CN103344416A - Volume holographic transmission grating diffraction efficiency tester - Google Patents
Volume holographic transmission grating diffraction efficiency tester Download PDFInfo
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- CN103344416A CN103344416A CN2013102700390A CN201310270039A CN103344416A CN 103344416 A CN103344416 A CN 103344416A CN 2013102700390 A CN2013102700390 A CN 2013102700390A CN 201310270039 A CN201310270039 A CN 201310270039A CN 103344416 A CN103344416 A CN 103344416A
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Abstract
The invention relates to a volume holographic transmission grating diffraction efficiency tester which comprises a light source module, a prepositioned monochromator, a measuring monochromator, and a measuring and controlling system. The prepositioned monochromator can provide a measuring light source for the measuring monochromator after optical processing is carried out on a light source provided by the light source module; the measuring and controlling system can detect signal light obtained after measurement is carried out on the measuring monochromator and calculate diffraction efficiency; a second entrance slit, a second concave surface collimating mirror, a third plane reflecting mirror, a sample jig, a fourth plane reflecting mirror, a second concave surface image-forming mirror and a second exit slit which are sequentially arranged in the direction of an optical path are respectively arranged in a shell body of the measuring monochromator. The volume holographic transmission grating diffraction efficiency tester can achieve measurement of relative diffraction efficiency and absolute diffraction efficiency of a volume holographic transmission grating at the same time; the volume holographic transmission grating diffraction efficiency tester is provided with polaroids with dismountable broadbands, testing of volume holographic transmission grating polarization diffraction efficiency can also be achieved by means of the tester, and the tester really has multiple functions.
Description
Technical field
The present invention relates to the grating technology field, a kind of body holographic transmission grating diffraction efficiency tester that relates to.
Background technology
Diffraction grating (hereinafter to be referred as grating) relies on its excellent performance to become the core light-splitting device of spectral instrument, makes spectral instrument all obtain extensive and far-reaching application in fields such as spectral analysis, forward position cross discipline, the social people's livelihood.Diffraction efficiency is to estimate one of of paramount importance technical indicator of grating performance, also is the Fundamentals of estimating the spectral instrument transfer of energy properties.Diffraction efficiency is divided into relative diffraction efficiency and absolute diffraction efficiency.Relatively diffraction efficiency refers to the diffraction light flux of monochromatic incident light in given spectral order time, with same monochromatic light through and grating have the ratio of reflection flux of the standard flat catoptron of same apertures.Absolute diffraction efficiency refers to the ratio of monochromatic diffraction light flux and incident flux in the given spectral order time.Same block of grating is different for the inferior diffraction efficiency of the different diffraction level of a certain wavelength X.The grating client often claims to required grating, requires grating diffration efficient at the inferior technical requirement that must reach regulation of the m level of a certain wavelength X, so the development of grating and production unit need carry out the diffraction efficiency test to grating.
The country of development or production grating has all set up corresponding method of testing to the measurement of reflective gratings diffraction efficiency in the world, and develops relevant testing tool.But also rarely has report about the testing tool of measuring body holographic transmission formula grating.The prior art the most approaching with the present invention, it is the full-automatic plane of reflection grating diffraction efficiency tester that Changchun Institute of Optics, Fine Mechanics and Physics, CAS develops, as shown in Figure 1, this broadband large scale plane grating diffraction efficiency tester comprises: the outer light path of light source, premonochromator, measurement monochromator and controller.The outer light path of light source comprises tungsten lamp 1, deuterium lamp 2, condenser 3.Premonochromator comprises entrance slit 4, concave surface collimating mirror 5, spectro-grating 6, mirror condenser 7, housing 8.Measure monochromator and comprise entrance slit 9, concave surface collimating mirror 10, plane grating to be measured 11 or reference planes catoptron 12, grating turntable 13, mirror condenser 14, housing 18, exit slit 15, photomultiplier 16, controller 17.
From structure shown in Figure 1 as can be known, the outer light path of light source and premonochromator provide monochromatic light for measurement, and the continuous rotational angular velocity of controller control spectro-grating 6 and plane grating to be measured 11 makes two monochromators export same wavelength monochromatic light.Photomultiplier 17 receives the reflected light from the diffraction light of plane grating 11 to be measured or plane reference mirror 12 respectively, and calculates their ratio.When measuring different wave length, controller control spectro-grating 6 and plane grating to be measured 11 carry out angular turn, realize the measurement of different wave length diffraction efficiency.
