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Publication numberCN102944561 A
Publication typeApplication
Application numberCN 201210465505
Publication date27 Feb 2013
Filing date16 Nov 2012
Priority date16 Nov 2012
Also published asCN102944561B
Publication number201210465505.6, CN 102944561 A, CN 102944561A, CN 201210465505, CN-A-102944561, CN102944561 A, CN102944561A, CN201210465505, CN201210465505.6
Inventors邱勇
Applicant北京金橙子科技有限公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Appearance detection method and device of matrix type small device
CN 102944561 A
Abstract
The invention relates to an appearance detection method and an appearance detection device of a matrix type small device. The appearance detection device comprises a moving platform, an industrial camera and a zooming and scanning component consisting of an F-Theta lens, a galvanometer motor with a reflecting lens and a focusing lens, wherein the F-Theta lens is fixedly arranged just above the moving platform; the galvanometer motor, the focusing lens and the industrial camera are arranged on one horizontal plane and are arranged from front to rear in sequence; the galvanometer motor is fixedly arranged above the F-Theta lens; the reflecting lens is arranged just above the central line of the F-Theta lens and forms a variable inclination angle with the horizontal plane; and the center of the reflecting lens, the center of the focusing lens and the center of the industrial camera are on one straight line. Through sequential image extraction, zooming photographing and detection steps, the detection of each element in the matrix type small device is realized. The appearance detection method and the appearance detection device have the advantages of high detection speed, high accuracy, low device cost and extreme suitability for industrial application.
Claims(9)  translated from Chinese
1. 一种矩阵式小器件的外观检测方法,通过透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,其特征在于: 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; 检测工序,对比拍摄的工件图像进行规定的外观检测。 1. A method of visual inspection matrix of small devices through the lens matrix scanning larger image when shooting small device detection, wherein: the extraction image process, extracted with F-Theta lens and a zoom of the workpiece to be detected image; zoom camera step by lens reflex galvanometer motors to be tested within the workpiece transfer images to a second enlarged focusing mirror, then transmitted to the camera's sensor industry is imaged; detection process, the workpiece image contrast will be taken PROVISIONS detection.
2.根据权利要求I所述的矩阵式小器件的外观检测方法,其特征在于: 所述F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 2. The visual inspection method I described matrix small device according to claim wherein: the F-Theta lens extraction columns image, each extraction column matrix of a small device the workpiece image.
3.根据权利要求2所述的矩阵式小器件的外观检测方法,其特征在于: 所述矩阵式小器件安装在一直线运动平台内,通过直线运动平台将矩阵式小器件的第一列移动至F-Theta透镜的正下方,然后转动振镜电机的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 3. The visual inspection method matrix small device according to claim 2, wherein: the matrix of small devices installed in a straight line motion platform, through linear stages in the first column matrix of small mobile devices to the F-Theta lens directly below, and then rotate the angle of the galvanometer motors sequentially extracted in the first column of each piece is detected, complete the detection of the first column, then move to clamp the material in order to detect motion platform following the completion of the work until .
4.根据权利要求1-3中任一所述的矩阵式小器件的外观检测方法,其特征在于: 所述的检测工序是通过图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 4. A method according to any appearance inspection device of a small matrix according to claim 1-3, characterized in that: said detecting step by comparing the image of each image processing software to detect small workpieces presence or absence of the appearance of the workpiece defects.
5. 一种矩阵式小器件的外观检测装置,包括运动平台和工业相机,其特征在于: 还包括由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件;F-Theta透镜固定安装在运动平台的正上方;振镜电机、聚焦镜和工业相机设置在一个水平面上,按照从前到后的顺序依次排列;振镜电机固定安装在F-Theta透镜的上方,其反射镜片设于F-Theta透镜中心线的正上方并与水平面间呈可变换角度的倾角;反射镜片的中心、聚焦镜的中心与工业相机的中心在一条直线上。 A small device matrix visual inspection apparatus includes a motion platform and industrial cameras, characterized by further comprising: an enlarged scanning assembly by the F-Theta lens, and a focusing mirror galvanometer motors with a reflective lens composed; F- Theta lens fixedly mounted above the motion platform; galvanometer motors, focusing mirror and industrial cameras set in a horizontal plane, the order arranged in sequential order from front to back; galvanometer motor fixedly mounted above the F-Theta lens reflection just above the lens provided on the F-Theta lens center line and the horizontal plane was to change the angle of inclination; in a straight line on the center of the reflecting lens, focusing lens center and industrial center of the camera.
6.根据权利要求5所述的矩阵式小器件的外观检测装置,其特征在于: 所述工业相机连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 6. visual inspection means a matrix of small device according to claim 5, characterized in that: the industrial camera connected to an image processing unit, an image processing section enlarged image acquired industrial camera sensor, reference to the provisions of adequacy determining standards for contrast, if judged qualified to detect the appearance of a small device.
7.根据权利要求5所述的矩阵式小器件的外观检测装置,其特征在于: 所述运动平台安装在一侧向带有直线电机的直线滑台上,直线电机带动运动平台沿直线滑台直线前进。 7. visual inspection means a matrix of small device according to claim 5, characterized in that: the moving platform mounted on one side of the linear slide table with linear motors, linear motor driven motion platform along a linear slide straight forward.
8.根据权利要求7所述的矩阵式小器件的外观检测装置,其特征在于: 所述的直线滑台固定安装在一固定在地面的机台上;滑台的侧上方安装有固定放大扫描组件和工业相机的安装支架。 8. visual inspection means a matrix of small device according to claim 7, characterized in that: the linear slide fixedly mounted on the ground in a fixed machine table; the top side of the sliding table mounted fixed scanning enlarge components and industrial camera mounting bracket.
9.根据权利要求5-7中任一所述的矩阵式小器件的外观检测装置,其特征在于: 所述的工业相机的像素大于等于100万。 9. The apparatus of any of a matrix of small visual inspection device according to one of claim 5-7, characterized in that: said industrial camera 1,000,000 pixels or greater.
Description  translated from Chinese

