CN103091906B - A kind of mask plate - Google Patents
A kind of mask plate Download PDFInfo
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- CN103091906B CN103091906B CN201310037537.0A CN201310037537A CN103091906B CN 103091906 B CN103091906 B CN 103091906B CN 201310037537 A CN201310037537 A CN 201310037537A CN 103091906 B CN103091906 B CN 103091906B
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Abstract
The invention provides a kind of mask plate, relate to Display Technique field, solve the problem that in available liquid crystal instillation technique, the substrate of different size and model needs to make a mask plate respectively.A kind of mask plate, including: drive circuit, transparency carrier and the first conductive layer being arranged on described transparency carrier, the second conductive layer and be arranged on the electrochromic layer between two conductive layers；Wherein, described electrochromic layer includes: one or more electrochromic cells；Described first conductive layer includes: two or more the first electrode unit；Described second conductive layer includes: one or more second electrode unit；Described first electrode unit and described second electrode unit electrically connect with described drive circuit respectively, and corresponding described first electrode unit and described second electrode unit can drive the variable color as required of described electrochromic cells.The present invention is applicable to design and the manufacture of mask plate.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of mask plate.
Background technology
Liquid crystal display includes that liquid crystal panel, liquid crystal panel include the array base palte to box molding and color membrane substrates, and
The liquid crystal being filled between array base palte and color membrane substrates.Liquid crystal panel important process in manufacturing process is exactly ODF (One
Drop Fill, liquid crystal drip-injection), will be filled between array base palte and color membrane substrates to form liquid crystal panel by liquid crystal.It is concrete
Step is a few dropping liquid crystalline substance that first instils on array base palte or color membrane substrates, is coated with sealed plastic box, forms a space surrounded and prevents
The liquid crystal only instiled arbitrarily flows, then by array base palte and color membrane substrates to box, utilizes UV (Ultraviolet Rays, ultraviolet
Light) sealed plastic box is irradiated solidification, make array base palte and color membrane substrates be bonded together.
But owing to UV light has destruction to materials such as liquid crystal, therefore utilizing ultraviolet light that sealed plastic box is shone
Needing a mask plate when penetrating solidification, described mask plate is corresponding with the panel of coating sealed plastic box, in the region of corresponding sealed plastic box
Ultraviolet transmissive light, the region that need not ultraviolet light irradiation in addition to sealed plastic box is light tight.So in prior art, for not
It is required for manufacturing a mask plate before carrying out ODF technique with the liquid crystal panel of size, to ensure this mask plate and coating envelope frame
The substrate of glue is corresponding.
Summary of the invention
Embodiments of the invention provide a kind of mask plate, and described mask plate can be applicable in liquid crystal drip-injection technique, it is adaptable to
Various sizes of liquid crystal panel.
For reaching above-mentioned purpose, embodiments of the invention adopt the following technical scheme that
Embodiments provide a kind of mask plate, including: drive circuit, transparency carrier and be arranged on described transparent
The first conductive layer, the second conductive layer on substrate and be arranged on the electrochromic layer between two conductive layers；Wherein,
Described electrochromic layer includes: one or more electrochromic cells；
Described first conductive layer includes: two or more the first electrode unit；
Described second conductive layer includes: one or more second electrode unit；
Described first electrode unit and described second electrode unit electrically connect with described drive circuit respectively, and corresponding is described
First electrode unit and described second electrode unit can drive the variable color as required of described electrochromic cells.
Optionally, described second conductive layer includes: the second electrode unit of one or more electrical connection, described driving
Circuit includes: the first drive circuit and the second drive circuit, and described second drive circuit electrically connects with described second conductive layer, to
Described second conductive layer provides common electric voltage；
Described first drive circuit includes:
The multi-strip scanning holding wire being arranged on described transparency carrier；
The a plurality of data signal line being arranged on described transparency carrier and intersect with described scan signal line；
With described first electrode unit thin film transistor (TFT) one to one, including grid, source electrode and drain electrode, wherein, described
The grid of thin film transistor (TFT) and described scan signal line are electrically connected, source electrode is electrically connected with described data signal line, drains with described
First electrode unit is electrically connected；
The scan drive circuit being connected with described scan signal line；
The data drive circuit being connected with described data signal line.
Optionally, described electrochromic layer includes: an electrochromic cells；
Described second conductive layer includes: second electrode unit；One electrochromic cells of described electrochromic layer
Two or more first electrode unit of corresponding described first conductive layer, and a second electrode list of corresponding described second conductive layer
Unit；Or,
Described second conductive layer includes: two or more the second electrode unit, more than said two the second electrode unit is electrically connected
Connect；Two or more first electrode unit of corresponding described first conductive layer of one electrochromic cells of described electrochromic layer,
And two or more second electrode unit of described second conductive layer of correspondence, each first electrode unit of described first conductive layer and institute
Each second electrode unit stating the second conductive layer is the most right.
