CN102933521A - Method for manufacturing ceramic bonded body - Google Patents

Method for manufacturing ceramic bonded body Download PDF

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Publication number
CN102933521A
CN102933521A CN2011800280844A CN201180028084A CN102933521A CN 102933521 A CN102933521 A CN 102933521A CN 2011800280844 A CN2011800280844 A CN 2011800280844A CN 201180028084 A CN201180028084 A CN 201180028084A CN 102933521 A CN102933521 A CN 102933521A
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metallic element
simple substance
engaged
compound
load
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CN102933521B (en
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井筒靖久
北英纪
宫崎广行
近藤直树
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Mitsui Mining and Smelting Co Ltd
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Mitsui Mining and Smelting Co Ltd
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    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)

Abstract

A bonding material (12), which is composed of a sheet-like molded body containing fine particles of a compound composed of a metal element or a semi-metal element and a nonmetal element, is disposed between material pieces (10A, 10B) to be bonded, which are composed of a ceramic composed of the compound, and layers (11A, 11B) composed only of a metal element or a semi-metal element are disposed between the material pieces (10A, 10B) and the bonding material (12), and a multilayer structure (20) is formed. Then, in a state wherein a load is applied to the multilayer structure (20), the multilayer structure (20) is fired under the atmosphere of the non-metal element or under the atmosphere of a compound containing the non-metal element, and a bonded body (1) is formed. The bonded body (1) is heat-treated under the load equivalent to or lower than that applied when firing is performed.

Description

The manufacture method of ceramic joined article
Technical field
The present invention relates to plural pottery is engaged the manufacture method of the ceramic joined article that forms.
Background technology
To propose multiple by the method that material is engaged with each other that is engaged that pottery forms.For example, proposed following method: use alumina-ceramic as pottery, the low melting point metal such as clamping metallic aluminium is heated to more than the fusing point of this metal, with each other soldering of alumina-ceramic (with reference to patent documentation 1 and 2) between this alumina-ceramic.
In addition, also proposed to make alumina powder between alumina-ceramic each other, by hot pressing carry out the physics crimping method (with reference to patent documentation 3 and 4 and non-patent literature 1 and 2).Also propose instead of alumina or sandwiched the method (with reference to patent documentation 5 and 6) of other metal oxide powder on the basis of aluminum oxide.
And then, also proposed not use above-mentioned various bond material but by combined aluminum oxide pottery and under vacuum state, heat the integrated method (with reference to patent documentation 7) that makes it.
The prior art document
Patent documentation
Patent documentation 1:US5451279A
Patent documentation 2: Japanese kokai publication hei 6-270336 communique
Patent documentation 3:US2007/0166570A1
Patent documentation 4: TOHKEMY 2010-18448 communique
Patent documentation 5: TOHKEMY 2003-335583 communique
Patent documentation 6: TOHKEMY 2006-36552 communique
Patent documentation 7: TOHKEMY 2007-119262 communique
Non-patent literature
Non-patent literature 1:Phys.Stat.Sol. (a) 175,549 (1999)
Non-patent literature 2:J.Mater.Res., 15,1724 (2000)
Summary of the invention
Invent problem to be solved
But, when carrying out the soldering of low melting point metal, the thermotolerance of resulting conjugant and the tendency of the reactive variation of chemically-resistant are arranged.In with the physics compression bonding method headed by the hot pressing, need special large-scale manufacturing installation, unfavorable economically.
Therefore, problem of the present invention is to provide the manufacture method of the ceramic joined article that can eliminate the various shortcomings that above-mentioned prior art has.
Be used for solving the means of problem
The invention provides the manufacture method of ceramic joined article, it is characterized in that, be engaged the grafting material that configuration between the material is formed by the sheet-like formed body of the particulate that contains this compound what the pottery by the compound of metallic element or semimetallic elements and non-metallic element formed, and be engaged the layer that configuration is formed by this metallic element simple substance or semimetallic elements simple substance between material and this grafting material, form layers lamination structural body at this; Under the state to this laminate structure applying load, under the atmosphere of this non-metallic element or contain under the atmosphere of compound of this non-metallic element and burn till, make this laminate structure become conjugant; At the load that applies when burning till identical or than the low load of this load under described conjugant is heat-treated.
