CN101984330B - Low-frequency or ultralow-frequency vibration measurement suite - Google Patents
Low-frequency or ultralow-frequency vibration measurement suite Download PDFInfo
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- CN101984330B CN101984330B CN 201010292669 CN201010292669A CN101984330B CN 101984330 B CN101984330 B CN 101984330B CN 201010292669 CN201010292669 CN 201010292669 CN 201010292669 A CN201010292669 A CN 201010292669A CN 101984330 B CN101984330 B CN 101984330B
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Abstract
The invention discloses a low-frequency or ultralow-frequency vibration measurement suite. The measurement suite comprises a flexible accelerometer, a conditional amplifier and a regulated power supply part, wherein the conditional amplifier receives a low-frequency or ultralow-frequency vibration signal output by the flexible accelerometer, amplifies the low-frequency or ultralow-frequency vibration signal and outputs the amplified low-frequency or ultralow frequency vibration signal; and the regulated power supply part is used for providing regulated power for the conditional amplifier. The regulated power supply part comprises a power supply input end, a primary voltage stabilizing part, a secondary voltage stabilizing part, a pi filter circuit and a power output end, wherein the primary voltage stabilizing part and the secondary voltage stabilizing part form a feedback tracking voltage stabilizing circuit to reduce fluctuation of the input power supply voltage; the pi filter circuit further filters high frequency component in the power supply voltage; and the power output end outputs stabilized power to the conditional amplifier. The low-frequency or ultralow-frequency vibration measurement suite obtains good measurement effect in a low-frequency or ultralow-frequency vibration range of between 0.01 and 100Hz.
Description
Invention field
The present invention relates to low frequency and superlow frequency vibrating field, relate in particular to for the sensor that low frequency or superlow frequency vibrating are measured and the measurement external member that comprises this sensor.
Background technology
Low frequency and superlow frequency vibrating belong to occurring in nature and have the wider physical phenomenon of face, all belong to low frequency or superlow frequency vibrating such as the ambient vibration of the large scale structures such as bridge, dam, high building, large-sized water turbine unit and some vibrations in the earthquake etc.In a single day these large scale structures cause danger, and will cause immeasurable loss, and the Research Significance of therefore carrying out low frequency and superlow frequency vibrating is great.
At present, the acceleration transducer that is used for low frequency or super low-frequency vibration measurement is more less, and the vibration frequency of the low-frequency acceleration sensor that uses at present nearly all is more than 0.5Hz.In addition, the seismometer that is usually used in seismic surveying also is used for low frequency or super low-frequency vibration measurement, but the seismometer volume is larger, except special occasions, not too is fit to the research in laboratory, and mostly is quality test of pile.
Therefore, need low frequency or superlow frequency vibrating external member a kind of small volume, that can accurately measure low frequency or superlow frequency vibrating.
This external member is mainly in the transmission work of the standard check of vibration measurement department and vibration value, and the vibration measurement standard that appears as of this external member provides a kind of approach of tracing to the source, and fills up the metering of low frequency or superlow frequency vibrating without the blank of proper delivery standard.
Summary of the invention
For this reason, the present invention proposes a kind of low frequency that can address the above problem or ultralow-frequency vibration measurement suite.
The present inventor finds, the characteristics such as the quartz flexible servo accelerometer that uses in aerospace system at present, be applied to attitude of flight vehicle control has that volume is little, lightweight, high resolving power and good stability, and have the characteristic of DC response.If such sensor application in low frequency or super low-frequency vibration measurement, and for the specific power supply of such sensor design and modification amplifier, then can be measured low frequency or superlow frequency vibrating accurately.The present invention is based on above-mentioned discovery and make.