Optionally, described electrochromic layer includes: two or more electrochromic cells；
Described second conductive layer includes: second electrode unit；Each electrochromic cells of described electrochromic layer with
Each first electrode unit of described first conductive layer is the most right, and second electrode unit of corresponding described second conductive layer；Institute
State mask plate also to include: the first passivation layer between described second conductive layer and described first conductive layer, and described first
Passivation layer each electrochromic cells just to position be formed with via；Or,
Described second conductive layer includes: two or more the second electrode unit, more than said two the second electrode unit is electrically connected
Connect；Each electrochromic cells of described electrochromic layer is the most right with each first electrode unit of described first conductive layer, and with institute
Each second electrode unit stating the second conductive layer is the most right.
Optionally, the grid of described thin film transistor (TFT) is the part on described scan signal line line, or sweeps described in being
Retouch the part that holding wire protrudes from line；The source electrode of described thin film transistor (TFT) is the part on described data signal line line, or
Person protrudes from the part on line for described data signal line.
Optionally, in the case of described second conductive layer includes two or more the second electrode unit, described first conduction
Two or more the first electrode unit shape of layer is in a row, and two or more second electrode unit of described second conductive layer forms one
Row, described first electrode unit intersects with described second electrode unit；
Described drive circuit includes: the 3rd drive circuit and the 4th drive circuit, described 3rd drive circuit and described
Four drive circuits are connected with the first electrode unit and the second electrode unit respectively, to described first electrode unit and the second electrode list
Unit provides and drives scanning voltage and driving data voltage.
Optionally, described 3rd drive circuit is connected with described first electrode unit, provides to described first electrode unit
Drive scanning voltage；Described 4th drive circuit is connected with described second electrode unit, provides to described second electrode unit and drives
Dynamic data voltage.
Optionally, described electrochromic layer includes two or more electrochromic cells, and described mask plate also includes: be arranged on
The second passivation layer between first conductive layer and the second conductive layer, and described second passivation layer each electrochromic cells just to
Position is formed with via.
Optionally, described first electrode unit is vertical with described second electrode unit.
Optionally, described electrochromic cells is dark-state in normal state, is transparent under alive state.
A kind of mask plate that the embodiment of the present invention provides, described mask plate makes electrochromic cells just by drive circuit
To the first electrode unit and the second electrode unit apply voltage simultaneously, drive described electrochromic cells variable color, formed and need
Mask cell, make corresponding with substrate to be exposed, be applicable to the substrate of different size and structure.
Accompanying drawing explanation
One the second electrode unit schematic diagram that Fig. 1 provides for the embodiment of the present invention；
One the second electrode unit electrical connection schematic diagram that Fig. 2 provides for the embodiment of the present invention；
Another kind the second electrode unit electrical connection schematic diagram that Fig. 3 provides for the embodiment of the present invention；
The plan structure schematic diagram of a kind of mask plate that Fig. 4 provides for the embodiment of the present invention；
Fig. 5 is the close-up schematic view of mask plate shown in Fig. 4；
Fig. 6 is the sectional structure schematic diagram of mask plate A-A ' direction shown in Fig. 5；
Fig. 7 is the sectional structure schematic diagram of mask plate B-B ' direction shown in Fig. 5；
Fig. 8 is the B-B ' direction sectional structure schematic diagram of another kind of mask plate；
The plan structure schematic diagram of the another kind of mask plate that Fig. 9 provides for the embodiment of the present invention；
Figure 10 is the close-up schematic view of mask plate shown in Fig. 9；
Reference:
1-transparency carrier；2-scan signal line；3-gate insulation layer；4-active layer；5-data signal line；6-drains；7-
One passivation layer；8-the first electrode unit；9-electrochromic layer；10-the second electrode unit；11-the 4th passivation layer；12-the 4th leads
Electric layer；21-scan drive circuit；22-data drive circuit；31-the 3rd drive circuit；32-the 4th drive circuit；91-ion
Accumulation layer；92-dielectric substrate；93-discoloration material layer；100-mask plate.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.
Embodiments provide a kind of mask plate, including: drive circuit, transparency carrier and be arranged on described transparent
The first conductive layer, the second conductive layer on substrate and be arranged on the electrochromic layer between two conductive layers；Wherein, described electroluminescent
Photochromic layer includes: one or more electrochromic cells；Described first conductive layer includes: two or more the first electrode list
Unit；Described second conductive layer includes: one or more second electrode unit；
Described first electrode unit and described second electrode unit electrically connect with described drive circuit respectively, and corresponding is described
First electrode unit and described second electrode unit can drive the variable color as required of electrochromic cells between the two.
