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Publication numberCN102944561 B
Publication typeGrant
Application numberCN 201210465505
Publication date29 Jul 2015
Filing date16 Nov 2012
Priority date16 Nov 2012
Also published asCN102944561A
Publication number201210465505.6, CN 102944561 B, CN 102944561B, CN 201210465505, CN-B-102944561, CN102944561 B, CN102944561B, CN201210465505, CN201210465505.6
Inventors邱勇
Applicant北京金橙子科技有限公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
一种矩阵式小器件的外观检测方法及装置 Method and apparatus for detecting the appearance of a matrix of small devices translated from Chinese
CN 102944561 B
Abstract  translated from Chinese
本发明涉及一种矩阵式小器件的外观检测方法及装置,其装置包括运动平台和工业相机,以及由F-Theta透镜、带反射镜片的振镜电机和聚焦镜组成的放大扫描组件;F-Theta透镜固定安装在运动平台的正上方;振镜电机、聚焦镜和工业相机设置在一个水平面上,按照从前到后的顺序依次排列;振镜电机固定安装在F-Theta透镜的上方,其反射镜片设于F-Theta透镜中心线的正上方并与水平面间呈可变换角度的倾角;反射镜片的中心、聚焦镜的中心与工业相机的中心在一条直线上。 The present invention relates to a matrix of small devices visual inspection method and device, which device comprises a motion platform and industrial cameras, as well as enlarge the scanning unit by the F-Theta lens, and focusing mirror galvanometer motors with a reflective lens composed; F- Theta lens fixedly mounted above the motion platform; galvanometer motors, focusing mirror and industrial cameras set in a horizontal plane, the order arranged in sequential order from front to back; galvanometer motor fixedly mounted above the F-Theta lens reflection just above the lens provided on the F-Theta lens centerline and with a horizontal plane was to change the angle of inclination; in a straight line on the center of the reflecting lens, focusing lens center and industrial center of the camera. 依次通过提取图像、放大摄像及检测工序实现对矩阵式小器件中每个元件的检测。 Followed by extracting the image, zoom camera and testing processes to achieve small device detection matrix for each element. 检测速度快,准确率高,装置成本低,非常适合工业应用。 Detection speed, high accuracy, low cost of the device is very suitable for industrial applications.
Claims(9)  translated from Chinese
1.一种矩阵式小器件的外观检测装置,包括运动平台和工业相机,其特征在于: 还包括由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件;F-Theta透镜固定安装在运动平台的正上方;振镜电机、聚焦镜和工业相机设置在一个水平面上,按照从前到后的顺序依次排列;振镜电机固定安装在F-Theta透镜的上方,其反射镜片设于F-Theta透镜中心线的正上方并与水平面间呈可变换角度的倾角;反射镜片的中心、聚焦镜的中心与工业相机的中心在一条直线上。 A matrix of small devices visual inspection apparatus includes a motion platform and industrial cameras, characterized by further comprising: amplifying the scanning unit by the F-Theta lens, and a focusing mirror galvanometer motors with a reflective lens composed; F- Theta lens fixedly mounted above the motion platform; galvanometer motors, focusing mirror and industrial cameras set in a horizontal plane, the order arranged in sequential order from front to back; galvanometer motor fixedly mounted above the F-Theta lens reflection just above the lens provided on the F-Theta lens centerline and with a horizontal plane was to change the angle of inclination; in a straight line on the center of the reflecting lens, focusing lens center and industrial center of the camera.
2.根据权利要求1所述的矩阵式小器件的外观检测装置,其特征在于: 所述工业相机连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 2. The visual inspection means a matrix of small device according to claim 1, characterized in that: the industrial camera connected to an image processing unit, an image processing unit to the enlarged image acquired industrial camera sensor, reference to the provisions of adequacy determining standards for contrast, if judged qualified to detect the appearance of a small device.
