CN102520412A - Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array - Google Patents
Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array Download PDFInfo
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- CN102520412A CN102520412A CN2011103678588A CN201110367858A CN102520412A CN 102520412 A CN102520412 A CN 102520412A CN 2011103678588 A CN2011103678588 A CN 2011103678588A CN 201110367858 A CN201110367858 A CN 201110367858A CN 102520412 A CN102520412 A CN 102520412A
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Abstract
The invention discloses a laser active detecting device based on an MEMS (micro-electromechanical system) two-dimensional scanning mirror array. A DSP (digital signal processor) signal processing circuit 1 is used for generating a laser pulse control signal to control a laser ranging device array to emit a pulse laser beam; after being scanned by the MEMS two-dimensional scanning mirror array, the laser beam is irradiated on a detected target; after the laser beam is reflected back to the laser ranging device array, the distance of the detected target is measured by the laser ranging device array according to a time difference between the laser pulse emission and the laser pulse receiving; and a control bus is utilized by the DSP signal processing circuit to control an FPGA (field programmable gate array) logic circuit to be respectively connected with four sets of laser ranging device arrays of the MEMS two-dimensional scanning mirror array, so as to read a measuring result into the DSP signal processing circuit. The device provided by the invention has the advantages of simple structure, high scanning speed, large scanning scope, low cost, small volume, light weight, and the like.
Description
Technical field
The present invention relates to a kind of Laser Detecting Set, particularly a kind of laser active probe device based on micromechanics (MEMS) two-dimensional scan mirror.
Background technology
Existing 40 years of development of laser acquisition technology are historical.The high-rate laser scanning technique is a bottleneck technology of restriction laser acquisition technical development always.Traditional laser scanning method mainly comprises mechanical scanning harmony () photoscanning, but these two kinds of scan methods are used to all exist when the laser Active Imaging is guided certain limitation.Mechanical scanning is ripe a kind of scanning technique, thereby it utilizes the scanning of the rotation of optical elements such as catoptron or diaphotoscope or the direction of propagation realization light beam that vibration changes light beam.Sound () photoscanning then is that utilization sound () luminous effect changes the direction of propagation of light beam in the space; Promptly some direction changes to the refractive index of light sound () luminescent crystal in the effect lower edge of sound wave (electric field); When laser beam during along specific direction incident, at sound () thus effect under will deflect and reach the purpose of scanning.The size at beam deflection angle is directly proportional with the linear change rate of crystal refractive index.
The comparison of-1 three kind of scan method of table
Can find out from last table, mechanical scanning, scanning angle is big, the laser that temperature influence is little, be applicable to all kinds of wavelength, but sweep velocity is low, complex structure, and volume, quality, power consumption are all bigger, and the price of high-speed electric expreess locomotive is also relatively more expensive.Sound () photoscanning can obtain very high frequency of operation, but the scan deflection angle is less, and optical loss is bigger, and work efficiency is very low.
MEMS two-dimensional scan mirror is a kind of good laser scanning device, but single MEMS two-dimensional scan mirror scanning angle is limited, in the process of using, receives very big restriction, needs to seek a kind of new large area scanning device.
Summary of the invention
Defective to prior art exists the purpose of this invention is to provide a kind of laser active probe device based on micromechanics MEMS two-dimensional scan lens array, and this apparatus structure is simple, and sweep velocity is high, and sweep limit is big, and cost is low, and volume is little, advantages such as light weight.
Technical scheme of the present invention is achieved in that
DSP signal processing circuit 1 generates laser pulse control signal control laser range finder array emission pulse laser; Laser beam is after the scanning of micromechanics MEMS two-dimensional scan lens array; Shine on the target of being surveyed; After laser beam is reflected back toward the laser range finder array; The laser range finder array is according to the emission laser pulse and receive the distance that time difference measurements between the laser pulse goes out measured target, and the DSP signal processing circuit utilizes control bus control fpga logic circuit to connect four groups of laser range finder arrays of micromechanics (MEMS) two-dimensional scan lens array respectively, and measurement result is read in the DSP signal processing circuit.
The quantity that said MEMS two-dimensional scan lens array is comprised is at least two.
The quantity of described laser range finder and installation site are corresponding each other with MEMS two-dimensional scan mirror.
Device of the present invention possesses following advantage:
1. simple in structure, the little light weight of volume:
2. sweep frequency is high, and sweep limit is big:
Description of drawings
Fig. 1 is based on the Laser Detecting Set structural representation of MEMS two-dimensional scan mirror.
