CN102184838A - Cleaning system - Google Patents
Cleaning system Download PDFInfo
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- CN102184838A CN102184838A CN 201110056074 CN201110056074A CN102184838A CN 102184838 A CN102184838 A CN 102184838A CN 201110056074 CN201110056074 CN 201110056074 CN 201110056074 A CN201110056074 A CN 201110056074A CN 102184838 A CN102184838 A CN 102184838A
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Abstract
The invention relates to a cleaning system comprising a washover water tank, wherein the washover water tank comprises a water tank shell and a sprayer for flushing; the water tank shell comprises tank walls and a tank bottom which are mutually connected; a water inlet is arranged on the water tank shell; and the tank bottom is provided with a water outlet. In the invention, silicon wafers are simultaneously subjected to cleaning procedures of water spraying and overflowing in the washover water tank, and the water outlet is arranged at the tank bottom, thereby obtaining good cleaning effect, and saving the cleaning time and the consumption of deionized water.
Description
[technical field]
The present invention relates to the cleaning equipment in a kind of semiconductor technology, particularly relate to a kind of purging system.
[background technology]
To clean generally all be earlier the gaily decorated basket that installs silicon chip to be put into acid tank to boil about ten minutes to the silicon chip in workshop in the conventional art, spilling water a period of time inside the spilling water groove again gaily decorated basket is put forward in acid tank after.Because the spilling water groove only is provided with gap on cell wall top, so the circulation of water body is not smooth, cause spilling water to clean the back poor effect, spilling water after 2 minutes the water pH value in the spilling water groove about 4.In order to guarantee the cleaning performance of next group silicon chip, the water valve of spilling water groove need be opened always, this has caused the waste of deionized water.
In order to improve the effect of cleaning, can also put into the bath groove after the silicon chip spilling water and wash, bath groove top is provided with shower nozzle, utilizes shower nozzle ejection deionized water that the silicon chip in the gaily decorated basket is cleaned.Need spilling water yet do like this---two step of bath operation, spended time is more, has reduced production efficiency; The deionized water that uses is also more, has caused waste.
[summary of the invention]
In order to solve the problem that cleaning performance is bad, production efficiency is lower, the deionized water waste is more in the traditional silicon chip cleaning of test, be necessary to provide a kind of purging system.
A kind of purging system comprises the washover tank, and described washover tank comprises tank housing and the shower nozzle that is used to wash by water, and described tank housing comprises interconnective cell wall and bottom land, offers water inlet on the described tank housing, and described bottom land offers discharge outlet.
Preferably, described washover tank also comprises inner trough structure, and described inner trough structure is fixed on described tank enclosure interior.
Preferably, described inner trough structure is 2 for tetragonal and the quantity of not having the no end, top, and each described inner trough structure has the described discharge outlet of a correspondence, and each inner trough structure also has a described water inlet that is opened in bottom land; Described shower nozzle has 4 groups, the corresponding 2 groups of shower nozzles of each described inner trough structure.
Preferably, also comprise the pneumatic water valve that is connected in described water inlet and/or shower nozzle, it is characterized in that described pneumatic water valve comprises valve gap, valve body and the valve seat that is linked in sequence, and also comprises spool; Described valve gap offers first air admission hole; Described valve body offers the air cavity of hollow and the through hole that is communicated with described air cavity, and described air cavity cooperates with described through hole and runs through described valve body, and described valve body also offers second air admission hole that is communicated with described air cavity; Described valve seat offers inner chamber and first water hole that is communicated with described inner chamber and second water hole of hollow; An end and described valve seat that described valve body offers through hole join, and the other end and described valve gap join; The bearing of trend in described first air admission hole, through hole and first water hole is parallel to each other, and the bearing of trend of described second air admission hole is vertical with the bearing of trend of described through hole, and is located at an end of close described through hole on the described valve body; Described spool comprises valve body part and seat portion, described valve body part comprises continuous head and bar portion, described head and described air cavity closely cooperate and can slide in described air cavity, described bar portion and described through hole closely cooperate and pass from described through hole, offseting with described valve seat, described bar portion offers connecting hole at tail end along self bearing of trend to the cross-sectional area of described head greater than the cross-sectional area of described bar portion; Described seat portion comprises continuous connecting portion and stop section, and described connecting portion inserts described connecting hole fixedlys connected with described valve body part, and can offset by described stop section and described valve body part; A described stop section end of described connecting portion dorsad is used to block described first water hole; Described first air admission hole and second air admission hole link to each other with two inlet channels by solenoid control respectively.
Preferably, described through hole and air cavity form the ladder cylindrical hole; Described first air admission hole, second water hole and connecting hole are screwed hole, and described connecting portion is provided with the external screw thread with described connecting hole coupling; A described stop section end of described connecting portion dorsad is a truncated cone-shaped, and described first water hole comprises round platform hole, cylindrical hole and the screwed hole that order is communicated with, described round platform hole and intracavity inter-connection.
