CN102903676B - Array substrate and manufacture method thereof, and liquid crystal display device - Google Patents
Array substrate and manufacture method thereof, and liquid crystal display device Download PDFInfo
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- CN102903676B CN102903676B CN201210405241.5A CN201210405241A CN102903676B CN 102903676 B CN102903676 B CN 102903676B CN 201210405241 A CN201210405241 A CN 201210405241A CN 102903676 B CN102903676 B CN 102903676B
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- 238000000034 method Methods 0.000 title claims abstract description 134
- 239000000758 substrate Substances 0.000 title claims abstract description 93
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 50
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 43
- 230000008569 process Effects 0.000 claims abstract description 104
- 239000010410 layer Substances 0.000 claims description 231
- 238000000059 patterning Methods 0.000 claims description 102
- 239000011241 protective layer Substances 0.000 claims description 84
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 43
- 229920002120 photoresistant polymer Polymers 0.000 claims description 43
- 238000009413 insulation Methods 0.000 claims description 35
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
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- 238000007687 exposure technique Methods 0.000 claims description 15
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- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 4
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Abstract
The invention provides an array substrate and a manufacture method thereof, and a liquid crystal display device, belonging to the field of liquid crystal display, wherein the array substrate comprises at least two display electrodes corresponding to a public electrode, and capacitors formed between the displace electrodes and the public electrode are different. The manufacture method of the array substrate comprises the step of forming the two display electrodes by adopting a once composition process. According to the technical scheme provided by the invention, the manufacture process of the array substrate can be simplified, and the manufacture cost of the array substrate is lowered.
Description
Technical field
The present invention relates to field of liquid crystal display, particularly a kind of array base palte and preparation method thereof, liquid crystal indicator.
Background technology
Liquid crystal display comprises the pixel cell designed in the matrix form, and drives the drive circuit of these pixel cells, is realized the deflection of liquid crystal molecule by the change of liquid crystal cell internal electric field, reaches display effect.
For liquid crystal display, multidomain display is the main method realizing wide viewing angle.So-called multidomain display, different fields is divided into exactly in a pixel, the degree of deflection of the liquid crystal of different field is different, when watching liquid crystal display screen from different perspectives, it is all the resultant effect of the liquid crystal deflection of the every field seen, thus reduce because the contrast difference in pixel in the identical different angles brought of all liquid crystal deflections, increase visual angle.
It is one of method realizing multidomain display that electric capacity separates multidomain technology, is namely designed by rete, in a sub-pixel, forms different liquid crystal capacitances, under same external electric field condition, electric field dividing potential drop suffered by liquid crystal is everywhere different, and deflection is different, thus forms multidomain display.
But the manufacture craft that existing employing electric capacity separates the array base palte of multidomain technology is comparatively complicated, and at least need the making that five times patterning processes just can complete array base palte, complex manufacturing technology, cost of manufacture is very high.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of array base palte and preparation method thereof, liquid crystal indicator, while realizing multidomain display, can simplify the manufacture craft of array base palte, reduce the cost of manufacture of array base palte.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme as follows:
On the one hand, provide a kind of manufacture method of array base palte, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and described manufacture method comprises: adopt a patterning processes to form two described show electrodes.
Further, in such scheme, described employing patterning processes forms two described show electrodes and comprises:
Array base palte is formed the first electrode layer and protective layer;
Described first electrode layer is utilized to form holding wire, source electrode, drain electrode, the first show electrode and the second show electrode by a patterning processes; wherein said first show electrode remains with described protective layer, removes the described protective layer on described second show electrode.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form the holding wire, source electrode, drain electrode, the first show electrode, the second show electrode and the protective layer figure that are made up of the first electrode layer; described protective layer figure covers described first show electrode, does not cover described second show electrode.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, by half exposure technique, forms silicon island figure;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form raceway groove figure and the holding wire be made up of the first electrode layer, source electrode, drain electrode and the first show electrode, the second show electrode and protective layer figure; described protective layer figure covers described first show electrode, does not cover described second show electrode.
Further, in such scheme, the thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, deposits grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes deposits gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Deposition of first electrode layer and protective layer successively on the substrate through second time patterning processes, apply photoresist on the protection layer, use half exposure technique, utilize mask plate expose the photoresist of diverse location, the photoresist rete of formation different-thickness after development;
After third time patterning processes, holding wire, source electrode, drain electrode and the first show electrode that formation is made up of the first electrode layer, the second show electrode and protective layer figure, described protective layer figure covers described first show electrode, covers a part for described second show electrode;
Substrate through third time patterning processes deposits the second electrode lay; form the 3rd show electrode by the 4th patterning processes, described 3rd show electrode is positioned at described second show electrode and covers the top of partial protection layer figure of described second show electrode.
