CN102671832A - Spin coating device - Google Patents
Spin coating device Download PDFInfo
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- CN102671832A CN102671832A CN2011100876500A CN201110087650A CN102671832A CN 102671832 A CN102671832 A CN 102671832A CN 2011100876500 A CN2011100876500 A CN 2011100876500A CN 201110087650 A CN201110087650 A CN 201110087650A CN 102671832 A CN102671832 A CN 102671832A
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- 238000004528 spin coating Methods 0.000 title claims abstract description 142
- 239000011248 coating agent Substances 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims abstract description 15
- 238000002347 injection Methods 0.000 claims description 14
- 239000007924 injection Substances 0.000 claims description 14
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- 238000012856 packing Methods 0.000 claims description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a spin coating device. The spin coating device comprises a sealing cabin; a balance part installed in the sealing cabin; a mould clamp connected to the upper part of the balance part; a driving motor for driving the balance part and the mould clamp; a spin coating agent injecting device installed on the outer surface of the sealing cabin; a vacuum device for vacuumizing and de-vacuumizing the sealing cabin; and a balance detecting device which is electrically connected to the outer part of the spin coating device and used for detecting the balance of the entire spin coating device.
Description
Technical field
The present invention relates to LCD and make the field, more specifically, the present invention relates to a kind of spin coating device, it is used for spin coating agent such as for example photoresists evenly being coated in the die surface of making LGP at the etch process of the LGP of LCD.
Background technology
In the LCD manufacturing, need carry out the processing of optics site to the LGP (Light Guide Plate) that adopts in the LCD, thereby backlight is realized the leaded light effect.In the prior art, when making LGP, need carry out etching to the mould (or die) of making LGP.Before carrying out etching, need carry out the for example coating processing of spin coating agent such as photoresists to the surface of mould.
At present, the mould of LGP is carried out the method that photoresists apply adopt artificial silk-screen method mostly, that is, the silk graticule mesh of mould upper surface is carried out the photoresists coating.The dry-film resist that utilizes the silk-screen mode to process has following defective: 1) the photoresists rete is thicker; Thickness is usually greater than 4um; And the thickness uniformity is relatively poor, and usually, 9 tests are all spent error (minimum of a value in the measured value of 9 points and peaked ratio) together and are 60%-80%; 2) because said silk-screen method is manually-operated mostly, so be difficult to guarantee the uniformity of film forming.Because there is above-mentioned defective in the dry-film resist that the silk-screen method processes, so be difficult to adapt to the meticulous etching requirement that improves day by day.
In the method for existing coated feel optical cement, can also adopt spin coating proceeding.But the present spin coating proceeding that adopts is used for the crystal silicon spin coating is processed mostly.Generally speaking, the equipment that carries out spin coating have size less with the lighter defective of load.Usually, the size of the workpiece of spin coating processing is less than 200mm, and load is less than 200g.But even if such spin coating device, its equipment cost is also higher.Therefore, spin-coating equipment of the prior art exists that the converted products specification limit is little, load is light, and defective such as cost height.
Summary of the invention
Therefore; In order to overcome above-mentioned defective; The object of the present invention is to provide a kind of spin coating device, it not only can provide broad and accurate technique performance indications for the film-forming process of photoresists, and can satisfy injection mold size and weight requirements that the overwhelming majority is made LGP.
According to foregoing invention purpose of the present invention, a kind of spin coating device is provided.Said spin coating device comprises: sealed compartment; Equalizing feature, it is installed in the said sealed compartment; Die clamp, it is installed in above the said equalizing feature, is used for the mould of clamping spin coating agent to be coated; Drive motors, its main shaft is connected with equalizing feature, is used to drive whole sealed compartment; Spin coating agent injection device, it is installed on the outer surface of said sealed compartment; Vacuum plant, it is used for said sealed compartment is vacuumized the reconciliation application of vacuum; And balance detecting device, it is connected with said spin coating device external electric, is used to detect the balance of whole spin coating device.
In the present invention, preferably, said drive motors is the high-power high-accuracy spindle motor, and the main shaft of said drive motors has the centre bore that axially runs through.
The central lower of said equalizing feature has axle sleeve, and said axle sleeve is connected with the upper end of said drive motors main shaft.Said drive motors and said equalizing feature and said die clamp are rigidly connected.
In the present invention, said equalizing feature is configured to dish type, and it has from the dish type center to extraradial a plurality of spokes, is hollow between the adjacent spoke of said a plurality of spokes, and on the periphery of said equalizing feature, has one or more balancing weights.
In the present invention, vacuum plant comprises: outer vavuum pump, and it is connected with said sealed compartment through pipeline, is used to said sealed compartment negative pressure is provided; And the pressure-air inlet duct, the bottom that it is arranged on said sealed compartment is used for said sealed compartment is separated application of vacuum
Preferably, said vacuum plant also comprises: interior vavuum pump, it is connected through the centre bore of pipeline with said drive motors main shaft, is used to said die clamp negative pressure is provided.
Preferably, through being arranged on rotary packing ring and the relative slip between the stationary seal ring between said electric machine main shaft and the said axle sleeve, guaranteeing the sealing between said electric machine main shaft and the said axle sleeve, and then guarantee the negative pressure spin coating condition of said sealed compartment.