Wherein, in the present invention, " layer " refers to utilize a certain material to utilize deposition or other techniques to produce on substrate
Thin film." unit " in the embodiment of the present invention includes different shapes, such as, can be square as shown in Figure 1, also
It can be elongated rectangular shape as shown in Figure 10.Certainly, the shape of described unit is also not limited to this, such as the unit in Fig. 1 is also
Can be that other are irregularly shaped.Concrete, as a example by the second electrode unit, described second conductive layer includes two or more second
Electrode unit, as it is shown in figure 1, include multiple the second electrode unit 10 being arranged in matrix, and the second electrode unit 10 liang
It is not in contact with each other between two.Certainly, as shown in Figure 2 and Figure 3, multiple second electrode units 10 can be by other parts in this layer
Link together, such as, can be to be connected by metal contact wires etc..Or, described second conductive layer can only include one
Two electrode units, one the second electrode unit forms described second conductive layer, and one the second electrode unit covers
All regions of two or more the second electrode unit, in other words, the second conductive layer can be a monoblock electrode.Same, work as institute
State electrochromic layer and include that two or more electrochromic cells, the shape of the most described electrochromic cells can be as shown in Figure 1
The shape of the second electrode unit 10.When described electrochromic layer includes an electrochromic cells, the then electroluminescent change of one
Color element forms described electrochromic layer, and one electrochromic cells covers all of two or more electrochromic cells
Region, in other words, electrochromic layer can be continuous print one flood.In the embodiment of the present invention, accompanying drawing is all with described electrochromic layer
It is described in detail including as a example by two or more electrochromic cells.
The operation principle of mask plate that the embodiment of the present invention provides is: drive circuit optionally to the first electrode unit and
Second electrode unit applies voltage, just the first electrode unit and the second electrode unit is executed alive electrochromism region simultaneously
Having electric current to pass through, electrochromism region is injected or extraction electric charge receiving and losing electrons, and the color of electrochromic material changes.Therefore
Described drive circuit can be passed through, as required the first conductive unit or the second conductive unit are optionally applied voltage, make
The first electrode unit and the second electrode unit are just executed alive field color simultaneously and are changed by electrochromic layer, covering
The mask pattern of needs is formed, to be applicable to various sizes of substrate is carried out mask exposure on lamina membranacea.
Wherein, as shown in Figure 7, Figure 8, electrochromic layer 9 can also include: ion storage 91, dielectric substrate 92 and
Discoloration material layer 93.Described dielectric substrate 92 can be to be formed by solid electrolyte material, for being formed under the effect of electric current
Negative ions；Described ion storage 91 plays the corresponding counter ion of storage when electrochromic material injects or extracts electric charge,
Keep the effect of whole system charge balance；Ion storage can also be one and above one layer of electrochromic material discolouration
The material that energy is contrary, so can play the effect of color addition or complementation.Or, form the electroluminescent change of described electrochromic layer
Color material includes: negative electrode off-color material and anode off-color material, negative electrode off-color material and anode off-color material can at voltage or
Under the function of current, electrolysis provides negative ions, and described negative electrode off-color material and anode off-color material generation combination reaction are formed described
The material of electrochromic layer.Setting for electrochromic layer and material can refer to prior art, as long as realizing at voltage or electricity
Under stream effect, the color of electrochromic layer can change, and the present invention focuses on the design of mask plate, the setting of electrochromic layer and
Material is not especially limited.The embodiment of the present invention includes with electrochromic layer: discoloration material layer, ion storage and electrolysis
It is described in detail as a example by matter layer.The material difference electrochromic material being additionally formed described electrochromic layer is injecting or extraction
Color after electric charge is different.The electrochromic material of mask plate that the embodiment of the present invention provides under the effect of curtage,
Electrochromic material inject or extraction electric charge after color printing opacity and light tight between change.Can be such as polyaniline, at electricity
Black or transparent is become under the effect of stream or voltage.
It addition, electrochromic layer is between described first conductive layer and the second conductive layer, the most described first conductive layer can
To be positioned at below described electrochromic layer, the most described second conductive layer is positioned at above described electrochromic layer；Or, institute
Stating the first conductive layer and may be located at above described electrochromic layer, the most described second conductive layer is positioned at described electrochromic layer
Below.Wherein, the first conductive layer and the second conductive layer can be tin indium oxide, tin ash etc., and the embodiment of the present invention is with
One conductive layer and the second conductive layer are to illustrate as a example by tin indium oxide.In the embodiment of the present invention " on ", D score with manufacture cover
Sequencing during lamina membranacea is as the criterion.Such as, refer to relatively at the conductive layer of rear formation at upper conductive layer, under conductive layer be
Refer to the conductive layer being relatively previously formed.
A kind of mask plate that the present invention provides, can be as desired by drive circuit optionally to the first electrode unit
Voltage is applied so that electrochromic layer is just to the first electrode unit and the simultaneously powered up pressure of the second electrode unit with the second electrode unit
Region variable color, mask plate is formed the mask pattern of needs, makes corresponding with substrate to be exposed, it is adaptable to different size and
The substrate of structure.
