CN101898391B - Silicon briquette degumming system and degumming method - Google Patents

Silicon briquette degumming system and degumming method Download PDF

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Publication number
CN101898391B
CN101898391B CN2010102593183A CN201010259318A CN101898391B CN 101898391 B CN101898391 B CN 101898391B CN 2010102593183 A CN2010102593183 A CN 2010102593183A CN 201010259318 A CN201010259318 A CN 201010259318A CN 101898391 B CN101898391 B CN 101898391B
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degumming
casing
hot water
frock
silicon briquette
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CN101898391A (en
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陈乐�
陈瑛
张言乐
殷贵宝
吕胜振
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Yingli Energy China Co Ltd
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Yingli Energy China Co Ltd
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Abstract

The invention discloses a silicon briquette degumming system and a degumming method, and the disclosed silicon briquette degumming system comprises a box (21) for accommodating a tooling to be degummed, a degumming reaction chamber (22) for accommodating the box and a heating water tank (23) communicated with inside the box (21), wherein steam generated in the heating water tank (23) is applied on the tooling. The degumming system and the degumming method in the invention can avoid colloid from generating pungent smoke to pollute environment under a high temperature condition, improve working environment of operators, reduce health damage for the operators, lower electrical energy loss by heating water and lessen degumming cost for the silicon briquette. In addition, lock bolts can not be taken down in the degumming process by using steam so as to improve the degumming efficiency of the silicon briquette, reducing installation difficulty of the silicon briquette and enhancing installation efficiency.

Description

Silicon briquette degumming system and Degumming method
Technical field
The present invention relates to the silicon chip production field, particularly relate to a kind of silicon briquette degumming system; The invention still further relates to a kind of Degumming method that utilizes above-mentioned silicon briquette degumming system.
Background technology
The work of coming unstuck is requisite one procedure in the silicon chip processing.In silicon chip working process, use certain glue on the frock of multi-line cutting machine silico briquette, recycle bonding one deck ground glass between silico briquette and frock in order to guarantee frock.Frock is put into multi-line cutting machine and is cut into silicon chip, and after the end to be cut, the silicon chip that cutting is accomplished takes off, and forms silico briquette and expects end to end.Silico briquette expects end to end that in extractive process impurity can deposit and swim in the bottom and the top of silico briquette, and the silicon material of extrinsic region does not satisfy instructions for use, then in silicon chip processing, this zone is not cut.Cutting can be purified the portion end to end of silico briquette after finishing once more.
Please refer to Fig. 1, Fig. 1 is structural representation that silico briquette is expected end to end in the prior art.
Silico briquette 11 is bonded on the frock 13 through glass 12, and frock 13 is locked on the silico briquette 11 through eight lock screws 14, uses when supplying the silicon chip cutting.After silicon chip has cut; The material end to end that residue is bonded in glass 12 and silico briquette 11 on the frock 13 carries out heat together with frock 13; Make glue lose adhesive property; Make that glass 12, silico briquette are expected end to end, frock 13 separates, thereby realize that frock 13 recycles, silico briquette is expected the work purpose of purifying once more end to end.
When coming unstuck, because the temperature in the baking oven is higher, for fear of the distortion of frock 13, lock screw 14; Operating personnel at first will all unload eight lock screws 14 on the frock 13, the frock 13 of the more about 10kg of weight are put into 400 ℃ baking oven and heat, and heat after 15 minutes again with its taking-up; Utilize perching knife labour contractor tailing, glass 12, frock 13 to separate; The material classification is put well end to end, treats eight lock screws 14 to be locked again after frock 13 is cooled off naturally again, reuses.
From the above-mentioned course of work, be not difficult to find out several point defects below existing degumming tech exists:
1, poor working environment
Use for satisfying, baking oven quantity is more, causes indoor temperature higher; Glue a large amount of white pungent smog of can emerging after through 400 ℃ high-temperature baking, contaminated environment is brought infringement to operating personnel's health.
2, be prone to take place quality accident
Each frock need be loaded and unloaded lock screw, does not put in place as screw in cargo handling process is fastening, then in cutting process, occurs offset phenomena easily, causes the monoblock silico briquette to be scrapped when serious, brings unnecessary economic loss.
