CN103512868A - Micro-domain laser probe component analyzer based on optical fiber waveguide - Google Patents
Micro-domain laser probe component analyzer based on optical fiber waveguide Download PDFInfo
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 16
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- 239000000463 material Substances 0.000 description 7
- 241000931526 Acer campestre Species 0.000 description 5
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- 238000013461 design Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000012491 analyte Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
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- 238000010223 real-time analysis Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 230000005658 nuclear physics Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
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Abstract
The invention discloses a micro-domain laser probe component analyzer based on optical fiber waveguide. The analyzer comprises a Nd:YAG laser, a wavelength-tunable laser, a CCD monitoring camera, a computer, a grating spectrometer, a focusing objective lens, a displacement platform, a digital delay pulse generator, and an enhanced CCD. The focusing lens is a reflective focusing lens. The Nd:YAG laser and the wavelength-tunable laser both adopt optical fiber waveguide for carrying out laser pulse transmission; laser pulse is collimated by using an optical fiber collimator and expanded by a beam expander, and enters the focusing objective lens. Laser pulse transmitted by the Nd:YAG laser burns a surface micro-domain on a sample to be analyzed, such that plasma is formed; the laser pulse transmitted by the wavelength-tunable laser is applied on the plasma, such that resonance excitation is caused; one end of the optical fiber is used for collecting spectral signal transmitted by the plasma, and the other end is connected with an optical fiber interface of the grating spectrometer. According to the invention, precise qualitative and quantitative analysis of laser probe upon substance micro-domain components can be realized.
Description
Technical field
The invention belongs to constituent analysis and detection technique field, be specially a kind of microcell laser probe analytical instrument based on fibre-optic waveguide, be mainly used in the accurate qualitative and quantitative analysis of the material composition of tiny area.
Background technology
Laser probe technology, be Laser-induced Breakdown Spectroscopy (Laser-Induced breakdown Spectroscopy, be called for short LIBS) technology, to utilize high energy laser beam bombardment analyte surface to produce plasma, by gathering the characteristic spectrum of plasma emission and it being analyzed, and then obtain a kind of novel elemental analysis technology of the contained element kind of analyte and content.LIBS technology have without sample pretreatment, multielement detect simultaneously and can be online, the advantage such as detections in real time, since birth is paid close attention to so far widely always.But the large (> 100mJ of pulsed laser energy due to traditional LIBS technology employing), and the large (> 100um of the spot diameter after focusing on), make its cannot to material microregion element carry out accurate quantitatively and qualitative analysis, cause microcell laser probe technology in recent years more and more to receive people's concern.Yet still there are following two main deficiencies in microcell laser probe technology: one, detection limit is low at present; Two, system is subject to external interference larger, and accuracy in detection is low, poor stability.
Chinese patent literature " a kind of component analyzer for laser probe micro-area based on double laser light source " (bulletin is CN101782517A, and the day for announcing is on July 21st, 2010) discloses a kind of component analyzer for laser probe micro-area based on double laser light source.Its structure is: laser with fixed wavelength, attenuator, beam expanding lens, aperture and the first semi-transparent semi-reflecting lens are positioned in same level light path successively, and Wavelength tunable laser reflexes to the laser beam same light path of rear on the first semi-transparent semi-reflecting lens and laser with fixed wavelength by the second total reflective mirror; Laser with fixed wavelength and Wavelength tunable laser can be up and down or parallel placement, and control its opening sequence and time delay by digital delay generator; By fibre-optical probe receive and by Optical Fiber Transmission to also being controlled by digital delay generator to the plasma spectrometry acquisition time of enhancement mode CCD after grating spectrograph.The laser probe instrument detection limit that this double laser light source excites is low, and ultimate analysis precision is high, and element selectivity is good, can be used for the trace of various material microcells, the accurate qualitative and accurate quantification analysis of trace element.But still there is following some deficiency in this device: the first, and this device is used catoptron and semi-transparent semi-reflecting lens to realize the coaxial transmission of two bundle laser, and light path system is complicated, be difficult to it to carry out accurate adjustment, the daily servicing that is unfavorable for system, and eyeglass manufacture difficulty is large, and cost is higher; The second, this equipment is used mirror system that laser beam is delivered to sample surfaces, light path system very flexible, beam quality be subject to outside noise and disturbing effect large; The 3rd, this equipment light path system is that equipment interoperability is poor for a certain specific optical maser wavelength design, if will use other optical maser wavelength, must change and adjustment again light path system, and process is loaded down with trivial details, wastes time and energy.
