CN102296273B - Rotating cathode drive system for vacuum magnetron sputtering coating film - Google Patents
Rotating cathode drive system for vacuum magnetron sputtering coating film Download PDFInfo
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- CN102296273B CN102296273B CN 201010208947 CN201010208947A CN102296273B CN 102296273 B CN102296273 B CN 102296273B CN 201010208947 CN201010208947 CN 201010208947 CN 201010208947 A CN201010208947 A CN 201010208947A CN 102296273 B CN102296273 B CN 102296273B
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Abstract
The invention discloses a rotating cathode drive system for a vacuum magnetron sputtering coating film, which comprises a polyformaldehyde base (1), a drive head shell (2), a drive shaft (3), a drive gear (30), a driven gear (31), a shaft sleeve (4), an input shaft head (40), a magnetic core shaft (41), a cooling water pipe interface (5), an electric brush terminal (6), an electric brush device (60), a target material (9), a front end cover (10) and a rear end cover (11), wherein the drive gear (30) is a bevel gear and arranged at the lower end of the drive shaft (3), the driven gear (31) is a bevel gear, the drive gear and the driven gear are in transmission through a bevel gear transmission manner, joints of the polyformaldehyde base (1) with the drive head shell (2) and the electric brush terminal (6) are sealed by adopting a static seal structure (7), the joint of the polyformaldehyde base (1) with the drive shaft (3) is sealed by adopting a dynamic seal structure (8); in addition, joints of the shaft sleeve (4) with the front end cover (10) and the rear end cover (11) are sealed by adopting two dynamic seal structures (8). The invention has the technical effects of high coating efficiency and long service life of the drive system.
Description
Technical field
The present invention relates to a kind of film coating sputtering device, refer more particularly to driving head housing and driving head polyoxymethylene pedestal joint employing two pass static seal, dynamic seal is adopted in driving head polyoxymethylene pedestal and drive shaft joint, and driving head polyoxymethylene pedestal and input spindle nose junction adopt vacuum magnetron sputtering coating film that two pass dynamic seal mode seals with the drive system of rotating cathode device.
Background technology
vacuum magnetron sputtering coating film is that in current coating process, coating quality is best, the coating process that range of application is the widest, in this coating process, selection to filming equipment is important, and in filming equipment, magnetic control sputtering cathode is particularly important, what generally adopt at present is the plane sputter cathode, due to the fixing target zone of a plane sputter cathode sputter, can form runway shape sputter area after certain hour, can affect homogeneity and the stability of later stage plated film, and the revolvable sputter cathode of more advanced sputtering target material is not overripened due to prior art, easily produce gas leakage, leak and the phenomenon such as negative electrode short circuit, have a strong impact on the quality of plated film and the maintenance intervals of equipment, reduced the utilization ratio of target, notification number be CN1865485A and CN2923740Y Introduction To Cn Patent a kind of target system for surface metal coating device, in above-mentioned two patents, its transmission mechanism adopts driving chain wheel, sprocket wheel is arranged in equipment, it keeps in repair inconvenient, simultaneously, transmission efficiency is not high, affect the quality of plated film.In addition, in the equipment that forms in above-mentioned patent, do not consider the stopping property of equipment, thereby cause gas leakage, leak and the phenomenon such as negative electrode short circuit, accelerated equipment loss, affect effect and the production efficiency of plated film.
Summary of the invention
Technical problem to be solved by this invention is to provide that a kind of sputter cathode can rotate, the rotating cathode drive system for vacuum magnetron sputtering coating film of good airproof performance.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is to provide a kind of rotating cathode drive system for vacuum magnetron sputtering coating film, it comprises polyoxymethylene pedestal, driving head housing, drive shaft, driving gear, follower gear, axle sleeve, input spindle nose, core axis, water-cooled tube interface, brush terminal stud, target, front end end cover, rear end cap, lubricating cup, wherein, described driving gear is arranged on the drive shaft lower end, described driving gear is cone gear, follower gear is cone gear, and driving gear and follower gear carry out transmission by the bevel gear drive mode.