3.根据权利要求1所述的矩阵式小器件的外观检测装置,其特征在于: 所述运动平台安装在一侧向带有直线电机的直线滑台上,直线电机带动运动平台沿直线滑台直线前进。 3. The visual inspection means a matrix of small device according to claim 1, characterized in that: the motion platform mounted on one side to the linear slide table with linear motors, linear motor driven motion platform along a linear slide straight forward.
4.根据权利要求3所述的矩阵式小器件的外观检测装置,其特征在于: 所述的直线滑台固定安装在一固定在地面的机台上;滑台的侧上方安装有固定放大扫描组件和工业相机的安装支架。 4. The appearance of the detection device matrix small device according to claim 3, wherein: said linear slide fixedly mounted in the ground at a fixed machine table; the top side mounted slide scanning fixed enlarge components and industrial camera mounting bracket.
5.根据权利要求1-3中任一所述的矩阵式小器件的外观检测装置,其特征在于: 所述的工业相机的像素大于等于100万。 5. visual inspection of any device matrix of a small device according to claim 1-3, characterized in that: the industrial camera than or equal to one million pixels.
6.一种矩阵式小器件的外观检测方法,采用权利要求1所述的矩阵式小器件的外观检测装置进行检测,通过透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,其特征在于: 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; 检测工序,对比拍摄的工件图像进行规定的外观检测。 6. A method of detecting the appearance of a small matrix devices, the use of visual inspection apparatus as claimed in claim 1 matrix of small devices to detect shoot through the lens is detected after scanning larger image matrix a small device, characterized in that : step of extracting image, extracted with F-Theta lens and a zoom image detection until the workpiece; enlarged imaging process, by reflecting galvanometer motors lens image transmission will be detected within the workpiece to the focusing lens secondary amplification, re-transmission to the camera's sensor industry is imaged; detection step, the workpiece predetermined captured image contrast of visual inspection.
7.根据权利要求6所述的矩阵式小器件的外观检测方法,其特征在于: 所述F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 7. The method of detecting the appearance of small matrix device according to claim 6, characterized in that: the F-Theta lens image extraction columns, each column of the matrix to extract a small device in a workpiece image.
8.根据权利要求7所述的矩阵式小器件的外观检测方法,其特征在于: 所述矩阵式小器件安装在一直线运动平台内,通过直线运动平台将矩阵式小器件的第一列移动至F-Theta透镜的正下方,然后转动振镜电机的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 8. visual inspection method matrix small device according to claim 7, wherein: the matrix of small device installed in a straight line motion platform, through linear motion platform will be the first column of the matrix of small mobile devices to the F-Theta lens directly below, then the angle of rotation of the galvanometer motors sequentially extracted in the first column of each workpiece is detected, complete the detection of the first column, then move to clamp the material sequentially detects motion platform following the completion of the work until .
9.根据权利要求6-8中任一所述的矩阵式小器件的外观检测方法,其特征在于: 所述的检测工序是通过图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 6-8 according to any of the appearance of small matrix Detection device according to claim one, characterized in that: said detection step is to compare the image of each small parts by the image processing software to detect the presence or absence of the appearance of a workpiece defects.
Description  translated from Chinese
一种矩阵式小器件的外观检测方法及装置 Method and apparatus for detecting the appearance of a matrix of small devices

