CN102207523A - Ohm contact imitation resistor test apparatus and test method - Google Patents
Ohm contact imitation resistor test apparatus and test method Download PDFInfo
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- CN102207523A CN102207523A CN2011100641098A CN201110064109A CN102207523A CN 102207523 A CN102207523 A CN 102207523A CN 2011100641098 A CN2011100641098 A CN 2011100641098A CN 201110064109 A CN201110064109 A CN 201110064109A CN 102207523 A CN102207523 A CN 102207523A
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Abstract
Provided is an ohm contact imitation resistor test apparatus and a test method. The method comprises the following steps: (1) ventilating; (2) putting a product to be tested on the base plate of a frame shape support, wherein the test points aim at the metal electrodes and a positioning clamp can be designed according to different products; (3) opening a cylinder switch and pressing downward pressure plates to make the metal electrodes on the pressure plates to fully contact with the product to be tested; (4) reading the resistance value on the ohmmeter; (5) closing the cylinder switch, raising the pressure plates and removing the product tested. The advantages are: (1) the test apparatus helps minimize technology process and save production time; (2) the manufacture process of the test apparatus is simple and the cost of the test apparatus is low; (3) the test apparatus has good stability and easy operation; (4) the test apparatus has a wide application range.
Description
Technical field
The present invention relates to semiconductor resistor Materials Measurement technical field, a kind of specifically emulation ohmic contact resistance proving installation and method of testing.
Background technology
The resistance measurement method of traditional semiconductor resistor material is to prepare Ohm contact electrode at the two ends of detected materials by metallized method, then test resistance.This process complexity is tested length consuming time, and the testing cost height is not easy to the test of bulk article.
Summary of the invention
The objective of the invention is to develop emulation ohmic contact resistance proving installation and the method for testing of directly accurately and fast, stably measuring the resistance value of semiconductor resistor material under a kind of situation that does not need Ohm contact electrode.
Ultimate principle of the present invention is by certain pressure metal electrode to be pressed in the surface of tested product, and electrode is closely contacted with tested product, thus the simulation Ohm contact electrode.
A kind of emulation ohmic contact resistance of the present invention proving installation, comprise: frame type support 1, frame type support 1 is provided with pressure regulator valve and intercepting valve, also is provided with cylinder 2 on the frame type support 1, between pressure regulator valve and the intercepting valve, be connected by air duct respectively between intercepting valve and the cylinder 2; Piston rod 5 bottoms of described cylinder 2 are connected with steel plate 6, the left and right sides, steel plate 6 bottom is respectively arranged with first rubber press 3, second rubber press 4, the lower frame of described frame type support 1 is provided with and first rubber press 3, corresponding the 3rd rubber press 7 in second rubber press, 4 positions, the 4th rubber press 8, make when piston descends that first rubber press 3, second rubber press, 4 energy and the 3rd rubber press 7, the 4th rubber press 8 coincide corresponding; Also be provided with metal electrode 9 on described first rubber press 3, second rubber press 4, the 3rd rubber press 7 and the 4th rubber press 8.
Metal electrode 9 on described first rubber press 3, the 3rd rubber press 7 is in parallel by lead and links to each other with 10 1 of ohmmeters then, and the metal electrode 9 on described second rubber press 4, the 4th rubber press 8 is in parallel by lead and links to each other with ohmmeter 10 other ends then.
Described metal electrode 9, its position is corresponding with the position that tested product need prepare electrode, and electrode shape also need prepare the shape of electrode with big or small the same with tested product with size.
The area of steel plate 6 is big slightly than the area of tested product, can cover tested product fully when depressing.
Described pressure regulator valve and draft tube are connected.
A kind of emulation ohmic contact resistance method of testing, its step is as follows:
⑴ ventilation;
⑵ be put into the base plate of frame type support with tested product, and its test point is aimed at the metal electrode on the pressing plate, but according to different product Design Orientation anchor clamps;
⑶ open the cylinder switch, and pressing plate presses down, and the metal electrode on the pressing plate fully contacts with tested product;
⑷ read the resistance value on the ohmmeter;
⑸ close the cylinder switch, pressing plate rises, and takes out tested product.
The advantage of the present invention's a kind of emulation ohmic contact resistance proving installation and method of testing is:
1. reduce technological process, save the production time: classic method, process complexity, activity time are long, and equipment has high input, the production cost height; The present invention has directly removed the manufacturing process of Ohmic electrode, measures the resistance value of tested product fast, accurately, saves the production time, reduces production costs, and enhances productivity;
2. this proving installation manufacture process is simple, and cost is low: this device mainly is made up of pressure regulator valve, intercepting valve, cylinder, rubber slab, metal electrode and ohmmeter etc., and assembling is simple, little, the easy carrying of volume, and applicable and On-line Product detects;
3. this proving installation good stability is easy to operate; The measurement sensitivity height, good stability, operating process is convenient, fast;
4. applied range: can adjust device according to the structure and the shape of tested product, be applicable to all kinds of measurements that need ohmic contact resistances.