Preferably, described second air admission hole is the ladder cylindrical hole, comprises the screw thread pore and the cylinder pore that are interconnected, and the aperture of described cylinder pore is less than described screw thread pore, described cylinder pore directly is communicated with described air cavity, and described screw thread pore directly is communicated with described pneumatic water valve is extraneous.
Preferably, the contact-making surface place of described valve body and valve gap is provided with sealing ring, and the edge of described through hole and the boundary of valve body are provided with sealing ring, and the contact-making surface place of described valve seat and valve body is provided with sealing ring, and the contact-making surface place of described head and valve body is provided with sealing ring; Described valve gap, valve body, valve seat and spool adopt the polypropylene material manufacturing.
Preferably, also comprise the pneumatic draining valve that is connected in described discharge outlet, described pneumatic draining valve comprises draining valve spool, draining valve valve seat and draining baffle plate; Described draining valve spool comprises interconnective spool head and valve core rod portion, offers the draining valve air cavity of hollow and the draining valve through hole that is communicated with described draining valve air cavity in the described draining valve valve seat; Described spool head and described draining valve air cavity closely cooperate and can slide in described draining valve air cavity, described valve core rod portion and described draining valve through hole closely cooperate and pass from described draining valve through hole, the cross-sectional area of described spool head greater than the cross-sectional area of described valve core rod portion to offset with described draining valve valve seat; Described draining valve valve seat also offers draining valve first air admission hole and draining valve second air admission hole that is communicated with described draining valve air cavity, described draining valve first air admission hole is located at the end of draining valve valve seat near described draining valve through hole, and described draining valve second air admission hole is located at the draining valve valve seat deviates from described draining valve through hole along the bearing of trend of described draining valve air cavity a end; Described draining valve first air admission hole and draining valve second air admission hole link to each other with two inlet channels by solenoid control respectively; Described draining baffle plate is fixedlyed connected with valve core rod portion, described draining valve spool drives the draining baffle plate and realizes the opening and closing of discharge outlet, and leaves the space that is communicated with described draining valve first air admission hole between described spool head and the draining valve valve seat when described discharge outlet is closed.
Preferably, described draining valve spool and draining valve valve seat adopt the polypropylene material manufacturing, described draining valve valve seat is a cylinder, described draining valve air cavity and draining valve through hole form cylindrical shoulder hole, described spool head and valve core rod portion are cylinder, and the diameter of described spool head is greater than the diameter of described valve core rod portion; Offer connecting hole on the described draining valve spool, the bearing of trend of described connecting hole is perpendicular to the bearing of trend of described valve core rod portion, and described connecting hole is used for fixing the connector that is connected with described draining baffle plate; Described draining valve first air admission hole and draining valve second air admission hole are screwed holes.
Preferably, described draining baffle-panels is provided with diaphragm seal to the one side of discharge outlet.
Above-mentioned purging system is sprayed water silicon chip in the washover tank and the matting of spilling water simultaneously, and offers discharge outlet at bottom land, can obtain cleaning performance preferably, and save the consumption of scavenging period and deionized water.
[description of drawings]
Fig. 1 is the schematic diagram of washover tank among the embodiment;
Fig. 2 is the cutaway view after pneumatic water valve assembling is finished among the embodiment;
Fig. 3 is the schematic diagram of valve gap among the embodiment;
Fig. 4 is the profile of valve gap shown in Figure 3;
Fig. 5 is the schematic diagram of valve body among the embodiment;
Fig. 6 be valve body shown in Figure 5 along A-A to profile;
Fig. 7 be valve body shown in Figure 5 along B-B to profile;
Fig. 8 is the schematic diagram of valve seat among the embodiment;
Fig. 9 is the profile of valve seat shown in Figure 8;
Figure 10 is the fragmentary cross-sectional view of spool among the embodiment;
Figure 11 is the schematic diagram of draining valve valve seat among the embodiment;
Figure 12 be draining valve valve seat shown in Figure 11 along A-A to profile;
Figure 13 be draining valve valve seat shown in Figure 11 along B-B to profile;
Figure 14 is the profile of draining valve spool among the embodiment;
Figure 15 is the water route connection diagram of purging system among the embodiment;
Figure 16 is the gas circuit connection diagram of purging system among the embodiment;
Figure 17 is the control circuit schematic diagram of purging system among the embodiment.
[embodiment]
For purpose of the present invention, feature and advantage can more be become apparent, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
Purging system of the present invention comprises a washover tank, and Fig. 1 is the schematic diagram of washover tank among the embodiment.Washover tank 110 comprises tank housing 12 and the shower nozzle 14 that is used to wash by water.Tank housing 112 comprises interconnective cell wall 122 and bottom land 124, and bottom land 124 offers discharge outlet 1242.