The problem that this kind constructional device exists is: this light channel structure only is suitable for the measurement of reflective plane grating diffraction efficiency, when body holographic transmission grating is carried out the measurement of diffraction efficiency, can not make detector receive grating diffration luminous flux to be measured, can't realize the measurement of body holographic transmission diffraction efficiency of grating.
Summary of the invention
In order to overcome the defective that above-mentioned technology exists, the object of the present invention is to provide a kind of measurement that can realize body holographic transmission diffraction efficiency of grating, can realize the measurement of the relative diffraction efficiency of body holographic transmission grating and absolute diffraction efficiency, body holographic transmission grating diffraction efficiency tester simultaneously.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
A kind of body holographic transmission grating diffraction efficiency tester comprises: light source module, premonochromator, measurement monochromator and TT﹠C system;
Described premonochromator can be after the light source that described light source module is provided carries out optical processing, for described measurement monochromator provides measurement light source; The flashlight that described TT﹠C system obtains after described measurement monochromator can being measured detects the calculating with diffraction efficiency;
Be respectively equipped with in the housing of described measurement monochromator and set gradually at optical path direction: second entrance slit, the second concave surface collimating mirror, the 3rd plane mirror, sample clamp, Siping City's face catoptron, the second concave surface imaging mirror and second exit slit;
The described second concave surface collimating mirror is placed in second entrance slit and light beam on the light path light axis of lens combination; Described the 3rd plane mirror is arranged on second turntable; Described Siping City face catoptron is arranged on the 3rd turntable; Described sample clamp is arranged on the anchor clamps track; Can place body holographic transmission grating to be measured on the described sample clamp or with reference to diaphotoscope, sample clamp can move along the anchor clamps track; Described second exit slit is positioned on the light path of folded light beam of the second concave surface imaging mirror, and is positioned on the focal plane of the second concave surface imaging mirror; The described second concave surface imaging mirror can reflex to TT﹠C system with flashlight.
In technique scheme, described light source module comprises on optical path direction successively: tungsten lamp and deuterium lamp; First plane mirror and second plane mirror and condenser.
In technique scheme, in the premonochromator housing of described premonochromator, on optical path direction, comprise successively: first entrance slit, the first concave surface collimating mirror, spectro-grating group, first turntable, the first concave surface imaging mirror and first exit slit.
In technique scheme, described TT﹠C system comprises: detection system and controller; Described controller can carry out computing and the demonstration of diffraction efficiency to the measurement result of described detection system.
The present invention has following beneficial effect:
Body holographic transmission grating diffraction efficiency tester of the present invention can be realized the measurement of the relative diffraction efficiency of body holographic transmission grating and absolute diffraction efficiency simultaneously.Simultaneously, the lens combination in this body holographic transmission grating diffraction efficiency tester has dismountable broadband polaroid, utilizes this tester also can realize the test of body holographic transmission grating polarization diffraction efficiency, has really realized a tractor serves several purposes.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is the structural representation of prior art;
Fig. 2 is one of structural representation of body holographic transmission grating diffraction efficiency tester of the present invention;
Fig. 3 be body holographic transmission grating diffraction efficiency tester of the present invention structural representation two;
Fig. 4 is the further explanatory drawings of the premonochromator spectro-grating group of body holographic transmission grating diffraction efficiency tester of the present invention.
Embodiment
Invention thought of the present invention is:
Body holographic transmission grating diffraction efficiency tester of the present invention adopts double monochromator version, and it comprises light source module, premonochromator, measurement monochromator and TT﹠C system.The light of light source module reflects through condenser, focuses at the entrance slit place and incides in the premonochromator.Premonochromator adopts the Czerny-Turner decussate texture, and the design of spectro-grating group is partly adopted in its light splitting, and by switching grating in the spectro-grating group, premonochromator can provide broadband monochromatic output.Hull outside at premonochromator, measure and to adopt two plane mirrors that are placed on respectively on the turntable to realize the transformations of light path in the monochromator, by locational adjustment and the rotation of the two piece plane mirrors measurement that realize different sample different wave length diffraction efficiencies of sample clamp on the anchor clamps track.TT﹠C system mainly realize turntable control, the adjustment of sample clamp position and body holographic transmission grating to be measured or with reference to diaphotoscope go out luminous flux or n.s. the time incident flux detection, this light channel structure can be realized the measurement of the relative diffraction efficiency of body holographic transmission grating to be measured and absolute diffraction efficiency.