The mask plate that the embodiment of the present invention provides can be used for liquid crystal drip-injection technique, is used for solidifying sealed plastic box.Due to different chis
The sealed plastic box of very little display floater is rectangle, then be applicable to the mask plate for various sizes of display floater, corresponding instillation
The region of liquid crystal is lightproof part, therefore, it can be set to light tight by the mid portion on mask plate, only need to be at mask
The marginal position in the light tight region of plate arranges electrochromic layer and the first electrode layer and the second electrode lay, by the first electrode layer
With the subregion variable color that the second electrode lay makes electrochromic layer, and then form different mask patterns, to be applicable to difference
The substrate of size.
Optionally, described mask pattern is formed by the first electrode layer, the second electrode lay and electrochromic layer completely.So,
Described mask plate can form the pattern of any shape as required, and be applicable on color membrane substrates and array base palte is various
The making of Thinfilm pattern, it is also possible to the liquid crystal drip-injection technique be applicable to LCD board manufacturing process.The embodiment of the present invention
It is applicable to liquid crystal drip-injection technique with mask plate, uses described mask plate the sealed plastic box on substrate to be irradiated solid by ultraviolet
Turn to example illustrate.
Optionally, as shown in Fig. 4-Fig. 8, described second conductive layer includes: the second electricity of one or more electrical connection
Pole unit, the first drive circuit and the second drive circuit, described second drive circuit electrically connects with described second conductive layer, to institute
State the second conductive layer and common electric voltage is provided；Described first drive circuit includes: be arranged on the multi-strip scanning on described transparency carrier 1
Holding wire 2；The a plurality of data signal line 5 being arranged on described transparency carrier 1 and intersect with described scan signal line 2；With institute
Stating the first electrode unit 8 thin film transistor (TFT) one to one, described thin film transistor (TFT) includes: grid, source electrode and drain electrode 6, wherein,
The grid of described thin film transistor (TFT) and described scan signal line 2 are electrically connected, source electrode is electrically connected with described data signal line 5, drains
It is electrically connected with described first electrode unit 8；Described mask plate also includes: the scan drive circuit being connected with described scan signal line
21；The data drive circuit 22 being connected with described data signal line.
Owing to the second conductive layer includes: the second electrode unit of one or more electrical connection, described second conductive layer
It is connected with described second drive circuit, is equivalent to public electrode, circuit turn-on state can be always maintained at.And to expect corresponding
Mask cell, then need the first drive circuit to apply voltage to the first corresponding electrode unit.Concrete, each described
First electrode unit and a thin film transistor (TFT) are connected, and realize circuit turn-on by scan signal line and data signal line.And tool
Body, described drive circuit can also include time schedule controller, is used for exporting control signal.And described drive circuit passes through sequential
Controller provides for scan signal line and drives scanning voltage, provides driving data voltage to data signal line.So, by controlling
Scan signal line and data signal line so that described first electrode unit and the second electrode unit are just added by electrochromic layer simultaneously
The region variable color of voltage, obtains corresponding mask cell.Wherein, more than said two the second electrode unit can be by this layer
Other parts electrically connect, it is also possible to be by other layer of electrical connection.
Optionally, the grid of described thin film transistor (TFT) is the part on described scan signal line line, or sweeps described in being
Retouch the part that holding wire protrudes from line；The source electrode of described thin film transistor (TFT) is the part on described data signal line line, or
Person protrudes from the part on line for described data signal line.
Concrete, the grid of described thin film transistor (TFT) is the part on described scan signal line line, described film crystal
The source electrode of pipe is the part on described data signal line line.Or, the grid of described thin film transistor (TFT) is described scanning signal
Line protrudes from the part on line, and the source electrode of described thin film transistor (TFT) is the part that described data signal line protrudes from line.Also may be used
Being to arrange a thin film transistor (TFT) in the region that scan signal line and data signal line surround so that described thin film transistor (TFT)
Grid electrically connect with described scan signal line, the source electrode of described thin film transistor (TFT) electrically connects with described data signal line, described
The drain electrode of thin film transistor (TFT) electrically connects with described first electrode unit.As shown in Figure 5, Figure 6, with described thin in the embodiment of the present invention
The grid of film transistor is the part on described scan signal line line, and the source electrode of described thin film transistor (TFT) is described data signal
It is described in detail as a example by a part on line line.So can also increase the area of electrochromic cells, obtain finer
Mask pattern.