In addition, the invention provides the manufacture method of ceramic joined article, it is characterized in that, be engaged the grafting material that configuration between the material is formed by the sheet-like formed body of the particulate that contains this compound what the pottery by the compound of metallic element or semimetallic elements and non-metallic element formed, and this be engaged between material and this grafting material configuration contain this metallic element simple substance or this semimetallic elements simple substance and this non-metallic element simple substance layer, the form layers lamination structural body; Under the state to described laminate structure applying load, burn till, make this laminate structure become conjugant; At the load that applies when burning till identical or than the low load of this load under described conjugant is heat-treated.
The invention effect
Manufacturing method according to the invention, can not use the Large Furnace such as hot pressing furnace, according to the composition of target conjugant, use the general firing furnace that is set as the oxidizing atmospheres such as nitrogen atmosphere or atmosphere, can easily obtain having high heat resistance and the reactive ceramic joined article of chemically-resistant.
Description of drawings
The sketch chart of the manufacturing process of Fig. 1 (a) and (b) and the alumina-ceramic conjugant (c) made for expression embodiment 1.
Fig. 2 is the figure of the firing temperature program among the expression embodiment 1.
Embodiment
Below preferred embodiment the present invention will be described based on it.As the employed pottery of material that is engaged in the manufacture method of the present invention by the compound formation of metallic element or semimetallic elements and non-metallic element.As metallic element, as long as can form pottery, just have no particular limits, such as using Al, Ti, Zr, Cr, Ta and Nb etc.These metallic elements can use a kind of or be used in combination.As semimetallic elements, as long as can form pottery, just have no particular limits, such as using Si and B etc.On the other hand, as forming the non-metallic element of compound with these metallic elements or semimetallic elements, such as listing C, N and O etc.Object lesson as the compound of these metallic elements or semimetallic elements and non-metallic element can list the oxide compounds such as aluminum oxide (aluminum oxide), titanium dioxide (titanium oxide), zirconium white (zirconium white), chromic oxide, tantalum oxide, niobium oxides, silicon-dioxide (silicon oxide), boron oxide; The nitride such as titanium nitride, zirconium nitride, boron nitride, silicon nitride; The carbide such as titanium carbide, zirconium carbide, chromium carbide, tantalum carbide, niobium carbide, silicon carbide, norbide etc.
Above each compound has different crystal system (such as aluminum oxide or titanium dioxide etc.) according to its kind, and in the present invention, all crystal system all can use.Such as aluminum oxide α-aluminum oxide, βAl2O3, gamma-alumina etc. are arranged, all can use.In addition, in the pottery by above-mentioned each compound formation, to improve its stability as purpose, also can contain other compound.For example, when using silicon nitride ceramics as pottery, also can add aluminum oxide or yttrium oxide as auxiliary agent.
The pottery of above-mentioned each compound can adopt different shape according to the purposes of target ceramic joined article.For example, can adopt the shapes such as the hexahedrons such as rectangular parallelepiped or cubes, the cylinder with level and smooth cross section or pipe.Two potteries that particularly should engage preferably have the position of carrying out mutually the face contact.By having this position, can fully improve the intensity of the ceramic joined article of junction.
Needing only main raw as two potteries that are engaged material is identical compound, can be identical composition, perhaps also can be different compositions.
When implementing method of the present invention, will be configured in their junction surface mode opposite each other as two potteries that are engaged material.In addition, at the grafting material (below be also referred to as " sheet grafting material ") that configuration between two potteries is formed by sheet-like formed body, described sheet-like formed body contains the particulate that consists of this ceramic compound.And then configure respectively the layer (following also these layers always are called " metal level ") that is formed by the metallic element simple substance in the compound that consists of pottery or non-metallic element simple substance between material and the grafting material respectively being engaged.The distributing style of metal level has three kinds of following (1)～(3).
