CN102815664A - Flexible tubular microelectrode and preparation method thereof - Google Patents
Flexible tubular microelectrode and preparation method thereof Download PDFInfo
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- CN102815664A CN102815664A CN2012102740209A CN201210274020A CN102815664A CN 102815664 A CN102815664 A CN 102815664A CN 2012102740209 A CN2012102740209 A CN 2012102740209A CN 201210274020 A CN201210274020 A CN 201210274020A CN 102815664 A CN102815664 A CN 102815664A
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Abstract
The invention discloses a flexible tubular microelectrode and a preparation method thereof. The preparation method comprises the following steps of: firstly, cutting a section of a polymer capillary; secondly, sputtering a metal layer on the surface of the polymer capillary; thirdly, deposing a polymer on the surface of the capillary as an electrode insulation layer; and at last, etching the polymer insulation layer on the surface of the capillary by utilizing laser, and exposing a metal electrode point to obtain the tubular microelectrode. According to the flexible tubular microelectrode prepared by the invention, when electric simulation and electrographic recording are carried out on a physiological tissue by the electrode, a fluid medicine is transported to a tissue organ by a microtubule channel, and a flexible micro-size is beneficial for test or experiment operation and production of an embedded medical device.
Description
Technical field
What the present invention relates to is the microelectrode in a kind of biomedical engineering technology field and preparation method thereof, specifically is a kind of flexible tubular microelectrode and preparation method thereof.
Background technology
(functional electrical stimulation, FES) Medical Devices skimulated motion nerve applies electro photoluminescence help paralysed patient recovery muscle to the specific muscle crowd and rebuilds and do rehabilitation training to utilize functional electrical stimulation.But, only muscle is carried out functional electrical stimulation and can cause organizing the finally necrosis of atrophy owing to malnutrition gradually because muscle is stretched by the domination of the kinesitherapy nerve signal of telecommunication not only, and need obtain necessary nutriment from nerve cell.The flexible tubular microelectrode can carry out functional electrical stimulation to the muscle position of paralysis, simultaneously microfluid administration neuralward or musculature conveying desired nutritional and medicine are carried out in the paralysis position, and flexible small size electrode is beneficial to accurate operation and implantation.
Retrieval through to the prior art document is found; Jessin John, YuefaLi etc. write articles " Microfabrication of 3D neural probes with combined electrical and chemical interfaces " (" combining little manufacturing of the 3D nerve probe of electricity and chemical interface " " micromechanics and little engineering periodical ") at JOURNAL OF MICROMECHANICS AND MICROENGINEERING.21 (2011) 105011.A kind of 3D electrod-array nerve probe and manufacturing technology of novel integrated micro-channels have been mentioned in the document.Manufacturing is integrated in the fluid channel on the 3D nerve electrode to this technology with deposition Parylene sealing technology through xenon difluoride gas isotropic etching silicon substrate.Its shortcoming is that the rigidity nerve electrode that uses silicon substrate to make should not be used in implantable medical device, and is prone to cause tissue damage; Its process for making is comparatively complicated, and the electrode cost of manufacture is high.
Summary of the invention
The present invention is directed to the above-mentioned deficiency that prior art exists, a kind of flexible tubular microelectrode and preparation method thereof is provided.The tubulose microelectrode can carry out bioelectric stimulation or electrographic while, through pipeline to tissue fixed point fluids administration; Electrode is beneficial to and makes and be integrated in implantable medical device based on flexible biocompatible materials.Manufacture process of the present invention is simple simultaneously, this tubulose microelectrode of method preparation that adopts sputter, deposition and laser ablation to combine, and the simple cost of its technology is low, is easy to customize the electrode structure size so that realize difference in functionality.
The present invention realizes through following technical scheme:
The preparation method of flexible tubular microelectrode of the present invention is specially: intercepting one-step polymerization thing capillary at first; Then at polymer capillary surface sputtering metal level; Follow at the capillary surface deposited polymer as electrode dielectric layer; Use laser ablation capillary surface polymer insulation layer at last, expose the metal electric limit, obtain the tubulose microelectrode.
Further, said method comprising the steps of:
The first step, intercepting one-step polymerization thing capillary are at its surface sputtering metal level.
Said polymer capillary is polyimides capillary, polytetrafluoroethylene capillary, PET capillary and polyethylene capillary; Its external diameter is 0.1～1 millimeter; The polymer capillary material is biocompatible material, and fine dimension guarantees that its soft pliable is bent.
