CN103543292A - Composite accelerometer based on capacitance effect and tunnel effect - Google Patents
Composite accelerometer based on capacitance effect and tunnel effect Download PDFInfo
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Abstract
The invention discloses a composite accelerometer based on a capacitance effect and a tunnel effect. The composite accelerometer comprises a bonding substrate, a cushion liner frame body, a supporting frame body, a cantilever beam and a mass block. A tunnel point is arranged at the center of the lower surface of the mass block. The composite accelerometer based on the capacitance effect and the tunnel effect has the advantages of adopting the manner of integrating capacitance detection and tunnel effect detection and detecting a capacitor and a tunnel. Detection of a low detection threshold value, a wide range and high sensitivity of an acceleration speed is achieved. Meanwhile, accurate measurement of the acceleration speed of a known acceleration speed value circumstance is carried out. The integrated design is adopted and the composite accelerometer is reasonable in structure, high in sensitivity, simple in detection circuit, convenient to use, good in reliability and suitable for microminiaturization.
Description
Technical field
The present invention relates to micro-inertial navigation technology association area, in particular to a kind of micro-mechanical accelerometer of the combined type based on capacity effect and tunnel effect.
Background technology
Along with the development of micro mechanical system (MEMS) technology, it possesses, and cost is low, volume is little, easy mass production and the feature such as integration is good, more and more receives people's concern, in civilian and military field, is widely used.But due to the restriction of Key Performance Indicator, micro mechanical sensor is not also applied fully in leading-edge fields such as military affairs, space flight, aviations.Wherein, sensitivity and range are the key indexs that micro mechanical sensor has much room for improvement, the sensor that utilizes main flow principle to manufacture, and high sensitivity is accompanied by small-range, low overload conventionally.
Along with scientific and technological development, special dimension requires increasingly stringent to the measuring accuracy of micro-acceleration, the measurement of micro-acceleration by theoretical aspect to application, from strategy, be applied to the development of Tactical Application, national economy and military development are had great significance, and be subject to the attention of countries in the world.The accurate measurement of micro-acceleration, significant to the prediction of earthquake, Microgravity Science test, satellite remote sensing etc.This field reaches the existing relatively ripe product ，Er China of country and starts late.Due to its Oscillation Amplitude and frequency span large, require sensor to there is extremely low detection threshold, possess super sensitivity detection ability and the wide-range of weak vibration, existing detection scheme detects and has difficulties.
Utilize the principle of capacitor, non electrical quantity can be converted into electric capacity, and then realize non electrical quantity to the conversion of electric weight, and having that temperature coefficient is little, good stability, sensitivity be a little high, capacitive detection mode is used widely at present in micro mechanical system sensor.But due to the impact of edge effect, distributed capacitance, polar plate area etc., its precision can not meet detection demand, and the higher detection threshold of its existence, faint acceleration detection is had difficulties.
From quantum-mechanical theory, due to the tunnel effect of electronics, within the electronics in conductor is also not exclusively confined to surface-boundary, electron density does not sport zero in surface, but beyond on surface, is exponential form decay, the about 1nm of length of decay.Therefore.As long as using the surface of the superfine probe of atom dimension and studied material as two electrodes, when the distance of sample and needle point approaches (<1um), their surface electronic cloud just may be overlapping.If add a small voltage U between sample and needle point
b, electronics will flow to another electrode through the potential barrier between two electrodes, forms tunnel current.Between distance x between its tunnel current Is and needle point and pole plate, meet
.As can be seen here, tunnel current I
svery responsive to the distance x between needle point and polar board surface, if x reduces 0.1nm, tunnel current Is will increase an order of magnitude, and sensitivity is high, and detection threshold is extremely low.But tunnel point is necessary for nanoscale with polar plate spacing during due to work, its range is limited, and anti-overload ability is poor, and during high overload, tunnel point easily damages.
Summary of the invention
The present invention is intended at least solve one of technical matters existing in prior art.
In view of this, the present invention need to provide micro-mechanical accelerometer, and this micro-mechanical accelerometer is the micro-mechanical accelerometer that capacitance detecting and tunnel effect detect integrated mode, at least can improve accuracy of detection and the sensing range of micro-mechanical accelerometer.