(1) in advance in the mode of the junction surface sticky metals layer that respectively is engaged material.
(2) form in advance the mode of metal level at each face of sheet grafting material.
(3) be engaged between material and the sheet grafting material configuration and be engaged material and sheet grafting material differently as the paper tinsel that is formed by metallic element simple substance or non-metallic element simple substance of individual components or the sheet (following also these always are called " tinsel ") take the powder of metallic element simple substance or non-metallic element simple substance as raw material in advance.
In the present invention, can be according to the width on the shape that is engaged material or junction surface and shape etc., suitably adopt one or more the combination in above-mentioned (1)～(3).When selecting the mode of (1) and (2), various film under vacuums such as evaporation that can be by metallic element simple substance or non-metallic element simple substance or sputter of metal level form the stickup of means or tinsel etc., are adhered to the junction surface that is engaged material or the surface of sheet grafting material.
Metal level is the layer that uses in order to improve the connectivity that is engaged material and grafting material, is varied to the compound that consists of pottery by described later burning till.Consider from this viewpoint, in any situation of above-mentioned (1)～(3), the thickness of metal level is preferably 1～500 μ m, is particularly preferably 2～100 μ m.
The sheet grafting material if the compound that is engaged material take formation as main raw, can for as the ceramic phase that is engaged material with composition, perhaps different composition.In addition, the sheet conjugant forms to have length and width and compares the less two-dimentional shape shape of thickness with length and width, and its profile (profile) has no particular limits.Importantly, the integral body of sheet conjugant has uniform thickness, covers the junction surface that is engaged material.
The dimensional contraction amount this point of the particulate of compound that consists of the sheet grafting material during from low temperatures easy-sintering and sintering considers, preferably its particle diameter is 0.05～10 μ m, is particularly preferably 0.1～5 μ m.This particle diameter for example utilizes the particle size distribution method of the laser diffraction/scattering method shown in the JIS R1629 to measure.
As mentioned above, the even thickness of preferred sheet grafting material.In addition, the viewpoint of the bond strength of the conjugant that obtains by the present invention from abundant raising considers, the thickness of sheet grafting material is preferably 20～1000 μ m, is particularly preferably 50～500 μ m.
The sheet grafting material preferably is configured in the mode in the whole zone that covers two junction surfaces that are engaged material.But, as long as can fully improve the bond strength of the conjugant that is obtained by the present invention, also can under the state that the part junction surface is not covered, configure the sheet grafting material.
In the mode of aforesaid (1)～(3), in the mode of (1) and (3), the sheet grafting material is made of separately the molding that contains the particle that consists of the compound that is engaged material.With respect to this, when adopting the mode of (2), dispose the mode of parts of the one of metal level for each face at the sheet-like formed body that contains the particle that consists of the compound that is engaged material.When using these parts, owing to need not metal level be adhered to be engaged the junction surface of material, therefore, make simple.Therefore, these parts are useful as being used for two components for joining that are engaged the material joint that formed by pottery.
Configuration is engaged material, metal level and sheet grafting material and during the form layers lamination structural body, burns till under the state to this laminate structure applying load.The inventor's result of study unexpectedly shows, even the load that laminate structure is applied is extremely low, also can access the conjugant with sufficient bond strength.At length, the load that puts on laminate structure is 0.01～0.5MPa, it is just enough to be in particular the such underload of 0.02～0.1MPa.Therefore, according to the present invention, can avoid maximization and the unfavorable condition such as complicated of device.Although it is also harmless that laminate structure is applied the load that is higher than this scope,, when applying the load that is higher than this scope, device has maximization or complicated tendency, therefore, does not apply energetically the certainty of the load that is higher than this scope.
