CN102809400A - Gas meter - Google Patents

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Publication number
CN102809400A
CN102809400A CN2011101574599A CN201110157459A CN102809400A CN 102809400 A CN102809400 A CN 102809400A CN 2011101574599 A CN2011101574599 A CN 2011101574599A CN 201110157459 A CN201110157459 A CN 201110157459A CN 102809400 A CN102809400 A CN 102809400A
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China
Prior art keywords
gas
sensing unit
meter
gas flow
flow rate
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CN2011101574599A
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Chinese (zh)
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CN102809400B (en
Inventor
黄忠
董胜龙
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Huludao Xinao Gas Development Co., Ltd.
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ENN Science and Technology Development Co Ltd
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Priority to CN201110157459.9A priority Critical patent/CN102809400B/en
Priority claimed from CN201110157459.9A external-priority patent/CN102809400B/en
Priority to PCT/CN2012/076352 priority patent/WO2012163285A1/en
Publication of CN102809400A publication Critical patent/CN102809400A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/662Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/667Arrangements of transducers for ultrasonic flowmeters; Circuits for operating ultrasonic flowmeters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/07Integration to give total flow, e.g. using mechanically-operated integrating mechanism
    • G01F15/075Integration to give total flow, e.g. using mechanically-operated integrating mechanism using electrically-operated integrating means

Abstract

The invention discloses a gas meter. The gas meter comprises a gas flow velocity sensing unit, an ADC (Analog-to-Digital Conversion) unit and a main control unit, wherein the gas flow velocity sensing unit is used for converting a gas flow velocity into a voltage signal by adopting a silicon crystal diaphragm mode; the ADC unit is connected with the gas flow velocity sensing unit and is used for collecting the voltage signal which is converted by the gas flow velocity sensing unit and carrying out ADC on the voltage signal; and the main control unit is connected with the ADC unit and is used for restoring the gas flow velocity according to the voltage signal after the conversion of the ADC unit, collecting interval time according to restored gas flow velocity and the voltage signal and obtaining an accumulated gas flow. According to the gas meter disclosed by the invention, a silicon microphone is adopted as a sensing unit, the silicon microphone is very sensitive to the variation of external pressure and is stable, and thus the accuracy of the gas meter can be greatly increased by adopting the silicon microphone as the sensing unit.

Description

Gas meter, flow meter
Technical field
The present invention relates to microelectromechanical systems (Micro-Electro & Mechanical System is called for short MEMS) field, relate in particular to a kind of gas meter, flow meter.
Background technology
There are mechanical type gas meter, flow meter and electronic gas table in domestic gas meter field, existing gas meter, flow meter.The mechanical gas table is representative with mechanical diaphragm gas meter; The electronic gas table is representative with the ultrasonic wave gas meter.
For mechanical diaphragm gas meter, when the combustion gas of flowing during, receive stopping of pipeline friction and mechanism through gas meter, flow meter, inner combustion gas meeting is imported and exported two ends at gas meter, flow meter and is produced pressure differential.The diaphragm that this pressure differential promotes diaphragm gas meter moves in measurement chamber; And drive valve actuating mechanism and coordinate distribution; Make that the motion of diaphragm can reciprocal continuously carrying out; Diaphragm gas meter is transformed into circular motion to straight reciprocating motion through inner physical construction, drives the mechanical rollers counter through circular motion again and rotates; Diaphragm whenever makes a round trip, and just discharges a certain amount of combustion gas, and final roller turns over a technical unit, realizes roller rotation metering display effect.Owing to adopt mechanical drive principle, mechanical diaphragm gas meter measuring accuracy depends on part manufacturing and assembling fine setting, and measuring accuracy is not high, and discreteness is bigger; Mechanical part has wearing and tearing as time passes, causes measuring accuracy to descend in time, and the time, long more error was obvious more; Because the combustion gas volume is with temperature variation, the measuring error that temperature causes is big.