In the present invention, said die clamp comprises die anchor clamps and thin plate vacuum fixture, and said die anchor clamps are used for the mould of clamping thickness greater than 3mm, and said thin plate vacuum fixture is used for the mould of clamping thickness less than 3mm.
In the present invention; Said thin plate vacuum fixture comprises: first evacuated panel; It is arranged on said equalizing feature above, said first evacuated panel has a plurality of axial array through-holes, and said first evacuated panel forms the thickness shape littler than the thickness of pars intermedia of edge part; Second evacuated panel; Its closely be arranged on said first evacuated panel below; Have the hole that is connected with the axle sleeve of said equalizing feature on the pars intermedia of said second evacuated panel, and said second evacuated panel forms the thickness shape bigger than the thickness of pars intermedia of edge part; And vacuum seal pad; It circumferentially is arranged between the edge part of edge part and said second evacuated panel of said first evacuated panel; Wherein, Between the pars intermedia of the pars intermedia of said first evacuated panel and said second evacuated panel, be formed with the gap, said gap is connected with the centre bore of said drive motors main shaft.
Preferably, first evacuated panel is provided with location-plate, is used for the thin plate mold position to different size.
Preferably, when being placed on said thin plate mould on the said thin plate vacuum fixture prejudicially, centripetal force and eccentric self-locking that said thin plate vacuum fixture utilizes atmospheric pressure, rotation to produce realize the clamping to the thin plate mould.
In the present invention, said die anchor clamps comprise the rebound that is placed on the said equalizing feature upper surface, and said die anchor clamps utilize a plurality of securing members that the die mould is directly installed on the said rebound.
Preferably, said sealed compartment comprises sealed compartment loam cake and sealed compartment lower cover.
Preferably, spin coating device of the present invention also is provided with sealed compartment loam cake lifting device.Said sealed compartment loam cake lifting device is connected with the outer surface of said sealed compartment loam cake, is used for the said sealed compartment loam cake of lifting.
Preferably; Said sealed compartment loam cake and said sealed compartment lower cover all have circumferentially the outwards flange of protrusion; Utilizing a plurality of securing members that the flange of said sealed compartment loam cake and the flange of said sealed compartment lower cover are linked together, thereby said sealed compartment loam cake and said sealed compartment lower cover are engaged.
Preferably; Circumferentially be provided with to the stiffener that extends below along the inboard end face of said sealed compartment loam cake; Said stiffener forms: an end is connected with the inboard end face of said sealed compartment loam cake; The other end is to extending below and forming aduncate groove in the end, with the residual spin coating agent of storage recovery
Compared with prior art, the present invention exists following characteristics and advantage.
1) in the present invention, the drive motors that is adopted is the high-power high-accuracy spindle motor.
Therefore, through spin coating device of the present invention is provided, can carry out the for example spin coating agent spin-coat process of photoresists for large scale heavy duty mould.
2) the high-power high-accuracy spindle motor that the present invention adopted can be guaranteed the acceleration and the velocity control accuracy of spin coating, guarantees the uniformity of each time film forming parameter.Simultaneously on balance detecting device tests the speed the basis that shakes; Through the balancing weight on the adjustment equalizing feature; Thereby not only guaranteed the balance of whole spin coating device, realized the balance of integrated apparatus, and then guaranteed the for example quality of dry-film resist; And the service life of having guaranteed the drive motors main shaft, realized the stable operation of device high-speed overload.
3) since drive motors of the present invention and equalizing feature and die clamp be rigidly connected; So avoided for example adopting the attracting deposit to release energy and rotate the variation that brings acceleration and speed of flexible link of parts such as spring, thereby guaranteed the for example quality of the spin coating agent film of photoresists to device.
4), guaranteeing the sealing between said electric machine main shaft and the said axle sleeve, and then guarantee the negative pressure spin coating condition of said sealed compartment through being arranged on rotary packing ring and the relative slip between the stationary seal ring between said electric machine main shaft and the said axle sleeve.
5) the present invention is through adopting sealed compartment and negative pressure spin coating technique, and gas turbulence and has reduced the quantity of airborne foreign matter to the influence of dry-film resist quality in the time of can reducing high speed and rotate, and has improved photoresists face quality.
6) spin coating device provided by the present invention has the reliable performance of handling safety, not only can guarantee the repeatable accuracy of photoresists film forming, and has improved the dry-film resist surface quality.Adopt that spin coating device of the present invention can spin coating be of a size of 17 inches (43.18cm), weight is the mould of 50kg.
Should be understood that, for invention, the general introduction of front still be following detailed description all be example and illustrative, be intended to the present invention who is advocated is furnished an explanation, but not protection scope of the present invention limited.
Description of drawings
Accompanying drawing provides the understanding further to the present invention, incorporates and form the application's a part into.Specific embodiment of the present invention with specification in order to illustrate design feature of the present invention.
In the accompanying drawings:
Fig. 1 is mounted in the sketch map of the spin coating device of the embodiment of the invention on the pallet.
Fig. 2 is the sectional view of sealed compartment of the spin coating device of the embodiment of the invention.
Fig. 3 is the cross-sectional perspective view of sealed compartment of the spin coating device of the embodiment of the invention.