一种矩阵式小器件的外观检测方法及装置 Method and apparatus for detecting the appearance of a matrix of small devices

技术领域 Technical Field

[0001] 本发明涉及外观检测技术,具体是涉及一种矩阵式小器件的外观检测方法及装置。 [0001] The present invention relates to a visual inspection technology, in particular to a method and apparatus for detecting the appearance of a matrix of small devices.

背景技术 Background

[0002] 目前在工业生产过程中,生产的器件越来越小型化,这样生产出的产品,在印刷标识或型号等信息时很容易产生印刷位置的偏移,或者在制造过程中导致产品外观有缺陷,生产商为了防止外观有缺陷的不良品流出工厂,必须成立产品外观检测部门,来专门检测外观有缺陷的不良品。 [0002] currently in the process of industrial production, the production of the device smaller and smaller, so to produce the product, at the time of printing logos or models and other information is easy to produce offset printing position, or lead to the appearance in the manufacturing process defective, the manufacturer in order to prevent the appearance of defective outflow defective products factory, must set up the appearance inspection departments, to specifically detect the appearance of a defective defective products. 目前检测小型工件外观的缺陷的手段有通过人工目测和相机视频检测两种方案。 Means for detecting small parts now has the appearance of defects by artificial visual and camera video detection two options. [0003] 人工目测对于工厂生产量小,产品尺寸大于10毫米的工件是一种有效和经济的解决方案,但是对于每天生产超过成千上万件产品的工厂,随着每日生产的产品越多需要的检测工人就越多,这样导致生产成本和管理成本的大幅提升。 [0003] The artificial visual production capacity for small factories, product size greater than 10 mm of the workpiece is an effective and economical solution, but for the production of plants over thousands of products every day, with daily production of products more the more testing needs more workers, this has led to significantly improve production costs and management costs.