For ultrasonic wave gas meter, adopt time difference method to measure more.Fig. 1 is the synoptic diagram of prior art ultrasonic wave gas flow measurement principle of the present invention.As shown in Figure 1; In the middle of the ultrasonic wave gas flow measurement; Utilize a pair of ultrasonic transducer to replace (or simultaneously) transmitting-receiving ultrasound wave in opposite directions; Come to measure indirectly flow rate of fluid through the following current and the adverse current propagation time difference of observation ultrasound wave in medium, at a kind of indirect measurement method that comes calculated flow rate through flow velocity.Ultrasonic wave gas meter is to straight length strict (preceding 20D, back 5D), otherwise discreteness is big, and measuring accuracy is poor; The uncertainty of installing can be brought than mistake to flow measurement; Measuring channel fouling meeting has a strong impact on accuracy of measurement; Serviceable life is short, and precision generally can only keep 1 year.In addition, the ultrasonic transmitter-receiver cost is more expensive.
In realizing process of the present invention, the inventor recognizes that there is following defective in prior art: existing gas meter, flow meter measuring accuracy is poor, cost high, volume is big.
Summary of the invention
The technical matters that (one) will solve
To the problems referred to above, the present invention proposes a kind of gas meter, flow meter, to improve measuring accuracy, to reduce cost, reduce volume.
(2) technical scheme
The invention discloses a kind of gas meter, flow meter.This device comprises: gas flow rate sensing unit, AD conversion unit and main control unit; Wherein: the gas flow rate sensing unit is used to adopt the silicon wafer diaphragm mode to convert gas flow rate into voltage signal; AD conversion unit is connected with the gas flow rate sensing unit, is used to gather the voltage signal of gas flow rate sensing unit conversion, and this voltage signal is carried out analog to digital conversion; Main control unit is connected with AD conversion unit, is used for according to the reduction of the voltage signal after AD conversion unit conversion gas flow rate, and according to the gas flow rate after the reduction and voltage signal acquisition interval time, obtains totally gas flow.
Preferably, in the present technique scheme, gas meter, flow meter also comprises: the temperature transition that temperature sensing unit, this temperature sensing unit are used for the combustion gas environment is an electric signal; Static pressure sensing unit, this air pressure sensing unit are used for converting the static pressure of combustion gas environment into electric signal; AD conversion unit is connected with temperature sensing unit, is used for the timing acquiring electric signal, and this electric signal is carried out analog to digital conversion, and electric signal comprises electric signal that reflects temperature and the electric signal that reflects static pressure; Main control unit is used for according to the AD conversion unit electrical signal converted, obtains the temperature information and the static pressure information of combustion gas environment, and according to temperature information, static pressure information gas flow rate is calibrated.
Preferably, in the present technique scheme, said gas meter, flow meter also comprises analog switch; This analog switch is positioned at the front end of said AD conversion unit, is used for carrying out selectivity according to preset period of time and opens/close, and supplies said AD conversion unit to be connected with gas flow rate sensing unit, temperature sensing unit, static pressure sensing unit respectively according to preset period of time.
Preferably, in the present technique scheme, the gas flow rate sensing unit is arranged at the direction of facining the wind of rodmeter; Temperature sensing unit and static pressure sensing unit are arranged in the cavity of rodmeter, and cavity is communicated with the combustion gas environmental facies through the air hole of rodmeter back of the body gas face.Preferably, in the present technique scheme, temperature sensing unit is a thermistor; The static pressure sensing unit is the MEMS pressure transducer.
Preferably; In the present technique scheme; The gas flow rate sensing unit comprises capacitance silicon microphone and bleeder circuit subelement; Wherein: the capacitance silicon microphone, be connected with AD conversion unit with the bleeder circuit subelement respectively, be used to adopt the silicon wafer vibrating diaphragm to convert gas flow rate into corresponding impedance signal; The bleeder circuit subelement is connected with the capacitance silicon microphone, is used for converting the mode of impedance signal through dividing potential drop into voltage signal.
