CN102568359A - Array test device - Google Patents
Array test device Download PDFInfo
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- CN102568359A CN102568359A CN2011101848531A CN201110184853A CN102568359A CN 102568359 A CN102568359 A CN 102568359A CN 2011101848531 A CN2011101848531 A CN 2011101848531A CN 201110184853 A CN201110184853 A CN 201110184853A CN 102568359 A CN102568359 A CN 102568359A
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- 238000012360 testing method Methods 0.000 title abstract description 35
- 239000011521 glass Substances 0.000 claims abstract description 142
- 238000007599 discharging Methods 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 description 97
- 230000005684 electric field Effects 0.000 description 19
- 239000000463 material Substances 0.000 description 11
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 210000004027 cell Anatomy 0.000 description 9
- 238000007664 blowing Methods 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Abstract
The invention discloses an array test device capable of separating a modulator from a glass panel in a predetermined distance without discharging the gas to the glass panel or reducing the pressure of the gas discharged on the glass panel. Therefore, the array test device can solve the problem that: the glass panel is damaged due to the gas discharged on the glass panel.
Description
Technical field
The present invention relates to a kind of array detecting device that is used for the tested glass panel.
Background technology
In general, flat-panel monitor (FPD) is than the conventional television with Braun kinescope (Braun Tube) or display is thin and light image display.LCD (LCD), plasma display (PDP), field-emitter display (FED) and Organic Light Emitting Diode (OLED) are to have developed and the representative instance of the flat-panel monitor that uses.
LCD among this FPD is to provide the mode of controlling the light transmission of liquid crystal cells based on the data of image information signal to show to expect the image display of image independently to the liquid crystal cells that is arranged as matrix shape.LCD is thin and light but also have and comprise many other advantages of hanging down with operating voltage low in energy consumption, therefore is widely used.Below detailed description is used in the typical manufacturing approach of the liquid crystal panel among this LCD.
At first, on the upper glass panel, form colored filter and common electrode.Afterwards, on the lower-glass panel relative, form thin film transistor (TFT) (TFT) and pixel electrode with the upper glass panel.Subsequently both alignment layers is applied to upper glass panel and lower-glass panel respectively.The friction matching layer is so that provide tilt angle and orientation orientation for the liquid crystal molecule in the liquid crystal layer that between both alignment layers, forms subsequently afterwards.
After this, form sealant pattern through at least one that fluid sealant is applied in the face glass, with keep between face glass the gap, prevent that liquid crystal from spilling and the seal glass panel between the gap.Subsequently, between face glass, form liquid crystal layer, thereby accomplish liquid crystal panel.
In said process; Whether test has the whether defective operation of lower-glass panel (hereinafter being called " face glass ") of TFT and pixel electrode, break or detect pixel cell not good realization of whether developing the color through for example detecting gate line or data line.
Usually, use array detecting device to come the tested glass panel.Array detecting device comprises light source, is provided with the modulator and the image unit of electro-optical material layer.Be applied at voltage under the situation of modulator and face glass predetermined amplitude, with modulator near face glass.Then, if face glass does not have defective, then form electric field between modulator and the face glass.But if the face glass defectiveness does not then form electric field between modulator and the face glass, perhaps the amplitude of electric field is little.Electric field amplitude between array detecting device measuring modulator and the face glass, and utilize the electric field amplitude record to confirm whether defectiveness of face glass.
Accurately a required key factor of tested glass panel is the distance between modulator and the face glass.In the prior art, in order to keep the constant distance between modulator and the face glass, gaseous emission makes modulator by the pressure lifting that is discharged into the gas on the face glass to face glass.Thus, can modulator be remained on itself and the face glass state of preset distance at interval.But in this prior art, owing to directly gases at high pressure are discharged on the face glass with the lifting modulator, so face glass or the electron device that is installed on the face glass may be impaired owing to air pressure.
Summary of the invention
Therefore; To the problem that produces in the above prior art the present invention is proposed; And the purpose of this invention is to provide a kind of array detecting device, it can be avoided with the gaseous emission problem that face glass maybe be impaired with modulator and the spaced apart preset distance of face glass the time to face glass.
In order to realize above purpose, the present invention provides a kind of array detecting device, comprising: modulator, and it is towards the face glass setting; Fixed block, it is arranged on around the modulator; Movable block, it connects with modulator, and movable block is supported so that can be lifted by fixed block; And the modulator mobile unit, it is arranged between fixed block and the movable block, and the modulator mobile unit moves modulator along the direction away from face glass.