According to an aspect of the present invention, provide a kind of low frequency or ultralow-frequency vibration measurement suite, having comprised: quartz flexible accelerometer, measure low frequency or superlow frequency vibrating signal that low frequency or superlow frequency vibrating and output represent with voltage or current system; Modification amplifier receives low frequency or superlow frequency vibrating signal that described quartz flexible accelerometer is exported, and described low frequency or superlow frequency vibrating signal are optionally amplified processing and export treated low frequency or superlow frequency vibrating signal; And the stabilized voltage supply parts, be used to described modification amplifier that stabilized voltage supply is provided, wherein said stabilized voltage supply parts comprise: power input, so that input power to be provided; The secondary voltage regulation part that is couple to the one-level voltage regulation part of described power input and is couple to described one-level voltage regulation part, described firsts and seconds voltage regulation part consist of reaction type and follow the tracks of mu balanced circuit, to reduce the fluctuation of described input supply voltage; Be couple to the LC filtering circuit of described secondary voltage regulation part, with the high fdrequency component in the described supply voltage of further filtration; And power output end, output is given described modification amplifier through the power supply of voltage stabilizing.
Alternatively, the power output end of stabilized voltage supply parts is also exported power supply through voltage stabilizing to flexure accelerometers.
Alternatively, the stabilized voltage supply parts also comprise three grades of voltage regulation parts that are coupled between described LC filtering circuit and the described power output end, are used for further reducing the fluctuation of described supply voltage.
Alternatively, modification amplifier also comprises: zeroing circuit receives the power supply through voltage stabilizing from described stabilized voltage supply parts, and the zeroing signal corresponding with the static component in described low frequency or the superlow frequency vibrating signal is provided; Subtracter receives described low frequency or superlow frequency vibrating signal and described zeroing signal, and output from described low frequency or superlow frequency vibrating signal, deduct after the described zeroing signal through the zeroing signal; Multistage direct current amplifier, receive described through the zeroing signal and carry out multistage direct current and amplify, so that low frequency or the superlow frequency vibrating signal after a plurality of amplifications to be provided; And a plurality of active filters, receive the power supply through voltage stabilizing from described stabilized voltage supply parts, be used for the low frequency after the described amplification or superlow frequency vibrating signal are carried out filtering.
Experimental result according to the inventor shows, modification amplifier according to the present invention has been obtained preferably measurement effect in the low frequency of 0.01Hz～100Hz or superlow frequency vibrating scope.
Description of drawings
By reading hereinafter detailed description of the preferred embodiment, various other advantage and benefits will become cheer and bright for those of ordinary skills.Accompanying drawing only is used for the purpose of preferred implementation is shown, and does not think limitation of the present invention.And in whole accompanying drawing, represent identical parts with identical reference symbol.Wherein in the accompanying drawings, the alphabetic flag after the reference number is indicated a plurality of identical parts, when these parts of general reference, will omit its last alphabetic flag.In the accompanying drawings:
Fig. 1 schematically shows according to the low frequency of the embodiment of the invention or the synoptic diagram of ultralow-frequency vibration measurement suite;
Fig. 2 schematically shows the synoptic diagram that is suitable for the flexure accelerometers that uses in low frequency according to the present invention or ultralow-frequency vibration measurement suite;
Fig. 3 schematically shows the synoptic diagram that is suitable for the modification amplifier that uses in low frequency according to the present invention or ultralow-frequency vibration measurement suite;
Fig. 4 schematically shows the according to an embodiment of the invention circuit diagram of modification amplifier;
Fig. 5 schematically shows the synoptic diagram that is suitable for the stabilized voltage supply parts that use in low frequency according to the present invention or ultralow-frequency vibration measurement suite; And
Fig. 6 schematically shows the according to an embodiment of the invention circuit diagram of stabilized voltage supply parts.
Embodiment
The invention will be further described below in conjunction with accompanying drawing and concrete embodiment.
