CN103543292B - A kind of combined type accelerometer based on capacity effect and tunnel-effect - Google Patents
A kind of combined type accelerometer based on capacity effect and tunnel-effect Download PDFInfo
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- CN103543292B CN103543292B CN201310547838.8A CN201310547838A CN103543292B CN 103543292 B CN103543292 B CN 103543292B CN 201310547838 A CN201310547838 A CN 201310547838A CN 103543292 B CN103543292 B CN 103543292B
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Abstract
The invention discloses a kind of combined type accelerometer based on capacity effect and tunnel-effect, including: bonding substrate, pad framework, support frame, cantilever beam, mass, mass lower surface are provided centrally with tunnel point. The beneficial effects of the present invention is the mode adopting capacitance detecting integrated with tunnel-effect detection, the advantage having capacitance detecting and Tunnel testing concurrently, it may be achieved the low detection threshold value of acceleration, wide scope, highly sensitive detection; The acceleration being simultaneously available for known accekeration environment is accurately measured, and adopts integrated design, rational in infrastructure, and highly sensitive, testing circuit is simple, easy to use, good reliability, is suitable for microminiaturization.
Description
Technical field
The present invention relates to micro-inertial navigation technology association area, in particular to a kind of micro-mechanical accelerometer based on capacity effect and the combined type of tunnel-effect.
Background technology
Along with the development of micro mechanical system (MEMS) technology, it possesses, and cost is low, volume is little, easy mass production and the feature such as integration is good, increasingly receives the concern of people, is widely used in civilian and military field. But due to the restriction of Key Performance Indicator, micro mechanical sensor in leading-edge fields such as military affairs, space flight, aviations but without being applied fully. Wherein, sensitivity and range are the key indexs that micro mechanical sensor has much room for improvement, and utilize the sensor that main flow principle manufactures, and high sensitivity is generally along with small-range, low overload.
Development along with science and technology, the certainty of measurement of micro-acceleration is required increasingly stringent by special dimension, and the measurement of micro-acceleration by theoretic to application, is applied to the development of Tactical Application from strategy, the development of national economy and military affairs is had great significance, and is subject to the attention of countries in the world. The accurate measurement of micro-acceleration, the prediction of earthquake, Microgravity Science test, satellite remote sensing etc. is significant. The product of the existing relative maturity of this field developed country, and China starts late. Owing to its Oscillation Amplitude and frequency span are big, it is desirable to sensor has extremely low detection threshold value, possessing super sensitivity detection ability and the wide-range of weak vibration, the detection of existing detection scheme has difficulties.
Utilize the principle of capacitor, non electrical quantity can be converted into capacitance, and then realize the non electrical quantity conversion to electricity, have that temperature coefficient is little, good stability, sensitivity high a little, capacitive detection mode is used widely at present in micro mechanical system sensor.But, due to the impact of edge effect, distribution capacity, polar plate area etc., its precision can not meet detection demand, and it exists higher detection threshold value, and faint acceleration detection is had difficulties.
From quantum-mechanical theory it can be seen that due to the tunnel-effect of electronics, the electronics in conductor is not wholly constrained within surface-boundary, electron density does not sport zero in surface, but exponentially form decay beyond surface, the length of decay is about 1nm. Therefore. As long as using the surface of the superfine probe of atom dimension and studied material as two electrodes, when sample and needle point distance close to time (< 1um), their surface electronic cloud is it is possible to overlap. If adding a small voltage Ub between sample and needle point, electronics through the potential barrier two electrodes, will flow to another electrode, forms tunnel current. Meet between distance x between its tunnel current Is and needle point and pole plateAs can be seen here, tunnel current Is is very sensitive to the distance x between needle point and polar board surface, if x reduces 0.1nm, tunnel current IsWill increasing an order of magnitude, sensitivity is high, and detection threshold value is extremely low. But, during due to work, tunnel point is necessary for nanoscale with polar plate spacing, and its range is limited, and anti-overload ability is poor, and during high overload, tunnel point is easily damaged.
