CN103230900B - Sweeping device for keeping surface of large-diameter optical element to be clean - Google Patents
Sweeping device for keeping surface of large-diameter optical element to be clean Download PDFInfo
- Publication number
- CN103230900B CN103230900B CN201310155856.1A CN201310155856A CN103230900B CN 103230900 B CN103230900 B CN 103230900B CN 201310155856 A CN201310155856 A CN 201310155856A CN 103230900 B CN103230900 B CN 103230900B
- Authority
- CN
- China
- Prior art keywords
- optical element
- stainless steel
- air knife
- keeping
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention provides a sweeping device for keeping the surface of a large-diameter optical element to be clean and relates to a cleanliness keeping device and method in the technical field of physical optics. The problem that an appropriate device for keeping the cleanliness of the laser transmission optical element does not exist at preset due to the fact laser passing through the optical element produces aerosol which pollutes the surface of the optical element and accordingly the surface of the optical element is required to be further cleaned. The sweeping device for keeping the surface of the large-diameter optical element to be clean comprises an air inlet end air delivery conduit, a stainless steel air knife and an air outlet end assembly, wherein the stainless steel air knife and the air outlet end assembly are correspondingly installed on an optical element casing, the installing positions of the stainless steel air knife and the air outlet end assembly correspond to the large-diameter optical element in the optical element casing, and the air inlet end air delivery conduit is connected at the air inlet position of the stainless steel air knife. The sweeping device is used for keeping the cleanliness of the laser transmission optical element.
Description
Technical field
The present invention relates to a kind of cleanliness factor holding device of physical optics technical field, specifically relate to and a kind ofly rush sweeping device for what keep optical elements of large caliber clean surface.
Background technology
Many various bigbore optical elements with difference in functionality are installed in the inside of laser delivery optical assembly, in the process of laser by optical elements of large caliber, the molecule on the surface of these optical elements pollutes and Organic Pollution all can produce tremendous influence to the transmission of laser.Sweep effectively can improve cleanliness factor by carrying out punching to optical module inner chamber, but because laser is by producing aerosol during optical element, pollute optical element surface, therefore optical element surface needs further cleaning.Also there is no suitable device to realize the cleanliness factor keeping laser delivery optical element at present.In sum, need a kind of new device of development badly and clear up optical elements of large caliber surface in time, the cleanliness factor of optical element is further enhanced.
Summary of the invention
The object of the invention is to solve laser by can aerosol be produced during optical element, pollute optical element surface, optical element surface needs further cleaning, at present also there is no suitable device to realize the cleanliness factor problem keeping laser delivery optical element, and then provide a kind of and rush sweeping device for what keep optical elements of large caliber clean surface.
Technical scheme of the present invention is: a kind of for keeping the sweeping device that rushes of optical elements of large caliber clean surface to comprise inlet end gas delivery conduit, stainless steel air knife, outlet side assembly; Stainless steel air knife is corresponding with outlet side assembly to be arranged on optical module housing, stainless steel air knife is corresponding with the large-aperture optical assembly in optical module housing with the installation site of outlet side assembly, and inlet end gas delivery conduit is connected to the air inlet place of stainless steel air knife.
The present invention compared with prior art has following effect: the compressed air that high-pressure pump exports enters stainless steel air knife air inlet by inlet end gas delivery conduit, then gas enters the high pressure chest of stainless steel air knife, spray along nozzle, because Koln reaches effect, high velocity air deflects 90 ° in air knife corner with contoured surface, and drive surrounding air to move, realize sweeping the local high-speed punching of optical elements of large caliber, its surface contamination is cleared up in time, high velocity air makes optical element near zone form local high-cleanness, high air-flow environment simultaneously, isolating exterior pollutes.The sweeping device that rushes of the present invention can reach the effect keeping optical elements of large caliber high-cleanness, high, and its structure is simple in addition, flexible and convenient to use.
Accompanying drawing explanation
Fig. 1 is of the present invention for keeping the overall construction drawing rushing sweeping device of optical elements of large caliber clean surface;
Fig. 2 is the location diagram of inlet end gas delivery conduit, stainless steel air knife, outlet side assembly and large-aperture optical assembly;
Fig. 3 is the sectional view (arrow represents airflow direction) of stainless steel air knife.
Detailed description of the invention
Detailed description of the invention one: composition graphs 1 to Fig. 3 illustrates present embodiment, present embodiment a kind of for keeping the sweeping device that rushes of optical elements of large caliber clean surface to comprise inlet end gas delivery conduit 1, stainless steel air knife 2, outlet side assembly 3; Stainless steel air knife 2 and outlet side assembly 3 is corresponding is arranged on optical module housing 4, the installation site of stainless steel air knife 2 and outlet side assembly 3 is corresponding with the large-aperture optical assembly 5 in optical module housing 4, and inlet end gas delivery conduit 1 is connected to the air inlet 2-1 place of stainless steel air knife 2.