[0004] 相机视频检测对于自动化生产量大,任意产品尺寸都是比较可靠和经济的方案。 [0004] The camera video detector for automated production capacity, any product dimensions are more reliable and economical solution. 一般都是通过伺服或直线电机移动待测工件到相机位置,等待震动稳定后进行抓拍比对。 Usually or linear servo motor moves the workpiece to the camera position, waiting to be captured after more than shake stability. 如果一个70x70mm大小的矩形工件上有35列70行的2x1毫米大小的矩形工件。 If there are 35 rows of 70 rectangular piece 2x1 mm size 70x70mm size rectangle on a workpiece. 目前的相机视频检测方案有如下几种: The current camera video detection programs are the following:

[0005] I)采用观察区域为大于2x2毫米,分辨率为1024x 768的相机来显示每个工件,通过xy的运动平台来使相机移动到每个工件上面,每次抓取一个工件的图像。 [0005] I) using the observation area is larger than 2x2 mm, with a resolution of 1024x 768 of the camera to display each piece, by xy moving platform to make the camera move to the top of each piece, each capture images of a workpiece. 这个方案的优点是精度高,达到每个像素O. 0019-0. 0026毫米的精度。 The advantage of this program is the high precision, reach each pixel O. 0019-0. 0026 millimeter accuracy. 缺点是定位时间太长,效率太慢,平均每个工件定位时间需要300-1000ms。 The disadvantage is that the positioning time is too long, too slow rate, average time required for each workpiece positioning 300-1000ms. 如果一台设备一天24小时生产1000片这样的工件,一个有1000x35x70=2450000个小工件,检测这些小工件需要204小时,也就是说一台矩形小器件的生产设备需要大约9台检测设备来配套才能满足生产要求,这对于生产厂家来说是个巨大的负担。 If a machine 24 hours a day production 1000 this workpiece, a small piece 1000x35x70 = 2450000, to detect these small parts need 204 hours, that is a small rectangular device takes about nine production equipment and testing equipment to support in order to meet production requirements, this is a huge burden for manufacturers.

[0006] 2)采用观察区域为大于70毫米,分辨率为2048的线阵相机来显示每个工件,通过运动平台来使相机移动到每列工件上面,每次抓取一列工件的图像,通过软件来分割出每个工件的图像。 [0006] 2) The observation area is greater than 70 mm, with a resolution of 2048 linear array camera to display each piece, by moving platform to make the camera move to the piece above each column, each row grab a piece of the picture, by Software to split the image of each job. 这个方案的优点是速度快。 The advantage of this solution is fast. 缺点是精度太低,只能做到每个像素O. 03毫米的精度,如果相机采用分辨率为4096的线阵相机才只能达到每个像素O. 015毫米的精度,如果再采用更高分辨率的线阵相机成本就太高。 The disadvantage is that the accuracy is too low, can only be done for each pixel O. 03 millimeter accuracy, if the camera with a resolution of 4096 line camera only can reach each pixel O. 015 mm precision, if we adopt higher resolution line scan cameras cost is too high.

[0007] 因此目前国内生产厂家这样的情况一般都是人工目测来检测,通过一台设备配十多个工人来人工检测,这样的结果是效率极低,出错率很高而且成本也高。 [0007] Therefore, domestic manufacturers such cases are generally artificial visually detected by a device with more than a dozen workers to manual detection, this results in low efficiency, high error rates and the cost is high.

[0008] 3)采用观察区域为大于70毫米,分辨率为8192以上的面阵相机来显示整个工件,为了使整个区域的图像清晰还必须使用专用的高质量的镜头。 [0008] 3) The observation area is greater than 70 mm, with a resolution of 8192 over the area camera to display the entire workpiece, in order to clear the entire area of the image must also use a dedicated high-quality lenses. 这样的技术方案一次就可以抓取整个工件的图像,速度也比较快,精度能达到每个像素O. 0075毫米的精度,但是缺点是相机和镜头非常昂贵,而且图像成像对照明的要求很高实际应用非常不现实。 Such technical solutions can grab a piece of the whole picture, and faster, precision can reach each pixel O. 0075 millimeter precision, but the drawback is very expensive camera and lens, and high image imaging lighting requirements The actual application is very unrealistic. 发明内容 DISCLOSURE

[0009] 本发明的目的是提供一种准确度高、检测效率高的矩阵式小器件的外观检测方法。 [0009] The object of the present invention is to provide a high degree of accurate, visual inspection method of high detection efficiency matrix of small devices.