Embodiment
As shown in Figure 1, this Laser Detecting Set is divided into 4 parts, and 1, the DSP signal processing circuit; 2, fpga logic circuit; 3, laser range finder array; 4, micromechanics (MEMS) two-dimensional scan lens array; 5, the target of being surveyed.
Embodiment
DSP signal processing circuit 1 generates laser pulse control signal control laser range finder array 3 emission pulse lasers; Laser beam is after 4 scannings of micromechanics (MEMS) two-dimensional scan lens array; Shine on the target of being surveyed 5; After laser beam is reflected back toward laser range finder; Laser range finder goes out the distance of measured target according to the time difference measurements between emission laser pulse and the reception laser pulse; DSP signal processing circuit 1 utilizes control bus control fpga logic circuit 2 to connect 4 groups of laser range finders of micromechanics (MEMS) two-dimensional scan lens array respectively, and measurement result is read in the DSP signal processing circuit 1, and DSP signal processing circuit 1 is put 4 groups of measurement results of micromechanics (MEMS) two-dimensional scan lens array in order and generated secondary laser range finder array 3 dimension laser images.
The DSP signal processing circuit is linked to each other with four laser range finders respectively through I/O, in order to output pulse control signal control laser range finder; The DSP signal processing circuit is linked to each other with FPGA through control bus, in order to input and the output of control FPGA; Four laser range finders link to each other with FPGA through four different UART serial ports, with the range information input FPGA that measures; FPGA links to each other with the DSP signal processing circuit through the UART serial ports, with integrating among four groups of metrical information input DSP.
The composition that the present invention is based on the laser active probe device of MEMS two-dimensional scan lens array can also comprise some characteristics like this:
1.MEMS scanning array comprises two MEMS two-dimensional scan mirrors at least.
2. the corresponding set of pulses laser range finder of every MEMS two-dimensional scan mirror.
Measuring method of the present invention comprises following several steps:
Launch 4 road pulse lasers 1.DSP control 4 road laser range finders respectively through the IO mouth;
2.4 the road pulse laser shines on the detection of a target after 4 MEMS two-dimensional scan mirror scanning respectively;
3.4 laser range finder is separately returned in road laser-bounce, after laser range finder is measured, obtains 4 road corresponding range informations;
4.DSP control FPGA links to each other the UART mouth respectively and reads 4 road range informations with 4 road laser range finders;
5.DSP 4 road range informations are handled to judge whether target is arranged in the search coverage.
Repeat the 1-5 step, can realize continuous probe.
In implementation process, pulse laser is under the guiding of control signal, through several laser range finders; Obtain the one-dimensional distance electric signal of scanning plane; Again this signal is combined with other bidimensional electric signal through the corner information gained,, obtain 3 complete dimension laser images through the processing of computing machine.
Claims (3)
1. based on the laser active probe device of micromechanics MEMS two-dimensional scan lens array, it is characterized in that,
DSP signal processing circuit 1 generates laser pulse control signal control laser range finder array (3) emission pulse laser; Laser beam is after micromechanics MEMS two-dimensional scan lens array (4) scanning; Shine on the target of being surveyed (5); After laser beam is reflected back toward laser range finder array (3); Laser range finder array (3) goes out the distance of measured target according to the time difference measurements between emission laser pulse and the reception laser pulse; DSP signal processing circuit (1) utilizes control bus control fpga logic circuit (2) to connect micromechanics (MEMS) two-dimensional scan (4) four groups of laser range finder arrays of lens array (3) respectively, and measurement result is read in the DSP signal processing circuit (1).
2. the laser active probe device of MEMS two-dimensional scan lens array according to claim 1 is characterized in that: the quantity that said MEMS two-dimensional scan lens array is comprised is at least two.