Optionally, described electrochromic layer includes: an electrochromic cells；Described second conductive layer includes: one
Two electrode units；Two or more first electricity of corresponding described first conductive layer of one electrochromic cells of described electrochromic layer
Pole unit, and second electrode unit of corresponding described second conductive layer；Or, described second conductive layer includes: two with
Upper second electrode unit, more than said two the second electrode unit electrical connection；One electrochromism list of described electrochromic layer
Two or more first electrode unit of corresponding described first conductive layer of unit, and the two or more second of corresponding described second conductive layer
Electrode unit, each first electrode unit of described first conductive layer is the most right with each second electrode unit of described second conductive layer.
Concrete, when being sequentially formed with the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier
Time, described first conductive layer includes two or more the first electrode unit, and described electrochromic layer includes an electrochromic cells,
Described second conductive layer includes second electrode unit.Wherein, the shape of described first electrode unit can refer to shown in Fig. 5,
The shape of the first electrode unit 8 in the region that scan signal line and data signal line surround.One electrochromic cells and
One the second electrode unit is the most right, and at least two first electrode unit of corresponding first conductive layer.Now, the second conduction
Layer is connected with the second drive circuit, and the second conductive layer is equivalent to public electrode.First conductive layer and the first drive circuit are connected, logical
Part first electrode unit of overscanning holding wire and data signal alignment the first conductive layer applies voltage.Electrochromic layer is corresponding
First electrode unit alive region electrochromism, forms the mask pattern needed.
Or, when being sequentially formed with the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier,
Described first conductive layer includes two or more the first electrode unit, and described electrochromic layer includes an electrochromic cells, institute
State the second conductive layer to include: two or more the second electrode unit, more than said two the second electrode unit electrical connection.Wherein,
The shape of one electrode unit and the second electrode unit can refer in the region that in Fig. 5, scan signal line and data signal line surround
The shape of one electrode unit 8.Two of corresponding described first conductive layer of one electrochromic cells of described electrochromic layer with
Upper first electrode unit, and two or more second electrode unit of corresponding described second conductive layer, described first conductive layer each
First electrode unit is the most right with each second electrode unit of described second conductive layer.Wherein, more than said two the second electrode list
Unit's electrical connection can be that more than said two the second electrode unit is electrically connected by other parts of this layer, as shown in Figure 2,3.Also
It may be that more than said two the second electrode unit is electrically connected by other layers.Can be specifically on described second conductive layer
Side arranges the 3rd passivation layer, the 3rd conductive layer, and described 3rd passivation layer each second electrode pattern just to position formed
There is via so that each described second electrode pattern is electrically connected by the 3rd conductive layer.Now, the second conductive layer and second drives electricity
Road is connected, and the second conductive layer is equivalent to public electrode.First conductive layer and the first drive circuit are connected, by scan signal line and
Part first electrode unit of data signal alignment the first conductive layer applies voltage.Corresponding first electrode unit of electrochromic layer adds
The region electrochromism of voltage, forms the mask pattern needed.
Certainly, described second conductive layer can also is that and is positioned at below the first conductive layer.When the second conductive layer is positioned at first
Time below conductive layer, each Rotating fields of the above mask plate being positioned at the first conductive layer with above-mentioned second conductive layer is identical, this
In inventive embodiments only by the second conductive layer be positioned at the first conductive layer above as a example by be described in detail.
Optionally, described electrochromic layer includes: two or more electrochromic cells；Described second conductive layer includes: one
Individual second electrode unit；Each electrochromic cells of described electrochromic layer and each first electrode unit of described first conductive layer
The most right, and second electrode unit of corresponding described second conductive layer；Described mask plate also includes: be positioned at described second conduction
Layer and described first conductive layer between the first passivation layer, and described first passivation layer each electrochromic cells just to position
Place is formed with via；Or, described second conductive layer includes: two or more the second electrode unit, more than said two the second electricity
Pole unit electrically connects；Each first electrode unit of each electrochromic cells of described electrochromic layer and described first conductive layer is just
Right and the most right with each second electrode unit of described second conductive layer.
Concrete, as shown in Figure 5, Figure 7, when being sequentially formed with the first conductive layer, electrochromic layer on described transparency carrier
And during the second conductive layer, described first conductive layer includes two or more the first electrode unit, described electrochromic layer includes two
Individual above electrochromic cells, described second conductive layer includes: second electrode unit.Wherein, described electrochromic cells
With the shape that the shape of the first electrode unit can refer to the first electrode unit 8 shown in Fig. 5.Described electrochromic layer each electroluminescent
Color-changing unit is the most right with each first electrode unit of described first conductive layer, and one second electricity of corresponding described second conductive layer
Pole unit；Described mask plate also includes: the first passivation layer 7 between described second conductive layer and described first conductive layer,
And described first passivation layer 7 each electrochromic cells just to position be formed with via.
Described first passivation layer is used for preventing the first conductive layer and the electrical connection of the second conductive layer.Now, the second conductive layer with
Second drive circuit is connected, and the second conductive layer is equivalent to public electrode.First conductive layer and the first drive circuit are connected, by sweeping
Part the first electrode unit retouching holding wire and data signal alignment the first conductive layer applies voltage.In electrochromic cells, just
To the alive electrochromic cells electrochromism of the first electrode unit, form the mask pattern needed.
