CN102507419A - Sample tank for liquid particle counter and production method of sample tank - Google Patents
Sample tank for liquid particle counter and production method of sample tank Download PDFInfo
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- CN102507419A CN102507419A CN2011103310966A CN201110331096A CN102507419A CN 102507419 A CN102507419 A CN 102507419A CN 2011103310966 A CN2011103310966 A CN 2011103310966A CN 201110331096 A CN201110331096 A CN 201110331096A CN 102507419 A CN102507419 A CN 102507419A
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Abstract
The invention relates to a sample tank for a liquid particle counter and a production method of the sample tank. The sample tank is provided with a sealed liquid channel and comprises two structure units with slits. Each structure unit comprises a quartz glass layer, a metal film aperture formed on the surface of the quartz glass layer and provided with a first slit and a photoresist layer formed on the surface of the metal film aperture, wherein a second slit is formed on the photoresist layer corresponding to the position of the first slit of the metal film aperture, and the first slit and the second slit jointly form one slit. The photoresist layers of the two structure units are in bonding, and the slits of the two structure units jointly form the liquid channel. The sample tank with the structure can be produced through the processing technology of a micro electro mechanical system (MEMS), the micro liquid channel which cannot be produced through the traditional processing technology is produced, and the shape and the size of the liquid channel can be accurately controlled, thereby facilitating improvement on sensitivity of liquid particle detection.
Description
Technical field
the present invention relates to a kind of testing graininess of granule equipment part, are specifically related to a kind of sample cell, particularly with the matching used sample cell of liquid particles counter.
Background technology
liquid particles counter is used for the small solid grain contamination of tracer liquid, and it is at medicine, water analysis, and oil cleanliness detects, and there is important use in fields such as semiconductor technology control.Light blockage method laser liquid particle collector is theoretical according to Mie scattering, utilize fine particle to scattering of light with stop realization to particle counting and measurement, its detection principle is as shown in Figure 1.Form tiny Line beam after the shaping of the light that semiconductor laser (101) sends through lens combination (102), Line beam shines the surveyed area of fluid sample pond (103), sees through the surface that sample cell (103) arrives photodetector (106) afterwards.Testing liquid (104) is through the flow through surveyed area of sample cell (103) of the fluid passage (109) of sample cell (103); When the molecule (105) in the testing liquid (104) time through surveyed area; Because particle is to scattering of light with stop; Make photodetector (106) receive light signal and weaken that light signal becomes a undersuing (108) afterwards through detector (106) and testing circuit (107), being in proportion of the amplitude of signal (108) and particle.Therefore, can measure the number of finely ground particles in the fluid to be measured and the size of particle through number of pulse signals and amplitude.
sample cell is the core component of liquid particles counter, and its structure and quality are determining the key of instrument to detect index.The present used sample cell of light blockage method liquid particles counter mainly contains two kinds of job operations: a kind ofly be based on precision machined method.Another kind is based on the precision optics method for processing.
are as shown in Figure 2 based on the structure of precision machined sample cell, and this structure mainly contains first corrosion resistant plate (201), second corrosion resistant plate (203); The first stainless steel thin slice (202); The second stainless steel thin slice (204) and glass optical window (205) are formed, and they form a long and narrow square fluid passage (206) jointly, and the size of passage (206) is by stainless steel thin slice (202; 204) the distance decision between thickness and the two stainless steel thin slices (202,204).In order to prevent that flow of liquid from leaking when the fluid passage, form mechanical seal through precision-fit between corrosion resistant plate and the stainless steel thin slice.This reaches the almost roughness and the flatness of minute surface with regard to the surface of contact that requires corrosion resistant plate and stainless steel thin slice.So high technical requirement makes that the mechanical processing difficulty of this structure is very big, has increased cost of manufacture.Stainless steel thin slice thickness is thin more, and difficulty of processing is big more, and in order to reach the effect of sealing, the thickness of stainless steel thin slice usually must be greater than 0.5 millimeter, and it is very little that this makes that the size of fluid passage can not be done, and has limited the sensitivity that the liquid particles counter detects.In addition, the sample cell that processing obtains based on precision optical machinery, the roughness of inner slit walls can not reach very high level, and therefore, the particle in the middle of reality is used in the easy adhering liquid causes the obstruction of fluid passage, has reduced the stability and the reliability of instrument.