Preferably, in the present technique scheme, the capacitance silicon microphone is used for converting gas flow rate into corresponding impedance signal through the DC coupling mode.The grounded drain of capacitance silicon microphone, source electrode is connected with AD conversion unit with the bleeder circuit subelement.
(3) beneficial effect
The present invention has following beneficial effect:
(1) variation of pressure is very responsive and stable to external world for silicon microphone, so the present invention adopts silicon microphone will greatly improve the precision of gas meter, flow meter as sensing unit;
(2) silicon microphone of employing microelectron-mechanical manufacturing process, volume is little, and the MEMS technology is very ripe, and the present invention realizes that cost is low;
(3) gas meter, flow meter of the present invention has increased the compensation mechanism of temperature and static pressure, has further improved the precision of gas meter, flow meter.
Description of drawings
Fig. 1 is the synoptic diagram of prior art ultrasonic wave gas flow measurement principle of the present invention;
Fig. 2 is the enlarged drawing of silicon wafer vibrating membrane in the silicon microphone of the present invention;
Fig. 3 is the diagrammatic cross-section of semiconductor silicon microphone of the present invention;
Fig. 4 is the circuit diagram of semiconductor silicon microphone of the present invention;
Fig. 5 is the synoptic diagram of embodiment of the invention gas meter, flow meter;
Fig. 6 adopts the synoptic diagram of the silicon microphone sensing unit of DC coupling mode for embodiment of the invention gas meter, flow meter;
Fig. 7 is the structural representation of embodiment of the invention gas meter, flow meter;
Fig. 8 a is the back view of embodiment of the invention gas meter, flow meter related sensor bar;
Fig. 8 b is the sectional view of embodiment of the invention gas meter, flow meter related sensor bar;
Fig. 8 c is the outboard profile of embodiment of the invention gas meter, flow meter related sensor bar;
Fig. 9 is the workflow diagram of embodiment of the invention gas meter, flow meter.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
Below will set forth in detail the principle that the present invention adopts silicon microphone to carry out the gas flow rate induction.According to gas flow rate-blast relation that Bernoulli equation draws, the dynamic pressure that gas flow rate produces is:
w p=0.5·r o·v 2 (2)
W wherein pBe blast [kN/m 2], r oBe gas density [kg/m 3], v is gas flow rate [m/s].Can know by formula (2), as gas density r oWhen known, blast w pJust only relevant with gas flow rate v.
Fig. 2 is the enlarged drawing of silicon wafer vibrating membrane in the silicon microphone of the present invention.As shown in Figure 2,, the silicon wafer vibrating diaphragm produces deformation when being under pressure, and the extent of deformation and the size of pressure are monotonic relationshi.In conjunction with silicon wafer vibrating diaphragm of the present invention, the deformation of silicon wafer vibrating diaphragm is relevant with the blast that bears, and promptly is relevant with gas flow rate, and dull.
Fig. 3 is the diagrammatic cross-section of semiconductor silicon microphone of the present invention.Fig. 4 is the circuit diagram of semiconductor silicon microphone of the present invention.Like Fig. 3 and shown in Figure 4, when the silicon wafer vibrating diaphragm produced deformation, the voltage at silicon wafer vibrating diaphragm two ends changed, and the variation of voltage and deformation are monotonic relationshi.Change in voltage causes metal-oxide-semiconductor (FET among the figure) conducting degree change, i.e. impedance R DsVariation, change in voltage and impedance variations are monotonic relationshi.So realized the conversion of physical quantity (gas flow rate) to electric parameters (impedance).The present invention carries out the gas flow metering just according to above-mentioned principle.