Description of drawings
From detailed description below in conjunction with accompanying drawing, can know more and understand aforesaid purpose, the feature and advantage with other of the present invention, wherein:
Fig. 1 is the stereographic map of the array detecting device of first embodiment according to the present invention;
Fig. 2 is the synoptic diagram of test module of the array detecting device of Fig. 1;
Fig. 3 is the synoptic diagram of another instance of test module of the array detecting device of Fig. 1;
Fig. 4 is the sectional view of test module of the array detecting device of Fig. 1;
Fig. 5 is the sectional view of the test module of the array detecting device of second embodiment according to the present invention;
Fig. 6 is the upward view of the test module of Fig. 5; And
Fig. 7 to Figure 10 is the sectional view of several instances of the test module of the array detecting device of the 3rd embodiment according to the present invention.
Embodiment
Hereinafter will specify the embodiment according to array detecting device of the present invention with reference to accompanying drawing.
As shown in Figure 1, according to the present invention the array detecting device 10 of first embodiment comprise with face glass P be loaded into the face glass P that loading unit 20 on the said device, test load by loading unit 20 test cell 30 and will be by the face glass P of test cell 30 tests unloading unit 40 from said device unloading.
Loading unit 20 comprises a plurality of first back up pads 22 that are arranged on the spaced position of preset space length.Said a plurality of first back up pad 22 supports face glass P to be tested.Unloading unit 40 comprises a plurality of second back up pads 42 that are arranged on the spaced position of preset space length.Second back up pad 42 supports the face glass P that had tested.Run through first back up pad 22 of loading unit 20 and second back up pad 42 of unloading unit 40 and be formed with gas hole 24 and 44 respectively.Discharge gas via gas hole 24 and 44 towards the lower surface of face glass P, so that face glass P suspends.In addition, be provided with face glass supply unit 70 in loading unit 20 and the unloading unit 40.Face glass supply unit 70 utilizes the lower surface of absorption affinity maintenance face glass P, and moves to carry face glass P along rectilinear direction.
The electric defective of test cell 30 tested glass panel P.Test cell 30 comprises transparent support board 31, test module 32 and probe assembly 33.The face glass P that is loaded by loading unit 20 places on the transparent support board 31.Test module 32 tests place the electric defective of the face glass P on the transparent support board 31.Probe assembly 33 applies electric signal to the electrode that places the face glass P on the transparent support board 31.Test module 32 is arranged on the test module mobile unit 60, and test module mobile unit 60 is arranged on transparent support board 31 tops and along the X-direction definite length extended.Test module 32 can move in X-direction along test module mobile unit 60.Test module 32 can comprise a plurality of test modules 32 that are provided with along the direction (X-direction) of test module mobile unit 60 extensions.
As shown in Figure 2, test module 32 comprise the direct of travel of light source 321, the light that sent of control light source 321 half prism 322, place face glass P top and along towards the modulator 120 of the direction location of face glass P and to the image unit 90 of modulator 120 shootings.
Electro-optical material layer 122 is processed by such material: when electric signal put on the modulator electrode layer 123 of the electrode that is formed on the face glass P and modulator 120, the physical character of said material can change according to the electric field that is produced between face glass P and the modulator 120.For example, electro-optical material layer 122 can be processed by the LC (liquid crystal) that changes transmittance according to electric field amplitude.Alternatively, electro-optical material layer 122 can be by processing along the predetermined direction location and with the PDLC (PDLC) of incident light polarization to respective angles according to electric field amplitude.
In said structure, when electric signal is applied to the modulator electrode layer 123 of electrode and modulator 120 of face glass P, form electric field between face glass P and the modulator 120.The character that forms the electrooptical material of electro-optical material layer 122 changes according to electric field.Thus, after light sends from light source 321 and gets into modulators 120 via half prism 322, change by the light quantity of reflection horizon 121 reflections of modulator 120.At this moment, 90 pairs of modulators of image unit, 120 shootings.Subsequently, can confirm the electric field amplitude that forms between face glass P and the modulator 120 through the graphical analysis light quantity of utilizing the modulator of taking by image unit 90 120.If face glass P is defective, then can not form electric field or electric field amplitude electric field amplitude between face glass P and the modulator 120 less than normal condition.Like this, can confirm whether defectiveness of face glass P through measuring electric field amplitude.
