CN102340095A - Double-sealed radio frequency-excited 'Z'-folded CO2 waveguide laser - Google Patents
Double-sealed radio frequency-excited 'Z'-folded CO2 waveguide laser Download PDFInfo
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- CN102340095A CN102340095A CN 201110306088 CN201110306088A CN102340095A CN 102340095 A CN102340095 A CN 102340095A CN 201110306088 CN201110306088 CN 201110306088 CN 201110306088 A CN201110306088 A CN 201110306088A CN 102340095 A CN102340095 A CN 102340095A
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Abstract
The invention relates to a double-sealed radio frequency-excited 'Z'-folded CO2 waveguide laser. A shell is a rectangular box body, and forms an internal vacuum chamber with a shell cover on the upper part of the shell. A folded waveguide discharging system is arranged in the shell. Grooves are correspondingly formed outside outer walls of the shell. Communicated venting holes are formed on groove walls between every two adjacent grooves outside the shell. A front end plate, a rear end plate, a left side plate and a right side plate are correspondingly arranged outside each groove in a sealing way. The shell forms a sealed annular interlayer space with the front end plate, the rear end plate, the left side plate and the right side plate to form an external vacuum chamber. An identical laser working gas with an identical gas pressure is filled into the internal and external vacuum chambers, and a gas pressure difference between the internal and external vacuum chambers is approximate to zero, so gas leakage is retarded. The service life of the laser provided by the invention is prolonged; a regulation circuit and a laser resonator can be conveniently locally disassembled; moreover, the laser has the advantages of compact structure and small volume.
Description
Technical field
The present invention relates to a kind of laser, specifically a kind of double-layer seal RF excited " Z " folded waveguide CO
2Laser.
Background technology
The RF excited waveguide CO of high-output power, small size
2Laser is widely used in fields such as industry, medical science and military affairs, is to improve laser output power, keeps simultaneously that pattern is good, the characteristics of small size, has developed the radio-frequency plumbing CO of multiple " Z " folding type at present
2Laser.In order to install and to debug conveniently, these lasers all are to adopt metal shell as vacuum chamber, and the light hole of its case top lid, shell front and rear wall, the wire hole of shell side wall all are to seal by compressing the rubber o-ring mode.Because the eyeglass that folding laserresonator needs is more, so the light hole of end wall is more before and after the housing.Because of the direction of eyeglass on the needs adjustment shell end wall, the sealing O type circle extruding force between eyeglass and shell end wall possibly be uneven, has little gas leakage sealing the O type circle little position of power that is squeezed.Because the case top lid area is bigger, loam cake periphery O type circle rubber seal line is long, shell side wall circuit lead hole is more, needs the position of sealing more again, and therefore the possibility from the position gas leakage of sealing O type circle is bigger.The radio-frequency plumbing CO of existing " Z " folding type
2The vacuum chamber of laser all is the single hull hermetically-sealed construction, and vacuum chamber inner and outer air pressure difference is bigger, thereby is difficult to the vacuum seal that the long period keeps height, and laser life-span falls short of.
Summary of the invention
Technical problem to be solved by this invention is the deficiency that overcomes above-mentioned prior art; Provide a kind of compact conformation, volume little, can distinguish partial disassembly and install, adjustment, easy to operate; The double Shell sealing, double-layer seal RF excited " Z " the folded waveguide CO that useful life is long
2Laser.