The invention provides a kind of micro-mechanical accelerometer based on josephson effect, comprise: bonding substrate, bonding substrate center etched recesses, groove floor is arranged, tunnel pole plate is connected with tunnel electrode negative pole, tunnel groove is arranged respectively Detection capacitance bottom crown and control capacitance bottom crown around, and described Detection capacitance bottom crown is connected with control electrode negative pole with detecting electrode negative pole respectively with control capacitance bottom crown; Pad framework, pad framework is located at bonding substrate top and is connected with bonding substrate; Support frame, support frame is located at the top of pad framework and is connected with pad framework, and below is provided with tunnel electrode positive pole, detecting electrode positive pole and control electrode positive pole; Semi-girder, semi-girder two ends are connected with mass with support frame respectively, for supporting mass; Mass, mass lower surface center is provided with tunnel point, tunnel point is connected with tunnel electrode positive pole, and tunnel point is arranged respectively Detection capacitance top crown and control capacitance top crown around, and Detection capacitance top crown is connected with control electrode is anodal with detecting electrode is anodal respectively with control capacitance top crown.
According to a kind of combined type accelerometer based on capacity effect and tunnel effect of the embodiment of the present invention,, adopt integrated design, rational in infrastructure, highly sensitive, testing circuit is simple, easy to use, good reliability, applicable microminiaturized.Can realize for the acceleration of different field and accurately measuring.
According to one embodiment of present invention, described bonding substrate is large compared with pad framework area, the Detection capacitance bottom crown that upper surface is arranged becomes frame type and arranges from inside to outside with control capacitance bottom crown, detecting electrode negative pole and control electrode negative pole, be positioned at bonding radical panel edges, corresponding with detecting electrode positive pole and the control electrode positive pole arranged on support frame, described tunnel pole plate is positioned at bonding substrate central square groove floor.
Described Detection capacitance bottom crown becomes frame type indication frame type with control capacitance bottom crown be not closed frame type.According to one embodiment of present invention, described semi-girder width is greater than thickness, and its lower surface parallels with support frame and mass lower surface, and its thickness is less than support frame or mass thickness.
According to one embodiment of present invention, described mass is supported in support frame center by semi-girder, and can move up and down due to the effect of power.
Described mass lower surface center is provided with tunnel point; its tunnel point length is less than the depth of groove of bonding substrate center etching; but after mass and bonding substrate contacts; tunnel point distance most advanced and sophisticated and the tunnel electrode negative pole that groove floor is arranged should be less than 1nm; effective protection to tunnel point when realizing high overload, the effective protection to tunnel point when realizing high overload.
According to one embodiment of present invention, the tunnel effect sensitive structure that described groove, tunnel pole plate, tunnel point form can not be one group, can be the array structure that many groups form, during practical application, can select one or more groups, to increase yield rate or accuracy of detection.
The Detection capacitance top crown of described mass lower surface arrangement and control capacitance top crown, its structure size shape is identical with control capacitance bottom crown with Detection capacitance bottom crown, and position is relative.Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
The present invention regulates the voltage between control capacitance bottom crown and control capacitance top crown by intelligence, due to the electrostatic effect mass of leaving behind, when tunnel type sensitive structure signal is normally exported, be when spacing reaches nanoscale between tunnel point and groove pole plate, to keep voltage, now can applying electronic tunnel effect effectively detect faint acceleration signal, there is extremely low detection threshold and high sensitivity, when acceleration input reaches predetermined threshold, control electrode cuts off voltage, now accelerometer adopts condenser type to detect principle, with the object of avoiding damaging device and realizing wide sensing range.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is the one-piece construction figure of the embodiment of the present invention;
Fig. 2 is the integrally-built side view of the embodiment of the present invention;
Fig. 3 is the fractionation structural drawing of the embodiment of the present invention;
Fig. 4 is the bonding substrate of the embodiment of the present invention and the front view (FV) of pad framework assembly;
Fig. 5 is that the reverse side of support frame, semi-girder and the mass assembly of the embodiment of the present invention is attempted;
Fig. 6 is the schematic diagram of the wide range of the embodiment of the present invention while detecting;
Fig. 7 is the partial enlarged drawing of the micro-acceleration gauge of embodiment of the present invention tunnel point while detecting;
Skeleton view when Fig. 8 is the micro-acceleration gauge application tunnel array of the embodiment of the present invention.
Shown in figure, list of numerals is as follows:
1, bonding substrate 2, pad framework 3, support frame 4, semi-girder 5, mass 6, tunnel pole plate 7, tunnel point 8, Detection capacitance bottom crown 9, Detection capacitance top crown 10, control capacitance bottom crown 11, control capacitance top crown 12, tunnel electrode negative pole 13, tunnel electrode positive pole 14, detecting electrode negative pole 15, detecting electrode positive pole 16, control electrode negative pole 17, control electrode positive pole.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, orientation or the position relationship of the indications such as term " " center ", " on ", D score, 'fornt', 'back', " left side ", " right side " be based on orientation shown in the drawings or position relationship; be only the present invention for convenience of description and simplified characterization; rather than the device of indication or hint indication or element must have specific orientation, with specific orientation structure and operation, so can not be interpreted as limitation of the present invention.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " is connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connects integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete meaning in the present invention.