[0010] 本发明的另一目的是提供一种应用上述方法进行检测的矩阵式小器件的外观检测装置。 [0010] It is another object of the present invention is to provide a method for detecting the application of the above matrix means detecting the appearance of a small device.

[0011] 为达上述目的,本发明采用了以下技术方案: [0011] To achieve the above object, the present invention employs the following technical solutions:

[0012] 一种矩阵式小器件的外观检测方法,通过透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,包括: [0012] The method for detecting the appearance of a small device matrix, through the lens matrix scanning enlarge small images when shooting device detection, comprising:

[0013] 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; [0013] The process of extracting image, extracted with F-Theta lens and a zoom image of the workpiece to be detected;

[0014] 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; [0014] Enlarge imaging process, reflected by galvanometer motors to be tested lens workpiece transfer images to a second inner focus lens amplified, then transmitted to the camera's sensor industry is imaged;

[0015] 检测工序,对比拍摄的工件图像进行规定的外观检测。 [0015] detection step, compared to the workpiece to the images taking prescribed visual inspection.

[0016] 本发明还可通过以下方案进一步实现: [0016] The present invention may also be further realized through the following programs:

[0017] 所述的矩阵式小器件的外观检测方法,其中,所述F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 [0017] The appearance inspection method according to a matrix of small devices, wherein the F-Theta lens extracted images in columns, each column of the matrix to extract a small piece of the device's image.

[0018] 所述的矩阵式小器件的外观检测方法,其中,所述矩阵式小器件安装在一直线运动平台内,通过直线运动平台将矩阵式小器件的第一列移动至F-Theta透镜的正下方,然后转动振镜电机的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 [0018] The appearance inspection method according to the matrix of small devices, wherein the matrix small device installed in a straight line motion platform, through linear motion platform will be the first column of the matrix of small mobile devices to the F-Theta lens directly below, and then turn the galvanometer motor angle in order to extract the first column of each artifact detection, detection After the first column, then move to clamp the material in order to detect motion platform following the work to completion.

[0019] 所述的矩阵式小器件的外观检测方法,其中,所述的检测工序是通过图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 [0019] The method of detecting the appearance of a small matrix devices, wherein said detection step is comparing small parts of each image by the image processing software to detect the presence or absence of the appearance of defects in the workpiece.

[0020] 一种矩阵式小器件的外观检测的装置,包括运动平台和工业相机,其还包括由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件;F_Theta透镜固定安装在运动平台的正上方;振镜电机、聚焦镜和工业相机设置在一个水平面上,按照从前到后的顺序依次排列;振镜电机固定安装在F-Theta透镜的上方,其反射镜片设于F-Theta透镜中心线的正上方并与水平面间呈可变换角度的倾角;反射镜片的中心、聚焦镜的中心与工业相机的中心在一条直线上。 [0020] The appearance of a device for detecting small matrix devices, including motion platforms and industrial cameras, which also includes an enlarged scanning assembly by the F-Theta lens, and a focusing mirror galvanometer motors with a reflective lens composed; F_Theta lens fixed mounted just above the motion platform; galvanometer motors, industrial camera settings and focusing mirror in a horizontal plane, the order arranged in sequential order from front to back; galvanometer motor fixedly mounted above the F-Theta lens, which is located in lens reflex just above the F-Theta lens center line and the horizontal plane was to change the angle of inclination; in a straight line on the center of the reflecting lens, focusing lens center and industrial center of the camera.

[0021] 所述的矩阵式小器件的外观检测装置,其中,所述工业相机连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 [0021] The appearance inspection apparatus according to a matrix of small devices, wherein the camera is connected to an industrial image processing unit, an image processing section enlarged image acquired industrial camera sensor, reference to the provisions of the eligibility criteria for judging whether or not comparison, judging whether the detection of small devices appearance of compliance.