3, production capacity is low
Frock temperature after the baking oven baking is high, needs just can use after the nature cooling, and frock is taken out the back from baking oven and needed 40-60 minute cool time to using, and strengthens like production capacity, needs a large amount of frocks to remedy, and increases the production burden of enterprise.
Therefore, the working environment when how to improve silicon briquette degumming, the efficient of coming unstuck of raising silico briquette and glass reduces the silicon briquette degumming cost, is the present technical issues that need to address of those skilled in the art.
Summary of the invention
The purpose of this invention is to provide a kind of silicon briquette degumming system, this degumming device can effectively improve the working environment of silicon briquette degumming, and improves the efficient of coming unstuck, and reduces the production cost of silicon briquette degumming.Another object of the present invention provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
For realizing the foregoing invention purpose; The present invention provides a kind of silicon briquette degumming system; Comprise the casing that holds the frock of waiting to come unstuck, hold the reative cell that comes unstuck of said casing, and be communicated with said box house add hot water storgae, this adds the steam that generates in the hot water storgae said frock is come unstuck; Saidly add the downside that hot water storgae is located at said casing, the top of said casing and bottom are the permeability type structure; The top of said casing and bottom form by the some bodies of rod that laterally arrange, and the distance between the adjacent said body of rod forms steam channel; And the angle between the body of rod at said top and the body of rod of said bottom is greater than 0 degree.
Preferably, said casing circumferentially has all-sealed structure along it, and its side is provided with hermetically sealed door, and the said frock of waiting to come unstuck gets into said casing from said hermetically sealed door.
Preferably, also comprise attemperater; This attemperater and said adding, are provided with first magnetic valve between the hot water storgae, said adding is provided with upper limit and lower limit in the hot water storgae, and when the said water level that adds in the hot water storgae was lower than said lower limit, said first magnetic valve was opened; When the said water level that adds in the hot water storgae is higher than said upper limit, said first closed electromagnetic valve.
Preferably, the inlet of said attemperater is communicated with the vapor outlet port of the said reative cell that comes unstuck.
Preferably, said attemperater has the pressure exhaust valve, when the pressure in the said attemperater during more than or equal to predetermined pressure, and said pressure exhaust opening of valves.
Preferably, the number of said casing is at least two, and each said casing sets gradually along the said steam direction that adds hot water storgae.
The present invention also provides a kind of silicon briquette degumming method, comprises the steps:
Step 1: above-mentioned each described silicon briquette degumming system is provided;
Step 2: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
Step 3: utilize said bled steam that the said hot water storgae that adds is carried out preheating;
Step 4: add hot water storgae said frock is carried out steam heated;
Step 51: collect the bled steam after coming unstuck;
Step 52: said frock is taken out, come unstuck.
Silicon briquette degumming system provided by the present invention comprises the casing that holds the frock of waiting to come unstuck, holds the reative cell that comes unstuck of said casing, and be communicated with said box house add hot water storgae, this adds the steam that generates in the hot water storgae said frock is come unstuck.Because frock is located in the casing; After adding steam in the hot water storgae and getting into the reative cell that comes unstuck; Remake the frock to be come unstuck that is used in the casing, the steam that makes the usefulness of coming unstuck is avoided colloid to be dissolved in the water again steam is produced pollution, reduces the water consumption of coming unstuck both to the colloid generation effect on the frock; And can avoid colloid under hot conditions, to produce the pungent smog of contaminated environment, the process conditions of change silicon briquette degumming improve operator's working environment, reduce operator's physical impairment.Simultaneously,, reduce the cost that comes unstuck of silico briquette, match with the development trend of creating conservation-minded society to the loss of water heating can the minimizing significantly electric energy.
In addition, because the temperature of steam is relatively low, the clamping screw of silico briquette, frock and locking silico briquette, frock deflection under the effect of steam is less; Therefore; When silico briquette is put into casing and is heated, the clamping screw of can not dismantling, thus improve the efficient of coming unstuck of silico briquette; Also reduce simultaneously the silico briquette installation difficulty, improve installation effectiveness.