技术领域 TECHNICAL FIELD

[0001] 本发明涉及外观检测技术,具体是涉及一种矩阵式小器件的外观检测方法及装置。 [0001] The present invention relates to a visual inspection technology, in particular to a method and apparatus for detecting the appearance of a matrix of small devices.

背景技术 Background technique

[0002] 目前在工业生产过程中,生产的器件越来越小型化,这样生产出的产品,在印刷标识或型号等信息时很容易产生印刷位置的偏移,或者在制造过程中导致产品外观有缺陷,生产商为了防止外观有缺陷的不良品流出工厂,必须成立产品外观检测部门,来专门检测外观有缺陷的不良品。 [0002] There are currently in the process of industrial production, the production of the device more compact, so to produce the product, at the time of printing logos or models and other information it is easy to produce offset printing position, or cause the appearance of the product during the manufacturing process defective, the manufacturer in order to prevent the appearance of defective outflow defective products factory, must set up the appearance inspection departments, to specifically detect the appearance of a defective defective products. 目前检测小型工件外观的缺陷的手段有通过人工目测和相机视频检测两种方案。 Means for detecting small parts now has the appearance of defects by artificial visual and video camera detects two schemes.

[0003] 人工目测对于工厂生产量小,产品尺寸大于10毫米的工件是一种有效和经济的解决方案,但是对于每天生产超过成千上万件产品的工厂,随着每日生产的产品越多需要的检测工人就越多,这样导致生产成本和管理成本的大幅提升。 [0003] The artificial visual production capacity for small factories, product size greater than 10 mm of the workpiece is an effective and economical solution, but for the production of plants over thousands of products every day, with daily production of products more the more testing needs more workers, this has led to significantly improve production costs and management costs.

[0004] 相机视频检测对于自动化生产量大,任意产品尺寸都是比较可靠和经济的方案。 [0004] The camera video detector for automated production capacity, any product size are more reliable and economical solution. 一般都是通过伺服或直线电机移动待测工件到相机位置,等待震动稳定后进行抓拍比对。 Usually or linear servo motor moves the workpiece to be tested to the camera position, waiting to be captured than after shock stability. 如果一个70x70mm大小的矩形工件上有35列70行的2x1毫米大小的矩形工件。 If there are 35 rows of 70 rectangular piece 2x1 mm in size 70x70mm size rectangle on a workpiece. 目前的相机视频检测方案有如下几种: The current camera video detection program are summarized as follows:

[0005] I)采用观察区域为大于2x2毫米,分辨率为1024x 768的相机来显示每个工件,通过xy的运动平台来使相机移动到每个工件上面,每次抓取一个工件的图像。 [0005] I) using the observation area is larger than 2x2 mm, with a resolution of 1024x 768 of the camera to display each piece, by xy motion platform to make the camera move to the top of each piece, each grab an image of a workpiece. 这个方案的优点是精度高,达到每个像素0.0019-0.0026毫米的精度。 The advantage of this program is the high precision, reach each pixel 0.0019-0.0026 millimeter accuracy. 缺点是定位时间太长,效率太慢,平均每个工件定位时间需要300-1000ms。 The disadvantage is that the positioning time is too long, too slow efficiency, the average time required for each workpiece positioning 300-1000ms. 如果一台设备一天24小时生产1000片这样的工件,一个有1000x35x70=2450000个小工件,检测这些小工件需要204小时,也就是说一台矩形小器件的生产设备需要大约9台检测设备来配套才能满足生产要求,这对于生产厂家来说是个巨大的负担。 If a piece of equipment 24 hours a day production 1000 this workpiece, a small piece 1000x35x70 = 2450000, to detect these small parts need 204 hours, that is a small rectangular device takes about nine production equipment and testing equipment to support in order to meet production requirements, this is a huge burden for manufacturers.

[0006] 2)采用观察区域为大于70毫米,分辨率为2048的线阵相机来显示每个工件,通过运动平台来使相机移动到每列工件上面,每次抓取一列工件的图像,通过软件来分割出每个工件的图像。 [0006] 2) The observation area is greater than 70 mm, with a resolution of 2048 linear array camera to display each piece, by moving platform to make the camera move to the piece above each column, a column for each piece of image capture, through software to segment the image of each workpiece. 这个方案的优点是速度快。 The advantage of this solution is fast. 缺点是精度太低,只能做到每个像素0.03毫米的精度,如果相机采用分辨率为4096的线阵相机才只能达到每个像素0.015毫米的精度,如果再采用更高分辨率的线阵相机成本就太高。 The disadvantage is that the accuracy is too low, can only be done for each pixel accuracy of 0.03 mm, if the camera with a resolution of 4096 line camera only can reach each pixel accuracy of 0.015 mm, if we use a higher-resolution line array camera cost is too high.

[0007] 因此目前国内生产厂家这样的情况一般都是人工目测来检测,通过一台设备配十多个工人来人工检测,这样的结果是效率极低,出错率很高而且成本也高。 [0007] Therefore, domestic manufacturers such cases are generally artificial visually detected by a device with more than a dozen workers to manual detection, this results in low efficiency, high error rate and the cost is high.