In the present embodiment, washover tank 110 also comprises two inner trough structure 116.Inner trough structure 116 is fixed on tank housing 112 inside for there not being the top tetragonal at the no end.Each inner trough structure 112 has the discharge outlet 1242 of a correspondence, also has a water inlet 1244 that is opened in bottom land 124.In other embodiments, also inner trough structure 116 can be set, this moment, water inlet 1244 can be opened on the tank housing 12.
Above-mentioned purging system is sprayed water by shower nozzle 14, and water inlet 1244 carries out spilling water, discharge outlet 1242 is carried out draining, therefore can spray water simultaneously and the matting of spilling water, obtain cleaning performance preferably, and saved the consumption of scavenging period and deionized water.
The reason that inner trough structure is set is: because washover tank 110 volumes are bigger, move at washover tank 110 easily after the gaily decorated basket of carrying silicon chip is put into, if move to shower nozzle 114 water sprays spray less than the position, then can influence the effect of cleaning.And the inner trough structure 116 that the volume of the setting and the gaily decorated basket is complementary, the gaily decorated basket just is difficult for rocking, thereby can obtain cleaning performance preferably.Adopt inner trough structure 116 and directly washover tank 110 is not reduced, one of them reason is to consider to reserve certain volume surplus, does not cause addle to overflow tank polluting in order to avoid control well because of the water yield during spilling water.
In addition, inner trough structure 116 can reduce water consumption, save the cost and the environmental protection of deionized water, and the time that retaining needs is shorter, has reduced cleaning link consumed time, has improved production efficiency.At this moment 124 of inner trough structure 116 and bottom lands seal, and need offer the spilling water discharge outlet in (not in inner trough structure 116) on the limit of bottom land 124.In other embodiments, can inner trough structure 116 and 124 of bottom lands not sealed, just do not needed extra spilling water discharge outlet this moment yet.In the present embodiment, shower nozzle 114 has four groups, each inner trough structure 116 corresponding two groups of shower nozzle 114.Shower nozzle 114 can be arranged on from 100 millimeters of the end faces of inner trough structure 116 with interior distance, to obtain cleaning performance preferably.
In the present embodiment, tank housing 112 can adopt polyvinyl chloride (PVC) made, and bottom land 124 thickness are 12 millimeters, and the thickness of cell wall 122 and inner trough structure 116 is 6 millimeters.
The water valve of traditional spilling water groove all is a hand-operated valve, sometimes because the waste of closing valve and causing deionized water is forgotten in operator's carelessness.Therefore purging system of the present invention also comprises a kind of pneumatic water valve, and Fig. 2 is the cutaway view after pneumatic water valve assembling is finished among the embodiment.Pneumatic water valve 120 is connected in water inlet 1244 and/or shower nozzle 14 by water pipe, and pneumatic water valve 120 comprises valve gap 10, valve body 20 and the valve seat 30 that is linked in sequence, and also comprises spool 40.
Fig. 3 is the schematic diagram of valve gap among the embodiment, and Fig. 4 is the profile of valve gap shown in Figure 3.Valve gap 10 offers first air admission hole 12.In the present embodiment, valve gap 10 is the disk of middle perforate, and valve gap 10 also can be other shape in other embodiments, for example be in the middle of the square lid etc. of perforate.
In the present embodiment, first air admission hole 12 is screwed holes, for example is 1/4 screwed hole that cooperates with 1/4 inch pipe.Also offer valve gap location hole 14 on the valve gap 10, the quantity of valve gap location hole 14 is 6 in the present embodiment, is uniformly distributed on the circumference.
Fig. 5 is the schematic diagram of valve body among the embodiment, Fig. 6 be valve body shown in Figure 5 along A-A to profile, Fig. 7 be valve body shown in Figure 5 along B-B to profile.Valve body 20 offers the air cavity 22 of hollow and the through hole 24 that is communicated with air cavity 22, and air cavity 22 cooperates with through hole 24 and runs through valve body 20, and valve body 20 also offers second air admission hole 26 that is communicated with air cavity 22.In the present embodiment, valve body 20 is to offer each hole, chamber formation on a circular object.
In the present embodiment, second air admission hole 26 is ladder cylindrical holes, comprises the cylinder pore 262 and the screw thread pore 264 that are interconnected, and cylinder pore 262 directly is communicated with air cavity 22, and screw thread pore 264 directly is communicated with the extraneous of pneumatic water valve 120.The aperture of cylinder pore 262 is less than screw thread pore 264, and in the present embodiment, screw thread pore 264 is 1/4 screwed holes that cooperate with 1/4 inch pipe, and the aperture of cylinder pore 262 is 3 millimeters.It is the pressure that increases during for air inlet spool 40 for a short time that second air admission hole 26 is designed to outer imperial palace.