A kind of preferred embodiment in, silicon briquette degumming system provided by the present invention also comprises with said and adds the attemperater that hot water storgae selectively is communicated with; This attemperater and said adding, are provided with first magnetic valve between the hot water storgae, said adding is provided with upper limit and lower limit in the hot water storgae, and when the said water level that adds in the hot water storgae was lower than said lower limit, said first magnetic valve was opened; When the said water level that adds in the hot water storgae is higher than said upper limit, said first closed electromagnetic valve.Like this, the water yield that adds in the hot water storgae is controlled, reduced the dependence of the work of coming unstuck, can improve the security reliability of the work of coming unstuck operating personnel through first magnetic valve of automatic control.
In another preferred embodiment, the number of said casing is at least two, and each said casing sets gradually along the said steam direction that adds hot water storgae.Like this, can be simultaneously two even a plurality of silico briquette be come unstuck, thereby obviously improve the efficient of coming unstuck, can satisfy the production needs that enterprise's production capacity increases,, reduce business capital pressure for enterprise's raising the output facilitates.
Providing on the basis of above-mentioned silicon briquette degumming system, the present invention also provides a kind of silicon briquette degumming method of using above-mentioned silicon briquette degumming system; Because silicon briquette degumming system has above-mentioned technique effect, utilizes the silicon briquette degumming method of this silicon briquette degumming system also to have the corresponding techniques effect.
Description of drawings
Fig. 1 is structural representation that silico briquette is expected end to end in the prior art;
Fig. 2 is the structural representation of a kind of specific embodiment of silicon briquette degumming system provided by the present invention;
Fig. 3 is the structural representation of a kind of specific embodiment of casing provided by the present invention;
Fig. 4 is the flow sheet of first kind of specific embodiment of silicon briquette degumming method provided by the present invention;
Fig. 5 is the flow sheet of second kind of specific embodiment of silicon briquette degumming method provided by the present invention;
Fig. 6 is the flow sheet of the third specific embodiment of silicon briquette degumming method provided by the present invention.
The specific embodiment
Core of the present invention provides a kind of silicon briquette degumming system, and this degumming device can effectively improve the working environment of silicon briquette degumming, and improves the efficient of coming unstuck, and reduces the production cost of silicon briquette degumming.Another core of the present invention provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
The upper and lower noun of locality that waits that this paper is related is that the direction with flow of water vapor is that benchmark defines, and the noun of locality that is to be understood that among this paper to be adopted should not limit the protection domain of this patent.
In order to make those skilled in the art person understand the present invention program better, the present invention is done further detailed description below in conjunction with the accompanying drawing and the specific embodiment.
When the temperature of water surpasses 100 ℃ (or saying when surpassing boiling point); Hydrone breaks away from the repulsion that molecule fetters because absorbed enough big interior ability thereby it is converted to, and it is big that the distance between the molecule begins to become; Water is vaporous water from liquid transformation just, and this process is called gasification.And condense is exothermic process, and steam can send great amount of heat, just becomes the water of 100 degree can emit the water that a large amount of heats form 100 degree then from 100 degree devaporations.Steam is the same high with the temperature of boiling water; But the heat (major name is called " enthalpy ") that their Unit Weights (for example 1 kilogram) under normal pressure are contained is different, and " enthalpy " of steam Duoed 539 kilocalorie/kilograms (these data can be found in " Pyrology " lining) than boiling water.Under the normal pressure, steam is 180 degree, and boiling water is 100 degree, and steam space capable of using is bigger than water.The present invention has utilized the These characteristics of water, and silico briquette is come unstuck.
Please refer to Fig. 2, Fig. 2 is the structural representation of a kind of specific embodiment of silicon briquette degumming system provided by the present invention.
Silicon briquette degumming system provided by the present invention comprises the casing 21 that holds the frock of waiting to come unstuck, the reative cell 22 that comes unstuck that holds casing 21, and with casing 21 internal communication add hot water storgae 23, this adds the steam that generate in the hot water storgae 23 frock is come unstuck.Because frock is located in the casing 21; After adding steam in the hot water storgae 23 and getting into the reative cell 22 that comes unstuck; Remake the frock to be come unstuck that is used in the casing 21; The steam that makes the usefulness of coming unstuck is avoided colloid to be dissolved in the water again steam is produced pollution, reduces the water consumption of coming unstuck both to the colloid generation effect on the frock; And can avoid colloid under hot conditions, to produce the pungent smog of contaminated environment, the process conditions of change silicon briquette degumming improve operator's working environment, reduce operator's physical impairment.Simultaneously,, reduce the cost that comes unstuck of silico briquette, match with the development trend of creating conservation-minded society to the loss of water heating can the minimizing significantly electric energy.