[0008] 3)采用观察区域为大于70毫米,分辨率为8192以上的面阵相机来显示整个工件,为了使整个区域的图像清晰还必须使用专用的高质量的镜头。 [0008] 3) The observation area is greater than 70 mm, with a resolution of more than 8192 plane array camera to display the entire workpiece, in order to clear the entire area of the image must also use a dedicated high-quality lenses. 这样的技术方案一次就可以抓取整个工件的图像,速度也比较快,精度能达到每个像素0.0075毫米的精度,但是缺点是相机和镜头非常昂贵,而且图像成像对照明的要求很高实际应用非常不现实。 Such technical solutions can grab a piece of the whole picture, and faster, precision can reach each pixel accuracy of 0.0075 mm, but the drawback is very expensive camera and lens, and high image imaging lighting requirements practical application very unrealistic.

发明内容 SUMMARY OF THE INVENTION

[0009] 本发明的目的是提供一种准确度高、检测效率高的矩阵式小器件的外观检测方法。 [0009] The object of the present invention is to provide a high degree of accuracy the appearance of high detection efficiency of detection matrix of small devices.

[0010] 本发明的另一目的是提供一种应用上述方法进行检测的矩阵式小器件的外观检测装置。 [0010] Another object of the present invention is to provide a method for detecting the application of the above matrix means detecting the appearance of a small device.

[0011 ] 为达上述目的,本发明采用了以下技术方案: [0011] To achieve the above object, the present invention employs the following technical solutions:

[0012] 一种矩阵式小器件的外观检测方法,通过透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,包括: [0012] The method for detecting the appearance of a small device matrix, through the lens matrix scanning enlarge small device detects an image when shooting, including:

[0013] 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; [0013] The process of extracting image, extracted with F-Theta lens and a zoom image of the workpiece to be detected;

[0014] 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; [0014] Enlarge image pickup process by galvanometer lens reflex motor will be detected within the workpiece transfer images to a second focusing mirror amplified, then transmitted to the camera's sensor industry is imaged;

[0015] 检测工序,对比拍摄的工件图像进行规定的外观检测。 [0015] detection step, compared to the workpiece performs a predetermined image capturing visual inspection.

[0016] 本发明还可通过以下方案进一步实现: [0016] The present invention may also be further realized through the following programs:

[0017] 所述的矩阵式小器件的外观检测方法,其中,所述F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 [0017] The appearance inspection method according to a matrix of small devices, wherein the F-Theta lens extracted images in columns, each column of the matrix to extract a small device in a workpiece image.

[0018] 所述的矩阵式小器件的外观检测方法,其中,所述矩阵式小器件安装在一直线运动平台内,通过直线运动平台将矩阵式小器件的第一列移动至F-Theta透镜的正下方,然后转动振镜电机的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 [0018] The appearance inspection method according to a small device matrix, wherein the matrix small device installed in a straight line motion platform, through linear motion platform will be the first column of the matrix of small mobile devices to the F-Theta lens directly below, and then turn the galvanometer motor angle sequentially extracted in the first column of each workpiece is detected, first column After testing, then move to clamp the material sequentially detects motion platform following the work to completion.

[0019] 所述的矩阵式小器件的外观检测方法,其中,所述的检测工序是通过图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 [0019] The method of detecting the appearance of a small matrix device, wherein said detection step is to compare the image of each small parts by the image processing software to detect whether a workpiece is defective appearance.

[0020] 一种矩阵式小器件的外观检测的装置,包括运动平台和工业相机,其还包括由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件;F_Theta透镜固定安装在运动平台的正上方;振镜电机、聚焦镜和工业相机设置在一个水平面上,按照从前到后的顺序依次排列;振镜电机固定安装在F-Theta透镜的上方,其反射镜片设于F-Theta透镜中心线的正上方并与水平面间呈可变换角度的倾角;反射镜片的中心、聚焦镜的中心与工业相机的中心在一条直线上。 [0020] means for detecting the appearance of a matrix of small devices, including motion platforms and industrial cameras, which also includes an enlarged scanning assembly by the F-Theta lens, and a focusing mirror galvanometer motors with a reflective lens composed; F_Theta lens fixed mounted just above the motion platform; galvanometer motors, focusing mirror and industrial cameras set in a horizontal plane, the order arranged in sequential order from front to back; galvanometer motor fixedly mounted above the F-Theta lens, which is provided on the reflective lens just above the F-Theta lens centerline and with a horizontal plane was to change the angle of inclination; in a straight line on the center of the reflecting lens, focusing lens center and industrial center of the camera.