Said metal at the polymer capillary surface sputtering specifically is meant gold, platinum, iridium, titanium/tungsten/gold, titanium/tungsten/platinum or titanium/tungsten/iridium, and splash-proofing sputtering metal thickness is 100～200 nanometers, is the electrodes conduct passage layers, and surperficial precious metal material is difficult for being corroded and goes bad.
Second the step, on the polymer capillary of surface sputtering metal level deposited polymer as electrode dielectric layer.
Said insulating barrier polymer is Parylene or polyimides, is biocompatible material.
Said deposition process specifically is meant vapour deposition or coating.
Said insulating barrier, deposit thickness is 3～10 microns, makes the insulation of electrodes conduct path.。
The 3rd goes on foot, utilizes laser to etch away surperficial polymer insulation layer in appointed part, exposes the metal electric limit, processes the tubulose microelectrode.
Said laser ablation uses optical maser wavelength to be less than or equal to 355 nanometers, and the etching width is 10～100 microns, makes electrode points have good spatial selectivity, and fully contacts with tissue.
The flexible tubular microelectrode that said method of the present invention obtains is made up of splash-proofing sputtering metal layer, the outermost polymer insulation layer in the polymer pipe layer of innermost layer, intermediate layer and electrode points position four parts of removing polymer insulation layer.The polymer pipe layer of innermost layer is the structure sheaf of flexible tubular microelectrode, and its inner hollow pipeline is the fluid passage.Intermediate metal layer covers the polymer capillary surface with the mode of sputter, forms the electrodes conduct path.Outermost polymer insulation layer is the surface insulation layer of flexible tubular microelectrode, uses the mode of vapour deposition or coating to be connected with the splash-proofing sputtering metal layer of internal layer.The electrode points position of removing polymer insulation layer is the electrode points of flexible tubular microelectrode, removes surface aggregate thing insulating barrier through laser ablation and exposes the formation of splash-proofing sputtering metal layer.
The present invention adopts sputter, deposition and laser etching method to make the flexible tubular microelectrode, and compared with prior art, its advantage is: the technical process that makes the flexible tubular microelectrode is simple, and cost is low; Use the flexible polymer capillary to be difficult for causing tissue damage, be beneficial to processing and integrated implantable medical device; Sedimentary organism compatible polymeric material is as insulating barrier, and it has good biocompatibility and combines firmly; Laser ablation is electrode points shape and size accurately; Flexible tubular microelectrode integrated level is high, and customizable different materials, electrode are counted multiple electrode type with dimensional parameters to satisfy different demands.
Description of drawings
Fig. 1 is embodiment 1 sketch map.
Fig. 2 is embodiment 2 sketch mapes.
Fig. 3 is embodiment 3 sketch mapes.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment being to implement under the prerequisite with technical scheme of the present invention.
Embodiment 1
As shown in Figure 1, present embodiment prepares according to the following steps:
1. the intercepting external diameter is 0.1 millimeter a polyimides capillary, in deionized water, uses ultrasonic oscillation to clean;
2. in capillary surface sputtered titanium/tungsten/gold layer 100～200 nanometer, wherein titanium/tungsten layer 30 nanometers are tack coat;
3. 3～10 microns of the capillary surface chemical vapour deposition (CVD) Parylene insulating barriers of splash-proofing sputtering metal layer;
4. using wavelength is that 266 nanometer lasers etch away surface insulation layer at privileged site of capillary, and the etching width is 10～100 microns, exposes the metal level electrode points, obtains the polyimide tube gold microelectrode of an electrode points.
Embodiment 2
As shown in Figure 2, present embodiment prepares according to the following steps:
1. the intercepting external diameter is 0.3 millimeter a polyimides capillary, in deionized water, uses ultrasonic oscillation to clean;
2. in capillary surface sputtered titanium/tungsten/platinum layer 100～200 nanometers, wherein titanium/tungsten layer 30 nanometers are tack coat;
3. 3～10 microns of the capillary surface coating polyimide insulating barriers of splash-proofing sputtering metal layer;
4. using wavelength is that 266 nanometer lasers etch away surface insulation layer at two privileged sites of capillary, and the etching width is 10～100 microns, exposes the metal level electrode points, obtains the polyimide tube platinum microelectrode of two electrode points.
Embodiment 3
As shown in Figure 3, present embodiment prepares according to the following steps:
1. the intercepting external diameter is 0.3 millimeter a polytetrafluoroethylene capillary, in deionized water, uses ultrasonic oscillation to clean;
2. in capillary surface sputtered titanium/tungsten/platinum layer 100～200 nanometers, wherein titanium/tungsten layer 30 nanometers are tack coat;
3. 3～10 microns of the capillary surface chemical vapour deposition (CVD) Parylene insulating barriers of splash-proofing sputtering metal layer;
4. using wavelength is that 266 nanometer lasers etch away surface insulation layer at four privileged sites of capillary, and the etching width is 10～100 microns, exposes the metal level electrode points, obtains the polyfluortetraethylene pipe platinum microelectrode of four electrode points.
