CN103091906A - Mask - Google Patents
Mask Download PDFInfo
- Publication number
- CN103091906A CN103091906A CN2013100375370A CN201310037537A CN103091906A CN 103091906 A CN103091906 A CN 103091906A CN 2013100375370 A CN2013100375370 A CN 2013100375370A CN 201310037537 A CN201310037537 A CN 201310037537A CN 103091906 A CN103091906 A CN 103091906A
- Authority
- CN
- China
- Prior art keywords
- electrode unit
- conductive layer
- electrochromic
- electrode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides a mask, relates to the technical field of displaying and solves the problem that in the prior liquid crystal instillation art, different sizes and different models of substrates require a respective mask. The mask comprises a driving circuit, transparent substrates, a first conducting layer, a second conducting layer and an electro-chromic layer, wherein the first conducting layer and the second conducting layer are arranged on the transparent substrate, and the electro-chromic layer is arranged between the first conducting layer and the second conducting layer. The electro-chromic layer comprises one or more than two electro-chromic unit/ electro-chromic units, the first conducting layer comprises more than two first electrode units, the second conducting layer comprises one or more than two second electrode unit / second electrode units, the first electrode units and the second electrode units are respectively connected with the driving circuit in an electric mode, the corresponding first electrode units and second electrode units are capable of driving the electro-chromic units to change colors according to the need. The mask is applicable to the design and manufacturing of the mask.
Description
Technical field
The present invention relates to the display technique field, relate in particular to a kind of mask plate.
Background technology
Liquid crystal display comprises liquid crystal panel, and liquid crystal panel comprises the array base palte of box moulding and color membrane substrates, and is filled in the liquid crystal between array base palte and color membrane substrates.The important process of liquid crystal panel in manufacturing process is exactly ODF (One Drop Fill, liquid crystal drip-injection), is about to liquid crystal and is filled between array base palte and color membrane substrates to form liquid crystal panel.Its concrete steps are several dropping liquids crystalline substances that first instil on array base palte or color membrane substrates, apply again sealed plastic box, the space that forms an encirclement prevents that the liquid crystal that instils from arbitrarily flowing, again with array base palte and color membrane substrates to box, utilize UV (Ultraviolet Rays, ultraviolet light) sealed plastic box is shone curing, array base palte and color membrane substrates are bonded together.
But because UV light has destruction to materials such as liquid crystal, therefore need a mask plate when utilizing ultraviolet light to shine curing to sealed plastic box, described mask plate is corresponding with the panel that applies sealed plastic box, at the regional ultraviolet transmissive light of corresponding sealed plastic box, do not need the regional light tight of ultraviolet light irradiation except sealed plastic box.Like this in prior art, all need to make a mask plate for the liquid crystal panel of different size before carrying out ODF technique, corresponding with the substrate that applies sealed plastic box to guarantee this mask plate.
Summary of the invention
Embodiments of the invention provide a kind of mask plate, and described mask plate can be applicable to be applicable to the liquid crystal panel of different size in liquid crystal drip-injection technique.
For achieving the above object, embodiments of the invention adopt following technical scheme:
The embodiment of the present invention provides a kind of mask plate, comprising: driving circuit, transparency carrier and be arranged on the first conductive layer, the second conductive layer on described transparency carrier and be arranged on electrochromic layer between two conductive layers; Wherein,
Described electrochromic layer comprises: one or more electrochromic cells;
Described the first conductive layer comprises: the first electrode unit more than two;
Described the second conductive layer comprises: one or more second electrode unit;
Described the first electrode unit and described the second electrode unit are electrically connected to described driving circuit respectively, and corresponding described the first electrode unit and described the second electrode unit can drive the variable color as required of described electrochromic cells.
Optionally, described the second conductive layer comprises: the second electrode unit of one or more electrical connection, described driving circuit comprises: the first driving circuit and the second driving circuit, and described the second driving circuit is electrically connected to described the second conductive layer, provides common electric voltage to described the second conductive layer;
Described the first driving circuit comprises:
Be arranged on the multi-strip scanning signal wire on described transparency carrier;
Many data signal lines that are arranged on described transparency carrier and intersect with described scan signal line;
With described the first electrode unit thin film transistor (TFT) one to one, comprise: grid, source electrode and drain electrode, wherein, the grid of described thin film transistor (TFT) is connected with described scan signal line electricity, source electrode is connected with described data signal line electricity, drain electrode is connected with described the first electrode unit electricity;
The scan drive circuit that is connected with described scan signal line;
The data drive circuit that is connected with described data signal line.
Optionally, described electrochromic layer comprises: an electrochromic cells;
Described the second conductive layer comprises: second electrode unit; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit of corresponding described the second conductive layer; Perhaps,
Described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit more than two of corresponding described the second conductive layer, respectively second electrode unit of each first electrode unit of described the first conductive layer and described the second conductive layer over against.
Optionally, described electrochromic layer comprises: two above electrochromic cells;
Described the second conductive layer comprises: second electrode unit; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer is over against, and second electrode unit of corresponding described the second conductive layer; Described mask plate also comprises: the first passivation layer between described the second conductive layer and described the first conductive layer, and described the first passivation layer each electrochromic cells over against the position be formed with via hole; Perhaps,
Described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer over against, and with each second electrode unit of described the second conductive layer over against.