Further, in such scheme, the thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
The thickness of described the second electrode lay is 0.05 ~ 0.1 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
The embodiment of the present invention additionally provides a kind of array base palte, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and two described show electrodes are that employing patterning processes is formed simultaneously.
Further, described two show electrodes are that employing patterning processes is formed by the first electrode layer, and the first show electrode in described two show electrodes is formed with protective layer figure.
Further; described protective layer figure also covers a part for described second show electrode; described array base palte also comprises: the 3rd show electrode formed by the second electrode lay, and described 3rd show electrode is positioned at described second show electrode and covers the top of partial protection layer figure of described second show electrode.
Further, described array base palte also comprises:
Substrate;
Be positioned at the scan line figure that described substrate is formed by grid metal level;
Be positioned at the gate insulation layer on the substrate being formed with described scan line figure;
Be positioned at silicon island and raceway groove figure that described gate insulation layer is formed by semiconductor active layer, ohmic contact layer;
Be positioned at be formed with silicon island and raceway groove figure substrate on, adopt with described two show electrodes the holding wire, source electrode, drain electrode and the protective layer figure that formed by protective layer that are formed by the first electrode layer with patterning processes.
The embodiment of the present invention additionally provides a kind of liquid crystal indicator, comprises array base palte as above.
Embodiments of the invention have following beneficial effect:
In such scheme, form two different show electrodes by patterning processes simultaneously, the electric capacity formed between each show electrode and public electrode is different, zones of different in same pixel is made to have different electric field strength under External Electrical Field, cause liquid crystal deflection degree different, formation multidomain shows, and improves display quality, reduces viewing angle dependence.Technical scheme of the present invention, while realizing multidomain display, simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
Accompanying drawing explanation
The schematic cross-section of the array base palte that Fig. 1 is the embodiment of the present invention one, embodiment two and embodiment three after first time patterning processes;
Fig. 2 is the schematic cross-section of the embodiment of the present invention one, embodiment two and the array base palte of embodiment three after second time patterning processes;
Fig. 3 is the schematic cross-section that the embodiment of the present invention one and embodiment two deposit the array base palte of the first electrode layer and protective layer;
Fig. 4 is the schematic diagram that the embodiment of the present invention a pair coating photoresist on the protection layer carries out exposing;
The schematic cross-section of the array base palte that Fig. 5 is the embodiment of the present invention after third time patterning processes;
The pixel capacitance of the array base palte that Fig. 6 is formed for the embodiment of the present invention one separates schematic diagram;
Fig. 7 is the schematic diagram that the embodiment of the present invention two exposes coating photoresist on the protection layer;
The schematic cross-section of the array base palte that Fig. 8 is the embodiment of the present invention two after third time patterning processes;
Fig. 9 is the schematic cross-section that the embodiment of the present invention two deposits the array base palte of the second electrode lay;
Figure 10 is the schematic cross-section of the array base palte of the embodiment of the present invention two after the 4th patterning processes;
The pixel capacitance of the array base palte that Figure 11 is formed for the embodiment of the present invention two separates schematic diagram;
Figure 12 is the schematic cross-section of the array base palte of the embodiment of the present invention three after second time patterning processes;
Figure 13 is the schematic cross-section that the embodiment of the present invention three deposits the array base palte of the first electrode layer and protective layer;
Figure 14 is the schematic diagram that the embodiment of the present invention three exposes coating photoresist on the protection layer;
The schematic cross-section of the array base palte that Figure 15 is the embodiment of the present invention three after third time patterning processes;
Figure 16 is that the embodiment of the present invention two pixel capacitance divides the liquid crystal multidomain deflection of cutting off schematic diagram.
Reference numeral
1 glass substrate
2 scan line figures
3 gate insulation layers
4a-Si layer
5n+a-Si layer
6 first electrode layers
7 protective layers
Light transmission part in 8 masks
Semi-transparent part in 9 masks
Lightproof part in 10 masks
11UV light
12 photoresists
13 first show electrodes
14TFT drain electrode
15TFT source electrode and holding wire
16TFT raceway groove
17 protective layer figures
18 second show electrodes
19 the second electrode lays
20 the 3rd show electrodes
21 liquid crystal molecules
22 oriented layer
23 color membrane substrates
Embodiment
For embodiments of the invention will be solved technical problem, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
Embodiments of the invention are comparatively complicated for the manufacture craft of the array base palte adopting electric capacity separation multidomain technology in prior art, at least need the making that five times patterning processes just can complete array base palte, complex manufacturing technology, the problem that cost of manufacture is very high, a kind of array base palte and preparation method thereof, display panels are provided, the manufacture craft of array base palte can be simplified, reduce the cost of manufacture of array base palte.