Fig. 1 schematically shows the synoptic diagram according to the low frequency of the embodiment of the invention or ultralow-frequency vibration measurement suite 100.As shown in Figure 1, low frequency or ultralow-frequency vibration measurement suite 100 comprise flexure accelerometers 110, modification amplifier 120 and stabilized voltage supply parts 130.Flexure accelerometers 110 is used for sensing low frequency or superlow frequency vibrating, and produces low frequency or superlow frequency vibrating signal according to the low frequency that senses or superlow frequency vibrating.Low frequency or superlow frequency vibrating signal that 120 pairs of flexure accelerometerses 110 of modification amplifier sense amplify, and also low frequency or the superlow frequency vibrating signal that senses are carried out filtering alternatively, and export the signal that is exaggerated with filtering.Because low frequency or super low-frequency vibration measurement require modification amplifier 120 itself should have extremely low circuit noise.And the Ripple Noise of common linear power supply is for example disturbed for the power frequency of 50Hz about 1～5mV middle also being mingled with, and is if therefore utilize common power to provide power supply to modification amplifier 120, then very unfavorable to the measurement of feeble signal.For this kind situation, stabilized voltage supply parts 130 according to the present invention provide the stabilized voltage supply of low noise and low ripple.Be used to the power supply from stabilized voltage supply parts 130, the background noise of modification amplifier 120 has been significantly reduced, and has also removed the power frequency interference, and therefore, modification amplifier 120 can be exported accurately low frequency or superlow frequency vibrating signal.
Alternatively, stabilized voltage supply parts 130 provide power supply also can for flexure accelerometers 110, thereby can reduce low frequency that flexure accelerometers 110 senses or the noise in the superlow frequency vibrating signal, with the degree of accuracy of further raising low frequency or ultralow-frequency vibration measurement suite 100.
Below, describe all parts in low frequency or the ultralow-frequency vibration measurement suite 100 in detail in connection with accompanying drawing 2-6.
Fig. 2 schematically shows the synoptic diagram of flexure accelerometers 110.As shown in Figure 2, flexure accelerometers 110 is generally quartz flexible accelerometer, but can use within the scope of the present invention other flexure accelerometerses.Flexure accelerometers 110 comprises differential capacitance sensor 111, dynamic balance amplifier 113, electromagnetic torque device 114 and vibration signal output 115.As shown in the figure, differential capacitance sensor 111 has the quality pendulum 112 that is positioned at the capacitor centre.Quality pendulum 112 supports by flexible level bridge (not shown), it so that accelerometer the axial rigidity of input minimum (be close to and be freely without restrained condition), and very big in the rigidity of other direction.Therefore, do the time spent when the input shaft direction along accelerometer has the acceleration that causes owing to vibration, the position of quality pendulum 112 changes, thereby the capacitance of differential capacitance sensor 111 is changed.Dynamic balance amplifier 113 is couple to differential capacitance sensor 111, therefore can detect the capacitance variation of differential capacitance sensor 111, and produce again balanced balanced current according to this variation and add to electromagnetic torque device 114, and the electromagnetic torque that electromagnetic torque device 114 produces makes quality pendulum 112 get back to original position.Vibration signal output 115 is couple to dynamic balance amplifier 113 with the signal of the acceleration that produces representative according to balanced balanced current again and sensed.Because low frequency or superlow frequency vibrating can cause the variation of the acceleration that flexure accelerometers senses, therefore, vibration signal output 115 signals that produce have also represented low frequency or superlow frequency vibrating, and also can be called low frequency or superlow frequency vibrating signal.Vibration signal output 115 can provide low frequency or superlow frequency vibrating signal with current system or voltage system.All these modes are all within protection scope of the present invention.
Should be noted that, dynamic balance amplifier 113 is generally activated amplifier, it needs the power supply input usually, and the stability of power supply can appreciable impact produces the stability of balanced balanced current again, therefore, according to one embodiment of present invention, dynamic balance amplifier 113 also provides power supply by stabilized voltage supply parts 130.
Be also noted that; although provided an example of flexure accelerometers among Fig. 2; but those skilled in the art are to be understood that; the invention is not restricted to this, all can provide the flexure accelerometers of low frequency or superlow frequency vibrating signal all within protection scope of the present invention with current system or voltage system.
According to one embodiment of present invention, the sensitivity of flexure accelerometers 110 is 1.2～1.4mA/g, the weak output signal that is therefore produced by flexure accelerometers 110.Usually the low frequency of use flexure accelerometers 110 or superlow frequency vibrating platform are when vibration frequency is low, and thrust is little, are subjected to extraneous very serious such as interference such as electrical noise, noise and mechanical noises.Therefore, do not amplify and the means such as filtering if do not adopt, will be submerged in fully among the noise by the low frequency of flexure accelerometers generation or superlow frequency vibrating signal.
