CN102296273A - Rotating cathode drive system for vacuum magnetron sputtering coating film - Google Patents
Rotating cathode drive system for vacuum magnetron sputtering coating film Download PDFInfo
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- CN102296273A CN102296273A CN2010102089473A CN201010208947A CN102296273A CN 102296273 A CN102296273 A CN 102296273A CN 2010102089473 A CN2010102089473 A CN 2010102089473A CN 201010208947 A CN201010208947 A CN 201010208947A CN 102296273 A CN102296273 A CN 102296273A
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Abstract
The invention discloses a rotating cathode drive system for a vacuum magnetron sputtering coating film, which comprises a polyformaldehyde base (1), a drive head shell (2), a drive shaft (3), a drive gear (30), a driven gear (31), a shaft sleeve (4), an input shaft head (40), a magnetic core shaft (41), a cooling water pipe interface (5), an electric brush terminal (6), an electric brush device (60), a target material (9), a front end cover (10) and a rear end cover (11), wherein the drive gear (30) is a bevel gear and arranged at the lower end of the drive shaft (3), the driven gear (31) is a bevel gear, the drive gear and the driven gear are in transmission through a bevel gear transmission manner, joints of the polyformaldehyde base (1) with the drive head shell (2) and the electric brush terminal (6) are sealed by adopting a static seal structure (7), the joint of the polyformaldehyde base (1) with the drive shaft (3) is sealed by adopting a dynamic seal structure (8); in addition, joints of the shaft sleeve (4) with the front end cover (10) and the rear end cover (11) are sealed by adopting two dynamic seal structures (8). The invention has the technical effects of high coating efficiency and long service life of the drive system.
Description
Technical field
The present invention relates to a kind of plated film sputter equipment, refer more particularly to driving head housing and driving head polyoxymethylene pedestal joint and adopt the two pass static seal, dynamic seal is adopted in driving head polyoxymethylene pedestal and drive shaft joint, and vacuum magnetic-control sputtering plated film that two pass dynamic seal mode the seals drive system with the rotating cathode device is adopted in driving head polyoxymethylene pedestal and input spindle nose junction.
Background technology
The vacuum magnetic-control sputtering plated film is that coating quality is best in the current coating process, the coating process that range of application is the widest, in this coating process, selection to filming equipment is important, and in filming equipment, magnetic control sputtering cathode is particularly important, what generally adopt at present is the plane sputter cathode, a because plane sputter cathode sputter fixed target zone, can form runway shape sputter area behind the certain hour, can influence the homogeneity and the stability of later stage plated film, and the revolvable sputter cathode of more advanced sputtering target material is not because prior art is overripened, be easy to generate gas leakage, leak and phenomenon such as negative electrode short circuit, have a strong impact on the quality of plated film and the maintenance intervals of equipment, reduced the utilization ratio of target, notification number is that the Chinese patent of CN1865485A and CN2923740Y has been introduced a kind of target system for surface metal coating device, in above-mentioned two patents, its transmission mechanism adopts driving chain wheel, sprocket wheel is arranged in the equipment, it keeps in repair inconvenient, simultaneously, transmission efficiency is not high, influences the quality of plated film.In addition, owing in the equipment that above-mentioned patent forms, do not consider the stopping property of equipment, thereby cause gas leakage, leak and phenomenon such as negative electrode short circuit, accelerated equipment loss, influence the effect and the production efficiency of plated film.
Summary of the invention
Technical problem to be solved by this invention provides that a kind of sputter cathode can rotate, the vacuum magnetic-control sputtering plated film rotating cathode drive system of good airproof performance.
In order to solve the problems of the technologies described above, the technical solution used in the present invention provides a kind of vacuum magnetic-control sputtering plated film rotating cathode drive system, it comprises polyoxymethylene pedestal, driving head housing, drive shaft, driving gear, follower gear, axle sleeve, input spindle nose, core axis, water-cooled tube interface, brush terminal stud, target, front end end cover, rear end cap, lubricating cup, wherein, described driving gear is arranged on the drive shaft lower end, described driving gear is a cone gear, follower gear is a cone gear, and driving gear and follower gear carry out transmission by the bevel gear drive mode.