Optionally, the grid of described thin film transistor (TFT) is the part on described scan signal line line, is perhaps that described scan signal line protrudes from the part on line; The source electrode of described thin film transistor (TFT) is the part on described data signal line line, is perhaps that described data signal line protrudes from the part on line.
Optionally, in the situation that described the second conductive layer comprises the second electrode unit more than two, the first electrode unit shape more than two of described the first conductive layer is in a row, the second electrode unit shape more than two of described the second conductive layer is in a row, and described the first electrode unit and described the second electrode unit intersect;
Described driving circuit comprises: the 3rd driving circuit and 4 wheel driven move circuit, described the 3rd driving circuit is connected with the second electrode unit with the first electrode unit respectively with the moving circuit of described 4 wheel driven, provides driven sweep voltage and driving data voltage to described the first electrode unit and the second electrode unit.
Optionally, described the 3rd driving circuit is connected with described the first electrode unit, provides driven sweep voltage to described the first electrode unit; The moving circuit of described 4 wheel driven is connected with described the second electrode unit, provides driving data voltage to described the second electrode unit.
Optionally, described electrochromic layer comprises two above electrochromic cells, described mask plate also comprises: be arranged on the second passivation layer between the first conductive layer and the second conductive layer, and described the second passivation layer each electrochromic cells over against the position be formed with via hole.
Optionally, described the first electrode unit is vertical with described the second electrode unit.
Optionally, described electrochromic cells is dark attitude under normal condition, is transparent under alive state.
A kind of mask plate that the embodiment of the present invention provides, described mask plate by driving circuit make electrochromic cells over against the first electrode unit and the second electrode unit apply simultaneously voltage, drive described electrochromic cells variable color, form the mask unit that needs, make corresponding with substrate to be exposed, applicable to the substrate of different size and structure.
Description of drawings
A kind of the second electrode unit schematic diagram that Fig. 1 provides for the embodiment of the present invention;
Fig. 2 is electrically connected to schematic diagram for a kind of the second electrode unit that the embodiment of the present invention provides;
Fig. 3 is electrically connected to schematic diagram for another kind the second electrode unit that the embodiment of the present invention provides;
The plan structure schematic diagram of a kind of mask plate that Fig. 4 provides for the embodiment of the present invention;
Fig. 5 is the local enlarged diagram of mask plate shown in Figure 4;
Fig. 6 is the sectional structure schematic diagram of mask plate A-A ' direction shown in Figure 5;
Fig. 7 is the sectional structure schematic diagram of mask plate B-B ' direction shown in Figure 5;
Fig. 8 is the B-B ' direction sectional structure schematic diagram of another kind of mask plate;
The plan structure schematic diagram of the another kind of mask plate that Fig. 9 provides for the embodiment of the present invention;
Figure 10 is the local enlarged diagram of mask plate shown in Figure 9;
Reference numeral:
The 1-transparency carrier; The 2-scan signal line; The 3-gate insulation layer; The 4-active layer; The 5-data signal line; The 6-drain electrode; 7-the first passivation layer; 8-the first electrode unit; The 9-electrochromic layer; 10-the second electrode unit; 11-the 4th passivation layer; 12-the 4th conductive layer; The 21-scan drive circuit; The 22-data drive circuit; 31-the 3rd driving circuit; The 32-4 wheel driven moves circuit; The 91-ion storage; The 92-dielectric substrate; The 93-discoloration material layer; The 100-mask plate.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.
The embodiment of the present invention provides a kind of mask plate, comprising: driving circuit, transparency carrier and be arranged on the first conductive layer, the second conductive layer on described transparency carrier and be arranged on electrochromic layer between two conductive layers; Wherein, described electrochromic layer comprises: one or more electrochromic cells; Described the first conductive layer comprises: the first electrode unit more than two; Described the second conductive layer comprises: one or more second electrode unit;
Described the first electrode unit and described the second electrode unit are electrically connected to described driving circuit respectively, and corresponding described the first electrode unit and described the second electrode unit can drive electrochromic cells variable color as required between the two.
Wherein, the thin film that in the present invention, " layer " refers to utilize a certain material to utilize deposition or other techniques to produce on substrate." unit " in the embodiment of the present invention comprises different shapes, can be for example square as shown in Figure 1, can be also elongated rectangular shape as shown in figure 10.Certainly, the shape of described unit also is not limited to this, and for example the unit in Fig. 1 can be also that other are irregularly shaped.Concrete, take the second electrode unit as example, described the second conductive layer comprises the second electrode unit more than two, as shown in Figure 1, comprise a plurality of the second electrode units 10 of arranging with matrix form, and the second electrode unit 10 does not contact mutually between any two.Certainly, as shown in Figure 2 and Figure 3, a plurality of the second electrode units 10 can link together by other parts in this layer, such as can be by connections such as metal connecting lines.Perhaps, described the second conductive layer can only comprise second electrode unit, and described second electrode unit forms described the second conductive layer, and described second electrode unit covers the All Ranges of the second electrode unit more than two, in other words, the second conductive layer can be a monoblock electrode.Same, when described electrochromic layer comprises two above electrochromic cells, the shape of described electrochromic cells can be the shape of the second electrode unit 10 as shown in Figure 1.When described electrochromic layer comprises an electrochromic cells, a described electrochromic cells forms described electrochromic layer, and a described electrochromic cells covers the All Ranges of two above electrochromic cells, and in other words, electrochromic layer can be a continuous whole layer.In the embodiment of the present invention, accompanying drawing all comprises that take described electrochromic layer two above electrochromic cells are elaborated as example.
