CN103512868B - A kind of microcell laser probe analytical instrument based on fibre-optic waveguide - Google Patents
A kind of microcell laser probe analytical instrument based on fibre-optic waveguide Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Abstract
The invention discloses a kind of microcell laser probe analytical instrument based on fibre-optic waveguide, comprise Nd:YAG laser instrument, Wavelength tunable laser, CCD monitoring camera, computing machine, grating spectrograph, focusing objective len, displacement platform, digital delay pulse producer, enhancement mode CCD; Focusing objective len is reflective focusing objective len, Nd:YAG laser instrument and Wavelength tunable laser all use fibre-optic waveguide to carry out the transmission of laser pulse, and collimate through fiber optic collimator mirror, described focusing objective len is entered after beam expanding lens expands, the laser pulse launched by Nd:YAG laser instrument produces plasma for carrying out ablation to sample surfaces microcell to be analyzed, and the laser pulse launched by described Wavelength tunable laser for producing resonance excitation on described plasma; One end of optical fiber is for gathering the spectral signal of described plasma emission, and the other end is connected with the optical fiber interface of grating spectrograph.The present invention can realize the accurate quantification and qualification of laser probe to material micro-area composition.
Description
Technical field
The invention belongs to constituent analysis and detection technique field, be specially a kind of microcell laser probe analytical instrument based on fibre-optic waveguide, be mainly used in the accurate quantification and qualification of the material composition of tiny area.
Background technology
Laser probe technology, i.e. Laser-induced Breakdown Spectroscopy (Laser-Induced breakdownSpectroscopy, be called for short LIBS) technology, utilize high energy laser beam to bombard analyte surface to produce plasma, by gathering the characteristic spectrum of plasma emission and analyzing it, and then obtain a kind of novel elemental analysis technology of element kind contained by analyte and content.LIBS technology has the advantages such as detect without the need to sample pretreatment, multielement and can detect online, in real time simultaneously, since birth is paid close attention to so far widely always.But due to the pulsed laser energy large (>100mJ) that traditional LIBS technology adopts, and the spot diameter after focusing on large (>100um), make it cannot carry out quantitatively accurate and qualitative analysis to material microregion element, cause microcell laser probe technology in recent years more and more to receive the concern of people.But still there are following two main deficiencies in microcell laser probe technology: one, detection limit is low at present; Two, system is comparatively large by external interference, and accuracy in detection is low, poor stability.
Chinese patent literature " a kind of component analyzer for laser probe micro-area based on double laser light source " (bulletin is CN101782517A, and the day for announcing is on July 21st, 2010) discloses a kind of component analyzer for laser probe micro-area based on double laser light source.Its structure is: laser with fixed wavelength, attenuator, beam expanding lens, aperture and the first semi-transparent semi-reflecting lens are positioned in same level light path successively, and Wavelength tunable laser reflexes to after on the first semi-transparent semi-reflecting lens and the laser beam same light path of laser with fixed wavelength by the second total reflective mirror; Laser with fixed wavelength and Wavelength tunable laser up and down or parallel placement, and can control its opening sequence and time delay by digital delay generator; Received by fibre-optical probe and also controlled by digital delay generator by the plasma spectrometry acquisition time to enhancement mode CCD after Optical Fiber Transmission to grating spectrograph.The laser probe instrument detection limit that this double laser light source excites is low, and ultimate analysis precision is high, and element selectivity is good, can be used for the trace of various material microcell, the accurately qualitative of trace element and accurate quantitative analyses.But still there is some deficiency following in this device: the first, and this device uses catoptron and semi-transparent semi-reflecting lens to realize the coaxial transmission of two bundle laser, and light path system is complicated, be difficult to carry out accurate adjustment to it, be unfavorable for the daily servicing of system, and eyeglass manufacture difficulty is large, cost is higher; The second, laser beam is delivered to sample surfaces by this equipment use mirror system, light path system very flexible, beam quality by outside noise and disturbing effect large; 3rd, this equipment light path system is that equipment interoperability is poor, and to use other optical maser wavelength, must carry out replacing and adjustment again to light path system, process is loaded down with trivial details, wastes time and energy for a certain specific optical maser wavelength design.