In the present embodiment, offer the valve body location hole on the valve body 20, comprise first location hole 282 that cooperates with valve gap 10 and second location hole 284 that cooperates with valve seat 30.First location hole 282 is screwed holes, aims at back screw-in screw with valve gap location hole 14 and positions.In the present embodiment, the quantity of first location hole 282 is 6, is uniformly distributed on the circumference.In the present embodiment, second location hole 284 is along the axial whole valve body 20 that runs through of cylindrical valve body 20.
Fig. 8 is the schematic diagram of valve seat among the embodiment, and Fig. 9 is the profile of valve seat shown in Figure 8.Valve seat 30 offers the inner chamber 32 of hollow and first water hole 34 that is communicated with inner chamber 32 and second water hole 36.In the present embodiment, valve seat 30 also offers valve seat location hole 38, and valve seat location hole 38 is screwed holes, cooperates with second location hole 284 on the valve body 20 to aim at the back and screw in screw and position.
An end and valve seat 30 that valve body 20 offers through hole 24 join, and the other end and valve gap 10 join.The bearing of trend in first air admission hole 12, through hole 24 and first water hole 34 is parallel to each other, and the bearing of trend of second air admission hole 26 is vertical with the bearing of trend of through hole 24, and is located on the valve body 20 near through hole 24 1 ends.
Figure 10 is the fragmentary cross-sectional view of spool among the embodiment, and spool 40 comprises valve body part 42 and seat portion 44.Valve body part 42 comprises continuous head 421 and bar portion 423, and head 421 closely cooperates and can slide in air cavity 22 with air cavity 22, and bar portion 423 closely cooperates with through hole 24 and passes from through hole 24.The cross-sectional area of head 421 greater than the cross-sectional area of bar portion 423 to offset with valve seat 30.In the present embodiment, head 421 and bar portion 423 are the diameter of coaxial cylinders and head 421 diameters greater than bar portion 423.Bar portion 423 offers connecting hole 424 at tail end (promptly deviating from head 421 1 ends) along self bearing of trend, is screwed hole in the present embodiment.
In the present embodiment, stop section 441 end of connecting portion 443 dorsad is a truncated cone-shaped, and first water hole 34 comprises round platform hole 346, cylindrical hole 344 and the screwed hole 342 that order is communicated with.Round platform hole 346 directly is connected with inner chamber 32.Round platform hole 346 can form with the stop section 441 of inserting and closely cooperate, and round platform hole 346 is blocked solidly.In addition, the end that stop section 441 is connected with connecting portion 443 also is truncated cone-shaped, and through hole 24 is offered chamfering by stop section 441 1 ends, and easier formation closely cooperates with sealing.
First air admission hole 12 and second air admission hole 26 link to each other with two inlet channels by solenoid control respectively, and promptly the air inlet pipe with two 1/4 inch calibers links to each other.Operation by the pneumatic water valve 120 of open and close behind the electromagnetically operated valve place in circuit is very simple and convenient.12 air inlets of first air admission hole, when second air admission hole 26 is closed, to pressing down, first water hole 34 is blocked in stop section 44 to gas with spool 40, pneumatic water valve 120 cuts out, second water hole 36 does not have water to flow out; First air admission hole 12 is closed, during 26 air inlets of second air admission hole, gas is with spool 40 top upwards, pneumatic water valve 120 is opened, water can flow into from first water hole 34 and flow out from second water hole 36.
In addition, can accomplish the timing switch of pneumatic water valve 120, because the water resource waste problem that Guan Shui causes is forgotten in operator's carelessness, save cost and environmental protection when having solved hand switch by in circuit, inserting timer.
Above-mentioned pneumatic water valve 120 simple in structure, manufacturing cost is lower.Valve gap 10, valve body 20, valve seat 30 and spool 40 can adopt PP (polypropylene) made, and the strong alkali-acid resistance corrosion can be used under the very high environment of acid-base value, are fit to the normal semiconductor production of using pickling.
In a preferred embodiment, pneumatic water valve 120 also comprises sealing ring.The seal groove that is used to install sealing ring has been shown in the accompanying drawing, and valve body 20 is provided with sealing ring with the contact-making surface place of valve gap 10, referring to first seal groove 212 among Fig. 6; The middle part of the boundary of the edge of through hole 24 and valve body 20 is provided with sealing ring, referring to second seal groove 214 among Fig. 6; Valve seat 30 is provided with sealing ring with the contact-making surface place of valve body 20, referring to the 3rd seal groove 312 among Fig. 9; Head 421 is provided with sealing ring with the contact-making surface place of valve body 20, referring to the 4th seal groove 412 among Figure 10.Sealing ring is installed can be strengthened the sealing property of pneumatic water valve 120, gas leakage prevents to leak.In other embodiments, can use membrane structure replacement seal circle, but cost can be higher, and fragile, frequent replacing can further increase cost again.