The principle of work of the mask plate that the embodiment of the present invention provides is: driving circuit optionally applies voltage to the first electrode unit and the second electrode unit, executing simultaneously alive electrochromism zone over against the first electrode unit and the second electrode unit has electric current to pass through, the electrochromism zone is injected or is extracted the electric charge receiving and losing electrons, and the color of electrochromic material changes.Therefore can pass through described driving circuit, as required the first conductive unit or the second conductive unit are optionally applied voltage, making electrochromic layer execute simultaneously alive field color over against the first electrode unit and the second electrode unit changes, form the mask pattern that needs on mask plate, to be applicable to that the substrate of different size is carried out mask exposure.
Wherein, as Fig. 7, shown in Figure 8, electrochromic layer 9 can also comprise: ion storage 91, dielectric substrate 92 and discoloration material layer 93.Described dielectric substrate 92 can be to be formed by solid electrolyte material, is used for forming negative ions under the effect of electric current; Described ion storage 91 plays corresponding gegenion, the effect that keeps whole system charge balance of storing when electrochromic material injects or extract electric charge; Ion storage also can be a kind of material opposite with front one deck electrochromic material discoloration, can play like this color addition or complementary effect.Perhaps, the electrochromic material that forms described electrochromic layer comprises: negative electrode off-color material and anode off-color material, negative electrode off-color material and anode off-color material can electrolysis provide negative ions under voltage or the function of current, described negative electrode off-color material and anode off-color material generation combination reaction form the material of described electrochromic layer.Can be with reference to prior art for the setting of electrochromic layer and material, as long as realize under voltage or the function of current, the color of electrochromic layer can change and gets final product, and the present invention focuses on the design of mask plate, and the setting of electrochromic layer and material are not done concrete restriction.Comprise take electrochromic layer in the embodiment of the present invention: discoloration material layer, ion storage and dielectric substrate are elaborated as example.Form in addition the color difference of the different electrochromic materials of material in injection or after extracting electric charge of described electrochromic layer.The electrochromic material of the mask plate that the embodiment of the present invention provides under the effect of curtage, electrochromic material inject or extract after electric charge color printing opacity and light tight between change.Can be for example polyaniline, become black or transparent under the effect of curtage.
In addition, electrochromic layer between described the first conductive layer and the second conductive layer, described the first conductive layer can be positioned at described electrochromic layer below, this moment described the second conductive layer be positioned at described electrochromic layer above; Perhaps, described the first conductive layer can be positioned at described electrochromic layer above, this moment described the second conductive layer be positioned at described electrochromic layer below.Wherein, the first conductive layer and the second conductive layer can be tin indium oxide, tin ash etc., and the embodiment of the present invention describes as tin indium oxide as example take the first conductive layer and the second conductive layer.In the embodiment of the present invention " on ", the sequencing of D score when making mask plate be as the criterion.For example, refer to relatively conductive layer in rear formation at upper conductive layer, under conductive layer refer to the conductive layer that relatively formerly forms.
A kind of mask plate provided by the invention, can optionally apply voltage to the first electrode unit and the second electrode unit by driving circuit as required, make electrochromic layer over against the first electrode unit and the alive regional variable color simultaneously of the second electrode unit, form the mask pattern that needs on mask plate, make correspondingly with substrate to be exposed, be applicable to the substrate of different size and structure.
The mask plate that the embodiment of the present invention provides can be used for liquid crystal drip-injection technique, is used for solidifying sealed plastic box.Because the sealed plastic box of the display panel of different size is rectangle, be applicable to the mask plate for the display panel of different size, the zone of corresponding dispenser method is lightproof part, therefore, center section on can mask plate is set to light tight, only need at the marginal position in mask plate light tight zone, electrochromic layer and the first electrode layer and the second electrode lay to be set, make the subregion variable color of electrochromic layer by the first electrode layer and the second electrode lay, and then form different mask patterns, to be applicable to the substrate of different size.
Optionally, described mask pattern is formed by the first electrode layer, the second electrode lay and electrochromic layer fully.Like this, described mask plate can form the pattern of any shape as required, applicable to the making of the various Thinfilm patterns on color membrane substrates and array base palte, also goes for the liquid crystal drip-injection technique in the LCD board manufacturing process.The embodiment of the present invention is applicable to liquid crystal drip-injection technique with mask plate, uses described mask plate by ultraviolet ray, the sealed plastic box on substrate to be shone and is cured as example and describes.