Utilize the principle of capacitor, non electrical quantity can be converted into electric capacity, and then realize non electrical quantity to the conversion of electric weight, and having that temperature coefficient is little, good stability, sensitivity be a little high, capacitive detection mode is used widely at present in micro mechanical system sensor.But due to the impact of edge effect, distributed capacitance, polar plate area etc., its precision is can not meet detection demand, and the higher detection threshold of its existence, and faint acceleration detection is had difficulties.
From quantum-mechanical theory, due to the tunnel effect of electronics, within the electronics in conductor is also not exclusively confined to surface-boundary, electron density does not sport zero in surface, but beyond on surface, is exponential form decay, the about 1nm of length of decay.Therefore.As long as using the surface of the superfine probe of atom dimension and studied material as two electrodes, when the distance of sample and needle point approaches (<1um), their surface electronic cloud just may be overlapping.If add a small voltage U between sample and needle point
b, electronics will flow to another electrode through the potential barrier between two electrodes, forms tunnel current.Between distance x between its tunnel current Is and needle point and pole plate, meet
.As can be seen here, tunnel current I
svery responsive to the distance x between needle point and polar board surface, if x reduces 0.1nm, tunnel current Is will increase an order of magnitude, and sensitivity is high, and detection threshold is extremely low.But tunnel point is necessary for nanoscale with polar plate spacing during due to work, its range is limited, and anti-overload ability is poor, and during high overload, tunnel point easily damages.
Tunnel type accelerometer is based on quantum tunneling effect, and resolution can reach quantum stage, is applicable to very much faint acceleration detection, and capacitive accelerometer technology maturation, is widely used.We's invention detects integrated mode by capacitance detecting and tunnel effect, can realize low detection threshold, wide region, the highly sensitive detection of acceleration.The acceleration that simultaneously can be used for known accekeration environment is accurately measured, and can meet the accurate measurement demand of earthquake detection and satellite remote sensing.Meanwhile, also can be used for precision positions location, Microgravity Science test, precision navigation etc.
Below in conjunction with accompanying drawing, the present invention will be further described:
As Figure 1-3, the micro-mechanical accelerometer of a kind of combined type based on capacity effect and tunnel effect of base according to an embodiment of the invention, comprise: bonding substrate 1, bonding substrate 1 center etched recesses, groove floor is arranged, tunnel pole plate 6 is connected with tunnel electrode negative pole 12, and tunnel groove is arranged respectively Detection capacitance bottom crown 8 around with control capacitance bottom crown 10 and is connected with control electrode negative pole 16 with detecting electrode negative pole 14 respectively; Pad framework 2, pad framework 2 is located at bonding substrate 1 top and is connected with bonding substrate 1; Support frame 3, support frame 3 is located at the top of pad framework and is connected with pad framework 3, and below is provided with tunnel electrode positive pole 13, detecting electrode anodal 15 and control electrode positive pole 17; Semi-girder 4, semi-girder 4 two ends are connected with mass 5 with support frame 3 respectively, for supporting mass 5; Mass 5, mass 5 centers are provided with tunnel point 7, tunnel point 7 is connected with tunnel electrode positive pole 13, tunnel point 7 is connected with tunnel electrode positive pole 13, tunnel point 7 is arranged respectively Detection capacitance top crown 9 and control capacitance top crown 11 around, and Detection capacitance top crown 9 is with control capacitance top crown 11 and be connected with control electrode anodal 17 with detecting electrode anodal 15 respectively.
As shown in Figure 4, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel effect, bonding substrate 1 is large compared with pad framework 2 areas, 10 one-tenth frame types of Detection capacitance bottom crown 8 and control capacitance bottom crown that upper surface is arranged and arranging from inside to outside, detecting electrode negative pole 14 and control electrode negative pole 16, be positioned at bonding substrate 1 edge, corresponding with the detecting electrode of arranging on support frame 3 anodal 15 and control electrode positive pole 17, described tunnel pole plate 6 is positioned at bonding substrate 1 central square groove floor.
It should be noted that 10 one-tenth frame type indication frame types of electric capacity bottom crown 8 and control capacitance bottom crown are not closed frame type, connecting line due to 12, tunnel pole plate 6 and tunnel electrode negative pole, Detection capacitance bottom crown 8 left sides are non-closure, equally, due to the connecting line of 14, the connecting line of 12, tunnel pole plate 6 and tunnel electrode negative pole, Detection capacitance bottom crown 8 and detecting electrode negative pole, Detection capacitance bottom crown 8 left sides are also non-closure.