Below in conjunction with accompanying drawing the present invention is done to describe in detail.
As shown in Figures 2 and 3, body holographic transmission grating diffraction efficiency tester of the present invention comprises: light source module, premonochromator, measurement monochromator and controller; Wherein, light source module comprises tungsten lamp 19, deuterium lamp 20, first plane mirror 21 and second plane mirror 22, condenser 23; Premonochromator comprises first entrance slit 24, the first concave surface collimating mirror 25, spectro-grating group 26, first turntable 27, the first concave surface imaging mirror 28, first exit slit 29, premonochromator housing 30; Measuring monochromator comprises second entrance slit 32, the second concave surface collimating mirror 33, second turntable 34, the 3rd turntable 40, the 3rd plane mirror 35, sample clamp 36, anchor clamps track 39, Siping City's face catoptron 41, the second concave surface imaging mirror 42, second exit slit 43, measures monochromator housing 44; TT﹠C system comprises detector 45 and controller 46.
First turntable, the 27 inner two-layer rotatable platform structures up and down that adopt in the premonochromator, upper platform is used for realizing the motion switch of three plane gratings, lower floor's platform is used for realizing the scanning motion of monolithic plane grating, as shown in Figure 4, wherein I, II and III are respectively plane grating I, plane grating II and plane grating III, O
1, O
2And O
3Be respectively the summit of every plane grating substrate, the upper platform in first turntable 27 is realized the switching of the grating that equilateral triangle is placed, and the lower floor's platform in first turntable 27 is realized the scanning of monolithic grating, C
1Be the central point of upper platform, C
2Intersection point for stepper motor shaft centerline and plane grating 1 symmetrical plane.When three plane gratings switched to the working position, its base vertices all required and C
2Point overlaps (detailed description of premonochromator spectro-grating group can be that 201310113559.0 Chinese patent literature is disclosed referring to application number, a kind of broadband large scale plane grating diffraction efficiency tester).
Body holographic transmission grating diffraction efficiency tester of the present invention, as shown in Figures 2 and 3, wherein, tungsten lamp 19 adopts Philip 20W, the tungsten lamp of 0～12V; Deuterium lamp 20 adopts the bright DL2.5 type of Beijing dawn deuterium lamp.The substrate material of first plane mirror 21, second plane mirror 22, condenser 23, the first concave surface collimating mirror 25, the first concave surface imaging mirror 28, the second concave surface collimating mirror 33, the 3rd plane mirror 35, Siping City's face catoptron 41 and the second concave surface imaging mirror 42 all adopts K9 glass, aluminize in the surface, the focal distance f=102mm of premonochromator.The material of first entrance slit 24 adopts the 45# steel disc, and slit width 0.1～2mm is adjustable, highly is 5mm.Grating in the spectro-grating group 26 is respectively the plane reflection grating of 300 lines per millimeters, 600 lines per millimeters, 1200 lines per millimeters.The material of premonochromator housing 30, measurement monochromator housing 44 all adopts aluminium, and thickness is that the 6mm compacting forms.The material of first turntable 27, second turntable 34 and the 3rd turntable 40 adopts aluminium, adopts stepper motor accurately to control.Two photomultipliers in the detection system 45 adopt high sensitivity, low noise H10722-20 and P4638 realization to the measurement of 200-900nm wave band and 800-3000nm wave band data respectively, and the control plate adopts PCI9111 to realize intelligent control and signals collecting.
