CN102944307A - Variable-resolution micro-mirror array multiplexing spectrometer - Google Patents
Variable-resolution micro-mirror array multiplexing spectrometer Download PDFInfo
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- CN102944307A CN102944307A CN2012105344355A CN201210534435A CN102944307A CN 102944307 A CN102944307 A CN 102944307A CN 2012105344355 A CN2012105344355 A CN 2012105344355A CN 201210534435 A CN201210534435 A CN 201210534435A CN 102944307 A CN102944307 A CN 102944307A
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Abstract
The invention discloses a variable-resolution micro-mirror array multiplexing spectrometer which comprises a light source, a collimation lens, a micro-mirror array, a light splitting imaging system and a single-point detector, wherein the micro-mirror array is subjected to region division; switching of a micro-mirror array element is numerically controlled by software, so that the micro-mirror array can respectively finish incidence slit control and spectrum modulation functions of the spectrometer; light emitted by the light source passes through the collimation lens and then reaches a slit region I of the micro-mirror array; the gated light is split by a fixed flashing grating, and dispersed light is imaged into an encoding modulation region II of the micro-mirror array through a first imaging lens and is finally imaged to the single-point detector through a second imaging lens to finish detection of a spectrum; the two regions of the micro-mirror array is numerically controlled by the software, so that an incidence slit construction function and the spectrum modulation function are realized; therefore, the optical resolution and the image element resolution of the spectrometer are adjusted by software programming; and the variable-resolution micro-mirror array multiplexing spectrometer has the characteristics of high precision, high reliability, easiness in adjustment, compact structure, high integration degree, minimization and the like.
Description
Technical field
The present invention relates to a kind of spectral detection device, in particular, the present invention relates to a kind of variable-resolution micro mirror array composite spectrometer.
Technical background
The resolution of spectral instrument mainly is subjected to the impact of entrance slit, and present spectral instrument adopts the scheme of hardware processing and fabricating entrance slit usually, exists slit processing and fabricating difficulty complicated, the low deficiency that waits of precision.And slit that need to make multiple different indexs is loaded into respectively spectral instrument and debugs, so that the adjusting of spectral instrument resolution is extremely inconvenient.Therefore we wish to explore the scheme of making entrance slit by software programming, and control micro mirror array element switch can be realized the function of entrance slit to the gating of light signal.At present for micro mirror array type spectral instrument, micro mirror array is mainly used in the modulation of spectrum simultaneously, and this is so that effective utilization zone of micro mirror array is limited.Therefore we propose micro mirror array is carried out the multiplexing scheme of subregion, so that micro mirror array is finished the function of entrance slit and spectral modulation simultaneously, solve slit and make difficulty, precision is lower, in the time of the deficiencies such as resolution is difficult for regulating, so that the spectral instrument one-piece construction is compacter, more microminiaturized.
Summary of the invention
The invention reside in provides a kind of variable-resolution micro mirror array composite spectrometer, divide by micro mirror array being carried out the zone, the switch of software numerical control micro mirror array element is so that micro mirror array is finished respectively the entrance slit making and spectral modulation function of spectral instrument, solve slit and make difficulty, precision is lower, when the difficult adjusting of resolution etc. are not enough, so that the spectral instrument one-piece construction is compacter, integrated level is higher, and is more microminiaturized.
Technical scheme of the present invention is as follows:
A kind of variable-resolution micro mirror array composite spectrometer comprises: light source, collimation lens, micro mirror array, spectroscopic imaging system and simple detector; Described micro mirror array is carried out subregion multiplexing: micro mirror array is divided into I, two districts of II, realize respectively different functions: in micro mirror array I district, by micro mirror array I district is carried out programming Control, the state that the micro mirror unit of a slit width of control is out (slit width is regulated with line number and columns that height is opened by the control micro mirror unit), thereby all the other construct a slit for the state that closes, as the entrance slit of spectral instrument; In micro mirror array II district, coding numerical control micro mirror array unit switch carries out the modulation of spectrum.
Light path principle of the present invention is that the light of light source outgoing incides micro mirror array I district through collimation lens, light arrives fixedly after by the entrance slit in micro mirror array I district, and blazed grating carries out light splitting, through the first imaging len dispersed light beam is imaged onto micro mirror array II district and carries out spectral modulation, the second imaging len is imaged onto the detection that the single-point detector is finished spectrum after the modulation; Described single-point detector is positioned at the focus place of the second imaging len.