The technical scheme that the present invention solves the problems of the technologies described above employing is: a kind of double-layer seal RF excited " Z " folded waveguide CO
2Laser; It is provided with housing, cap, folded waveguide discharge system, laser resonant cavity mirror, electric micro actuator, air valve, radio-frequency joint; Housing is the whole case of rectangle that is made progress by the opening that the end, front bulkhead, aft bulkhead, left side wall, right side wall constitute; Upper shed is equipped with cap; The folded waveguide discharge system places in the housing; Several laser resonant cavity mirrors respectively sealing and fixing on the front bulkhead of housing, aft bulkhead outside unthreaded hole; Radio-frequency joint, electric micro actuator place outside the left side wall of housing, and electric micro actuator, radio-frequency joint, folded waveguide discharge system are connected by some electric wires of hermetically passing housing left side wall, and air valve sealing is fixed on the pore in the right side wall outside of housing; It is characterized in that: the front bulkhead of said housing, aft bulkhead, left side wall, corresponding respectively forward recess, rearward recess, left groove, the right groove of being provided with in the right side wall outside; Cell wall between each adjacent grooves of hull outside is provided with the hole of collaborating that interconnects, and forward recess, rearward recess, left groove, right groove outside seal are equipped with corresponding front end-plate, end plate, left plate, right plate, and housing respectively and form the closed ring mezzanine space between the front end-plate, end plate, left plate, right plate; Outgoing mirror opposite position with laser resonant cavity mirror on front end-plate or the end plate is provided with unthreaded hole and is sealed and installed with the laser output window; Left plate is provided with electric hole and in its outside seal radio-frequency joint is installed; Be provided with circular pore with housing right side wall upper air valve opposite position on the right plate; Sealing and fixing is passed circular pore at the air valve of housing right side wall, and protruding right plate also is sealed and installed with second air valve on the right plate.
The periphery of housing upper shell cover according to the invention is provided with the rectangular ring boss; An enclosing cover is installed in sealing on the rectangular ring boss; Form the cap mezzanine space between cap and the enclosing cover; Rectangular ring boss inboard is provided with several air vent holes on the housing, and the cap mezzanine space constitutes whole exterior vacuum chamber through air vent hole and annular gap spatial communication.
Be separately installed with the O RunddichtringO between front bulkhead according to the invention, aft bulkhead and front end-plate, the end plate, be separately installed with the O RunddichtringO between left side wall, right side wall and left plate, the right plate, and use screw in compression.
Also be separately installed with the O RunddichtringO between cap according to the invention, enclosing cover and the housing and use screw in compression.
Clamp between the inner cylinder face of circular pore on the external cylindrical surface of air valve according to the invention and the right plate O RunddichtringO is installed, form removable seal.
The present invention adopts above-mentioned composition structure, constitutes inner vacuum chamber between housing and the cap, looping exterior vacuum chamber between housing and front end-plate, end plate, left plate, the right plate; The cap mezzanine space passes through air vent hole and annular gap spatial communication, and then constitutes whole exterior vacuum chamber, and the laser core component has been formed double-layer seal; Against existing technologies, compact conformation of the present invention, volume are little, can distinguish partial disassembly adjustment circuit and laserresonator are installed; Adjustment, easy to operate; The double Shell sealing prolongs laser life-span, is a kind of desirable double-layer seal RF excited " Z " folded waveguide CO
2Laser.
Description of drawings
Below in conjunction with accompanying drawing the present invention is further specified.
Fig. 1 is that the present invention forms structural representation.
Fig. 2 is a horizontal section sketch map of the present invention.
Fig. 3 is a longitudinal profile sketch map of the present invention.
Label is among the figure: 1. housing, 2. cap, 3. folded waveguide discharge system, 4. laser resonant cavity mirror, 5. electric micro actuator, 6. air valve; 7. radio-frequency joint, 8. forward recess, 9. rearward recess, 10. left groove, 11. right grooves, 12. front end-plates, 13. end plates, 14. left plates, 15. right plates; The hole 16. collaborate, 17. rectangular ring boss, 18. enclosing covers, 19. air vent holes, 40. unthreaded holes; 41. the laser output window, 60. circular pores, 61. second air valve installing holes, 62. second air valves, 70. electric holes.
Embodiment
Can find out a kind of double-layer seal RF excited of the present invention " Z " folded waveguide CO from Fig. 1, Fig. 2, Fig. 3
2Laser is provided with housing 1, cap 2, folded waveguide discharge system 3, laser resonant cavity mirror 4, electric micro actuator 5, air valve 6, radio-frequency joint 7 etc.Housing 1 is the whole case of rectangle that is made progress by the opening that the end, front bulkhead, aft bulkhead, left side wall, right side wall constitute, and housing 1 can be manufactured by aluminium alloy or other solid material.Housing 1 upper shed is equipped with cap 2; Folded waveguide discharge system 3 places in the housing 1; Several laser resonant cavity mirrors 4 respectively sealing and fixing on the front bulkhead of housing 1, aft bulkhead outside unthreaded hole; Radio-frequency joint 7, electric micro actuator 5 place outside the left side wall of housing, and electric micro actuator 5, radio-frequency joint 7, folded waveguide discharge system 3 are connected by some electric wires of the left side wall of hermetically passing housing 1, constitute discharge circuit.Air valve 6 sealing and fixing are on the pore in the right side wall outside of housing 1.