Optionally, as Fig. 4-shown in Figure 8, described the second conductive layer comprises: the second electrode unit of one or more electrical connection, the first driving circuit and the second driving circuit, described the second driving circuit is electrically connected to described the second conductive layer, provides common electric voltage to described the second conductive layer; Described the first driving circuit comprises: be arranged on the multi-strip scanning signal wire 2 on described transparency carrier 1; Many the data signal lines 5 that are arranged on described transparency carrier 1 and intersect with described scan signal line 2; With described the first electrode unit 8 thin film transistor (TFT) one to one, described thin film transistor (TFT) comprises: grid, source electrode and drain electrode 6, wherein, the grid of described thin film transistor (TFT) is connected with described scan signal line 2 electricity, source electrode is connected with described data signal line 5 electricity, drain electrode is connected with described the first electrode unit 8 electricity; Described mask plate also comprises: the scan drive circuit 21 that is connected with described scan signal line; The data drive circuit 22 that is connected with described data signal line.
Because the second conductive layer comprises: the second electrode unit of one or more electrical connection, described the second conductive layer is connected with described the second driving circuit, is equivalent to public electrode, always the holding circuit conducting state.And to expect corresponding mask unit, need the first driving circuit to apply voltage to the first electrode unit of correspondence and get final product.Concrete, each described first electrode unit is connected with a thin film transistor (TFT), realizes circuit turn-on by scan signal line and data signal line.And concrete, described driving circuit can also comprise time schedule controller, is used for the output control signal.And described driving circuit provides driven sweep voltage by time schedule controller for scan signal line, provides driving data voltage to data signal line.Like this, by gated sweep signal wire and data signal line, make electrochromic layer over against the alive regional variable color simultaneously of described the first electrode unit and the second electrode unit, obtain corresponding mask unit.Wherein, described more than two the second electrode unit can be electrically connected to by other parts of this layer, can be also by other layers electrical connection.
Optionally, the grid of described thin film transistor (TFT) is the part on described scan signal line line, is perhaps that described scan signal line protrudes from the part on line; The source electrode of described thin film transistor (TFT) is the part on described data signal line line, is perhaps that described data signal line protrudes from the part on line.
Concrete, the grid of described thin film transistor (TFT) is the part on described scan signal line line, the source electrode of described thin film transistor (TFT) is the part on described data signal line line.Perhaps, the grid of described thin film transistor (TFT) is that described scan signal line protrudes from the part on line, and the source electrode of described thin film transistor (TFT) is that described data signal line protrudes from the part on line.Can also be in the zone that scan signal line and data signal line surround, a thin film transistor (TFT) to be set, make the grid of described thin film transistor (TFT) be electrically connected to described scan signal line, the source electrode of described thin film transistor (TFT) is electrically connected to described data signal line, and the drain electrode of described thin film transistor (TFT) is electrically connected to described the first electrode unit.As Fig. 5, shown in Figure 6, the part in the embodiment of the present invention on take the grid of described thin film transistor (TFT) as described scan signal line line, the source electrode of described thin film transistor (TFT) is that the part on described data signal line line is that example is elaborated.Can also increase the area of electrochromic cells like this, obtain meticulousr mask pattern.
Optionally, described electrochromic layer comprises: an electrochromic cells; Described the second conductive layer comprises: second electrode unit; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit of corresponding described the second conductive layer; Perhaps, described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit more than two of corresponding described the second conductive layer, respectively second electrode unit of each first electrode unit of described the first conductive layer and described the second conductive layer over against.
Concrete, when being formed with successively the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier, described the first conductive layer comprises the first electrode unit more than two, described electrochromic layer comprises an electrochromic cells, and described the second conductive layer comprises second electrode unit.Wherein, the shape of described the first electrode unit can be with reference to shown in Figure 5, the shape of the first electrode unit 8 in the zone that scan signal line and data signal line surround.A described electrochromic cells and described second electrode unit are over against, and at least two the first electrode units of corresponding the first conductive layer.At this moment, the second conductive layer is connected with the second driving circuit, and the second conductive layer is equivalent to public electrode.The first conductive layer is connected with the first driving circuit, and part the first electrode unit by scan signal line and data-signal alignment the first conductive layer applies voltage.The alive regional electrochromism of corresponding the first electrode unit of electrochromic layer forms the mask pattern that needs.
Perhaps, when being formed with successively the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier, described the first conductive layer comprises the first electrode unit more than two, described electrochromic layer comprises an electrochromic cells, described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two.Wherein, the shape of the first electrode unit 8 in the shape of the first electrode unit and the second electrode unit zone that can surround with reference to scan signal line in Fig. 5 and data signal line.First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit more than two of corresponding described the second conductive layer, respectively second electrode unit of each first electrode unit of described the first conductive layer and described the second conductive layer over against.Wherein, described more than two the second electrode unit be electrically connected to can be described more than two the second electrode unit other parts by this layer be electrically connected to, as shown in Fig. 2,3.Can also be, described more than two the second electrode unit be electrically connected to by other layers.Can be specifically that the 3rd passivation layer, the 3rd conductive layer are set above described the second conductive layer, and described the 3rd passivation layer each second electrode pattern over against the position be formed with via hole, make each described second electrode pattern be electrically connected to by the 3rd conductive layer.At this moment, the second conductive layer is connected with the second driving circuit, and the second conductive layer is equivalent to public electrode.The first conductive layer is connected with the first driving circuit, and part the first electrode unit by scan signal line and data-signal alignment the first conductive layer applies voltage.The alive regional electrochromism of corresponding the first electrode unit of electrochromic layer forms the mask pattern that needs.