The atmosphere of burning till can be the atmosphere that consists of the atmosphere of the non-metallic element in the compound of the pottery be engaged material or contain the compound of this non-metallic element.When the compound that for example consists of the pottery be engaged material was oxide compound, the atmosphere of burning till can be oxygen (O 2) gas atmosphere or contain the atmosphere of oxygen.Can use air atmosphere easily.In addition, when the compound that consists of the pottery be engaged material was nitride, the atmosphere of burning till can be nitrogen (N 2) the nitrogenous compound gas atmosphere such as gas atmosphere or ammonia or contain the atmosphere of these gases.
For example using atmosphere as containing aerobic (O 2) during the atmosphere of gas, the pressure of the atmosphere of burning till can be normal atmosphere.In addition, when using nitrogen, the pressure of the atmosphere of burning till is preferably 0.1～0.9MPa, more preferably 0.3～0.9MPa.
Firing temperature is different because of the kind of pottery, is generally 700～1850 ℃, is particularly preferably 1000～1800 ℃.Heat-up rate with 0.5～10 ℃/minute heats up to arriving till this temperature range preferably from room temperature.After particularly preferably temperature arrives 1000～1200 ℃, improve heat-up rate, temperature is arrived till the described sintering temperature.That is, preferably till arrive the target firing temperature, heat-up rate is adjusted to two stages (low heat-up rate and the high heat-up rate of following).Thus, owing to carrying out the reaction (for example oxidation or nitrogenize) of metal level and non-metallic element in the junction, bond strength is improved, thereby preferred.This heat-up rate is preferably 3～10 ℃/minute take higher as condition than the heat-up rate that begins from room temperature.
In addition, at low heat-up rate stage and the height intensification speed stage of following, the atmosphere of burning till also can be different.For example the pressure of the atmosphere of high intensification speed stage can be higher than the pressure of the atmosphere in low heat-up rate stage.Thus, for example can play and to be suppressed at the advantageous effects that reaction product that the low heat-up rate stage generates is at high temperature decomposed again.
Firing time is preferably 1～3 hour, is particularly preferably 2～3 hours.By burning till under these conditions, can easily and reliably be engaged the material solidstate bonding with two.
Burn till by above-mentioned, can access and be engaged the ceramic joined article that the material joint forms with two.Then this conjugant is heat-treated.Thermal treatment take the sintering at the solidstate bonding position of further carrying out conjugant, further improve bond strength and carry out as purpose.Therefore, this thermal treatment is identical when burning till or carry out under the low load when burning till.By under underload, heat-treating, favourable on the maximization that does not cause device or complicated this point.Also comprise uncharge state this is so-called " low when burning till load ".
Thermal treatment can then be carried out behind sintering described above, perhaps also can be after sintering finish, carry out after conjugant being cooled to the temperature, for example room temperature of regulation.Generally by heat-treating making under the heat treated atmosphere atmosphere identical with sintering, can access satisfied result.
Heat treated temperature is different because of the kind of pottery, considers from the viewpoint of the sintering that further carries out the solidstate bonding position, is preferably set to 1300～1900 ℃, particularly preferably is set as 1500～1800 ℃.In addition, heat treated temperature and the sintering temperature of before explanation between relation aspect, the grafting material cause from being grown up by diffusion and grain be engaged the integrated this point of material, preferably be higher than sintering temperature.At this moment, take sintering temperature as T 0, take heat treated temperature as T 1The time, both are preferably T 0≤ T 1Relation.Based on identical reason, the heat treated time is preferably 2～12 hours, is particularly preferably 4～12 hours.
Like this, can access the target ceramic joined article.This conjugant has and utilizes approximately 25%～approximately 75% the high bond strength according to the four-point bending intensity at room temperature of JIS R1601 of measuring as the ceramic monomer that is engaged material.In addition, in resulting conjugant, do not have in fact the xenogenesis element being engaged material junction place each other, therefore, thermotolerance and chemically-resistant reactivity are high.