Fig. 3 and 4 schematically shows synoptic diagram and the specific circuit diagram that is suitable for the modification amplifier 120 that uses in low frequency according to the present invention or ultralow-frequency vibration measurement suite.As shown in Figure 3, modification amplifier 120 has for the input end 121 that receives low frequency or superlow frequency vibrating signal.Input end 121 can be the input end 121_1 of received current signal or the input end 121_2 of receiver voltage signal.If input signal is current signal, then modification amplifier 120 also has the current-to-voltage converter 122 that is couple to input end 121_1, is used for the current signal that receives is converted to voltage signal.
The low frequency that modification amplifier 120 receives or superlow frequency vibrating signal have static component and dynamic component.Static component i.e. the value of low frequency or superlow frequency vibrating signal when not vibrating, and generally speaking, static component is not just for null value, and the i.e. signal intensity when sensing low frequency or superlow frequency vibrating of Dynamic Signal, and it is usually in the up and down concussion of static component value.And for signal is processed, eliminate static component, the static component value that is about in the signal is reduced to the zero obvious advantage that has.For this reason, modification amplifier 120 is provided with zeroing circuit 123 in going back.Zeroing circuit 123 provides voltage reference former, and its magnitude of voltage is corresponding with the static component in the voltage signal that receives (the perhaps voltage signal after the conversion).Modification amplifier 120 also comprises the subtracter 124 that is couple to input end 121 and zeroing circuit 123.Subtracter 124 receives expression low frequency or the voltage signal of superlow frequency vibrating and the reference voltage that zeroing circuit 123 provides, and deducts reference voltage so that voltage signal to be amplified to be provided from the voltage signal of expression low frequency or superlow frequency vibrating.At this moment, the static component of voltage signal to be amplified is adjusted to zero, and namely voltage signal becomes the signal that shakes near null value, and this is particularly suitable for follow-up signal and processes.
Alternatively, multiple filter 126 receives by the signal after polystage amplifier 125 amplifications, and the signal after this amplification is carried out filtering.Multiple filter 126 can provide multiple filtering mode, in order to select one of filtering mode according to the practical application condition.For example, such described with reference to FIG. 4, multiple filter 126 is the multistage active low-pass filter of second order, and it can provide the low-pass filtering mode without filtering, 0.02Hz, 0.2Hz, 2Hz or 20Hz.In actual applications, can select as the case may be suitable filtering mode, with the noise in effective filtering low frequency or the superlow frequency vibrating signal.
Subsequently, the signal of modification amplifier 120 output process multiple filters 126 processing is as low frequency or superlow frequency vibrating signal.
Should be noted that, in modification amplifier 120, a plurality of parts are arranged, all need the power supply supply such as but not limited to zeroing circuit 123, multiple filter 126 or current-to-voltage converter 122 etc., and low frequency or super low-frequency vibration measurement require modification amplifier 120 itself should have extremely low circuit noise.The Ripple Noise of common linear power supply is about 1～5mV, and the middle power frequency that also is mingled with 50Hz is disturbed, and this measurement to feeble signal is very unfavorable.Therefore, need custom-designed power supply unit so that the stabilized voltage supply of low noise, low ripple to be provided to modification amplifier 120.According to one embodiment of present invention, stabilized voltage supply should satisfy under the condition of ± 15V output, and the ripple peak-to-peak value only is the microvolt level.This can significantly reduce the background noise of modification amplifier 120, removes the power frequency of 50Hz and disturbs, for providing strong assurance with measuring in the follow-up signal place.