Certainly, described the second conductive layer can also be positioned at below the first conductive layer.When the second conductive layer be positioned at the first conductive layer below the time, each layer structure of top mask plate that is positioned at the first conductive layer with above-mentioned the second conductive layer is identical, in the embodiment of the present invention only take toply being elaborated as example that the second conductive layer is positioned at the first conductive layer.
Optionally, described electrochromic layer comprises: two above electrochromic cells; Described the second conductive layer comprises: second electrode unit; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer is over against, and second electrode unit of corresponding described the second conductive layer; Described mask plate also comprises: the first passivation layer between described the second conductive layer and described the first conductive layer, and described the first passivation layer each electrochromic cells over against the position be formed with via hole; Perhaps, described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer over against, and with each second electrode unit of described the second conductive layer over against.
Concrete, as Fig. 5, shown in Figure 7, when being formed with successively the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier, described the first conductive layer comprises the first electrode unit more than two, described electrochromic layer comprises two above electrochromic cells, and described the second conductive layer comprises: second electrode unit.Wherein, the shape of described electrochromic cells and the first electrode unit can be with reference to the shape of the first electrode unit 8 shown in Figure 5.Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer is over against, and second electrode unit of corresponding described the second conductive layer; Described mask plate also comprises: the first passivation layer 7 between described the second conductive layer and described the first conductive layer, and described the first passivation layer 7 each electrochromic cells over against the position be formed with via hole.
Described the first passivation layer is used for preventing that the first conductive layer and the second conductive layer are electrically connected to.At this moment, the second conductive layer is connected with the second driving circuit, and the second conductive layer is equivalent to public electrode.The first conductive layer is connected with the first driving circuit, and part the first electrode unit by scan signal line and data-signal alignment the first conductive layer applies voltage.In electrochromic cells, over against the first alive electrochromic cells electrochromism of electrode unit, form the mask pattern that needs.
Perhaps, when being formed with successively the first conductive layer, electrochromic layer and the second conductive layer on described transparency carrier, described the first conductive layer comprises the first electrode unit more than two, described electrochromic layer comprises two above electrochromic cells, the second conductive layer comprises the second electrode unit more than two, described the second electrode unit electrical connection more than two; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer over against, and with each second electrode unit of described the second conductive layer over against.
Concrete, described the second electrode unit electrical connection more than two can be to be electrically connected to by other parts in this layer, as shown in Figure 2 and Figure 3.Described mask plate also comprises: the first passivation layer between described the second conductive layer and described the first conductive layer, and described the first passivation layer each electrochromic cells over against the position be formed with via hole.
Perhaps, described the second electrode unit electrical connection more than two can also be by other layers electrical connection.As shown in Figure 8, can be that the 4th passivation layer 11, the 4th conductive layer 12 are set above described the second conductive layer, and described the 4th passivation layer 11 each second electrode pattern over against the position be formed with via hole, make each described second electrode pattern be electrically connected to by the 4th conductive layer 12.The second conductive layer is connected with the second driving circuit, and the second conductive layer is equivalent to public electrode.The first conductive layer is connected with the first driving circuit, and part the first electrode unit by scan signal line and data-signal alignment the first conductive layer applies voltage.Simultaneously alive the first electrode unit and the second electrode unit over against electrochromism zone electrochromism, form the mask pattern that needs.
Certainly, described the second conductive layer can also be positioned at below the first conductive layer, and its principle is identical with the top principle that above-mentioned the second conductive layer is positioned at the first conductive layer.In the embodiment of the present invention only take toply being elaborated as example that the second conductive layer is positioned at the first conductive layer.
Optionally, as shown in Figure 9, in the situation that described the second conductive layer comprises the second electrode unit more than two, first electrode unit 8 shapes more than two of described the first conductive layer are in a row, second electrode unit 10 shapes more than two of described the second conductive layer are in a row, and described the first electrode unit and described the second electrode unit intersect;
Described driving circuit comprises: the 3rd driving circuit 31 and 4 wheel driven move circuit 32; Described the 3rd driving circuit 31 is connected with the second electrode unit 10 with the first electrode unit 8 respectively with the moving circuit 32 of described 4 wheel driven, provides driven sweep voltage and driving data voltage to described the first electrode unit 8 and the second electrode unit 10.
Wherein, the shape of the first electrode unit and the second electrode unit as shown in figure 10, the first conductive layer more than two the first electrode unit in a row along second direction 102 shapes, second electrode unit more than two of the second conductive layer is in a row along first direction 101 shapes.Preferably, first direction 101 is vertical with second direction 102, i.e. the first electrode unit and the second electrode unit square crossing.As shown in Figure 9, the 3rd driving circuit is connected with the second electrode unit with the first electrode unit respectively with the moving circuit of 4 wheel driven, provides driven sweep voltage and driving data voltage to described the first electrode unit and the second electrode unit.Like this, in the situation that the first electrode unit and the second electrode unit are switched on simultaneously, electrochromic layer forms in the electrochromism zone variable color at the crossover location place of the first electrode unit and the second electrode unit the mask pattern that needs.