In an exemplary embodiment of the present invention, gas meter, flow meter comprises: gas flow rate sensing unit, AD conversion unit and main control unit.Wherein, the gas flow rate sensing unit is used to adopt the silicon wafer diaphragm mode to convert gas flow rate into voltage signal; AD conversion unit is connected with the gas flow rate sensing unit, is used to gather the voltage signal of gas flow rate sensing unit, and this voltage signal is carried out analog to digital conversion; And main control unit, be connected with AD conversion unit, be used for carrying out the voltage signal reduction gas flow rate after the analog to digital conversion, and, obtain totally gas flow according to the gas flow rate after the reduction and voltage signal acquisition interval time according to AD conversion unit.Preferably, this silicon wafer vibrating diaphragm is silicon wafer floatation type (free-floating) vibrating diaphragm.Mode according to voltage signal reduction gas flow rate can adopt the mode of tabling look-up, and the mode of obtaining gas flow according to gas flow rate and acquisition interval time can adopt the mode of integration.
In the present embodiment; The gas flow rate sensing unit comprises capacitance silicon microphone and bleeder circuit subelement; Wherein: the capacitance silicon microphone, be connected with AD conversion unit with the bleeder circuit subelement respectively, be used to adopt the silicon wafer vibrating diaphragm to convert gas flow rate into corresponding impedance signal; And the bleeder circuit subelement, be connected with the capacitance silicon microphone, be used for converting the mode of impedance signal through dividing potential drop into voltage signal.Because the silicon microphone variation of pressure to external world is very responsive and stable, therefore adopts silicon microphone will greatly improve the precision of gas meter, flow meter as sensing unit.In addition, silicon microphone is consumed energy not basically, so the low in energy consumption of gas meter, flow meter compared and had now to gas meter, flow meter of the present invention.The manufacturing process of silicon microphone is quite ripe, and its volume can be accomplished very little, and its cost is lower, has small size that existing gas meter, flow meter do not have, advantage cheaply.
In the microphone that reality is used, sound wave also can cause the variation of air pressure, and the silicon wafer vibrating diaphragm is used for the pressure variation that the perception fuel gas flow causes.Wherein, Sound wave is a kind of interchange ripple; What be that microphone needs perception is that this interchange changes, and the flip-flop in the signal that last microphone is produced is nonsensical (or even harmful) to the reduction sound wave, uses AC coupling when sound is gathered so microphone is done.And the wind that draws according to above-mentioned Bernoulli equation-pressure relation, because the pressure that fuel gas flow produces changes and is not distinguish direct current and exchanges, therefore in the present embodiment, silicon microphone converts gas flow rate into through the DC coupling mode impedance signal of correspondence.Preferably, the grounded drain of silicon microphone, two source electrodes are connected with AD conversion unit with the bleeder circuit subelement respectively.
In a preferred embodiment of the invention, gas meter, flow meter can also comprise: the temperature transition that temperature sensing unit, this temperature sensing unit are used for the combustion gas environment is an electric signal; Static pressure sensing unit, this air pressure sensing unit are used for converting the static pressure of combustion gas environment into electric signal; AD conversion unit is connected with temperature sensing unit, is used for the timing acquiring electric signal, and this electric signal is carried out analog to digital conversion, and electric signal comprises electric signal that reflects temperature and the electric signal that reflects static pressure; Main control unit is used for according to the AD conversion unit electrical signal converted, obtains the temperature information and the static pressure information of combustion gas environment, and according to temperature information, static pressure information gas flow rate is calibrated.
Gather the signal of flow velocity sensing unit, temperature sensing unit and static pressure sensing unit respectively in order to realize AD conversion unit; Need the range value of collection period, frequency or the electric signal of AD conversion unit be limited in the present embodiment; The most simply adopt the method for switch at times, promptly gas meter, flow meter also comprises analog switch; This analog switch is positioned at the front end of AD conversion unit, is used for carrying out selectivity according to preset period of time and opens/close, and supplies AD conversion unit to be connected with gas flow rate sensing unit, temperature sensing unit, static pressure sensing unit respectively according to preset period of time.
