CN103346699B - V+U type composite beam micro-actuator based on electrothermal drive and preparation method thereof - Google Patents
V+U type composite beam micro-actuator based on electrothermal drive and preparation method thereof Download PDFInfo
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- CN103346699B CN103346699B CN201310237155.2A CN201310237155A CN103346699B CN 103346699 B CN103346699 B CN 103346699B CN 201310237155 A CN201310237155 A CN 201310237155A CN 103346699 B CN103346699 B CN 103346699B
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Abstract
The present invention relates to a kind of V+U type composite beam micro-actuator based on electrothermal drive, for producing the compound activation manners based on linear motion and arc-like motion.Described device is made up of V-type electrothermal micro actuator, U-shaped cold and hot arm electrothermal micro actuator, V-type electrothermal micro actuator electrode, U-shaped cold and hot arm electrothermal micro actuator electrode, and whole device is polycrystalline silicon material, makes by MEMS technology.The linear motion of V-type micro-actuator and the arc-like motion of U-shaped cold and hot arm micro-actuator are combined by this device, create the compound activation manners based on linear motion and arc-like motion, simple in construction, efficiency is high, can be used for driving the MEMS such as micro-clamp, micro-cell electron capture detector.
Description
Technical field
The present invention relates to the micro-actuator class in MEMS (MEMS) technical field, particularly to a kind of V+U type composite beam micro-actuator based on electrothermal drive and preparation method thereof.
Background technology
Micro-actuator is the actuated components of MEMS, carries the important function such as energy conversion, motion transmission, is divided into the activation manners such as electric energy, chemical energy, fluid energy and heat energy by energy source.Electric energy micro-actuator utilizes charge forces, magnetic field force to produce and activates, fast response time, low in energy consumption, but power output is little, required voltage is high, such as piezoelectric type, electromagnetic type and electrostatic.Electrostatic actuator is low in energy consumption, operating frequency is high, designability is good, reliability is high, but electrostatic actuator running voltage is high, and power output is little, difficult compatible with IC voltage.Piezo-activator utilizes the piezoelectric effect of piezoelectric to activate, have fast response time, energy density is high, displacement output is stable, without advantages such as adhesive effect, driving voltage are little, but complex manufacturing technology, output displacement are little.Electromagnetic actuators produces driving force based on electromagnetic action, has advantages such as being easily connected, can work in the presence of a harsh environment with mechanism, but caloric value is big, energy consumption is high, complex process, be difficult to manufacture.Electric heating actuator utilizes variations in temperature to produce deformation and activates, and output displacement and power are greatly, operation voltage is little and IC compatible, is main activation manners feasible for present stage MEMS, and expanded by heating elongation is a kind of electric heating activation manners more commonly used.
According to motion mode, electric heating actuator can be divided into in-plane moving and in-plane moving.Making the actuator of in-plane moving mainly for generation of linear motion or arc-like motion, common V-type micro-actuator can produce linear motion, and U-shaped cold and hot arm micro-actuator can produce arc-like motion.Calendar year 2001, Long Que etc. is at Bent-beam
electrothermal actuators-Part I: Single beam and cascaded devices (Journal of
Microelectromechanical Systems, Vol. 10, NO. 2, June 2001) in report a kind of V type electrothermal micro actuator based on polysilicon, by push-pull structure, the linear reciprocating motion that V-type electrothermal micro actuator produces is transformed into the rotation of gear, this actuator structure is simple, it is easy to controls, can produce linear reciprocating motion.1997, Corntois etc. was at Applications
for surface-micromachined polysilicon thermal actuators and arrays(Sensors and Actuators A,
Vol. 58, NO. 1,19-25) in report a kind of U-shaped cold and hot arm micro-actuator, such actuator is made up of the beam of varying cross-section, can produce arc-like motion in face.Above two class micro-actuators are only capable of producing linear motion or circular motion.U-shaped and V-type micro-actuator are combined by the patent of invention " flexible compound beam electric heating micro-driver based on V+U type " (patent No.: ZL200910055966.4) of Zhang Congchun et al., it is exaggerated the output displacement of actuator, improve power output, but be also only capable of producing linear motion.