As other method of above manufacture method, also can adopt the method for the following stated.At first, be engaged storeroom what the pottery by the compound of metallic element or semimetallic elements and non-metallic element formed, the grafting material that configuration is formed by the sheet-like formed body of the particulate that contains this compound.Till this operation, identical with above-mentioned manufacture method.Then, be engaged between material and the grafting material configuration contain above-mentioned metallic element simple substance or semimetallic elements simple substance, with the layer of non-metallic element simple substance, form layers lamination structural body.Be in the situation of silicon carbide (SiC) pottery at the pottery that formation is engaged material for example, use the sheet-like formed body of the particulate that contains silicon carbide as grafting material, this grafting material be engaged configuration between the material contain elementary silicon and carbon simple substance layer.As an example, can configure the mixed powder of the powder of the powder of elementary silicon and carbon simple substance.
In addition, each face configuration of the grafting material that forms at the sheet-like formed body by the particulate of the compound that contains metallic element or semimetallic elements and non-metallic element contains layer parts that forms of this metallic element simple substance or this semimetallic elements simple substance and this non-metallic element simple substance, for can be separately to the mode of its integraty parts of processing.Therefore, these parts are useful as being used for two components for joining that are engaged the material joint that formed by pottery.
Behind the form layers lamination structural body, under the state to the laminate structure applying load, burn till like this, make this laminate structure become conjugant.In above-mentioned manufacture method, supply response thing (for example oxygen or nitrogen) in the atmosphere when burning till, still, in this manufacture method, prepared reactant being engaged between material and the grafting material in advance, therefore, the atmosphere when burning till can be the inertness gas atmospheres such as argon.
By burning till, the reaction of the mixed powder of the powder of the powder of above-mentioned elementary silicon and carbon simple substance occurs, the Formed SiClx.Meanwhile, the silicon carbide of generation promotes to be engaged engaging between material and the grafting material.Afterwards, identical with above-mentioned manufacture method, at the load that applies when burning till identical or than the low load of this load under heat-treat.This thermal treatment also can be carried out under the inertness gas atmosphere.
Temperature condition when carrying out above-mentioned burning till and load can be identical with above-mentioned manufacture method.Heat treated temperature condition also can be identical with above-mentioned manufacture method.
The ceramic joined article that utilizes this manufacture method to obtain is also identical with the ceramic joined article that utilizes above-mentioned manufacture method to obtain, and has to utilize approximately 25%～approximately 75% the high bond strength according to the four-point bending intensity at room temperature of JIS R1601 of measuring as the ceramic monomer that is engaged material.In addition, in resulting conjugant, do not have in fact the xenogenesis element being engaged material junction place each other, therefore, thermotolerance and chemically-resistant reactivity are high.
The ceramic joined article that obtains like this such as heater tube or protective tube for thermocouple, rotary kiln with furnace core tube, roller kiln with firing furnace parts or furnace lining material, liner, agitating vane materials such as roller-ways, to carry with conveyings such as roller uniform wearability mechanical device part, medicine or slurries be useful in multiple uses such as duct members.
Above based on preferred embodiment the present invention will be described, still, the present invention is not limited to above-mentioned embodiment.For example in the above description, in order to help to understand, listed two examples that are engaged the joint of material, still, the joint number that is engaged material is not limited to this, also can engage simultaneously the material that is engaged more than three in a manufacturing process.
Embodiment
The present invention will be described in more detail by the following examples.But scope of the present invention is not limited to these embodiment.
(embodiment 1)
Use commercially available high-purity alpha-alumina pottery (Al 2O 3Purity is more than 99.5%, void content is below 1%) as being engaged material.This is engaged material is that length is that 35mm, width are that 35mm, thickness are the board-like material of 2.5mm.By vacuum evaporation this one side adhesion that is engaged material by metallic aluminium forms layer.The thickness of layer is 3 μ m.As grafting material, use utilizing and scraping that the skill in using a kitchen knife in cookery is shaped commercially available low-temperature sintering high-purity alpha alumina powder jointed (primary particle size is 0.1 μ m) and make thickness is the sheet grafting material that 50 μ m obtain.It is that 35mm, width are 35mm that this grafting material is of a size of length.