The compressed air that high-pressure pump exports enters stainless steel air knife air inlet 2-1 by inlet end gas delivery conduit 1, then gas enters the high pressure chest 2-2 of stainless steel air knife 2, spray along nozzle 2-3, because Koln reaches effect, high velocity air deflects 90 ° at air knife corner 2-4 place with contoured surface, and drive surrounding air to move, realize sweeping the local high-speed punching of optical elements of large caliber.Rushing sweeping device air inlet cleanliness factor is hundred grades, and optical elements of large caliber surface cleanliness can reach hundred grades.
Claims (1)
1. rushing a sweeping device for what keep optical elements of large caliber clean surface, it is characterized in that: comprise inlet end gas delivery conduit (1), stainless steel air knife (2), outlet side assembly (3) for keeping the sweeping device that rushes of optical elements of large caliber clean surface, stainless steel air knife (2) and outlet side assembly (3) is corresponding is arranged on optical module housing (4), the installation site of stainless steel air knife (2) and outlet side assembly (3) is corresponding with the large-aperture optical assembly (5) in optical module housing (4), inlet end gas delivery conduit (1) is connected to air inlet (2-1) place of stainless steel air knife (2), gas in inlet end gas delivery conduit (1) enters the high pressure chest (2-2) of stainless steel air knife (2) and sprays along nozzle (2-3), high velocity air deflects 90 ° at air knife corner (2-4) place with its contoured surface and drives surrounding air to move.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310155856.1A CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310155856.1A CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103230900A CN103230900A (en) | 2013-08-07 |
| CN103230900B true CN103230900B (en) | 2015-03-04 |
Family
ID=48879008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310155856.1A Active CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103230900B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| CN101073801A (en) * | 2006-05-19 | 2007-11-21 | 鸿富锦精密工业（深圳）有限公司 | Blowing dust collector |
| CN101356476A (en) * | 2005-12-02 | 2009-01-28 | Asml荷兰有限公司 | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN101889301A (en) * | 2007-12-11 | 2010-11-17 | 日东电工株式会社 | Method for manufacturing optical display device and system for manufacturing optical display device |
| CN201961954U (en) * | 2010-12-02 | 2011-09-07 | 泰山玻璃纤维有限公司 | Automatic dust cleaning device for lifter |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
-
2013
- 2013-04-28 CN CN201310155856.1A patent/CN103230900B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| CN101356476A (en) * | 2005-12-02 | 2009-01-28 | Asml荷兰有限公司 | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN101073801A (en) * | 2006-05-19 | 2007-11-21 | 鸿富锦精密工业（深圳）有限公司 | Blowing dust collector |
| CN101889301A (en) * | 2007-12-11 | 2010-11-17 | 日东电工株式会社 | Method for manufacturing optical display device and system for manufacturing optical display device |
| CN201961954U (en) * | 2010-12-02 | 2011-09-07 | 泰山玻璃纤维有限公司 | Automatic dust cleaning device for lifter |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103230900A (en) | 2013-08-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104645727A (en) | Clean laminar flow cover | |
| CN103230900B (en) | Sweeping device for keeping surface of large-diameter optical element to be clean | |
| CN104588379A (en) | Injection nozzle device for cleaning oxide scales of inner surface of steel pipe | |
| CN107321719B (en) | The working method of dustless equipment cleaning apparatus | |
| CN103357626B (en) | Pipeline cleaning device | |
| CN201752863U (en) | Inner wall sand-blasting cleaning device of slender blind hole pipe fitting | |
| WO2007076204A3 (en) | Dust mitigation and surface cleaning system | |
| CN103567201A (en) | Rotating high pressure spraying type engine box washing device | |
| CN204200612U (en) | Integral type axial flow dedusting fan | |
| CN105750269A (en) | Cleaning equipment special for glove box | |
| CN104353650A (en) | Cleaning device for pipelines | |
| CN203811030U (en) | Air cooler with ash removing function | |
| CN210172159U (en) | Following type welding fume purifier and lifting air suction pipeline assembly thereof | |
| CN203764571U (en) | Platform sweeping machine | |
| CN203526122U (en) | Roller set cleaning device | |
| CN201988588U (en) | Cleaning machine of wire stock | |
| CN203282347U (en) | Light air-water damage-prevention sand blasting environment-friendly cleaning machine | |
| RU2011148993A (en) | DUST CATCHER | |
| CN204294580U (en) | Pipeline of range hood cleaning device | |
| CN205361782U (en) | Steel pipe spraying device | |
| CN202212372U (en) | Pneumatic spray cleaning device | |
| CN109013546B (en) | Remove convenient vacuum cleaning stove | |
| CN204309119U (en) | A kind of anticracking grout dust arrester | |
| WO2019004976A3 (en) | Portable solar panel cleaning system | |
| CN202074538U (en) | Deashing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Cao Yongzhi Inventor after: Lu Lihua Inventor after: Yu Fuli Inventor after: Zhang Qingchun Inventor after: Liang Yingchun Inventor before: Liang Yingchun Inventor before: Cao Yongzhi Inventor before: Lu Lihua Inventor before: Yu Fuli Inventor before: Zhang Qingchun |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: LIANG YINGCHUN CAO YONGZHI LU LIHUA YU FULI ZHANG QINGCHUN TO: CAO YONGZHILU LIHUA YU FULI ZHANG QINGCHUN LIANG YINGCHUN |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |