CN103230901A - Purging device and method for keeping cleanliness of laser transmission optical system - Google Patents
Purging device and method for keeping cleanliness of laser transmission optical system Download PDFInfo
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- CN103230901A CN103230901A CN2013101562904A CN201310156290A CN103230901A CN 103230901 A CN103230901 A CN 103230901A CN 2013101562904 A CN2013101562904 A CN 2013101562904A CN 201310156290 A CN201310156290 A CN 201310156290A CN 103230901 A CN103230901 A CN 103230901A
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- optical system
- choke block
- laser transmission
- transmission optical
- cleanliness factor
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Abstract
The invention relates to a cleanliness keeping device and method in the technical field of physical optics, in particular to a purging device and method for keeping cleanliness of a laser transmission optical system, and solves the problem of damages of laser transmission quality and optical elements caused by molecule pollution and organic pollution in the laser transmission optical system. An air inlet and a purging air port which are connected are arranged on an upper throttling plate and a lower throttling plate which are in step distribution. The lower throttling plate is arranged under a lens system, an air exhaust port is arranged on the top surface of an air exhaust cover, an air exhaust cover system is arranged at the upper end of the optical system, the upper throttling plate is arranged in the optical system, and the lower throttling plate is arranged at the lower end of the optical system. Clean air enters the optical system through the upper throttling plate and the lower throttling plate with specific air inlet amount, the air has a purging effect for the surface of the lens and the near space when passing the lens system, and pollutants are exhausted from the interior of the optical system through the air exhaust cover system along with the purging air. The purging device and method are used for keeping cleanliness of the laser transmission optical system.
Description
Technical field
The present invention relates to a kind of cleanliness factor holding device and method of physical optics technical field, specifically relate to a kind of keep cleanliness factor in the Laser Transmission optical system dash sweeping device and method.
Background technology
Many optical elements with various bores of difference in functionality are installed in the inside of Laser Transmission optical system, in the process that laser passes through, no matter be small-bore optical element or bigbore optical element, pollute and the organic matter pollution all can produce tremendous influence to the transmission of laser at the lip-deep molecule of these optical elements.Only require to reduce the pollution of internal system by near the cleanliness factor on other mechanical part surfaces optical element and these optical elements in the raising optical system, fundamentally the problem of the inner cleanliness factor of resolution system.At present also there are not suitable apparatus and method to realize keeping the air purity of Laser Transmission optical system inside.In sum, need the molecule that a kind of technology of development in time displaces optical system inside badly, and then keep the air purity of optical system inside.
Summary of the invention
The objective of the invention is for solve in the Laser Transmission optical system that molecule pollutes and the organic matter pollution to the transmission quality of laser and to the optic element damage problem, and then provide a kind of keep cleanliness factor in the Laser Transmission optical system dash sweeping device and method.
Technical scheme one of the present invention is: a kind ofly keep that the sweeping device that dashes of cleanliness factor comprises gas handling system and hood system in the Laser Transmission optical system, gas handling system comprises choke block and following choke block, the bottom surface of last choke block is provided with first air inlet, be densely covered with a plurality of first on the end face of last choke block towards scavenging port, first air inlet is communicated with towards scavenging port with first, the bottom surface of following choke block is provided with second air inlet, be densely covered with a plurality of second on the end face of following choke block towards scavenging port, second air inlet is communicated with towards scavenging port with second, last choke block and following choke block going up or down stairway formula are arranged, following choke block be arranged on lens combination under, the hood system comprises hood and exhaust outlet, exhaust outlet is arranged on the end face of hood, the hood system is arranged on the optical system upper end, last choke block is arranged in the optical system, and is positioned at a side of lens combination, and following choke block is arranged on the optical system lower end.
Preferred version: first air inlet, first is 2mm towards scavenging port, second air inlet, second diameter towards scavenging port.
Preferred version: the diameter of exhaust outlet is 1mm to 2mm.
Technical scheme two of the present invention is: a kind of method of sweeping of dashing that keeps cleanliness factor in the Laser Transmission optical system, concrete steps are: clean gas enters optical system inside by last choke block and following choke block according to specific charge flow rate, gas when the lens combination to lens surface and near the space realize dashing and sweep effect, make pollutant with discharging optical system inside towards the scavenging body through the hood system.
Preferred version: the cleanliness factor of clean gas is hundred grades.
Preferred version: charge flow rate is 200L/min.
It is a kind of that to keep the method for sweeping of dashing of cleanliness factor in the Laser Transmission optical system be that the device that depends on record in the technical scheme one of the present invention is realized.