Summary of the invention
The invention provides a kind of microcell laser probe analytical instrument realizing coaxial excitation based on fibre-optic waveguide coupling, object is to realize the accurate quantification and qualification of laser probe to material micro-area composition.
A kind of microcell laser probe analytical instrument based on fibre-optic waveguide provided by the invention, comprises Nd:YAG laser instrument, Wavelength tunable laser, CCD monitoring camera, computing machine, grating spectrograph, focusing objective len, displacement platform, digital delay pulse producer, enhancement mode CCD;
Described Nd:YAG laser instrument and Wavelength tunable laser are arranged on optical table, and focusing objective len is arranged on Nosepiece, and are positioned at the top of the displacement platform for laying sample to be analyzed;
Described Nd:YAG laser instrument, Wavelength tunable laser and enhancement mode CCD are connected with the communication of digital delay pulse producer respectively;
Described CCD monitoring camera is for gathering the reflected light of sample surfaces to be analyzed to realize the coaxial monitoring to sample surfaces to be analyzed; Enhancement mode CCD is connected with grating spectrograph electric signal;
Described computing machine is connected with CCD monitoring camera, displacement platform and enhancement mode CCD electric signal respectively;
It is characterized in that, the reflective focusing objective len of described focusing objective len to be service band be 200nm-1100nm, Nd:YAG laser instrument and Wavelength tunable laser all can use optical fiber that service band is 200nm-1100nm to carry out the transmission of laser pulse, and collimate through fiber optic collimator mirror, described focusing objective len is entered after beam expanding lens expands, the laser pulse launched by Nd:YAG laser instrument produces plasma for carrying out ablation to sample surfaces microcell to be analyzed, the laser pulse launched by described Wavelength tunable laser for producing resonance excitation on described plasma, optical fiber one end is referred to as collection terminal, for gathering the spectral signal of described plasma emission, the other end is connected with the optical fiber interface of grating spectrograph.
One as technique scheme is improved, this analyser also comprises the broadband medium film catoptron that service band is 200nm-100nm, described optical fiber collimator, beam expanding lens and broadband medium film catoptron are positioned in the first horizontal optical path successively, CCD monitoring camera, broadband medium film catoptron and focusing objective len are positioned in a vertical light path successively, and the reflecting surface of broadband medium film catoptron and the angle of horizontal optical path are 45 degree; Light-emitting window and first fiber coupler of Nd:YAG laser instrument are positioned at the second horizontal optical path; The light-emitting window of Wavelength tunable laser and the second fiber coupler are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler, the second fiber coupler is all coupled into optical fiber collimator by energy-transmission optic fibre; One end that described collecting fiber end and optical fiber collimator are connected with fiber coupler is connected; Or described collecting fiber end is connected with the fibre-optical splice for gathering the characteristic spectrum signal that described plasma sends.
As the further improvement of technique scheme, this analyser also comprises the 4th fiber coupler; The light inlet of the 4th fiber coupler is connected with collimating mirror by a fibre bundle and is connected, and the light-emitting window of the 4th fiber coupler is positioned at the visual field of CCD monitoring camera; Light-emitting window and first fiber coupler of Nd:YAG laser instrument are positioned at the second horizontal optical path, and the light inlet end face of fiber coupler is vertical with the second horizontal optical path; The light-emitting window of Wavelength tunable laser and the second fiber coupler are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler, the second fiber coupler all enters optical fiber collimator by coupling fiber; One end that one end and the optical fiber collimator of described optical fiber are connected with the second fiber coupler is connected.