In addition, as stated, can construct test cell 30 according to the light reflection-type, in said smooth reflection-type, light source 321 is arranged in the test module 32, and reflection horizon 121 is arranged in the modulator 120.Optional; As shown in Figure 3, can construct test cell 30 according to the transmittance type, in said transmittance type; Light source 321 is arranged on transparent support board 31 belows; In other words, be arranged on transparent support board 31 with modulator 120 towards that opposite side of a side of transparent support board 31, make the light quantity that after light source 321 sends, is transmitted through measuring light confirm whether defectiveness of face glass P via modulator 120.In the test cell that utilizes the transmittance type 30, the transparent support board 31 that is placed with face glass P above is to be processed by the material of light-permeable.In addition, the side towards face glass P at modulator 120 is provided with protective seam 125.Like this, can construct the test cell 30 of array detecting device of the present invention according to light reflection-type or transmittance type.
The structure of the modulator 120 that Fig. 4 diagram can move along the direction away from face glass P.As shown in Figure 4, test module 32 comprises fixed block 110, movable block 130 and modulator mobile unit 200.Fixed block 110 is arranged on around the modulator 120.Movable block 130 is connected with modulator 120, and is supported by fixed block 110, so that can be lifted with respect to face glass P.Modulator mobile unit 200 is arranged between fixed block 110 and the movable block 130, and moves modulator 120 along the direction (making progress) away from face glass P.
Particularly, movable block 130 is supported by the bottom of fixed block 110, so that can be lifted.Thus, modulator 120 can be supported by movable block 130 in test module 32, so that can be lifted.Image unit 90 is positioned at fixed block 110 tops.
Modulator mobile unit 200 comprises the insufflation unit 210 of upwards blowing towards the bottom of movable block 130.Insufflation unit 210 comprises: gas discharge outlet 211, and it is positioned at movable block 130 belows, and towards movable block 130 openings; Gas passage 212, it is communicated with gas discharge outlet 211; And gas supply unit 213, it is communicated with gas passage 212, and to gas discharge outlet 211 gas is provided via gas passage 212.Gas discharge outlet 211 can comprise and circumferentially is arranged on a plurality of gas discharge outlets 211 around the modulator 120 along movable block 130.In the case, expectation is spaced from each other gas discharge outlet 211 with rule at interval, when movable block 130 is lifted, to keep movable block 130 levels.In addition, extension 131 stretches out from the outer surface of movable block 130, makes extension 131 towards gas discharge outlet 211, and the gas of discharging from gas discharge outlet 211 thus blows to extension 131.Gas passage 212 is designed to make that at least a portion in the gas discharge outlet 211 embeds in the fixed block 110.The gas that gas supply unit 213 provides can comprise air or inert gas.
In this structure,, modulator 120 during in order to tested glass panel P, discharges gas through the operation that gas supply unit 213 is upwards blown towards movable block 130 via gas discharge outlet 211 with face glass P position adjacent when being placed in face glass P top.Then, the gas of the bottom of movable block 130 through blowing to movable block 130 is by upwards lifting.Thus, the modulator 120 that connects with movable block 130 also moves up, and is keeping parallel with the upper surface of face glass P with the position of the spaced apart preset distance of upper surface of face glass P.Therefore, modulator 120 and the face glass P state of the distance that is suitable for producing the electric field between modulator 120 and the face glass P that can keep reliably being spaced from each other.In addition, can prevent that modulator 120 from contacting with face glass P collision or with face glass P.In addition, can control the distance between modulator 120 and the face glass P from the pressure of the gas of gas discharge outlet 211 discharges through adjusting.
Be different from the prior art of gaseous emission to the face glass P; In the array detecting device with said structure of first embodiment according to the present invention; With the mode of upwards blowing towards the bottom of the movable block 130 that connects with modulator 120, modulator 120 can move up and remain on the position that separates suitable distance with face glass P.Therefore, the present invention damage face glass P that can avoid in the prior art of gaseous emission to the face glass P, to produce or the problem of the electron device on the face glass P.
Hereinafter will be explained the array detecting device of second embodiment according to the present invention with reference to Fig. 5 and Fig. 6.In the explanation of second embodiment,, therefore will omit further explanation to it with using the Reference numeral identical to represent identical member with first embodiment.