The present invention compared with prior art has following effect: with Fluent software the versions such as the density of arranging of the different apertures of the different structure of lens module gas outlet hood, inlet plate throttle orifice, different throttle orifice are carried out emulation, obtain dashing and sweep the better structure of effect.Simultaneously various inlet amount, different operating conditions such as back pressure are carried out emulation, draw under different operating conditions it and dash and sweep effect.Dash and find after sweeping effect by monoblock type hood and separate type hood being carried out after the modeling that it is carried out simulation analysis, the dashing of monoblock type hood swept effect and is better than separate type, so adopt the monoblock type hood; Secondly to said structure only change after the diameter of throttle orifice comparative analysis its dash sweep effect after, it is final that selected to adopt diameter be the throttle orifice form of 2mm; The distribution density that selected throttle orifice diameter is carried out different throttle orifices is arranged and has been carried out simulation analysis then, obtain density more Mi Chong sweep the more good conclusion of effect.Be that the different operating condition of lens module is analyzed afterwards, for its flow, found to after comparing two choke blocks and passing to different flows and identical flow compares simulation analysis that both difference were little before this, so adopt identical charge flow rate; Then different charge flow rates is analyzed, to the simulation analysis result of each group air-entry value as can be known, charge flow rate is more big, dashes that to sweep effect more good.To the exit condition, when namely the influence condition of exit pressure was analyzed, by different pressure has been carried out simulation analysis, it was more big to have obtained the exit negative pressure, dashed and swept the more good conclusion (referring to Fig. 5) of effect.Clean gas is in inswept journey, and the gas molecule that enters from choke block down in the lens combination does not meet with other parts of optical system inside, can effectively reduce the generation of turbulent flow, makes gas discharge optical system as early as possible.The scavenging body that dashes under the cause in the inlet plate can't carry out effectively dashing sweeping by duplet lens system, so in a lensed side choke block on is installed also, dashes for duplet lens system part region and sweeps.The optimization effect that can reach the air purity that keeps optical system inside towards the method for sweeping of the present invention; Of the present invention towards can be the fully real method of sweeping of dashing to existing optical system of sweeping device, and simple in structure.
Description of drawings
Fig. 1 is the overall construction drawing that dashes sweeping device (among the figure: go up choke block 1-1, following choke block 1-2, lens combination 1-3, the 1-4 of hood system is towards scavenging port 3-2) of cleanliness factor in the maintenance Laser Transmission optical system of the present invention;
Fig. 2 goes up air inlet plate structure figure (among the figure: air inlet 2-1, towards scavenging port 2-2);
Fig. 3 is that following inlet plate structure chart is (among the figure: air inlet 3-1);
Fig. 4 is hood system construction drawing (among the figure: hood 4-1, exhaust outlet 4-2);
Fig. 5 is towards scavenging body fluid field emulation schematic diagram.
The specific embodiment
The specific embodiment one: present embodiment is described in conjunction with Fig. 1 to Fig. 4, present embodiment a kind of keeps that the sweeping device that dashes of cleanliness factor comprises gas handling system and the 1-4 of hood system in the Laser Transmission optical system, gas handling system comprises choke block 1-1 and following choke block 1-2, the bottom surface of last choke block 1-1 is provided with the first air inlet 2-1, be densely covered with a plurality of first on the end face of last choke block 1-1 towards scavenging port 2-2, the first air inlet 2-1 is communicated with towards scavenging port 2-2 with first, the bottom surface of following choke block 1-2 is provided with the second air inlet 3-1, be densely covered with a plurality of second on the end face of following choke block 1-2 towards scavenging port 3-2, the second air inlet 3-1 is communicated with towards scavenging port 3-2 with second, last choke block 1-1 and following choke block 1-2 going up or down stairway formula are arranged, following choke block 1-2 be arranged on lens combination 1-3 under, the 1-4 of hood system comprises hood 4-1 and exhaust outlet 4-2, exhaust outlet 4-2 is arranged on the end face of hood 4-1, the 1-4 of hood system is arranged on optical system 1-5 upper end, last choke block 1-1 is arranged in the optical system 1-5, and be positioned at the side of lens combination 1-3, following choke block 1-2 is arranged on optical system 1-5 lower end.
The specific embodiment two: in conjunction with Fig. 2 present embodiment is described, the first air inlet 2-1 of present embodiment, first is 2mm towards scavenging port 2-2, the second air inlet 3-1, second diameter towards scavenging port 3-2.So arrange, effective towards sweeping.Other composition is identical with the specific embodiment one with annexation
The specific embodiment three: in conjunction with Fig. 4 present embodiment is described, the diameter of the exhaust outlet 4-2 of present embodiment is 1mm to 2mm.So arrange, effective towards sweeping.Other composition is identical with the specific embodiment one or two with annexation.
The specific embodiment four: present embodiment is described in conjunction with Fig. 1, present embodiment a kind of keeps the method for sweeping of dashing of cleanliness factor in the Laser Transmission optical system, concrete steps are: clean gas enters optical system inside by last choke block 1-1 and following choke block 1-2 according to specific charge flow rate, gas during through lens combination 1-3 to lens surface and near the space realize dashing and sweep effect, make pollutant with discharging optical system inside towards the scavenging body through the 1-4 of hood system.