Fig. 4 is the partial view of the spin coating device of the embodiment of the invention, and it shows the die mould and is placed on the view on the equalizing feature that is connected with the drive motors main shaft.
Fig. 5 is the cross section structure figure of thin plate vacuum fixture of the spin coating device of the embodiment of the invention.
Fig. 6 is the cross section stereo structure chart of thin plate vacuum fixture of the spin coating device of the embodiment of the invention.
Fig. 7 is the stereogram of sealed compartment loam cake lifting device of the spin coating device of the embodiment of the invention.
Fig. 8 is the stereogram of spin coating agent injection device of the spin coating device of the embodiment of the invention.
Fig. 9 is the sectional view of spin coating agent injection device of the spin coating device of the embodiment of the invention.
The specific embodiment
The present invention describes through the structure to the spin coating device of following specific embodiment, to embody the design feature of spin coating device of the present invention.
Below in conjunction with accompanying drawing content of the present invention is described in further detail.Same parts adopts identical Reference numeral in the said accompanying drawing.
The workpiece that utilizes the spin coating of spin coating device institute among the present invention is for making the mould of LGP.In this manual, be referred to as die or die mould greater than the mould of 3mm, and be called thin plate workpiece (STAMPER) or thin plate mould less than the mould of 3mm for thickness for thickness.
Fig. 1 is mounted in the sketch map of the spin coating device of the specific embodiment of the invention on the pallet.In Fig. 1, pallet 1 is the basic components of spin coating device, and it is used to carry the parts relevant with spin coating device, for example, and electric wiring, sensor etc.In order to reduce the vibrations of spin coating device, a plurality of shock absorbers 7 are installed in the bottom of pallet 1.
In Fig. 1, pallet 1 as the example components horizontal that supports spin coating device on the ground.Said pallet is divided into two table tops up and down.On upper table surface, place and be fixed with the critical piece of spin coating device, for example sealed compartment 2, drive motors (it is blocked by upper table surface), spin coating agent injection device 5 and sealed compartment loam cake lifting device 4 etc.In sealed compartment 2, be provided with die clamp 3 etc.On following table, be placed with vacuum plant 6.
In order to realize the application of vacuum of separating, on the bottom of sealed compartment lower cover, be connected with the pressure-air inlet duct to sealed compartment.Simultaneously, in order to remove the processing that vacuumizes, then on pipeline 10, also be connected with the pressure-air inlet duct to the thin plate workpiece.Simultaneously, on interior vavuum pump 16 and outer vavuum pump 8, be separately installed with and be used to control the magnetic valve 9 that suction process is operated.
Fig. 2 and Fig. 3 are respectively the sectional view and the stereograms of the sealed compartment of spin coating device of the present invention.In Fig. 2 and Fig. 3, sealed compartment 2 is provided with sealed compartment loam cake 24 and sealed compartment lower cover 26.In the present embodiment, sealed compartment loam cake 24 is circle with sealed compartment lower cover 26.It is understandable that the shape of sealed compartment is not limited to circle, it can have any shape, and for example adopts shapes such as polygon.
In the present invention, be example with the circular seal cabin, sealed compartment loam cake and sealed compartment lower cover all have circumferentially the outwards flange of protrusion.Further, in order to guarantee the subnormal ambient of sealed compartment, the round gasket 25 that is used to seal is installed circumferentially between two flanges.
It is understandable that, when spin coating device moves, because vacuum plant (describing after a while) vacuumizes processing with sealed compartment, so sealed compartment loam cake and sealed compartment lower cover also can closely be bonded together under the pressure of ambient atmosphere.But, in order to ensure the spin coating device safe operation better, utilize a plurality of securing members 15 that the flange of sealed compartment loam cake and the flange of sealed compartment lower cover are linked together, thereby sealed compartment loam cake and sealed compartment lower cover engaged.
On the bottom of the inside of sealed compartment lower cover 26, equalizing feature and die clamp (describing after a while) will be installed.
As shown in Figure 2; On the installing plate 12 of the exterior bottom of sealed compartment lower cover 26, joint 29 and 31 are installed; Its center tap 29 is used to connect the pressure-air inlet duct; So that sealed compartment 2 is separated application of vacuum, and joint 31 is used to connect the pipeline 11 that is connected with outer vavuum pump 8, with to vacuumizing processing in the sealed compartment 2.
In instance of the present invention, be provided with structure that residual spin coating agent is stored and anti-deformation and the anti-workpiece structure that flies out in the sealed compartment.Particularly; Be provided with circumferentially to the stiffener that extends below 21 and 22 along the inboard end face of sealed compartment loam cake; Wherein stiffener 21 is arranged on the inner end face of sealed compartment, and stiffener 22 forms in the following manner: the one of which end utilizes securing member such as screw to be connected with the inboard end face of sealed compartment loam cake, and the other end is to extending below and form in the end aduncate groove 23; Reclaim residual spin coating agent with storage, for example reclaim residual photoresists.
Simultaneously, in order to guarantee the sealing of sealed compartment, between the outer bottom of sealed compartment lower cover 26 and installing plate 12, be provided with sealing device, for example O type circle 27 and sealing gasket 28.