are as shown in Figure 3 based on the sample pool structure of precision optics job operation.It comprises first quartz glass plate (301), second quartz glass plate (303), the first black piezoid (302) and the second black piezoid (304).Utilize the optical cement technology to carry out welding between quartz plate and the black stone English, can form good sealing, be not easy to form and leak.Optics processing can be arrived very high optical surface, has overcome the problem of physical construction sample cell easy blocking.Black piezoid in the structure plays the effect that stops parasitic light, reduces the influence of background light intensity, improves measuring accuracy.But black stone English has certain transmissivity, the high-quality black stone English of import glass, and when thickness was 1 millimeters thick, its transmittance was 0.1%.When thickness was 0.5 millimeters thick, its transmittance was 1.1%.For the influence to test result of the printing opacity that reduces black stone English, the thickness of black piezoid must be greater than more than 0.5 millimeter, and this makes the size of fluid passage also can not do very for a short time, has limited the sensitivity of liquid particles detecting device equally.
Summary of the invention
technical matters to be solved by this invention is the deficiency that overcomes prior art, and a kind of modified sample cell that is used for particle collector is provided.
the present invention also will provide a kind of method for making of above-mentioned modified sample cell simultaneously.
For solving the problems of the technologies described above, a kind of technical scheme that the present invention takes is:
a kind of sample cell that is used for the liquid particles counter; It has the fluid passage of sealing; Said sample cell comprises two structural units with slit; Each structural unit with slit comprises quartz glass layer, be formed on the quartz glass laminar surface and have the metallic film diaphragm of first slit and be formed on the lip-deep photoresist layer of metallic film diaphragm; The position of first slit of corresponding metallic film diaphragm is formed with second slit on this photoresist layer; The said slit of the common formation of said first slit and said second slit, the photoresist layer phase bonding of two said structural units, the said fluid passage of the common formation of the slit of two structural units.
according to an aspect of the present invention, said metallic film diaphragm can be 0.05～0.2 micron aluminium film for the thickness that sputters at the quartz glass laminar surface.The thickness of aluminium film is preferably 0.08～0.12 micron, most preferably is 0.1 micron.Said photoresist layer is that to be spin-coated on thickness on the metallic film diaphragm be 50～250 microns photoresist.Preferably, the thickness of photoresist layer is 80～120 microns, most preferably 100 microns.Described photoresist is preferably the SU-8 photoresist.
are according to another aspect of the invention; Said fluid passage is followed successively by liquid feeding end, surveyed area and outlet end from an end to the direction of the other end; Wherein, The taper that said liquid feeding end narrows down for the flow direction along liquid gradually, said surveyed area is a rectangle, the taper that described outlet end broadens for the flow direction along liquid gradually.Preferably, the opening tapering of liquid feeding end is identical with the opening tapering of said outlet end, and the opening tapering is between 6～10 °.The length of said fluid passage can be 10～40 millimeters, and the width of said surveyed area can be 0.1～0.8 millimeter.The length of fluid passage is preferably 15～25 millimeters, most preferably 20 millimeters; The width of surveyed area is preferably 0.1～0.3 millimeter, most preferably 0.2 millimeter.Fluid passage is designed to be made at opening part the shape of tapering, forms turbulent flow when flow of liquid is crossed sample cell, improve the measuring accuracy of liquid particles counter.
according to a specific embodiment of the present invention, the length of fluid passage is 20 millimeters, and the opening tapering of liquid feeding end and the opening tapering of said outlet end are 8 °, and the width of surveyed area is 0.2 millimeter, highly is 0.20～0.25 millimeter.