Embodiments provide a kind of manufacture method of array base palte, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and described manufacture method comprises: adopt a patterning processes to form two described show electrodes.
Further, in such scheme, described employing patterning processes forms two described show electrodes and comprises:
Array base palte is formed the first electrode layer and protective layer;
Described first electrode layer is utilized to form holding wire, source electrode, drain electrode, the first show electrode and the second show electrode by a patterning processes; wherein said first show electrode remains with described protective layer, removes the described protective layer on described second show electrode.
It should be noted that, in such scheme, described first show electrode and described second show electrode form pixel electrode, and are connected with described drain electrode.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form the holding wire, source electrode, drain electrode, the first show electrode, the second show electrode and the protective layer figure that are made up of the first electrode layer; described protective layer figure covers described first show electrode, does not cover described second show electrode.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, by half exposure technique, forms silicon island figure;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form raceway groove figure and the holding wire be made up of the first electrode layer, source electrode, drain electrode and the first show electrode, the second show electrode and protective layer figure; described protective layer figure covers described first show electrode, does not cover described second show electrode.
Further, in such scheme, the thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
Further, in such scheme, described manufacture method specifically comprises:
One substrate is provided, deposits grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes deposits gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Deposition of first electrode layer and protective layer successively on the substrate through second time patterning processes, apply photoresist on the protection layer, use half exposure technique, utilize mask plate expose the photoresist of diverse location, the photoresist rete of formation different-thickness after development;
After third time patterning processes, holding wire, source electrode, drain electrode and the first show electrode that formation is made up of the first electrode layer, the second show electrode and protective layer figure, described protective layer figure covers described first show electrode, covers a part for described second show electrode;
Substrate through third time patterning processes deposits the second electrode lay; form the 3rd show electrode by the 4th patterning processes, described 3rd show electrode is positioned at described second show electrode and covers above the partial protection layer figure of described second show electrode.
Further, in such scheme, the thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
The thickness of described the second electrode lay is 0.05 ~ 0.1 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
It should be noted that, in such scheme, described first electrode layer can be identical with described the second electrode lay, also can be different.Concrete, described first electrode layer and described the second electrode lay can be one deck or multilayer; Can be metal level, also can be metal oxide layer.Further, described first electrode layer can be transparent electrode layer, also can combine for transparent electrode layer and opaque electrode layer, described the second electrode lay is preferably transparent electrode layer, ensures that described first electrode layer and described the second electrode lay are transparent in viewing area.
In the embodiment of the present invention, form two different show electrodes by patterning processes simultaneously, the electric capacity formed between each show electrode and public electrode is different, different field in same pixel is made to have different electric field strength under External Electrical Field, cause liquid crystal deflection degree different, form multidomain display.Technical scheme of the present invention, while realizing multidomain display, simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
The embodiment of the present invention additionally provides a kind of array base palte, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and two described show electrodes are that employing patterning processes is formed simultaneously.
Further, described two show electrodes are that employing patterning processes is formed by the first electrode layer, and the first show electrode in described two show electrodes is formed with protective layer figure.
Further; described protective layer figure also covers a part for described second show electrode; described array base palte also comprises: the 3rd show electrode formed by the second electrode lay, and described 3rd show electrode is positioned at described second show electrode and covers the top of partial protection layer figure of described second show electrode.
Further, described array base palte also comprises: substrate;
Be positioned at the scan line figure that described substrate is formed by grid metal level;
Be positioned at the gate insulation layer on the substrate being formed with described scan line figure;
Be positioned at silicon island and raceway groove figure that described gate insulation layer is formed by semiconductor active layer, ohmic contact layer;
Be positioned at be formed with silicon island and raceway groove figure substrate on, adopt with described two show electrodes the holding wire, source electrode, drain electrode and the protective layer figure that formed by protective layer that are formed by the first electrode layer with patterning processes.
It should be noted that, in such scheme, described first electrode layer can be identical with described the second electrode lay, also can be different.Concrete, described first electrode layer and described the second electrode lay can be one deck or multilayer; Can be metal level, also can be metal oxide layer.Further, described first electrode layer can be transparent electrode layer, also can combine for transparent electrode layer and opaque electrode layer, described the second electrode lay is preferably transparent electrode layer, ensures that described first electrode layer and described the second electrode lay are transparent in viewing area.