Like Fig. 5 and shown in Figure 6; In the array detecting device according to second embodiment, the modulator mobile unit 200 that moves modulator 120 along the direction (making progress) away from face glass P comprises first insufflation unit 210 of upwards blowing towards the bottom of movable block 130.In addition, modulator mobile unit 200 also comprises second insufflation unit 220 of blowing to face glass P from movable block 130.
As shown in Figure 6, can be along the circumferential gas discharge outlet 211 of first insufflation unit 210 and the gas discharge outlet 221 of second insufflation unit 220 of being arranged alternately each other of modulator 120.In the case, the pressure of the pressure of the gas that upwards blows out from the gas discharge outlet 211 of first insufflation unit 210 and the gas that blows out downwards from the gas discharge outlet 221 of second insufflation unit 220 is equally distributed, and avoids the phase mutual interference.Therefore, movable block 130 can be when it be raised to predetermined altitude the maintenance level.
As shown in Figure 5, the gas supply unit 213 of first insufflation unit 210 and the gas supply unit 223 of second insufflation unit 220 can be set independently of each other.Alternatively, as shown in Figure 6, the gas supply unit 213 of first insufflation unit 210 and the gas supply unit 223 of second insufflation unit 220 can comprise pure gas feeding unit 213,223.Under the situation of the structure that comprises pure gas feeding unit 213,223, can simplify the structure that gas is provided to gas discharge outlet 211 and gas discharge outlet 221.Preferably, pipeline 214 and 224 is provided with regulator 215 and 225, and regulator 215 and 225 is communicated with gas passage 212 and gas passage 222 respectively with pure gas feeding unit 213,223.Regulator 215 and 225 effect are the pressure of controlling the gas that offers gas discharge outlet 211 and gas discharge outlet 221 respectively.
In this structure, during with tested glass panel P, upwards discharge gas towards the bottom of movable block 130 with face glass P position adjacent from the gas discharge outlet 211 of first insufflation unit 210 when what modulator 120 was placed in face glass P top.Like this, thus movable block 130 upwards is lifted the modulator 120 that moves up.In addition, gas is discharged on the face glass P from the gas discharge outlet 221 of second insufflation unit 220.Like this, modulator 120 further moves up by means of the pressure that is discharged into the gas on the face glass P, promptly moves up along the direction away from face glass P.Because this of modulator 120 moves up, modulator 120 and face glass P can be spaced from each other and be suitable for producing the distance of the electric field between modulator 120 and the face glass P.
Like this, in array detecting device according to second embodiment of the present invention, the operation that 220 common execution separate modulator 120 with face glass P with second insufflation unit of first insufflation unit 210.Thus, compared with prior art, can reduce the pressure that is discharged into the gas on the face glass P.Therefore, this embodiment can minimize to occur in gases at high pressure are discharged into the problem that the electron device on face glass P or the face glass P is caused damage of the prior art on the face glass P.
In addition; In this embodiment, can control the distance between modulator 120 and the face glass P through the pressure of the gas regulating the gas of discharging from the gas discharge outlet 211 of first insufflation unit 210 and discharge from the gas discharge outlet 221 of second insufflation unit 220.Expectation be that the pressure of the pressure ratio of the gas of discharging from the gas discharge outlet of first insufflation unit 210 211 gas of discharging from the gas discharge outlet 221 of second insufflation unit 220 is big; Thereby reduce to be discharged into the pressure of the gas on the face glass P, so that avoid maybe be because the problem that gaseous emission is caused to the face glass P.
Hereinafter will combine Fig. 7 to Fig. 9 to specify the array detecting device of the 3rd embodiment according to the present invention.In the explanation of the 3rd embodiment, represent identical member with using with first embodiment and second identical Reference numeral of embodiment, therefore will omit further explanation to it.
As shown in Figure 7; In array detecting device according to the 3rd embodiment; The modulator mobile unit 200 that moves modulator 120 along the direction (making progress) away from face glass P comprises first magnetic component 241 and second magnetic component 242; First magnetic component 241 and second magnetic component 242 be separately positioned on fixed block 110 and the movable block 130 towards each other position, make the direction (vertically) that is lifted along modulator 120 produce repulsion.First magnetic component 241 and/or second magnetic component 242 can comprise permanent magnet, or comprise the electromagnet that is provided with coil alternatively.In this embodiment, first magnetic component 241 is installed in the fixed block 110, and second magnetic component 242 is installed in from the outward extending extension 131 of the outer surface of movable block 130.First magnetic component 241 and second magnetic component 242 can comprise a plurality of first magnetic components 241 and a plurality of second magnetic components 242 along the circumferential setting of modulator 120.In the case, expect that first magnetic component 241 and second magnetic component 242 are spaced from each other at regular intervals, thereby when modulator 120 is lifted with respect to face glass P, keep modulator 120 levels.