For the shortcoming overcoming above two class actuators only to export single movement, the invention provides a kind of V+U type composite beam micro-actuator based on electrothermal drive, the linear motion of V-type micro-actuator and the arc-like motion of U-shaped micro-actuator are comprehensively exported, creates the compound activation manners based on linear motion and arc-like motion.
Summary of the invention
It is an object of the invention to overcome tradition V-type micro-actuator and U-shaped micro-actuator output motion shortcoming single, simple, thering is provided a kind of compound motion micro-actuator based on linear motion and arc-like motion and preparation method thereof, this Micro actuator structures is simple, delivery efficiency is high.
For reaching above-mentioned purpose, insight of the invention is that
The task of the present invention is to set up a kind of compatible with MEMS surface treatment, can produce based on moving along a straight line and arc-like motion, simple in construction, compound motion micro-actuator that delivery efficiency is high.
According to foregoing invention thought, reach goal of the invention by following technical solution:
A kind of V+U type composite beam micro-actuator based on electrothermal drive, including: the electrode second of the U-shaped cold and hot arm micro-actuator of electrode first, one of a V-type micro-actuator and a U-shaped cold and hot arm micro-actuator, a V-type micro-actuator and a public electrode, it is characterized in that, one hot arm of described U-shaped cold and hot arm micro-actuator is connected with the outfan of V-type micro-actuator, and one flexible arm is connected with electrode second by a cant beam, the left end beam of V-type micro-actuator is connected with electrode first, and its right-hand member beam is connected with public electrode.
The number of described V-type micro-actuator can array 2 ~ 5.
Described U-shaped cold and hot arm micro-actuator can be with double U-shaped micro-actuators of hot arm.
A kind of preparation method of above-mentioned V+U type composite beam micro-actuator based on electrothermal drive, it is characterized in that, MEMS surface treatment or bulk silicon technological is used to prepare, time prepared by surface treatment, on silicon lining bottom plane, there is silicon nitride dielectric layer, silicon nitride layer has the fixing polysilicon layer Poly0 as wire, having the electrode tip holder being made up of polysilicon layer Poly1 and V+U composite beam micro-actuator 8 on Poly0, electrode tip holder, polysilicon layer Poly2 and metal level collectively constitute the electrode of actuator.
The present invention compared with prior art, has and the most obviously highlights substantive distinguishing features and marked improvement:
The linear motion of single V-type micro-actuator and the arc-like motion of single U-shaped cold and hot arm micro-actuator are combined by the present invention, create complex compound activation manners, inherit electric heating actuator High power output, the advantage that operation voltage is little, novel structure is unique, compatible with MEMS technology, it is easy to control, delivery efficiency is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment one.
Fig. 2 is the structural representation of embodiment two.
Fig. 3 is the cross-sectional view of the present invention.
Detailed description of the invention
It is as follows that the preferred embodiment of the present invention combines detailed description:
Embodiment one:
See Fig. 1, this V+U type composite beam micro-actuator based on electrothermal drive, including: a V-type micro-actuator (1) and a U-shaped cold and hot arm micro-actuator (2), the electrode first (3) of one V-type micro-actuator, the electrode second (4) of one U-shaped cold and hot arm micro-actuator and a public electrode (5), it is characterized in that, the hot arm (6) of U-shaped cold and hot arm micro-actuator is connected with the outfan of V-type micro-actuator (1), flexible arm (7) is connected with electrode second (4) by cant beam, the left end of V-type micro-actuator beam is connected with electrode first (3), right-hand member is connected with public electrode (5).
Embodiment two:
Seeing Fig. 1 and Fig. 2, the present embodiment is essentially identical with embodiment one, and special feature is as follows: the number of described V-type micro-actuator can array 2 ~ 5.Described U-shaped cold and hot arm micro-actuator can be with double U-shaped micro-actuators of hot arm.
Embodiment three:
See Fig. 3, the preparation method of above-mentioned V+U type composite beam micro-actuator: prepared by described actuator MEMS surface treatment or bulk silicon technological, time prepared by surface treatment, on silicon lining bottom plane, there is silicon nitride dielectric layer, the fixing polysilicon layer Poly0 as wire is had on silicon nitride layer, having the electrode tip holder (9,10) and V+U composite beam micro-actuator 8 being made up of polysilicon layer Poly1 on Poly0, electrode tip holder (9,10), polysilicon layer Poly2 and metal level collectively constitute the electrode (3,4 and 5) of actuator.