Perhaps optional, described the first conductive layer comprises the first electrode unit more than two, wherein, the shape of described the first electrode unit can be with reference to shown in Figure 1, and a plurality of described the first electrode units are electrically connected to by other parts in this layer, in a row along first direction shape, reference 2 and Fig. 3, and more than two, the first electrode unit forms many rows; Described the second conductive layer comprises the second electrode unit more than two, wherein, the shape of described the second electrode unit as shown in Figure 1, and a plurality of described the second electrode units are electrically connected to by other parts in this layer, in a row along second direction shape, arranging as shown in Figure 2 and Figure 3, and more than two, the second electrode unit forms more; The moving circuit of described the 3rd driving circuit and 4 wheel driven is connected with the second electrode unit with the first electrode unit respectively, to arrange as unit to described the first electrode unit and the second electrode unit provides driven sweep voltage and driving data voltage.Wherein, the shape of the shape of described the first electrode unit and the second electrode unit the first electrode unit as shown in Figure 5.
Certainly, the first conductive layer can be positioned at described electrochromic layer below, this moment described the second conductive layer be positioned at described electrochromic layer above; Perhaps, described the first conductive layer can be positioned at described electrochromic layer above, this moment described the second conductive layer be positioned at described electrochromic layer below.In the embodiment of the present invention with the first conductive layer be positioned at electrochromic layer below, the second conductive layer is positioned at electrochromic layer toply is elaborated for example.Concrete, described driving circuit can also comprise time schedule controller, and makes any in the 3rd driving circuit and the moving circuit of 4 wheel driven that driven sweep voltage is provided by time schedule controller, and another one optionally provides driving data voltage.For example, can be that described the 3rd driving circuit is connected with described the first electrode unit, provide driven sweep voltage to described the first electrode unit; The moving circuit of described 4 wheel driven is connected with described the second electrode unit, provides driving data voltage to described the second electrode unit.
Certainly, described the 3rd driving circuit can also be connected with described the second electrode unit, provides driven sweep voltage to described the second electrode unit; The moving circuit of described 4 wheel driven is connected with described the first electrode unit, provides driving data voltage to described the first electrode unit.As long as any output driven sweep voltage in the moving circuit of the 3rd driving circuit and 4 wheel driven, another input driving data voltage, respectively with the first electrode unit be connected electrode unit and be connected, variable color is carried out in the electrochromism zone that can be used for driving the first electrode unit and the second electrode unit crossover location place, forms the mask pattern that needs and gets final product.
Optionally, described electrochromic layer comprises two above electrochromic cells, and described electrochromic cells correspondence is at the crossover location place of described the first electrode unit and the second electrode unit.Described mask plate also comprises: be arranged on the second passivation layer between the first conductive layer and the second conductive layer, and described the second passivation layer each electrochromic cells over against the position be formed with via hole.Because electrochromic layer comprises two above electrochromic cells, be electrically connected in order to prevent the first conductive layer and the second conductive layer, between described the first conductive layer and the second conductive layer, the second passivation layer is set.At this moment, in the situation that the first electrode unit and the second electrode unit are switched on simultaneously, at the crossover location place of the first electrode unit and the second electrode unit over against electrochromic layer unit electrochromism, form the mask pattern that needs.
Optionally, described mask plate also comprises: the 5th passivation layer, described the 5th passivation layer covers in order to form layer protective layer each layer that forms on described transparency carrier.Perhaps,
Preferably, described mask plate also comprises: another transparency carrier, form all layers structure between described two transparency carriers, and can work long hours by two the described layer of transparency carriers protection structures like this and be not subjected to the impact of external environment.
Optionally, described electrochromic cells is dark attitude under normal condition, is transparent under alive state.The mask plate that comprises described electrochromic layer does not need backlight, and described electrochromic layer has bistable characteristic, namely under alive state, after color changes and shows still image, as long as displaying contents do not change, just can power consumption, reach energy-conservation purpose.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement are within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (10)
1. a mask plate, is characterized in that, comprising: driving circuit, transparency carrier and be arranged on the first conductive layer, the second conductive layer on described transparency carrier and be arranged on electrochromic layer between two conductive layers; Wherein,
Described electrochromic layer comprises: one or more electrochromic cells;
Described the first conductive layer comprises: the first electrode unit more than two;
Described the second conductive layer comprises: one or more second electrode unit;
Described the first electrode unit and described the second electrode unit are electrically connected to described driving circuit respectively, and corresponding described the first electrode unit and described the second electrode unit can drive the variable color as required of described electrochromic cells.
2. mask plate according to claim 1, it is characterized in that, described the second conductive layer comprises: the second electrode unit of one or more electrical connection, described driving circuit comprises: the first driving circuit and the second driving circuit, described the second driving circuit is electrically connected to described the second conductive layer, provides common electric voltage to described the second conductive layer;
Described the first driving circuit comprises:
Be arranged on the multi-strip scanning signal wire on described transparency carrier;
Many data signal lines that are arranged on described transparency carrier and intersect with described scan signal line;
With described the first electrode unit thin film transistor (TFT) one to one, comprise: grid, source electrode and drain electrode, wherein, the grid of described thin film transistor (TFT) is connected with described scan signal line electricity, source electrode is connected with described data signal line electricity, drain electrode is connected with described the first electrode unit electricity;
The scan drive circuit that is connected with described scan signal line;
The data drive circuit that is connected with described data signal line.