The specific embodiment five: the cleanliness factor of the clean gas of present embodiment is hundred grades.
The specific embodiment six: the charge flow rate of present embodiment is 200L/min.
Claims (6)
1. sweeping device that dashes that keeps cleanliness factor in the Laser Transmission optical system, it is characterized in that: keep the sweeping device that dashes of cleanliness factor in the Laser Transmission optical system to comprise gas handling system and hood system (1-4), gas handling system comprises choke block (1-1) and following choke block (1-2), the bottom surface of last choke block (1-1) is provided with first air inlet (2-1), be densely covered with a plurality of first on the end face of last choke block (1-1) towards scavenging port (2-2), first air inlet (2-1) is communicated with towards scavenging port (2-2) with first, the bottom surface of following choke block (1-2) is provided with second air inlet (3-1), be densely covered with a plurality of second on the end face of following choke block (1-2) towards scavenging port (3-2), second air inlet (3-1) is communicated with towards scavenging port (3-2) with second, last choke block (1-1) and following choke block (1-2) going up or down stairway formula are arranged, following choke block (1-2) be arranged on lens combination (1-3) under, hood system (1-4) comprises hood (4-1) and exhaust outlet (4-2), exhaust outlet (4-2) is arranged on the end face of hood (4-1), hood system (1-4) is arranged on optical system (1-5) upper end, last choke block (1-1) is arranged in the optical system (1-5), and be positioned at a side of lens combination (1-3), following choke block (1-2) is arranged on optical system (1-5) lower end.
2. according to the described a kind of sweeping device that dashes that keeps cleanliness factor in the Laser Transmission optical system of claim 1, it is characterized in that: first air inlet (2-1), first is 2mm towards scavenging port (2-2), second air inlet (3-1), second diameter towards scavenging port (3-2).
3. according to claim 1 or 2 described a kind of sweeping devices that dash that keep cleanliness factor in the Laser Transmission optical system, it is characterized in that: the diameter of exhaust outlet (4-2) is 1mm to 2mm.
4. method of sweeping of dashing that keeps cleanliness factor in the Laser Transmission optical system, it is characterized in that: keep the concrete steps of dashing the method for sweeping of cleanliness factor in the Laser Transmission optical system to be: clean gas enters optical system inside by last choke block (1-1) and following choke block (1-2) according to specific charge flow rate, gas through lens combination when (1-3) to lens surface and near the space realize dashing and sweep effect, make pollutant with discharging optical system inside towards the scavenging body through hood system (1-4).
5. according to the described a kind of method of sweeping of dashing that keeps cleanliness factor in the Laser Transmission optical system of claim 4, it is characterized in that: the cleanliness factor of clean gas is hundred grades.
6. according to the described a kind of method of sweeping of dashing that keeps cleanliness factor in the Laser Transmission optical system of claim 5, it is characterized in that: charge flow rate is 200L/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310156290.4A CN103230901B (en) | 2013-04-28 | 2013-04-28 | Purging device and method for keeping cleanliness of laser transmission optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310156290.4A CN103230901B (en) | 2013-04-28 | 2013-04-28 | Purging device and method for keeping cleanliness of laser transmission optical system |
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| CN103230901A true CN103230901A (en) | 2013-08-07 |
| CN103230901B CN103230901B (en) | 2015-02-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310156290.4A Active CN103230901B (en) | 2013-04-28 | 2013-04-28 | Purging device and method for keeping cleanliness of laser transmission optical system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104084409A (en) * | 2014-06-27 | 2014-10-08 | 马鞍山纽泽科技服务有限公司 | Gas and water elimination device for gearbox casing |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| US20070125964A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Netherlands B.V. | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
-
2013
- 2013-04-28 CN CN201310156290.4A patent/CN103230901B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| US20070125964A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Netherlands B.V. | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104084409A (en) * | 2014-06-27 | 2014-10-08 | 马鞍山纽泽科技服务有限公司 | Gas and water elimination device for gearbox casing |
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| CN103230901B (en) | 2015-02-04 |
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| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Lu Lihua Inventor after: Cao Yongzhi Inventor after: Yu Fuli Inventor after: Zhang Qingchun Inventor after: Liang Yingchun Inventor before: Liang Yingchun Inventor before: Cao Yongzhi Inventor before: Lu Lihua Inventor before: Yu Fuli Inventor before: Zhang Qingchun |
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Free format text: CORRECT: INVENTOR; FROM: LIANG YINGCHUN CAO YONGZHI LU LIHUA YU FULI ZHANG QINGCHUN TO: LU LIHUA CAO YONGZHI YU FULI ZHANG QINGCHUN LIANG YINGCHUN |
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