Improving further again as technique scheme, this laser probe analytical instrument also comprises coaxial-illuminating subsystem.The preferred structure of the sub-light path of described coaxial-illuminating comprises LED light source and the 3rd fiber coupler; The light-emitting window of LED light source and the 3rd fiber coupler are positioned in the 4th horizontal optical path, and the outgoing beam of the 3rd fiber coupler enters optical fiber collimator by fiber bundle coupling.
Due to the various shortcoming that existing microcell laser probe equipment exists, the invention provides technique scheme, the accurate quantification and qualification of laser probe to micro-area composition can be realized.Specifically, the present invention has following technical characterstic:
(1) technical characterstic that the present invention is the most outstanding uses fibre-optic waveguide to achieve two bundle laser coaxial transmission.First, traditional light path system is all use mirror system to realize two bundle laser coaxial transmission, and complex structure, adjustment is loaded down with trivial details.After using the method for fibre-optic waveguide coupling that two bundle laser coupled are entered an optical fiber, coaxial transmission greatly reduces light path system complicacy, and the light path coaxial degree of two bundle laser is also higher, coaxial excitation better effects if; Secondly, fibre-optic waveguide makes the light path system of microcell laser microprobe analysis instrument be separated with laser instrument, spectrometer and signal control portion, adds the mobility of equipment, reduces volume and the space occupancy rate of equipment.
(2) another outstanding technical characterstic of the present invention is the transmission using fibre-optic waveguide to achieve laser pulse.The pulsed laser energy comparatively large (pulse energy >100mJ) of traditional LIBS equipment use, due to the restriction of optic fibre manufacture process, optical fiber can only transmit the laser pulse of more low-yield (pulse energy <50mJ), therefore traditional LIBS equipment is all use mirror system that high energy laser beam is transferred to sample surfaces, optic path system movability is poor, aim at loaded down with trivial details, limit the use of LIBS technology in position, in real-time analysis.And the pulsed laser energy used in microcell LIBS technology is at below 1mJ, far below the damage threshold of optical fiber, therefore can use optical fiber that laser pulse is delivered to sample surfaces completely, enhance the flexibility ratio of light path system, save Test Field to aim at light path and time of adjustment, made to utilize that LIBS technology carries out original position, real-time analysis becomes possibility; Secondly, laser can be constrained in the core diameter internal transmission of optical fiber by fibre-optic waveguide, reduces the angle of divergence of laser, improves beam quality, reduce external environment fluctuation and noise to the impact of laser, while, also can be avoided laser to deflect away from light path damaging human body.
(3) the present invention's the 3rd outstanding technical characterstic is that light path system uses large bandwidth optical fiber, broadband medium film catoptron and reflective focusing objective len, work strip is roomy, highly versatile, what is more important can realize the coaxial collection of coaxial excitation and spectrum.In traditional LIBS equipment, the catoptron of light path system and focusing objective len are all for a certain fixing optical maser wavelength, but in practical application in order to obtain best Detection results, must use corresponding best optical maser wavelength to different testing samples.To change catoptron and focusing objective len, often want the time and efforts of at substantial just can complete replacing and the light path calibration of respective element, process is numerous and diverse, inefficiency.The optical fiber that the present invention uses, broadband medium film catoptron and its service band of focusing objective len are 200nm-1100nm, (four output wavelengths are respectively 266nm to the Nd:YAG pulsed laser that the system that completely covers uses, 355nm, 532nm and 1064nm) and the output frequency range of output wavelength tunable laser, when detecting different samples, only need the output wavelength directly changing laser instrument, light path system it goes without doing any change, greatly save the time of adjustment light path cost, enhance the stability of equipment and the repeatability of light path, reduce the maintenance cost of equipment in later stage use procedure.
In sum, compared with current microcell laser probe equipment, the present invention has following technical advantage:
The first, the coaxial transmission using fibre-optic waveguide coupling to realize two bundle laser reduces the complicacy of light path system, and the light path part of equipment is separated with other modules, realizes the flexibility design of system, reduces the volume of equipment, add the mobility of equipment; The second, the transmission using optical fiber to realize laser pulse adds the flexibility ratio of light path system, reduces outside noise and the impact of interference on beam quality, improves beam quality; 3rd, light path system has wide bandwidth of operation, highly versatile, decreases and to change in light path respective element and again to the time that light path is aimed at, enhance the stability of equipment and the repeatability of light path, reduce the maintenance cost of equipment in later stage use procedure.