Or, when being sequentially formed with the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier,
Described first conductive layer includes two or more the first electrode unit, and described electrochromic layer includes two or more electrochromism list
Unit, the second conductive layer includes two or more the second electrode unit, more than said two the second electrode unit electrical connection；Described electroluminescent
Each electrochromic cells of photochromic layer is the most right with each first electrode unit of described first conductive layer, and with described second conductive layer
Each second electrode unit the most right.
Concrete, it is more than said two that the second electrode unit electrical connection, can be to be electrically connected by other parts in this layer
Connect, as shown in Figure 2 and Figure 3.Described mask plate also includes: between described second conductive layer and described first conductive layer
One passivation layer, and described first passivation layer each electrochromic cells just to position be formed with via.
Or, more than said two the second electrode unit electrical connection, it is also possible to be by other layer of electrical connection.Such as Fig. 8 institute
Show, can be to be provided above the 4th passivation layer the 11, the 4th conductive layer 12, and described 4th passivation layer 11 at described second conductive layer
Each second electrode pattern just to position be formed with via so that each described second electrode pattern pass through the 4th conductive layer 12
Electrical connection.Second conductive layer and the second drive circuit are connected, and the second conductive layer is equivalent to public electrode.First conductive layer and first
Drive circuit is connected, and applies electricity by part first electrode unit of scan signal line and data signal alignment the first conductive layer
Pressure.First electrode unit of simultaneously powered up pressure and the second electrode unit just to the electrochromism of electrochromism region, formed need
Mask pattern.
Certainly, described second conductive layer can also is that and is positioned at below the first conductive layer, and its principle is led with above-mentioned second
The above principle that electric layer is positioned at the first conductive layer is identical.The embodiment of the present invention is only positioned at the first conductive layer with the second conductive layer
Above as a example by be described in detail.
Optionally, as it is shown in figure 9, in the case of described second conductive layer includes two or more the second electrode unit, institute
Two or more the first electrode unit 8 shape stating the first conductive layer is in a row, two or more second electrode of described second conductive layer
Unit 10 shape is in a row, and described first electrode unit intersects with described second electrode unit；
Described drive circuit includes: the 3rd drive circuit 31 and the 4th drive circuit 32；Described 3rd drive circuit 31 He
Described 4th drive circuit 32 is connected with the first electrode unit 8 and the second electrode unit 10 respectively, to described first electrode unit 8
There is provided with the second electrode unit 10 and drive scanning voltage and driving data voltage.
Wherein, the shape of the first electrode unit and the second electrode unit as shown in Figure 10, the first conductive layer two or more
One electrode unit, 102 shapes in a second direction are in a row, two or more second electrode unit of the second conductive layer in the first direction 101
Shape is in a row.Preferably, first direction 101 and second direction 102 are vertical, and the i.e. first electrode unit and the second electrode unit are vertical
Intersect.As it is shown in figure 9, the 3rd drive circuit and the 4th drive circuit respectively with the first electrode unit and the second electrode unit phase
Even, driving scanning voltage and driving data voltage are provided to described first electrode unit and the second electrode unit.So, the first electricity
In the case of pole unit and the second electrode unit are energized simultaneously, electrochromic layer is at the first electrode unit and the second electrode unit
Electrochromism region variable color at crossover location, forms the mask pattern needed.
Or optional, described first conductive layer includes two or more the first electrode unit, wherein, described first electrode list
The shape of unit can refer to shown in Fig. 1, and multiple described first electrode unit is electrically connected by other parts in this layer, along first
Direction shape is in a row, and with reference to 2 and Fig. 3, and two or more the first electrode unit is formed multiple rows of；Described second conductive layer includes two
Above second electrode unit, wherein, the shape of described second electrode unit is as it is shown in figure 1, and multiple described second electrode unit
Being electrically connected by other parts in this layer, shape is in a row in a second direction, as shown in Figure 2 and Figure 3, and two or more the second electricity
Pole unit is formed multiple rows of；Described 3rd drive circuit and the 4th drive circuit respectively with the first electrode unit and the second electrode unit
It is connected, provides to described first electrode unit and the second electrode unit in units of row and drive scanning voltage and driving data electricity
Pressure.Wherein, the shape of the shape of described first electrode unit and the second electrode unit the first electrode unit as shown in Figure 5.