Summary of the invention
It is contemplated that at least solve one of technical problem of existence in prior art.
In view of this, the present invention needs to provide micro-mechanical accelerometer, and this micro-mechanical accelerometer is the micro-mechanical accelerometer that capacitance detecting and tunnel-effect detect integrated mode, at least can improve accuracy of detection and the detection range of micro-mechanical accelerometer.
The invention provides a kind of micro-mechanical accelerometer based on josephson effect, including: bonding substrate, bonding substrate center etched recesses, groove floor is arranged, tunnel pole plate is connected with tunnel electrode negative pole, tunnel groove vicinity is respectively arranged detection electric capacity bottom crown and controls electric capacity bottom crown, and described detection electric capacity bottom crown is connected with detecting electrode negative pole and control Electrode Negative respectively with controlling electric capacity bottom crown; Pad framework, pad framework is located at bonding surface and is connected with bonding substrate; Support frame, support frame is located at the top of pad framework and is connected with pad framework, and is connected with tunnel electrode positive pole, detecting electrode positive pole and controls electrode anode; Cantilever beam, cantilever beam two ends are connected with support frame and mass respectively, are used for supporting mass; Mass, mass lower surface is provided centrally with tunnel point, tunnel point is connected with tunnel electrode positive pole, is respectively arranged and detects electric capacity top crown and control electric capacity top crown around tunnel point, and detection electric capacity top crown is connected with detecting electrode positive pole and control electrode anode respectively with controlling electric capacity top crown.
A kind of combined type accelerometer based on capacity effect and tunnel-effect according to embodiments of the present invention, adopts integrated design, rational in infrastructure, and highly sensitive, testing circuit is simple, easy to use, good reliability, is suitable for microminiaturization. Can realize accurately measuring for the acceleration of different field.
According to one embodiment of present invention, described bonding substrate is big compared with pad framework area, the detection electric capacity bottom crown that upper surface is arranged becomes frame type with controlling electric capacity bottom crown and arranges from inside to outside, detecting electrode negative pole and control Electrode Negative, it is positioned at bonding radical panel edges, corresponding with the detecting electrode positive pole arranged on support frame and control electrode anode, described tunnel pole plate is positioned at bonding substrate central square groove floor.
Described detection electric capacity bottom crown becomes frame type indication frame type non-closed frame type with controlling electric capacity bottom crown. According to one embodiment of present invention, described cantilever beam width is more than thickness, and its lower surface is paralleled with support frame and mass lower surface, and its thickness is less than support frame or mass thickness.
According to one embodiment of present invention, described mass is supported in support frame center by cantilever beam, and can move up and down due to the effect of power. Described mass lower surface is provided centrally with tunnel point; its tunnel point length is less than the depth of groove of bonding substrate center etching; but after mass contacts with bonding substrate; the distance of the tunnel electrode negative pole that tunnel sharp end and groove floor are arranged should be less than 1nm; to sharp effectively the protecting of tunnel during to realize high overload, during to realize high overload, the effective of tunnel point is protected.
According to one embodiment of present invention, the tunnel-effect sensitive structure of described groove, tunnel pole plate, tunnel point composition can not be one group, can be the array structure of many group compositions, can be selected for one or more groups during practical application, to increase yield rate or accuracy of detection.
The detection electric capacity top crown of described mass lower surface arrangement and control electric capacity top crown, its structure size shape is identical with detection electric capacity bottom crown and control electric capacity bottom crown, and position is relative. The additional aspect of the present invention and advantage will part provide in the following description, and part will become apparent from the description below, or is recognized by the practice of the present invention.