Fig. 5 and Fig. 6 schematically show synoptic diagram and the exemplary circuit figure that is suitable for the stabilized voltage supply parts 130 of use in low frequency according to the present invention or ultralow-frequency vibration measurement suite 100.As shown in Figure 5 and Figure 6, stabilized voltage supply parts 130 have input end 131 and are used for receiving the conventional AC power supply, such as 220V, and the AC power of 50Hz.But the AC power that receives is filtered into the voltage signal of direct current voltage waveform shakiness via single-phase bridge rectification capacitor filter 132.Subsequently, this voltage signal carries out voltage stabilizing by the one-level voltage regulation part 133 that is couple to capacitor filter 132 and the secondary voltage regulation part 134 that is couple to the one-level voltage regulation part.Secondary voltage regulation part 134 also provides feedback to follow the tracks of mu balanced circuit to consist of reaction type to one-level voltage regulation part 133, can significantly reduce voltage fluctuation thus.Be further processed to remove high frequency noise in the signal through the signal of voltage stabilizing by the π filtering circuit 135 that is couple to secondary voltage regulation part 134.According to embodiments of the invention also as shown in Figure 6, π filtering circuit 135 has the LC structure, yet the π filtering circuit 135 of other structures is also within protection scope of the present invention.The power supply signal that obtain this moment can satisfy application of the present invention preferably.But the voltage magnitude for further stabilized power source signal, can carry out again a voltage stabilizing, namely after π filtering circuit 135, couple three grades of voltage regulation parts 136 in order to further supply voltage is carried out voltage stabilizing, thus provide Ripple Noise little, pure galvanic current source is to power output end 137.
It should be noted that the present invention will be described rather than limit the invention for above-described embodiment, and those skilled in the art can design alternative embodiment in the situation of the scope that does not break away from claims.In the claims, any reference symbol between bracket should be configured to limitations on claims.Word " comprises " not to be got rid of existence and is not listed in element or step in the claim.Being positioned at word " " before the element or " one " does not get rid of and has a plurality of such elements.The present invention can realize by means of the hardware that includes some different elements and by means of the computing machine of suitably programming.In having enumerated the unit claim of some devices, several in these devices can be to come imbody by same hardware branch.The use of word first, second and C grade does not represent any order.Can be title with these word explanations.
Claims (10)
1. a low frequency or ultralow-frequency vibration measurement suite comprise:
Quartz flexible accelerometer is measured low frequency or superlow frequency vibrating signal that low frequency or superlow frequency vibrating and output represent with voltage or current system;
Modification amplifier receives low frequency or superlow frequency vibrating signal that described quartz flexible accelerometer is exported, and described low frequency or superlow frequency vibrating signal are optionally amplified low frequency or the superlow frequency vibrating signal of processing and exporting after described processing; And
The stabilized voltage supply parts are used to described modification amplifier that stabilized voltage supply is provided,
Wherein said stabilized voltage supply parts comprise:
Power input is to provide input power;
The secondary voltage regulation part that is couple to the one-level voltage regulation part of described power input and is couple to described one-level voltage regulation part, described firsts and seconds voltage regulation part consist of reaction type and follow the tracks of mu balanced circuit, to reduce the fluctuation of described input supply voltage;
Be couple to the π filtering circuit of described secondary voltage regulation part, with the high fdrequency component in the described supply voltage of further filtration; And
Power output end, output is given described modification amplifier through the power supply of voltage stabilizing.
2. low frequency as claimed in claim 1 or ultralow-frequency vibration measurement suite, the power output end of wherein said stabilized voltage supply parts are also exported power supply through voltage stabilizing to described flexure accelerometers.
3. low frequency as claimed in claim 1 or ultralow-frequency vibration measurement suite, wherein said stabilized voltage supply parts also comprise:
Be coupled in three grades of voltage regulation parts between described π filtering circuit and the described power output end, be used for further reducing the fluctuation of described supply voltage.
4. such as any described low frequency or ultralow-frequency vibration measurement suite among the claim 1-3, wherein said modification amplifier also comprises:
Zeroing circuit receives the power supply through voltage stabilizing from described stabilized voltage supply parts, and the zeroing signal corresponding with the static component in described low frequency or the superlow frequency vibrating signal is provided; And
Subtracter receives described low frequency or superlow frequency vibrating signal and described zeroing signal, and output from described low frequency or superlow frequency vibrating signal, deduct after the described zeroing signal through the zeroing signal.
5. low frequency as claimed in claim 4 or ultralow-frequency vibration measurement suite, wherein said modification amplifier also comprises:
Multistage direct current amplifier, receive described through the zeroing signal and carry out multistage direct current and amplify, so that low frequency or the superlow frequency vibrating signal after a plurality of amplifications to be provided.
6. low frequency as claimed in claim 5 or ultralow-frequency vibration measurement suite, wherein said multistage direct current amplifier provide respectively low frequency or the superlow frequency vibrating signal after the amplification of amplifying 1 times, 10 times, 100 times or 1000 times.
7. such as any described low frequency or ultralow-frequency vibration measurement suite among the claim 1-3, wherein said modification amplifier also comprises:
A plurality of active filters receive the power supply through voltage stabilizing from described stabilized voltage supply parts, are used for the low frequency after the described amplification or superlow frequency vibrating signal are carried out filtering.
8. low frequency as claimed in claim 7 or ultralow-frequency vibration measurement suite, wherein said a plurality of wave filters are used for respectively carrying out filtering for the frequency of 0.02 hertz, 0.2 hertz, 2 hertz or 20 hertz.
9. such as each described low frequency or ultralow-frequency vibration measurement suite among the claim 1-3, wherein said flexure accelerometers comprises:
Differential capacitance sensor, it comprises that being in the middle quality of described differential capacitance sensor puts, skew occurs and causes the capacitance of described differential capacitance sensor to change in described quality pendulum under the effect of acceleration;
The dynamic balance amplifier is couple to described differential capacitance sensor, and produces again balanced balanced current according to the capacitance variation of described differential capacitance sensor;
The electromagnetic torque device is couple to described differential capacitance sensor and described dynamic balance amplifier, receives described again balanced balanced current and produces electromagnetic torque, returns the origin-location to cause described quality pendulum;
Signal output part is couple to described dynamic balance amplifier, to export by described again balanced balanced current represented low frequency or superlow frequency vibrating signal.
10. low frequency as claimed in claim 9 or ultralow-frequency vibration measurement suite, wherein said dynamic balance amplifier is activated amplifier, and provides stabilized voltage supply by described stabilized voltage supply parts.
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| CN 201010292669 CN101984330B (en) | 2010-09-26 | 2010-09-26 | Low-frequency or ultralow-frequency vibration measurement suite |
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| CN101984330B true CN101984330B (en) | 2013-01-16 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104079163A (en) * | 2014-06-27 | 2014-10-01 | 西安微纳传感器研究所有限公司 | Anti-jamming circuit |
| CN104135248A (en) * | 2014-07-23 | 2014-11-05 | 株洲南车时代电气股份有限公司 | Filter system and method |
| CN106644041A (en) * | 2015-11-02 | 2017-05-10 | 航天科工惯性技术有限公司 | Accelerometer installation structure for vibration measurement |
| CN109669055B (en) * | 2017-10-13 | 2021-04-27 | 航天科工惯性技术有限公司 | Vibration rectification error test acquisition circuit and acquisition system with same |
| CN109459168A (en) * | 2018-09-30 | 2019-03-12 | 江苏大学 | A kind of electromagnetic balance formula pull pressure sensor |
| CN111229577B (en) * | 2020-02-14 | 2021-06-01 | 山东理工大学 | Micro-beam super-harmonic synchronous resonance signal frequency-doubling tuning amplification device |
| CN114720723B (en) * | 2022-04-19 | 2023-07-04 | 厦门乃尔电子有限公司 | Test method and test system for noise floor of acceleration sensor |
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| CN201876304U (en) * | 2010-09-26 | 2011-06-22 | 中国计量科学研究院 | Low-frequency or ultra-low-frequency vibration measuring suite |
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| US7385443B1 (en) * | 2007-01-31 | 2008-06-10 | Medtronic, Inc. | Chopper-stabilized instrumentation amplifier |
| CN201548698U (en) * | 2009-10-30 | 2010-08-11 | 航天科工惯性技术有限公司 | Geophone based on quartz flexible accelerometer |
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