Summary of the invention
The invention provides a kind of microcell laser probe analytical instrument of realizing coaxial excitation based on fibre-optic waveguide coupling, object is to realize the accurate qualitative and quantitative analysis of laser probe to material micro-area composition.
A kind of microcell laser probe analytical instrument based on fibre-optic waveguide provided by the invention, comprises Nd:YAG laser instrument, Wavelength tunable laser, CCD monitoring camera, computing machine, grating spectrograph, focusing objective len, displacement platform, digital delay pulse producer, enhancement mode CCD;
Described Nd:YAG laser instrument and Wavelength tunable laser are arranged on optical table, and focusing objective len is arranged on Nosepiece, and are positioned at for laying the top of the displacement platform of sample to be analyzed;
Described Nd:YAG laser instrument, Wavelength tunable laser and enhancement mode CCD are connected with the communication of digital delay pulse producer respectively;
Described CCD monitoring camera is treated the coaxial monitoring on analytic sample surface for gathering the reflected light of sample surfaces to be analyzed with realization; Enhancement mode CCD is connected with grating spectrograph electric signal;
Described computing machine is connected with CCD monitoring camera, displacement platform and enhancement mode CCD electric signal respectively;
It is characterized in that, described focusing objective len is that service band is the reflective focusing objective len of 200nm-1100nm, Nd:YAG laser instrument and Wavelength tunable laser all can be used the optical fiber that service band is 200nm-1100nm to carry out the transmission of laser pulse, and collimate through fiber optic collimator mirror, after expanding, beam expanding lens enters described focusing objective len, the laser pulse of being launched by Nd:YAG laser instrument is used for treating analytic sample surface microcell and carries out ablation generation plasma, the laser pulse of being launched by described Wavelength tunable laser for producing resonance excitation on described plasma, one end of optical fiber is referred to as collection terminal, for gathering the spectral signal of described plasma emission, the other end is connected with the optical fiber interface of grating spectrograph.
A kind of improvement as technique scheme, this analyser also comprises that service band is the broadband deielectric-coating catoptron of 200nm-100nm, described optical fiber collimator, beam expanding lens and broadband deielectric-coating catoptron are positioned in the first horizontal optical path successively, CCD monitoring camera, broadband deielectric-coating catoptron and focusing objective len are positioned at the reflecting surface of a vertical light path Shang， broadband deielectric-coating catoptron successively and the angle of horizontal optical path is 45 degree; The light-emitting window of Nd:YAG laser instrument and the first fiber coupler are positioned at the second horizontal optical path; The light-emitting window of Wavelength tunable laser and the second fiber coupler are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler, the second fiber coupler is all coupled into optical fiber collimator by energy-transmission optic fibre; Described collecting fiber end is connected with one end that optical fiber collimator is connected with fiber coupler; Or described collecting fiber end is connected with for gathering the fibre-optical splice of the characteristic spectrum signal that described plasma sends.
As the further improvement of technique scheme, this analyser also comprises the 4th fiber coupler; The light inlet of the 4th fiber coupler is connected with collimating mirror and is connected by a fibre bundle, and the light-emitting window of the 4th fiber coupler is positioned at the visual field of CCD monitoring camera; The light-emitting window of Nd:YAG laser instrument and the first fiber coupler are positioned at the second horizontal optical path, and the light inlet end face of fiber coupler is vertical with the second horizontal optical path; The light-emitting window of Wavelength tunable laser and the second fiber coupler are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler, the second fiber coupler all enters optical fiber collimator by coupling fiber; One end that one end of described optical fiber is connected with the second fiber coupler with optical fiber collimator is connected.
As further improving again of technique scheme, this laser probe analytical instrument also comprises coaxial-illuminating subsystem.The preferred structure of the sub-light path of described coaxial-illuminating comprises LED light source and the 3rd fiber coupler; The light-emitting window of LED light source and the 3rd fiber coupler are positioned in the 4th horizontal optical path, and the outgoing beam of the 3rd fiber coupler enters optical fiber collimator by fiber bundle coupling.