Should be understood that more than be part embodiment of the present invention, the present invention also can realize through changing following implementation condition equally:
Described polymer capillary specifically is meant in polyimides capillary, polytetrafluoroethylene capillary, PET capillary and the polyethylene capillary a kind of, and the polymer capillary external diameter is 0.1～1 millimeter.
Described metal at the polymer capillary surface sputtering specifically is meant gold, platinum, iridium, titanium/tungsten/gold, titanium/tungsten/platinum or titanium/tungsten/iridium.
Described deposited polymer insulating barrier specifically is meant vapor phase deposition Parylene or coating polyimide, and deposit thickness is 3～10 microns.
Described optical maser wavelength is less than or equal to 355 nanometers, and the etching width is 10～100 microns.
Adopt the method can prepare the flexible tubular microelectrode; This hollow edged electrode can carry out electro photoluminescence and electrographic while in electrode pair physiological tissue; Carry fluid medicine through canalicular to histoorgan, and flexible micro-dimension is beneficial to test or experimental implementation and processes implantable medical device.It is simple that the present invention simultaneously prepares process; This tubulose microelectrode of method preparation that adopts splash-proofing sputtering metal, deposited polymer and laser ablation to combine; Its cost is low and be convenient to manufacture, and electrode material, size and pattern can customize according to demand, is beneficial to and popularizes with integrated.
Although content of the present invention has been done detailed introduction through above-mentioned preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple modification of the present invention with to substitute all will be conspicuous.Therefore, protection scope of the present invention should be limited appended claim.
Claims (12)
1. the preparation method of a flexible tubular microelectrode is characterized in that, may further comprise the steps:
The first step, intercepting one-step polymerization thing capillary are at its surface sputtering metal level;
Second step, at the capillary surface deposited polymer insulating barrier of splash-proofing sputtering metal layer;
The 3rd step, use laser etch away the capillary surface polymer insulation layer in appointed part, expose the metal level electrode points, obtain the tubulose microelectrode.
2. the preparation method of flexible tubular microelectrode according to claim 1; It is characterized in that described polymer capillary specifically is meant in polyimides capillary, polytetrafluoroethylene capillary, PET capillary and the polyethylene capillary a kind of.
3. the preparation method of flexible tubular microelectrode according to claim 1 and 2 is characterized in that, described polymer capillary external diameter is 0.1～1 millimeter.
4. the preparation method of flexible tubular microelectrode according to claim 1; It is characterized in that; Described metal at the polymer capillary surface sputtering specifically is meant gold, platinum, iridium, titanium/tungsten/gold, titanium/tungsten/platinum or titanium/tungsten/iridium; Splash-proofing sputtering metal thickness is 100～200 nanometers, is the electrodes conduct passage layers, and surperficial precious metal material is difficult for being corroded and goes bad.
5. the preparation method of flexible tubular microelectrode according to claim 1 is characterized in that, described deposited polymer insulating barrier specifically is meant vapor phase deposition Parylene or coating polyimide.
6. according to the preparation method of claim 1 or 5 described flexible tubular microelectrodes, it is characterized in that described deposited polymer insulating layer deposition thickness is 3～10 microns.
7. the preparation method of flexible tubular microelectrode according to claim 1 is characterized in that, described optical maser wavelength is less than or equal to 355 nanometers, and the etching width is 10～100 microns.
8. flexible tubular microelectrode that adopts the said method of claim 1-7 to obtain is characterized in that: said microelectrode is made up of splash-proofing sputtering metal layer, the outermost polymer insulation layer in the polymer pipe layer of innermost layer, intermediate layer and the electrode points position of removing polymer insulation layer.
9. flexible tubular microelectrode according to claim 8 is characterized in that, the polymer pipe layer of said innermost layer is the structure sheaf of flexible tubular microelectrode, and its inner hollow pipeline is the fluid passage.
10. flexible tubular microelectrode according to claim 8 is characterized in that, the splash-proofing sputtering metal layer in said intermediate layer is the conductive path of flexible tubular microelectrode, uses the mode of sputter to be connected with the polymer pipe layer of internal layer.
11. flexible tubular microelectrode according to claim 8 is characterized in that, said outermost polymer insulation layer is the surface insulation layer of flexible tubular microelectrode, uses the mode of vapour deposition or coating to be connected with the splash-proofing sputtering metal layer of internal layer.
