CN103323900B - 偏振器边缘肋调整 - Google Patents
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Abstract
本发明涉及偏振器边缘肋调整。一种偏振器,具有由边缘界定的第一表面,包括标准区域和肋调整区域。标准区域可以包括具有标准特性的肋。标准区域可被配置为偏振入射光。肋调整区域可沿着基板边缘的至少一段被放置在该边缘和标准区域的至少一部分之间。肋调整区域可以包括调整的肋,其从标准特性被调整以具有不同的特性。
Description
技术领域
本申请一般涉及偏振器。
背景技术
偏振器例如线栅偏振器例如典型地具有位于基板上的长薄肋。肋以及肋之间的间隔可以比入射光的波长短得多。例如,对于可见光偏振器,肋宽度以及肋之间的间隔可以是大约70纳米。但是,肋的长度可以非常长,例如几毫米或几厘米。
因此,这些偏振器可以具有长的窄通道。流体可以由于毛细管作用而容易地渗到这些通道中。这样的流体实质上降低了偏振器的性能。这样的流体的典型来源是来自人的手。在处理时,人手上的天然油脂会渗到偏振器通道中,导致降低的偏振器性能。这样的流体的另一来源是沿支持器边缘的凝结或在存储时的凝结。该凝结也会导致降低的偏振器性能。允许偏振器的处理、夹钳或存储但不会有油、水或其他流体渗到偏振器通道的问题,这将是有益的。
发明内容
已经认识到,提供可以被容易地处理、存储、夹持等的偏振器,油、水或其他流体渗到偏振器通道的风险较小,这将是有利的。
在一个实施例中,本发明涉及一种能满足提升处理能力的需求的偏振器。该偏振器包括基板,其具有由边缘界定的第一表面,在基板的第一表面的一部分之上放置的平行、延长的肋的阵列,其包括标准区域和肋调整区域。标准区域可以包括具有标准特性的肋。标准区别被配置为偏振入射光。肋调整区域可以沿着基板的边缘的至少一段被放置在边缘和标准区域的至少一部分之间。肋调整区域可以包括调整的肋,其从标准特性被调整以具有不同的特性。
在另一实施例中,本发明涉及一种制造偏振器的方法,该偏振器满足提升处理能力的需求。该方法包含提供偏振器,该偏振器包括在基板表面的大部分之上放置的平行、延长的肋的阵列,以及沿着基板边缘的至少一段来调整该肋。
附图说明
图1是根据本发明实施例的偏振器的示意性顶视图,包括标准区域12和肋调整区域11a;
图2是根据本发明实施例的偏振器的示意性顶视图,包括标准区域12和肋调整区域11b-c;
图3是根据本发明实施例的偏振器的示意性顶视图,包括标准区域12和肋调整区域11d;
图4是根据本发明实施例的偏振器的示意性顶视图,包括标准区域12和肋调整区域11e-f;
图5是根据本发明实施例的偏振器的示意性横截面侧视图,包括标准区域12和肋调整区域11;
图6是根据本发明实施例的偏振器的示意性横截面侧视图,包括标准区域12和肋调整区域11;
图7是根据本发明实施例的偏振器的示意性横截面侧视图,包括标准区域12和肋调整区域11;
图8是根据本发明实施例的偏振器的示意性横截面侧视图,包括标准区域12、肋调整区域11以及过渡区域84;
图9是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93、金属布线92和分段介电肋94;以及肋调整区域11,其具有的肋包括基板肋93、金属布线91和分段介电肋94;
图10是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93、金属布线92和分段介电肋94,以及肋调整区域11,其具有的肋包括基板肋93、金属布线101和分段介电肋94;
图11是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93和金属布线92,以及肋调整区域11,其具有的肋包括基板肋93和金属布线101;