Two show electrodes of the embodiment of the present invention are for be formed by a patterning processes simultaneously, the electric capacity formed between each show electrode and public electrode is different, zones of different in same pixel is made to have different electric field strength under External Electrical Field, cause liquid crystal deflection degree different, formation multidomain shows, improve display quality, reduce viewing angle dependence.Technical scheme of the present invention, while realizing multidomain display, simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
The embodiment of the present invention additionally provides a kind of liquid crystal indicator, comprises array base palte as above.
Below in conjunction with specific embodiment, array base palte of the present invention and preparation method thereof is described in detail:
embodiment one
The present embodiment completes the making of array base palte by three patterning processes, and realize two farmlands displays, as shown in figs 1 to 6, the present embodiment comprises the following steps:
Step a1 a: substrate 1 is provided, deposit grid metal level on substrate 1, form scan line figure 2 by first time patterning processes, form structure as shown in Figure 1, described patterning processes comprises the steps such as coating photoresist, exposure, development, etching, ashing and stripping.
Step a2: as shown in Figure 2, substrate 1 through step a1 deposits gate insulation layer 3 and semiconductor active layer, ohmic contact layer successively, particularly, semiconductor active layer can adopt a-Si layer 4, ohmic contact layer can adopt n+a-Si layer 5, forms silicon island and raceway groove 16 figure through second time patterning processes.
Wherein, the thickness of gate insulation layer 3 can be 0.2 ~ 0.5 μm; The thickness of a-Si layer 4 can be 0.15 ~ 0.25 μm; The thickness of n+a-Si layer 5 can be 0.05 ~ 0.1 μm.
Step a3: as shown in Figure 3, deposition of first electrode layer 6 and protective layer 7 successively on the substrate 1 through step a2, and photoresist 12 is applied on protective layer 7.
Wherein, the thickness of protective layer 7 is 0.3 ~ 0.6 μm, and the thickness of the first electrode layer 6 is 0.05 ~ 0.4 μm.
It should be noted that, described first electrode layer can be one deck or multilayer; Can be metal level, also can be metal oxide layer.Further, described first electrode layer can be transparent electrode layer, also can combine for transparent electrode layer and opaque electrode layer, ensures that described first electrode layer is transparent in viewing area.
Step a4: as shown in Figure 4, uses half exposure technique, utilizes the photoresist 12 of mask plate to diverse location to expose, and forms the photoresist rete of different-thickness after development.
Step a5: as shown in Figure 5; after over etching; form protective layer figure 17, holding wire and TFT source electrode figure 15, TFT drain electrode patterns 14 and the first show electrode 13, second show electrode 18 and periphery P ad district via hole (not shown), scan line is connected with peripheral circuit by via hole with holding wire.First show electrode 13 and the second show electrode 18 are formed by the first electrode layer 6; to be electrically connected with TFT drain electrode patterns 14 as pixel electrode; unlike, the first show electrode 13 also remains with protective layer figure 17, and the second show electrode does not have protective layer.
The pixel capacitance of the array base palte that Fig. 6 is formed for the present embodiment separates schematic diagram, as shown in Figure 6, in a subpixel area, has the first show electrode 13 and the second show electrode 18.In the present embodiment, public electrode is arranged on color membrane substrates, voltage between array base palte and color membrane substrates is definite value, matcoveredn figure 17 on first show electrode 13, protective layer figure 17 can divide walks a part of voltage, the voltage that liquid crystal molecule between first show electrode and public electrode is born is less than the voltage that the liquid crystal molecule between the second show electrode and public electrode bears, thus make the electric capacity formed between the first show electrode and public electrode be greater than the electric capacity formed between the second show electrode and public electrode, in a sub-pixel area, so just form two different liquid crystal capacitances respectively, under same external electric field condition, electric field dividing potential drop suffered by liquid crystal is everywhere different, deflection is different, thus multidomain display is formed.
In actual applications, can adjust the thickness of each layer as required, especially the thickness of gate insulation layer 3 and protective layer 7, thus the electric field strength reaching each several part in pixel is different, the degree of deflection of liquid crystal also has difference thereupon, the effect of adjustment multidomain display.
In the present embodiment, first show electrode and the second show electrode are for be formed by a patterning processes by same material simultaneously, by changing the dielectric material between the show electrode of the array base palte side of diverse location and color membrane substrates public electrode, the liquid crystal of same pixel different field is made to have different electric field strength under electric field driven outside, degree of deflection is different, realize multidomain display, improve display quality, reduce viewing angle dependence.The technical scheme of the present embodiment simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
embodiment two
The present embodiment completes the making of array base palte by four patterning processes, and realize three farmlands displays, as shown in Fig. 1-Fig. 3, Fig. 7-Figure 11, the present embodiment comprises the following steps:
Step b1: provide a substrate 1, deposits grid metal level on substrate 1, and form scan line figure 2 by first time patterning processes, form structure as shown in Figure 1, described patterning processes comprises the steps such as coating, exposure, development, etching, ashing and stripping.