In order to realize accurate measurement effect, need the position of gas flow rate sensing unit, temperature sensing unit, static pressure sensing unit be provided with.In the present embodiment, the gas flow rate sensing unit is arranged at the direction of facining the wind of rodmeter; Temperature sensing unit and static pressure sensing unit are arranged in the cavity of rodmeter, and cavity is communicated with the combustion gas environmental facies through the air hole of rodmeter back of the body gas face.Preferably, temperature sensing unit is a thermistor; The static pressure sensing unit is the MEMS pressure transducer.
Below will combine concrete application scenarios-domestic gas meter, gas meter, flow meter of the present invention will be further specified.
Embodiment one
Fig. 5 is the synoptic diagram of embodiment of the invention gas meter, flow meter.Present embodiment comprises: gas flow rate sensing unit, High frequency filter unit, AD conversion unit (Analog to Digital Converter is called for short ADC), main control unit (Main Control Unit is called for short MCU) and memory cell.
Wherein, adopt the gas flow rate Sensor section of silicon microphone to realize the conversion of flow velocity, convert impedance variations to change in voltage through a bleeder circuit again to impedance.As above, when silicon microphone is used for the collection of sound, employing be the AC coupling mode, but this mode can not realize corresponding one by one to voltage and flow velocity, the present invention adopts the DC coupling mode.Fig. 6 adopts the synoptic diagram of the silicon microphone sensing unit of DC coupling mode for embodiment of the invention gas meter, flow meter.The High frequency filter unit is used for eliminating some high frequency noises of circuit, and slower because of the variation of gas flow rate, filtering circuit can not cause damage to useful signal.AD conversion unit is used for sampling, and carries out the digitizing of analog voltage signal, makes things convenient for the MCU of rear end to carry out nonlinear compensation and flow rate calculation etc.Above-mentioned MCU be actually one can realize computing function single-chip microcomputer.Memory cell adopts the traditional solid storer, is used to write down and preserve gas meter, flow meter user's accumulation gas consumption information, makes things convenient for combustion gas operator to charge and various management.
Embodiment two
As everyone knows, a plurality of parameters of combustion gas are relevant with the temperature and the static pressure of environment of living in.In order to measure gas flow rate more accurately, the present invention also is provided with according to temperature and static pressure, the mechanism that gas flow rate is compensated.Fig. 7 is the structural representation of embodiment of the invention gas meter, flow meter.As shown in Figure 7, in the preferred embodiment of the invention, gas meter, flow meter also comprises: the temperature transition that temperature sensing unit, this temperature sensing unit are used for the combustion gas environment is an electric signal; Static pressure sensing unit, this air pressure sensing unit are used for converting the static pressure of combustion gas environment into electric signal; AD conversion unit ADC is connected with the static pressure sensing unit with temperature sensing unit, is used for the timing acquiring electric signal, and this electric signal is carried out analog to digital conversion, and electric signal comprises electric signal that reflects temperature and the electric signal that reflects static pressure; Main control unit MCU is used for according to the AD conversion unit electrical signal converted, obtains the temperature information and the static pressure information of combustion gas environment, and according to temperature information, static pressure information gas flow rate is calibrated.Preferably, temperature sensing unit is a thermistor; The static pressure sensing unit is the MEMS pressure transducer.In addition, pressure transducer can substitute with discrete devices without the MEMS pressure transducer, and temperature sensor can substitute with other form temperature sense circuit without thermistor.
In order to realize the orderly collection of various signals, as shown in Figure 7, gas meter, flow meter also comprises analog switch; This analog switch is positioned at the front end of AD conversion unit, is used for carrying out selectivity according to preset period of time and opens/close, and supplies AD conversion unit to be connected with gas flow rate sensing unit, temperature sensing unit, static pressure sensing unit respectively according to preset period of time.
In addition, precision and intensity in order to improve signal are provided with High frequency filter unit and programmable gain amplifier between analog switch and AD conversion unit.The High frequency filter unit is used for the high frequency interference part of each sensor detection signal of filtering.Programmable gain amplifier is used for optionally the sensor detection signal amplification that gains, thereby is beneficial to back end device to Signal Processing.