图12是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93和金属布线92,以及肋调整区域11,其具有的肋包括基板肋93,该基板肋93具有的顶部121和侧面122基本上没有其他肋材料;
图13是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93和介电肋94,以及肋调整区域11,其具有的肋包括基板肋93,该基板肋93具有的顶部121和侧面122基本上没有其他肋材料;
图14是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋包括基板肋93、金属布线92和介电肋94,以及肋调整区域11,其具有的肋包括基板肋93,该基板肋93具有的顶部121和侧面122基本上没有其他肋材料;
图15是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,其具有的肋具有基本上矩形的横截面轮廓,以及肋调整区域11,其具有的肋具有不规则的横截面轮廓;
图16是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,以及肋调整区域11,其中,熔合的肋附着到邻近的肋并从基板分离;
图17是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,以及肋调整区域11,其中,材料171被放置在肋173之间;
图18是根据本发明实施例的偏振器的示意性横截面侧视图,该偏振器包括标准区域12,以及肋调整区域11,其中,材料被放置在肋173之间以及在肋181的顶上;
图19是根据本发明实施例的偏振器的示意性横截面侧视图,显示在标准区域前面的肋调整区域;
图20是根据本发明实施例的在调整肋之前的偏振器的示意性横截面侧视图;
图21是根据本发明实施例的偏振器的示意性横截面侧视图,包括标准区域12以及无肋区域211,其中,肋的整个肋结构已经在整个无肋区域211中被烧蚀。
具体实施方式
定义
如这里所使用,术语“肋调整区域”是指偏振器上肋被调整的区域,例如通过将邻近的的肋熔合到一起、减少肋的高度、增加肋的宽度、改变肋的形状、烧蚀肋的一部分或在肋之间放置材料,从而“肋调整区域”中的肋基本上不同于标准区域中的肋。
如这里所使用,术语“无肋区域”是指偏振器上肋基本被移除的区域。
如这里所使用,术语“基本上”是指作用、特征、特性、状态、结构、条目或结果的完全或几乎完全的程度。例如,“基本上”被围绕的物体将表示该物体被完全围绕或几乎被完全围绕。与绝对完全性的确切允许程度的偏离在某些情形下依赖于特定的上下文。但是,一般来说,接近完全将具有与达到绝对和整个完全时一样的总体结果。在负面含义中使用以表示完全或接近完全缺少作用、特征、特性、状态、结构、条目或结果时,“基本上”的使用同样可用。
现在将参考图中示出的示例性实施例,且特定的语言在这里将被用于描述该示例性实施例。但是可以理解由此不限制本发明的范围。对在此描述的发明性特点的改变和进一步修改,以及在此描述的本发明原理的额外应用(其可被本领域并具有本公开文本的技术人员意识到),被认为在本发明的范围内。
如图1-19所示,偏振器被示为包含具有由边缘13界定的第一表面54基板53、被放置在基板53的第一表面54的一部分上的平行、延长的肋51的阵列,包括中心的标准区域12和肋调整区域11。标准区域12可以包括肋51a-e,其具有标准特性且可被配置为使入射光偏振。标准区域中的肋51a-e可以覆盖基板的第一表面54的大部分。标准区域12可以是单个未划分的区域。
肋调整区域11可沿着基板53的边缘13的至少一段被放置在边缘13和标准区域12的至少一部分之间。肋调整区域11可包括调整的肋51g-r,该肋从标准特性调整为具有不同的特性。