The another technical scheme that the present invention takes is: a kind of method for making of the above-mentioned sample cell that is used for the liquid particles counter, it comprises the steps:
(1) make two described structural units according to following steps respectively with slit:
1., the quartz glass of selecting the setting size for use is as substrate; Set the aluminium of thickness in the upper surface sputter of this quartz glass; Photoetching aluminium; Remove the aluminium film of center section, obtain having the metallic film diaphragm of first slit of setting size and dimension, the shape of said first slit is identical with the shape of the fluid passage that will form at last;
2., the photoresist of thickness is set in spin coating on the metallic film diaphragm, the photoetching photoresist is removed unexposed photoresist, forms and identical second slit of first shape of slit in the position of corresponding first slit;
(2), the photoresist layer through two above-mentioned structural units of bonding is packaged together two structural units, said sample cell
Because the enforcement of above technical scheme, the present invention compared with prior art has following advantage:
The sample cell that
have structure of the present invention can be made through the processing technology of MEMS, produces the small fluid passage that conventional machining process can't obtain, and the shape of fluid passage and size can be by accurate controls.In addition, the fluid passage that bonding obtains has good sealing effectiveness, can effectively prevent the seepage of liquid; And the metallic film diaphragm can stop parasitic light, reduces the influence of bias light.
The method for making of
sample cell of the present invention is convenient, and machining precision is high, good reliability.
Description of drawings
are done further detailed explanation below in conjunction with accompanying drawing and concrete embodiment to the present invention.
Fig. 1 is the detection principle schematic of light blockage method laser liquid particle collector
Fig. 2 is the structural representation of traditional sample cell based on the precision optical machinery processing technology;
Fig. 3 is the structural representation of traditional sample cell based on the precision optics processing technology;
Fig. 4 is the shape synoptic diagram according to fluid passage of the present invention;
Fig. 5 a～5c is the process synoptic diagram according to sample cell of the present invention;
wherein: 101, semiconductor laser; 102, lens combination; 103, sample cell; 104, testing liquid; 105, molecule; 106, photodetector; 107, testing circuit; 108, signal; 109, fluid passage; 201, first corrosion resistant plate; 202, the first stainless steel thin slice; 203, second corrosion resistant plate; 204, the second stainless steel thin slice; 205, glass optical window; 301, first quartz glass plate; 302, the first black piezoid; 303, second quartz glass plate; 304, the second black piezoid; 4a, 4b, structural unit; 401a, 401b, quartz glass layer; 402a, 402b, metallic film diaphragm; 403a, 403b, photoresist layer; 404a, 404b, slit; 405a, 405b, first slit; 406a, 406b, second slit; 5 fluid passages; 50, liquid feeding end; 51, surveyed area; 52, outlet end.
Embodiment
comprise structural unit 4a with slit 404a and the structural unit 4b with slit 404b according to the sample cell that is used for the liquid particles counter of present embodiment shown in Fig. 4 and Fig. 5 c.Wherein structural unit 4a comprises quartz glass layer 401a, is formed on the quartz glass layer 401a surface and has the metallic film diaphragm 402a of the first slit 405a and be formed on the lip-deep photoresist layer 403a of metallic film diaphragm 402a; The position that this photoresist layer 403a goes up the first slit 405a of corresponding metallic film diaphragm 402a is formed with the second slit 406a, and the first slit 405a and the said slit 404a of the common formation of the second slit 406a.Structural unit 4b comprises quartz glass layer 401b, be formed on the quartz glass layer 401b surface and have the metallic film diaphragm 402b of the first slit 405b and be formed on the lip-deep photoresist layer 403b of metallic film diaphragm 402b; The position that this photoresist layer 403b goes up the first slit 405b of corresponding metallic film diaphragm 402b is formed with the second slit 406b, and the first slit 405b and the second slit 406b constitute slit 404b jointly.Photoresist layer 403a and the 403b bonding of two structural unit 4a and 4b, thus two said slit 404a and 404b have constituted the fluid passage 5 of sealing jointly.Fluid passage 5 is followed successively by liquid feeding end 50, surveyed area 51 and outlet end 52 from an end to the direction of the other end simultaneously; Wherein, The taper that liquid feeding end 50 narrows down for the flow direction along liquid gradually, surveyed area 51 is a rectangle, the taper that outlet end 51 broadens for the flow direction along liquid gradually.