Various shortcoming because existing microcell laser probe equipment exists, the invention provides technique scheme, can realize the accurate qualitative and quantitative analysis of laser probe to micro-area composition.Particularly, the present invention has following technical characterstic:
(1) the most outstanding technical characterstic of the present invention is to use fibre-optic waveguide to realize two bundle laser coaxial transmission.First, traditional light path system is all to use mirror system to realize two bundle laser coaxial transmission, complex structure, and adjustment is loaded down with trivial details.After the method for using fibre-optic waveguide to be coupled enters an optical fiber by two bundle laser coupled, coaxial transmission greatly reduces light path system complicacy, and the light path coaxial degree of two bundle laser is also higher, coaxial excitation better effects if; Secondly, fibre-optic waveguide makes the light path system of microcell laser microprobe analysis instrument separated with laser instrument, spectrometer and signal controlling part, has increased the mobility of equipment, has reduced volume and the space hold rate of equipment.
(2) another outstanding technical characterstic of the present invention is to use fibre-optic waveguide to realize the transmission of laser pulse.The pulsed laser energy that traditional LIBS equipment is used large (pulse energy>100mJ), restriction due to optic fibre manufacture process, optical fiber can only transmit the laser pulse of more low-yield (pulse energy<50mJ), therefore traditional LIBS equipment is all to use mirror system that high energy laser beam is transferred to sample surfaces, optic path system movability is poor, aim at loaded down with trivial detailsly, limited the use of LIBS technology in position, in real-time analysis.And the pulsed laser energy using in microcell LIBS technology is below 1mJ, damage threshold far below optical fiber, therefore can use optical fiber that laser pulse is delivered to sample surfaces completely, strengthened the flexibility ratio of light path system, saved that Test Field is aimed at light path and the time of adjustment, made to utilize the LIBS technology carry out original position, real-time analysis becomes possibility; Secondly, fibre-optic waveguide can constrain in laser the core diameter internal transmission of optical fiber, has reduced the angle of divergence of laser, has improved beam quality, reduced external environment fluctuation and the impact of noise on laser, also can avoid laser to deflect away from light path human body is damaged simultaneously.
(3) the 3rd outstanding technical characterstic of the present invention is that light path system is used large bandwidth optical fiber, broadband deielectric-coating catoptron and reflective focusing objective len, and bandwidth of operation is large, highly versatile, and what is more important can realize the coaxial collection of coaxial excitation and spectrum.In traditional LIBS equipment, the catoptron of light path system and focusing objective len are all for a certain fixing optical maser wavelength, but in practical application in order to obtain best detection effect, to different testing samples, must use correspondingly best optical maser wavelength.If change catoptron and focusing objective len, often to expend replacing and light path calibration that a large amount of time and efforts just can complete respective element, process is numerous and diverse, inefficiency.The optical fiber that the present invention uses, broadband deielectric-coating catoptron and its service band of focusing objective len are 200nm-1100nm, (four output wavelengths are respectively 266nm to the Nd:YAG pulsed laser that the system that covered is completely used, 355nm, 532nm and 1064nm) and the output frequency range of output wavelength tunable laser, when detecting different samples, only need directly to change the output wavelength of laser instrument, light path system it goes without doing any change, greatly saved the time of adjustment light path cost, the stability of equipment and the repeatability of light path have been strengthened, reduced the maintenance cost of equipment in later stage use procedure.
In sum, compare with current microcell laser probe equipment, the present invention has following technical advantage:
The first, the coaxial transmission of using fibre-optic waveguide coupling to realize two bundle laser has reduced the complicacy of light path system, makes the light path part of equipment separated with other modules, realizes the flexibility design of system, has reduced the volume of equipment, has increased the mobility of equipment; The second, the transmission of using optical fiber to realize laser pulse has increased the flexibility ratio of light path system, has reduced outside noise and has disturbed the impact on beam quality, has improved beam quality; The 3rd, light path system has wide bandwidth of operation, and highly versatile has reduced the time of changing respective element in light path and again light path being aimed at, and has strengthened the stability of equipment and the repeatability of light path, has reduced the maintenance cost of equipment in later stage use procedure.