3. mask plate according to claim 2, is characterized in that, described electrochromic layer comprises: an electrochromic cells;
Described the second conductive layer comprises: second electrode unit; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit of corresponding described the second conductive layer; Perhaps,
Described the second conductive layer comprises: the second electrode unit more than two, described the second electrode unit electrical connection more than two; First electrode unit more than two of corresponding described first conductive layer of an electrochromic cells of described electrochromic layer, and second electrode unit more than two of corresponding described the second conductive layer, respectively second electrode unit of each first electrode unit of described the first conductive layer and described the second conductive layer over against.
4. mask plate according to claim 2, is characterized in that, described electrochromic layer comprises: two above electrochromic cells;
Described the second conductive layer comprises: second electrode unit; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer is over against, and second electrode unit of corresponding described the second conductive layer; Described mask plate also comprises: the first passivation layer between described the second conductive layer and described the first conductive layer, and described the first passivation layer each electrochromic cells over against the position be formed with via hole; Perhaps,
Described the second conductive layer comprises: the second electrode unit more than two, and described two above electrode units are electrically connected to; Each first electrode unit of each electrochromic cells of described electrochromic layer and described the first conductive layer over against, and with each second electrode unit of described the second conductive layer over against.
5. mask plate according to claim 2, is characterized in that, the grid of described thin film transistor (TFT) is the part on described scan signal line line, is perhaps that described scan signal line protrudes from the part on line; The source electrode of described thin film transistor (TFT) is the part on described data signal line line, is perhaps that described data signal line protrudes from the part on line.
6. mask plate according to claim 1, it is characterized in that, in the situation that described the second conductive layer comprises the second electrode unit more than two, the first electrode unit shape more than two of described the first conductive layer is in a row, the second electrode unit shape more than two of described the second conductive layer is in a row, and described the first electrode unit and described the second electrode unit intersect;
Described driving circuit comprises: the 3rd driving circuit and 4 wheel driven move circuit, described the 3rd driving circuit is connected with the second electrode unit with the first electrode unit respectively with the moving circuit of described 4 wheel driven, provides driven sweep voltage and driving data voltage to described the first electrode unit and the second electrode unit.
7. mask plate according to claim 6, is characterized in that, described the 3rd driving circuit is connected with described the first electrode unit, provides driven sweep voltage to described the first electrode unit; The moving circuit of described 4 wheel driven is connected with described the second electrode unit, provides driving data voltage to described the second electrode unit.
8. mask plate according to claim 6, it is characterized in that, described electrochromic layer comprises two above electrochromic cells, described mask plate also comprises: be arranged on the second passivation layer between the first conductive layer and the second conductive layer, and described the second passivation layer each electrochromic cells over against the position be formed with via hole.
9. mask plate according to claim 6, is characterized in that, described the first electrode unit is vertical with described the second electrode unit.
10. mask plate according to claim 1, is characterized in that, described electrochromic cells is dark attitude under normal condition, is transparent under alive state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103091906A true CN103091906A (en) | 2013-05-08 |
| CN103091906B CN103091906B (en) | 2016-12-28 |
Family
ID=48204671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310037537.0A Expired - Fee Related CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103091906B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014172989A1 (en) * | 2013-04-23 | 2014-10-30 | 北京京东方光电科技有限公司 | Mask and manufacturing method therefor |
| CN105353566A (en) * | 2015-10-26 | 2016-02-24 | 京东方科技集团股份有限公司 | Exposure device, manufacturing method thereof, and frame sealing glue solidifying method |
| CN105607377A (en) * | 2016-04-01 | 2016-05-25 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method and use method thereof, and equipment comprising mask plate |
| CN105892111A (en) * | 2016-06-14 | 2016-08-24 | 深圳市华星光电技术有限公司 | Photomask equipment and method of manufacturing photocured product |
| CN106647090A (en) * | 2017-03-10 | 2017-05-10 | 合肥鑫晟光电科技有限公司 | Mask plate and manufacturing method thereof, as well as shading device and control method thereof |
| CN106773521A (en) * | 2017-01-04 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of mask plate, display base plate and preparation method thereof |