Purging system of the present invention also comprises a kind of pneumatic draining valve, and Figure 11 is the schematic diagram of draining valve valve seat among the embodiment, Figure 12 be draining valve valve seat shown in Figure 11 along A-A to profile, Figure 13 be draining valve valve seat shown in Figure 11 along B-B to profile.As shown in figure 15, pneumatic draining valve comprises draining valve valve seat 50, draining valve spool 60 and draining baffle plate 70, and pneumatic draining valve 130 is blocked discharge outlet 1242 by draining baffle plate 70 when not needing draining.
In the present embodiment, draining valve valve seat 50 is a cylinder, and offer the cylindrical draining valve air cavity 52 and the cylindrical draining valve through hole 54 of hollow, draining valve air cavity 52 and draining valve through hole 54 are interconnected, and form cylindrical shoulder hole and the common draining valve valve seat 50 that connects.In the present embodiment, draining valve valve seat 50, draining valve air cavity 52 and draining valve through hole 54 are coaxial.In this specification, a bottom portion of the draining valve valve seat 50 that draining valve through hole 54 is run through is defined as upper base 504, and a bottom portion of the draining valve valve seat 50 that draining valve air cavity 52 is run through is defined as and goes to the bottom 502.In other embodiments, draining valve valve seat 50, draining valve air cavity 52 and draining valve through hole 54 also can be other shape, for example cuboid.
Draining valve valve seat 50 also offers draining valve first air admission hole 562 and draining valve second air admission hole 564 that is communicated with draining valve air cavity 52, draining valve first air admission hole 562 is located at draining valve valve seat 50 near an end of draining valve through holes 54 end of upper base 504 (promptly near), and draining valve second air admission hole 564 is located at draining valve valve seat 50 deviates from draining valve through hole 54 along the bearing of trend of draining valve air cavity 52 a end (promptly close go to the bottom 502 an end).In the present embodiment, the bearing of trend of draining valve first air admission hole 562 and draining valve second air admission hole 564 runs through the sidewall of draining valve valve seat 50 perpendicular to the bearing of trend (promptly axial) of draining valve valve seat 50, and draining valve air cavity 52 is communicated with the external world.In other embodiments, draining valve first air admission hole 562 and draining valve second air admission hole 564 also can be located at other position, for example the bearing of trend of draining valve first air admission hole 562 can be parallel to the axial of draining valve valve seat 50, penetrates draining valve valve seat 50 from upper base 504.Draining valve first air admission hole 562 and draining valve second air admission hole 564 link to each other with two inlet channels by solenoid control respectively.Operation by open and close draining valve behind the electromagnetically operated valve place in circuit is very simple.
In the present embodiment, draining valve first air admission hole 562 and draining valve second air admission hole 564 are ladder cylindrical holes, and their shape is identical.With draining valve first air admission hole 562 is that example describes, draining valve first air admission hole 562 comprises that 1/4 inch screwed hole 5622 being interconnected and aperture are 1.5 millimeters aperture 5624, aperture 5624 communicates with draining valve air cavity 12, and screwed hole 5622 communicates with the external world.It is the pressure that increases during for air inlet draining valve spool 60 for a short time that the draining valve air inlet is designed to outer imperial palace.In other embodiments, draining valve first air admission hole 562 and draining valve second air admission hole 564 also can directly adopt screwed hole.
In conjunction with Figure 11 and Figure 13, in the present embodiment, offer location hole 56 on the draining valve valve seat 50, location hole 56 502 penetrates the draining valve valve seat 50 and bearing of trend is parallel to the bearing of trend of draining valve air cavity 52 from going to the bottom.Location hole 56 is 8 equally distributed screwed holes on a circumference in the present embodiment, and is obvious, and the quantity of location hole 56 can be different in other embodiments.
Figure 14 is the profile of draining valve spool among the embodiment; Draining valve spool 60 and draining valve valve seat 50 can adopt PP (polypropylene) made, comprise interconnective spool head 62 and valve core rod portion 64.Spool head 62 shapes and draining valve air cavity 52 shapes are suitable, and spool head 62 closely cooperates and can slide in draining valve air cavity 52 with draining valve air cavity 52, and valve core rod portion 64 closely cooperates with draining valve through hole 54 and passes from draining valve through hole 54.In the present embodiment, the spool head 62 and the valve core rod portion 64 of draining valve spool 60 are cylinder, the diameter of spool head 62 equates with the aperture of draining valve air cavity 52, the diameter of valve core rod portion 64 equates with the aperture of draining valve through hole 54, and the diameter of spool head 62 is greater than valve core rod portion 64, to offset with draining valve valve seat 50.In other embodiments, draining valve spool 60 can be other shape (for example cross section is a rectangle), at this moment the cross-sectional area of spool head 62 greater than the cross-sectional area of valve core rod portion 64 to offset with draining valve valve seat 50.Polypropylene material energy strong alkali-acid resistance can use under the very high environment of acid-base value, is fit to use the semiconductor production of pickling.