A kind of priority scheme of the present invention is, described polyoxymethylene pedestal and the sealing of driving head housing joint employing static seal structure, drive shaft and the sealing of polyoxymethylene pedestal joint employing movable sealing structure, brush terminal stud and the sealing of polyoxymethylene pedestal joint employing static seal structure, axle sleeve and front end end cover or the sealing of rear end cap joint employing two pass movable sealing structure, driving head housing and front end end cover or rear end cap joint adopt the static seal structure sealing.Wherein, described static seal is for being provided with at least more than one O-ring seals two object junctions of being connected, and described dynamic seal is for being provided with the backbone sealing ring more than at least one pair of two object junctions of being connected.
Another kind of priority scheme of the present invention is, the rear and front end of described axle sleeve is equipped with rolling bearing, and wherein, the two pass dynamic seal that described rolling bearing is positioned on axle sleeve simultaneously is inboard.
Another kind of priority scheme of the present invention is, described follower gear is connected and fixed by bolt and axle sleeve, axle sleeve is built-in with the input spindle nose, wherein, described axle sleeve also is provided with the tensioning sleeve transmission mechanism with the tail end of input spindle nose junction, and described input spindle nose and core axis joint also are provided with the magnetic core web member, when follower gear moves, by axle sleeve, input spindle nose, kind mandrel web member drive the core axis motion successively.
Another kind of priority scheme of the present invention is, wherein, the core axis tail end also is provided with the magnetic core stationary shaft, and magnetic core stationary shaft and described rear end cap junction also are provided with insulating mat.
Another kind of priority scheme of the present invention is, described water-cooled tube interface lower end is connected with cooling-water duct, also is provided with a water-cooled tube in described input spindle nose, and described water-cooled tube inner chamber communicates with cooling-water duct, wherein, cooling-water duct tail end mouth is arranged on magnetic core web member lower end.
Another kind of priority scheme of the present invention is,, described bore sleeve tail end also is provided with at least more than one water coolant return flow line, and described water-cooled tube interface, cooling-water duct, water coolant return flow line, water-cooled tube form cooling water recirculation system.
Another kind of priority scheme of the present invention is,, described polyoxymethylene pedestal top also is provided with a lubricating cup, and described lubricating cup lower end is connected to grease channel, and described grease channel passes front end end cover, and tail end is to the central position of the joint of front end end cover and axle sleeve.
Another kind of priority scheme of the present invention is, described target is placed in the core axis upper end, and is connected in magnetic core web member excircle top, and the target outer end also is provided with a shielding case, and described shielding case tail end is fixed on front end end cover.
Technique effect of the present invention is to provide a kind of rotating cathode drive system for vacuum magnetron sputtering coating film, carries out transmission because it adopts the cone gear type of drive, can improve rotating speed, thereby improves the efficient of plated film, extends the life-span of rotating cathode drive system.In addition, static seal or movable sealing structure sealing are adopted in two component junction, can obtain good sealing effectiveness, prevent gas leakage, leak and the phenomenon such as negative electrode short circuit, have reduced maintenance cost, have extended the life-span of rotating cathode drive system.
Description of drawings
Fig. 1 is the diagrammatic cross-section of drive system of the present invention;
Fig. 2 is the diagrammatic cross-section of driving head of the present invention;
Fig. 3 is the local enlarged diagram in place, water coolant of the present invention return flow line;
Fig. 4 is the local enlarged diagram of cooling-water duct of the present invention;
Fig. 5 is terminal stud seal of tube structure partial enlarged diagram of the present invention;
Fig. 6 is the local enlarged diagram of movable sealing structure of the present invention;
Fig. 7 is the schematic diagram on polyoxymethylene pedestal of the present invention top.
1-polyoxymethylene pedestal, 2-driving head housing, the 3-drive shaft, the 4-axle sleeve, 5-water-cooled tube interface, 6-brush terminal stud, the 7-static seal, the 8-dynamic seal, the 9-target, the 10-front end end cover, the 11-rear end cap, the 12-shielding case, the 13-insulating mat, the 14-rolling bearing, the 30-driving gear, the 31-follower gear, 32-tensioning sleeve transmission mechanism, the 33-drive shaft hole, 40-inputs spindle nose, the 41-core axis, 42-magnetic core stationary shaft, 43-magnetic core interconnecting piece, 50-water-cooled tube passage, the 51-water-cooled tube, 52-water coolant return flow line, 53-water-cooled tube passage, 60-wiring column jecket, the 61-brushgear, 63-terminal stud pore, the 70-O RunddichtringO, the 80-backbone sealing ring, the 100-lubricating cup, the 101-grease channel, 102-grease channel hole.