Metallic film diaphragm 402a, 402b are 0.05～0.2 micron aluminium film for the thickness that sputters at quartz glass layer 401a, 401b surface respectively in
above-mentioned sample cell.The thickness of this aluminium film is preferably 0.08～0.12 micron, most preferably is 0.1 micron.Photoresist layer 403a, 403b are that to be spin-coated on metallic film diaphragm 402a, the last thickness of 402b be 50～250 microns photoresist, and preferably, the thickness of photoresist layer 403a, 403b is 80～120 microns.
Referring to Fig. 5 a～5c, the sample cell that is used for the liquid particles counter of present embodiment can be made through following steps:
Make the structural unit 4b that have the structural unit 4a of slit 404a and have slit 404b (1), respectively, specific as follows:
at first, shown in Fig. 5 a, selecting long 20 millimeters, wide 4 millimeters, height for use is that 1.75 millimeters quartz glass is quartz glass layer 401a as substrate; At the upper surface sputter thickness of this quartz glass layer 401a is 0.1 micron aluminium, and photoetching aluminium removes the aluminium film of center section; Obtain having the metallic film diaphragm 402a of the first slit 405a; As shown in Figure 4, the shape of the first slit 405a of this metallic film diaphragm 402a is identical with the shape of the fluid passage that will form at last 5, is the taper that narrows down gradually to the centre from two ends; And the both ends open tapering is identical, is 8 °.Center section is a rectangle, and width is 0.2 millimeter, and the thickness that highly is equal to metallic film diaphragm 402a also is 0.1 micron.
Secondly
; Shown in Fig. 5 b, spin coating thickness is 100 microns SU-8 photoresist on metallic film diaphragm 402a, photoetching SU-8 photoresist; Remove unexposed photoresist; Position at the corresponding first slit 405a forms and the identical second slit 406a of the first slit 405a shape, and the width of the rectangular area in the middle of the second slit 406a also is 0.2 millimeter, and thickness is that the thickness of photoresist 403a is 100 microns.
are last, repeat above-mentioned step and make the structural unit 4b with slit 404b.These two structural unit 4a and 4b structure and size are identical.
(2), two structural unit 4a of above-mentioned preparation and 4b are packaged together through the method for bonding, obtain having the sample cell of seal fluid passage 5, its structure is shown in Fig. 5 c.
More than the present invention has been done detailed description; Its purpose is to let the personage that is familiar with this art can understand content of the present invention and implements; Can not limit protection scope of the present invention with this; All equivalences of doing according to spirit of the present invention change or modify, and all should be encompassed in protection scope of the present invention
Claims (10)
1. sample cell that is used for the liquid particles counter; It has the fluid passage of sealing; It is characterized in that: said sample cell comprises two structural units with slit; Each described structural unit with slit comprises quartz glass layer, be formed on the said quartz glass laminar surface and have the metallic film diaphragm of first slit and be formed on the lip-deep photoresist layer of said metallic film diaphragm; The position of first slit of corresponding said metallic film diaphragm is formed with second slit on the said photoresist layer; The said slit of the common formation of said first slit and said second slit, the photoresist layer phase bonding of two said structural units, the described fluid passage of the common formation of the said slit of two said structural units.