A kind of priority scheme of the present invention is, the static seal structure sealing is adopted in described polyoxymethylene pedestal and driving head housing joint, the movable sealing structure sealing is adopted in drive shaft and polyoxymethylene pedestal joint, the static seal structure sealing is adopted in brush terminal stud and polyoxymethylene pedestal joint, the sealing of two pass movable sealing structure is adopted in axle sleeve and front end end cover or rear end cap joint, and driving head housing and front end end cover or rear end cap joint adopt the static seal structure sealing.Wherein, described static seal is for being provided with at least more than one O-ring seals two object junctions that are connected, and described dynamic seal is for being provided with the backbone sealing ring more than at least one pair of two object junctions that are connected.
Another kind of priority scheme of the present invention is, the rear and front end of described axle sleeve is equipped with rolling bearing, and wherein, described rolling bearing is positioned at the two pass dynamic seal inboard on the axle sleeve simultaneously.
Another kind of priority scheme of the present invention is, described follower gear is connected and fixed by bolt and axle sleeve, axle sleeve is built-in with the input spindle nose, wherein, described axle sleeve also is provided with tensioning cover transmission mechanism with the tail end of input spindle nose junction, and described input spindle nose and core axis joint also are provided with the magnetic core web member, when follower gear moves, by axle sleeve, input spindle nose, kind mandrel web member drive the core axis motion successively.
Another kind of priority scheme of the present invention is, wherein, the core axis tail end also is provided with the magnetic core stationary shaft, and magnetic core stationary shaft and described rear end cap junction also are provided with insulating mat.
Another kind of priority scheme of the present invention is, described water-cooled tube interface lower end is connected with cooling-water duct, also is provided with a water-cooled tube in the described input spindle nose, and described water-cooled tube inner chamber communicates with cooling-water duct, wherein, cooling-water duct tail end mouth is arranged on magnetic core web member lower end.
Another kind of priority scheme of the present invention is,, described bore sleeve tail end also is provided with at least more than one water coolant return flow line, and described water-cooled tube interface, cooling-water duct, water coolant return flow line, water-cooled tube are formed cooling water recirculation system.
Another kind of priority scheme of the present invention is,, described polyoxymethylene pedestal top also is provided with a lubricating cup, and described lubricating cup lower end is connected to grease channel, and described grease channel passes front end end cover, and tail end is to the mid-way of the joint of front end end cover and axle sleeve.
Another kind of priority scheme of the present invention is, described target places the core axis upper end, and links to each other in magnetic core web member excircle top, and the target outer end also is provided with a shielding case, and described shielding case tail end is fixed on the front end end cover.
Technique effect of the present invention provides a kind of vacuum magnetic-control sputtering plated film rotating cathode drive system, because it adopts the cone gear type of drive to carry out transmission, can improve rotating speed, thereby improves the efficient of plated film, prolongs the life-span of rotating cathode drive system.In addition, static seal or movable sealing structure sealing are adopted in two component junction, can obtain good sealing effectiveness, prevent gas leakage, leak and phenomenon such as negative electrode short circuit, have reduced maintenance cost, have prolonged the life-span of rotating cathode drive system.
Description of drawings
Fig. 1 is the diagrammatic cross-section of drive system of the present invention;
Fig. 2 is the diagrammatic cross-section of driving head of the present invention;
Fig. 3 is that local enlarged diagram is located in water coolant of the present invention return flow line;
Fig. 4 is the local enlarged diagram of cooling-water duct of the present invention;
Fig. 5 is a terminal stud seal of tube structure partial enlarged diagram of the present invention;
Fig. 6 is the local enlarged diagram of movable sealing structure of the present invention;
Fig. 7 is the vertical synoptic diagram of polyoxymethylene pedestal of the present invention.
1-polyoxymethylene pedestal, 2-driving head housing, 3-drive shaft, the 4-axle sleeve, 5-water-cooled tube interface, 6-brush terminal stud, the 7-static seal, 8-dynamic seal, 9-target, the 10-front end end cover, 11-rear end cap, 12-shielding case, the 13-insulating mat, 14-rolling bearing, 30-driving gear, the 31-follower gear, 32-tensioning cover transmission mechanism, 33-drive shaft hole, 40-imports spindle nose, 41-core axis, 42-magnetic core stationary shaft, 43-magnetic core interconnecting piece, 50-water-cooled tube passage, 51-water-cooled tube, 52-water coolant return flow line, 53-water-cooled tube passage, 60-wiring column jecket, the 61-brushgear, 63-terminal stud pore, 70-O RunddichtringO, the 80-backbone sealing ring, the 100-lubricating cup, 101-grease channel, 102-grease channel hole.