Can find out among last Fig. 2 and Fig. 3,, can prevent that not only die workpiece from flying out because sealed compartment of the present invention forms enclosure space; Guarantee handling safety; And can reduce the local turbulence in the sealed compartment through sealed compartment is vacuumized processing, improved the dry-film resist quality.Simultaneously, owing to be provided with in the sealed compartment recovery structure is stored in residual spin coating agent, so also further improved the quality of dry-film resist.
Fig. 4 is the partial view of spin coating device of the present invention, and it shows die mould 47 and is placed on the view on the equalizing feature 41 that is connected with drive motors 43 main shafts.In the present invention,, adopted the high-power high-accuracy spindle motor,, guaranteed the uniformity of each time film forming parameter with acceleration and the velocity control accuracy of guaranteeing spin coating for adapting to the spin coating of large scale heavy duty die mould.
Equalizing feature 41 is installed in the inside of sealed compartment lower cover.Institute is shown in Figure 4, and in embodiments of the present invention, equalizing feature 41 forms in the following manner: it is configured to dish type, has a plurality of spokes of heart radiation therein, and is the shape of hollow between the adjacent spoke.For balance is set, on the periphery of equalizing feature, have one or more balancing weights 42 or 50.The operator can increase and decrease said balancing weight 42 or 50 according to the poised state of spin coating device, or adjusts their phase place.
It is understandable that equalizing feature is not limited to the dish type in the present embodiment, it can adopt the parts that for example are symmetric shape.
In this embodiment, the central lower at equalizing feature is connected with axle sleeve 46.On equalizing feature, utilize bolt 49 to be connected with die clamp 48 rigidly.On die clamp 48, place the mould 47 of spin coating agent to be coated.Because the thickness of this mould 47 is greater than 3mm, so be called the die mould again.
The main shaft of drive motors 43 has the centre bore 44 that axially runs through.Are connected in the axle sleeve 46 on drive motors 43 main shaft upper ends and the equalizing feature, thereby drive motors and equalizing feature and die clamp 48 utilize securing member to be rigidly connected.The bottom of drive motors main shaft is connected with interior vavuum pump through vacuum swivel joint (not shown), thus under the effect of interior vavuum pump for die clamp provides negative pressure (will carry out detailed explanation below) so that the thin plate workpiece is adsorbed on the die clamp.
Compare with equalizing feature and flexibly connecting of die clamp with the drive motors of prior art; Drive motors of the present invention and equalizing feature and die clamp are for being rigidly connected; That is, adopted direct-connected die anchor clamps, made whole device have good transmission rigidity; Avoided for example adopting the attracting deposit to release energy and rotate the variation that brings acceleration and speed of flexible link of parts such as spring, thereby guaranteed the for example quality of the spin coating agent film of photoresists to device.
In order to reach the technical indicator of required negative pressure in the sealed compartment; Spin coating device of the present invention has not only designed the hermetically-sealed construction of each joint portion; For example in the encapsulation process at the flange of sealed compartment covers, spin coating agent hand-hole, port place, and designed the sealing of relative motion between the axle sleeve of drive motors main shaft and equalizing feature.
Shown in Z enlarged drawing among Fig. 4, slide relatively between the end face through making rotary packing ring 14 and the end face of stationary seal ring 13, thereby guarantee the sealing between drive motors main shaft and the axle sleeve.Can find out that in said enlarged drawing rotary packing ring 14 is provided with the oil storage tank structure, thereby said relative motion is lubricated.Through said structure, the sealing of the relative motion that has guaranteed to produce between drive motors main shaft and the axle sleeve has also guaranteed the negative pressure spin coating condition of sealed compartment simultaneously.
As shown in Figure 4, exemplarily, the die anchor clamps comprise the rebound 48 that is placed on equalizing feature 41 tops.The die anchor clamps utilize a plurality of securing members 49 directly die mould 47 to be installed on the rebound 48.Can find out that among the present invention, said die anchor clamps are used for clamping thickness greater than 3mm and the big mould of weight.
Before drive motors is with high-speed driving equalizing feature and die anchor clamps, need the test drive motors speed of mainshaft and eccentric amplitude and phase place, and the balance of coming adjusting device through the position and the quantity of the balancing weight on the adjustment parts.
Need to prove that in actual production, the type heart of die mould does not overlap with barycenter.But,, when design die mould, require the barycenter (rather than type heart) of die mould to overlap with pivot for safety and the spin coating quality that guarantees spin coating device.Therefore, according to the barycenter of die mould with respect to the side-play amount of the type heart (for example, X to Y to side-play amount) the die mould is carried out offset correction.
In the present invention, except the above-mentioned die mould of thickness greater than 3mm carried out the clamping, also need carry out clamping less than the thin plate mould of 3mm to thickness.In the present invention, the anchor clamps that are used for clamping thin plate workpiece are called the thin plate vacuum fixture, and it is used for the mould of clamping thickness less than 3mm.Like Fig. 5 and shown in Figure 6, show the cross section structure figure and the stereogram of the thin plate vacuum fixture of spin coating device of the present invention respectively.
