 19, reflection arm support 1-5-3 can swing around axle 1-5-9 with incident arm support 1-5-4, and axle 1-5-9 is fixed on side plate 1-5-1.
As shown in figure 20, there is a V-shaped groove 1-2-15 at the back of incident arm 1-2 and reflection arm 1-3, with reference to Figure 16 during installation, V-shaped groove 1-2-15 coordinates with cylinder 1-5-3-6, fixing screw 1-5-3-8 locks reflection arm 1-3, unclamps fixing screw 1-5-3-8, and fine setting adjusts screw thread pair 1-5-3-7, scalable reflection arm 1-3, around the beat of cylinder 1-5-3-6 and along micro-displacement axial for cylinder 1-5-3-6, adjusts the complete screw 1-5-3-8 that is locked.
As shown in Fig. 3, Figure 14, extract the first movable pin 1-5-4-2 of movable pin 1-5-3-3 and the second, the angle of incident arm 1-2 and reflection arm 1-3 can be regulated respectively, and angle symmetrical, angle of incidence 60 degree, the switching of 65 degree, 70 degree, 75 degree can be realized in the present embodiment, also can realize incident arm 1-2 coaxial with reflection arm 1-3.It addition, regulate locking handwheel 1-5-3-4, the frictional force between friction plate of controlling well can make whole handoff procedure more steady.
As shown in figure 21, the situation of monocrystalline solar silicon wafers is measured when switching to 54.7 degree for the mirror assembly 1-1 in the application；The center of rotation making mirror assembly 1-1 in design has a reasonable eccentric throw with optical path axis, it is ensured that mirror assembly 1-1 is consistent in vertical survey and the height of specimen when surveying for 54.7 degree.Only need to hold handle 1-1-19 during switching to move, magnetic attraction after completing, simple to operate.
A kind of optical measuring device of disclosure herein, can regulate the angle of incident arm and reflection arm respectively, and angle symmetrical can realize the switching of multi-angle, also can realize incident arm coaxial with reflection arm；It addition, regulate locking handwheel, the frictional force between friction plate of controlling well can make whole handoff procedure more steady.Mirror assembly in the application measures monocrystalline solar silicon wafers when can switch to 54.7 degree；The center of rotation making mirror assembly in design has a reasonable eccentric throw with optical path axis, it is ensured that mirror assembly is consistent in vertical survey and the height of specimen when surveying for 54.7 degree.Only need to hold handle during switching to move, magnetic attraction after putting in place, simple to operate.
A kind of optical measuring device that the application provides is integrated with two measurement apparatus of vertical incidence and oblique incidence, and integrated level is high, and simple in construction, easy to operate, feature richness is powerful.The oblique incidence part of this optical measuring device can regulate the angle of incident arm and reflection arm symmetrically, it is achieved the handover measurement of multi-angle, and in handoff procedure, also can realize incident arm coaxial with reflection arm；It addition, regulate locking handwheel, the frictional force between friction plate of controlling well can make whole handoff procedure proceed smoothly.This optical measuring device can be used to accurately measure the thickness of three dimensional structure, critical dimension (CriticalDimension), space pattern and the material behavior that single or multiple lift thin film is formed.Additionally, the mirror assembly in the application can switch to 54.7 degree measures monocrystalline solar silicon wafers, and mirror assembly can being made in vertical survey and when measuring for 54.7 degree, height of specimen is consistent.Only need to hold handle during switching to move, magnetic attraction after putting in place, simple to operate.
It should be noted last that, above detailed description of the invention is only in order to illustrate the technical scheme of the application and unrestricted, although with reference to example to present application has been detailed description, it will be understood by those within the art that, the technical scheme of the application can be modified or equivalent replacement, without deviating from the spirit and scope of technical scheme, it all should be encompassed in the middle of claims hereof scope.