Embodiment
For clearer explanation technical scheme of the present invention, the present invention will be further described below in conjunction with accompanying drawing.
With reference to Fig. 1, shown in Figure 2, shown in Figure 7, the vertical driving head polyoxymethylene of rotating cathode drive system pedestal 1 is provided with four datum holes, wherein, above-mentioned four datum holes are divided into drive shaft hole 33, terminal stud pore 63, water-cooled tube passage 53, grease channel hole 102, be provided with drive shaft 3 in the drive shaft hole 33, drive shaft 3 lower ends are connected with driving gear 30, and driving gear 30 is a cone gear, and driving gear 30 drives follower gear 31 by the bevel gear drive mode, follower gear 31 is fixing by bolt and axle sleeve 4, also be provided with input spindle nose 40 on axle sleeve 4 in the inner chamber, input spindle nose 40 front ends are connected with magnetic core web member 43, and magnetic core web member 43 front ends link to each other with core axis 41, core axis 41 rear ends also link to each other with magnetic core stationary shaft 42, when drive shaft 3 motions, drive driving gear 30 successively, follower gear 31, axle sleeve 4, input spindle nose 40, magnetic core web member 42, core axis 41 motions.
With reference to Fig. 1, shown in Figure 7, polyoxymethylene pedestal 1 is cylindrical, its excircle is provided with the driving head housing 2 that surrounds it, described driving head housing 2 adopts static seal 7 sealing structures with polyoxymethylene pedestal 1 joint, before and after the lower end of driving head housing 2, be respectively arranged with front end end cover 10, rear end cap 11, driving head housing 2 is provided with static seal 7 with front end end cover 10 or rear end cap 11 joints, wherein, described front end end cover 10, rear end cap 11, polyoxymethylene pedestal 1 is formed an airtight cavity, and axle sleeve 4 is enclosed in this cavity, axle sleeve 4 with before, rear end cap (10,11) joint also is provided with a pair of rolling bearing 14, adopt multiple tracks dynamic seal 8 sealing structures in the outer end, both sides of described rolling bearing 14, make and form vacuum in the axle sleeve 4.
With reference to Fig. 1, Fig. 2, shown in Figure 4, water-cooled tube passage 50 upper ends that are provided with on polyoxymethylene pedestal 1 are provided with water-cooled tube interface 5, wherein, the lower end of the through magnetic core web member 43 of water-cooled tube passage 50 tail ends, and communicate with the inner chamber of core axis 41, water coolant by water-cooled tube passage 50 passes through axle sleeve 4 successively, and water-cooled tube interface 5 is got back in input spindle nose 40, water-cooled tube 51, core axis 41, water coolant return flow line 52, forms a cooling recirculation system.
With reference to Fig. 1, shown in Figure 6, drive shaft 3 is respectively arranged with a pair of rolling bearing 14 in two ends up and down with polyoxymethylene pedestal 1 joint, adopts dynamic seal 8 structures to seal in the upper end of described rolling bearing 14.
With reference to Fig. 1, shown in Figure 5, conductive connection column jecket 60 upper ends are provided with brush terminal stud 6, and the lower end is provided with brushgear 61, wherein, brushgear 61 can touch mutually with axle sleeve 4, and when electric current passed through brush terminal stud 6, electric current passed through conductive connection column jecket 60 successively, brushgear 61, axle sleeve 4, input spindle nose 40 are sent on the core axis 41 at last, and conductive connection column jecket 60 adopts static seal 7 sealing structures with polyoxymethylene pedestal 1 joint.
A kind of preferential embodiment of the present invention is, with reference to Fig. 1, also is provided with tensioning cover transmission mechanism 32 at axle sleeve 4 with the tail end that is connected of input spindle nose 40, and wherein, tensioning cover transmission mechanism 32 is an elastic element.
A kind of preferential embodiment of the present invention is, with reference to Fig. 2, also is provided with insulating mat 13 in the rear end and rear end cap 11 joints of magnetic core stationary shaft 42, and the acting as of insulating mat 13 prevents that driving head housing 2 and forward and backward end cap (10,11) are charged.
With reference to shown in Figure 1, be provided with target 9 in the excircle upper end of core axis 41, the upper end of target 9 is provided with shielding case 12, and shielding case one end is positioned at the target upper end, and the other end is by being bolted on the front end end cover 10.