2. the sample cell that is used for the liquid particles counter according to claim 1 is characterized in that: said metallic film diaphragm is that the thickness that sputters at said quartz glass laminar surface is 0.05～0.2 micron aluminium film.
3. the sample cell that is used for the liquid particles counter according to claim 1 is characterized in that: said photoresist layer is that to be spin-coated on thickness on the described metallic film diaphragm be 50～250 microns photoresist.
4. the sample cell that is used for the liquid particles counter according to claim 3 is characterized in that: the thickness of said photoresist layer is 80～120 microns.
5. the sample cell that is used for the liquid particles counter according to claim 3 is characterized in that: described photoresist is the SU-8 photoresist.
6. the sample cell that is used for the liquid particles counter according to claim 1; It is characterized in that: said fluid passage is followed successively by liquid feeding end, surveyed area and outlet end from an end to the direction of the other end; Wherein, The taper that said liquid feeding end narrows down for the flow direction along liquid gradually, said surveyed area is a rectangle, the taper that described outlet end broadens for the flow direction along liquid gradually.
7. the sample cell that is used for the liquid particles counter according to claim 6 is characterized in that: the opening tapering of said liquid feeding end is identical with the opening tapering of said outlet end, and the opening tapering is between 6～10 °.
8. according to claim 6 or the 7 described sample cells that are used for the liquid particles counter, it is characterized in that: the length of said fluid passage is 10～40 millimeters, and the width of said surveyed area is 0.1～0.8 millimeter.
9. the sample cell that is used for the liquid particles counter according to claim 8 is characterized in that: the length of said fluid passage is 15～25 millimeters, and the width of said surveyed area is 0.1～0.3 millimeter.
10. the described method for making that is used for the sample cell of liquid particles counter of each claim in the claim 1 to 9 is characterized in that: comprise the steps:
(1) make two described structural units according to following steps respectively with slit:
1., the quartz glass of selecting the setting size for use is as substrate; Set the aluminium of thickness in the upper surface sputter of this quartz glass; Photoetching aluminium; Remove the aluminium film of center section, obtain having the metallic film diaphragm of first slit of setting size and dimension, the shape of said first slit is identical with the shape of the fluid passage that will form at last;
2., the photoresist of thickness is set in spin coating on the metallic film diaphragm, the photoetching photoresist is removed unexposed photoresist, forms and identical second slit of first shape of slit in the position of corresponding first slit;
(2), the photoresist layer through two above-mentioned structural units of bonding is packaged together two structural units, said sample cell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201110331096 CN102507419B (en) | 2011-10-27 | 2011-10-27 | Sample tank for liquid particle counter and production method of sample tank |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110331096 CN102507419B (en) | 2011-10-27 | 2011-10-27 | Sample tank for liquid particle counter and production method of sample tank |
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| CN102507419A true CN102507419A (en) | 2012-06-20 |
| CN102507419B CN102507419B (en) | 2013-07-03 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105486614A (en) * | 2015-12-25 | 2016-04-13 | 北京蓝柯工贸有限公司 | Method for manufacturing check block of insoluble liquid particle detection device and optical sample reservoir |
| CN108982338A (en) * | 2018-09-08 | 2018-12-11 | 长春迈克赛德医疗科技有限公司 | A kind of production method of particle imaging chamber and particle imaging chamber |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105486614A (en) * | 2015-12-25 | 2016-04-13 | 北京蓝柯工贸有限公司 | Method for manufacturing check block of insoluble liquid particle detection device and optical sample reservoir |
| CN105486614B (en) * | 2015-12-25 | 2018-04-10 | 北京蓝柯工贸有限公司 | Manufacture method and optical sample pond that liquid insoluble granule detection means examines block |
| CN108982338A (en) * | 2018-09-08 | 2018-12-11 | 长春迈克赛德医疗科技有限公司 | A kind of production method of particle imaging chamber and particle imaging chamber |
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| CN102507419B (en) | 2013-07-03 |
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