The alternative existing microcell laser probe analytical instrument of the present invention carries out the qualitative and accurate quantification analysis of material micro-area composition, can be applied to the numerous areas such as Materials Science and Engineering, machine-building, metallurgy, petrochemical complex, bioengineering, electronic engineering, nuclear physics, agricultural and safety detection.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first embodiment of component analyzer for laser probe micro-area of the present invention;
Fig. 2 is the structural representation of the second embodiment of component analyzer for laser probe micro-area of the present invention;
Fig. 3 is the structural representation of the third embodiment of component analyzer for laser probe micro-area of the present invention;
Wherein, 1.Nd:YAG laser instrument; 2. Wavelength tunable laser; 3.LED light source; 4. optical table; 5. the first fiber coupler; 6. the second fiber coupler; 7. the 3rd fiber coupler; 8. data line; 9. fiber optic collimator mirror; 10. beam expanding lens; 11.CCD monitoring camera; 12. broadband deielectric-coating catoptrons; 13. Nosepieces; 14. focusing objective lens; 15. displacement platforms; 16. computing machines; 17. grating spectrographs; 18. digital delay pulse producers; 19. gigabit netting twines; 20. enhancement mode CCD; 21. control cables; 22. control cables; 23. control cables; 24. control cables; 25. optical fiber; 26. fibre bundles; 27. energy-transmission optic fibres; 28. energy-transmission optic fibres; 29. base stations; 30. first worktable; 31. second worktable; 32. samples; 33. displays; 34. fibre-optical splices; 35. the 4th fiber couplers; 36. fibre bundles.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.At this, it should be noted that, for the explanation of these embodiments, be used for helping to understand the present invention, but do not form limitation of the invention.In addition,, in each embodiment of described the present invention, involved technical characterictic just can not combine mutually as long as do not form each other conflict.
As shown in Figure 1, the laser probe instrument that the first embodiment provides comprises Nd:YAG laser instrument 1, Wavelength tunable laser 2, LED light source 3, optical table 4, the first fiber coupler 5, the second fiber coupler 6, the 3rd fiber coupler 7, data line 8, fiber optic collimator mirror 9, beam expanding lens 10, CCD monitoring camera 11, broadband deielectric-coating catoptron 12, Nosepiece 13, focusing objective len 14, displacement platform 15, computing machine 16, grating spectrograph 17, digital delay pulse producer 18, enhancement mode CCD20, base station 29, the first worktable 30 and the second worktable 31.
The light-emitting window of Nd:YAG laser instrument 1 and the first fiber coupler 5 are positioned at same level light path, and the light inlet end face of fiber coupler 5 is vertical with horizontal optical path;
The light-emitting window of Wavelength tunable laser 2 and the second fiber coupler 6 are positioned at same level light path, and the light inlet end face of fiber coupler 6 is vertical with horizontal optical path;
The light-emitting window of LED light source 3 and the 3rd fiber coupler 7 are positioned at same level light path, and the light inlet end face of fiber coupler 7 is vertical with horizontal optical path;
The outgoing beam of the first fiber coupler 5, the second fiber coupler 6 and three fiber couplers 7 is coupled into optical fiber collimator 9 by energy-transmission optic fibre 28, energy-transmission optic fibre 27 and fibre bundle 26 respectively;
The inlet end of optical fiber 25 one end and optical fiber collimator 9, the other end of optical fiber 25 is connected with grating spectrograph 17, and grating spectrograph 17 is connected with enhancement mode CCD20, and enhancement mode CCD20 connects by data line 8 computing machines 16; Grating spectrograph 17 can adopt echelle spectrometer.
Optical fiber collimator 9, beam expanding lens 10He broadband deielectric-coating catoptron 12 are positioned at same level light path successively, and the reflecting surface of broadband deielectric-coating catoptron 12 and the angle of horizontal optical path are 45 degree;
Focusing objective len 14 is arranged on Nosepiece 13, and Nosepiece 13 employings, with the transfer panel of a plurality of mounting holes, are all installed the focusing objective len of different enlargement ratios on each mounting hole;
Displacement platform 15 is three-dimensional high-precision displacement platform, it be positioned at focusing objective len 14 under, by control cables 24, be connected with computing machine 16, displacement platform 15 is placed on worktable 30;
Nd:YAG laser instrument 1, Wavelength tunable laser 2 and enhancement mode CCD20 are connected with digital delay pulse producer 18 by control cables 22, control cables 23 and control cables 21 respectively;
The Main Function of Nd:YAG laser instrument 1 is that transmitting High Power Laser Pulses inspires plasma at sample 32 microcells, the Main Function of Wavelength tunable laser 2 is that the plasma that Nd:YAG laser instrument 1 is inspired carries out resonance excitation, significantly Enhanced feature spectral signal intensity, gets rid of the interference of other element plasma signals;