The alternative existing microcell laser probe analytical instrument of the present invention carries out the qualitative and accurate quantitative analyses of material micro-area composition, can be applied to the numerous areas such as Materials Science and Engineering, machine-building, metallurgy, petrochemical complex, bioengineering, electronic engineering, nuclear physics, agricultural and safety detection.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first embodiment of component analyzer for laser probe micro-area of the present invention;
Fig. 2 is the structural representation of the second embodiment of component analyzer for laser probe micro-area of the present invention;
Fig. 3 is the structural representation of the third embodiment of component analyzer for laser probe micro-area of the present invention;
Wherein, 1.Nd:YAG laser instrument; 2. Wavelength tunable laser; 3.LED light source; 4. optical table; 5. the first fiber coupler; 6. the second fiber coupler; 7. the 3rd fiber coupler; 8. data line; 9. fiber optic collimator mirror; 10. beam expanding lens; 11.CCD monitoring camera; 12. broadband medium film catoptrons; 13. Nosepieces; 14. focusing objective lens; 15. displacement platforms; 16. computing machines; 17. grating spectrographs; 18. digital delay pulse producers; 19. gigabit network cable; 20. enhancement mode CCD; 21. control cables; 22. control cables; 23. control cables; 24. control cables; 25. optical fiber; 26. fibre bundles; 27. energy-transmission optic fibres; 28. energy-transmission optic fibres; 29. base stations; 30. first worktable; 31. second worktable; 32. samples; 33. displays; 34. fibre-optical splices; 35. the 4th fiber couplers; 36. fibre bundles.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.It should be noted that at this, the explanation for these embodiments understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1, the laser probe instrument that the first embodiment provides comprises Nd:YAG laser instrument 1, Wavelength tunable laser 2, LED light source 3, optical table 4, first fiber coupler 5, second fiber coupler 6, 3rd fiber coupler 7, data line 8, fiber optic collimator mirror 9, beam expanding lens 10, CCD monitoring camera 11, broadband medium film catoptron 12, Nosepiece 13, focusing objective len 14, displacement platform 15, computing machine 16, grating spectrograph 17, digital delay pulse producer 18, enhancement mode CCD20, base station 29, first worktable 30 and the second worktable 31.
Light-emitting window and first fiber coupler 5 of Nd:YAG laser instrument 1 are positioned at same level light path, and the light inlet end face of fiber coupler 5 is vertical with horizontal optical path;
Light-emitting window and second fiber coupler 6 of Wavelength tunable laser 2 are positioned at same level light path, and the light inlet end face of fiber coupler 6 is vertical with horizontal optical path;
Light-emitting window and the 3rd fiber coupler 7 of LED light source 3 are positioned at same level light path, and the light inlet end face of fiber coupler 7 is vertical with horizontal optical path;
The outgoing beam of the first fiber coupler 5, second fiber coupler 6 and three fiber couplers 7 is coupled into optical fiber collimator 9 respectively by energy-transmission optic fibre 28, energy-transmission optic fibre 27 and fibre bundle 26;
One end of optical fiber 25 and the inlet end of optical fiber collimator 9, the other end of optical fiber 25 is connected with grating spectrograph 17, and grating spectrograph 17 is connected with enhancement mode CCD20, and enhancement mode CCD20 is connected by data line 8 computing machine 16; Grating spectrograph 17 can adopt echelle spectrometer.