In addition, because the temperature of steam is relatively low, the clamping screw of silico briquette, frock and locking silico briquette, frock deflection under the effect of steam is less; Therefore; When silico briquette is put into casing 21 heating, the clamping screw of can not dismantling, thereby the efficient of coming unstuck of raising silico briquette; Also reduce simultaneously the silico briquette installation difficulty, improve installation effectiveness.
Particularly, provided by the present inventionly add the downside that hot water storgae 23 can be located at casing 21, and the top 212 of casing 21 is the permeability type structure with bottom 213.According to the natural law, after being heated, steam can upwards flow, will add the downside that hot water storgae 23 is installed in casing 21; The steam that generates in the heating tank 23 is upwards flowed naturally; Casing 21 bottoms 213 through having airing function get into casing 21, and frock is heated, and it is come unstuck; Flow out casing 21 through casing 21 tops 212 with airing function then, process fulfils assignment.This is simple in structure, meets the natural law, is easy to realize, can simplify silicon briquette degumming system, reduces the silicon briquette degumming cost.
Obviously, if casing 21 with add hot water storgae 23 and be in parallel or staggered position, through power parts such as aspiration pumps steam is extracted in the casing 21, also can realize the object of the invention.
Please refer to Fig. 3, Fig. 3 is the structural representation of a kind of specific embodiment of casing provided by the present invention.
In a kind of concrete embodiment, the top 212 of casing 21 forms by the some bodies of rod that laterally arrange with bottom 213, and the distance between the adjacent body of rod forms steam channel; And the angle between the body of rod of the body of rod at top 212 and bottom 213 is greater than 0 degree.The casing 21 that some bodies of rod form is simple in structure, is easy to processing, helps reducing the production cost of casing 21.And; If two even plural casing 21 are set in the reative cell 22 that comes unstuck; One top 212 will be adjacent with another person's bottom 213 in the adjacent two tanks 21, when the angle between the body of rod of the body of rod at top 212 and bottom 213 is spent greater than 0, can guarantee that the body of rod of the body of rod and bottom 213 at top 212 is not parallel; Can prevent colloid to fall into after the angle that formation is scheduled to adds hot water storgae 23, prevents to add hot water storgae 23 and receive colloid pollution.
The body of rod is straight-bar among Fig. 3, is easy to produce, and cost is low.Obviously; Casing 21 has the permeability type structure can have multiple structure; Can be network structure, or body of rod structure, the corrugated body of rod structure of bending, be to be understood that; Above-mentioned various structures with gas permeability function can both realize function of the present invention, all should be in protection scope of the present invention.
In further technical scheme, casing 21 provided by the present invention circumferentially can have all-sealed structure along it, and in its side hermetically sealed door 211 is set, and the frock of waiting to come unstuck gets into casings 21 from hermetically sealed door 211.After frock is come unstuck end, need casing 21 and frock be shifted out the reative cell 22 that comes unstuck together, the security that circumferentially can strengthen operation for all-sealed structure of casing 21 reduces the possibility that the operator is scalded, for safety in production provides safeguard.
Can do further to improve to above-mentioned silicon briquette degumming system.
In further technical scheme, silicon briquette degumming system provided by the present invention can also comprise and add the attemperater 24 that hot water storgae 23 selectively is communicated with; This attemperater 24 and add and be provided with first magnetic valve 241 between the hot water storgae 23 adds and is provided with upper limit and lower limit in the hot water storgae 23, and when the water level in adding hot water storgae 23 was lower than lower limit, first magnetic valve 241 was opened; When the water level in adding hot water storgae 23 was higher than upper limit, first magnetic valve 241 cut out.Like this, the water yield that adds in the hot water storgae 23 is controlled, reduced the dependence of the work of coming unstuck, can improve the security reliability of the work of coming unstuck operating personnel through the magnetic valve of automatic control.
