CN102809813B - 显示装置 - Google Patents
显示装置 Download PDFInfo
- Publication number
- CN102809813B CN102809813B CN201210179290.1A CN201210179290A CN102809813B CN 102809813 B CN102809813 B CN 102809813B CN 201210179290 A CN201210179290 A CN 201210179290A CN 102809813 B CN102809813 B CN 102809813B
- Authority
- CN
- China
- Prior art keywords
- substrate
- contact hole
- display device
- pillar
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-124802 | 2011-06-03 | ||
JP2011124802A JP5727303B2 (ja) | 2011-06-03 | 2011-06-03 | 表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102809813A CN102809813A (zh) | 2012-12-05 |
CN102809813B true CN102809813B (zh) | 2015-07-29 |
Family
ID=47233552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210179290.1A Expired - Fee Related CN102809813B (zh) | 2011-06-03 | 2012-06-01 | 显示装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9128287B2 (zh) |
JP (1) | JP5727303B2 (zh) |
CN (1) | CN102809813B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140225904A1 (en) * | 2013-02-13 | 2014-08-14 | Pixtronix, Inc. | Shutter assemblies fabricated on multi-height molds |
KR20170069806A (ko) * | 2015-12-11 | 2017-06-21 | 현대자동차주식회사 | 멤스센서의 제조방법 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001328144A (ja) | 2000-05-22 | 2001-11-27 | Mitsubishi Plastics Ind Ltd | 多数の貫通穴を有する成形品の製造金型 |
US6711317B2 (en) * | 2001-01-25 | 2004-03-23 | Lucent Technologies Inc. | Resiliently packaged MEMs device and method for making same |
US7781850B2 (en) | 2002-09-20 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
US7417782B2 (en) | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
JP4489393B2 (ja) | 2003-08-21 | 2010-06-23 | オリンパス株式会社 | 半導体装置 |
US7289259B2 (en) * | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
MX2007003584A (es) * | 2004-09-27 | 2007-05-23 | Idc Llc | Control de comportamiento electromecanico de estruturas dentro de un dispositivo de sistemas microelectromecanicos. |
US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
CA2599579C (en) | 2005-02-23 | 2013-11-26 | Pixtronix, Inc. | A display utilizing a control matrix to control movement of mems-based light modulators |
US7405852B2 (en) | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
JP4616890B2 (ja) * | 2005-02-23 | 2011-01-19 | ピクストロニクス,インコーポレイテッド | ディスプレイを作動させるための方法および装置 |
KR20080040715A (ko) * | 2005-07-22 | 2008-05-08 | 콸콤 인코포레이티드 | Mems 장치를 위한 지지 구조물 및 그 방법들 |
JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
CN101673129B (zh) * | 2008-09-08 | 2011-06-22 | 鸿富锦精密工业(深圳)有限公司 | 主板及应用于其上的pci卡 |
JP2010181648A (ja) * | 2009-02-05 | 2010-08-19 | Olympus Corp | マイクロミラーデバイス |
-
2011
- 2011-06-03 JP JP2011124802A patent/JP5727303B2/ja not_active Expired - Fee Related
-
2012
- 2012-05-30 US US13/483,089 patent/US9128287B2/en not_active Expired - Fee Related
- 2012-06-01 CN CN201210179290.1A patent/CN102809813B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20120307333A1 (en) | 2012-12-06 |
JP2012252171A (ja) | 2012-12-20 |
US9128287B2 (en) | 2015-09-08 |
CN102809813A (zh) | 2012-12-05 |
JP5727303B2 (ja) | 2015-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Tokyo, Japan Applicant after: JAPAN DISPLAY Inc. Address before: Chiba County, Japan Applicant before: Japan Display East Inc. Address after: Chiba County, Japan Applicant after: Japan Display East Inc. Address before: Chiba County, Japan Applicant before: Hitachi Displays, Ltd. |
|
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: HITACHI DISPLAY CO., LTD. TO: APAN DISPLAY EAST, INC. Free format text: CORRECT: APPLICANT; FROM: APAN DISPLAY EAST, INC. TO: JAPAN DISPLAY, INC. |
|
ASS | Succession or assignment of patent right |
Owner name: PIXTRONIX INC. Free format text: FORMER OWNER: JAPAN DISPLAY, INC. Effective date: 20131021 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20131021 Address after: California, USA Applicant after: PIXTRONIX, Inc. Address before: Tokyo, Japan Applicant before: JAPAN DISPLAY Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170122 Address after: California, USA Patentee after: EPCOS AG Address before: California, USA Patentee before: Pixtronix, Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150729 Termination date: 20170601 |
|
CF01 | Termination of patent right due to non-payment of annual fee |