Claims (8)
1. an optical measuring device, it is characterised in that include measuring instrument body, light source, the W shape optical fiber with at least 5 ports and spectrogrph；
Described measuring instrument body includes mirror assembly, incident arm, reflection arm, base, sample stage assembly and lateral plate component composition；
First port of described optical fiber is connected with described incident arm；Second port of described optical fiber is connected with described light source；3rd port of described optical fiber is connected with described mirror assembly；4th port of described optical fiber is connected with described spectrogrph；The fifth port of described optical fiber is connected with described reflection arm；Described reflection arm and described incident arm are connected with described lateral plate component respectively；Described lateral plate component is connected with described sample stage assembly；Described mirror assembly is connected with described lateral plate component；
Wherein, described incident arm includes:
Incident arm framework, optical fiber jacket, structure of fiber_optic, screw thread pair, lens carrier, polariser support, diaphragm component, locking swivel nut, lens mount, lens, lens fixed mount, lens clamp nut, fiber fixed frame and shell；Wherein,
The inside bottom of described incident arm framework is coaxial is sequentially installed with structure of fiber_optic, lens carrier, polariser support, diaphragm component, lens；
Having fibre-optical splice on described structure of fiber_optic, bottom is provided with screw thread pair；Described lens carrier is provided with lens；
Described polariser support is provided with Miniature turntable, Miniature turntable is installed polariser；
Being provided with plug type diaphragm on described diaphragm component, diaphragm component is fixed on inside the end face of incident arm framework；
Described lens are fixed on inside lens mount by lens clamp nut, and lens mount passes through threaded engagement in the endoporus of described lens fixed mount；
Described lens fixed mount front end has axial gap, and periphery is tapered, and lens fixed mount root has external screw thread；
Described locking swivel nut can screw with lens fixed mount root external screw thread, and by the locked lens mount of cone match, locking swivel nut radially has screwed hole simultaneously, can add the further locked lens mount of holding screw；
Described optical fiber jacket is embedded in the hole of incident arm framework other end；
Described fiber fixed frame is fixed on the incident arm framework on optical fiber jacket limit；
Described shell is fixed on incident arm framework；
First port of described optical fiber is connected through optical fiber jacket with the fibre-optical splice of structure of fiber_optic, and the first port rear portion optical fiber of optical fiber is fixed on fiber fixed frame；
Wherein, described reflection arm includes:
Reflection arm framework, optical fiber jacket, structure of fiber_optic, screw thread pair, lens carrier, polariser support, wave plate rotary components, locking swivel nut, lens mount, lens, lens fixed mount, lens clamp nut, fiber fixed frame and shell；Wherein,
The inside bottom of described reflection arm framework is coaxial is sequentially installed with structure of fiber_optic, lens carrier, polariser support, wave plate rotary components, lens；
Being provided with fibre-optical splice on described structure of fiber_optic, bottom is provided with screw thread pair；Described lens carrier is provided with lens；
Described polariser support is provided with Miniature turntable, Miniature turntable is installed polariser；
Described wave plate rotary components is fixed on inside the end face of reflection arm framework；
Described lens are fixed on inside lens mount by lens clamp nut, and lens mount passes through threaded engagement in the endoporus of described lens fixed mount；
Described lens fixed mount front end has axial gap, and periphery is tapered, and lens fixed mount root has external screw thread；
Described locking swivel nut can screw with lens fixed mount root external screw thread, and by the locked lens mount of cone match, locking swivel nut radially has screwed hole simultaneously, can add the further locked lens mount of holding screw；
Described optical fiber jacket is embedded in the hole of reflection arm framework other end；
Described fiber fixed frame is fixed on the reflection arm framework on optical fiber jacket limit；
Described shell is fixed on reflection arm framework；
The fifth port of described optical fiber is connected through optical fiber jacket with the fibre-optical splice of structure of fiber_optic, and the fifth port rear portion optical fiber of optical fiber is fixed on fiber fixed frame.
2. optical measuring device as claimed in claim 1, it is characterised in that described mirror assembly includes:
L-shaped framework, riser, crossbeam, the first connecting plate, the first two-dimension adjustment frame, the first spherical reflector, U-shaped mirror holder, the second spherical reflector, plane mirror, fibre-optical splice, the second two-dimension adjustment frame, the first keyset, the first one-dimensional translation stage, the second one-dimensional translation stage, the second keyset, fiber fixed frame, shaft coupling piece, locating stop piece, handle, cover plate and shade；
Wherein, described L-shaped framework, riser, crossbeam, the first connecting plate are interconnected to constitute an annular frame, and described cover plate is connected with this annular frame, constitute a cavity；
Described second spherical reflector, plane mirror are individually fixed in two sides of U-shaped mirror holder；
The bottom surface of described U-shaped mirror holder and the laminating of one end, L-shaped lower portion side, the installed surface of the second spherical reflector is fitted with the one side of riser；
Described first spherical reflector and the first two-dimension adjustment frame connect, and the first two-dimension adjustment frame is connected with riser top；
Described fibre-optical splice and the second two-dimension adjustment frame connect；Described second two-dimension adjustment frame is connected with described first one-dimensional translation stage by described first keyset；
Described first one-dimensional translation stage is connected by described second keyset and the second one-dimensional translation stage, and the second one-dimensional translation stage is fixed on the first connecting plate；
Described handle and the first connecting plate connect；Described fiber fixed frame is fixed on frame facet；3rd port of described optical fiber is connected with fibre-optical splice, and the optical fiber containing described 3rd port is fixed on described fiber fixed frame；
Described shaft coupling piece is connected with base of frame；Described shaft coupling piece is connected with the axle in described lateral plate component.
3. optical measuring device as claimed in claim 1, it is characterised in that described wave plate rotary components includes:
Core motor, the first adaptor, the second adaptor, photoelectric sensor, sensor catch, wave plate seat, wave plate, connection sheet, stator, adjustment screw and trip bolt；
Wherein, described core motor two ends connect first, second adaptor respectively；
Described wave plate one end is fixed with described connection sheet, is placed in wave plate seat；
Wave plate is compressed by described stator by trip bolt；
Described wave plate seat is fixed on the rotary end surface of core motor.