[0022] 所述的矩阵式小器件的外观检测装置,其中,所述运动平台安装在一侧向带有直线电机的直线滑台上,直线电机带动运动平台沿直线滑台直线前进。 [0022] The appearance inspection apparatus according to a matrix of small devices, wherein the motion platform mounted on one side of the linear slide table with linear motors, linear motor driven motion platform along a linear slide straight forward.

[0023] 所述的矩阵式小器件的外观检测装置,其中,所述的直线滑台固定安装在一固定在地面的机台上;滑台的侧上方安装有固定放大扫描组件和工业相机的安装支架。 Visual inspection means a matrix of small devices [0023], wherein the linear slide of the fixed installations in the ground at a fixed machine table; the top side of the sliding table mounted fixed zoom cameras scanning components and industrial mounting bracket.

[0024] 所述的矩阵式小器件的外观检测装置,其中,所述的工业相机的像素大于等于100万。 [0024] The appearance inspection apparatus according to a matrix of small devices, wherein the pixels of the camera industry is not less than one million.

[0025] 具体使用时,用户可把需要检测的矩阵式小器件放在夹料运动平台上面(可以手动放置,也可以自动放置)。 [0025] particular use, the user may need to detect the small device placed in the matrix material motion platform above folder (can be placed manually or automatically placed). 通过直线电机的运动把工件移动到F-Theta透镜的下方,使待检测矩阵式小器件的第I列工件中心与F-Theta透镜的中心对齐,通过振镜电机的反射镜片的反射,可以把矩阵式小器件当前列的所有工件的图像一个接一个的传输到工业相机的传感器里面,传输的图像依次经过F-Theta透镜和聚焦镜两组镜片放大后,可以使观测到的图像放大10-50倍。 Through the movement of the linear motor to move the workpiece below the F-Theta lens, so that a matrix of small devices to be tested first workpiece center column I and F-Theta lens center alignment, by a reflection galvanometer motor reflection lens, can be images of all small piece of matrix devices one after the current column is transferred to the sensor inside the camera industry, image transmission sequence over F-Theta lens and a focus lens groups zoom lens, you can make the observed image to enlarge 10- 50 times. 这样可以通过图像处理软件对比每一个小工件的图像来检测工件外观是否有缺陷。 This image contrast by image processing software to detect every small workpieces the workpiece is defective appearance. 等检测完当前这一列工件后,直线电机把夹料运动平台向前再移动,把下一列移动到F-Theta透镜的中心下面继续检测下一列,这样循环检测把所有列检查完毕。 Etc. After detecting a current piece in this column, linear motor sports platform to clamp the material and then move forward to the next column to the F-Theta lens center below continue to detect the next column, so that all the columns loop detection checked.

[0026] 由于采用了以上技术方案,本发明的矩阵式小器件的外观检测方法及装置通过带有反射镜片的振镜电机来改变光线的方向,从而将每一列中的每一个工件均传输到工业相机的传感器上。 [0026] As a result of the above technical solutions, visual inspection method and apparatus of the present invention is a matrix of small devices through galvanometer motors with reflective lenses to change the direction of the light, so that each column each piece was transferred to Sensors industrial camera on. 由于振镜电机的定位速度高达70000mm/s。 As the positioning speed galvanometer motors up to 70000mm / s. 从而实现了每个工件的定位时间小于10ms,大大提高了工作效率。 In order to achieve the positioning time of each job less than 10ms, greatly improving the work efficiency. 且通过F-Theta透镜和聚焦镜相结合,实现两次放大,从而将小工件的图像放大10-50倍,有效提高了检测的精度,检测精度高,出错率低。 And by F-Theta lens and a focus lens combine to achieve twice enlarged, so that the image of small parts of the enlarged 10-50 times, effectively improve the detection accuracy, high precision, the error rate is low.