Step b2: as shown in Figure 2, substrate 1 through step b1 deposits gate insulation layer 3 and semiconductor active layer, ohmic contact layer successively, particularly, semiconductor active layer can adopt a-Si layer 4, ohmic contact layer can adopt n+a-Si layer 5, forms silicon island and raceway groove 16 figure through second time patterning processes.
Wherein, the thickness of gate insulation layer 3 can be 0.2 ~ 0.5 μm; The thickness of a-Si layer 4 can be 0.15 ~ 0.25 μm; The thickness of n+a-Si layer 5 can be 0.05 ~ 0.1 μm.
Step b3: as shown in Figure 3, deposition of first electrode layer 6 and protective layer 7 successively on the substrate 1 through step b2, and photoresist 12 is applied on protective layer 7.
Wherein, the thickness of protective layer 7 is 0.3 ~ 0.6 μm, and the thickness of the first electrode layer 6 is 0.05 ~ 0.4 μm.
Step b4: as shown in Figure 7, uses half exposure technique, utilizes the photoresist 12 of mask plate to diverse location to expose, and forms the photoresist rete of different-thickness after development.
Step b5: as shown in Figure 8; after over etching; form protective layer figure 17, holding wire and TFT source electrode figure 15, TFT drain electrode patterns 14 and the first show electrode 13, second show electrode 18 and periphery P ad district via hole (not shown), scan line is connected with peripheral circuit by via hole with holding wire.First show electrode 13 and the second show electrode 18 are formed by the first electrode layer 6; to be electrically connected with TFT drain electrode patterns 14 as pixel electrode; unlike, the first show electrode 13 also remains with protective layer figure 17, second show electrode upper part region and there is protective layer.
Step b6: as shown in Figure 9, the substrate through step b5 deposits the second electrode lay 19, and the thickness of the second electrode lay 19 can be 0.05 ~ 0.1 μm.
It should be noted that, described first electrode layer can be identical with described the second electrode lay, also can be different.Concrete, described first electrode layer and described the second electrode lay can be one deck or multilayer; Can be metal level, also can be metal oxide layer.Further, described first electrode layer can be transparent electrode layer, also can combine for transparent electrode layer and opaque electrode layer, described the second electrode lay is preferably transparent electrode layer, ensures that described first electrode layer and described the second electrode lay are transparent in viewing area.
Step b7: as shown in Figure 10; the 3rd show electrode 20 is formed by the 4th patterning processes; 3rd show electrode 20 is positioned at the second show electrode and covers above the partial protection layer figure of the second show electrode, and the 3rd show electrode 20 is formed by the second electrode lay 19.First show electrode, the second show electrode and the 3rd show electrode form pixel electrode jointly.
The pixel capacitance of the array base palte that Figure 11 is formed for the present embodiment separates schematic diagram, Figure 16 is that the present embodiment pixel capacitance divides the liquid crystal multidomain deflection of cutting off schematic diagram, as shown in Figure 11 and Figure 16, in a subpixel area, there are the first show electrode 13, second show electrode 18 and the 3rd show electrode 20.In the present embodiment; public electrode is arranged on color membrane substrates; voltage between array base palte and color membrane substrates is definite value; size show electrode and color membrane substrates being formed electric capacity between public electrode depends on the spacing of show electrode and public electrode; in the present embodiment, the 3rd show electrode 20 is matcoveredn 17 and the second show electrode 18 below.
Can find out, first show electrode 13 and the spacing of color membrane substrates are greater than the spacing of the second show electrode 18 and color membrane substrates, the spacing of the second show electrode 18 and color membrane substrates is greater than the spacing between the 3rd show electrode 20 and color membrane substrates, because the voltage between show electrode with public electrode on color membrane substrates is equal, thus make the electric capacity formed between the first show electrode 13 and public electrode be less than the electric capacity formed between the second show electrode 18 and public electrode, the electric capacity formed between second show electrode 18 and public electrode is less than the electric capacity formed between the 3rd show electrode 20 and public electrode, in a sub-pixel area, so just form three different liquid crystal capacitances respectively, under same external electric field condition, electric field dividing potential drop suffered by liquid crystal is everywhere different, deflection is different, thus three farmland displays are formed.