[0021] 所述的矩阵式小器件的外观检测装置,其中,所述工业相机连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 [0021] The appearance inspection apparatus according to a matrix of small devices, wherein the camera is connected to an industrial image processing unit, an image processing unit to the enlarged image acquired industrial camera sensor, reference to the provisions of the eligibility criteria for judging whether or not comparison, judging whether the detection of small devices appearance of compliance.

[0022] 所述的矩阵式小器件的外观检测装置,其中,所述运动平台安装在一侧向带有直线电机的直线滑台上,直线电机带动运动平台沿直线滑台直线前进。 [0022] The appearance inspection apparatus according to a matrix of small devices, wherein the motion platform mounted on one side to the linear slide table with linear motors, linear motor driven motion platform along a linear slide straight forward.

[0023] 所述的矩阵式小器件的外观检测装置,其中,所述的直线滑台固定安装在一固定在地面的机台上;滑台的侧上方安装有固定放大扫描组件和工业相机的安装支架。 Visual inspection means a matrix of small devices [0023], wherein the linear slide of the fixed installation in the ground at a fixed machine table; the top side of the sliding table mounted fixed zoom cameras scanning assembly and industrial Mounting brackets.

[0024] 所述的矩阵式小器件的外观检测装置,其中,所述的工业相机的像素大于等于100万。 [0024] The appearance inspection apparatus according to a matrix of small devices, wherein the pixels of the camera industry is not less than one million.

[0025] 具体使用时,用户可把需要检测的矩阵式小器件放在夹料运动平台上面(可以手动放置,也可以自动放置)。 [0025] Specifically, when used, the user may need to detect the small device placed in the matrix material motion platform above folder (can be placed manually or automatically placed). 通过直线电机的运动把工件移动到F-Theta透镜的下方,使待检测矩阵式小器件的第I列工件中心与F-Theta透镜的中心对齐,通过振镜电机的反射镜片的反射,可以把矩阵式小器件当前列的所有工件的图像一个接一个的传输到工业相机的传感器里面,传输的图像依次经过F-Theta透镜和聚焦镜两组镜片放大后,可以使观测到的图像放大10-50倍。 By the movement of the linear motor to move the workpiece downward F-Theta lens, so that a matrix of small devices to be tested first workpiece center column I and F-Theta lens center alignment, by a reflection galvanometer motor reflection lens, can All of the workpiece image matrix of small devices one after the current column is transferred to industrial sensors inside the camera, image transmission sequence over F-Theta lens and a focusing lens groups zoom lens, you can make the observed image to enlarge 10- 50 times. 这样可以通过图像处理软件对比每一个小工件的图像来检测工件外观是否有缺陷。 This allows the image contrast by image processing software to detect each of the small workpiece if the workpiece is defective appearance. 等检测完当前这一列工件后,直线电机把夹料运动平台向前再移动,把下一列移动到F-Theta透镜的中心下面继续检测下一列,这样循环检测把所有列检查完毕。 Etc. After detecting a current piece of this column, the linear motor sports platform to clamp the material and then move forward to the next column to F-Theta lens center below continue to detect the next column, so that all the columns loop detection checked.