[0027] 本发明由于采用了由F-Theta透镜、带反射镜片的振镜电机以及聚焦镜组成的放大扫描组件,从而无需使用分辨率太高的工业相机即可进行有效地外观检测,相机的像素在百万左右即可实现清晰有效的检测,成本较低。 [0027] The present invention adopts a magnified scanning by the F-Theta lens assembly, galvanometer motors and focusing mirror with a reflective lens composed, eliminating the need for high-resolution industrial camera visual inspection can be carried out effectively, the camera about one million pixels to achieve a clear and effective detection, and low cost.

附图说明 Brief Description

[0028] 图I为本发明矩阵式小器件的外观检测装置的结构示意图。 [0028] FIG. I look detecting structural diagram of the present invention means a matrix of small devices.

具体实施方式 DETAILED DESCRIPTION

[0029] 实施例I [0029] Example I

[0030] 参见图I所示,一种矩阵式小器件的外观检测装置,包括运动平台5,由F-Theta透镜4、带反射镜片的振镜电机3以及聚焦镜2组成的放大扫描组件和工业相机I。 [0030] Referring to Figure I, a device of a matrix of small visual inspection apparatus, comprising moving platform 5, an enlarged scanning unit and by the F-Theta lens 4, with a reflecting galvanometer motor 3 and the focusing lens consisting of lens 2 Industrial Camera I. 运动平台5滑动安装在一侧面带有直线电机的直线滑台上,直线滑台固定安装在一固定在地面上的机台上。 Motion Platform 5 slidably mounted on one side of the linear slide table with linear motors, linear slide fixedly mounted in a fixed machine table on the ground. 机台上还固定安装有一安装放大扫描组件和工业相机的支架。 Machine table is also fitted with a fixed amplification scanning assembly and installation of industrial camera bracket. 支架固定在直线滑台的侧方。 Bracket linear slide the side. 支架为由一横板和一竖板组成的类T型结构,横板位于滑台的正上方,其上开设正对着滑台的安装孔,竖板位于横板上部的部分也开设有安装孔,竖板上的安装孔与横板安装孔的中心位于一个垂直面上。 Stand by a horizontal plate and a vertical plate consisting of class T type structure, the horizontal plate just above the slide, which is facing mounting holes on the open sliding table risers located in partial cross-section of the board also opened mounting hole, mounting holes and horizontal board mounting hole in the center of the riser in a vertical plane. F-Theta透镜4固定安装在横板的安装孔内。 F-Theta lens 4 is fixedly mounted in the mounting hole horizontal plate. 振镜电机 Galvanometer motors

3、聚焦镜2和工业相机I设置在一个水平面上,按照从前到后的顺序依次排列。 3, 2, and industry focusing mirror I set the camera in a horizontal plane, arranged sequentially in the order from front to back. 振镜电机3固定安装在横板上,位于F-Theta透镜4的上方,其反射镜片设于F-Theta透镜4中心线的正上方并与水平面间呈角度可调的倾角;聚焦镜2固定安装在竖板安装孔上,设于横板的上方,工业相机固定安装在竖板的背面。 Galvanometer motor 3 is fixedly mounted on the cross plate, located above the F-Theta lens 4, reflected lens disposed right above the center line F-Theta lens 4 and the angle of inclination is adjustable between a horizontal plane; fixed focus lens 2 mounted on the vertical plate mounting holes provided on the upper horizontal plate fixed industrial camera mounted on the back of the riser. 反射镜片的中心、聚焦镜2的中心与工业相机2的中心在一条直线上。 Center of the reflecting lens, focusing lens center and industrial center of the camera 2 2 in a straight line.

[0031] 进一步的,工业相机I可连接一图像处理部,图像处理部将工业相机传感器中获取的放大后的图像,参照规定的合格与否判断标准进行对比,判断出检测的小器件外观是否合格。 [0031] Further, the industrial camera I can connect an image processing unit, an image processing section enlarged image acquired industrial camera sensor, reference to the provisions of the adequacy determining standards for contrast, it is determined whether the appearance of detecting small devices qualified.