Shown in Fig. 1 (a), configure in their aluminium-vapour deposition face 11A, 11B mode opposite each other by being engaged material 10A, 10B with two, and configuration sheet grafting material 12 between two grafting material 10A, 10B, carry out crimping with suitable pressure, obtain the laminate structure 20 shown in Fig. 1 (b).This laminate structure 20 is arranged in the firing furnace, loads weight thereon, apply the load of 0.02MPa.The temperature program(me) of burning till is as follows.That is, the speed with 1 ℃/minute is warming up to 1100 ℃ from room temperature under atmosphere.After temperature arrived 1100 ℃, heat-up rate was brought up to 5 ℃/minute, proceeded to heat up, and was heated to 1550 ℃.After keeping this temperature to burn till in 2 hours, lower the temperature with 5 ℃/minute speed, be cooled to room temperature.Obtain like this alumina-ceramic conjugant 1.
Then, shown in Fig. 1 (c), in firing furnace, alumina-ceramic conjugant 1 speed with 5 ℃/minute under atmosphere of utilizing weight to apply the load of 0.02MPa is heated up from room temperature, be heated to 1600 ℃.After keeping 12 times of this temperature to heat-treat, lower the temperature with 5 ℃/minute speed, be cooled to room temperature.Obtain thus the alumina-ceramic conjugant l of embodiment 1.
About the alumina-ceramic conjugant that obtains like this, be positioned at the mode of central part with the junction surface, cut out test film by ground finish.Use this test film, utilize the four-point bending intensity at room temperature according to JIS R1601, carry out the mensuration of bond strength, the result is shown as the bond strength of 96MPa.Four-point bending intensity as the alumina-ceramic monomer that is engaged material is 384MPa.
(embodiment 2)
Use commercially available silicon nitride ceramics (to contain the Y as auxiliary agent 2O 3And Al 2O 3) as being engaged material.This is engaged material is that length is that 20mm, width are that 20mm, thickness are the bulk of 20mm.
Different therewith, the mode that is grouped into the one-tenth identical with being engaged material, the mixed powder of each powder of yttrium oxide and aluminum oxide has been added in modulation in the commercially available alpha-silicon nitride powders (median size is 0.5 μ m), make this mixed powder be shaped as thickness to be 100 μ m, to obtain the sheet grafting material by blowing the skill in using a kitchen knife in cookery.Scraping the skill in using a kitchen knife in cookery in each face utilization of this grafting material makes commercially available silicon metal powder (median size is 1.5 μ m) be shaped as thickness to be 50 μ m, to obtain the sheet components for joining of 3-tier architecture.It is that 20mm, width are 20mm that this sheet components for joining is of a size of length.
Make two junction surfaces that are engaged material opposite each other, and configure betwixt the sheet components for joining.Then, by with suitable pressure crimping, obtain laminate structure.This laminate structure is arranged in the firing furnace, loads weight thereon, apply the load of 0.02MPa.The temperature program(me) of burning till is that the speed with 10 ℃/minute under the nitrogen atmosphere of 0.1MPa heats up from room temperature, is heated to 1200 ℃, after keeping 2 hours under this temperature, make the nitrogen atmosphere pressure in the stove change to 0.9MPa, further heat up with 10 ℃/minute speed, be heated to 1800 ℃.After keeping this temperature to heat-treat in 6 hours, the speed cooling with 5 ℃/minute is cooled to room temperature.Obtained like this silicon nitride ceramics conjugant.
Then, in firing furnace, silicon nitride ceramics conjugant speed with 10 ℃/minute under atmosphere of utilizing weight to apply the load of 0.02MPa is heated up from room temperature, be heated to 1800 ℃.After keeping this temperature to heat-treat in 6 hours, lower the temperature with 5 ℃/minute speed, be cooled to room temperature.Obtain thus the silicon nitride ceramics conjugant of embodiment 2.