The effect of LED light source 3 is emissive lighting light beams, and sample surfaces is carried out to coaxial-illuminating, increases sample surfaces brightness, makes coaxial monitoring better effects if;
Optical fiber collimator 9, for the output beam of Nd:YAG laser instrument 1, Wavelength tunable laser 2 and LED light source 3 is collimated, reduces its angle of divergence;
The major function of broadband deielectric-coating catoptron 12 has: one, will after direction turnover 90 degree of the high energy laser beam after expanding, impinge perpendicularly on focusing objective len; Two, after partly being seen through, the illuminating ray of sample surfaces enters CCD monitoring camera 11; Three, after characteristic spectrum signal reflex plasma emission being gone out, by beam expanding lens 10, enter optical fiber 25 in the other direction;
Focusing objective len 14 adopts reflective focusing objective len, and its major function has: one, the microcell pattern of sample 32 is amplified; Two, high energy laser beam is focused on to the surface of sample 32; Three, illuminating bundle LED light source 3 being sent focuses on guarded region; Four, by reflect laggard optical fiber device 9 coupled into optical fibres 25 that enter after the spectral signal collimation of plasma emission along vertical light path reverse transfer to broadband deielectric-coating catoptron 12, so that spectral signal is gathered;
The effect of grating spectrograph 17 is the spectral signal collecting to be decomposed into the characteristic spectral line of various elements, and the effect of enhancement mode CCD20 is that the spectral intensity after grating spectrograph 17 is decomposed is amplified, and controls the acquisition time of plasma signal simultaneously;
Digital delay pulse producer 18 is mainly used in controlling the time delay of Nd:YAG laser instrument 1 and Wavelength tunable laser 2 outgoing beams, controls the time delay that enhancement mode CCD20 gathers spectrum simultaneously;
The concrete operation step of the microcell laser probe analytical instrument of said structure is as follows:
1. sample 32 surface rubbings and the polishing that first will analyze, then analyzed sample 32 is placed on displacement platform 15, open LED light source 3, the light beam that this light source sends is coupled into fibre bundle 26 by fiber coupler 7 successively, fiber optic collimator mirror 9 collimations, beam expanding lens 10 expands, and then after 12 reflections of broadband deielectric-coating catoptron, by focusing objective len 14, focuses on the surperficial microcell of analyzed sample 32 and throws light on.By CCD monitoring camera 11 and focusing objective len 14, observe sample 32 microcell surfaces, control displacement platform 15, in the movement of X, Y, a Z3 direction, sample 32 is moved on to visual field central authorities, and make sample 32 surfaces overlap to reach best monitoring effect with the focal plane of focusing objective len 14.
2. according to the kind of analytic sample and character, determine required optical maser wavelength, open Nd:YAG laser instrument 1, (Nd:YAG laser instrument 1 can be realized 266nm to regulate laser instrument to realize required wavelength output, 355nm, the Laser output of 532nm or tetra-kinds of wavelength of 1064nm), the high energy laser beam that this laser instrument 1 is launched is coupled into energy-transmission optic fibre 28 by the first fiber coupler 5 successively, fiber optic collimator mirror 9 collimations, beam expanding lens 10 expands, then after 12 reflections of broadband deielectric-coating catoptron, by focusing objective len 14, focus on analyzed sample 32 surfaces, the surperficial microcell of sample 32 is carried out to ablation and produce plasma.
3. through predefined delay time, digital delay pulse producer 18 sends a trigger pip and triggers Wavelength tunable laser 2, then Wavelength tunable laser 2 is exported the laser beam of a certain setting wavelength, this laser beam is coupled into energy-transmission optic fibre 27 by the second fiber coupler 6 successively, fiber optic collimator mirror 9 collimations, beam expanding lens 10 expands, and then after 12 reflections of broadband deielectric-coating catoptron, by focusing objective len 14, is focused on the plasma having produced and is produced resonance excitation.
4. the characteristic spectrum signal that resonance excitation post plasma sends becomes parallel beam after by focusing objective len 14, after broadband deielectric-coating catoptron 12 reflection by oppositely entering beam expanding lens 10, through beam expanding lens 10, beam diameter is compressed to the laggard optical fiber collimating mirror 9 that enters, then coupled into optical fibres 25 is transferred to grating spectrograph 17.
5. the characteristic spectrum signal that 17 pairs of grating spectrographs receive decomposes, spectral signal after decomposing is sent to enhancement mode CCD20, enhancement mode CCD20 gathers spectral signal with gate-width and the time delay setting, and the spectral signal that collects is amplified and is converted into electric signal by data line, is transferred to computing machine 16.
6. computing machine 16 carries out qualitative and quantitative analysis by the spectral analysis software carrying to the spectral signal collecting, and is presented on the screen of computing machine 16.