由于肋调整区域11的不同特性,肋调整区域的毛细管作用基本上可比标准区域12的毛细管作用更少。例如,肋调整区域11中的肋51g-r可以比标准区域12中的肋51a-e更圆、更宽或更短。肋调整区域11中的肋51g-r可被熔合在一起、部分移除、或形成不规则的形状。肋调整区域11中的肋51g-r可以包括在肋之间放置的材料。这些调整将导致减少的毛细管作用。
如图1所示,偏振器10的边缘13可包括围绕偏振器10的周边的四段13a-d。每一段可以是边缘13在边缘两个拐角之间的基本直线的部分。肋调整区域11a可以沿着整个边缘13延伸,或沿着偏振器10的整个周边延伸。在另一实施例中,肋调整区域11可以仅沿着边缘13的一部分延伸,例如边缘13的20%到60%之间。在另一实施例中,肋调整区域可以将标准区域12从基板的边缘13的至少50%处分离。肋调整区域11可以沿着边缘的单个段延伸或沿着边缘的多段延伸。
如图2所示,偏振器20的肋调整区域11可以包括沿着偏振器20的相对侧上的边缘13的两个不同段13a和13c延伸。两段13a和13c可以和标准区域中的肋阵列垂直。
肋调整区域11可以在和边缘基本垂直的方向上从边缘13向内延伸,在一个实施例中延伸距离De至少是1微米,在另一实施例中距离De至少是10微米,在另一实施例中距离De至少是100微米,在另一实施例中距离De至少为1毫米,或在另一实施例中距离De至少为5毫米。在另一实施例中,肋调整区域可以在和边缘基本垂直的方向上从边缘向内延伸1微米到1毫米的距离De。距离De的长度可依赖于偏振器处理和所需的有用偏振面积。
注意到尽管图2中示出了该距离De,其中具有沿着偏振器20的对侧上的边缘13的两个不同段13a和13c延伸的两个肋调整区域11b-c,该距离De以及上面关于该距离的讨论可被用于这里描述的任意实施例。例如,如果如图1所示肋调整区域围绕着偏振器10的边缘13一直延伸,或者如果如图3-4所示肋调整区域仅沿着边缘的段的部分延伸,该距离De可适用。
如图3所示,偏振器30的肋调整区域11可以沿着边缘13的段13e的一部分延伸,其中,该段被定义为边缘13在该边缘的拐角之间的基本直线的部分。在一个实施例中肋调整区域11可以沿着该段的至少50%延伸在另一实施例中沿着该段的至少70%延伸在另一实施例中沿着该段的至少90%延伸或者在另一实施例中在该段的50%和90%之间延伸如图4所示,偏振器40的肋调整区域11e-f可以沿着边缘13的多段来部分延伸。
如图1-4所示,标准区域12可以基本上比基板53的第一表面54的肋调整区域11覆盖更多。在一个实施例中,标准区域12的覆盖是基板53的第一表面54的肋调整区域11的覆盖的至少10倍,或在另一实施例中是基板53的第一表面54的肋调整区域11的覆盖的至少100倍。
如图1-4所示,肋调整区域11和标准区域12一起基本上可以覆盖基板53的所有第一表面54。或者,另一区域在基板53的第一表面54的部分之上存在。
如图5中的偏振器50所示,不同的特性可以包括肋高度。肋调整区域11中的肋51g可以包括基本上比标准区域12中的肋51a更短的肋(h1<h2)。在一个实施例中肋调整区域11中的所有肋51g可以比标准区域12中的所有肋51a短至少25%或者在另一实施例中短至少50%未在图5中示出的(在下面参考图8所示的)过渡区域84可存在于修改区域11和标准区域12之间。过渡区域84中的肋51f可以具有比肋调整区域11中的肋51g更高的高度但比标准区域12中的肋51a更矮。
如图6中的偏振器60所示,不同的特性可以包括肋宽度w。肋调整区域11中的肋51h可以包含比标准区域12中的肋51a基本上更宽的肋(w1>w2)。在以实施例中,肋调整区域11中的所有肋51h可以比标准区域12中的所有肋51a宽至少25%或在另一实施例中宽至少50%图6中未示出的(如下参考图8所述的)过渡区域84可以存在于肋调整区域11和标准区域12之间。过渡区域84中的肋51f可以具有比调整区域11中的肋51h更窄但比标准区域12中的肋51a更宽的宽度。肋宽度被定义为与肋高度h垂直的方向的度量。