3. the laser active probe device of MEMS two-dimensional scan lens array according to claim 1 is characterized in that: the quantity of described laser range finder and installation site are corresponding each other with MEMS two-dimensional scan mirror.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103678588A CN102520412A (en) | 2011-11-18 | 2011-11-18 | Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103678588A CN102520412A (en) | 2011-11-18 | 2011-11-18 | Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array |
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| CN102520412A true CN102520412A (en) | 2012-06-27 |
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| CN2011103678588A Pending CN102520412A (en) | 2011-11-18 | 2011-11-18 | Laser active detecting device based on MEMS (micro-electromechanical system) two-dimensional scanning mirror array |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785380A (en) * | 2016-01-06 | 2016-07-20 | 国网新疆电力公司检修公司 | Novel dead angle free laser distance measuring apparatus |
| CN106226777A (en) * | 2016-08-17 | 2016-12-14 | 乐视控股（北京）有限公司 | Infrared acquisition localization method and system |
| CN107402385A (en) * | 2017-07-31 | 2017-11-28 | 岭纬公司 | Suitable for the DLP receiving systems and its adaptive regulation method of laser radar |
| CN108398101A (en) * | 2017-02-08 | 2018-08-14 | 邹如飞 | A kind of measurement method and system of workpiece topography |
| US10267900B2 (en) | 2016-11-07 | 2019-04-23 | Bae Systems Information And Electronic Systems Integration Inc. | System and method for covert pointer/communications and laser range finder |
| WO2020135802A1 (en) * | 2018-12-29 | 2020-07-02 | 华为技术有限公司 | Laser measurement module and laser radar |
| CN111381239A (en) * | 2018-12-29 | 2020-07-07 | 华为技术有限公司 | Laser measurement module and laser radar |
| WO2020156372A1 (en) * | 2019-01-31 | 2020-08-06 | 无锡流深光电科技有限公司 | Distributed laser radar system and laser ranging method |
| WO2021051722A1 (en) * | 2020-01-03 | 2021-03-25 | 深圳市速腾聚创科技有限公司 | Lidar and autonomous driving device |
| US11960031B2 (en) | 2018-12-29 | 2024-04-16 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6839127B1 (en) * | 2003-09-15 | 2005-01-04 | Deere & Company | Optical range finder having a micro-mirror array |
| US7297934B2 (en) * | 2003-12-12 | 2007-11-20 | ARETé ASSOCIATES | Optical system |
| CN101344591A (en) * | 2008-08-22 | 2009-01-14 | 清华大学 | Miniature laser two-dimension scanning survey system |
-
2011
- 2011-11-18 CN CN2011103678588A patent/CN102520412A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6839127B1 (en) * | 2003-09-15 | 2005-01-04 | Deere & Company | Optical range finder having a micro-mirror array |
| US7297934B2 (en) * | 2003-12-12 | 2007-11-20 | ARETé ASSOCIATES | Optical system |
| CN101344591A (en) * | 2008-08-22 | 2009-01-14 | 清华大学 | Miniature laser two-dimension scanning survey system |
Non-Patent Citations (1)
| Title |
|---|
| 中国矿业学院矿山测量教研室编: "《激光测距》", 30 April 1982, article "激光测距仪" * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785380A (en) * | 2016-01-06 | 2016-07-20 | 国网新疆电力公司检修公司 | Novel dead angle free laser distance measuring apparatus |
| CN106226777A (en) * | 2016-08-17 | 2016-12-14 | 乐视控股（北京）有限公司 | Infrared acquisition localization method and system |
| US10267900B2 (en) | 2016-11-07 | 2019-04-23 | Bae Systems Information And Electronic Systems Integration Inc. | System and method for covert pointer/communications and laser range finder |
| CN108398101A (en) * | 2017-02-08 | 2018-08-14 | 邹如飞 | A kind of measurement method and system of workpiece topography |
| CN107402385A (en) * | 2017-07-31 | 2017-11-28 | 岭纬公司 | Suitable for the DLP receiving systems and its adaptive regulation method of laser radar |
| WO2020135802A1 (en) * | 2018-12-29 | 2020-07-02 | 华为技术有限公司 | Laser measurement module and laser radar |
| CN111381239A (en) * | 2018-12-29 | 2020-07-07 | 华为技术有限公司 | Laser measurement module and laser radar |
| CN111381239B (en) * | 2018-12-29 | 2022-08-19 | 华为技术有限公司 | Laser surveying module and laser radar |
| US11428788B2 (en) | 2018-12-29 | 2022-08-30 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
| US11960031B2 (en) | 2018-12-29 | 2024-04-16 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
| WO2020156372A1 (en) * | 2019-01-31 | 2020-08-06 | 无锡流深光电科技有限公司 | Distributed laser radar system and laser ranging method |
| WO2021051722A1 (en) * | 2020-01-03 | 2021-03-25 | 深圳市速腾聚创科技有限公司 | Lidar and autonomous driving device |
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Application publication date: 20120627 |