About the silicon nitride ceramics conjugant that obtains, be positioned at the mode of central part with the junction surface, cut out test film by ground finish.Use this test film, utilize the four-point bending intensity at room temperature according to JIS R1601, carry out the mensuration of bond strength, the result is shown as the bond strength of 560MPa.Four-point bending intensity as the silicon nitride ceramics monomer that is engaged material is 750MPa.
(comparative example 1)
In embodiment 1, do not make the layer that is formed by metallic aluminium be adhered to the junction surface that is engaged material.In addition, carry out the operation identical with embodiment 1.But, can't make as the alumina-ceramic that is engaged material to be engaged with each other.
(comparative example 2)
In embodiment 2, each face of the sheet-like formed body that does not form at the mixed powder that obtains by in alpha-silicon nitride powders, adding yttrium oxide and each powder of aluminum oxide form by silicon metal powder form layer.In addition, carry out the operation identical with embodiment 2.But, can't make as the silicon nitride ceramics that is engaged material to be engaged with each other.

Claims (11)

1. the manufacture method of a ceramic joined article is characterized in that,
Be engaged the grafting material that configuration between the material is formed by the sheet-like formed body of the particulate that contains this compound what the pottery by the compound of metallic element or semimetallic elements and non-metallic element formed, and be engaged the layer that configuration is formed by this metallic element simple substance or semimetallic elements simple substance between material and this grafting material, form layers lamination structural body at this;
Under the state to this laminate structure applying load, under the atmosphere of this non-metallic element or contain under the atmosphere of compound of this non-metallic element and burn till, make this laminate structure become conjugant;
At the load that applies when burning till identical or than the low load of this load under described conjugant is heat-treated.
2. the manufacture method of a ceramic joined article is characterized in that,
Be engaged the grafting material that configuration between the material is formed by the sheet-like formed body of the particulate that contains this compound what the pottery by the compound of metallic element or semimetallic elements and non-metallic element formed, and this be engaged between material and this grafting material configuration contain this metallic element simple substance or this semimetallic elements simple substance and this non-metallic element simple substance layer, the form layers lamination structural body;
Under the state to described laminate structure applying load, burn till, make this laminate structure become conjugant;
At the load that applies when burning till identical or than the low load of this load under described conjugant is heat-treated.
3. manufacture method according to claim 1, wherein, described non-metallic element is O or N, burns till under oxygen-containing atmosphere or nitrogen containing atmosphere.
4. according to claim 1 or 3 described manufacture method, wherein, will be adhered to the described junction surface that is engaged material by the described layer that metallic element simple substance or semimetallic elements simple substance form in advance.
5. manufacture method according to claim 4 wherein, will be adhered to described junction surface by the described layer that metallic element simple substance or semimetallic elements simple substance form in advance by evaporation.
6. manufacture method according to claim 2, wherein, described non-metallic element is C, described layer contains carbon simple substance.
7. the described manufacture method of any one according to claim 1 ~ 6, wherein, described metallic element is Al, Ti, Zr, Cr, Ta or Nb, described semimetallic elements is Si or B.
8. the described manufacture method of any one according to claim 1 ~ 7 wherein, is burnt till under the state of the load that described laminate structure is applied 0.01～0.5MPa.
9. the described manufacture method of any one according to claim 1 ~ 8 wherein, is set as the firing temperature that is higher than described laminate structure with the thermal treatment temp of described conjugant.
10. components for joining, it is characterized in that, each face of the grafting material that forms at the sheet-like formed body by the particulate of the compound that contains metallic element or semimetallic elements and non-metallic element disposes the layer that is formed by this metallic element simple substance or this semimetallic elements simple substance, and what be used for that pottery by this compound forms is engaged material joint each other.
11. components for joining, it is characterized in that, each face of the grafting material that forms at the sheet-like formed body by the particulate of the compound that contains metallic element or semimetallic elements and non-metallic element disposes the layer that contains this metallic element simple substance or this semimetallic elements simple substance and this non-metallic element simple substance, and what be used for that pottery by this compound forms is engaged material joint each other.
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