Description of drawings
Fig. 1 is the structural representation of emulation ohmic contact resistance proving installation.
Fig. 2 is the side-looking structural representation of emulation ohmic contact resistance proving installation.
Embodiment
According to Fig. 1, shown in Figure 2, a kind of emulation ohmic contact resistance proving installation, comprise: frame type support 1, frame type support 1 is provided with pressure regulator valve and intercepting valve, also be provided with cylinder 2 on the frame type support 1, between pressure regulator valve and the intercepting valve, be connected by air duct respectively between intercepting valve and the cylinder 2; Piston rod 5 bottoms of described cylinder 2 are connected with steel plate 6, the left and right sides, steel plate 6 bottom is respectively arranged with first rubber press 3, second rubber press 4, the lower frame of described frame type support 1 is provided with and first rubber press 3, corresponding the 3rd rubber press 7 in second rubber press, 4 positions, the 4th rubber press 8, make when piston descends that first rubber press 3, second rubber press, 4 energy and the 3rd rubber press 7, the 4th rubber press 8 coincide corresponding; Also be provided with metal electrode 9 on described first rubber press 3, second rubber press 4, the 3rd rubber press 7 and the 4th rubber press 8.
Metal electrode 9 on described first rubber press 3, the 3rd rubber press 7 is in parallel by lead and links to each other with 10 1 of ohmmeters then, and the metal electrode 9 on described second rubber press 4, the 4th rubber press 8 is in parallel by lead and links to each other with ohmmeter 10 other ends then.
Described metal electrode 9, its position is corresponding with the position that tested product need prepare electrode, and electrode shape also need prepare the shape of electrode with big or small the same with tested product with size.
The area of steel plate 6 is big slightly than the area of tested product, can cover tested product fully when depressing.
Described pressure regulator valve and draft tube are connected.
A kind of emulation ohmic contact resistance method of testing, its step is as follows:
⑴ ventilation;
⑵ be put into the base plate of frame type support with tested product, and its test point is aimed at the metal electrode on the pressing plate, but according to different product Design Orientation anchor clamps;
⑶ open the cylinder switch, and pressing plate presses down, and the metal electrode on the pressing plate fully contacts with tested product;
⑷ read the resistance value on the ohmmeter;
⑸ close the cylinder switch, pressing plate rises, and takes out tested product.
Claims (3)
1. emulation ohmic contact resistance proving installation, comprise: frame type support ⑴, frame type support ⑴ is provided with pressure regulator valve and intercepting valve, also is provided with cylinder ⑵ on the frame type support ⑴, between pressure regulator valve and the intercepting valve, be connected by air duct respectively between intercepting valve and the cylinder ⑵; The piston rod ⑸ bottom of described cylinder ⑵ is connected with steel plate ⑹, it is characterized in that: the left and right sides, described steel plate ⑹ bottom is respectively arranged with the first rubber press ⑶, the second rubber press ⑷, and the lower frame of described frame type support ⑴ is provided with and the first rubber press ⑶, corresponding the 3rd rubber press ⑺ in the second rubber press ⑷ position, the 4th rubber press ⑻; Also be provided with metal electrode ⑼ on the described first rubber press ⑶, the second rubber press ⑷, the 3rd rubber press ⑺ and the 4th rubber press ⑻.
2. emulation ohmic contact resistance proving installation according to claim 1, it is characterized in that: the metal electrode ⑼ on the described first rubber press ⑶, the 3rd rubber press ⑺ is in parallel by lead and links to each other with one of ohmmeter ⑽ then, and the metal electrode ⑼ on the described second rubber press ⑷, the 4th rubber press ⑻ is in parallel by lead and links to each other with ohmmeter ⑽ other end then.