The front bulkhead of housing 1 according to the invention, aft bulkhead, left side wall, corresponding respectively forward recess 8, rearward recess 9, left groove 10, the right groove 11 of being provided with in the right side wall outside, the cell wall between each adjacent grooves in housing 1 outside is provided with the hole 16 of collaborating that interconnects.Forward recess 8, rearward recess 9, left groove 10,11 outside seals of right groove are equipped with corresponding front end-plate 12, end plate 13, left plate 14, right plate 15; Housing 1 respectively and form the closed pockets space between the front end-plate 12, end plate 13, left plate 14, right plate 15; Just form the annular gap space, constituted annular exterior vacuum chamber.Outgoing mirror opposite position with laser resonant cavity mirror 4 on front end-plate 12 or the end plate 13 is provided with unthreaded hole 40 and is sealed and installed with laser output window 41, and left plate 14 is provided with electric hole 70 and in its outside seal radio-frequency joint 7 is installed; With housing 1 right side wall upper air valve 6 opposite positions circular pore 60 is arranged on the right plate 15; The circular pore 70 that air valve 6 passes on the right plate 15 is protruding; Clamped sealed O type circle between the inner cylinder face of circular pore 60 on the external cylindrical surface of air valve 6 and the right plate 15, removable seal; Also be provided with the second air valve installing hole 61 on the right plate 15, and be sealed and installed with second air valve 62.
Housing 1 upper shed position ring according to the invention is provided with rectangular ring boss 17 around the periphery of cap 2; Housing 1 is one with rectangular ring boss 17; An enclosing cover 18 is installed in sealing on the rectangular ring boss 17; Between cap 2 and the enclosing cover 18 space is arranged, form the cap mezzanine space between cap 2 and the enclosing cover 18.Be positioned at inboard, rectangular ring boss 17 inside edge on the housing 1 several vertical downward air vent holes 19 are arranged; Through air vent hole 19; The annular gap spatial communication that cap mezzanine space and forward recess 8, rearward recess 9, left groove 10, right groove 11 form constitutes whole exterior vacuum chamber.
It is to press the O RunddichtringO that the sealing of front end-plate of the present invention 12, end plate 13, left plate 14, right plate 15, cap 2, enclosing cover 18 is installed, and uses screw in compression.Be separately installed with the O RunddichtringO between said particularly front bulkhead, aft bulkhead and front end-plate 12, the end plate 13, be separately installed with the O RunddichtringO between left side wall, right side wall and left plate 14, the right plate 15, and use screw in compression.Also be separately installed with the O RunddichtringO and use screw in compression between said cap 2, enclosing cover 18 and the housing 1.It can be to press the O RunddichtringO that the sealing of laser resonant cavity mirror 3, laser output window 41 is installed, and adds screw in compression with becket.
Cap according to the invention 2, front end-plate 12, end plate 13, left plate 14, right plate 15, enclosing cover 18 all are to be manufactured by materials such as aluminium alloys.
Clamp between the inner cylinder face of circular pore on the external cylindrical surface of air valve 6 according to the invention and the right plate O RunddichtringO is installed, form removable seal.
Laser resonant cavity mirror 3 of the present invention is separately fixed in forward recess 8, the rearward recess 9, and electric micro actuator 5, wire seal parts are fixed in the left groove 10.
The installation of the present invention and the course of work are: each electric wire on the housing wall, air valve, laser resonant cavity mirror all seal and install and fix, and press O type circle sealing and fixing in housing 1 upper shed, to form inner vacuum chamber with cap 1 again.Adjustment resonator mirror 4, electric micro actuator 5, make folded waveguide discharge system 3 and laserresonator reach optimum state and export laser after install each side plate 12,13,14,15 and enclosing cover 18, the second air valves 62, outer output window 41, radio frequency source joint 7 again additional and all seal with O type circle with each respective side panels respectively.It is protruding and make removable seal between air valve 5 and the circular pore 60 to pass the circular pore 60 of corresponding position on the right plate 15 at the air valve 6 on the right wall of housing 1, so just can outside side plate, bleed through 6 pairs of inner vacuum chambers of air valve or inflate.