Embodiment
For clearer explanation technical scheme of the present invention, the present invention will be further described below in conjunction with accompanying drawing.
with reference to Fig. 1, shown in Figure 2, shown in Figure 7, the driving head polyoxymethylene pedestal 1 on rotating cathode drive system top is provided with four datum holes, wherein, above-mentioned four datum holes are divided into drive shaft hole 33, terminal stud pore 63, water-cooled tube passage 53, grease channel hole 102, be provided with drive shaft 3 in drive shaft hole 33, drive shaft 3 lower ends are connected with driving gear 30, driving gear 30 is cone gear, driving gear 30 drives follower gear 31 by the bevel gear drive mode, follower gear 31 is fixing by bolt and axle sleeve 4, also be provided with input spindle nose 40 in inner chamber on axle sleeve 4, input spindle nose 40 front ends are connected with magnetic core web member 43, magnetic core web member 43 front ends are connected with core axis 41, core axis 41 rear ends also are connected with magnetic core stationary shaft 42, when drive shaft 3 motion, drive successively driving gear 30, follower gear 31, axle sleeve 4, input spindle nose 40, magnetic core web member 42, core axis 41 motions.
with reference to Fig. 1, shown in Figure 7, polyoxymethylene pedestal 1 is cylindrical, be provided with the driving head housing 2 that surrounds it on its excircle, described driving head housing 2 and polyoxymethylene pedestal 1 joint employing static seal 7 sealing structures, be respectively arranged with front end end cover 10 before and after the lower end of driving head housing 2, rear end cap 11, driving head housing 2 and front end end cover 10 or rear end cap 11 joints are provided with static seal 7, wherein, described front end end cover 10, rear end cap 11, polyoxymethylene pedestal 1 forms an airtight cavity, and axle sleeve 4 is enclosed in this cavity, axle sleeve 4 with before, rear end cap (10, 11) joint also is provided with a pair of rolling bearing 14, adopt multiple tracks dynamic seal 8 sealing structures in the outer end, both sides of described rolling bearing 14, make the interior formation vacuum of axle sleeve 4
With reference to Fig. 1, Fig. 2, shown in Figure 4, water-cooled tube passage 50 upper ends that arrange on polyoxymethylene pedestal 1 are provided with water-cooled tube interface 5, wherein, the lower end of the through magnetic core web member 43 of water-cooled tube passage 50 tail ends, and communicate with the inner chamber of core axis 41, water coolant by water-cooled tube passage 50 passes through axle sleeve 4 successively, and water-cooled tube interface 5 is got back in input spindle nose 40, water-cooled tube 51, core axis 41, water coolant return flow line 52, forms a cooling recirculation system.
With reference to Fig. 1, shown in Figure 6, drive shaft 3 is respectively arranged with a pair of rolling bearing 14 with polyoxymethylene pedestal 1 two ends, up and down, joint, adopts dynamic seal 8 structures to seal in the upper end of described rolling bearing 14.
With reference to Fig. 1, shown in Figure 5, conductive connection column jecket 60 upper ends are provided with brush terminal stud 6, and the lower end is provided with brushgear 61, wherein, brushgear 61 can touch mutually with axle sleeve 4, and when having electric current to pass through brush terminal stud 6, electric current passes through conductive connection column jecket 60 successively, brushgear 61, axle sleeve 4, input spindle nose 40 are sent on core axis 41 at last, conductive connection column jecket 60 and polyoxymethylene pedestal 1 joint employing static seal 7 sealing structures.
A kind of preferential embodiment of the present invention is, with reference to Fig. 1, also is provided with tensioning sleeve transmission mechanism 32 at axle sleeve 4 with the tail end that is connected of input spindle nose 40, and wherein, described tensioning sleeve transmission mechanism 32 is elastic element.
A kind of preferential embodiment of the present invention is, with reference to Fig. 2, also is provided with insulating mat 13 in the rear end of magnetic core stationary shaft 42 and rear end cap 11 joints, the acting as of insulating mat 13 prevent driving head housing 2 and forward and backward end cap (10,11) charged.