The principle of work explanation:
1, measures the relative diffraction efficiency of body holographic transmission grating 37 to be measured.As shown in Figure 2, to be put on the sample clamp 36 with the reference diaphotoscope 38 of body holographic transmission grating 37 base materials to be measured, adjust condenser 23, make tungsten lamp 19 or deuterium lamp 20 be imaged on first entrance slit, 24 places, see through first entrance slit 24, incident ray shines on the first concave surface collimating mirror 25 and forms directional light, behind a certain grating beam splitting in the parallel rays process spectro-grating group 26, changing the direction of propagation shines on the first concave surface imaging mirror 28, focus on through the first concave surface imaging mirror 28 on first exit slit 29 of premonochromator, light beam is through lens combination 31, incide on second entrance slit 32 of measuring monochromator, second entrance slit 32 of permeametry monochromator, incident ray shines on the second concave surface collimating mirror 33, becoming directional light through 33 reflections of the second concave surface collimating mirror shines on the 3rd plane mirror 35, adjust sample clamp 36 positions along anchor clamps track 39, second turntable 34 is done accurate adjustment under the control of controller 46, make the parallel luminous energy vertical irradiation of the 3rd plane mirror 35 reflection to reference diaphotoscope 38, transmitted light beam through 38 outgoing of reference diaphotoscope shines on Siping City's face catoptron 41, Siping City's face catoptron 41 under the control of the 4th turntable 40 with beam reflection to the second concave surface imaging mirror 42, received by photomultiplier 45 finally by the light beam of the second concave surface imaging mirror 42 by the second exit slit 43 places outgoing of measuring monochromator, obtain transmitted light flux with reference to diaphotoscope 38 by the registration that reads and record photomultiplier 45; Then as shown in Figure 3, according to the test wavelength, body holographic transmission grating 37 to be measured is placed on sample clamp 36(placement with reference to the position of diaphotoscope 38) on, adjust the position of sample clamp 36 on anchor clamps track 39, it is motionless that miscellaneous part keeps, the light that is sent by second entrance slit 32 of measuring monochromator is radiated on the body holographic transmission grating 37 after 33 reflections of the second concave surface collimating mirror, start controller 46 and adjust second turntable 34, make body holographic transmission grating 37 to be measured can receive the incident light of measuring wavelength, at this moment, behind body holographic transmission grating 37 diffraction to be measured, controller is adjusted the 3rd turntable 40, make the diffraction light of body holographic transmission grating 37 test wavelength to be measured can reflex on the second concave surface imaging mirror 42, after the second concave surface imaging mirror 42 focuses on, the diffraction light flux of body holographic transmission grating 37 to be measured is received by detection system 45, reads and record data; With the diffraction light flux of body holographic transmission grating 37 to be measured with do ratio with reference to the transmitted light flux of diaphotoscope 38, namely get the relative diffraction efficiency of body holographic transmission grating 37 to be measured under the test wavelength.
2, measure the absolute diffraction efficiency of body holographic transmission grating 37 to be measured.Take away the sample that is placed on shown in Fig. 2 on the sample clamp 36, adjust condenser 23, make tungsten lamp 19 or deuterium lamp 20 be imaged on first entrance slit, 24 places, see through first entrance slit 24, incident ray shines on the first concave surface collimating mirror 25 and forms directional light, behind a certain grating beam splitting in the parallel rays process spectro-grating group 26, changing the direction of propagation shines on the first concave surface imaging mirror 28, focus on through the first concave surface imaging mirror 28 on first exit slit 29 of premonochromator, light beam is through lens combination 31, incide on second entrance slit 32 of measuring monochromator, second entrance slit 32 of permeametry monochromator, incident ray shines on the second concave surface collimating mirror 33, becoming directional light through 33 reflections of the second concave surface collimating mirror shines on the 3rd plane mirror 35, second turntable 34 is done accurate adjustment under the control of controller 46, make the directional light of the 3rd plane mirror 35 reflections reflex on Siping City's face catoptron 41, Siping City's face catoptron 41 under the control of the 4th turntable 40 with beam reflection to the second concave surface imaging mirror 42, received by photomultiplier 45 finally by the light beam of the second concave surface imaging mirror 42 by the second exit slit 43 places outgoing of measuring monochromator, obtain incident flux by the registration that reads and record photomultiplier 45; Then as shown in Figure 3, according to the test wavelength, adjustment is placed with the position of sample clamp 36 on anchor clamps track 39 of body holographic transmission grating 37 to be measured, it is motionless that miscellaneous part keeps, the light that is sent by second entrance slit 32 of measuring monochromator is radiated on the body holographic transmission grating 37 after 33 reflections of the second concave surface collimating mirror, start controller 46 and adjust second turntable 34, make the incident light that body holographic transmission grating 37 to be measured can the acceptance test wavelength, at this moment, behind body holographic transmission grating 37 diffraction to be measured, controller is adjusted the 3rd turntable 40, make the diffraction light of body holographic transmission grating 37 test wavelength to be measured can reflex on the second concave surface imaging mirror 42, after the second concave surface imaging mirror 42 focused on, the diffraction light flux of body holographic transmission grating 37 to be measured was received by detection system 45, reads and record data; Diffraction light flux and the incident flux of body holographic transmission grating 37 to be measured are done ratio, namely get the absolute diffraction efficiency of body holographic transmission grating 37 to be measured under the test wavelength.