Embodiment four:
In this micro-actuator, electrode first (3) is for powering to V-type micro-actuator, and electrode second (4) is for powering to U-shaped cold and hot arm micro-actuator, and electrode (5) is public electrode.The operation principle of actuator is: after electrifying electrodes, actuator there is electric current pass through, produce resistance heat, the beam cross section of V-type micro-actuator is identical, and two ends thermal expansion amount is equal, produces linear motion, the beam of U-shaped cold and hot arm micro-actuator is the most wide, the resistance heat that narrow beam produces, more than wide beam, causes narrow beam thermal expansion amount more than wide beam, produces arc-like motion.
After accompanying drawing 1, electrode first (3) and public electrode (5) energising, V-type micro-actuator there is electric current to pass through, produces linear motion, promote U-shaped cold and hot arm micro-actuator to travel forward；Then electrode second (4) and public electrode (5) energising, have electric current to pass through in U-shaped cold and hot arm micro-actuator, produce arc-like motion.
This micro-actuator also can make electrode first (3) and public electrode (5), electrode second (4) and public electrode (5) be energized simultaneously, and V type micro-actuator and U-shaped cold and hot arm micro-actuator are heated simultaneously, also can produce the compound actuating based on linear motion and arc-like motion.
Claims (3)
1. a V+U type composite beam micro-actuator based on electrothermal drive, including: a V-type micro-actuator (1) and a U-shaped cold and hot arm micro-actuator (2), the electrode first (3) of one V-type micro-actuator, the electrode second (4) of one U-shaped cold and hot arm micro-actuator and a public electrode (5), it is characterized in that: a hot arm (6) of described U-shaped cold and hot arm micro-actuator (2) is connected with the outfan of V-type micro-actuator (1), and one flexible arm (7) is connected with electrode second (4) by a cant beam, the left end beam of V-type micro-actuator (1) is connected with electrode first (3), and its right-hand member beam is connected with public electrode (5)；Described U-shaped cold and hot arm micro-actuator (2) uses double U-shaped micro-actuator of hot arm.
2. according to the V+U type composite beam micro-actuator based on electrothermal drive described in claim 1, it is characterised in that: the number of described V-type micro-actuator (1) is array 2 ~ 5.
3. the preparation method according to the V+U type composite beam micro-actuator based on electrothermal drive described in claim 1 ~ 2, it is characterized in that: use MEMS surface treatment or bulk silicon technological to prepare, time prepared by surface treatment, on silicon lining bottom plane, there is silicon nitride dielectric layer, the fixing polysilicon layer Poly0 as wire is had on silicon nitride layer, Poly0 has the electrode tip holder (9 being made up of polysilicon layer Poly1, 10) and V+U composite beam micro-actuator (8), electrode tip holder (9, 10), polysilicon layer Poly2 and metal level collectively constitute the electrode (3 of actuator, 4 and 5).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104459997A (en) * | 2014-12-02 | 2015-03-25 | 深圳市盛喜路科技有限公司 | MEMS tunable optical driver and manufacturing method |
| CN106145027B (en) * | 2015-04-28 | 2018-05-15 | 苏州希美微纳系统有限公司 | A kind of MEMS rotary actuators based on electrothermal drive |
| CN110045497B (en) * | 2019-04-23 | 2021-09-03 | 南京理工大学 | Electric heating micro-drive control light path on-off device based on U + V type structure |
| CN113834391B (en) * | 2021-08-25 | 2022-06-28 | 南京理工大学 | Recoverable MOEMS safety and safety relief device based on optical logic control |
| CN114061386B (en) * | 2021-11-17 | 2023-07-18 | 南京理工大学 | MOEMS fuze safety device with state monitoring |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6708491B1 (en) * | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
| WO2005001863A1 (en) * | 2003-06-02 | 2005-01-06 | Carnegie Mellon University | Self-assembling mems devices having thermal actuation |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6708491B1 (en) * | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
| WO2005001863A1 (en) * | 2003-06-02 | 2005-01-06 | Carnegie Mellon University | Self-assembling mems devices having thermal actuation |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
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