Certainly, the first conductive layer may be located at below described electrochromic layer, and the most described second conductive layer is positioned at institute
State above electrochromic layer；Or, described first conductive layer may be located at above described electrochromic layer, and the most described
Two conductive layers are positioned at below described electrochromic layer.The embodiment of the present invention is positioned under electrochromic layer with the first conductive layer
Face, the second conductive layer be positioned at electrochromic layer above as a example by be described in detail.Concrete, described drive circuit can also wrap
Include time schedule controller, and make any one in the 3rd drive circuit and the 4th drive circuit provide driving by time schedule controller
Scanning voltage, another one optionally provides driving data voltage.For example, it may be described 3rd drive circuit and described the
One electrode unit is connected, and provides to described first electrode unit and drives scanning voltage；Described 4th drive circuit and described second
Electrode unit is connected, and provides driving data voltage to described second electrode unit.
Certainly, described 3rd drive circuit can also be connected with described second electrode unit, to described second electrode unit
There is provided and drive scanning voltage；Described 4th drive circuit is connected with described first electrode unit, carries to described first electrode unit
For driving data voltage.As long as any one output in the 3rd drive circuit and the 4th drive circuit drives scanning voltage, another
Individual input driving data voltage, is connected with the first electrode unit and the second electrode unit respectively, can be used for driving the first electrode list
Electrochromism region at unit and the second electrode unit crossover location carries out variable color, forms the mask pattern needed.
Optionally, described electrochromic layer includes two or more electrochromic cells, and described electrochromic cells is corresponding
At the crossover location of described first electrode unit and the second electrode unit.Described mask plate also includes: be arranged on the first conduction
Layer and the second conductive layer between the second passivation layer, and described second passivation layer each electrochromic cells just to position shape
Become to have via.Owing to electrochromic layer includes two or more electrochromic cells, in order to prevent the first conductive layer and the second conduction
Layer electrical connection, arranges the second passivation layer between described first conductive layer and the second conductive layer.Now, the first electrode unit and
In the case of two electrode units are energized simultaneously, at the crossover location of the first electrode unit and the second electrode unit just to electroluminescent
Photochromic layer unit electrochromism, forms the mask pattern needed.
Optionally, described mask plate also includes: the 5th passivation layer, described 5th passivation layer in order to form layer protective layer,
Cover each layer formed on described transparency carrier.Or,
Preferably, described mask plate also includes: another transparency carrier, forms all layers between said two transparency carrier
Structure, so protects described Rotating fields to work long hours by two transparency carriers and free from the influence of the external environment.
Optionally, described electrochromic cells is dark-state in normal state, is transparent under alive state.Bag
The mask plate including described electrochromic layer need not backlight, and described electrochromic layer has bistable characteristic, is i.e. adding
Under the state of voltage, color change display still image after, as long as display content do not change, would not power consumption, reach joint
The purpose of energy.
The above, the only detailed description of the invention of the present invention, but protection scope of the present invention is not limited thereto, and any
Those familiar with the art in the technical scope that the invention discloses, the change that can readily occur in or replacement, all answer
Contain within protection scope of the present invention.Therefore, protection scope of the present invention should be with described scope of the claims
Accurate.
Claims (9)
1. a mask plate, it is characterised in that including: drive circuit, transparency carrier and be arranged on described transparency carrier
First conductive layer, the second conductive layer and be arranged on the electrochromic layer between two conductive layers；Wherein,
Described electrochromic layer includes: one or more electrochromic cells；
Described first conductive layer includes: two or more the first electrode unit；
Described second conductive layer includes: one or more second electrode unit；
Described first electrode unit and described second electrode unit electrically connect with described drive circuit respectively, corresponding described first
Electrode unit and described second electrode unit can drive the variable color as required of described electrochromic cells；
Described second conductive layer includes: the second electrode unit of one or more electrical connection, and described drive circuit includes: the
One drive circuit and the second drive circuit, described second drive circuit electrically connects with described second conductive layer, leads to described second
Electric layer provides common electric voltage；
Described first drive circuit includes:
The multi-strip scanning holding wire being arranged on described transparency carrier；
The a plurality of data signal line being arranged on described transparency carrier and intersect with described scan signal line；
With described first electrode unit thin film transistor (TFT) one to one, including grid, source electrode and drain electrode, wherein, described thin film
The grid of transistor and described scan signal line are electrically connected, source electrode is electrically connected with described data signal line, drains and described first
Electrode unit is electrically connected；
The scan drive circuit being connected with described scan signal line；
The data drive circuit being connected with described data signal line；
Wherein, described electrochromic layer also includes ion storage, the material of described ion storage and the material of electrochromic layer
The discoloration of material is contrary.
Mask plate the most according to claim 1, it is characterised in that described electrochromic layer includes: an electrochromism list
Unit；
Described second conductive layer includes: second electrode unit；One electrochromic cells correspondence of described electrochromic layer
Two or more first electrode unit of described first conductive layer, and second electrode unit of corresponding described second conductive layer；
Or,
Described second conductive layer includes: two or more the second electrode unit, more than said two the second electrode unit electrical connection；Institute
State two or more first electrode unit of corresponding described first conductive layer of an electrochromic cells of electrochromic layer, and corresponding
Two or more second electrode unit of described second conductive layer, each first electrode unit and described second of described first conductive layer
Each second electrode unit of conductive layer is the most right.