| CN108255350A (en) * | 2018-03-09 | 2018-07-06 | 上海天马微电子有限公司 | Touch control display apparatus |
| CN108628053A (en) * | 2018-05-09 | 2018-10-09 | 深圳市华星光电技术有限公司 | UV mask plates and preparation method thereof |
| CN109031882A (en) * | 2018-09-20 | 2018-12-18 | 京东方科技集团股份有限公司 | Mask set and mask control method |
| CN111445785A (en) * | 2019-01-16 | 2020-07-24 | 北京小米移动软件有限公司 | Electronic equipment and screen module |
| CN111638618A (en) * | 2020-07-01 | 2020-09-08 | 京东方科技集团股份有限公司 | Dimming panel, dimming glass, dimming device and light transmittance adjusting system |
| WO2023197552A1 (en) * | 2022-04-11 | 2023-10-19 | 西湖大学 | Mask, photolithography apparatus and method for manufacturing mask |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
-
2013
- 2013-01-30 CN CN201310037537.0A patent/CN103091906B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014172989A1 (en) * | 2013-04-23 | 2014-10-30 | 北京京东方光电科技有限公司 | Mask and manufacturing method therefor |
| CN105353566A (en) * | 2015-10-26 | 2016-02-24 | 京东方科技集团股份有限公司 | Exposure device, manufacturing method thereof, and frame sealing glue solidifying method |
| US20190018315A1 (en) * | 2016-04-01 | 2019-01-17 | Boe Technology Group Co., Ltd. | Mask plate, method for manufacturing mask plate, method for using mask plate, and device including mask plate |
| CN105607377A (en) * | 2016-04-01 | 2016-05-25 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method and use method thereof, and equipment comprising mask plate |
| WO2017166571A1 (en) * | 2016-04-01 | 2017-10-05 | 京东方科技集团股份有限公司 | Mask, manufacturing method therefor, application method thereof, and device comprising mask |
| CN105607377B (en) * | 2016-04-01 | 2020-01-03 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method and using method thereof and equipment comprising mask plate |
| US10481489B2 (en) | 2016-04-01 | 2019-11-19 | Boe Technology Group Co., Ltd. | Mask plate, method for manufacturing mask plate, method for using mask plate, and device including mask plate |
| CN105892111A (en) * | 2016-06-14 | 2016-08-24 | 深圳市华星光电技术有限公司 | Photomask equipment and method of manufacturing photocured product |
| CN106773521A (en) * | 2017-01-04 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of mask plate, display base plate and preparation method thereof |
| CN106647090A (en) * | 2017-03-10 | 2017-05-10 | 合肥鑫晟光电科技有限公司 | Mask plate and manufacturing method thereof, as well as shading device and control method thereof |
| CN108255350A (en) * | 2018-03-09 | 2018-07-06 | 上海天马微电子有限公司 | Touch control display apparatus |
| CN108255350B (en) * | 2018-03-09 | 2021-07-16 | 上海天马微电子有限公司 | Touch control display device |
| WO2019214002A1 (en) * | 2018-05-09 | 2019-11-14 | 深圳市华星光电技术有限公司 | Uv mask plate and fabrication method therefor |
| CN108628053A (en) * | 2018-05-09 | 2018-10-09 | 深圳市华星光电技术有限公司 | UV mask plates and preparation method thereof |
| CN109031882A (en) * | 2018-09-20 | 2018-12-18 | 京东方科技集团股份有限公司 | Mask set and mask control method |
| CN111445785A (en) * | 2019-01-16 | 2020-07-24 | 北京小米移动软件有限公司 | Electronic equipment and screen module |
| CN111638618A (en) * | 2020-07-01 | 2020-09-08 | 京东方科技集团股份有限公司 | Dimming panel, dimming glass, dimming device and light transmittance adjusting system |
| WO2023197552A1 (en) * | 2022-04-11 | 2023-10-19 | 西湖大学 | Mask, photolithography apparatus and method for manufacturing mask |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103091906B (en) | 2016-12-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103091906A (en) | Mask | |
| CN101655646B (en) | Display device and manufacture method thereof | |
| CN102707510B (en) | Color film baseplate, display panel, display and method for producing color film baseplate | |
| CN103279217A (en) | Built-in touch screen and display device | |
| CN203444214U (en) | Substrate and display device | |
| CN103926742A (en) | Colored film substrate and liquid-crystal display panel | |
| CN101324733B (en) | Electronic paper active substrate and manufacturing method thereof as well as electronic paper display screen | |
| CN106125417B (en) | Liquid crystal grating and control method thereof, 3D display panel and display device | |
| CN102566190A (en) | Electronic paper device | |
| CN103926722A (en) | Display panel, display device and manufacturing method of display panel | |
| CN102998862B (en) | Array substrate and liquid crystal display panel | |
| JP2006017750A (en) | Electrophoretic display device and method for manufacturing the same | |
| US8860914B2 (en) | Display device and method of manufacturing the same | |
| US20080220685A1 (en) | Interleaved Electrodes In A Passive Matrix Display | |
| CN111025778A (en) | Liquid crystal box and electronic equipment | |
| CN107102471B (en) | Color filter substrate, manufacturing method thereof and liquid crystal panel | |
| CN203930286U (en) | Motherboard stacked structure | |
| WO2008010163A2 (en) | Arrays of particle containing cells | |
| CN105278181B (en) | Response time short liquid crystal display panel and display device | |
| CN203894508U (en) | Display panel and display device | |
| CN111025622A (en) | Electrowetting display panel and 3D printing system | |
| CN100367102C (en) | Optical compensation birefringence type liquid crystal display panel | |
| US20190196239A1 (en) | Pixel structure, display panel and driving method | |
| KR101087353B1 (en) | array plate and the fabrication method for In-Plane-Switching mode LCD | |
| CN102445793B (en) | Liquid crystal display device and drive method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20220130 |