CN102791331B - 激光产生的等离子体euv光源 - Google Patents
激光产生的等离子体euv光源 Download PDFInfo
- Publication number
- CN102791331B CN102791331B CN201180013023.0A CN201180013023A CN102791331B CN 102791331 B CN102791331 B CN 102791331B CN 201180013023 A CN201180013023 A CN 201180013023A CN 102791331 B CN102791331 B CN 102791331B
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- CN
- China
- Prior art keywords
- drop
- waveform
- disturbance
- radiation
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/721,317 | 2010-03-10 | ||
US12/721,317 US8158960B2 (en) | 2007-07-13 | 2010-03-10 | Laser produced plasma EUV light source |
PCT/US2011/000374 WO2011112235A1 (en) | 2010-03-10 | 2011-03-01 | Laser produced plasma euv light source |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102791331A CN102791331A (zh) | 2012-11-21 |
CN102791331B true CN102791331B (zh) | 2016-02-17 |
Family
ID=44563770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201180013023.0A Active CN102791331B (zh) | 2010-03-10 | 2011-03-01 | 激光产生的等离子体euv光源 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8158960B2 (zh) |
EP (1) | EP2544766B1 (zh) |
JP (2) | JP6403362B2 (zh) |
KR (2) | KR20130006650A (zh) |
CN (1) | CN102791331B (zh) |
TW (1) | TWI479955B (zh) |
WO (1) | WO2011112235A1 (zh) |
Families Citing this family (46)
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US8653437B2 (en) | 2010-10-04 | 2014-02-18 | Cymer, Llc | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods |
US8654438B2 (en) | 2010-06-24 | 2014-02-18 | Cymer, Llc | Master oscillator-power amplifier drive laser with pre-pulse for EUV light source |
US8513629B2 (en) * | 2011-05-13 | 2013-08-20 | Cymer, Llc | Droplet generator with actuator induced nozzle cleaning |
US8158960B2 (en) * | 2007-07-13 | 2012-04-17 | Cymer, Inc. | Laser produced plasma EUV light source |
US8881526B2 (en) | 2009-03-10 | 2014-11-11 | Bastian Family Holdings, Inc. | Laser for steam turbine system |
US8304752B2 (en) * | 2009-04-10 | 2012-11-06 | Cymer, Inc. | EUV light producing system and method utilizing an alignment laser |
US8263953B2 (en) * | 2010-04-09 | 2012-09-11 | Cymer, Inc. | Systems and methods for target material delivery protection in a laser produced plasma EUV light source |
US8462425B2 (en) | 2010-10-18 | 2013-06-11 | Cymer, Inc. | Oscillator-amplifier drive laser with seed protection for an EUV light source |
US8810902B2 (en) | 2010-12-29 | 2014-08-19 | Asml Netherlands B.V. | Multi-pass optical apparatus |
JP5921876B2 (ja) * | 2011-02-24 | 2016-05-24 | ギガフォトン株式会社 | 極端紫外光生成装置 |
US8633459B2 (en) | 2011-03-02 | 2014-01-21 | Cymer, Llc | Systems and methods for optics cleaning in an EUV light source |
US8604452B2 (en) | 2011-03-17 | 2013-12-10 | Cymer, Llc | Drive laser delivery systems for EUV light source |
US9516730B2 (en) | 2011-06-08 | 2016-12-06 | Asml Netherlands B.V. | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source |
EP2742387B1 (en) * | 2012-03-07 | 2015-04-01 | ASML Netherlands B.V. | Radiation source and lithographic apparatus |
EP2853139B1 (en) * | 2012-05-21 | 2016-07-13 | ASML Netherlands B.V. | Radiation source |
JP2013251100A (ja) | 2012-05-31 | 2013-12-12 | Gigaphoton Inc | 極紫外光生成装置及び極紫外光生成方法 |
US9392678B2 (en) | 2012-10-16 | 2016-07-12 | Asml Netherlands B.V. | Target material supply apparatus for an extreme ultraviolet light source |
US9715174B2 (en) * | 2012-11-30 | 2017-07-25 | Asml Netherlands B.V. | Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method |
CN103042221B (zh) * | 2012-12-14 | 2015-04-15 | 华中科技大学 | 一种用于极紫外光源的高熔点材料液滴靶产生装置 |
CN103048889B (zh) * | 2012-12-18 | 2015-05-20 | 华中科技大学 | 一种基于圆偏振激光驱动的极紫外光刻光源产生系统 |
JP6151941B2 (ja) | 2013-03-22 | 2017-06-21 | ギガフォトン株式会社 | ターゲット生成装置及び極端紫外光生成装置 |
JP6195474B2 (ja) * | 2013-05-31 | 2017-09-13 | ギガフォトン株式会社 | 極端紫外光生成装置及び極端紫外光生成システムにおけるレーザシステムの制御方法 |
WO2015068230A1 (ja) | 2013-11-07 | 2015-05-14 | ギガフォトン株式会社 | 極端紫外光生成装置及び極端紫外光生成装置の制御方法 |
