CN103230900A - Sweeping device for keeping surface of large-diameter optical element to be clean - Google Patents
Sweeping device for keeping surface of large-diameter optical element to be clean Download PDFInfo
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- CN103230900A CN103230900A CN2013101558561A CN201310155856A CN103230900A CN 103230900 A CN103230900 A CN 103230900A CN 2013101558561 A CN2013101558561 A CN 2013101558561A CN 201310155856 A CN201310155856 A CN 201310155856A CN 103230900 A CN103230900 A CN 103230900A
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- optical element
- stainless steel
- keeping
- air knife
- sweeping device
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Abstract
The invention provides a sweeping device for keeping the surface of a large-diameter optical element to be clean and relates to a cleanliness keeping device and method in the technical field of physical optics. The problem that an appropriate device for keeping the cleanliness of the laser transmission optical element does not exist at preset due to the fact laser passing through the optical element produces aerosol which pollutes the surface of the optical element and accordingly the surface of the optical element is required to be further cleaned. The sweeping device for keeping the surface of the large-diameter optical element to be clean comprises an air inlet end air delivery conduit, a stainless steel air knife and an air outlet end assembly, wherein the stainless steel air knife and the air outlet end assembly are correspondingly installed on an optical element casing, the installing positions of the stainless steel air knife and the air outlet end assembly correspond to the large-diameter optical element in the optical element casing, and the air inlet end air delivery conduit is connected at the air inlet position of the stainless steel air knife. The sweeping device is used for keeping the cleanliness of the laser transmission optical element.
Description
Technical field
The present invention relates to a kind of cleanliness factor holding device of physical optics technical field, specifically relate to a kind of for the sweeping device that dashes that keeps the optical elements of large caliber surface cleaning.
Background technology
Many various bigbore optical elements with difference in functionality are installed in the inside of Laser Transmission optical module,, pollute and the organic matter pollution all can produce tremendous influence to the transmission of laser at the lip-deep molecule of these optical elements by in the process of optical elements of large caliber at laser.Can effectively improve cleanliness factor by the optical module inner chamber being dashed sweep, but because laser can produce aerosol during by optical element, pollute optical element surface, so optical element surface needs further cleaning.At present also there is not suitable device to realize keeping the cleanliness factor of Laser Transmission optical element.In sum, need a kind of new device of development badly and in time clear up the optical elements of large caliber surface, the cleanliness factor of optical element is further enhanced.
Summary of the invention
The objective of the invention is to produce aerosol when solving laser by optical element, pollute optical element surface, optical element surface needs further cleaning, at present also do not have suitable device to realize keeping the cleanliness factor problem of Laser Transmission optical element, and then provide a kind of for the sweeping device that dashes that keeps the optical elements of large caliber surface cleaning.
Technical scheme of the present invention is: a kind of sweeping device that dashes for maintenance optical elements of large caliber surface cleaning comprises inlet end gas delivery conduit, stainless steel air knife, outlet side assembly; The stainless steel air knife is corresponding with the outlet side assembly to be installed on the optical module housing, the installation site of stainless steel air knife and outlet side assembly is corresponding with the large-aperture optical assembly in the optical module housing, and the inlet end gas delivery conduit is connected the air inlet place of stainless steel air knife.
The present invention compared with prior art has following effect: the compressed air of high-pressure pump output enters stainless steel air knife air inlet by the inlet end gas delivery conduit, gas enters the high pressure chest of stainless steel air knife then, spray along nozzle, because Koln reaches effect, high velocity air in the air knife corner with 90 ° of contoured surface deflections, and driving surrounding air moves, realization is swept local the dashing at a high speed of optical elements of large caliber, make its surface contamination in time obtain cleaning, high velocity air makes the optical element near zone form local high-cleanness, high air-flow environment simultaneously, and isolating exterior pollutes.Of the present inventionly can reach the effect that keeps the optical elements of large caliber high-cleanness, high towards sweeping device, it is simple in structure in addition, and is flexible and convenient to use.
Description of drawings
Fig. 1 is of the present invention for the overall construction drawing that dashes sweeping device that keeps the optical elements of large caliber surface cleaning;
Fig. 2 is the location diagram of inlet end gas delivery conduit, stainless steel air knife, outlet side assembly and large-aperture optical assembly;
Fig. 3 is the sectional view (arrow is represented airflow direction) of stainless steel air knife.