In actual scene, comprise gas rectification passage and rodmeter in the gas meter, flow meter airstream compartment, rodmeter is installed in the gas rectification passage, and the bottom of bar is positioned at the middle part of rectification passage, and the gas port at the bar back side is positioned at the top of rectification passage.Fig. 8 a is the back view of embodiment of the invention gas meter, flow meter related sensor bar; Fig. 8 b is the sectional view of embodiment of the invention gas meter, flow meter related sensor bar; Fig. 8 c is the outboard profile of embodiment of the invention gas meter, flow meter related sensor bar.
Shown in Fig. 8 a, 8b, 8c, the back of the body gas face at the rodmeter middle part has gas port (e); Gas port has a cavity inward in rodmeter inside, the top of this cavity seals with encapsulant.One pcb board (d) part be positioned at cavity, be in the front-end circuit that pcb board middle part in the cavity is equipped with MEMS pneumostatic pressure sensor (b), temperature sensor (c) and the various normal operation of sensor of cooperation.Be in the outer pcb board bottom of cavity and stretch into the thin portion in below of rodmeter, MEMS silicon wheat sensor is installed in the above, the direction that this MEMS silicon wheat sensor directly flows into towards combustion gas.Rodmeter top is provided with 5 hard contacts (f); It is electrically connected through lead-in wire and the pcb board that passes above-mentioned encapsulant, voltage output signal and the power supply and the earth signal of 5 contacts difference corresponding MEMS silicon wheat sensor, pneumostatic pressure sensor and temperature sensors.Each sensor output signal is sent to outside AD conversion unit, main control unit from above-mentioned 5 hard contacts, carries out collection, analog to digital conversion and the computing of signal.
Because gas port and cavity are in the back of the body gas face of rodmeter, when gas flow, because the barrier effect of rodmeter, near the gas velocity with cavity inside the gas port is approximately zero, so the inside and outside pressure of cavity is identical, the temperature unanimity.One nonvolatile memory is arranged on main control unit; An air pressure/temperature-density table of comparisons (seeing table 1) has been preserved in the inside; Be used for obtaining the change information of measuring process gas density; In real time to the compensation of flow velocity, greatly improved the precision of condenser type Mike electronic gas table through the pressure and temperature sensor in the cavity and Pressure/Temperature-density meter.
The table 1 air pressure/temperature-density table of comparisons
Figure BSA00000516038600081
Fig. 9 is the workflow diagram of embodiment of the invention gas meter, flow meter.As shown in Figure 9, in actual use, domestic gas meter at first starts the gas flow rate sensor; Treat its stable after; The voltage signal of ADC sample circuit after to High frequency filter sampled, and sampled value send MCU to carry out nonlinear compensation and flow velocity calculates, and the calculating cumulative flow.Simultaneously, gas flow rate is calibrated, when integrated flux is expired the unit quantity of a setting, upgraded the gas consumption information in the solid-state memory through temperature and static-pressure compensation mechanism.So periodic duty realizes the metering to combustion gas.
Compare with traditional gas meter, flow meter, gas meter, flow meter of the present invention adopts the sensing unit of silicon microphone since silicon microphone the variation of pressure is very responsive and stable to external world, therefore adopt silicon microphone will greatly improve the precision of gas meter, flow meter as sensing unit.In addition, gas meter, flow meter of the present invention has increased the compensation mechanism of temperature and static pressure, has further improved the precision of gas meter, flow meter.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, and institute it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. gas meter, flow meter wherein, comprising:
The gas flow rate sensing unit is used to adopt the silicon wafer diaphragm mode to convert gas flow rate into voltage signal;
AD conversion unit is connected with said gas flow rate sensing unit, is used to gather the voltage signal of said gas flow rate sensing unit conversion, and this voltage signal is carried out analog to digital conversion;
Main control unit is connected with said AD conversion unit, is used for according to the voltage signal reduction gas flow rate after the conversion of said AD conversion unit, and according to the gas flow rate after the reduction and voltage signal acquisition interval time, obtains totally gas flow.