With reference to shown in Figure 1, magnetic core web member 43 adopts static seal 7 sealing structures with core axis 41 junctions.
A kind of preferential embodiment of the present invention is, with reference to Fig. 2, shown in Figure 3, described grease channel 101 is provided with lubricating cup 100, be equipped with lubricating oil in the lubricating cup 100, wherein, described grease channel 101 tail ends are located at front end end cover 10 upper middle position places, and it is at rolling bearing 14, axle sleeve 4, input spindle nose 40,41 lubricates of core axis.
A kind of preferential embodiment of the present invention is that with reference to Fig. 4, Fig. 5, shown in Figure 6, described static seal 7 are the O RunddichtringO 70 that is provided with at two connection object places more than at least one.
A kind of preferential embodiment of the present invention is, and is with reference to Fig. 3, shown in Figure 6, described dynamic seal 8 is for being provided with the backbone sealing ring 80 more than at least one at two connection object places, wherein, two adjacent backbone sealing rings 80 can be placed in opposite directions, also can be staggered relatively.
What the present invention protected is a kind of vacuum magnetic-control sputtering plated film rotating cathode drive system, so long as those skilled in the art understand embodiments of the invention, and without performing creative labour, only is the replacement of equivalent technology, all belongs to protection scope of the present invention.
Claims (10)
1. vacuum magnetic-control sputtering plated film rotating cathode drive system, comprise polyoxymethylene pedestal (1), driving head housing (2), drive shaft (3), driving gear (30), follower gear (31), axle sleeve (4), input spindle nose (40), core axis (41), water-cooled tube interface (5), brush terminal stud (6), brushgear (60), target (9), front end end cover (10), rear end cap (11), lubricating cup (100), wherein, described driving gear (30) is arranged on drive shaft (3) lower end, it is characterized in that, described driving gear (30) is a cone gear, described follower gear (31) is a cone gear, described driving gear (30) carries out transmission with follower gear (31) by the bevel gear drive mode, described polyoxymethylene pedestal (1) adopts static seal (7) sealing structure with driving head housing (2) joint, described polyoxymethylene pedestal (1) adopts dynamic seal (8) sealing structure with drive shaft (3) joint, described polyoxymethylene pedestal (1) adopts static seal (7) sealing structure with brush terminal stud (6) joint, described axle sleeve (4) adopts two pass dynamic seal (8) sealing structure with front end end cover (10) or rear end cap (11) joint, and described driving head housing (2) adopts static seal (7) sealing structure with front end end cover (10) or rear end cap (11) joint.
2. drive system according to claim 1 is characterized in that, described static seal (7) is for being provided with at least more than one O-ring seals (70) two object junctions that are connected.
3. drive system according to claim 1 is characterized in that, described dynamic seal (8) is for being provided with the backbone sealing ring (80) more than at least one pair of two object junctions that are connected.
4. drive system according to claim 1 is characterized in that, the rear and front end of described axle sleeve (4) is equipped with rolling bearing (14), and wherein, described rolling bearing (14) is positioned at the two pass dynamic seal inboard on the axle sleeve (4) simultaneously.
5. drive system according to claim 1, it is characterized in that, described follower gear (31) is connected and fixed by bolt and axle sleeve (4), described axle sleeve (4) is built-in with input spindle nose (40), and described input spindle nose (40) is provided with core axis web member (43) with core axis (41) joint, when follower gear moves, successively by axle sleeve (4), input spindle nose (40), core axis web member (43) drives core axis (41) motion.
6. drive system according to claim 1 or 5 is characterized in that described core axis (41) tail end also is provided with magnetic core stationary shaft (42), and described magnetic core stationary shaft (42) also is provided with insulating mat (13) with rear end cap (11) junction.
7. drive system according to claim 1 or 5 is characterized in that, described axle sleeve (4) is provided with tensioning cover transmission mechanism (34) with the tail end of input spindle nose (40) junction.
8. drive system according to claim 1, it is characterized in that, described water-cooled tube interface (5) lower end is connected with cooling-water duct (50), described input spindle nose (40) inner chamber also is provided with a water-cooled tube (51), described water-cooled tube (51) inner chamber communicates with cooling-water duct (50), described axle sleeve (4) inner chamber tail end also is provided with at least more than one water coolant return flow line (53), and described water-cooled tube interface (5), cooling-water duct (50), water coolant return flow line (53), water-cooled tube (51) are formed cooling water recirculation system.