In the present invention; The design philosophy of thin plate vacuum fixture is except that utilizing atmospheric pressure is pressed on thin plate workpiece (thin plate mould) on the locating surface, also utilize centripetence power that rotation produces and system's self-lock mechanism (thin plate workpiece tilting moment) realize the thin plate workpiece axially with clamping radially.
Like Fig. 5 and shown in Figure 6, above the thin plate vacuum fixture, be placed with thin plate mould 51.Thin plate vacuum fixture of the present invention comprises: first evacuated panel 52, its be arranged on equalizing feature 41 above, first evacuated panel has a plurality of axial array through-holes, and first evacuated panel forms the thickness shape littler than the thickness of pars intermedia of edge part; Second evacuated panel 54, its closely be arranged on said first evacuated panel 52 below, have the hole that is connected with the axle sleeve of equalizing feature on the pars intermedia of second evacuated panel, and second evacuated panel forms the thickness shape bigger than the thickness of pars intermedia of edge part; And vacuum seal pad 53, it is arranged between the edge part of edge part and second evacuated panel of first evacuated panel.Between the pars intermedia of the pars intermedia of first evacuated panel and second evacuated panel, be formed with the gap, said gap is connected with the centre bore 44 of the main shaft of drive motors.Simultaneously, in order to ensure the sealing between second evacuated panel and the equalizing feature, the contacted position of second evacuated panel and axle sleeve is provided with Gask-O-Seal 57.
Among the present invention; Before spin-coat process; When the thin plate workpiece is placed on the thin plate vacuum fixture; Then the array hole on first evacuated panel of thin plate vacuum fixture is covered, in anchor clamps, form the confined space of forming by following space: promptly, form by the centre bore of the main shaft of gap between the pars intermedia of the pars intermedia of a plurality of array holes, first evacuated panel and second evacuated panel and drive motors.
In the spin-coat process process; Interior vavuum pump 16 is through the air in the air in the centre bore 44 of the main shaft of suction drive motors and then the suction gap between the pars intermedia of the pars intermedia of first evacuated panel and second evacuated panel and each axial array hole of first evacuated panel, thereby the thin plate workpiece is sucked on the thin plate vacuum fixture.
As shown in Figure 6, first evacuated panel is provided with a plurality of location- plates 55,56,58, to be used for the thin plate mold position to different size.Said a plurality of location- plate 55,56,58 utilizes securing member 59 to be fixed on first evacuated panel.When thin plate mould 51 being placed on prejudicially thin plate vacuum fixture top, centripetal force and eccentric self-locking that the thin plate vacuum fixture utilizes atmospheric pressure, rotation to produce realize reliable clamping.It is understandable that clamping is on the thin plate vacuum fixture more reliably in order to make thin plate mould 51, the operator can intentionally be placed on thin plate mould 51 on the thin plate vacuum fixture prejudicially.
Through adopting said structure, can realize axial restraint and radially fixing to the thin plate workpiece.In the present invention; Realize the axial restraint of thin plate workpiece through following manner: promptly; With thin plate workpiece and the driving fit of anchor clamps array hole; (array hole that is in the thin plate outer workpiece can adopt plastic sheeting or adhesive sticker to seal), under the effect of anchor clamps cavity negative pressure of vacuum and external pressure, the thin plate workpiece is axially pressed to be attached on the chucking surface.
In the present invention, adopt following manner to realize the radially fixing of thin plate workpiece: promptly, under the positioning action of location- plate 55,56,58, can be with workpiece from pivot to location-plate direction offset some small amount, generally be controlled in the 2mm.When workpiece rotated, because action of centrifugal force, workpiece can radially be pressed on the location-plate.In the design strength scope, rotating speed is high more, and active force is big more, guarantees radially reliability of fixation.
It is understandable that, but operations such as lifting are carried out in sealed compartment loam cake of the present invention artificially, but in order to guarantee security and reduce labour intensity that the present invention covers and is provided with the device that makes the lifting of sealed compartment loam cake on sealed compartment.
Fig. 7 is the stereogram of the sealed compartment loam cake lifting device of spin coating device of the present invention.Sealed compartment loam cake lifting device can be accomplished the up-down and the spinning movement of sealed compartment loam cake, thereby conveniently packs/take out mould (die) into.Among the present invention, sealed compartment loam cake lifting device mainly is made up of guide rod, cantilever, worm speed reducer, elevating screw etc., can adjust lifting travel, the anglec of rotation of sealed compartment loam cake, and the centering of sealed compartment covers, parallel and flying height.
Property embodiment as an example; As shown in Figure 7; Sealed compartment loam cake lifting device comprises following parts: two cantilevers 70 are fixedly connected on the outer surface of sealed compartment loam cake 24 through hinge 72; Simultaneously, utilize the acting in conjunction that is installed in the outside guide rod 74 of sealed compartment loam cake, worm speed reducer 76, elevating screw 73, with sealed compartment top cover lifting or rotation.Guide rod 74 is provided with the locating piece 75 of restriction sealed compartment top cover lifting.
Can cleavage be, the structure of the each part mentioned above of sealed compartment loam cake lifting device of the present invention only is exemplary, its structure can be carried out various modifications and variation according to actual needs.