Second magnetic valve 242 can also be set at the water inlet of attemperater 24, and upper limit and lower limit are set in attemperater 24, when the water level in the attemperater 24 was lower than lower limit, second magnetic valve 242 was opened; When the water level in the attemperater 24 was higher than upper limit, second magnetic valve 242 cut out.Can further strengthen the automatic production capacity of silicon briquette degumming system like this, improve security reliability.
Simultaneously,, can carry out preheating, preferably can the inlet of attemperater 24 be communicated with the vapor outlet port of the reative cell 22 that comes unstuck the water in the attemperater 24 in order to improve the temperature that adds water at low temperature in the hot water storgae 23.Promptly utilize the bled steam of output from the reative cell 22 that comes unstuck that the water at low temperature that adds in the attemperater 24 is carried out preheating; Form the periodic duty chain, add the inflow temperature in the hot water storgae 23, shorten the time of heating water at low temperature thereby improve; Improve the efficient of coming unstuck, reduce the heating energy consumption.
Can also 24 li pressure exhaust valve 25 be set at attemperater, when the pressure in the attemperater 24 during more than or equal to predetermined pressure, pressure exhaust valve 25 is opened.Pressure to guarantee attemperater 24 is not too large, improves the security reliability of silicon briquette degumming system.
In addition, the number of casing 21 is at least two in the above-mentioned silicon briquette degumming system, and each casing 21 sets gradually range upon range of setting promptly as shown in Figure 2 along the steam direction that adds hot water storgae 23.Like this, can be simultaneously two even a plurality of silico briquette be come unstuck, thereby obviously improve the efficient of coming unstuck, can satisfy the production needs that enterprise's production capacity increases,, reduce business capital pressure for enterprise's raising the output facilitates.
Please refer again to Fig. 2, a kind of preferred embodiment in, silicon briquette degumming system provided by the present invention can be by following works.
Water is heated and keep boiling through adding hot water storgae 23, form a large amount of steam, steam is according to the effect of the power drift that makes progress; In casing 21, put into frock to be come unstuck, steam can pass casing 21, and the frock in the casing 21 is heated rapidly; After steam rises to the top, can get in the attemperater 24 with conduit, be normal-temperature water in the attemperater 24, and because of the effect of steam, the water in the attemperater 24 constantly heats up; When attemperater 24 internal pressures arrived the preset pressure of pressure exhaust valve 25, pressure exhaust valve 25 can be opened exhaust automatically.
The water yield that adds in the hot water storgae 23 reduces along with evaporation is continuous; After water level is lower than lower limit a; First magnetic valve 241 is opened automatically; The hot water of heating through steam in the attemperater 24 can get into through conduit and add in the hot water storgae 23, after the water level that adds hot water storgae 23 arrives upper limit b, and first magnetic valve, 241 auto-closings; The inlet port of attemperater 24 is provided with second magnetic valve 242 simultaneously, and after the water level in the attemperater 24 was lower than lower limit d, second magnetic valve 242 was opened automatically; Replenish new water; After water level in the attemperater 24 arrived upper limit c, second magnetic valve, 242 auto-closings stopped to add water; Guarantee that the water yield in the silicon briquette degumming system keeps balance, security of system is worked reliably.
Except above-mentioned silicon briquette degumming system, the present invention also provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
Please refer to Fig. 4, Fig. 4 is the flow sheet of first kind of specific embodiment of silicon briquette degumming method provided by the present invention.
In first kind of concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S11: provide this specification foregoing silicon briquette degumming system;
S12: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S13: add hot water storgae frock is carried out steam heated;
S14: frock is taken out, come unstuck.
Please refer to Fig. 5, Fig. 5 is the flow sheet of second kind of specific embodiment of silicon briquette degumming method provided by the present invention.
In second kind of concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S21: provide this specification foregoing silicon briquette degumming system;
S22: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S23: add hot water storgae frock is carried out steam heated;
S241: frock is taken out, come unstuck;
S242: collect the bled steam after coming unstuck.Bled steam still has higher temperature after from the reative cell that comes unstuck, flowing out, and can be used in other link of production, and bled steam is carried out second use, avoids energy loss, improves the production efficiency of enterprise.