如图7中的偏振器70所示,肋调整区域11可以包括熔合在一起的邻近的肋51i。肋51i可以被热能(热)熔化或熔合。这可以通过沿着偏振器70的边缘13的激光或热布线来实现。如图16中的偏振器160所示,熔化或熔合过程可以使熔合的肋51q附着到邻近的肋(例如标准区域12中的邻近的肋,或例如过渡区域84中的邻近的肋)。熔合或熔化的肋51i可以从基板53分离,如下参考图16所述。
如图8中的偏振器80所示,过渡区域84可以存在于肋调整区域11和标准区域12之间。过渡区域84中的肋51f可以具有肋调整区域11和标准区域12之间的过渡特性。如果肋调整区域11的不同特性是宽度,则过渡区域84中的肋51f可以具有介于肋调整区域11中的肋51j和标准区域12中的肋51a之间的宽度。如果肋调整区域11的不同特性是高度,则过渡区域84中的肋51f可以具有介于肋调整区域11中的肋51j和标准区域12中的肋51a之间的高度。如果肋调整区域11的不同特性是形状,则过渡区域84中的肋51f可以具有介于肋调整区域11中的肋51j和标准区域12中的肋51a之间的形状。肋调整区域11和标准区域12中的肋51a之间的各种不同特性可以被组合,且过渡区域84可以包括具有基于所有这些组合的不同特性的中间特性。
如图9-14所示,肋调整区域11和标准区域12两者中的肋51可以包括在基板53上形成并沿着基板53延伸的基板肋93。如图9-10所示,偏振器90和100可以包括金属布线91或101和92。分段的介电肋94可被放置在基板肋93之上。尽管图9-10示出了放置在金属布线91之上的介电肋94,但顺序可以相反,从而金属布线91被放置在介电肋94之上。在美国专利号6,122,103中更完整地描述了基板肋93,且在美国专利序列号13/075,470中更完整地描述了介电肋94;两者都通过引用结合于此。
不同的特性可以是肋宽度w的差异(w3>w4)和/或高度的差异(h4>h3)。肋宽度可以被定义为肋的最大宽度,不管该最大值出现在基板肋93、金属布线91或101和92、或者分段介电肋94中。肋调整区域11中的金属布线91可以被部分或完全熔化以创建不同的特性。图10中的偏振器100包括肋调整区域11中已被熔合在一起的金属布线101,而标准区域12中的金属布线92可以包括单独的金属布线92(在互相物理分离的邻近基板肋93之上布置的邻近金属布线92)。金属布线101可以附着到邻近的布线或肋并从基板分离,和图16中示出的结构类似。
如图9-10中的肋中心线C11-12所示,大部分分段的介电肋94基本上可同时在肋调整区域11和标准区域12中与下面的基板肋93对准。如图10所示,通过选择介电肋94材料(例如高熔点材料)并小心地加热以熔化肋调整区域11中的金属布线101,分段的介电肋94可基本上与基板肋93对准C11,即使是在金属布线101已熔化或熔合在一起之后。
如图11中的偏振器110所示,肋调整区域11中的肋51n可以包括基板肋93之上的金属布线101。标准区域12中的肋51c可以包括基板肋93上的金属布线92。布线101和92的顶部和侧面可以没有其他层的材料,除了可能非常薄的抗腐蚀材料的涂层(非常薄表示例如<1nm、<5nm或<10nm厚度的层)。肋调整区域中的金属布线101可以附着到邻近的布线或肋并可以从基板分离,和图16中示出的结构类似。
如图12-14中的偏振器120、130和140所示,肋调整区域11中的肋51o可以包括基板肋93,其具有的侧面122和顶部121基本上没有其他肋材料。如图12所示,标准区域12中的肋51c可以包括放置在基板肋93顶上的金属布线92。如图13所示,标准区域12中的肋51d可以包括放置在基板肋93顶上的介电肋94。如图14所示,标准区域12中的肋51b可以包括放置在基板肋93顶上的任意顺序的金属布线92和介电肋94。
如图15中的偏振器15所示,不同的特性可以是肋形状。肋调整区域11可以包括肋51p,其包含不规则的横截面轮廓(不是标准形状例如正方向、矩形、圆形、椭圆形、三角形等),且标准区域12可以包括肋51e,其具有基本规则的横截面轮廓。