Enclosing cover 8 covers on housing 1 upper shed place rectangular ring boss 17; Press the sealing of O type circle; The housing 1 outer interior space of each groove is communicated with by the hole 16 of collaborating each other, and spaces form outer vacuum chamber by spatial communication between air vent hole 19 and cap 2 and the enclosing cover 18 again in each groove 8,9,10,11.
Because need the direction of adjustment laser resonant cavity mirror 3, possibly cause laser resonant cavity mirror 3 to press the pressure of O type circle uneven, thereby only have the vacuum chamber of solid wall sealing to leak gas easily.Outer vacuum chamber side plate not only perforate is few but also need not adjust the laserresonator chamber mirror 4 of direction, and each O RunddichtringO on the side plate is stressed can be even, thereby the vacuum chamber of double shells of the present invention sealing is not easy gas leakage.
Vacuumize and fill working-laser material gas through 6 pairs of housing 1 inner vacuum chambers of air valve, treat the laser operate as normal after, vacuumize through 62 pairs of outer vacuum chambers of second air valve again and fill same laser operation material gas.Approximate no draught head has draught head between exterior vacuum chamber and the extraneous space between the interior exterior vacuum chamber.Treat laser works or deposit after the long period exterior vacuum chamber may and the external world between micro-leakage is arranged, the air pressure of the working-laser material gas exterior vacuum chamber in can the trace variation.Gas leakage has micro-draught head between the exterior vacuum chamber like this, possibly have micro-leakage between the interior exterior vacuum chamber, even but also can be very small to the good bad influence of quality of internal layer vacuum chamber working-laser material gas.Because the working-laser material gaseous mass in the exterior vacuum chamber only is micro-variation, thereby the present invention delayed the slow gas leakage of inner vacuum chamber greatly, prolonged laser life-span greatly.Through under the same conditions experiment relatively, only be starkly lower than the life-span of laser according to the invention with life-span of the laser of housing 1 inner vacuum chamber work.
When needs adjustment laserresonator, can partial disassembly fall the direction that front end-plate 12 front or rear end plates 13 are adjusted laser resonant cavity mirror.Can partial disassembly when needs adjustment discharge system circuit fall left plate 14 adjustment circuit micro actuators 5 or partial disassembly and fall the circuit of two-layer loam cake adjustment enclosure interior.Radio frequency source also can be input in the folded waveguide discharge system through housing left and right sides wall respectively.
The present invention has realized that promptly double Shell vacuum seal prolongs laser life-span, partial disassembly's adjustment circuit and laserresonator easily again, but also have laser structure compactness, advantage that volume is little.
The vacuum-packed basic structure of double Shell of the present invention also is applicable to the gas laser of other kind.
Claims (5)
1. a double-layer seal RF excited " Z " folded waveguide CO
2Laser; It is provided with housing, cap, folded waveguide discharge system, laser resonant cavity mirror, electric micro actuator, air valve, radio-frequency joint; Housing is the whole case of rectangle that is made progress by the opening that the end, front bulkhead, aft bulkhead, left side wall, right side wall constitute; Upper shed is equipped with cap; The folded waveguide discharge system places in the housing; Several laser resonant cavity mirrors respectively sealing and fixing on the front bulkhead of housing, aft bulkhead outside unthreaded hole; Radio-frequency joint, electric micro actuator place outside the left side wall of housing, and electric micro actuator, radio-frequency joint, folded waveguide discharge system are connected by some electric wires of hermetically passing housing left side wall, and air valve sealing is fixed on the pore in the right side wall outside of housing; It is characterized in that: the front bulkhead of said housing, aft bulkhead, left side wall, corresponding respectively forward recess, rearward recess, left groove, the right groove of being provided with in the right side wall outside; Cell wall between each adjacent grooves of hull outside is provided with the hole of collaborating that interconnects, and forward recess, rearward recess, left groove, right groove outside seal are equipped with corresponding front end-plate, end plate, left plate, right plate, and housing respectively and form the closed ring mezzanine space between the front end-plate, end plate, left plate, right plate; Outgoing mirror opposite position with laser resonant cavity mirror on front end-plate or the end plate is provided with unthreaded hole and is sealed and installed with the laser output window; Left plate is provided with electric hole and in its outside seal radio-frequency joint is installed; Be provided with circular pore with housing right side wall upper air valve opposite position on the right plate; Sealing and fixing is passed circular pore at the air valve of housing right side wall, and protruding right plate also is sealed and installed with second air valve on the right plate.