In actual applications, can adjust the thickness of each layer as required, especially the thickness of gate insulation layer 3 and protective layer 7, thus the electric field strength reaching each several part in pixel is different, the degree of deflection of liquid crystal also has difference thereupon, the effect of adjustment multidomain display.
In the present embodiment, the first show electrode and the second show electrode for be formed by a patterning processes by same material simultaneously, and increase patterning processes formation the 3rd show electrode.By changing the spacing between the show electrode of the array base palte of diverse location and color membrane substrates public electrode, make the liquid crystal of same pixel different field have different electric field strength under electric field driven outside, degree of deflection is different, realizes three farmlands displays, improve display quality, reduce viewing angle dependence.The technical scheme of the present embodiment simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
embodiment three
The present embodiment completes the making of array base palte by three patterning processes, and realize three farmlands displays, as shown in Fig. 1-Fig. 2, Figure 12-Figure 15, the present embodiment comprises the following steps:
Step c1: provide a substrate 1, deposits grid metal level on substrate 1, and form scan line figure 2 by first time patterning processes, form structure as shown in Figure 1, described patterning processes comprises the steps such as coating, exposure, development, etching, ashing and stripping.
Step c2: as shown in Figure 2, the substrate 1 through step c1 deposits gate insulation layer 3 and semiconductor active layer, ohmic contact layer successively, and particularly, semiconductor active layer can adopt a-Si layer 4, and ohmic contact layer can adopt n+a-Si layer 5.
Wherein, the thickness of gate insulation layer 3 can be 0.2 ~ 0.5 μm; The thickness of a-Si layer 4 can be 0.15 ~ 0.25 μm; The thickness of n+a-Si layer 5 can be 0.05 ~ 0.1 μm.
Step c3: by half exposure technique, utilizes mask plate to expose the photoresist of diverse location, forms the photoresist rete of different-thickness after development.As shown in figure 12, first etch away the n+a-Si layer 5 of the second show electrode 18 position, a-Si layer 4 and gate insulation layer 3, then etch away the n+a-Si layer 5 in the first show electrode 13 position and other region, a-Si layer 4, form silicon island figure.
Step c4: as shown in figure 13, deposition of first electrode layer 6 and protective layer 7 successively on the substrate through step c3, wherein, the thickness of protective layer 7 is 0.3 ~ 0.6 μm, and the thickness of the first electrode layer 6 is 0.05 ~ 0.4 μm.
Step c5: as shown in figure 14, protective layer 7 applies photoresist 12.Utilize the photoresist 12 of mask plate to diverse location to expose, after development, form the photoresist rete of different-thickness.
Step c6: as shown in figure 15; after over etching; form raceway groove figure 16, protective layer figure 17, holding wire and TFT source electrode figure 15, TFT drain electrode 14 and the first show electrode 13, second show electrode 18 and periphery P ad district via hole (not shown), scan line is connected with peripheral circuit by via hole with holding wire.First show electrode 13 and the second show electrode 18 formed by the first electrode layer 6, is electrically connected with TFT drain electrode 14 as pixel electrode, unlike, the first show electrode 13 also remains with protective layer figure 17, and the second show electrode does not have protective layer.
It should be noted that, described first electrode layer can be one deck or multilayer; Can be metal level, also can be metal oxide layer.Further, described first electrode layer can be transparent electrode layer, also can combine for transparent electrode layer and opaque electrode layer, ensures that described first electrode layer is transparent in viewing area.
In the present embodiment, in a subpixel area, be formed with the first show electrode 13 and the second show electrode 18.In the present embodiment, public electrode is arranged on color membrane substrates, voltage between array base palte and color membrane substrates is definite value, in the present embodiment, matcoveredn figure 17 on first show electrode 13, protective layer figure 17 can divide walks a part of voltage, the voltage between the first show electrode and public electrode is made to be less than voltage between the second show electrode and public electrode, thus make the electric capacity formed between the first show electrode and public electrode be greater than the electric capacity formed between the second show electrode and public electrode, in a sub-pixel area, so just form two different liquid crystal capacitances respectively, under same external electric field condition, electric field dividing potential drop suffered by liquid crystal is everywhere different, deflection is different, thus multidomain display is formed, improve display quality, reduce viewing angle dependence.
Compared with embodiment one, 1, time of making of embodiment triple channel is different, example one makes when second time composition, and example three makes when third time composition, forms raceway groove, do not have alignment issues by a patterning processes; 2, example three is when second time patterning processes, last for a pixel point gate insulating film can be removed, like this when third time patterning processes, as seen from Figure 15, a below part for second show electrode 18 has gate insulating film 3(with the first show electrode 13), a part does not have gate insulating film 3, and when forming space electric field, in fact only the second show electrode 18 just can form two farmlands like this, add the first show electrode 13, three farmland displays can be realized.
