CN101898391A - Silicon briquette degumming system and degumming method - Google Patents
Silicon briquette degumming system and degumming method Download PDFInfo
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- CN101898391A CN101898391A CN 201010259318 CN201010259318A CN101898391A CN 101898391 A CN101898391 A CN 101898391A CN 201010259318 CN201010259318 CN 201010259318 CN 201010259318 A CN201010259318 A CN 201010259318A CN 101898391 A CN101898391 A CN 101898391A
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Abstract
The invention discloses a silicon briquette degumming system and a degumming method, and the disclosed silicon briquette degumming system comprises a box (21) for accommodating a tooling to be degummed, a degumming reaction chamber (22) for accommodating the box and a heating water tank (23) communicated with inside the box (21), wherein steam generated in the heating water tank (23) is applied on the tooling. The degumming system and the degumming method in the invention can avoid colloid from generating pungent smoke to pollute environment under a high temperature condition, improve working environment of operators, reduce health damage for the operators, lower electrical energy loss by heating water and lessen degumming cost for the silicon briquette. In addition, lock bolts can not be taken down in the degumming process by using steam so as to improve the degumming efficiency of the silicon briquette, reducing installation difficulty of the silicon briquette and enhancing installation efficiency.
Description
Technical field
The present invention relates to the silicon chip production field, particularly relate to a kind of silicon briquette degumming system; The invention still further relates to a kind of Degumming method that utilizes above-mentioned silicon briquette degumming system.
Background technology
The work of coming unstuck is a requisite procedure in the silicon chip processing.In silicon chip working process, use certain glue to bond on the frock of multi-line cutting machine silico briquette, recycle bonding one deck ground glass between silico briquette and frock in order to guarantee frock.Frock is put into multi-line cutting machine and is cut into silicon chip, and after the end to be cut, the silicon chip that cutting is finished takes off, and forms silico briquette and expects end to end.Silico briquette expects end to end that in extractive process impurity can deposit and swim in the bottom and the top of silico briquette, and the silicon material of extrinsic region does not satisfy instructions for use, then this zone is not cut in silicon chip processing.Cutting can be purified the portion end to end of silico briquette after finishing once more.
Please refer to Fig. 1, Fig. 1 is structural representation that silico briquette is expected end to end in the prior art.
Silico briquette 11 is bonded on the frock 13 by glass 12, and frock 13 is locked on the silico briquette 11 by eight lock screws 14, uses when cutting for silicon chip.After silicon chip has cut, the material end to end that residue is bonded in glass 12 and silico briquette 11 on the frock 13 carries out the high temperature heating together with frock 13, make glue lose adhesive property, make that glass 12, silico briquette are expected end to end, frock 13 separates, thereby realize that frock 13 recycles, silico briquette is expected the work purpose of purifying once more end to end.
When coming unstuck, because the temperature in the baking oven is higher, distortion for fear of frock 13, lock screw 14, operating personnel at first will all unload eight lock screws 14 on the frock 13, and the baking oven of the frock 13 of the more about 10kg of weight being put into 400 ℃ heats, and heats after 15 minutes again with its taking-up, utilize perching knife labour contractor tailing, glass 12, frock 13 to separate, the material classification is put well end to end, treats eight lock screws 14 to be locked again after frock 13 is cooled off naturally again, reuses.
Be not difficult to find out that from the above-mentioned course of work there are following several point defects in existing degumming tech:
1, poor working environment
Use for satisfying, baking oven quantity is more, causes indoor temperature higher; Glue a large amount of white pungent smog of can emerging after by 400 ℃ high-temperature baking, contaminated environment is brought infringement to operating personnel's health.
2, quality accident easily takes place
Each frock need be loaded and unloaded lock screw, does not put in place as screw in cargo handling process is fastening, then occurs offset phenomena in cutting process easily, causes the monoblock silico briquette to be scrapped when serious, brings unnecessary economic loss.
3, production capacity is low
Frock is the temperature height after the baking oven baking, needs just can use after the nature cooling, and frock is taken out the back from baking oven and needed 40-60 minute cool time to using, and strengthens as production capacity, needs a large amount of frocks to remedy, and increases the production burden of enterprise.