The specific embodiment
The specific embodiment one: in conjunction with Fig. 1 to Fig. 3 present embodiment is described, a kind of of present embodiment comprises inlet end gas delivery conduit 1, stainless steel air knife 2, outlet side assembly 3 for the sweeping device that dashes that keeps the optical elements of large caliber surface cleaning; Stainless steel air knife 2 and outlet side assembly 3 corresponding being installed on the optical module housing 4, the installation site of stainless steel air knife 2 and outlet side assembly 3 is corresponding with the large-aperture optical assembly 5 in the optical module housing 4, and inlet end gas delivery conduit 1 is connected the air inlet 2-1 place of stainless steel air knife 2.
The compressed air of high-pressure pump output enters stainless steel air knife air inlet 2-1 by inlet end gas delivery conduit 1, gas enters the high pressure chest 2-2 of stainless steel air knife 2 then, spray along nozzle 2-3, because Koln reaches effect, high velocity air at air knife corner 2-4 place with 90 ° of contoured surface deflections, and drive surrounding air and move, realize local the dashing at a high speed of optical elements of large caliber swept.Be hundred grades towards sweeping device air inlet cleanliness factor, the optical elements of large caliber surface cleanliness can reach hundred grades.
Claims (1)
1. the sweeping device that dashes that is used for keeping the optical elements of large caliber surface cleaning is characterized in that: be used for keeping the sweeping device that dashes of optical elements of large caliber surface cleaning to comprise inlet end gas delivery conduit (1), stainless steel air knife (2), outlet side assembly (3); Stainless steel air knife (2) is corresponding with outlet side assembly (3) to be installed on the optical module housing (4), the installation site of stainless steel air knife (2) and outlet side assembly (3) is corresponding with the large-aperture optical assembly (5) in the optical module housing (4), and inlet end gas delivery conduit (1) is connected the air inlet (2-1) of stainless steel air knife (2) and locates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310155856.1A CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310155856.1A CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103230900A true CN103230900A (en) | 2013-08-07 |
| CN103230900B CN103230900B (en) | 2015-03-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310155856.1A Active CN103230900B (en) | 2013-04-28 | 2013-04-28 | Sweeping device for keeping surface of large-diameter optical element to be clean |
Country Status (1)
| Country | Link |
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| CN (1) | CN103230900B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| US20070125964A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Netherlands B.V. | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| CN101073801A (en) * | 2006-05-19 | 2007-11-21 | 鸿富锦精密工业（深圳）有限公司 | Blowing dust collector |
| CN101889301A (en) * | 2007-12-11 | 2010-11-17 | 日东电工株式会社 | Method for manufacturing optical display device and system for manufacturing optical display device |
| CN201961954U (en) * | 2010-12-02 | 2011-09-07 | 泰山玻璃纤维有限公司 | Automatic dust cleaning device for lifter |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
-
2013
- 2013-04-28 CN CN201310155856.1A patent/CN103230900B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
| CN1989458A (en) * | 2004-07-22 | 2007-06-27 | 皇家飞利浦电子股份有限公司 | Optical system having a cleaning arrangement |
| US20070125964A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Netherlands B.V. | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN101356476A (en) * | 2005-12-02 | 2009-01-28 | Asml荷兰有限公司 | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| CN101073801A (en) * | 2006-05-19 | 2007-11-21 | 鸿富锦精密工业（深圳）有限公司 | Blowing dust collector |
| CN101889301A (en) * | 2007-12-11 | 2010-11-17 | 日东电工株式会社 | Method for manufacturing optical display device and system for manufacturing optical display device |
| CN201961954U (en) * | 2010-12-02 | 2011-09-07 | 泰山玻璃纤维有限公司 | Automatic dust cleaning device for lifter |
| CN102991251A (en) * | 2011-09-09 | 2013-03-27 | 昆山运城压纹制版有限公司 | Laser generator for laser engraving machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103230900B (en) | 2015-03-04 |
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| C06 | Publication | ||
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| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Cao Yongzhi Inventor after: Lu Lihua Inventor after: Yu Fuli Inventor after: Zhang Qingchun Inventor after: Liang Yingchun Inventor before: Liang Yingchun Inventor before: Cao Yongzhi Inventor before: Lu Lihua Inventor before: Yu Fuli Inventor before: Zhang Qingchun |
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| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: LIANG YINGCHUN CAO YONGZHI LU LIHUA YU FULI ZHANG QINGCHUN TO: CAO YONGZHILU LIHUA YU FULI ZHANG QINGCHUN LIANG YINGCHUN |
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| C14 | Grant of patent or utility model | ||
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