In the present embodiment, the valve core rod portion 64 of draining valve spool 60 offers connecting hole 65 away from an end of spool head 62, and the bearing of trend of connecting hole 65 is used for fixing the connector that is connected with draining baffle plate 70 perpendicular to the bearing of trend of valve core rod portion 64.In the present embodiment, this connector is a pin, also can adopt other connector in other embodiments.
Figure 15 is the water route connection diagram of purging system among the embodiment, and draining baffle plate 70 is fixedlyed connected with draining valve spool 60, and draining baffle plate 70 is provided with diaphragm seal with the one side that washover tank 110 contacts, and is the sealed silicon film in the present embodiment.Draining valve spool 60 drives draining baffle plate 70 and realizes opening and closing discharge outlet 1242.When closing, discharge outlet 1242 leaves the space that is communicated with draining valve first air admission hole 562 between spool head 62 and the draining valve valve seat 50.
Above-mentioned pneumatic draining valve, draining valve first air admission hole 562 air inlets, when draining valve second air admission hole 564 is closed, to pressing down, draining baffle plate 70 descends gas with draining valve spool 60, and draining valve is opened, and the water in the washover tank 110 are discharged from discharge outlet 1242; Draining valve first air admission hole 562 is closed, during 564 air inlets of draining valve second air admission hole, gas is with draining valve spool 60 top upwards, draining baffle plate 70 rises discharge outlet 1242 is blocked, drain shut valve, the water in the washover tank 110 can not discharged from discharge outlet 1242.Draining valve first air admission hole 562, draining valve second air admission hole 564 link to each other with two inlet channels by solenoid control respectively, and simple to operate by the opening and closing of solenoid control draining valve, draining is more thorough.
In a preferred embodiment, pneumatic water valve also comprises sealing ring.Figure 12 to Figure 14 shows the seal groove that is used to install sealing ring.For example spool head 62 is provided with sealing ring with the contact-making surface place of draining valve valve seat 50, referring to the seal groove among Figure 14 632.
Figure 17 is the control circuit schematic diagram of purging system among the embodiment, comprises starting switch 86, shutdown switch 87, spilling water electromagnetically operated valve 82, drain solenoid valve 83, water spray electromagnetically operated valve 84, timer 92, counter 94; Timer 92 comprises a normally-closed contact 922 again, and counter 94 comprises a normally opened contact 942 again.The control circuit of purging system also comprises first relay and second relay, the wherein first relay pack vinculum circle CR10 and four normally opened contact CR11, CR13, CR15, CR17, the second relay pack vinculum circle CR20 and normally opened contact CR21 and two normally-closed contact CR22 and CR24.
Starting switch 86 and contact CR11 parallel connection.Coil CR10, shutdown switch 87, contact 922 are composed in series first relay unit, and contact CR22 and drain solenoid valve 83 are composed in series drainage cell, and contact CR21 and spilling water electromagnetically operated valve 82 are composed in series the spilling water unit.Above-mentioned three unit are parallel with one another, homogeneous termination power negative pole, another termination starting switch 86 and contact CR11.The termination power positive pole that starting switch 86 and contact CR11 are not connected with above-mentioned three unit.
Contact CR13 and timer 92 are composed in series timer module, and contact CR15 sum counter 94 is composed in series counter module, and contact 942 and coil CR20 are composed in series second relay module, and contact CR17 and water spray electromagnetically operated valve 84 are composed in series the water spray module.Above-mentioned four modules are parallel with one another, homogeneous termination power positive pole, another termination power cathode.Counter 94 is connected with contact CR24, and once counting is just finished in CR24 every disconnection in contact again and again.
Press after the starting switch 86, the coil CR10 energising of first relay, four groups of normally opened contacts of first relay are by all adhesives of effect of relay electromagnetic force.Unclamp after the starting switch 86, because CR11 keeps adhesive, so coil CR10 continues to keep "on" position.
4 normally opened contacts of first relay are connected after the coil CR10 energising, and timer 92, counter 94,84 energisings of water spray electromagnetically operated valve are at this moment started working.Referring to Figure 16, spray water this moment electromagnetically operated valve 84 control first pneumatic water valves 121 and shower nozzle 14 begin water spray.Timer 92 is bicirculating timers, timing circulates in two time periods setting after the energising, in these contact, two section the insides circulation timei 922 circulation on/off, make the coil CR20 of second relay in official hour, to switch on or to cut off the power supply.When coil CR20 outage, during coil CR10 energising, normally-closed contact CR22 closure, drain solenoid valve 83 energisings are started working, referring to Figure 16, pneumatic draining valve 130 drainings of drain solenoid valve 83 controls this moment, counter 94 is also counted once.When coil CR20 energising, when coil CR10 also switches on, normally opened contact CR21 conducting, 82 energisings of spilling water electromagnetically operated valve are started working, referring to Figure 16, spilling water electromagnetically operated valve 82 controls this moment second pneumatic water valve 123 spilling waters.