As shown in Figure 5, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel effect, semi-girder 4 width are greater than thickness, and its lower surface parallels with support frame 3 and mass 4 lower surfaces, and its thickness is less than support frame 3 or mass 5 thickness; Mass 5 is supported in support frame 3 centers by semi-girder 4, and can move up and down due to the effect of power, the Detection capacitance top crown 9 of mass 5 lower surface arrangement and control capacitance top crown 11, its structure size shape is identical with control capacitance bottom crown 10 with Detection capacitance bottom crown 8, and position is relative.
As shown in Fig. 6-7, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel effect, the space of mass 5 is provided by pad framework 2, and during off working state, between mass 5 and pad framework, the distance of 2 is pad framework thickness h.The lower surface center of mass 5 is provided with tunnel point 7; its tunnel point length is less than the depth of groove of bonding substrate 1 center etching; but after mass 5 contacts with bonding substrate 1; the distance d of the most advanced and sophisticated tunnel electrode negative pole (12) of arranging with groove floor of tunnel point 7 should be less than 1nm, the effective protection to tunnel point 7 when realizing high overload.
Particularly, when accelerometer is started working, 11 of control capacitance bottom crown 10 and control capacitance top crowns apply control voltage, due to the electrostatic effect mass 5 of leaving behind.When tunnel type sensitive structure signal is normally exported, be that tunnel electrode negative pole 12 spacing d that tunnel point 7 and the groove floor at mass 5 centers arranged keep voltage while reaching nanoscale, now mass reaches stress balance, accelerometer is operated in highly sensitive state, big or small by mass 5 sense accelerations when having small acceleration input, the distance d of 12, the tunnel electrode negative pole of tunnel point 7 and groove floor layout is changed, the variation of distance will cause tunnelling current sharply to change, and can derive the size of acceleration by the variation of electric current.
As shown in Figure 6, a kind of according to an embodiment of the invention combined type micro-mechanical accelerometer based on capacity effect and tunnel effect, the space of mass 5 is provided by pad framework 2, when off working state, between mass 5 and pad framework, the distance of 2 is pad framework thickness h, when input acceleration is enough large, can be that Detection electrode contacts or tunnel current reaches predetermined threshold, 11 of control capacitance bottom crown 10 and control capacitance top crowns stop applying voltage, discharge mass (5), when accelerometer is now in capacitance detecting state, acceleration causes two-plate spacing h to change, and then obtain acceleration magnitude.
As shown in Figure 8, a kind of according to an embodiment of the invention micro-mechanical accelerometer of the combined type based on capacity effect and tunnel effect, the tunnel effect sensitive structure that groove, tunnel pole plate 6, tunnel point 7 form can not be one group, it can be the array structure that many groups form, during practical application, can select one or more groups, to increase yield rate or accuracy of detection.
It should be noted that, this inventive embodiment also can be used for the acceleration of known accekeration environment and accurately measures, according to known acceleration magnitude, regulate and control magnitude of voltage, make tunnel point 7 under this acceleration effect just reach nanoscale with tunnel electrode negative pole 12 spacing d, can apply the accurate measurement that tunnel effect realizes acceleration.
The present invention regulates the voltage of 11 of control capacitance bottom crown 10 and control capacitance top crowns by intelligence, due to the electrostatic effect mass of leaving behind, when tunnel type sensitive structure signal is normally exported, be when spacing reaches nanoscale between tunnel point and groove pole plate, to keep voltage, now can applying electronic tunnel effect effectively detect faint acceleration signal, there is extremely low detection threshold and high sensitivity, when acceleration input reaches predetermined threshold, control electrode cuts off voltage, now accelerometer adopts condenser type to detect principle, with the object of avoiding damaging device and realizing wide sensing range.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that, in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (8)
1. the combined type accelerometer based on capacity effect and tunnel effect, its characteristic is, comprising:
Bonding substrate (1), bonding substrate (1) center etched recesses, groove floor is arranged, tunnel pole plate (6) is connected with tunnel electrode negative pole (12), tunnel groove is arranged respectively Detection capacitance bottom crown (8) and control capacitance bottom crown (10) around, and described Detection capacitance bottom crown (8) is connected with control electrode negative pole (16) with detecting electrode negative pole (14) respectively with control capacitance bottom crown (10);
Pad framework (2), pad framework (2) is located at bonding substrate (1) top and is connected with bonding substrate (1);
Support frame (3), support frame (3) is located at the top of pad framework (2) and is connected with pad framework (2), and below is provided with tunnel electrode positive pole (13), detecting electrode anodal (15) and control electrode anodal (17);
Semi-girder (4), semi-girder (4) two ends are connected with mass (5) with support frame (3) respectively, for supporting mass (5);
Mass (5), mass (5) lower surface center is provided with tunnel point (7), tunnel point (7) is connected with tunnel electrode anodal (13), tunnel point (7) is arranged respectively Detection capacitance top crown (9) and control capacitance top crown (11) around, and Detection capacitance top crown (9) is connected with control electrode anodal (17) with detecting electrode anodal (15) respectively with control capacitance top crown (11).