In actual applications, can adjust the thickness of each layer as required, especially the thickness of gate insulation layer 3 and protective layer 7, thus the electric field strength reaching each several part in pixel is different, the degree of deflection of liquid crystal also has difference thereupon, the effect of adjustment multidomain display.
In the present embodiment, the second show electrode for be formed by a patterning processes by same material simultaneously, and by gate insulation layer figure, is formed two farmlands by the first show electrode and the second show electrode further.By changing the dielectric material between the show electrode of the array base palte side of diverse location and color membrane substrates public electrode, the liquid crystal of same pixel different field is made to have different electric field strength under electric field driven outside, degree of deflection is different, realize multidomain display, improve display quality, reduce viewing angle dependence.The technical scheme of the present embodiment simplifies the manufacture craft of array base palte, reduces the cost of manufacture of array base palte.
Above-described embodiment one to three is shown as example with two farmlands and three farmlands, describes structure and the manufacture method of array base palte of the present invention, above-described embodiment provide array base palte be applicable in the plurality of display modes such as TN, MVA.
Further, the structure of array base palte of the present invention and manufacture method are also applicable in the display modes such as IPS, FFS, be specifically described to be applied to FFS display mode below, wherein, public electrode is positioned on array base palte, and the manufacture method of the array base palte in a specific embodiment comprises the following steps:
Steps d 1: provide a substrate, substrate deposits public electrode material, and completes making common pattern of electrodes by first time patterning processes, and usually, public electrode material selection transparent electrode material, as ITO;
Steps d 2: deposit grid metal level on the substrate of completing steps d1, and complete by second time patterning processes the figure making scan line;
Steps d 3: deposit gate insulation layer, semiconductor active layer, ohmic contact layer and source and drain metal level successively on the substrate of completing steps d2, particularly, semiconductor active layer can adopt a-Si layer, ohmic contact layer can adopt n+a-Si layer, and utilize half exposure mask technique, completed making holding wire and TFT source electrode, drain electrode and raceway groove figure by third time patterning processes;
Steps d 4: deposited protective layer material on the substrate of completing steps d3, and complete making via pattern by the 4th patterning processes, in pixel, above public electrode, etching goes a part of protective layer material to reach the object on point farmland simultaneously;
Steps d 5: deposit show electrode material on the substrate of completing steps d4, and complete making show electrode figure by the 5th patterning processes.
In the present embodiment; because two regions in a sub-pixel above public electrode; the gross thickness of protective layer and gate insulation layer is inconsistent, and the Electric Field Distribution in the liquid crystal cell causing two regions corresponding is also different, forms two different liquid crystal capacitances in sub-pixel area respectively; under same external electric field condition; electric field dividing potential drop suffered by liquid crystal is everywhere different, and deflection is different, thus can reach the object on point farmland further; reduce view angle dependency, improve display quality.
It should be noted that, the present embodiment is an exemplary explanation, for horizontal component of electric field display modes such as FFS, IPS, multidomain display can have been realized by the different graphic of show electrode, the technical scheme that the present invention proposes can realize a point farmland on its basis further, in actual applications, the design of electrode can be carried out as required.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (11)
1. the manufacture method of an array base palte, it is characterized in that, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and described manufacture method comprises: adopt a patterning processes to form two described show electrodes;
Described employing patterning processes forms two described show electrodes and comprises:
Array base palte is formed the first electrode layer and protective layer;
Described first electrode layer is utilized to form holding wire, source electrode, drain electrode, the first show electrode and the second show electrode by a patterning processes; wherein said first show electrode remains with described protective layer, removes the described protective layer on described second show electrode.
2. the manufacture method of array base palte according to claim 1, is characterized in that, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form the holding wire, source electrode, drain electrode, the first show electrode, the second show electrode and the protective layer figure that are made up of the first electrode layer; described protective layer figure covers described first show electrode, does not cover described second show electrode.
3. the manufacture method of array base palte according to claim 1, is characterized in that, described manufacture method specifically comprises:
One substrate is provided, forms grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes forms gate insulation layer and semiconductor active layer, ohmic contact layer successively, by half exposure technique, forms silicon island figure;
Substrate through second time patterning processes forms the first electrode layer and protective layer successively, applies photoresist on the protection layer, use half exposure technique, utilize mask plate to expose the photoresist of diverse location, after development, form the photoresist rete of different-thickness;
After third time patterning processes; form raceway groove figure and the holding wire be made up of the first electrode layer, source electrode, drain electrode and the first show electrode, the second show electrode and protective layer figure; described protective layer figure covers described first show electrode, does not cover described second show electrode.