When the count value of counter 94 reached set point (being 4 in the present embodiment), the normally-closed contact 942 of counter 94 disconnected, coil CR10 outage this moment, and The whole control circuit and purging system quit work, and return to initial condition.In other embodiments, can use FPGA (Field Programmable Gate Array) control (PLC) to substitute the combination of timer 92 sum counters 94, but can raise the cost.
If want purging system to stop midway, then can press shutdown switch 87 and make the normally-closed contact of this key disconnect, make coil CR10 cut off the power supply, The whole control circuit and purging system quit work, and return to initial condition.In the present embodiment, control circuit also comprises bubbling electromagnetically operated valve 85, it is connected the two ends of water spray electromagnetically operated valve 84, work simultaneously with water spray electromagnetically operated valve 84, drum is supplied gas body to form bubble in washover tank 110 (needing to offer accordingly through hole on tank housing 112), can obtain better cleaning performance like this.
In the present embodiment, water pipe and tracheae adopt the Teflon pipe of strong alkali-acid resistance.Above-mentioned control circuit is realized the automatic control of matting by timer 92 sum counters 94, the operator presses starting switch 86 backs just can go busy other things, purging system carries out will stopping automatically after the cleaning of four circulations, improved efficient, and can not occur because of forgetting that shutoff valve causes the situation of deionized water waste.
The discharge time of above-mentioned purging system 5 seconds, about 40 seconds retaining time, four circulations just can be finished cleaning, and the time has shortened half time of Duoing less than 4 minutes than original 10 minutes nearly altogether.The pH value of washover tank the inside liquid shows that the effect of cleaning is good more a lot of than original after four circulations between 6-7, and washed silicon chip surface does not have sour residual substantially.Four row's shower nozzles are directly to the silicon chip flushing, and shower nozzle is very near apart from silicon chip, and the effect of flushing is just good a lot of than original.The washover tank is little more a lot of than original bath slot cavity body, and the water yield that each circulation needs is more economized on water all than originally lacking.The timer sum counter cooperates, and the cleaning adjustment is very convenient, and the time of two circulation periods is adjustable continuously from 0 second-99 hours, and cycle-index is continuous adjustable from 0 time-100000 times.
The above embodiment has only expressed several execution mode of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a purging system is characterized in that, comprises the washover tank, described washover tank comprises tank housing and the shower nozzle that is used to wash by water, described tank housing comprises interconnective cell wall and bottom land, offers water inlet on the described tank housing, and described bottom land offers discharge outlet.
2. purging system according to claim 1 is characterized in that, described washover tank also comprises inner trough structure, and described inner trough structure is fixed on described tank enclosure interior.
3. purging system according to claim 2, it is characterized in that, described inner trough structure is 2 for tetragonal and the quantity of not having the no end, top, and each described inner trough structure has the described discharge outlet of a correspondence, and each inner trough structure also has a described water inlet that is opened in bottom land; Described shower nozzle has 4 groups, the corresponding 2 groups of shower nozzles of each described inner trough structure.
4. according to any described purging system among the claim 1-3, it is characterized in that, also comprise the pneumatic water valve that is connected in described water inlet and/or shower nozzle, it is characterized in that, described pneumatic water valve comprises valve gap, valve body and the valve seat that is linked in sequence, and also comprises spool;
Described valve gap offers first air admission hole;
Described valve body offers the air cavity of hollow and the through hole that is communicated with described air cavity, and described air cavity cooperates with described through hole and runs through described valve body, and described valve body also offers second air admission hole that is communicated with described air cavity;
Described valve seat offers inner chamber and first water hole that is communicated with described inner chamber and second water hole of hollow;
An end and described valve seat that described valve body offers through hole join, and the other end and described valve gap join; The bearing of trend in described first air admission hole, through hole and first water hole is parallel to each other, and the bearing of trend of described second air admission hole is vertical with the bearing of trend of described through hole, and is located at an end of close described through hole on the described valve body;
Described spool comprises valve body part and seat portion, described valve body part comprises continuous head and bar portion, described head and described air cavity closely cooperate and can slide in described air cavity, described bar portion and described through hole closely cooperate and pass from described through hole, offseting with described valve seat, described bar portion offers connecting hole at tail end along self bearing of trend to the cross-sectional area of described head greater than the cross-sectional area of described bar portion; Described seat portion comprises continuous connecting portion and stop section, and described connecting portion inserts described connecting hole fixedlys connected with described valve body part, and can offset by described stop section and described valve body part; A described stop section end of described connecting portion dorsad is used to block described first water hole;
Described first air admission hole and second air admission hole link to each other with two inlet channels by solenoid control respectively.