In this structure; When modulator 120 be placed in face glass P top with face glass P position adjacent during with tested glass panel P; Movable block 130 moves up by means of the repulsion between first magnetic component 241 and second magnetic component 242, makes modulator 120 move up with movable block 130.Because this of modulator 120 moves up, modulator 120 and face glass P can be spaced from each other and be suitable for producing the distance of the electric field between modulator 120 and the face glass P.In addition, can control the distance between modulator 120 and the face glass P through the amplitude of regulating the magnetic force between first magnetic component 241 and second magnetic component 242.Comprise under the situation of electromagnet at first magnetic component 241 and second magnetic component 242, can implement the adjusting of the magnetic force amplitude between them through the amplitude that adjusting is applied to the power of coil.
In the array detecting device of the 3rd embodiment according to the present invention; Modulator 120 can by means of be arranged in fixed block 110 and the movable block 130 towards first magnetic component 241 of each other position and the repulsion between second magnetic component 242 and move up away from face glass P, and remain on the position with the spaced apart suitable distance of face glass P.Thus, can avoid the prior art constructions of gaseous emission to the face glass P according to the array detecting device of the 3rd embodiment.Therefore, can prevent to occur in according to the array detecting device of the 3rd embodiment gases at high pressure are discharged into the problem that the electron device on face glass P or the face glass P is caused damage of the prior art on the face glass P.
In addition, as shown in Figure 8, the array detecting device of the 3rd enforcement can also comprise that second insufflation unit, 220, the second insufflation unit 220 discharge gas from movable block 130 towards face glass P according to the present invention.In the case, second insufflation unit 220 and first magnetic component 241 operation that 242 common execution separate modulator 120 with face glass P with second magnetic component.Therefore, compared with prior art, can reduce to be discharged into the pressure of the gas on the face glass P, make to solve the problem that when gases at high pressure being discharged on the face glass P, possibly cause of the prior art.Thus, can facilitate for the distance of regulating between modulator 120 and the face glass P.
Alternatively, as shown in Figure 9, the array detecting device of the 3rd embodiment can also comprise first insufflation unit 210 of upwards blowing towards the bottom of movable block 130 according to the present invention.Under the situation of this structure, the operation that 242 common execution separate modulator 120 with face glass P with second magnetic component of first insufflation unit 210 and first magnetic component 241.In addition, can control the distance between modulator 120 and the face glass P from the pressure of the gas of gas discharge outlet 211 discharges of first insufflation unit 210 through adjusting.Thus, can facilitate for the distance of regulating between modulator 120 and the face glass P.
In addition; Shown in figure 10; The array detecting device of the 3rd embodiment can also both comprise first insufflation unit 210 of upwards blowing towards the bottom of movable block 130 according to the present invention, also comprised second insufflation unit 220 of discharging gas from movable block 130 towards face glass P.
The described technological purport of embodiment of the present invention can be implemented independently, also can implement with combining.
As stated, according to array detecting device of the present invention not needs with gaseous emission to the face glass with structure with modulator and the spaced apart preset distance of face glass, can be constructed so that perhaps the pressure that is discharged into the gas on the face glass reduces.Therefore, the present invention can solve owing to be discharged into the problem of the damage face glass that gas caused on the face glass.
Claims (7)
1. array detecting device comprises:
Modulator, said modulator is towards the face glass setting;
Fixed block, said fixed block are arranged on around the said modulator;
Movable block, said movable block connects with said modulator, and said movable block is supported being lifted by said fixed block; And
Modulator mobile unit, said modulator mobile unit are arranged between said fixed block and the said movable block, and said modulator mobile unit moves said modulator along the direction away from said face glass.
2. array detecting device as claimed in claim 1, wherein said modulator mobile unit comprises first insufflation unit, said first insufflation unit upwards goes out gas towards the lower bank of said movable block.
3. array detecting device as claimed in claim 2, wherein said modulator mobile unit also comprises second insufflation unit, said second insufflation unit is discharged gas from said movable block towards said face glass.