如图16中的偏振器160所示,肋调整区域中的肋51q可以包括熔合在一起的肋51q。熔合的肋51q可以附着到邻近的肋(例如标准区域中的肋51a,或例如过渡区域84中的肋51f),并可以从基板分离。加热过程可以使肋调整区域11中的肋51q从基板脱离。
如图17-18中的偏振器170和180所示,标准区域12中的肋51a之间的空隙172可以包括空气,且可以基本上没有材料例如抗蚀剂或聚合物。肋调整区域11中的肋51r之间的空隙173可以包括材料例如聚合物或抗蚀剂172。聚合物或抗蚀剂172可以是在暴露于光或热时变得可溶或不可溶的材料。材料171可以部分填充肋调整区域11中的肋51r之间的空隙173,如图17所示。材料171可以完全填充肋调整区域11中的肋51r之间的空隙173,如图18所示。材料171可以部分或完全覆盖肋调整区域中的肋51r的顶部181,如图18所示。
肋调整区域11中肋的调整将会降低或破坏肋调整区域11偏振光线的能力。偏振对比度表示偏振器有效地偏振光线的能力,其被定义为希望的偏振传播(Tp)除以不希望的偏振传播(Ts)。在一个实施例中,肋调整区域11中的偏振对比度可以小于10。在另一实施例中标准区域12中的偏振对比度可以大于40,在另一实施例中大于100,在另一实施例中大于1000,或在另一实施例中大于10000。
这里描述的各种偏振器可以被固定到架子例如夹钳上。夹钳可以覆盖肋调整区域11的全部或部分。夹钳可以避免覆盖或夹住标准区域,由此允许整个标准区域被用于偏振。肋调整区域11可有助于避免由标准区域12的布线之间的毛细管作用引起的沿着夹钳边缘的凝结。
图8-18中的肋调整区域11以沿着边缘13的与标准区域12中的肋51a-c的阵列平行的段(例如图1中示出的边缘段13b和13d)延伸的肋调整区域11来说明。这些图被这样绘制以更容易地说明本发明;但是,使肋调整区域11沿着边缘13的与标准区域中的肋的阵列垂直的段延伸(例如使肋调整区域11b-c沿着图2中示出的边缘段13a和13c延伸),这会更重要。图19中示出的偏振器190被绘制以说明该后面的版本。使肋调整区域11沿着边缘13的与标准区域中的肋阵列垂直的段延伸,例如如图2和19所示,可有助于用作屏障来避免流体被吸入到标准区域12中的布线51之间的通道。
如何制造
为了制造这里描述的具有标准区域12和调整区域(肋调整区域11或无肋区域211)的各种偏振器:首先,提供偏振器,其包括在基板的大部分表面上放置的平行、延长的肋的阵列。(见图20中的偏振器200)。其次,沿着基板的边缘的至少一段来调整该肋,形成调整区域(肋调整区域11或无肋区域211),其具有和标准区域12不同的特性,从而调整区域的毛细管作用基本上小于标准区域12的毛细管作用。
在一个实施例中,调整可以包括将肋从边缘向内沿着与该边缘基本垂直的方向调整1微米到1毫米之间的距离。在另一实施例中,调整可以包括沿着基板边缘的距离的至少30%来调整肋。
在一个实施例中,热能可被用于沿着基板边缘来熔化肋的部分。热能可以熔化肋的金属部分。热能可以是激光或热布线。图7-8、10-11表明肋调整区域11中的肋51的一部分已被熔化。肋51可以包括具有基本上小于基板53的熔点的熔点的材料,允许肋51或部分的肋51的熔化,而避免或最小化基板53的熔化。例如,肋51可以包括铝而基板53可以包括玻璃。
在另一实施例中,调整可以包括在肋之上施加材料;仅激活调整区域11中的材料;并将未激活的材料从标准区域12移除。该材料可以是抗蚀剂。抗蚀剂可以用热和/或电磁能(例如紫外光)的方法来激活。例如,负性抗蚀剂可被施加到肋之上。对调整区域11中的抗蚀剂的激活可以聚合或交联抗蚀剂。未激活区域(标准区域12)中的抗蚀剂可被显影溶液移除,而调整区域11中聚合的抗蚀剂可以保留。