12. flexible tubular microelectrode according to claim 8 is characterized in that, said electrode points position of removing polymer insulation layer is the electrode points of flexible tubular microelectrode, removes surface aggregate thing insulating barrier through laser ablation and exposes the formation of splash-proofing sputtering metal layer.
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Cited By (7)
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| CN103271736A (en) * | 2013-05-06 | 2013-09-04 | 无锡交大联云科技有限公司 | Flexible capacitive electrocardio dry electrode and manufacturing method thereof |
| CN104034773A (en) * | 2014-06-20 | 2014-09-10 | 首都师范大学 | Gold film microelectrode array and manufacture method thereof |
| CN104340956A (en) * | 2014-09-29 | 2015-02-11 | 上海交通大学 | Implantable multi-channel flexible microtube electrode and preparation method thereof |
| CN105428488A (en) * | 2015-12-28 | 2016-03-23 | 上海交通大学 | Light-stimulated neural electrode device based on golden wire ball bonding method and manufacturing method thereof |
| CN105675682A (en) * | 2015-12-28 | 2016-06-15 | 中国人民大学 | Size-controllable nanowire microelectrode, preparation method and application thereof |
| CN111330155A (en) * | 2020-03-11 | 2020-06-26 | 微智医疗器械有限公司 | Implant device, packaging method and cerebral cortex stimulation visual prosthesis |
| CN111841673A (en) * | 2020-07-20 | 2020-10-30 | 厦门大学 | Micro-channel structure capable of being directly inserted into microelectrode, and preparation method and application thereof |
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| US20060282014A1 (en) * | 2005-06-14 | 2006-12-14 | The Regents Of The University Of Michigan | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
| CN1911470A (en) * | 2006-07-28 | 2007-02-14 | 中国科学院上海微系统与信息技术研究所 | Implantation micro-electrode having integrated medicinal agent releasing function, its manufacturing method and application |
| WO2007042999A2 (en) * | 2005-10-07 | 2007-04-19 | Neuronexus Technologies | Modular multichannel microelectrode array and methods of making same |
| CN101785904A (en) * | 2010-01-14 | 2010-07-28 | 上海交通大学 | Method for preparing metal wire biological microelectrode |
| CN102178998A (en) * | 2011-04-29 | 2011-09-14 | 上海交通大学 | Contact lens type flexible microelectrode for recovery of facial paralysis |
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Patent Citations (5)
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| US20060282014A1 (en) * | 2005-06-14 | 2006-12-14 | The Regents Of The University Of Michigan | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
| WO2007042999A2 (en) * | 2005-10-07 | 2007-04-19 | Neuronexus Technologies | Modular multichannel microelectrode array and methods of making same |
| CN1911470A (en) * | 2006-07-28 | 2007-02-14 | 中国科学院上海微系统与信息技术研究所 | Implantation micro-electrode having integrated medicinal agent releasing function, its manufacturing method and application |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103271736A (en) * | 2013-05-06 | 2013-09-04 | 无锡交大联云科技有限公司 | Flexible capacitive electrocardio dry electrode and manufacturing method thereof |
| CN104034773A (en) * | 2014-06-20 | 2014-09-10 | 首都师范大学 | Gold film microelectrode array and manufacture method thereof |
| CN104034773B (en) * | 2014-06-20 | 2017-02-01 | 首都师范大学 | Gold film microelectrode array and manufacture method thereof |
| CN104340956A (en) * | 2014-09-29 | 2015-02-11 | 上海交通大学 | Implantable multi-channel flexible microtube electrode and preparation method thereof |
| CN105428488A (en) * | 2015-12-28 | 2016-03-23 | 上海交通大学 | Light-stimulated neural electrode device based on golden wire ball bonding method and manufacturing method thereof |
| CN105675682A (en) * | 2015-12-28 | 2016-06-15 | 中国人民大学 | Size-controllable nanowire microelectrode, preparation method and application thereof |
| CN105428488B (en) * | 2015-12-28 | 2018-04-17 | 上海交通大学 | A kind of light stimulus nerve electrode device based on gold wire ball welding method and preparation method thereof |
| CN105675682B (en) * | 2015-12-28 | 2019-03-26 | 中国人民大学 | A kind of nano wire microelectrode and the preparation method and application thereof that size is controllable |
| CN111330155A (en) * | 2020-03-11 | 2020-06-26 | 微智医疗器械有限公司 | Implant device, packaging method and cerebral cortex stimulation visual prosthesis |
| CN111841673A (en) * | 2020-07-20 | 2020-10-30 | 厦门大学 | Micro-channel structure capable of being directly inserted into microelectrode, and preparation method and application thereof |
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