[0026] 由于采用了以上技术方案,本发明的矩阵式小器件的外观检测方法及装置通过带有反射镜片的振镜电机来改变光线的方向,从而将每一列中的每一个工件均传输到工业相机的传感器上。 [0026] As a result of the above technical solutions, visual inspection method and apparatus of the present invention is a matrix of small devices through galvanometer motors with reflective lenses to change the direction of the light, so that each column each piece are transferred to the Sensors Industrial camera on. 由于振镜电机的定位速度高达70000mm/s。 As the positioning speed galvanometer motors up to 70000mm / s. 从而实现了每个工件的定位时间小于10ms,大大提高了工作效率。 In order to achieve the positioning time of each piece of less than 10ms, greatly improving the work efficiency. 且通过F-Theta透镜和聚焦镜相结合,实现两次放大,从而将小工件的图像放大10-50倍,有效提高了检测的精度,检测精度高,出错率低。 And by F-Theta lens and a focus lens combine to achieve twice enlarged, so that the image is magnified 10-50 times smaller workpieces, effectively improve the detection accuracy, high precision, the error rate is low.

[0027] 本发明由于采用了由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件,从而无需使用分辨率太高的工业相机即可进行有效地外观检测,相机的像素在百万左右即可实现清晰有效的检测,成本较低。 [0027] The present invention due to the amplification by the F-Theta scanning lens assembly, galvanometer motors and focusing mirror with a reflective lens composed, eliminating the need to use high-resolution cameras for industrial visual inspection can be carried out effectively, the camera about one million pixels to achieve a clear and effective detection, and low cost.

附图说明 Brief Description

[0028] 图1为本发明矩阵式小器件的外观检测装置的结构示意图。 [0028] FIG. 1 a schematic structural view of the present invention the matrix of small devices visual inspection apparatus.

具体实施方式 DETAILED DESCRIPTION

[0029] 实施例1 [0029] Example 1

[0030] 参见图1所示,一种矩阵式小器件的外观检测装置,包括运动平台5,由F-Theta透镜4、带反射镜片的振镜电机3以及聚焦镜2组成的放大扫描组件和工业相机I。 As shown in a matrix of small devices visual inspection device [0030] Referring to Figure 1, it includes a motion platform 5, the F-Theta lens 4, galvanometer motors with a reflective lens 3 and the focus lens 2 composed of an enlarged scanning assembly and Industrial Camera I. 运动平台5滑动安装在一侧面带有直线电机的直线滑台上,直线滑台固定安装在一固定在地面上的机台上。 Motion Platform 5 slidably mounted on one side of the linear slide table with linear motors, linear slide fixedly mounted on a stationary machine table on the ground. 机台上还固定安装有一安装放大扫描组件和工业相机的支架。 Machine table is also fitted with a fixed amplification scanning assembly and installation of industrial camera bracket. 支架固定在直线滑台的侧方。 Bracket linear slide the side. 支架为由一横板和一竖板组成的类T型结构,横板位于滑台的正上方,其上开设正对着滑台的安装孔,竖板位于横板上部的部分也开设有安装孔,竖板上的安装孔与横板安装孔的中心位于一个垂直面上。 Bracket by a horizontal plate and a vertical plate consisting of class T type structure, horizontal plate located just above the slide, which is facing mounting holes on the opening slide of the riser located in partial cross-section of a mounting board also opened hole, mounting holes and horizontal board mounting hole located in the center of the vertical panel along a vertical plane. F-Theta透镜4固定安装在横板的安装孔内。 F-Theta lens 4 is fixedly mounted in the mounting hole horizontal plate. 振镜电机 Galvanometer motors

3、聚焦镜2和工业相机I设置在一个水平面上,按照从前到后的顺序依次排列。 3, 2, and industry focusing mirror I set the camera in a horizontal plane, arranged sequentially in the order from front to back. 振镜电机3固定安装在横板上,位于F-Theta透镜4的上方,其反射镜片设于F-Theta透镜4中心线的正上方并与水平面间呈角度可调的倾角;聚焦镜2固定安装在竖板安装孔上,设于横板的上方,工业相机固定安装在竖板的背面。 Galvanometer motor 3 is fixedly mounted on the cross plate, located above the F-Theta lens 4, reflected lens disposed immediately above the F-Theta lens 4 and the center line of adjustable inclination angle with a horizontal plane form; fixed focus lens 2 mounted on the vertical plate mounting holes provided on the top of the horizontal plate fixed industrial camera mounted on the back of the riser. 反射镜片的中心、聚焦镜2的中心与工业相机2的中心在一条直线上。 Center reflector lens, focusing lens center and industrial center of the camera 2 2 in a straight line.