Optical fiber collimator 9, beam expanding lens 10 and broadband medium film catoptron 12 are positioned at same level light path successively, and the reflecting surface of broadband medium film catoptron 12 and the angle of horizontal optical path are 45 degree;
CCD monitoring camera 11, broadband medium film catoptron 12 and focusing objective len 13 are positioned at same vertical light path successively, and CCD monitoring camera 11 is connected with computing machine 16 by gigabit network cable 19, and the reflecting surface of broadband medium film catoptron 12 and the angle of vertical light path are 45 degree;
Focusing objective len 14 is arranged on Nosepiece 13, and Nosepiece 13 adopts the transfer panel of the multiple mounting hole of band, each mounting hole is all installed the focusing objective len of a different enlargement ratio;
Displacement platform 15 is three-dimensional high-precision displacement platform, and it is positioned at immediately below focusing objective len 14, is connected with computing machine 16 by control cables 24, and displacement platform 15 is placed on worktable 30;
Nd:YAG laser instrument 1, Wavelength tunable laser 2 are connected with digital delay pulse producer 18 with control cables 21 respectively by control cables 22, control cables 23 with enhancement mode CCD20;
The Main Function of Nd:YAG laser instrument 1 launches High Power Laser Pulses to inspire plasma at sample 32 microcell, the Main Function of Wavelength tunable laser 2 carries out resonance excitation to the plasma that Nd:YAG laser instrument 1 inspires, significantly Enhanced feature spectral signal intensity, gets rid of the interference of other element plasma signals;
Illuminating bundle is launched in the effect of LED light source 3, carries out coaxial-illuminating to sample surfaces, increases sample surfaces brightness, makes coaxial monitoring better effects if;
Optical fiber collimator 9, for collimating the output beam of Nd:YAG laser instrument 1, Wavelength tunable laser 2 and LED light source 3, reduces its angle of divergence;
Light beam after collimating mirror 9 collimates expands by beam expanding lens 10, to make full use of focusing objective len 14 clear aperture, makes the hot spot after focusing less, improves the lateral resolution of equipment;
The major function of broadband medium film catoptron 12 has: one, impinge perpendicularly on focusing objective len by after the direction of the high energy laser beam after expanding turnover 90 degree; Two, CCD monitoring camera 11 is entered after making the illuminating ray component permeate of sample surfaces; Three, optical fiber 25 is entered by beam expanding lens 10 in the other direction after characteristic spectrum signal reflex plasma emission gone out;
CCD monitoring camera 11 will act on: realize the Real-Time Monitoring to sample surfaces microcell with focusing objective len 14, by the enlargement ratio using the focusing objective len 14 of different enlargement ratio to change monitoring system.
Focusing objective len 14 adopts reflective focusing objective len, and its major function has: one, amplify the micro-raman spectra of sample 32; Two, high energy laser beam is focused on the surface of sample 32; Three, the illuminating bundle that LED light source 3 sends is focused on guarded region; Four, to reflect along vertical light path reverse transfer to broadband medium film catoptron 12 after the spectral signal of plasma emission being collimated laggard enter optical fiber device 9 coupled into optical fibres 25, to gather spectral signal;
The effect of grating spectrograph 17 is the characteristic spectral lines spectral signal collected being decomposed into various element, and the effect of enhancement mode CCD20 is that the spectral intensity after being decomposed by grating spectrograph 17 is amplified, and controls the acquisition time of plasma signal simultaneously;
Digital delay pulse producer 18 is mainly used in the time delay of control Nd:YAG laser instrument 1 and Wavelength tunable laser 2 outgoing beam, controls the time delay that enhancement mode CCD20 gathers spectrum simultaneously;
Computing machine 16 inside is integrated with spectral analysis software, coaxial monitoring control software design and displacement platform control software design simultaneously, has on-line monitoring, finds the function of element spectral peak, qualitative analysis and quantitative test;
The concrete operation step of the microcell laser probe analytical instrument of said structure is as follows:
1. sample 32 surface rubbing first will analyzed and polishing, then analyzed sample 32 is placed on displacement platform 15, open LED light source 3, the light beam that this light source sends is coupled into fibre bundle 26 by fiber coupler 7 successively, fiber optic collimator mirror 9 collimates, beam expanding lens 10 expands, and then after the reflection of broadband medium film catoptron 12, focuses on the surperficial microcell of analyzed sample 32 by focusing objective len 14 and throws light on.Sample 32 microcell surface is observed by CCD monitoring camera 11 and focusing objective len 14, sample 32 is moved on to visual field central authorities by the movement of command displacement platform 15 in X, Y, Z3 direction, and makes sample 32 surface overlap to reach best monitoring effect with the focal plane of focusing objective len 14.