2. gas meter, flow meter according to claim 1, wherein,
Said gas meter, flow meter also comprises: the temperature transition that temperature sensing unit, this temperature sensing unit are used for said combustion gas environment is an electric signal; Static pressure sensing unit, this air pressure sensing unit are used for converting the static pressure of said combustion gas environment into electric signal;
Said AD conversion unit is connected with said temperature sensing unit, is used for the said electric signal of timing acquiring, and this electric signal is carried out analog to digital conversion, and said electric signal comprises electric signal that reflects temperature and the electric signal that reflects static pressure;
Said main control unit is used for according to said AD conversion unit electrical signal converted, obtains the temperature information and the static pressure information of said combustion gas environment, and according to said temperature information, static pressure information gas flow rate is calibrated.
3. gas meter, flow meter according to claim 2, wherein, said main control unit comprises:
Storing sub-units is used to store the static pressure/temperature-density table of comparisons of combustion gas;
The calibration subelement is connected with said storing sub-units with said AD conversion unit, is used for according to said temperature information, static pressure information and said static pressure/temperature-density table of comparisons gas flow rate being calibrated.
4. gas meter, flow meter according to claim 2, wherein, said gas meter, flow meter also comprises analog switch;
This analog switch is positioned at the front end of said AD conversion unit, is used for carrying out selectivity according to preset period of time and opens/close, and supplies said AD conversion unit to be connected with gas flow rate sensing unit, temperature sensing unit, static pressure sensing unit respectively according to preset period of time.
5. gas meter, flow meter according to claim 2, wherein,
Said gas flow rate sensing unit is arranged at the direction of facining the wind of rodmeter;
Said temperature sensing unit and static pressure sensing unit are arranged in the cavity of said rodmeter, and said cavity is communicated with said combustion gas environmental facies through the air hole of said rodmeter back of the body gas face.
6. gas meter, flow meter according to claim 2, wherein, said temperature sensing unit is a thermistor; Said static pressure sensing unit is the MEMS pressure transducer.
7. gas meter, flow meter according to claim 1, wherein, said gas flow rate sensing unit comprises capacitance silicon microphone and bleeder circuit subelement;
Said capacitance silicon microphone is connected with said AD conversion unit, is used to adopt the silicon wafer vibrating diaphragm to convert said gas flow rate into corresponding impedance signal through the DC coupling mode;
The bleeder circuit subelement is connected with said capacitance silicon microphone, is used for converting the mode of said impedance signal through dividing potential drop into voltage signal.
8. gas meter, flow meter according to claim 7, wherein,
Said silicon wafer vibrating diaphragm is a silicon wafer floatation type vibrating diaphragm;
The grounded drain of said silicon wafer floatation type vibrating diaphragm, source electrode is connected to working power through divider resistance, and arrives programmable gain amplifier through analog switch DC coupling, and the rear end of programmable gain amplifier is connected AD conversion unit.
9. according to each described gas meter, flow meter among the claim 1-8, wherein, also comprise:
The High frequency filter unit is connected in said gas flow rate sensing unit, is used for the high frequency noise of the voltage signal of the said gas flow rate sensing unit conversion of filtering;
Programmable gain amplifier is connected between said High frequency filter unit and the said AD conversion unit, is used for optionally the sensor detection signal amplification that gains.
10. according to each described gas meter, flow meter among the claim 1-8, wherein,
Also comprise memory cell, be connected in said main control unit, be used to store gas flow information;
Said main control unit comprises the renewal subelement, is connected in said memory cell, is used for when said accumulative total gas flow arrives the preset flow value, upgrading the gas flow information that writes down in the said memory cell.
CN201110157459.9A 2011-05-31 2011-05-31 Gas meter, flow meter Active CN102809400B (en)

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PCT/CN2012/076352 WO2012163285A1 (en) 2011-05-31 2012-05-31 Gas meter

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CN102809400B CN102809400B (en) 2016-12-14

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