The resolution of spectrometer comprises optical resolution and pixel resolution, and they are subjected to respectively the impact of the neighboring micro group switching centre distance of modulation slit image on entrance slit width and the micro mirror array.Among the present invention, adopt the mode numerical control micro mirror array structure spectral instrument entrance slit of software programming in micro mirror array I district, the software adjustability of entrance slit position, width, height is so that the same software of the optical resolution of spectrometer is adjustable; Adopt simultaneously digital conversion to replace exit slit in micro mirror array II district, when increasing luminous flux, so that the neighboring micro group switching centre is apart from also regulating by software; Therefore the present invention has the adjustable characteristics of resolution software.
The present invention has following advantage:
1. multiplexing to the micro mirror array subregion among the present invention, finish respectively the function of entrance slit and the function of spectral modulation, improved the micro mirror array utilization factor, spectrometer architecture is compacter, integrated level is higher, be easy to the microminiaturization of spectrometer, simultaneously without movable part, improved the Stability and dependability of spectrometer.
2. utilize micro mirror array to finish the software development of spectral instrument entrance slit among the present invention, need not to carry out the processing of slit, so that the making of slit is simple, the slit precision is high, when improving the micro mirror array utilization factor, has reduced the cost of instrument.
3. the optical resolution of spectrometer and pixel resolution all can be regulated by software among the present invention, have the simply and easily characteristics of regulating.
The characteristics such as therefore whole system has compact conformation, and integrated level is high, and miniaturization is easily regulated, and cost is low can be widely used in the fields such as food safety monitoring, biochemical analysis.
Description of drawings
Fig. 1 is structure principle chart of the present invention.
Fig. 2 is part of the present invention (micro mirror array) view.
Fig. 3 is micro mirror array work schematic diagram.
Fig. 4 is micro mirror coding unit and wavelength corresponding relation.
Fig. 5 is one by one scan pattern schematic diagram of micro mirror array.
Fig. 6 is micro mirror array multiple measurement pattern diagram.
Among the figure: 1 is light source; 2 is collimation lens; 3 is micro mirror array; 4 are fixing blazed grating; 5 is the first imaging len; 6 is the second imaging len; 7 is the single-point detector; 8 is entrance slit; I is micro mirror array structure incident slit area; II is micro mirror array spectral modulation district.
Embodiment
The invention will be further described below in conjunction with drawings and Examples:
Embodiments of the invention as shown in Figure 1, the light of light source 1 outgoing is behind its rear collimation lens 2, incide the structure incident slit area I of micro mirror array 3 with the form of directional light, micro mirror array unit switch by coding numerical control entrance slit district I, make it form an entrance slit 8, then the light that passes through arrives fixedly, and blazed grating 4 carries out light splitting, use the first imaging len 5 dispersed light beam to be imaged onto the spectral modulation district II of micro mirror array 3, drive by coding, can be so that micro mirror array spectral modulation district II realizes respectively lining by line scan and two kinds of patterns of array sweeping to spectrum, the light beam of gating is imaged onto on the single-point detector 7 through the second imaging len 6, and described single-point detector 7 is positioned at the focus place of the second imaging len 6.
Micro mirror array principle of multiplexing of the present invention as shown in Figure 2, micro mirror array is divided into I, two districts of II, realize respectively different functions: in micro mirror array I district, by micro mirror array I district is carried out programming Control, the state that the micro mirror unit of a slit width of control is out (slit width is regulated with line number and columns that height is opened by the control micro mirror unit), thus all the other construct a slit for the state that closes, as the entrance slit of spectral instrument; In micro mirror array II district, coding numerical control micro mirror array unit switch carries out the modulation of spectrum.
Fig. 3 is micro mirror array work schematic diagram, and Fig. 3 is a kind of example of micro mirror array, can drive the micro mirror unit minute surface and deflect by piezoelectricity, magnetic force, static, so that the emergent light angle departs from, reaches the effect of wavelength gating.
Fig. 4 is micro mirror coding unit and wavelength corresponding relation, light through 5 outgoing of the first imaging len, on the spectral modulation district II that is imaged onto micro mirror array 3 of dispersion, different wave length is the different micro mirror coding region of correspondence respectively, by the switch of programming Control micro mirror array unit, whether can control the light gating of respective wavelength.