In addition, frock is taken out, come unstuck and collects bled steam and can carry out synchronously, also can successively carry out.
Please refer to Fig. 6, Fig. 6 is the flow sheet of the third specific embodiment of silicon briquette degumming method provided by the present invention.
In the third concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S31: provide this specification foregoing silicon briquette degumming system;
S32: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S33: utilize bled steam to carry out preheating, form the cyclic production chain, utilize the heat of bled steam, reduce heating water at low temperature energy needed, with the reduction cost that comes unstuck to adding hot water storgae.
S34: add hot water storgae frock is carried out steam heated;
S351: frock is taken out, come unstuck;
S352: collect the bled steam after coming unstuck.Bled steam still has higher temperature after from the reative cell that comes unstuck, flowing out, and can be used in other link of production, and bled steam is carried out second use, avoids energy loss, improves the production efficiency of enterprise.
In addition, frock is taken out, come unstuck and collects bled steam and can carry out synchronously, also can successively carry out.
More than silicon briquette degumming system provided by the present invention and silicon briquette degumming method have been carried out detailed introduction.Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof.Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of claim of the present invention.

Claims (7)

1. silicon briquette degumming system; It is characterized in that; Comprise the casing (21) that holds the frock of waiting to come unstuck, the reative cell that comes unstuck (22) that holds said casing (21), and with said casing (21) internal communication add hot water storgae (23), this adds the steam that generates in the hot water storgae (23) said frock is come unstuck; Saidly add the downside that hot water storgae (23) is located at said casing (21), top (212) and bottom (213) of said casing (21) are the permeability type structure; The top (212) of said casing (21) and bottom (213) form by the some bodies of rod that laterally arrange, and the distance between the adjacent said body of rod forms steam channel; And the angle between the body of rod of the body of rod of said top (212) and said bottom (213) is greater than 0 degree.
2. silicon briquette degumming system according to claim 1 is characterized in that, said casing (21) circumferentially has all-sealed structure along it, and its side is provided with hermetically sealed door (211), and the said frock of waiting to come unstuck gets into said casing (21) from said hermetically sealed door (211).
3. silicon briquette degumming system according to claim 1 and 2 is characterized in that, also comprises attemperater (24); This attemperater (24) and said adding, are provided with first magnetic valve (241) between the hot water storgae (23); Said adding in the hot water storgae (23), be provided with upper limit and lower limit; When the said water level that adds in the hot water storgae (23) was lower than said lower limit, said first magnetic valve (241) was opened; When the said water level that adds in the hot water storgae (23) was higher than said upper limit, said first magnetic valve (241) cut out.
4. silicon briquette degumming system according to claim 3 is characterized in that, the inlet of said attemperater (24) is communicated with the vapor outlet port of the said reative cell that comes unstuck (22).
5. silicon briquette degumming system according to claim 4 is characterized in that, said attemperater (24) has pressure exhaust valve (25), and when the pressure in the said attemperater (24) during more than or equal to predetermined pressure, said pressure exhaust valve (25) is opened.
6. silicon briquette degumming system according to claim 3 is characterized in that, the number of said casing (21) is at least two, and each said casing (21) sets gradually along the said steam direction that adds hot water storgae (23).
7. a silicon briquette degumming method is characterized in that, comprises the steps:
Step 1: provide like each described silicon briquette degumming system of claim 1 to 6;
Step 2: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck (22);
Step 3: utilize bled steam that the said hot water storgae (23) that adds is carried out preheating;
Step 4: add hot water storgae (23) said frock is carried out steam heated;
Step 51: collect the bled steam after coming unstuck;
Step 52: said frock is taken out, come unstuck.
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CN101623672A (en) * 2008-11-26 2010-01-13 江西赛维Ldk太阳能高科技有限公司 Method for sorting silicon material mixed with impurities
CN101693240A (en) * 2009-10-26 2010-04-14 张家港市超声电气有限公司 Process for degumming and pre-cleaning silicon slices

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CN101542693A (en) * 2006-12-11 2009-09-23 应用材料股份有限公司 Dry photoresist stripping process and apparatus
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