Fig. 8 and Fig. 9 are respectively the stereogram and the sectional views of the spin coating agent injection device of spin coating device of the present invention.Like Fig. 8 and shown in Figure 9, spin coating agent injection device is installed on the outer surface of sealed compartment loam cake 24, and through the spin coating agent inlet of sealed compartment loam cake the spin coating agent is injected in the sealed compartment.Usually, spin coating agent injection device can inject processing mediums such as cleaning agent, tackifier, emulsion in sealed compartment.
In the present invention, spin coating agent injection device is mainly formed by being arranged on sealed compartment outside slim cylinder 80, syringe 82, conduit 83, check valve 84, pneumatic element 81 and being arranged on the inner liquid dish 85 of sealed compartment etc.In Fig. 9, photoresists utilize the glue mouth 87 that drips that covers on the sealed compartment to splash in the sealed compartment.The purpose that liquid dish 85 is set is that the emulsion drippage of avoiding residual causes the emulsion glued membrane to scrap.
Check valve 84 among the present invention is made up of valve body, spool, spring etc.; Its effect is when sealed compartment produces vacuum; Emulsion is not inhaled in the sealed compartment; And when slim cylinder push injection device 82, the spool that the fluid pressure of emulsion can be pushed check valve 84 open gets into sealed compartment, thereby is spin-coated on the die surface.
In order to eliminate the imbalance of whole spin coating device, guarantee main shaft bearing service life and prevent spin coating shake line, realize the stable operation of spin coating device high-speed overload.Spin coating device of the present invention also is provided with tachogenerator, shock sensor and vibrations equilibristat etc. except above-mentioned described balancing frame.Particularly, the vibrations equilibristat as the exemplary means of balance detecting device externally is electrically connected with spin coating device, is used to detect the balance of whole spin coating device.
In the present invention, through adopting the vibrations equilibristat can whole correlative factors such as drive motors be made as a whole vibration-testing and the balance of carrying out.With only compare with workpiece or together with the processing mode that anchor clamps carry out balance, spin coating device of the present invention has been realized integrated balance.
< device running >
Below, the running of spin coating device of the present invention is carried out following exemplary illustration, with design feature and the characteristic that demonstrates fully spin coating device of the present invention.
At first; Utilize sealed compartment loam cake lifting device the loam cake of sealed compartment is raised and to be rotated; The operator can be with the die mould that needs spin coating or thin plate clamping workpiece on die clamp; Wherein, can artificially it be departed from the pivot location for the thin plate workpiece, and whole spin coating device carried out balance detection through the balance detecting device of outside; The operator meets the spin coating requirement according to the size and location of the balancing weight on the parts of adjustment as a result that balance detecting device detected until the equilibrium criterion that balance detecting device detected.
Next, utilize sealed compartment loam cake lifting device that the sealed compartment loam cake is engaged with the sealed compartment lower cover, and can carry out securing member to the flange of sealed compartment loam cake with the flange of sealed compartment lower cover according to the size of institute's processing work and weight and be connected.After the spin coating agent injection device that the operator covers on to sealed compartment is for example accomplished preparation such as syringe clamping, then start vacuum plant sealed compartment is vacuumized processing.
During for the processing sheet workpiece, the inside and outside vacuum pressure reduction in the sealed compartment then can be adsorbed on the thin plate workpiece on the thin plate vacuum fixture more than 40KPa safely.
Need to prove, before being spin-coated on emulsion on the mould, also need carry out the tackifier spin-coat process, so that the photoresists of follow-up spin coating are reliably attached on the mould mould.In order to accomplish said tackifier spin coating, then earlier tackifier are injected in the sealed compartment, and under the different rotation rates of drive motors, tackifier are spin-coated on the die surface through spin coating agent injection device.After accomplishing above-mentioned preliminary treatment, carry out the photoresists spin-coat process, that is, photoresists are injected in the sealed compartment, and under the high speed rotary speed of drive motors, photoresists are spin-coated on the die surface equably through spin coating agent injection device.
At last, utilize the pressure-air inlet duct in the vacuum plant that sealed compartment is separated vacuum, and, also need separate vacuum the vacuum suction of thin plate workpiece for the processing sheet workpiece.Next, utilize sealed compartment loam cake lifting device that the sealed compartment loam cake is opened once more, take out the workpiece of accomplishing the spin coating photoresists.
< device performance characteristics >
To sum up, spin coating device of the present invention has following characteristics:
1, the drive motors of spin coating device of the present invention is high-power spindle motor, and its moment of torsion is 270NM, and power (rated power) is 18.5KW, maximum speed 6000RPM.Like this, can obtain desirable acceleration and rotating speed, even under heavily loaded part situation, also can guarantee the spin coating proceeding requirement through adopting high-power spindle motor.
The spin speed of drive motors: (that is, 17 inches of sizes, weight 50kg) maximum speed is 3000R.P.M under the condition of heavily loaded mould; Maximum speed can reach 5000R.P.M during for spin coating thin plate mould.
2, most of specification that not only can spin coating injection moulding LGP, and possess the ability of spin coating than the molality tool is like the spin coating mould that to be of a size of 17 inches weight be 50kg.
3, film forming thickness: according to process requirements, adopt different viscosities and parameters such as rotating speed, spin coating time, the I of dry-film resist thickness reaches 1um.