5. purging system according to claim 4 is characterized in that, described through hole and air cavity form the ladder cylindrical hole; Described first air admission hole, second water hole and connecting hole are screwed hole, and described connecting portion is provided with the external screw thread with described connecting hole coupling; A described stop section end of described connecting portion dorsad is a truncated cone-shaped, and described first water hole comprises round platform hole, cylindrical hole and the screwed hole that order is communicated with, described round platform hole and intracavity inter-connection.
6. purging system according to claim 4, it is characterized in that, described second air admission hole is the ladder cylindrical hole, comprise the screw thread pore and the cylinder pore that are interconnected, the aperture of described cylinder pore is less than described screw thread pore, described cylinder pore directly is communicated with described air cavity, and described screw thread pore directly is communicated with described pneumatic water valve is extraneous.
7. purging system according to claim 4, it is characterized in that, the contact-making surface place of described valve body and valve gap is provided with sealing ring, the edge of described through hole and the boundary of valve body are provided with sealing ring, the contact-making surface place of described valve seat and valve body is provided with sealing ring, and the contact-making surface place of described head and valve body is provided with sealing ring; Described valve gap, valve body, valve seat and spool adopt the polypropylene material manufacturing.
8. according to any described purging system among the claim 1-3, it is characterized in that also comprise the pneumatic draining valve that is connected in described discharge outlet, described pneumatic draining valve comprises draining valve spool, draining valve valve seat and draining baffle plate;
Described draining valve spool comprises interconnective spool head and valve core rod portion, offers the draining valve air cavity of hollow and the draining valve through hole that is communicated with described draining valve air cavity in the described draining valve valve seat; Described spool head and described draining valve air cavity closely cooperate and can slide in described draining valve air cavity, described valve core rod portion and described draining valve through hole closely cooperate and pass from described draining valve through hole, the cross-sectional area of described spool head greater than the cross-sectional area of described valve core rod portion to offset with described draining valve valve seat; Described draining valve valve seat also offers draining valve first air admission hole and draining valve second air admission hole that is communicated with described draining valve air cavity, described draining valve first air admission hole is located at the end of draining valve valve seat near described draining valve through hole, and described draining valve second air admission hole is located at the draining valve valve seat deviates from described draining valve through hole along the bearing of trend of described draining valve air cavity a end; Described draining valve first air admission hole and draining valve second air admission hole link to each other with two inlet channels by solenoid control respectively;
Described draining baffle plate is fixedlyed connected with valve core rod portion, described draining valve spool drives the draining baffle plate and realizes the opening and closing of discharge outlet, and leaves the space that is communicated with described draining valve first air admission hole between described spool head and the draining valve valve seat when described discharge outlet is closed.
9. purging system according to claim 8, it is characterized in that, described draining valve spool and draining valve valve seat adopt the polypropylene material manufacturing, described draining valve valve seat is a cylinder, described draining valve air cavity and draining valve through hole form cylindrical shoulder hole, described spool head and valve core rod portion are cylinder, and the diameter of described spool head is greater than the diameter of described valve core rod portion; Offer connecting hole on the described draining valve spool, the bearing of trend of described connecting hole is perpendicular to the bearing of trend of described valve core rod portion, and described connecting hole is used for fixing the connector that is connected with described draining baffle plate; Described draining valve first air admission hole and draining valve second air admission hole are screwed holes.
10. purging system according to claim 8 is characterized in that, described draining baffle-panels is provided with diaphragm seal to the one side of discharge outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110056074 CN102184838B (en) | 2011-03-09 | 2011-03-09 | Cleaning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110056074 CN102184838B (en) | 2011-03-09 | 2011-03-09 | Cleaning system |
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| Publication Number | Publication Date |
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| CN102184838A true CN102184838A (en) | 2011-09-14 |
| CN102184838B CN102184838B (en) | 2013-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201110056074 Active CN102184838B (en) | 2011-03-09 | 2011-03-09 | Cleaning system |
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| CN (1) | CN102184838B (en) |
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| CN103617958A (en) * | 2013-12-05 | 2014-03-05 | 山东科芯电子有限公司 | Semiconductor chip cleaning device |
| CN109509696A (en) * | 2017-09-15 | 2019-03-22 | 上海新昇半导体科技有限公司 | A kind of water channel device, precleaning machine and pre-cleaning method for precleaning machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102492996A (en) * | 2011-12-02 | 2012-06-13 | 百力达太阳能股份有限公司 | Long-liquid-change-period low-concentration-corrosion etching method |
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| CN109509696A (en) * | 2017-09-15 | 2019-03-22 | 上海新昇半导体科技有限公司 | A kind of water channel device, precleaning machine and pre-cleaning method for precleaning machine |
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| Publication number | Publication date |
|---|---|
| CN102184838B (en) | 2013-02-13 |
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