With reference to shown in Figure 1, be provided with target 9 in the excircle upper end of core axis 41, the upper end of target 9 is provided with shielding case 12, and shielding case one end is positioned at the target upper end, and the other end is bolted on front end end cover 10.
With reference to shown in Figure 1, magnetic core web member 43 and core axis 41 junctions employing static seal 7 sealing structures.
A kind of preferential embodiment of the present invention is, with reference to Fig. 2, shown in Figure 3, be provided with lubricating cup 100 on described grease channel 101, be equipped with lubricating oil on lubricating cup 100 is interior, wherein, described grease channel 101 tail ends are located at front end end cover 10 upper middle position places, and it is at rolling bearing 14, axle sleeve 4, input spindle nose 40,41 lubricates of core axis
A kind of preferential embodiment of the present invention is, with reference to Fig. 4, and Fig. 5, shown in Figure 6, described static seal 7 is provided with O RunddichtringO 70 more than at least one for connecting the object place at two.
A kind of preferential embodiment of the present invention is, and is with reference to Fig. 3, shown in Figure 6, described dynamic seal 8 is provided with backbone sealing ring 80 more than at least one for connecting the object place at two, wherein, two adjacent backbone sealing rings 80 can be placed in opposite directions, also can be staggered relatively.
What the present invention protected is a kind of rotating cathode drive system for vacuum magnetron sputtering coating film, so long as those skilled in the art understand embodiments of the invention, and without performing creative labour, is only the replacement of equivalent technology, all belongs to protection scope of the present invention.
Claims (10)
1. a rotating cathode drive system for vacuum magnetron sputtering coating film, comprise polyoxymethylene pedestal (1), driving head housing (2), drive shaft (3), driving gear (30), follower gear (31), axle sleeve (4), input spindle nose (40), core axis (41), water-cooled tube interface (5), brush terminal stud (6), brushgear (60), target (9), front end end cover (10), rear end cap (11), lubricating cup (100), wherein, described driving gear (30) is arranged on drive shaft (3) lower end, it is characterized in that, described driving gear (30) is cone gear, described follower gear (31) is cone gear, described driving gear (30) carries out transmission with follower gear (31) by the bevel gear drive mode, described polyoxymethylene pedestal (1) and driving head housing (2) joint employing static seal (7) sealing structure, described polyoxymethylene pedestal (1) and drive shaft (3) joint employing dynamic seal (8) sealing structure, described polyoxymethylene pedestal (1) and brush terminal stud (6) joint employing static seal (7) sealing structure, described axle sleeve (4) and front end end cover (10) or rear end cap (11) joint employing two pass dynamic seal (8) sealing structure, described driving head housing (2) adopts static seal (7) sealing structure with front end end cover (10) or rear end cap (11) joint.
2. drive system according to claim 1, is characterized in that, described static seal (7) is for being provided with at least more than one O-ring seals (70) two object junctions of being connected.
3. drive system according to claim 1, is characterized in that, described dynamic seal (8) is for being provided with the backbone sealing ring (80) more than at least one pair of two object junctions of being connected.
4. drive system according to claim 1, is characterized in that, the rear and front end of described axle sleeve (4) is equipped with rolling bearing (14), and wherein, the two pass dynamic seal that described rolling bearing (14) is positioned on axle sleeve (4) simultaneously is inboard.
5. drive system according to claim 1, it is characterized in that, described follower gear (31) is connected and fixed by bolt and axle sleeve (4), described axle sleeve (4) is built-in with input spindle nose (40), and described input spindle nose (40) is provided with core axis web member (43) with core axis (41) joint, when follower gear moves, successively by axle sleeve (4), input spindle nose (40), core axis web member (43) drives core axis (41) motion.
6. drive system according to claim 1 or 5, is characterized in that, described core axis (41) tail end also is provided with magnetic core stationary shaft (42), and described magnetic core stationary shaft (42) also is provided with insulating mat (13) with rear end cap (11) junction.
7. drive system according to claim 1 or 5, is characterized in that, described axle sleeve (4) is provided with tensioning sleeve transmission mechanism (32) with the tail end of input spindle nose (40) junction.