2. according to kind and the character of analyzing sample, determine required optical maser wavelength, open Nd:YAG laser instrument 1, (Nd:YAG laser instrument 1 can realize 266nm to regulate laser instrument to realize required wavelength output, 355nm, the Laser output of 532nm or 1064nm tetra-kinds of wavelength), the high energy laser beam that this laser instrument 1 is launched is coupled into energy-transmission optic fibre 28 by the first fiber coupler 5 successively, fiber optic collimator mirror 9 collimates, beam expanding lens 10 expands, then after the reflection of broadband medium film catoptron 12, analyzed sample 32 surface is focused on by focusing objective len 14, ablation is carried out to the surperficial microcell of sample 32 and produces plasma.
3. the delay time through presetting, digital delay pulse producer 18 sends a trigger pip and triggers Wavelength tunable laser 2, then Wavelength tunable laser 2 exports the laser beam of a certain setting wavelength, this laser beam is coupled into energy-transmission optic fibre 27 by the second fiber coupler 6 successively, fiber optic collimator mirror 9 collimates, beam expanding lens 10 expands, and is then focused on by focusing objective len 14 after the reflection of broadband medium film catoptron 12 on the plasma produced and produces resonance excitation.
4. the characteristic spectrum signal that sends of resonance excitation post plasma is by becoming parallel beam after focusing objective len 14, by oppositely entering beam expanding lens 10 after the reflection of broadband medium film catoptron 12, through beam expanding lens 10 beam diameter compressed laggard enter optical fiber collimating mirror 9, then coupled into optical fibres 25 is transferred to grating spectrograph 17.
5. grating spectrograph 17 decomposes the characteristic spectrum signal received, spectral signal after decomposing is sent to enhancement mode CCD20, enhancement mode CCD20 gathers spectral signal with the gate-width set and time delay, and the spectral signal collected is carried out amplifying and is converted into electric signal by data line transfer to computing machine 16.
6. computing machine 16 carries out qualitative and quantitative analysis by the spectral analysis software carried to the spectral signal collected, and is presented on the screen of computing machine 16.
7. high precision qualitative and quantitative analysis sample surfaces being selected to microcell is just completed by above-mentioned steps, the zones of different on sample 32 surface can be moved to the focus place of focusing objective len 14 by the movement of command displacement platform 15, realizes the constituent analysis to the surperficial zones of different of sample 32.
The present invention can also adopt the embodiment shown in Fig. 2, and the structure key distinction shown in its from Fig. 1 is that the locus of optical fiber 25 is different, in addition for protection optical fiber is not contaminated, has installed fibre-optical splice 34 in one end of the collection spectrum of optical fiber.Be specially a certain position moved to one end of optical fiber 25 installing optical fibres joint 34 above sample surfaces, realize the paraxonic collection of the characteristic spectral line that plasma is launched.
In addition in order to simplify structure, we can also adopt the structure shown in Fig. 3, the key distinction of itself and Fig. 1 and Fig. 2 is that Fig. 3 have employed the light path system of all-fiber, eliminate the broadband medium film catoptron 12 in structure shown in Fig. 1 and Fig. 2, directly by fibre-optic waveguide by Nd:YAG laser instrument 1, the surface of sample 32 is vertically sent to after the light beam steering that Wavelength tunable laser 2 and LED light source 3 are launched, one end of fibre bundle 36 is connected with collimating mirror 9, the other end is connected with the 4th fiber coupler 35, the light-emitting window of the 4th fiber coupler 35 is positioned at the visual field of CCD monitoring camera 11, so just by fibre bundle 36, the reflected light on sample 32 surface can be transferred to CCD monitoring camera 11 by the mode of coupling fiber, realize the coaxial monitoring to sample 32 surface.