[0031] 进一步的,工业相机I可连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 [0031] Further, the industrial camera I can be connected to an image processing unit, an image processing unit to the enlarged image acquired industrial camera sensor, reference to the provisions of the adequacy determining standards for contrast, it is determined whether the appearance of detecting small devices qualified.

[0032] 本发明的工业相机、聚焦镜、振镜电机及F-Theta透镜均可采用现有市售产品。 [0032] The present invention industrial cameras, focusing mirror, galvanometer motors and F-Theta lens can use existing commercially available products. 如工业相机可米用任一种百万像素左右的工业相机,最佳米用微式MVC1000相机,分辨率1024x768。 The industrial camera industrial camera with either a meter megapixels or so, the best rice with micro-style MVC1000 camera with a resolution of 1024x768. 聚焦镜2可采用南京波长公司生产的聚焦镜,其工作波长为640nm,焦距为250mm。 Nanjing wavelength focusing lens 2 can be produced by the focusing mirror, the operating wavelength of 640nm, a focal length of 250mm. 振镜电机3可采用金橙子科技生产的G028或CTI公司的6230振镜电机。 Galvanometer motor 3 can be gold or orange technology production G028 CTI's 6230 galvanometer motors. F-Theta透镜4可采用南京波长公司生产的工作波长为1064nm,扫描范围为10mm的F-Theta透镜。 F-Theta lens 4 Nanjing wavelength can be produced by the working wavelength is 1064nm, the scanning range of 10mm F-Theta lens.

[0033] 实施例2 [0033] Example 2

[0034] 一种矩阵式小器件的外观检测方法,通过多组透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,包括: [0034] The method for detecting the appearance of a small matrix devices, through multiple sets of scan magnification lens matrix small device detects an image when shooting, including:

[0035] 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; [0035] The process of extracting image, extracted with F-Theta lens and a zoom image of the workpiece to be detected;

[0036] 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; [0036] Enlarge image pickup process by galvanometer lens reflex motor will be detected within the workpiece transfer images to a second focusing mirror amplified, then transmitted to the camera's sensor industry is imaged;

[0037] 检测工序,对比拍摄的工件图像进行规定的外观检测。 [0037] The detection step, compared to the workpiece performs a predetermined image capturing visual inspection.

[0038] 具体使用时,F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 [0038] Specifically when used, F-Theta lens extracted images in columns, each column of the matrix to extract a small device in a workpiece image. 矩阵式小器件可安装在实施例1中所述的运动平台5内,通过直线电机6将运动平台5内的矩阵式小器件的第一列沿着滑台移动至F-Theta透镜的正下方,然后转动振镜电机3的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 Just below the slider to move along the F-Theta lens of the first column of the matrix of small devices can be installed in the motion platform 5, described in Example 1 by the linear motor 6 motion platform matrix 5 within a small device , then the angle of rotation of the motor 3 galvanometer sequentially extracted in the first column of each workpiece is detected, first column After testing, then move to clamp the material sequentially detects motion platform following the work to completion.

[0039] 检测工序中最佳是通过一图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 [0039] The detection step is best contrast image of each small workpiece by an image processing software to detect whether a workpiece is defective appearance. 该图像处理软件可采用MIL或者SAPERA图像处理软件。 The image processing software can be used or SAPERA MIL image processing software.

[0040] 以上所述,仅为本发明的较佳实施例而已,并非对本发明做任何形式上的限定。 [0040] The above are only preferred embodiments of the present invention, it is not doing any form of the present invention is defined. 凡本领域的技术人员利用本发明的技术方案对上述实施例做出的任何等同的变动、修饰或演变等,均仍属于本发明技术方案的范围内。 Where a person skilled in the art using any equivalent change, modification or evolution aspect of the present invention is made to the embodiments described above, it is still within the scope of the present invention technical solutions.

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Classifications
International ClassificationG01N21/88
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