Therefore, the working environment when how to improve silicon briquette degumming, the efficient of coming unstuck of raising silico briquette and glass reduces the silicon briquette degumming cost, is the present technical issues that need to address of those skilled in the art.
Summary of the invention
The purpose of this invention is to provide a kind of silicon briquette degumming system, this degumming device can effectively improve the working environment of silicon briquette degumming, and improves the efficient of coming unstuck, and reduces the production cost of silicon briquette degumming.Another object of the present invention provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
For achieving the above object, the invention provides a kind of silicon briquette degumming system, comprise the casing that holds the frock of waiting to come unstuck, hold the reative cell that comes unstuck of described casing, and be communicated with described box house add hot water storgae, this adds the steam that generates in the hot water storgae described frock is come unstuck.
Preferably, describedly add the downside that hot water storgae is located at described casing, the top of described casing and bottom are the permeability type structure.
Preferably, the top of described casing and bottom form by the some bodies of rod that be arranged in parallel, and the distance between the adjacent described body of rod forms steam channel; And the angle between the body of rod at described top and the body of rod of described bottom is greater than 0 degree.
Preferably, described casing circumferentially has all-sealed structure along it, and its side is provided with hermetically sealed door, and the described frock of waiting to come unstuck enters described casing from described hermetically sealed door.
Preferably, also comprise with described and add the attemperater that hot water storgae selectively is communicated with; This attemperater and described adding, are provided with first magnetic valve between the hot water storgae, described adding is provided with upper limit and lower limit in the hot water storgae, and when the described water level that adds in the hot water storgae was lower than described lower limit, described first magnetic valve was opened; When the described water level that adds in the hot water storgae is higher than described upper limit, described first closed electromagnetic valve.
Preferably, the inlet of described attemperater is communicated with the steam (vapor) outlet of the described reative cell that comes unstuck.
Preferably, described attemperater has the pressure exhaust valve, when the pressure in the described attemperater during more than or equal to predetermined pressure, and described pressure exhaust opening of valves.
Preferably, the number of described casing is at least two, and each described casing sets gradually along the described steam direction that adds hot water storgae.
The present invention also provides a kind of silicon briquette degumming method, comprises the steps:
Step 1: above-mentioned each described silicon briquette degumming system is provided;
Step 2: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
Step 3: add hot water storgae described frock is carried out Steam Heating;
Step 4: described frock is taken out, come unstuck.
Preferably, also comprise after the described step 3: step 31: collect the exhaust steam after coming unstuck.
Preferably, also comprise between described step 2 and the described step 3: step 21: utilize described exhaust steam that the described hot water storgae (23) that adds is carried out preheating.
Silicon briquette degumming system provided by the present invention comprises the casing that holds the frock of waiting to come unstuck, holds the reative cell that comes unstuck of described casing, and be communicated with described box house add hot water storgae, this adds the steam that generates in the hot water storgae described frock is come unstuck.Because frock is located in the casing, after adding steam in the hot water storgae and entering the reative cell that comes unstuck, remake the frock to be come unstuck that is used in the casing, the steam that makes the usefulness of coming unstuck is avoided colloid to be dissolved in the water again steam is produced pollution, reduces the water consumption of coming unstuck both to the colloid generation effect on the frock; And can avoid colloid under hot conditions, to produce the pungent smog of contaminated environment, the process conditions of change silicon briquette degumming improve operator's working environment, reduce operator's physical impairment.Simultaneously,, reduce the cost that comes unstuck of silico briquette, match with the development trend of creating conservation-minded society to the loss of water heating can the minimizing significantly electric energy.
In addition, because the temperature of steam is relatively low, the clamping screw of silico briquette, frock and locking silico briquette, frock deflection under the effect of steam is less, therefore, when silico briquette is put into casing and is heated, the clamping screw of can not dismantling, thus improve the efficient of coming unstuck of silico briquette, also reduce simultaneously the silico briquette installation difficulty, improve installation effectiveness.