2. combined type accelerometer according to claim 1, it is characterized in that, described bonding substrate (1) is large compared with pad framework (2) area, the Detection capacitance bottom crown (8) that upper surface is arranged becomes frame type and arranges from inside to outside with control capacitance bottom crown (10), detecting electrode negative pole (14) and control electrode negative pole (16), be positioned at bonding substrate (1) edge, corresponding with the upper detecting electrode of arranging of support frame (3) anodal (15) and control electrode anodal (17), described tunnel pole plate (6) is positioned at bonding substrate (1) central square groove floor.
3. combined type accelerometer according to claim 2, is characterized in that, described Detection capacitance bottom crown (8) becomes frame type with control capacitance bottom crown (10) be non-closed frame type.
4. combined type accelerometer according to claim 1, it is characterized in that, described semi-girder (4) width is greater than thickness, its lower surface parallels with support frame (3) and mass (4) lower surface, and its thickness is less than support frame (3) or mass (5) thickness.
5. combined type accelerometer according to claim 1, is characterized in that, described mass (5) is supported in support frame (3) center by semi-girder (4), and can move up and down due to the effect of power.
6. combined type accelerometer according to claim 1; it is characterized in that; tunnel point length is less than the depth of groove of bonding substrate (1) center etching; but after mass (5) contacts with bonding substrate (1); the distance of the most advanced and sophisticated tunnel electrode negative pole (12) of arranging with groove floor of tunnel point (7) should be less than 1nm, the effective protection to tunnel point (7) when realizing high overload.
7. combined type accelerometer according to claim 1, it is characterized in that, Detection capacitance top crown (9) and control capacitance top crown (11), its structure size shape is identical with control capacitance bottom crown (10) with Detection capacitance bottom crown (8), and position is relative.
8. according to the combined type accelerometer one of claim 1-7 Suo Shu, it is characterized in that, by intelligence, regulate the voltage between control capacitance bottom crown (10) and control capacitance top crown (11), due to the electrostatic effect mass of leaving behind, when tunnel type sensitive structure signal is normally exported, be when spacing reaches nanoscale between tunnel point and groove pole plate, to keep voltage, now can applying electronic tunnel effect effectively detect faint acceleration signal, there is extremely low detection threshold and high sensitivity, when acceleration input reaches predetermined threshold, control electrode cuts off voltage, now accelerometer adopts condenser type to detect principle, with the object of avoiding damaging device and realizing wide sensing range.
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| CN105319394A (en) * | 2015-12-07 | 2016-02-10 | 太原理工大学 | Angular acceleration detector based on resonant light tunneling effect and detecting method |
| CN105424300A (en) * | 2015-11-06 | 2016-03-23 | 扬州大学 | Tunneling fiber device |
| CN107131819A (en) * | 2017-06-12 | 2017-09-05 | 中北大学 | Single shaft micromechanics displacement transducer based on tunnel magneto-resistance effect |
| CN107132372A (en) * | 2017-06-29 | 2017-09-05 | 四川知微传感技术有限公司 | A kind of structure for capacitance type micromechanical accelerometer capacitance detecting |
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| CN110615402A (en) * | 2018-06-19 | 2019-12-27 | 中国科学院声学研究所 | MEMS piezoelectric vector hydrophone with simply supported cantilever beam structure and preparation method thereof |
| CN110780088A (en) * | 2019-11-08 | 2020-02-11 | 中北大学 | Multi-bridge tunnel magnetic resistance double-shaft accelerometer |
| CN111579818A (en) * | 2020-07-06 | 2020-08-25 | 吉林大学 | High-sensitivity low-noise acceleration detection device and method |
| CN111579818B (en) * | 2020-07-06 | 2021-09-28 | 吉林大学 | High-sensitivity low-noise acceleration detection device and method |
| CN112505354B (en) * | 2021-01-25 | 2021-06-01 | 杭州麦新敏微科技有限责任公司 | MEMS linear accelerometer and method of formation |
| CN112505354A (en) * | 2021-01-25 | 2021-03-16 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and method of formation |
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