CN102301484B - 非对称结型场效应晶体管及其制造方法 - Google Patents
非对称结型场效应晶体管及其制造方法 Download PDFInfo
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- CN102301484B CN102301484B CN2010800062671A CN201080006267A CN102301484B CN 102301484 B CN102301484 B CN 102301484B CN 2010800062671 A CN2010800062671 A CN 2010800062671A CN 201080006267 A CN201080006267 A CN 201080006267A CN 102301484 B CN102301484 B CN 102301484B
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000005669 field effect Effects 0.000 title abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 234
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 238000002955 isolation Methods 0.000 claims description 67
- 239000002019 doping agent Substances 0.000 claims description 42
- 229910052751 metal Inorganic materials 0.000 claims description 40
- 239000002184 metal Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 5
- 239000002800 charge carrier Substances 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 238000002513 implantation Methods 0.000 description 22
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- 150000001875 compounds Chemical class 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 241000894007 species Species 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001339 C alloy Inorganic materials 0.000 description 1
- 244000287680 Garcinia dulcis Species 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- AXQKVSDUCKWEKE-UHFFFAOYSA-N [C].[Ge].[Si] Chemical compound [C].[Ge].[Si] AXQKVSDUCKWEKE-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
- -1 germanium metal compound Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910021483 silicon-carbon alloy Inorganic materials 0.000 description 1
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1058—Channel region of field-effect devices of field-effect transistors with PN junction gate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/22—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIBVI compounds
Abstract
Description
Claims (25)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/388,586 US7943445B2 (en) | 2009-02-19 | 2009-02-19 | Asymmetric junction field effect transistor |
US12/388,586 | 2009-02-19 | ||
PCT/EP2010/050948 WO2010094541A1 (en) | 2009-02-19 | 2010-01-27 | Asymmetric junction field effect transistor and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
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CN102301484A CN102301484A (zh) | 2011-12-28 |
CN102301484B true CN102301484B (zh) | 2013-10-30 |
Family
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CN2010800062671A Active CN102301484B (zh) | 2009-02-19 | 2010-01-27 | 非对称结型场效应晶体管及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7943445B2 (zh) |
EP (1) | EP2389688B1 (zh) |
CN (1) | CN102301484B (zh) |
WO (1) | WO2010094541A1 (zh) |
Families Citing this family (27)
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WO2009082706A1 (en) * | 2007-12-21 | 2009-07-02 | The Trustees Of Columbia University In The City Of New York | Active cmos sensor array for electrochemical biomolecular detection |
US20100176482A1 (en) | 2009-01-12 | 2010-07-15 | International Business Machine Corporation | Low cost fabrication of double box back gate silicon-on-insulator wafers with subsequent self aligned shallow trench isolation |
US8587063B2 (en) * | 2009-11-06 | 2013-11-19 | International Business Machines Corporation | Hybrid double box back gate silicon-on-insulator wafers with enhanced mobility channels |
US8575702B2 (en) * | 2009-11-27 | 2013-11-05 | Magnachip Semiconductor, Ltd. | Semiconductor device and method for fabricating semiconductor device |
US8481380B2 (en) | 2010-09-23 | 2013-07-09 | International Business Machines Corporation | Asymmetric wedge JFET, related method and design structure |
US8664048B2 (en) * | 2010-12-28 | 2014-03-04 | Northrop Grummen Systems Corporation | Semiconductor devices with minimized current flow differences and methods of same |
US8618583B2 (en) | 2011-05-16 | 2013-12-31 | International Business Machines Corporation | Junction gate field effect transistor structure having n-channel |
US8598937B2 (en) * | 2011-10-07 | 2013-12-03 | Transphorm Inc. | High power semiconductor electronic components with increased reliability |
CN103066109B (zh) * | 2011-10-18 | 2015-09-30 | 旺宏电子股份有限公司 | 半导体结构及其形成方法 |
US8927357B2 (en) * | 2011-11-11 | 2015-01-06 | International Business Machines Corporation | Junction field-effect transistor with raised source and drain regions formed by selective epitaxy |
US10269658B2 (en) | 2012-06-29 | 2019-04-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit devices with well regions and methods for forming the same |
US9748356B2 (en) | 2012-09-25 | 2017-08-29 | Stmicroelectronics, Inc. | Threshold adjustment for quantum dot array devices with metal source and drain |
US9601630B2 (en) * | 2012-09-25 | 2017-03-21 | Stmicroelectronics, Inc. | Transistors incorporating metal quantum dots into doped source and drain regions |
WO2014062936A1 (en) | 2012-10-17 | 2014-04-24 | The Trustees Of Columbia University In The City Of New York | Cmos-integrated jfet for dense low-noise bioelectronic platforms |