4. array detecting device as claimed in claim 3; In wherein said first insufflation unit and said second insufflation unit each comprises gas discharge outlet, and the gas discharge outlet of the gas discharge outlet of wherein said first insufflation unit and said second insufflation unit circumferentially alternately is provided with along said modulator each other.
5. array detecting device as claimed in claim 3; In wherein said first insufflation unit and said second insufflation unit each comprises gas discharge outlet, and the pressure of the gas of wherein discharging from the gas discharge outlet of said first insufflation unit is greater than the pressure of the gas of discharging from the gas discharge outlet of said second insufflation unit.
6. like each described array detecting device in the claim 1 to 5; Wherein said modulator mobile unit comprises first magnetic component and second magnetic component; Said first magnetic component and second magnetic component are separately positioned on said fixed block and the said movable block, make said first magnetic component and second magnetic component towards between them, producing repulsion with the direction that is lifted along said modulator each other.
7. the array detecting device shown in claim 1, wherein said modulator mobile unit comprises:
Second insufflation unit, said second insufflation unit is discharged gas from said movable block towards said face glass; And
First magnetic component and second magnetic component; Said first magnetic component and second magnetic component are separately positioned on said fixed block and the said movable block, make said first magnetic component and second magnetic component towards between them, producing repulsion with the direction that is lifted along said modulator each other.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100139196A KR101207029B1 (en) | 2010-12-30 | 2010-12-30 | Array test apparatus |
| KR10-2010-0139196 | 2010-12-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102568359A true CN102568359A (en) | 2012-07-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101848531A Pending CN102568359A (en) | 2010-12-30 | 2011-07-04 | Array test device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101207029B1 (en) |
| CN (1) | CN102568359A (en) |
| TW (1) | TW201226946A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102190482B1 (en) * | 2019-05-14 | 2020-12-15 | 주식회사 탑 엔지니어링 | Array Tester |
| KR102235475B1 (en) * | 2019-05-14 | 2021-04-05 | 주식회사 탑 엔지니어링 | Array Tester |
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| US5465052A (en) * | 1991-09-10 | 1995-11-07 | Photon Dynamics, Inc. | Method of testing liquid crystal display substrates |
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| CN101419373A (en) * | 2008-08-04 | 2009-04-29 | 塔工程有限公司 | Array detecting device |
| CN101498848A (en) * | 2008-01-28 | 2009-08-05 | 塔工程有限公司 | Modulator used for array detecting device |
| CN101713894A (en) * | 2008-10-06 | 2010-05-26 | 塔工程有限公司 | Array tester |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010014552A (en) | 2008-07-03 | 2010-01-21 | Top Engineering Co Ltd | Array test apparatus |
| KR100911331B1 (en) | 2008-12-30 | 2009-08-07 | 주식회사 탑 엔지니어링 | Array tester and method for measuring a point of substrate of the same |
| KR100911330B1 (en) | 2008-12-30 | 2009-08-07 | 주식회사 탑 엔지니어링 | Array tester, method for measuring a point of substrate of the same and method for measuring a position cordinate |
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2010
- 2010-12-30 KR KR1020100139196A patent/KR101207029B1/en active IP Right Grant
-
2011
- 2011-07-04 CN CN2011101848531A patent/CN102568359A/en active Pending
- 2011-07-07 TW TW100124117A patent/TW201226946A/en unknown
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|---|---|---|---|---|
| US5432461A (en) * | 1991-06-28 | 1995-07-11 | Photon Dynamics, Inc. | Method of testing active matrix liquid crystal display substrates |
| US5465052A (en) * | 1991-09-10 | 1995-11-07 | Photon Dynamics, Inc. | Method of testing liquid crystal display substrates |
| CN101498848A (en) * | 2008-01-28 | 2009-08-05 | 塔工程有限公司 | Modulator used for array detecting device |
| CN101299125A (en) * | 2008-07-03 | 2008-11-05 | 塔工程有限公司 | Array tester |
| CN101419373A (en) * | 2008-08-04 | 2009-04-29 | 塔工程有限公司 | Array detecting device |
| CN101713894A (en) * | 2008-10-06 | 2010-05-26 | 塔工程有限公司 | Array tester |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101207029B1 (en) | 2012-11-30 |
| KR20120077293A (en) | 2012-07-10 |
| TW201226946A (en) | 2012-07-01 |
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Application publication date: 20120711 |