7. by above-mentioned steps, just complete and quantitative test qualitative to the high precision of the selected microcell of sample surfaces, the movement of controlling displacement platform 15 can move to the zones of different on sample 32 surfaces the focus place of focusing objective len 14, realizes the constituent analysis to sample 32 surperficial zoness of different.
The present invention can also adopt the embodiment shown in Fig. 2, and it is that from the structure key distinction shown in Fig. 1 optical fiber 25 locus is different, not contaminated for protection optical fiber in addition, in one end of the collection spectrum of optical fiber, fibre-optical splice 34 has been installed.Be specially a certain position that optical fiber 25 installing optical fibres joint 34 one end is moved to sample surfaces top, realize the paraxonic collection of the characteristic spectral line of plasma transmitting.
In addition for simplified structure, we can also adopt the structure shown in Fig. 3, the key distinction of itself and Fig. 1 and Fig. 2 is that Fig. 3 has adopted the light path system of full fiberize, removed the broadband of structure Zhong shown in Fig. 1 and Fig. 2 deielectric-coating catoptron 12, directly by fibre-optic waveguide by Nd:YAG laser instrument 1, after the light beam steering of Wavelength tunable laser 2 and LED light source 3 transmittings, be vertically sent to the surface of sample 32, fibre bundle 36 one end is connected with collimating mirror 9, the other end is connected with the 4th fiber coupler 35, the light-emitting window of the 4th fiber coupler 35 is positioned at CCD monitoring camera 11 visual field, so just can by fibre bundle 36, by the reflected light on sample 32 surfaces, the mode by coupling fiber be transferred to CCD monitoring camera 11, the coaxial monitoring of realization to sample 32 surfaces.
In a word, the present invention can carry out high precision determination and analysis to material micro-area composition.First, owing to using fibre-optic waveguide to be coupled, realize the coaxial transmission of two bundle laser, reduced the complicacy of light path system, make the light path part of equipment separated with other modules, realize the flexibility design of system, reduced the volume of equipment, increased the mobility of equipment; Secondly, the transmission of using optical fiber to realize laser pulse has increased the flexibility ratio of light path system, has reduced outside noise and has disturbed the impact on beam quality, has improved beam quality; Finally, light path system has wide bandwidth of operation, and highly versatile has reduced the time of changing respective element in light path and again light path being aimed at, and has strengthened the stability of equipment and the repeatability of light path, has reduced the maintenance cost of equipment in later stage use procedure.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.So every, do not depart from the equivalence completing under spirit disclosed in this invention or revise, all falling into the scope of protection of the invention.
Claims (7)
1. the microcell laser probe analytical instrument based on fibre-optic waveguide, it is characterized in that, it comprises Nd:YAG laser instrument (1), Wavelength tunable laser (2), CCD monitoring camera (11), computing machine (16), grating spectrograph (17), focusing objective len (14), displacement platform (15), digital delay pulse producer (18) and enhancement mode CCD (20);
It is upper that described Nd:YAG laser instrument (1) and Wavelength tunable laser (2) are arranged on optical table (4), and it is upper that focusing objective len (14) is arranged on Nosepiece (13), and be positioned at the top of displacement platform (15);
Described Nd:YAG laser instrument (1), Wavelength tunable laser (2) and enhancement mode CCD (20) are connected with digital delay pulse producer (18) communication respectively;
Described CCD monitoring camera (11) is treated the coaxial monitoring on analytic sample surface for gathering the reflected light of sample surfaces to be analyzed with realization; Enhancement mode CCD (20) is connected with grating spectrograph (17) electric signal;
Described computing machine (16) is connected with CCD monitoring camera (11), displacement platform (15) and enhancement mode CCD (20) electric signal respectively;
It is characterized in that the reflective focusing objective len that described focusing objective len (14) is 200nm-1100nm for service band;
Nd:YAG laser instrument (1) and Wavelength tunable laser (2) all can be used the optical fiber that service band is 200nm-1100nm to carry out the transmission of laser pulse, and collimate through fiber optic collimator mirror (9), after expanding, beam expanding lens (10) enters described focusing objective len (14), the laser pulse of being launched by Nd:YAG laser instrument (1) is used for treating the surperficial microcell of analytic sample (32) and carries out ablation generation plasma, and the laser pulse of being launched by described Wavelength tunable laser (2) for producing resonance excitation on described plasma;
One end of optical fiber (25) is referred to as collection terminal, for gathering the spectral signal of described plasma emission, the other end is connected with the optical fiber interface of grating spectrograph (17).
2. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 1, it is characterized in that, this analyser also comprises that service band is the broadband deielectric-coating catoptron (12) of 200nm-1100nm, described optical fiber collimator (9), beam expanding lens (10) and broadband deielectric-coating catoptron (12) are positioned in the first horizontal optical path successively, CCD monitoring camera (11), broadband deielectric-coating catoptron (12) and focusing objective len (13) are positioned at a reflecting surface for vertical light path Shang， broadband deielectric-coating catoptron (12) successively and the angle of horizontal optical path is 45 degree;
The light-emitting window of Nd:YAG laser instrument (1) and the first fiber coupler (5) are positioned at the second horizontal optical path; The light-emitting window of Wavelength tunable laser (2) and the second fiber coupler (6) are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler (5), the second fiber coupler (6) is all coupled into optical fiber collimator (9) by energy-transmission optic fibre;
The collection terminal of described optical fiber (25) is connected with one end that fiber coupler (6) is connected with optical fiber collimator (9).
3. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 1, it is characterized in that, this analyser also comprises broadband deielectric-coating catoptron (12), described optical fiber collimator (9), beam expanding lens (10) and broadband deielectric-coating catoptron (12) are positioned in the first horizontal optical path successively, CCD monitoring camera (11), broadband deielectric-coating catoptron (12) and focusing objective len (13) are positioned at a reflecting surface for vertical light path Shang， broadband deielectric-coating catoptron (12) successively and the angle of horizontal optical path is 45 degree;
The light-emitting window of Nd:YAG laser instrument (1) and the first fiber coupler (5) are positioned at the second horizontal optical path; The light-emitting window of Wavelength tunable laser (2) and the second fiber coupler (6) are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler (5), the second fiber coupler (6) is all coupled into optical fiber collimator (9) by energy-transmission optic fibre;
The collection terminal of described optical fiber (25) is connected with for gathering the fibre-optical splice (34) of the characteristic spectrum signal that described plasma sends.
4. the microcell laser probe analytical instrument based on fibre-optic waveguide according to claim 1, is characterized in that, this analyser also comprises the 4th fiber coupler (35); The optical fiber that the light inlet of the 4th fiber coupler (35) is 200nm-1100nm by service band is connected with optical fiber collimator (9), and the light-emitting window of the 4th fiber coupler (35) is positioned at the visual field of CCD monitoring camera (11);
The light-emitting window of Nd:YAG laser instrument (1) and the first fiber coupler (5) are positioned at the second horizontal optical path, and the light inlet end face of fiber coupler (5) is vertical with the second horizontal optical path; The light-emitting window of Wavelength tunable laser (2) and the second fiber coupler (6) are positioned at the 3rd horizontal optical path; The outgoing beam of the first fiber coupler (5), the second fiber coupler (6) all enters optical fiber collimator (9) by coupling fiber;
One end that one end of described optical fiber (25) is connected with the second fiber coupler (6) with optical fiber collimator (9) is connected.
5. according to arbitrary described microcell laser probe analytical instrument based on fibre-optic waveguide in claim 1 to 4, it is characterized in that, this laser probe analytical instrument also comprises coaxial-illuminating subsystem.
6. according to the arbitrary described microcell laser probe analytical instrument based on fibre-optic waveguide of claim 5, it is characterized in that, the sub-light path of described coaxial-illuminating comprises LED light source (3) and the 3rd fiber coupler (7);
The light-emitting window of LED light source (3) and the 3rd fiber coupler (7) are positioned at the 4th horizontal optical path, and the outgoing beam of the 3rd fiber coupler (7) enters optical fiber collimator (9) by coupling fiber.