In a word, the present invention can carry out high precision test and analysis to material micro-area composition.First, due to the coaxial transmission using fibre-optic waveguide coupling to realize two bundle laser, the complicacy of light path system is reduced, the light path part of equipment is separated with other modules, realize the flexibility design of system, reduce the volume of equipment, add the mobility of equipment; Secondly, the transmission using optical fiber to realize laser pulse adds the flexibility ratio of light path system, reduces outside noise and the impact of interference on beam quality, improves beam quality; Finally, light path system has wide bandwidth of operation, highly versatile, decreases and to change in light path respective element and again to the time that light path is aimed at, enhance the stability of equipment and the repeatability of light path, reduce the maintenance cost of equipment in later stage use procedure.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the content disclosed in this embodiment and accompanying drawing.The equivalence completed under not departing from spirit disclosed in this invention so every or amendment, all fall into the scope of protection of the invention.
Claims (8)
1. the microcell laser probe analytical instrument based on fibre-optic waveguide, it is characterized in that, it comprises the broadband medium film catoptron (12) that Nd:YAG laser instrument (1), Wavelength tunable laser (2), CCD monitoring camera (11), computing machine (16), grating spectrograph (17), focusing objective len (14), displacement platform (15), digital delay pulse producer (18), enhancement mode CCD (20) and service band are 200nm-1100nm;
Described Nd:YAG laser instrument (1) and Wavelength tunable laser (2) are arranged on optical table (4), focusing objective len (14) is arranged on Nosepiece (13), and is positioned at the top of displacement platform (15);
Described Nd:YAG laser instrument (1), Wavelength tunable laser (2) are connected with digital delay pulse producer (18) communication respectively with enhancement mode CCD (20);
Described CCD monitoring camera (11) is for gathering the reflected light of sample surfaces to be analyzed to realize the coaxial monitoring to sample surfaces to be analyzed; Enhancement mode CCD (20) is connected with grating spectrograph (17) electric signal;
Described computing machine (16) is connected with CCD monitoring camera (11), displacement platform (15) and enhancement mode CCD (20) electric signal respectively;
Described focusing objective len (14) for service band be the reflective focusing objective len of 200nm-1100nm;
Nd:YAG laser instrument (1) and Wavelength tunable laser (2) all can use optical fiber that service band is 200nm-1100nm to carry out the transmission of laser pulse, and collimate through optical fiber collimator (9), described focusing objective len (14) is entered after beam expanding lens (10) expands, the laser pulse launched by Nd:YAG laser instrument (1) produces plasma for carrying out ablation to sample to be analyzed (32) surperficial microcell, and the laser pulse launched by described Wavelength tunable laser (2) for producing resonance excitation on described plasma;
Optical fiber (25) one end is referred to as collection terminal, for gathering the spectral signal of described plasma emission, the other end is connected with the optical fiber interface of grating spectrograph (17);
Described optical fiber collimator (9), beam expanding lens (10) and broadband medium film catoptron (12) are positioned in the first horizontal optical path successively, CCD monitoring camera (11), broadband medium film catoptron (12) and focusing objective len (14) are positioned in a vertical light path successively, and the reflecting surface of broadband medium film catoptron (12) and the angle of horizontal optical path are 45 degree;
Light-emitting window and first fiber coupler (5) of Nd:YAG laser instrument (1) are positioned at the second horizontal optical path; Light-emitting window and second fiber coupler (6) of Wavelength tunable laser (2) are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler (5), the second fiber coupler (6) is all coupled into optical fiber collimator (9) by energy-transmission optic fibre;
One end that collection terminal and the optical fiber collimator (9) of described optical fiber (25) are connected with the second fiber coupler (6) is connected.
2. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 1, it is characterized in that, this laser probe analytical instrument also comprises coaxial-illuminating subsystem.
3. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 2, is characterized in that, the sub-light path of described coaxial-illuminating comprises LED light source (3) and the 3rd fiber coupler (7);
Light-emitting window and the 3rd fiber coupler (7) of LED light source (3) are positioned at the 4th horizontal optical path, and the outgoing beam of the 3rd fiber coupler (7) enters optical fiber collimator (9) by coupling fiber.
4. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 1 and 2, it is characterized in that, the light inlet end face of each fiber coupler is all vertical with horizontal optical path.
5. the microcell laser probe analytical instrument based on fibre-optic waveguide, it is characterized in that, it comprises Nd:YAG laser instrument (1), Wavelength tunable laser (2), CCD monitoring camera (11), computing machine (16), grating spectrograph (17), focusing objective len (14), displacement platform (15), digital delay pulse producer (18) and enhancement mode CCD (20);
Described Nd:YAG laser instrument (1) and Wavelength tunable laser (2) are arranged on optical table (4), focusing objective len (14) is arranged on Nosepiece (13), and is positioned at the top of displacement platform (15);
Described Nd:YAG laser instrument (1), Wavelength tunable laser (2) are connected with digital delay pulse producer (18) communication respectively with enhancement mode CCD (20);
Described CCD monitoring camera (11) is for gathering the reflected light of sample surfaces to be analyzed to realize the coaxial monitoring to sample surfaces to be analyzed; Enhancement mode CCD (20) is connected with grating spectrograph (17) electric signal;
Described computing machine (16) is connected with CCD monitoring camera (11), displacement platform (15) and enhancement mode CCD (20) electric signal respectively;
Described focusing objective len (14) for service band be the reflective focusing objective len of 200nm-1100nm;
Nd:YAG laser instrument (1) and Wavelength tunable laser (2) all can use optical fiber that service band is 200nm-1100nm to carry out the transmission of laser pulse, and collimate through optical fiber collimator (9), described focusing objective len (14) is entered after beam expanding lens (10) expands, the laser pulse launched by Nd:YAG laser instrument (1) produces plasma for carrying out ablation to sample to be analyzed (32) surperficial microcell, and the laser pulse launched by described Wavelength tunable laser (2) for producing resonance excitation on described plasma;
Light-emitting window and first fiber coupler (5) of Nd:YAG laser instrument (1) are positioned at the second horizontal optical path; Light-emitting window and second fiber coupler (6) of Wavelength tunable laser (2) are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler (5), the second fiber coupler (6) is all coupled into optical fiber collimator (9) by energy-transmission optic fibre;
Optical fiber (25) one end is referred to as collection terminal, for gathering the spectral signal of described plasma emission, the other end is connected with the optical fiber interface of grating spectrograph (17);
The light inlet of the 4th fiber coupler (35) is connected with optical fiber collimator (9) by the fibre bundle (36) that service band is 200nm-1100nm, and the light-emitting window of the 4th fiber coupler (35) is positioned at the visual field of CCD monitoring camera (11);
One end that described optical fiber collimator (9) is connected with the second fiber coupler (6) is connected with described fibre bundle (36).
6. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 5, it is characterized in that, this laser probe analytical instrument also comprises coaxial-illuminating subsystem.
7. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 6, is characterized in that, the sub-light path of described coaxial-illuminating comprises LED light source (3) and the 3rd fiber coupler (7);
Light-emitting window and the 3rd fiber coupler (7) of LED light source (3) are positioned at the 4th horizontal optical path, and the outgoing beam of the 3rd fiber coupler (7) enters optical fiber collimator (9) by coupling fiber.
8. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 5 or 6, it is characterized in that, the light inlet end face of each fiber coupler is all vertical with horizontal optical path.
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