2. according to the said double-layer seal RF excited of claim 1 " Z " folded waveguide CO
2Laser; It is characterized in that: the periphery of said housing upper shell cover is provided with the rectangular ring boss; An enclosing cover is installed in sealing on the rectangular ring boss, forms the cap mezzanine space between cap and the enclosing cover, and rectangular ring boss inboard is provided with several air vent holes on the housing; The cap mezzanine space constitutes whole exterior vacuum chamber through air vent hole and annular gap spatial communication.
3. according to the said double-layer seal RF excited of claim 1 " Z " folded waveguide CO
2Laser is characterized in that: be separately installed with the O RunddichtringO between said front bulkhead, aft bulkhead and front end-plate, the end plate, be separately installed with the O RunddichtringO between left side wall, right side wall and left plate, the right plate, and use screw in compression.
4. according to the said double-layer seal RF excited of claim 1 " Z " folded waveguide CO
2Laser is characterized in that: clamp between the inner cylinder face of circular pore on the external cylindrical surface of said air valve and the right plate O RunddichtringO is installed, form removable seal.
5. according to the said double-layer seal RF excited of claim 2 " Z " folded waveguide CO
2Laser is characterized in that: also be separately installed with the O RunddichtringO between said cap, enclosing cover and the housing, and use screw in compression.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110306088 CN102340095B (en) | 2011-10-11 | 2011-10-11 | Double-sealed radio frequency-excited 'Z'-folded waveguide CO2 laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110306088 CN102340095B (en) | 2011-10-11 | 2011-10-11 | Double-sealed radio frequency-excited 'Z'-folded waveguide CO2 laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102340095A true CN102340095A (en) | 2012-02-01 |
| CN102340095B CN102340095B (en) | 2012-09-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110306088 Expired - Fee Related CN102340095B (en) | 2011-10-11 | 2011-10-11 | Double-sealed radio frequency-excited 'Z'-folded waveguide CO2 laser |
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| Country | Link |
|---|---|
| CN (1) | CN102340095B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03252183A (en) * | 1990-03-01 | 1991-11-11 | Mochida Pharmaceut Co Ltd | Sealed carbon dioxide gas laser tube |
| CN1213200A (en) * | 1997-09-30 | 1999-04-07 | 华中理工大学 | Pneumatic cooling electric exciting gas laser |
| US5953360A (en) * | 1997-10-24 | 1999-09-14 | Synrad, Inc. | All metal electrode sealed gas laser |
| CN1992453A (en) * | 2005-12-30 | 2007-07-04 | 北京志恒达科技有限公司 | Sealed-off radio-frequency excited CO* waveguide laser |
-
2011
- 2011-10-11 CN CN 201110306088 patent/CN102340095B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03252183A (en) * | 1990-03-01 | 1991-11-11 | Mochida Pharmaceut Co Ltd | Sealed carbon dioxide gas laser tube |
| CN1213200A (en) * | 1997-09-30 | 1999-04-07 | 华中理工大学 | Pneumatic cooling electric exciting gas laser |
| US5953360A (en) * | 1997-10-24 | 1999-09-14 | Synrad, Inc. | All metal electrode sealed gas laser |
| CN1992453A (en) * | 2005-12-30 | 2007-07-04 | 北京志恒达科技有限公司 | Sealed-off radio-frequency excited CO* waveguide laser |
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| Publication number | Publication date |
|---|---|
| CN102340095B (en) | 2012-09-05 |
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Granted publication date: 20120905 Termination date: 20131011 |