4. optical measuring device as claimed in claim 1, it is characterised in that described sample stage assembly includes:
Electric lifting platform, two-dimension adjustment platform, the sample stage being provided with vacuum tank and the second connecting plate；
Wherein, described electric lifting platform is fixed on described base central authorities；
Described two-dimension adjustment countertop is connected with described sample stage, and underrun the second connecting plate is connected with motorized stage electric lifting platform；
Described sample stage is provided with a plurality of reference line, for the placement reference of sample.
5. optical measuring device as claimed in claim 1, it is characterised in that described lateral plate component includes:
Side plate, reflection arm support, incident arm support, friction plate, axle, vertical magnetic, inclination magnetic and rocker arm shaft；
Wherein, described side plate is connected with base；Described reflection arm support can swing around rocker arm shaft with incident arm support, and is all embedded with friction plate at the described side plate tow sides of reflection arm support with the wobble area of incident arm support；
The arc surface of described side plate has pin-and-hole, for fixing incident arm support and reflection arm support；
Described rocker arm shaft is positioned at side plate home position；
Described axle is arranged on above the side of described rocker arm shaft, and described mirror assembly can rotate around the axis；Vertical magnetic is installed near described axle and tilts magnetic.
6. optical measuring device as claimed in claim 5, it is characterised in that described reflection arm support includes:
Rocking arm, framework, activity pin, locking handwheel, friction plate, cylinder, adjustment screw thread pair, fixing screw, the first adjustment screw, the first adjustment screw hole, the second adjustment screw and second adjust screw hole；Wherein, described rocking arm is F shape structure, and described framework can be inserted in the F shape opening of rocking arm；Described first adjusts screw through the first adjustment screw hole, and the first adjustment screw is lockable；A friction plate is respectively embedded in the middle of described framework and described rocking arm；Friction plate on described rocking arm can fit tightly with the friction plate on described side plate, locks handwheel scalable；Described movable pin is installed on rocking arm top, coordinates with the pin-and-hole on side plate arc surface；Described cylinder is arranged in the V-shaped groove of framework.
7. optical measuring device as claimed in claim 6, it is characterised in that:
The movable pin of described incident arm support is first to be arranged on a keyset, and keyset is arranged on incident arm support again through screw, and movable pin can be finely tuned；Reflection arm support can swing around rocker arm shaft with incident arm support, and rocker arm shaft is fixed on side plate.
8. optical measuring device as claimed in claim 6, it is characterised in that:
The back of described incident arm and reflection arm is both provided with V-shaped groove, and V-shaped groove and cylindrical fit during installation, fixing screw can lock reflection arm, and fixing screw can lock or unclamp.
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| CN201210281702.2A CN103575213B (en) | 2012-08-09 | 2012-08-09 | Optical measuring device |
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| CN201210281702.2A CN103575213B (en) | 2012-08-09 | 2012-08-09 | Optical measuring device |
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| WO2016035361A1 (en) * | 2014-09-01 | 2016-03-10 | 株式会社島津製作所 | Light measuring apparatus |
| CN104596639B (en) * | 2014-12-20 | 2017-04-19 | 西安炬光科技有限公司 | Far-field three-dimensional strength representation device for semiconductor light source |
| CN104730035A (en) * | 2015-03-06 | 2015-06-24 | 南京航空航天大学 | System for measuring main component content of emulsion and detection method thereof |
| CN105841615B (en) * | 2015-12-31 | 2019-02-15 | 广东工业大学 | A kind of line-structured light micro-measurement apparatus |
| CN107102434B (en) * | 2017-06-01 | 2019-05-17 | 中国科学院合肥物质科学研究院 | Adjusting polarization degree light source based on slide heap |
| CN107449362A (en) * | 2017-08-30 | 2017-12-08 | 江西昌河航空工业有限公司 | A kind of adjusting means for being used to measure thread parameter on optical measuring instrument |
| CN110261348B (en) * | 2019-07-04 | 2021-06-22 | 中南林业科技大学 | Near infrared spectrum fruit internal quality detection device |
| US11112231B2 (en) * | 2019-11-01 | 2021-09-07 | Applied Materials, Inc. | Integrated reflectometer or ellipsometer |
| CN111504200B (en) * | 2020-05-07 | 2022-11-29 | 山东菏鲁电子科技有限公司 | Visual detector that pencil connects |
| CN111678458A (en) * | 2020-06-18 | 2020-09-18 | 东莞市小可智能设备科技有限公司 | Tin ball vision measuring device and measuring method thereof |
| CN113566716B (en) * | 2021-08-27 | 2023-04-28 | 西安应用光学研究所 | Device and method for measuring micro relative displacement of reflecting mirror component in vibration environment |
| CN114739300A (en) * | 2022-03-29 | 2022-07-12 | 上海优睿谱半导体设备有限公司 | Method for measuring epitaxial layer thickness of epitaxial wafer |
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