Fig. 5 is scan pattern one by one, and the single-point detector is only accepted the signal intensity of a wavelength in 7 each time.
Fig. 6 is the multiple measurement pattern, and the micro mirror array unit is made up, and namely optional a plurality of micro mirror unit is carried out digital controlly as a coding of template, and what single-point detector 7 received is the signal intensity of a plurality of wavelength combinations.
The resolution of spectrometer comprises optical resolution and pixel resolution, and they are subjected to respectively the impact of the neighboring micro group switching centre distance of modulation slit image on entrance slit width and the micro mirror array.Among the present invention, adopt the mode numerical control micro mirror array structure spectral instrument entrance slit 8 of software programming in micro mirror array I district, the software adjustability of entrance slit 8 positions, width, height is so that the same software of the optical resolution of spectrometer is adjustable; Adopt simultaneously digital conversion to replace exit slit in micro mirror array II district, when increasing luminous flux, the exit slit width is regulated with line number and columns that height is opened by the control micro mirror unit, so that the neighboring micro group switching centre be apart from also can regulating by software, thus the pixel resolution that can regulate spectrometer; Therefore the present invention has the adjustable characteristics of resolution software.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and obviously, those skilled in the art can carry out various changes and modification and not break away from spirit of the present invention and category the present invention.
Claims (9)
1. variable-resolution micro mirror array composite spectrometer is characterized in that comprising:
A. light source;
B. collimation lens;
C. micro mirror array;
D. spectroscopic imaging system;
E. simple detector.
2. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: micro mirror array is divided into I, two districts of II, realize respectively different functions---in micro mirror array I district, by micro mirror array I district is carried out programming Control, the state that the micro mirror unit of a slit width of control is out (slit width is regulated with line number and columns that height is opened by the control micro mirror unit), thereby all the other construct a slit for the state that closes, as the entrance slit of spectral instrument; In micro mirror array II district, coding numerical control micro mirror array unit switch carries out the modulation of spectrum.
3. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: the light of light source outgoing incides micro mirror array I district through collimation lens, light arrives fixedly after by the entrance slit in micro mirror array I district, and blazed grating carries out light splitting, arrive micro mirror array II district and carry out spectral modulation behind the first imaging len, modulation arrives the detection that the single-point detector is finished spectrum by the second imaging len.
4. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1 is characterized in that: make the spectral instrument entrance slit by software programming, entrance slit position, width, highly all can arrange by programming.
5. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: entrance slit is one of principal element that affects the spectral instrument optical resolution, the programming adjustability of entrance slit is so that the optical resolution of spectrometer has had the programming adjustability simultaneously.
6. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1 is characterized in that: one by one scanning survey and two kinds of patterns of multiple measurement of can the numerical control micro mirror array in micro mirror array II district finishing spectrum.
7. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: the spectral instrument pixel resolution is subjected to the impact of the neighboring micro group switching centre distance of modulation slit image on the micro mirror array, micro mirror array II district, the neighboring micro group switching centre distance of modulation slit image can be regulated by the numerical control micro mirror array on the micro mirror array of spectrometer, so the pixel resolution of spectrometer also has the programming adjustability.
8. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: the micro mirror array subregion is multiplexing, finish respectively the function of entrance slit and the function of spectral modulation, spectrometer architecture is compacter, integrated level is higher, be easy to the microminiaturization of spectrometer, simultaneously without movable part, improved the Stability and dependability of spectrometer.
9. a kind of variable-resolution micro mirror array composite spectrometer according to claim 1, it is characterized in that: micro mirror array is carried out subregion multiplexing, utilize micro mirror array to finish the software adjustment of spectral instrument entrance slit, need not to carry out the processing of slit, so that the making of slit is simple, the slit precision is high, when improving the micro mirror array utilization factor, has reduced the cost of instrument.
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| CN106289529A (en) * | 2016-10-10 | 2017-01-04 | 平顶山学院 | High light flux spectrogrph based on partition type digital micro-mirror |
| CN110987180A (en) * | 2018-10-02 | 2020-04-10 | 克洛纳测量技术有限公司 | Spectrometer and method for analyzing an optical sample by means of a spectrometer |
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| CN106289529A (en) * | 2016-10-10 | 2017-01-04 | 平顶山学院 | High light flux spectrogrph based on partition type digital micro-mirror |
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Application publication date: 20130227 |