US9209595B2 (en) * | 2014-01-31 | 2015-12-08 | Asml Netherlands B.V. | Catalytic conversion of an optical amplifier gas medium |
CN105333953B (zh) * | 2015-10-13 | 2017-09-15 | 华中科技大学 | 一种可调谐宽波段激光等离子体极紫外光源 |
US10880979B2 (en) * | 2015-11-10 | 2020-12-29 | Kla Corporation | Droplet generation for a laser produced plasma light source |
JP6637158B2 (ja) * | 2016-03-22 | 2020-01-29 | ギガフォトン株式会社 | ドロップレットタイミングセンサ |
TWI728999B (zh) * | 2016-09-08 | 2021-06-01 | 香港商港大科橋有限公司 | 用於在時間上拉伸/壓縮光學脈衝的空間啁啾腔 |
US9778022B1 (en) * | 2016-09-14 | 2017-10-03 | Asml Netherlands B.V. | Determining moving properties of a target in an extreme ultraviolet light source |
US11086240B2 (en) | 2016-12-19 | 2021-08-10 | Asml Netherlands B.V. | Metrology sensor, lithographic apparatus and method for manufacturing devices |
US10585215B2 (en) | 2017-06-29 | 2020-03-10 | Cymer, Llc | Reducing optical damage on an optical element |
WO2019092831A1 (ja) * | 2017-11-09 | 2019-05-16 | ギガフォトン株式会社 | 極端紫外光生成装置及び電子デバイスの製造方法 |
TWI821231B (zh) * | 2018-01-12 | 2023-11-11 | 荷蘭商Asml荷蘭公司 | 用於控制在液滴串流中液滴聚結之裝置與方法 |
WO2019185370A1 (en) * | 2018-03-28 | 2019-10-03 | Asml Netherlands B.V. | Apparatus for and method of monitoring and controlling droplet generator performance |
TW202029839A (zh) | 2018-09-24 | 2020-08-01 | 荷蘭商Asml荷蘭公司 | 目標形成設備 |
US20210263422A1 (en) * | 2018-09-25 | 2021-08-26 | Asml Netherlands B.V. | Laser system for target metrology and alteration in an euv light source |
EP3647872A1 (en) | 2018-11-01 | 2020-05-06 | ASML Netherlands B.V. | A method for controlling the dose profile adjustment of a lithographic apparatus |
US11259394B2 (en) * | 2019-11-01 | 2022-02-22 | Kla Corporation | Laser produced plasma illuminator with liquid sheet jet target |
US11237483B2 (en) | 2020-06-15 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for controlling droplet in extreme ultraviolet light source |
IL299088A (en) | 2020-07-30 | 2023-02-01 | Asml Netherlands Bv | EUV light source target metrology |
CN112844895B (zh) * | 2021-01-03 | 2021-08-17 | 清华大学 | 一种控制液体射流破碎的装置 |
WO2023285108A1 (en) | 2021-07-14 | 2023-01-19 | Asml Netherlands B.V. | Droplet detection metrology utilizing metrology beam scattering |
WO2023126106A1 (en) | 2021-12-28 | 2023-07-06 | Asml Netherlands B.V. | Laser beam steering system and method |
WO2023128856A1 (en) * | 2021-12-29 | 2023-07-06 | Innovicum Technology Ab | Particle based x-ray source |
US11882642B2 (en) | 2021-12-29 | 2024-01-23 | Innovicum Technology Ab | Particle based X-ray source |
WO2023180017A1 (en) | 2022-03-23 | 2023-09-28 | Asml Netherlands B.V. | Euv light source target metrology |
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-
2010
- 2010-03-10 US US12/721,317 patent/US8158960B2/en active Active
-
2011
- 2011-02-21 TW TW100105624A patent/TWI479955B/zh active
- 2011-03-01 KR KR1020127026406A patent/KR20130006650A/ko active Application Filing
- 2011-03-01 JP JP2012557036A patent/JP6403362B2/ja active Active
- 2011-03-01 CN CN201180013023.0A patent/CN102791331B/zh active Active
- 2011-03-01 WO PCT/US2011/000374 patent/WO2011112235A1/en active Application Filing
- 2011-03-01 KR KR1020177015321A patent/KR101887104B1/ko active IP Right Grant
- 2011-03-01 EP EP11753705.0A patent/EP2544766B1/en active Active
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2017
- 2017-12-12 JP JP2017237953A patent/JP6557716B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8158960B2 (en) | 2012-04-17 |
JP6557716B2 (ja) | 2019-08-07 |
EP2544766A4 (en) | 2016-01-27 |
TW201143538A (en) | 2011-12-01 |
EP2544766B1 (en) | 2017-08-02 |
EP2544766A1 (en) | 2013-01-16 |
WO2011112235A1 (en) | 2011-09-15 |
US20100294953A1 (en) | 2010-11-25 |
KR101887104B1 (ko) | 2018-08-09 |
JP6403362B2 (ja) | 2018-10-10 |
JP2018041110A (ja) | 2018-03-15 |
JP2013522823A (ja) | 2013-06-13 |
CN102791331A (zh) | 2012-11-21 |
KR20130006650A (ko) | 2013-01-17 |
KR20170066704A (ko) | 2017-06-14 |
TWI479955B (zh) | 2015-04-01 |
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