The present invention controls electric capacity bottom crown and the voltage controlled between electric capacity top crown by Intelligent adjustment, owing to electrostatic effect is left behind mass, when tunnel type sensitive structure signal normally exports, namely tunnel point and groove pole interplate spacing keep voltage when reaching nanoscale, now applying electronic tunnel-effect can effectively detect faint acceleration signal, there is extremely low detection threshold value and high sensitivity, when acceleration input reaches predetermined threshold, control electrode and cut off voltage, now accelerometer adopts condenser type Cleaning Principle, to avoid damaging device and realizing the purpose of wide detection range.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage are from conjunction with will be apparent from easy to understand the accompanying drawings below description to embodiment, wherein:
Fig. 1 is the overall structure figure of the embodiment of the present invention;
Fig. 2 is the integrally-built side view of the embodiment of the present invention;
Fig. 3 is the fractionation structure chart of the embodiment of the present invention;
Fig. 4 is the bonding substrate front elevation with pad framework assembly of the embodiment of the present invention;
The reverse side that Fig. 5 is the support frame of the embodiment of the present invention, cantilever beam and mass assembly attempts;
Fig. 6 is the schematic diagram during wide range detection of the embodiment of the present invention;
The partial enlarged drawing of tunnel point when Fig. 7 is the micro-acceleration gauge detection of the embodiment of the present invention;
Fig. 8 is the perspective view during micro-acceleration gauge application tunnel array of the embodiment of the present invention.
Shown in figure, list of numerals is as follows:
1, it is bonded substrate 2, pad framework 3, support frame 4, cantilever beam 5, mass 6, tunnel pole plate 7, tunnel point 8, detection electric capacity bottom crown 9, detection electric capacity top crown 10, controls electric capacity bottom crown 11, control electric capacity top crown 12, tunnel electrode negative pole 13, tunnel electrode positive pole 14, detecting electrode negative pole 15, detecting electrode positive pole 16, control Electrode Negative 17, controls electrode anode.
Detailed description of the invention
Being described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of same or like function from start to finish. The embodiment described below with reference to accompanying drawing is illustrative of, and is only used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, it will be appreciated that, orientation or the position relationship of the instructions such as term " " center ", " on ", D score, "front", "rear", "left", "right" be based on orientation shown in the drawings or position relationship; be for only for ease of the description present invention and simplifying and describe; rather than instruction or imply indication device or element must have specific orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
In describing the invention, it is necessary to explanation, unless otherwise clearly defined and limited, term " being connected ", " connection " should be interpreted broadly, for instance, it is possible to it is fixing connection, it is also possible to be removably connect, or connect integratedly; Can be mechanically connected, it is also possible to be electrical connection; Can be joined directly together, it is also possible to be indirectly connected to by intermediary, it is possible to be the connection of two element internals. For the ordinary skill in the art, it is possible to concrete condition understands above-mentioned term concrete meaning in the present invention.
Utilize the principle of capacitor, non electrical quantity can be converted into capacitance, and then realize the non electrical quantity conversion to electricity, and having that temperature coefficient is little, good stability, sensitivity advantages of higher, capacitive detection mode is used widely at present in micro mechanical system sensor. But, due to the impact of edge effect, distribution capacity, polar plate area etc., its precision is can not meet detection demand, and it exists higher detection threshold value, and faint acceleration detection is had difficulties.
From quantum-mechanical theory it can be seen that due to the tunnel-effect of electronics, the electronics in conductor is not wholly constrained within surface-boundary, electron density does not sport zero in surface, but exponentially form decay beyond surface, the length of decay is about 1nm. Therefore. As long as using the surface of the superfine probe of atom dimension and studied material as two electrodes, when sample and needle point distance close to time (< 1um), their surface electronic cloud is it is possible to overlap. If adding a small voltage Ub between sample and needle point, electronics through the potential barrier two electrodes, will flow to another electrode, forms tunnel current. Meet between distance x between its tunnel current Is and needle point and pole plateAs can be seen here, tunnel current Is is very sensitive to the distance x between needle point and polar board surface, if x reduces 0.1nm, tunnel current Is and will increase an order of magnitude, sensitivity is high, and detection threshold value is extremely low. But, during due to work, tunnel point is necessary for nanoscale with polar plate spacing, and its range is limited, and anti-overload ability is poor, and during high overload, tunnel point is easily damaged.