[0032] 本发明的工业相机、聚焦镜、振镜电机及F-Theta透镜均可采用现有市售产品。 [0032] The present invention industrial cameras, focusing mirror galvanometer motors and F-Theta lens can use existing commercial products. 如工业相机可采用任一种百万像素左右的工业相机,最佳采用微式MVC1000相机,分辨率1024x768。 The camera can be used in any industry, such as industrial megapixels a camera around, the best type MVC1000 micro-camera with a resolution of 1024x768. 聚焦镜2可采用南京波长公司生产的聚焦镜,其工作波长为640nm,焦距为250mm。 Nanjing wavelength focusing lens 2 can be produced by the focusing mirror, the operating wavelength of 640nm, a focal length of 250mm. 振镜电机3可采用金橙子科技生产的G028或CTI公司的6230振镜电机。 Galvanometer motor 3 can be oranges or CTI technology production company's 6230 G028 galvanometer motors. F-Theta透镜4可采用南京波长公司生产的工作波长为1064nm,扫描范围为IOOmm的F-Theta透镜。 F-Theta lens 4 Nanjing wavelength can be produced by the working wavelength of 1064nm, scan range IOOmm the F-Theta lens. [0033] 实施例2 [0033] Example 2

[0034] 一种矩阵式小器件的外观检测方法,通过多组透镜扫描放大矩阵式小器件的图像后再进行拍摄检测,包括: [0034] The method for detecting the appearance of a small matrix devices through multiple sets of scan magnification lens matrix of small devices image when shooting testing, including:

[0035] 提取图像工序,用F-Theta透镜提取并一次放大待检测工件的图像; [0035] The process of extracting image, extracted with F-Theta lens and a zoom image of the workpiece to be detected;

[0036] 放大摄像工序,通过振镜电机的反射镜片将待检测工件的图像传输到聚焦镜内进行二次放大后,再传送到工业相机的传感器中进行摄像; [0036] Enlarge imaging process, reflected by galvanometer motors to be tested lens workpiece transfer images to a second inner focus lens amplified, then transmitted to the camera's sensor industry is imaged;

[0037] 检测工序,对比拍摄的工件图像进行规定的外观检测。 [0037] The detection step, compared to the workpiece to the images taking prescribed visual inspection.

[0038] 具体使用时,F-Theta透镜按列提取图像,每次提取一列矩阵式小器件中的一个工件图像。 [0038] Specifically when used, F-Theta lens extracted images in columns, each column of the matrix to extract a small piece of the device's image. 矩阵式小器件可安装在实施例I中所述的运动平台5内,通过直线电机6将运动平台5内的矩阵式小器件的第一列沿着滑台移动至F-Theta透镜的正下方,然后转动振镜电机3的角度依次提取第一列中的每一个工件进行检测,检测完第一列后,再移动夹料运动平台依次进行下列工件的检测直至完成。 Within the matrix of small devices can be mounted in Example I said moving platform 5, just below the slider to move along the F-Theta lens of the first row by the linear motor 6 5 motion platform within the matrix of small devices , then the angle of rotation of the motor 3 galvanometer in order to extract the first column of each piece is detected, the first column After testing, then move to clamp the material in order to detect motion platform following the work to completion.

[0039] 检测工序中最佳是通过一图像处理软件对比每个小工件的图像来检测工件外观是否存在缺陷。 [0039] The detection step is best contrast image of each small workpiece by an image processing software to detect the presence or absence of the appearance of defects in the workpiece. 该图像处理软件可采用MIL或者SAPERA图像处理软件。 The image processing software can be used or SAPERA MIL image processing software.

[0040] 以上所述,仅为本发明的较佳实施例而已,并非对本发明做任何形式上的限定。 [0040] The above are only preferred embodiments of the present invention, it is not to do any form of the present invention is defined. 凡本领域的技术人员利用本发明的技术方案对上述实施例做出的任何等同的变动、修饰或演变等,均仍属于本发明技术方案的范围内。 Where skilled in the art using any equivalent change, modification or evolution aspect of the present invention is made to the embodiments described above, it is still within the scope of the present invention, the technical solution.

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CN105548217A *23 Feb 20164 May 2016信阳舜宇光学有限公司Appearance inspection device and method of film coating product
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International ClassificationG01N21/88
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