在另一实施例中,调整可以包括在肋之上施加材料;使标准区域12中的材料劣化;以及从标准区域12移除劣化的材料。该材料可以是抗蚀剂。抗蚀剂可以被热和/电磁能(例如紫外光)的方法来降解。例如,负性抗蚀剂可被施加到肋上。对标准区域12中的抗蚀剂的激活会劣化该抗蚀剂,例如通过破坏长链聚合物中的化学键,使它们变得更为可溶。未劣化区域(调整区域11)中的抗蚀剂可以保留,而标准区域12中的劣化的抗蚀剂可由显影溶液移除。
在另一实施例中,例如通过使用大功率激光,肋的所有或一部分可被烧蚀。这会导致移除肋的一部分,例如如图12-14所示,或烧蚀或移除整个肋结构,创建无肋区域211,例如如图21中的偏振器210所示。整个肋结构可在整个无肋区域或至少75%的无肋区域中被烧蚀。
可以理解,上述布置仅是对本发明原则的应用的说明。可以设计多种调整或替代布置,而不脱离本发明的精神和范围。尽管在附图中示出本发明并结合当前被认为是本发明的最实用和最优选的实施例的特殊性和细节完整描述了本发明,对本领域普通技术人员来说,可明显做出各种修改而不脱离在此阐述的本发明的原理和内容。
Claims (6)
1.一种偏振器,包括:
a.基板,其具有由边缘界定的第一表面;
b.平行、延长的肋的阵列,被布置在所述基板的所述第一表面的大部分之上;
c.所述肋的阵列包括标准区域和肋调整区域;
d.所述标准区域包括具有标准特性的肋并被配置为偏振入射光;
e.所述肋调整区域:
i.沿着所述基板的所述边缘的至少一段被放置在所述边缘和所述标准区域的至少一部分之间;并且
ii.包含调整的肋,所述调整的肋从所述标准特性被调整以具有不同的特性,以便所述肋调整区域的毛细管作用基本上小于所述标准区域的毛细管作用;
iii.包括熔合在一起的邻近肋。
2.如权利要求1所述的偏振器,其中:
a.所述肋调整区域中的肋和所述标准区域中的肋包括:
i.基板肋,在所述基板中形成并从所述基板延伸;
ii.金属布线和分段介电肋,被放置在所述基板肋之上;
b.所述标准区域中的金属布线包括分离的布线,以便被放置在邻近基板肋之上的邻近布线互相物理分离;以及
c.所述肋调整区域中的金属布线包括熔合在一起的多个邻近金属布线。
3.如权利要求1所述的偏振器,其中:
a.所述肋调整区域中的偏振对比度小于10,且所述标准区域中的偏振对比度大于40;以及
b.对比度被定义为希望的偏振传输(Tp)除以不希望的偏振传输(Ts)。
4.一种偏振器,包括:
a.基板,其具有由边缘界定的第一表面;
b.平行、延长的肋的阵列,被布置在所述基板的所述第一表面的大部分之上;
c.所述肋的阵列包括标准区域和肋调整区域;
d.所述标准区域包括具有标准特性的肋并被配置为偏振入射光;
e.所述肋调整区域:
i.沿着所述基板的所述边缘的至少一段被放置在所述边缘和所述标准区域的至少一部分之间;并且
ii.包含调整的肋,所述调整的肋从所述标准特性被调整以具有不同的特性,以便所述肋调整区域的毛细管作用基本上小于所述标准区域的毛细管作用;
f.所述标准区域中的肋之间的空隙包括空气,且所述空隙基本上没有聚合物;以及
g.所述肋调整区域中的肋之间的空隙包括聚合物。
5.一种制造偏振器的方法,该方法包括:
a.提供偏振器,其包括被放置在基板的大部分表面之上的平行、延长的肋的阵列;
b.沿着所述基板的边缘的至少一段来调整所述肋,形成具有和标准区域不同的特性的调整区域,以便所述调整区域的毛细管作用基本上小于所述标准区域的毛细管作用,其中所述调整包括熔化所述肋的一部分。
6.一种制造偏振器的方法,该方法包括:
a.提供偏振器,其包括被放置在基板的大部分表面之上的平行、延长的肋的阵列;
b.沿着所述基板的边缘的至少一段来调整所述肋,形成具有和标准区域不同的特性的调整区域,以便所述调整区域的毛细管作用基本上小于所述标准区域的毛细管作用,所述调整包括:在所述肋之上施加抗蚀剂;以及从所述标准区域移除所述抗蚀剂,而保留所述调整区域中的所述抗蚀剂。
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