7. according to arbitrary described microcell laser probe analytical instrument based on fibre-optic waveguide in claim 2 to 6, it is characterized in that, the light inlet end face of each fiber coupler is all vertical with horizontal optical path.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973871A (en) * | 2016-04-27 | 2016-09-28 | 中国科学院合肥物质科学研究院 | Micro-region scanning device for spectrum detection of element distribution and micro-region scanning method thereof |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5759859A (en) * | 1996-07-15 | 1998-06-02 | United States Of America As Represented By The Secretary Of The Army | Sensor and method for detecting trace underground energetic materials |
| US20030174325A1 (en) * | 2002-03-18 | 2003-09-18 | Hansheng Zhang | Fiber optic laser-induced breakdown spectroscopy sensor for molten material analysis |
| US6762836B2 (en) * | 2002-05-22 | 2004-07-13 | General Electric Company | Portable laser plasma spectroscopy apparatus and method for in situ identification of deposits |
| US7251022B2 (en) * | 2005-09-30 | 2007-07-31 | Ut-Battelle, Llc | Dual fiber microprobe for mapping elemental distributions in biological cells |
| CN101587074A (en) * | 2009-06-23 | 2009-11-25 | 华中科技大学 | Component analyzer for laser probe micro-area |
| CN201434840Y (en) * | 2009-06-23 | 2010-03-31 | 华中科技大学 | Laser probe micro-zone composition analyzer |
| CN101782517A (en) * | 2010-02-10 | 2010-07-21 | 华中科技大学 | Laser probe micro-area component analyzer based on double laser light source |
| CN201607406U (en) * | 2010-02-10 | 2010-10-13 | 华中科技大学 | Laser probe micro-area component analyzer based on double laser light sources |
| CN102353658A (en) * | 2011-07-06 | 2012-02-15 | 中国科学院上海技术物理研究所 | Miniature IOT laser-induced breakdown spectroscopy medical sensing system and method |
| CN103175808A (en) * | 2013-03-14 | 2013-06-26 | 中国科学院西安光学精密机械研究所 | Laser-induced breakdown spectroscopy analysis system and laser-induced breakdown spectroscopy analysis method |
-
2013
- 2013-09-10 CN CN201310409409.4A patent/CN103512868B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5759859A (en) * | 1996-07-15 | 1998-06-02 | United States Of America As Represented By The Secretary Of The Army | Sensor and method for detecting trace underground energetic materials |
| US20030174325A1 (en) * | 2002-03-18 | 2003-09-18 | Hansheng Zhang | Fiber optic laser-induced breakdown spectroscopy sensor for molten material analysis |
| US6762836B2 (en) * | 2002-05-22 | 2004-07-13 | General Electric Company | Portable laser plasma spectroscopy apparatus and method for in situ identification of deposits |
| US7251022B2 (en) * | 2005-09-30 | 2007-07-31 | Ut-Battelle, Llc | Dual fiber microprobe for mapping elemental distributions in biological cells |
| CN101587074A (en) * | 2009-06-23 | 2009-11-25 | 华中科技大学 | Component analyzer for laser probe micro-area |
| CN201434840Y (en) * | 2009-06-23 | 2010-03-31 | 华中科技大学 | Laser probe micro-zone composition analyzer |
| CN101782517A (en) * | 2010-02-10 | 2010-07-21 | 华中科技大学 | Laser probe micro-area component analyzer based on double laser light source |
| CN201607406U (en) * | 2010-02-10 | 2010-10-13 | 华中科技大学 | Laser probe micro-area component analyzer based on double laser light sources |
| CN102353658A (en) * | 2011-07-06 | 2012-02-15 | 中国科学院上海技术物理研究所 | Miniature IOT laser-induced breakdown spectroscopy medical sensing system and method |
| CN103175808A (en) * | 2013-03-14 | 2013-06-26 | 中国科学院西安光学精密机械研究所 | Laser-induced breakdown spectroscopy analysis system and laser-induced breakdown spectroscopy analysis method |
Non-Patent Citations (3)
| Title |
|---|
| E. TOGNONI ET AL.: "Quantitative micro-analysis by laser-induced breakdown spectroscopy: a review of the experimental approaches", 《SPECTROCHIMICA ACTA PART B》 * |
| S. MICHAEL ANGEL ET AL.: "LIBS using dual- and ultra-short laser pulses", 《FRESENIUS J ANAL CHEM》 * |
| 刘佳等: "激光诱导击穿光谱技术研究的新进展", 《激光杂志》 * |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973871B (en) * | 2016-04-27 | 2019-04-09 | 中国科学院合肥物质科学研究院 | A kind of the microcell scanning means and its microcell scan method of spectral detection Elemental redistribution |
| CN105973871A (en) * | 2016-04-27 | 2016-09-28 | 中国科学院合肥物质科学研究院 | Micro-region scanning device for spectrum detection of element distribution and micro-region scanning method thereof |
| CN106706601B (en) * | 2016-12-13 | 2023-04-11 | 华中科技大学 | Laser-induced breakdown fluorescence spectrum analysis system based on optical fiber waveguide cyclic excitation |
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