4, spin coating device of the present invention can provide negative pressure spin coating condition, is made up of spin coating sealed compartment, vavuum pump, magnetic valve, sealing ring, pressure sensor etc., and the sealed compartment internal pressure can be reduced to 50KPa.Through adopting said negative pressure spin coating condition, can prevent that the high velocity air local turbulence from influencing the dry-film resist quality.
5, owing to adopted integrated balance, then guaranteeing that photoresists spin coating performance and processing performance simultaneously, have also guaranteed the reliability of clamping workpiece and the security of device.
<beneficial effect >
Spin coating device of the present invention can reach following beneficial effect through adopting said structure:
For the spin coating agent film-forming process of for example photoresists provides broad and accurate technique performance indications; Can satisfy most injection moulding die dimensional weight demands; Guarantee the repeatable accuracy of photoresists film forming, improved the for example spin coating agent film surface quality of photoresists.
Because under the situation that does not depart from the scope of the invention, can carry out various modifications and variation, therefore it is illustrative and nonrestrictive comprising in the above-mentioned explanation that all technical characterictics shown in the accompanying drawing or content be construed as.
Claims (17)
1. spin coating device comprises:
Sealed compartment;
Equalizing feature, it is installed in the said sealed compartment;
Die clamp, it is installed in above the said equalizing feature, is used for the mould of clamping spin coating agent to be coated;
Drive motors, its main shaft is connected with equalizing feature, is used to drive whole sealed compartment;
Spin coating agent injection device, it is installed on the outer surface of said sealed compartment;
Vacuum plant, it is used for said sealed compartment is vacuumized the reconciliation application of vacuum; And
Balance detecting device, it is connected with said spin coating device external electric, is used to detect the balance of whole spin coating device.
2. spin coating device according to claim 1, wherein, said drive motors is the high-power high-accuracy spindle motor, the main shaft of said drive motors has the centre bore that axially runs through.
3. spin coating device according to claim 1, the central lower of said equalizing feature has axle sleeve, and said axle sleeve is connected with the upper end of said drive motors main shaft.
4. spin coating device according to claim 1, wherein, said drive motors and said equalizing feature and said die clamp are rigidly connected.
5. spin coating device according to claim 1; Wherein, said equalizing feature is configured to dish type, and it has from the dish type center to extraradial a plurality of spokes; Be hollow between the adjacent spoke of said a plurality of spokes, and on the periphery of said equalizing feature, have one or more balancing weights.
6. spin coating device according to claim 1, wherein, said vacuum plant comprises:
Outer vavuum pump, it is connected with said sealed compartment through pipeline, is used to said sealed compartment negative pressure is provided; And
The pressure-air inlet duct, the bottom that it is arranged on said sealed compartment is used for said sealed compartment is separated application of vacuum
7. spin coating device according to claim 2, wherein, said vacuum plant also comprises: interior vavuum pump, it is connected through the centre bore of pipeline with said drive motors main shaft, is used to said die clamp negative pressure is provided.
8. spin coating device according to claim 3; Wherein, Through being arranged on rotary packing ring and the relative slip between the stationary seal ring between said electric machine main shaft and the said axle sleeve, guaranteeing the sealing between said electric machine main shaft and the said axle sleeve, and then guarantee the negative pressure spin coating condition of said sealed compartment.
9. spin coating device according to claim 1, wherein, said die clamp comprises die anchor clamps and thin plate vacuum fixture, and said die anchor clamps are used for the mould of clamping thickness greater than 3mm, and said thin plate vacuum fixture is used for the mould of clamping thickness less than 3mm.
10. spin coating device according to claim 9, wherein, said thin plate vacuum fixture comprises:
First evacuated panel, its be arranged on said equalizing feature above, said first evacuated panel has a plurality of axial array through-holes, and said first evacuated panel forms the thickness shape littler than the thickness of pars intermedia of edge part;
Second evacuated panel; Its closely be arranged on said first evacuated panel below; Have the hole that is connected with the axle sleeve of said equalizing feature on the pars intermedia of said second evacuated panel, and said second evacuated panel forms the thickness shape bigger than the thickness of pars intermedia of edge part; And
The vacuum seal pad, it circumferentially is arranged between the edge part of edge part and said second evacuated panel of said first evacuated panel,
Wherein, between the pars intermedia of the pars intermedia of said first evacuated panel and said second evacuated panel, be formed with the gap, said gap is connected with the centre bore of said drive motors main shaft.
11. spin coating device according to claim 10, wherein, said first evacuated panel is provided with location-plate, is used for the thin plate mold position to different size.
12. spin coating device according to claim 11; Wherein, When being placed on said thin plate mould on the said thin plate vacuum fixture prejudicially, centripetal force and eccentric self-locking that said thin plate vacuum fixture utilizes atmospheric pressure, rotation to produce realize the clamping to the thin plate mould.
13. spin coating device according to claim 9, wherein, said die anchor clamps comprise the rebound that is placed on the said equalizing feature upper surface, and said die anchor clamps utilize a plurality of securing members that the die mould is directly installed on the said rebound.
14. spin coating device according to claim 1, wherein, said sealed compartment comprises sealed compartment loam cake and sealed compartment lower cover.