US9287413B2 (en) * | 2013-05-13 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) and semiconductor device |
US9882012B2 (en) | 2013-05-13 | 2018-01-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction gate field-effect transistor (JFET) having source/drain and gate isolation regions |
US10002938B2 (en) | 2013-08-20 | 2018-06-19 | Stmicroelectronics, Inc. | Atomic layer deposition of selected molecular clusters |
CN103633149B (zh) * | 2013-12-10 | 2016-02-17 | 杭州士兰集成电路有限公司 | 恒流二极管及其制造方法 |
KR101716957B1 (ko) * | 2014-07-02 | 2017-03-15 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 정션 게이트 전계효과 트랜지스터, 반도체 디바이스 및 제조 방법 |
US9722097B2 (en) * | 2015-09-16 | 2017-08-01 | Vanguard International Semiconductor Corporation | Semiconductor device and method for manufacturing the same |
US9653618B1 (en) | 2015-10-21 | 2017-05-16 | United Silicon Carbide, Inc. | Planar triple-implanted JFET |
US10446695B2 (en) | 2015-10-21 | 2019-10-15 | United Silicone Carbide, Inc. | Planar multi-implanted JFET |
US10079294B2 (en) * | 2016-06-28 | 2018-09-18 | Texas Instruments Incorporated | Integrated JFET structure with implanted backgate |
WO2018187651A1 (en) * | 2017-04-07 | 2018-10-11 | United Silicon Carbide, Inc. | Planar multi-implanted jfet |
KR102482194B1 (ko) * | 2018-08-24 | 2022-12-27 | 삼성전기주식회사 | 삽입손실이 개선된 cmos 트랜지스터의 배치 구조 |
JP2022524103A (ja) | 2019-03-08 | 2022-04-27 | メビオン・メディカル・システムズ・インコーポレーテッド | カラム別の放射線の照射およびそのための治療計画の生成 |
CN113629152A (zh) * | 2021-07-07 | 2021-11-09 | 华虹半导体(无锡)有限公司 | Jfet器件及其制作方法 |
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JPS61100975A (ja) * | 1984-10-22 | 1986-05-19 | Nec Corp | 接合形電界効果トランジスタ |
DE3602461A1 (de) | 1986-01-28 | 1987-07-30 | Telefunken Electronic Gmbh | Verfahren zum herstellen eines sperrschicht-feldeffekttransistors |
US5637898A (en) | 1995-12-22 | 1997-06-10 | North Carolina State University | Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance |
SE512259C2 (sv) | 1998-03-23 | 2000-02-21 | Abb Research Ltd | Halvledaranordning bestående av dopad kiselkarbid vilken innefattar en pn-övergång som uppvisar åtminstone en ihålig defekt och förfarande för dess framställning |
US6207530B1 (en) * | 1998-06-19 | 2001-03-27 | International Business Machines Corporation | Dual gate FET and process |
US6545316B1 (en) | 2000-06-23 | 2003-04-08 | Silicon Wireless Corporation | MOSFET devices having linear transfer characteristics when operating in velocity saturation mode and methods of forming and operating same |
JP4332925B2 (ja) * | 1999-02-25 | 2009-09-16 | ソニー株式会社 | 半導体装置およびその製造方法 |
US6784486B2 (en) | 2000-06-23 | 2004-08-31 | Silicon Semiconductor Corporation | Vertical power devices having retrograded-doped transition regions therein |
US7667268B2 (en) * | 2002-08-14 | 2010-02-23 | Advanced Analogic Technologies, Inc. | Isolated transistor |
DE102004001340A1 (de) * | 2004-01-08 | 2005-08-04 | Infineon Technologies Ag | Verfahren zum Herstellen eines Nanoelement-Feldeffektransistors, Nanoelement-Feldeffekttransistor und Nanoelement-Anordnung |
DE102004018153B9 (de) | 2004-04-08 | 2012-08-23 | Austriamicrosystems Ag | Hochvolt-Sperrschicht-Feldeffekttransistor mit retrograder Gatewanne und Verfahren zu dessen Herstellung |
JP5031566B2 (ja) | 2004-09-01 | 2012-09-19 | クレー・スウェーデン・アクチボラゲット | チャネル層の下部および上部にスペーサが含まれる横方向電界効果トランジスタおよびその製造方法 |
US7341915B2 (en) * | 2005-05-31 | 2008-03-11 | Freescale Semiconductor, Inc. | Method of making planar double gate silicon-on-insulator structures |
US7829938B2 (en) * | 2005-07-14 | 2010-11-09 | Micron Technology, Inc. | High density NAND non-volatile memory device |
US20080001183A1 (en) | 2005-10-28 | 2008-01-03 | Ashok Kumar Kapoor | Silicon-on-insulator (SOI) junction field effect transistor and method of manufacture |
US7348228B2 (en) * | 2006-05-25 | 2008-03-25 | Texas Instruments Incorporated | Deep buried channel junction field effect transistor (DBCJFET) |
US7804150B2 (en) | 2006-06-29 | 2010-09-28 | Fairchild Semiconductor Corporation | Lateral trench gate FET with direct source-drain current path |
-
2009
- 2009-02-19 US US12/388,586 patent/US7943445B2/en active Active
-
2010
- 2010-01-27 WO PCT/EP2010/050948 patent/WO2010094541A1/en active Application Filing
- 2010-01-27 EP EP10701251.0A patent/EP2389688B1/en active Active
- 2010-01-27 CN CN2010800062671A patent/CN102301484B/zh active Active
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2011
- 2011-03-01 US US13/037,485 patent/US8169007B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
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JP昭61-100975A 1986.05.19 |
Also Published As
Publication number | Publication date |
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EP2389688A1 (en) | 2011-11-30 |
WO2010094541A1 (en) | 2010-08-26 |
CN102301484A (zh) | 2011-12-28 |
US20110147808A1 (en) | 2011-06-23 |
EP2389688B1 (en) | 2018-12-05 |
US7943445B2 (en) | 2011-05-17 |
US8169007B2 (en) | 2012-05-01 |
US20100207173A1 (en) | 2010-08-19 |
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