Tunnel type accelerometer is based on quantum tunneling effect, and resolution can reach quantum stage, is especially suitable for faint acceleration detection, capacitive accelerometer technology maturation, is widely used. The mode that we's invention capacitance detecting is integrated with tunnel-effect detection, it may be achieved the low detection threshold value of acceleration, wide scope, highly sensitive detection. The acceleration being simultaneously available for known accekeration environment is accurately measured, it is possible to meet the accurate measurement demand of earthquake detection and satellite remote sensing. Simultaneously, it is also possible in precision positions location, Microgravity Science test, precision navigation etc.
Below in conjunction with accompanying drawing, the present invention will be further described:
As Figure 1-3, a kind of micro-mechanical accelerometer based on capacity effect and the combined type of tunnel-effect of base according to an embodiment of the invention, including: bonding substrate 1, bonding substrate 1 center etched recesses, groove floor is arranged, tunnel pole plate 6 is connected with tunnel electrode negative pole 12, and tunnel groove vicinity is respectively arranged detection electric capacity bottom crown 8 and controls electric capacity bottom crown 10 and be connected with detecting electrode negative pole 14 and control Electrode Negative 16 respectively; Pad framework 2, pad framework 2 is located at above bonding substrate 1 and is connected with bonding substrate 1; Support frame 3, support frame 3 is located at the top of pad framework and is connected with pad framework 3, and is connected with tunnel electrode positive pole 13, detecting electrode positive pole 15 and controls electrode anode 17;Cantilever beam 4, cantilever beam 4 two ends are connected with support frame 3 and mass 5 respectively, are used for supporting mass 5; Mass 5, mass 5 is provided centrally with tunnel point 7, tunnel point 7 is connected with tunnel electrode positive pole 13, it is respectively arranged around tunnel point 7 and detects electric capacity top crown 9 and control electric capacity top crown 11, detect electric capacity top crown 9 and control electric capacity top crown 11 and be connected with detecting electrode positive pole 15 and control electrode anode 17 respectively.
As shown in Figure 4, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel-effect, bonding substrate 1 is big compared with pad framework 2 area, detection electric capacity bottom crown 8 that upper surface is arranged and control 10 one-tenth frame types of electric capacity bottom crown and arranging from inside to outside, detecting electrode negative pole 14 and control Electrode Negative 16, it is positioned at bonding substrate 1 edge, corresponding with the detecting electrode positive pole 15 arranged on support frame 3 and control electrode anode 17, described tunnel pole plate 6 is positioned at bonding substrate 1 central square groove floor.
It should be noted that electric capacity bottom crown 8 and control 10 one-tenth frame type indication frame types of electric capacity bottom crown non-closed frame type, due to the connecting line between tunnel pole plate 6 and tunnel electrode negative pole 12, it is non-closed on the left of detection electric capacity bottom crown 8, equally, due to the connecting line between the connecting line between tunnel pole plate 6 and tunnel electrode negative pole 12, detection electric capacity bottom crown 8 and detecting electrode negative pole 14, also it is non-closed on the left of detection electric capacity bottom crown 8.
As shown in Figure 5, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel-effect, cantilever beam 4 width is more than thickness, and its lower surface is paralleled with support frame 3 and mass 4 lower surface, and its thickness is less than support frame 3 or mass 5 thickness; Mass 5 is supported in support frame 3 center by cantilever beam 4, and can move up and down due to the effect of power, the detection electric capacity top crown 9 of mass 5 lower surface arrangement and control electric capacity top crown 11, its structure size shape is identical with detection electric capacity bottom crown 8 and control electric capacity bottom crown 10, and position is relative.