4. the manufacture method of the array base palte according to Claims 2 or 3, is characterized in that,
The thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
5. the manufacture method of array base palte according to claim 1, is characterized in that, described manufacture method specifically comprises:
One substrate is provided, deposits grid metal level on the substrate, form scan line figure by first time patterning processes;
Substrate through first time patterning processes deposits gate insulation layer and semiconductor active layer, ohmic contact layer successively, forms silicon island and raceway groove figure through second time patterning processes;
Deposition of first electrode layer and protective layer successively on the substrate through second time patterning processes, apply photoresist on the protection layer, use half exposure technique, utilize mask plate expose the photoresist of diverse location, the photoresist rete of formation different-thickness after development;
After third time patterning processes, holding wire, source electrode, drain electrode and the first show electrode that formation is made up of the first electrode layer, the second show electrode and protective layer figure, described protective layer figure covers described first show electrode, covers a part for described second show electrode;
Substrate through third time patterning processes deposits the second electrode lay; form the 3rd show electrode by the 4th patterning processes, described 3rd show electrode is positioned at described second show electrode and covers the top of partial protection layer figure of described second show electrode.
6. the manufacture method of array base palte according to claim 5, is characterized in that,
The thickness of described gate insulation layer is 0.2 ~ 0.5 μm;
The thickness of described protective layer is 0.3 ~ 0.6 μm;
The thickness of described first electrode layer is 0.05 ~ 0.4 μm;
The thickness of described the second electrode lay is 0.05 ~ 0.1 μm;
Described semiconductor active layer is for adopting a-Si, and described ohmic contact layer is for adopting n+a-Si, and the thickness of described a-Si layer is 0.15 ~ 0.25 μm, and the thickness of described n+a-Si layer is 0.05 ~ 0.1 μm.
7. one kind adopts the array base palte that method makes according to any one of claim 1-6, it is characterized in that, described array base palte includes at least two show electrodes corresponding with public electrode, the electric capacity formed between each show electrode and described public electrode is different, and two described show electrodes are that employing patterning processes is formed simultaneously.
8. array base palte according to claim 7, is characterized in that, described two show electrodes are that employing patterning processes is formed by the first electrode layer, and the first show electrode in described two show electrodes is formed with protective layer figure.
9. array base palte according to claim 8; it is characterized in that; described protective layer figure also covers a part for described second show electrode; described array base palte also comprises: the 3rd show electrode formed by the second electrode lay, and described 3rd show electrode is positioned at described second show electrode and covers the top of partial protection layer figure of described second show electrode.
10. array base palte according to claim 7, is characterized in that, described array base palte also comprises:
Substrate;
Be positioned at the scan line figure that described substrate is formed by grid metal level;
Be positioned at the gate insulation layer on the substrate being formed with described scan line figure;
Be positioned at silicon island and raceway groove figure that described gate insulation layer is formed by semiconductor active layer, ohmic contact layer;
Be positioned at be formed with silicon island and raceway groove figure substrate on, adopt with described two show electrodes the holding wire, source electrode, drain electrode and the protective layer figure that formed by protective layer that are formed by the first electrode layer with patterning processes.
11. 1 kinds of liquid crystal indicators, is characterized in that, comprise the array base palte according to any one of claim 7-10.
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| US6525794B1 (en) * | 1998-10-19 | 2003-02-25 | Lg. Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device having a dielectric frame controlling alignment of the liquid crystal molecules |
| US6900869B1 (en) * | 1998-11-25 | 2005-05-31 | Lg. Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device with particular dielectric structures |
| CN101211076A (en) * | 2006-12-29 | 2008-07-02 | 群康科技(深圳)有限公司 | Multi-domain vertical alignment -type liquid crystal display panel |
| CN101253611A (en) * | 2005-09-30 | 2008-08-27 | 夏普株式会社 | Thin film transistor array substrate fabrication method and thin film transistor array substrate |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6525794B1 (en) * | 1998-10-19 | 2003-02-25 | Lg. Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device having a dielectric frame controlling alignment of the liquid crystal molecules |
| US6900869B1 (en) * | 1998-11-25 | 2005-05-31 | Lg. Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device with particular dielectric structures |
| CN101253611A (en) * | 2005-09-30 | 2008-08-27 | 夏普株式会社 | Thin film transistor array substrate fabrication method and thin film transistor array substrate |
| CN101211076A (en) * | 2006-12-29 | 2008-07-02 | 群康科技(深圳)有限公司 | Multi-domain vertical alignment -type liquid crystal display panel |
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