15. spin coating device according to claim 14 also comprises: sealed compartment loam cake lifting device, its outer surface with said sealed compartment loam cake is connected, and is used for the said sealed compartment loam cake of lifting.
16. spin coating device according to claim 14; Wherein, Said sealed compartment loam cake and said sealed compartment lower cover all have circumferentially the outwards flange of protrusion; Utilizing a plurality of securing members that the flange of said sealed compartment loam cake and the flange of said sealed compartment lower cover are linked together, thereby said sealed compartment loam cake and said sealed compartment lower cover are engaged.
17. spin coating device according to claim 14; Wherein, Circumferentially be provided with to the stiffener that extends below along the inboard end face of said sealed compartment loam cake; Said stiffener forms: an end is connected with the inboard end face of said sealed compartment loam cake, and the other end is to extending below and forming aduncate groove in the end, with the residual spin coating agent of storage recovery.
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| CN201110087650.0A CN102671832B (en) | 2011-04-08 | 2011-04-08 | Spin coating device |
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| CN201110087650.0A CN102671832B (en) | 2011-04-08 | 2011-04-08 | Spin coating device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103664000A (en) * | 2013-12-11 | 2014-03-26 | 湖北优泰显示技术有限公司 | Indium tin oxide (ITO) film conducting glass production method and vacuum spin coating equipment |
| CN104874524A (en) * | 2015-05-29 | 2015-09-02 | 苏州市吴中区胥口广博模具加工厂 | Disc indexing mechanism of servo-control type disc-rim dispensing machine |
| CN107249756A (en) * | 2014-12-22 | 2017-10-13 | 阿拉玛自动化公司 | Fluid bringing device |
| CN113457938A (en) * | 2021-06-28 | 2021-10-01 | 大连理工大学 | Synchronous cover structure for adjusting atmosphere of spin-coating film-forming chamber |
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| TWI630957B (en) * | 2017-08-23 | 2018-08-01 | 台灣耐落螺絲工業股份有限公司 | Multi-axis precision transfer coating device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990928A (en) * | 1982-11-16 | 1984-05-25 | Dainippon Screen Mfg Co Ltd | Rotary type surface treatment apparatus |
| US5264246A (en) * | 1989-05-02 | 1993-11-23 | Mitsubishi Denki Kabushiki Kaisha | Spin coating method |
| JPH07245256A (en) * | 1994-03-07 | 1995-09-19 | Nec Corp | Developing of photoresist and device thereof |
| JP2000288430A (en) * | 1999-04-01 | 2000-10-17 | Bridgestone Corp | Applying method of release liquid and applying device for release liquid |
| CN2834705Y (en) * | 2005-08-31 | 2006-11-08 | 东南大学 | Nano-membrane forming machine |
| CN201342395Y (en) * | 2008-12-11 | 2009-11-11 | 中国科学院微电子研究所 | High-pressure carbon dioxide supercritical spin-coating film forming system |
-
2011
- 2011-04-08 CN CN201110087650.0A patent/CN102671832B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990928A (en) * | 1982-11-16 | 1984-05-25 | Dainippon Screen Mfg Co Ltd | Rotary type surface treatment apparatus |
| US5264246A (en) * | 1989-05-02 | 1993-11-23 | Mitsubishi Denki Kabushiki Kaisha | Spin coating method |
| JPH07245256A (en) * | 1994-03-07 | 1995-09-19 | Nec Corp | Developing of photoresist and device thereof |
| JP2000288430A (en) * | 1999-04-01 | 2000-10-17 | Bridgestone Corp | Applying method of release liquid and applying device for release liquid |
| CN2834705Y (en) * | 2005-08-31 | 2006-11-08 | 东南大学 | Nano-membrane forming machine |
| CN201342395Y (en) * | 2008-12-11 | 2009-11-11 | 中国科学院微电子研究所 | High-pressure carbon dioxide supercritical spin-coating film forming system |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103664000A (en) * | 2013-12-11 | 2014-03-26 | 湖北优泰显示技术有限公司 | Indium tin oxide (ITO) film conducting glass production method and vacuum spin coating equipment |
| CN103664000B (en) * | 2013-12-11 | 2016-08-17 | 湖北优尼科光电技术股份有限公司 | A kind of ito film electro-conductive glass production method and a kind of vacuum spin-coating equipment |
| CN107249756A (en) * | 2014-12-22 | 2017-10-13 | 阿拉玛自动化公司 | Fluid bringing device |
| US10758930B2 (en) | 2014-12-22 | 2020-09-01 | Kuka Systems Aerospace | Fluid application device for a mechanical fastener |
| CN104874524A (en) * | 2015-05-29 | 2015-09-02 | 苏州市吴中区胥口广博模具加工厂 | Disc indexing mechanism of servo-control type disc-rim dispensing machine |
| CN113457938A (en) * | 2021-06-28 | 2021-10-01 | 大连理工大学 | Synchronous cover structure for adjusting atmosphere of spin-coating film-forming chamber |
| CN113457938B (en) * | 2021-06-28 | 2022-03-11 | 大连理工大学 | Synchronous cover structure for adjusting atmosphere of spin-coating film-forming chamber |
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| CN102671832B (en) | 2015-04-15 |
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