8. drive system according to claim 1, it is characterized in that, described water-cooled tube interface (5) lower end is connected with cooling-water duct (50), described input spindle nose (40) inner chamber also is provided with a water-cooled tube (51), described water-cooled tube (51) inner chamber communicates with cooling-water duct (50), described axle sleeve (4) inner chamber tail end also is provided with at least more than one water coolant return flow line (53), described water-cooled tube interface (5), cooling-water duct (50), water coolant return flow line (53), water-cooled tube (51) forms cooling water recirculation system.
9. drive system described according to right 1, it is characterized in that, described polyoxymethylene pedestal (1) pedestal top also is provided with a lubricating cup (100), described lubricating cup (100) lower end is connected to grease channel (101), described grease channel (101) passes front end end cover (10), to the mid-way of front end end cover (10) with axle sleeve (4) joint.
10. drive system described according to right 1, is characterized in that, described brush terminal stud (6) lower end is provided with wiring column jecket (60), and described wiring column jecket (60) bottom is provided with brushgear (61).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010208947 CN102296273B (en) | 2010-06-24 | 2010-06-24 | Rotating cathode drive system for vacuum magnetron sputtering coating film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010208947 CN102296273B (en) | 2010-06-24 | 2010-06-24 | Rotating cathode drive system for vacuum magnetron sputtering coating film |
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| Publication Number | Publication Date |
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| CN102296273A CN102296273A (en) | 2011-12-28 |
| CN102296273B true CN102296273B (en) | 2013-06-05 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953039B (en) * | 2012-10-26 | 2014-12-24 | 湘潭宏大真空技术股份有限公司 | Rotating cathode for vacuum magnetron sputtering coating |
| CN107058965B (en) * | 2017-06-28 | 2018-12-14 | 武汉科瑞达真空科技有限公司 | A kind of built-in rotating cathode structure |
| CN110375058B (en) * | 2019-01-09 | 2020-12-18 | 合肥晞隆光电有限公司 | Speed reducer assembling method and center adjusting device |
| WO2020164685A1 (en) * | 2019-02-12 | 2020-08-20 | Applied Materials, Inc. | Cathode drive unit, sputtering cathode and method for assembling a cathode drive unit |
| CN113755803B (en) * | 2021-08-13 | 2023-11-28 | 中山凯旋真空科技股份有限公司 | Rotary driving mechanism and planar cathode device |
| CN115287618A (en) * | 2022-08-26 | 2022-11-04 | 中科纳微真空科技(合肥)有限公司 | Rotating cathode end head with conical surface for transmitting power |
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| DE19654007A1 (en) * | 1996-12-21 | 1998-06-25 | Singulus Technologies Ag | Apparatus for cathode sputtering for use in coating installations |
| US5800687A (en) * | 1996-04-13 | 1998-09-01 | Singulus Technologies Gmbh | Device for masking or covering substrates |
| US6375815B1 (en) * | 2001-02-17 | 2002-04-23 | David Mark Lynn | Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
| CN1769515A (en) * | 2004-11-05 | 2006-05-10 | 应用菲林股份有限两合公司 | Cathode arrangement for atomizing a rotatable target pipe |
| CN2923740Y (en) * | 2006-06-14 | 2007-07-18 | 菏泽天宇科技开发有限责任公司 | Target pole system of surface film coating apparatus |
| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, angstrom sciences therewith and production method thereof |
| CN101736297A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Rotatable sputtering cathode device for film coating |
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2010
- 2010-06-24 CN CN 201010208947 patent/CN102296273B/en active Active
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| US4417968A (en) * | 1983-03-21 | 1983-11-29 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
| DE19614598A1 (en) * | 1996-04-13 | 1997-10-16 | Singulus Technologies Gmbh | Cathode sputtering device |
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Effective date of registration: 20170106 Address after: 243001 Ma'anshan economic and Technological Development Zone, Anhui Jin Shan Road, No. 1188, building No. 13, No. 201 Patentee after: A saddle hill Functional Membrane Technology Research Institute Co. Ltd. Address before: Tang Road, Songjiang District town Shihudang 201617 Shanghai City No. 277 Patentee before: Shanghai Zichuang Coating Technology Co., Ltd. |