Obviously, above-described embodiment only is for example clearly is described, and is not the restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here need not also can't give all embodiments exhaustive.And the apparent variation of being extended out thus or change still are among the protection domain of the invention.
Claims (4)
1. a body holographic transmission grating diffraction efficiency tester is characterized in that, comprising: light source module, premonochromator, measurement monochromator and TT﹠C system;
Described premonochromator can be after the light source that described light source module is provided carries out optical processing, for described measurement monochromator provides measurement light source; The flashlight that described TT﹠C system obtains after described measurement monochromator can being measured detects the calculating with diffraction efficiency;
Be respectively equipped with in the housing of described measurement monochromator (44) and set gradually at optical path direction: second entrance slit (32), the second concave surface collimating mirror (33), the 3rd plane mirror (35), sample clamp (36), Siping City's face catoptron (41), the second concave surface imaging mirror (42) and second exit slit (43);
The described second concave surface collimating mirror (33) is placed in second entrance slit (32) and light beam on the light path light axis of lens combination (31); Described the 3rd plane mirror (35) is arranged on second turntable (34); Described Siping City's face catoptron (41) is arranged on the 3rd turntable (40); Described sample clamp (36) is arranged on the anchor clamps track (39); Can place body holographic transmission grating to be measured (37) on the described sample clamp (36) or with reference to diaphotoscope (38), sample clamp (36) can be mobile along anchor clamps track (39); Described second exit slit (43) is positioned on the light path of folded light beam of the second concave surface imaging mirror (42), and is positioned on the focal plane of the second concave surface imaging mirror (42); The described second concave surface imaging mirror (42) can reflex to TT﹠C system with flashlight.
2. body holographic transmission grating diffraction efficiency tester according to claim 1 is characterized in that described light source module comprises successively: tungsten lamp (19) and deuterium lamp (20) on optical path direction; First plane mirror (21) and second plane mirror (22) and condenser (23).
3. body holographic transmission grating diffraction efficiency tester according to claim 1, it is characterized in that, in the premonochromator housing (30) of described premonochromator, on optical path direction, comprise successively: first entrance slit (24), the first concave surface collimating mirror (25), spectro-grating group (26), first turntable (27), the first concave surface imaging mirror (28) and first exit slit (29).
4. according to any described body holographic transmission grating diffraction efficiency tester among the claim 1-3, it is characterized in that described TT﹠C system comprises: detection system (45) and controller (46); Described controller (46) can carry out computing and the demonstration of diffraction efficiency to the measurement result of described detection system (45).
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Cited By (7)
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| CN104132797A (en) * | 2014-07-16 | 2014-11-05 | 奉化市宇创产品设计有限公司 | Reflecting mirror characteristic testing device |
| CN104502067A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Relative diffraction efficiency tester for Fourier transformation plane grating |
| CN106596058A (en) * | 2016-11-21 | 2017-04-26 | 中国科学院上海光学精密机械研究所 | Measuring device and method for grating diffraction efficiency spectrum |
| CN107894282A (en) * | 2017-12-25 | 2018-04-10 | 苏州农业职业技术学院 | A kind of monochromator |
| CN108036930A (en) * | 2017-12-28 | 2018-05-15 | 长春长光精密仪器集团有限公司 | A kind of detecting system of Transimission Grating Diffraction Efficiencies |
| US10663922B2 (en) | 2016-04-14 | 2020-05-26 | Boe Technology Group Co., Ltd. | Image display system and image display method |
| JP7472637B2 (en) | 2020-05-08 | 2024-04-23 | 株式会社島津製作所 | Spectrometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7472637B2 (en) | 2020-05-08 | 2024-04-23 | 株式会社島津製作所 | Spectrometer |
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Application publication date: 20131009 |