3. the emulation ohmic contact resistance method of testing that emulation ohmic contact resistance proving installation according to claim 1 is implemented, it is characterized in that: its step is as follows:
⑴ ventilation;
⑵ be put into the base plate of frame type support with tested product, and its test point is aimed at the metal electrode on the pressing plate, but according to different product Design Orientation anchor clamps;
⑶ open the cylinder switch, and pressing plate presses down, and the metal electrode on the pressing plate fully contacts with tested product;
⑷ read the resistance value on the ohmmeter;
⑸ close the cylinder switch, pressing plate rises, and takes out tested product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100641098A CN102207523A (en) | 2011-03-17 | 2011-03-17 | Ohm contact imitation resistor test apparatus and test method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100641098A CN102207523A (en) | 2011-03-17 | 2011-03-17 | Ohm contact imitation resistor test apparatus and test method |
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| CN102207523A true CN102207523A (en) | 2011-10-05 |
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| CN2011100641098A Pending CN102207523A (en) | 2011-03-17 | 2011-03-17 | Ohm contact imitation resistor test apparatus and test method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721872A (en) * | 2012-03-13 | 2012-10-10 | 北京元六鸿远电子技术有限公司 | 8-position semi-automatic insulating resistance measuring device |
| CN102735939A (en) * | 2012-07-11 | 2012-10-17 | 电子科技大学 | Method for measuring ohmic contact resistivity between black silicon material and metal electrodes |
| CN102830286A (en) * | 2012-08-20 | 2012-12-19 | 无锡锡洲电磁线有限公司 | Lead pressing device for per-meter resistance measurement |
| CN102998532A (en) * | 2012-10-15 | 2013-03-27 | 沈阳黎明航空发动机(集团)有限责任公司 | Device and method for contact resistance measuring and detecting |
| CN104330600A (en) * | 2014-11-14 | 2015-02-04 | 安徽来福电子科技有限公司 | Trimming device of shunt resistor |
| CN104749439A (en) * | 2015-04-17 | 2015-07-01 | 武汉大学 | Powder metallurgy sintered alloy sample conductivity measurement system and powder metallurgy sintered alloy sample conductivity measurement method |
| CN105118792A (en) * | 2015-07-15 | 2015-12-02 | 苏州阿特斯阳光电力科技有限公司 | Test method of contact resistance between metal electrode and silicon substrate |
| CN106847603A (en) * | 2017-02-13 | 2017-06-13 | 武汉大学 | Gas type high-voltage charging is switched |
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| US20080296346A1 (en) * | 2007-05-31 | 2008-12-04 | Shelton Iv Frederick E | Pneumatically powered surgical cutting and fastening instrument with electrical control and recording mechanisms |
| CN101363881A (en) * | 2007-08-08 | 2009-02-11 | 中芯国际集成电路制造(上海)有限公司 | Method for testing resistance |
| CN201364379Y (en) * | 2009-01-19 | 2009-12-16 | 中国计量学院 | Air pressure switch multi-parameter auto-detection system |
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| US20080296346A1 (en) * | 2007-05-31 | 2008-12-04 | Shelton Iv Frederick E | Pneumatically powered surgical cutting and fastening instrument with electrical control and recording mechanisms |
| CN101363881A (en) * | 2007-08-08 | 2009-02-11 | 中芯国际集成电路制造(上海)有限公司 | Method for testing resistance |
| CN201364379Y (en) * | 2009-01-19 | 2009-12-16 | 中国计量学院 | Air pressure switch multi-parameter auto-detection system |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721872A (en) * | 2012-03-13 | 2012-10-10 | 北京元六鸿远电子技术有限公司 | 8-position semi-automatic insulating resistance measuring device |
| CN102735939A (en) * | 2012-07-11 | 2012-10-17 | 电子科技大学 | Method for measuring ohmic contact resistivity between black silicon material and metal electrodes |
| CN102830286A (en) * | 2012-08-20 | 2012-12-19 | 无锡锡洲电磁线有限公司 | Lead pressing device for per-meter resistance measurement |
| CN102998532A (en) * | 2012-10-15 | 2013-03-27 | 沈阳黎明航空发动机(集团)有限责任公司 | Device and method for contact resistance measuring and detecting |
| CN102998532B (en) * | 2012-10-15 | 2016-04-06 | 沈阳黎明航空发动机(集团)有限责任公司 | A kind of measuring contact resistance pick-up unit and method |
| CN104330600A (en) * | 2014-11-14 | 2015-02-04 | 安徽来福电子科技有限公司 | Trimming device of shunt resistor |
| CN104749439A (en) * | 2015-04-17 | 2015-07-01 | 武汉大学 | Powder metallurgy sintered alloy sample conductivity measurement system and powder metallurgy sintered alloy sample conductivity measurement method |
| CN104749439B (en) * | 2015-04-17 | 2018-01-12 | 武汉大学 | A kind of powder metallurgy sintered alloy sample conductivity measurement system and method |
| CN105118792A (en) * | 2015-07-15 | 2015-12-02 | 苏州阿特斯阳光电力科技有限公司 | Test method of contact resistance between metal electrode and silicon substrate |
| CN105118792B (en) * | 2015-07-15 | 2018-02-16 | 苏州阿特斯阳光电力科技有限公司 | The method of testing of contact resistance between a kind of metal electrode and silicon base |
| CN106847603A (en) * | 2017-02-13 | 2017-06-13 | 武汉大学 | Gas type high-voltage charging is switched |
| CN106847603B (en) * | 2017-02-13 | 2018-11-13 | 武汉大学 | Gas type high-voltage charging switchs |
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Application publication date: 20111005 |