9. according to right 1 described drive system, it is characterized in that, described polyoxymethylene pedestal (1) pedestal top also is provided with a lubricating cup (100), described lubricating cup (100) lower end is connected to grease channel (101), described grease channel (101) passes front end end cover (10), to the joint mid-way of front end end cover (10) with axle sleeve (4).
10. according to right 1 described drive system, it is characterized in that described brush terminal stud (6) lower end is provided with wiring column jecket (60), described wiring column jecket (60) bottom is provided with brushgear (61).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010208947 CN102296273B (en) | 2010-06-24 | 2010-06-24 | Rotating cathode drive system for vacuum magnetron sputtering coating film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010208947 CN102296273B (en) | 2010-06-24 | 2010-06-24 | Rotating cathode drive system for vacuum magnetron sputtering coating film |
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| CN102296273A true CN102296273A (en) | 2011-12-28 |
| CN102296273B CN102296273B (en) | 2013-06-05 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953039A (en) * | 2012-10-26 | 2013-03-06 | 湘潭宏大真空技术股份有限公司 | Rotating cathode for vacuum magnetron sputtering coating |
| CN107058965A (en) * | 2017-06-28 | 2017-08-18 | 武汉科瑞达真空科技有限公司 | A kind of built-in rotating cathode structure |
| CN110375058A (en) * | 2019-01-09 | 2019-10-25 | 合肥晞隆光电有限公司 | Retarder assembly method and center adjusting device |
| CN113454752A (en) * | 2019-02-12 | 2021-09-28 | 应用材料公司 | Cathode drive unit, sputtering cathode and method for assembling cathode drive unit |
| CN113755803A (en) * | 2021-08-13 | 2021-12-07 | 中山凯旋真空科技股份有限公司 | Rotary driving mechanism and planar cathode device |
| WO2024041353A1 (en) * | 2022-08-26 | 2024-02-29 | 中科纳微真空科技(合肥)有限公司 | Rotary cathode end head |
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| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, angstrom sciences therewith and production method thereof |
| CN101736297A (en) * | 2008-11-19 | 2010-06-16 | 苏州新爱可镀膜设备有限公司 | Rotatable sputtering cathode device for film coating |
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2010
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| US4417968A (en) * | 1983-03-21 | 1983-11-29 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
| DE19614598A1 (en) * | 1996-04-13 | 1997-10-16 | Singulus Technologies Gmbh | Cathode sputtering device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953039A (en) * | 2012-10-26 | 2013-03-06 | 湘潭宏大真空技术股份有限公司 | Rotating cathode for vacuum magnetron sputtering coating |
| CN107058965A (en) * | 2017-06-28 | 2017-08-18 | 武汉科瑞达真空科技有限公司 | A kind of built-in rotating cathode structure |
| CN110375058A (en) * | 2019-01-09 | 2019-10-25 | 合肥晞隆光电有限公司 | Retarder assembly method and center adjusting device |
| CN113454752A (en) * | 2019-02-12 | 2021-09-28 | 应用材料公司 | Cathode drive unit, sputtering cathode and method for assembling cathode drive unit |
| CN113454752B (en) * | 2019-02-12 | 2024-02-09 | 应用材料公司 | Cathode drive unit, sputtering cathode and method for assembling a cathode drive unit |
| CN113755803A (en) * | 2021-08-13 | 2021-12-07 | 中山凯旋真空科技股份有限公司 | Rotary driving mechanism and planar cathode device |
| CN113755803B (en) * | 2021-08-13 | 2023-11-28 | 中山凯旋真空科技股份有限公司 | Rotary driving mechanism and planar cathode device |
| WO2024041353A1 (en) * | 2022-08-26 | 2024-02-29 | 中科纳微真空科技(合肥)有限公司 | Rotary cathode end head |
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| CN102296273B (en) | 2013-06-05 |
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Effective date of registration: 20170106 Address after: 243001 Ma'anshan economic and Technological Development Zone, Anhui Jin Shan Road, No. 1188, building No. 13, No. 201 Patentee after: A saddle hill Functional Membrane Technology Research Institute Co. Ltd. Address before: Tang Road, Songjiang District town Shihudang 201617 Shanghai City No. 277 Patentee before: Shanghai Zichuang Coating Technology Co., Ltd. |