Mask plate the most according to claim 1, it is characterised in that described electrochromic layer includes: the electroluminescent change of two or more
Color element；
Described second conductive layer includes: second electrode unit；Each electrochromic cells of described electrochromic layer is with described
Each first electrode unit of the first conductive layer is the most right, and second electrode unit of corresponding described second conductive layer；Described cover
Lamina membranacea also includes: the first passivation layer between described second conductive layer and described first conductive layer, and described first passivation
Layer each electrochromic cells just to position be formed with via；Or,
Described second conductive layer includes: two or more the second electrode unit, and the above electrode unit of said two electrically connects；Described electricity
Each electrochromic cells of mutagens chromatograph is the most right with each first electrode unit of described first conductive layer, and conducts electricity with described second
Each second electrode unit of layer is the most right.
Mask plate the most according to claim 1, it is characterised in that the grid of described thin film transistor (TFT) is described scanning signal
A part on line line, or protrude from the part on line for described scan signal line；The source electrode of described thin film transistor (TFT) is institute
State the part on data signal line line, or protrude from the part on line for described data signal line.
Mask plate the most according to claim 1, it is characterised in that include two or more the second electricity at described second conductive layer
In the case of pole unit, two or more the first electrode unit shape of described first conductive layer is in a row, described second conductive layer
Two or more the second electrode unit shape is in a row, and described first electrode unit intersects with described second electrode unit；
Described drive circuit includes: the 3rd drive circuit and the 4th drive circuit, described 3rd drive circuit and described 4 wheel driven
Galvanic electricity road is connected with the first electrode unit and the second electrode unit respectively, carries to described first electrode unit and the second electrode unit
For driving scanning voltage and driving data voltage.
Mask plate the most according to claim 5, it is characterised in that described 3rd drive circuit and described first electrode unit
It is connected, provides to described first electrode unit and drive scanning voltage；Described 4th drive circuit and described second electrode unit phase
Even, driving data voltage is provided to described second electrode unit.
Mask plate the most according to claim 5, it is characterised in that described electrochromic layer includes two or more electrochromism
Unit, described mask plate also includes: the second passivation layer being arranged between the first conductive layer and the second conductive layer, and described second
Passivation layer each electrochromic cells just to position be formed with via.
Mask plate the most according to claim 5, it is characterised in that described first electrode unit and described second electrode unit
Vertically.
Mask plate the most according to claim 1, it is characterised in that described electrochromic cells is dark in normal state
State, is transparent under alive state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
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| Publication Number | Publication Date |
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| CN103091906A CN103091906A (en) | 2013-05-08 |
| CN103091906B true CN103091906B (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310037537.0A Expired - Fee Related CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103235451A (en) * | 2013-04-23 | 2013-08-07 | 北京京东方光电科技有限公司 | Mask and production method thereof |
| CN105353566A (en) * | 2015-10-26 | 2016-02-24 | 京东方科技集团股份有限公司 | Exposure device, manufacturing method thereof, and frame sealing glue solidifying method |
| CN105607377B (en) * | 2016-04-01 | 2020-01-03 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method and using method thereof and equipment comprising mask plate |
| CN105892111B (en) * | 2016-06-14 | 2019-05-07 | 深圳市华星光电技术有限公司 | Light shield equipment and the method for making photocuring product |
| CN106773521B (en) * | 2017-01-04 | 2020-01-21 | 京东方科技集团股份有限公司 | Mask plate, display substrate and manufacturing method of display substrate |
| CN106647090A (en) * | 2017-03-10 | 2017-05-10 | 合肥鑫晟光电科技有限公司 | Mask plate and manufacturing method thereof, as well as shading device and control method thereof |
| CN108255350B (en) * | 2018-03-09 | 2021-07-16 | 上海天马微电子有限公司 | Touch control display device |
| CN108628053A (en) * | 2018-05-09 | 2018-10-09 | 深圳市华星光电技术有限公司 | UV mask plates and preparation method thereof |
| CN109031882B (en) * | 2018-09-20 | 2021-09-21 | 京东方科技集团股份有限公司 | Mask device and mask control method |
| CN111445785B (en) * | 2019-01-16 | 2022-06-10 | 北京小米移动软件有限公司 | Electronic equipment and screen module |
| CN111638618A (en) * | 2020-07-01 | 2020-09-08 | 京东方科技集团股份有限公司 | Dimming panel, dimming glass, dimming device and light transmittance adjusting system |
| CN114779570A (en) * | 2022-04-11 | 2022-07-22 | 西湖大学 | Reticle, lithographic apparatus and method for manufacturing a reticle |
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| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
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| CN103091906A (en) | 2013-05-08 |
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