As shown in fig. 6-7, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel-effect, the space of mass 5 is provided by pad framework 2, and during off working state, between mass 5 and pad framework, the distance between 2 is pad framework thickness h. The lower surface of mass 5 is provided centrally with tunnel point 7; its tunnel point length is less than the depth of groove of bonding substrate 1 center etching; but after mass 5 contacts with bonding substrate 1; most advanced and sophisticated and the tunnel electrode negative pole (12) of groove floor layout the distance d of tunnel sharp 7 should be less than 1nm, during to realize high overload, the effective of tunnel point 7 is protected.
Specifically, when accelerometer is started working, control electric capacity bottom crown 10 and control to apply between electric capacity top crown 11 to control voltage, owing to electrostatic effect is left behind mass 5. When tunnel type sensitive structure signal normally exports, namely the tunnel electrode negative pole 12 spacing d that the tunnel point 7 at mass 5 center and groove floor are arranged keeps voltage when reaching nanoscale, now mass reaches stress balance, accelerometer is operated in highly sensitive state, when there being small acceleration to input by mass 5 sense accelerations size, the distance d between the tunnel electrode negative pole 12 of tunnel point 7 and groove floor layout is made to change, the change of distance will cause that tunnelling current sharply changes, and can be derived the size of acceleration by the change of electric current.
As shown in Figure 6, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel-effect, the space of mass 5 is provided by pad framework 2, when off working state, between mass 5 and pad framework, the distance between 2 is pad framework thickness h, when input acceleration is sufficiently large, can be that Detection electrode contacts or tunnel current reaches predetermined threshold, control electric capacity bottom crown 10 and control to stop between electric capacity top crown 11 applying voltage, release mass (5), when accelerometer is now in capacitance detecting state, acceleration causes that two-plate spacing h changes, and then obtain acceleration magnitude.
As shown in Figure 8, a kind of according to an embodiment of the invention micro-mechanical accelerometer based on capacity effect and the combined type of tunnel-effect, the tunnel-effect sensitive structure of groove, tunnel pole plate 6, tunnel point 7 composition can not be one group, it can be the array structure of many group compositions, one or more groups is can be selected for, to increase yield rate or accuracy of detection during practical application.
It should be noted that, this inventive embodiment can also be used for the acceleration of known accekeration environment and accurately measures, according to known acceleration magnitude regulable control magnitude of voltage, make tunnel point 7 under this acceleration effect just reach nanoscale with tunnel electrode negative pole 12 spacing d, tunnel-effect can be applied and realize the accurate measurement of acceleration.
The present invention controls electric capacity bottom crown 10 and the voltage controlled between electric capacity top crown 11 by Intelligent adjustment, owing to electrostatic effect is left behind mass, when tunnel type sensitive structure signal normally exports, namely tunnel point and groove pole interplate spacing keep voltage when reaching nanoscale, now applying electronic tunnel-effect can effectively detect faint acceleration signal, there is extremely low detection threshold value and high sensitivity, when acceleration input reaches predetermined threshold, control electrode and cut off voltage, now accelerometer adopts condenser type Cleaning Principle, to avoid damaging device and realizing the purpose of wide detection range.
In the description of this specification, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example describe are contained at least one embodiment or the example of the present invention. In this manual, the schematic representation of above-mentioned term is not necessarily referring to identical embodiment or example. And, the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that, these embodiments can being carried out multiple change, amendment, replacement and modification when without departing from principles of the invention and objective, the scope of the present invention is limited by claim and equivalent thereof.
Claims (8)
1., based on a combined type accelerometer for capacity effect and tunnel-effect, its characteristic is in that, including:
Bonding substrate (1), bonding substrate (1) center etched recesses, groove floor arranges tunnel pole plate (6), tunnel pole plate (6) is connected with tunnel electrode negative pole (12), tunnel groove vicinity is respectively arranged detection electric capacity bottom crown (8) and controls electric capacity bottom crown (10), and described detection electric capacity bottom crown (8) is connected with detecting electrode negative pole (14) and control Electrode Negative (16) respectively with controlling electric capacity bottom crown (10);
Pad framework (2), pad framework (2) is located at bonding substrate (1) top and is connected with bonding substrate (1);
Support frame (3), support frame (3) is located at the top of pad framework (2) and is connected with pad framework (2), and is connected with tunnel electrode positive pole (13), detecting electrode positive pole (15) and controls electrode anode (17);
Cantilever beam (4), cantilever beam (4) two ends are connected with support frame (3) and mass (5) respectively, are used for supporting mass (5);
Mass (5), mass (5) lower surface is provided centrally with tunnel point (7), tunnel point (7) is connected with tunnel electrode positive pole (13), being respectively arranged detection electric capacity top crown (9) around tunnel point (7) and control electric capacity top crown (11), detection electric capacity top crown (9) is connected with detecting electrode positive pole (15) and control electrode anode (17) respectively with controlling electric capacity top crown (11).
2. combined type accelerometer according to claim 1, it is characterized in that, described bonding substrate (1) is big compared with pad framework (2) area, detection electric capacity bottom crown (8) that upper surface is arranged becomes frame type with controlling electric capacity bottom crown (10) and arranges from inside to outside, detecting electrode negative pole (14) and control Electrode Negative (16), it is positioned at bonding substrate (1) edge, corresponding with the upper detecting electrode positive pole (15) arranged of support frame (3) and control electrode anode (17), described tunnel pole plate (6) is positioned at bonding substrate (1) central square groove floor.
3. combined type accelerometer according to claim 2, it is characterised in that described detection electric capacity bottom crown (8) becomes frame type with controlling electric capacity bottom crown (10), and described frame type is non-closed frame type.
4. combined type accelerometer according to claim 1, it is characterized in that, described cantilever beam (4) width is more than thickness, its lower surface is paralleled with support frame (3) and mass (4) lower surface, and its thickness is less than support frame (3) or mass (5) thickness.
5. combined type accelerometer according to claim 1, it is characterised in that described mass (5) is supported in support frame (3) center by cantilever beam (4), and can move up and down due to the effect of power.
6. combined type accelerometer according to claim 1; it is characterized in that; tunnel point length is less than the depth of groove of bonding substrate (1) center etching; but after mass (5) contacts with bonding substrate (1); the distance of the tunnel electrode negative pole (12) that tunnel point (7) tip is arranged with groove floor should be less than 1nm, during to realize high overload, the effective of tunnel point (7) is protected.
7. combined type accelerometer according to claim 1, it is characterized in that, detection electric capacity top crown (9) and control electric capacity top crown (11), its structure size shape is identical with detection electric capacity bottom crown (8) and control electric capacity bottom crown (10), and position is relative.
8. according to the combined type accelerometer one of claim 1-7 Suo Shu, it is characterized in that, electric capacity bottom crown (10) and the voltage controlled between electric capacity top crown (11) is controlled by Intelligent adjustment, owing to electrostatic effect is left behind mass, when tunnel type sensitive structure signal normally exports, namely tunnel point and groove pole interplate spacing keep voltage when reaching nanoscale, now applying electronic tunnel-effect can effectively detect faint acceleration signal, there is extremely low detection threshold value and high sensitivity, when acceleration input reaches predetermined threshold, control electrode and cut off voltage, now accelerometer adopts condenser type Cleaning Principle, to avoid damaging device and realizing the purpose of wide detection range.
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| US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
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| CN107131819B (en) * | 2017-06-12 | 2023-02-24 | 中北大学 | Single-axis micro-mechanical displacement sensor based on tunnel magnetoresistance effect |
| CN107132372B (en) * | 2017-06-29 | 2023-03-17 | 四川知微传感技术有限公司 | Structure for capacitance detection of capacitive micro-mechanical accelerometer |
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| CN110780088B (en) * | 2019-11-08 | 2021-08-03 | 中北大学 | Multi-bridge tunnel magnetic resistance double-shaft accelerometer |
| CN111579818B (en) * | 2020-07-06 | 2021-09-28 | 吉林大学 | High-sensitivity low-noise acceleration detection device and method |
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