A kind of preferred embodiment in, silicon briquette degumming system provided by the present invention also comprises with described and adds the attemperater that hot water storgae selectively is communicated with; This attemperater and described adding, are provided with first magnetic valve between the hot water storgae, described adding is provided with upper limit and lower limit in the hot water storgae, and when the described water level that adds in the hot water storgae was lower than described lower limit, described first magnetic valve was opened; When the described water level that adds in the hot water storgae is higher than described upper limit, described first closed electromagnetic valve.Like this, the water yield that adds in the hot water storgae is controlled, reduced the dependence of the work of coming unstuck, can improve the security reliability of the work of coming unstuck operating personnel by first magnetic valve of automatic control.
In another preferred embodiment, the number of described casing is at least two, and each described casing sets gradually along the described steam direction that adds hot water storgae.Like this, can be simultaneously two even a plurality of silicon be certainly come unstuck, thereby obviously improve the efficient of coming unstuck, can satisfy the production needs that enterprise's production capacity increases,, reduce business capital pressure for enterprise's volume increase facilitates.
Providing on the basis of above-mentioned silicon briquette degumming system, the present invention also provides a kind of silicon briquette degumming method of using above-mentioned silicon briquette degumming system; Because silicon briquette degumming system has above-mentioned technique effect, utilizes the silicon briquette degumming method of this silicon briquette degumming system also to have the corresponding techniques effect.
Description of drawings
Fig. 1 is structural representation that silico briquette is expected end to end in the prior art;
Fig. 2 is the structural representation of a kind of specific embodiment of silicon briquette degumming system provided by the present invention;
Fig. 3 is the structural representation of a kind of specific embodiment of casing provided by the present invention;
Fig. 4 is the flow sheet of first kind of specific embodiment of silicon briquette degumming method provided by the present invention;
Fig. 5 is the flow sheet of second kind of specific embodiment of silicon briquette degumming method provided by the present invention;
Fig. 6 is the flow sheet of the third specific embodiment of silicon briquette degumming method provided by the present invention.
The specific embodiment
Core of the present invention provides a kind of silicon briquette degumming system, and this degumming device can effectively improve the working environment of silicon briquette degumming, and improves the efficient of coming unstuck, and reduces the production cost of silicon briquette degumming.Another core of the present invention provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
The upper and lower noun of locality that waits that this paper is related is that the direction with flow of water vapor is that benchmark defines, and the noun of locality that is to be understood that herein to be adopted should not limit the protection domain of this patent.
In order to make those skilled in the art person understand the present invention program better, the present invention is described in further detail below in conjunction with the drawings and specific embodiments.
When the temperature of water surpasses 100 ℃ (or saying when surpassing boiling point), hydrone breaks away from the repulsion that molecule fetters because absorbed enough big interior energy thereby it is converted to, and it is big that the distance between the molecule begins to become, water just changes vaporous water into from liquid state, and this process is called gasification.And condense is exothermic process, and steam can send a large amount of heats, just condenses into 100 water of spending from 100 degree steam and can emit the water that a large amount of heats form 100 degree then.Steam is the same high with the temperature of boiling water; But the heat (major name is called " enthalpy ") that their Unit Weights (for example 1 kilogram) under normal pressure are contained is different, and " enthalpy " of steam Duoed 539 kilocalorie/kilograms (these data can be found in " Pyrology " lining) than boiling water.Under the normal pressure, steam is 180 degree, and boiling water is 100 degree, and steam can utilize the space bigger than water.The present invention has utilized the These characteristics of water, and silico briquette is come unstuck.
Please refer to Fig. 2, Fig. 2 is the structural representation of a kind of specific embodiment of silicon briquette degumming system provided by the present invention.
Silicon briquette degumming system provided by the present invention comprises the casing 21 that holds the frock of waiting to come unstuck, the reative cell 22 that comes unstuck that holds casing 21, and with casing 21 internal communication add hot water storgae 23, this adds the steam that generate in the hot water storgae 23 frock is come unstuck.Because frock is located in the casing 21, after adding steam in the hot water storgae 23 and entering the reative cell 22 that comes unstuck, remake the frock to be come unstuck that is used in the casing 21, the steam that makes the usefulness of coming unstuck is avoided colloid to be dissolved in the water again steam is produced pollution, reduces the water consumption of coming unstuck both to the colloid generation effect on the frock; And can avoid colloid under hot conditions, to produce the pungent smog of contaminated environment, the process conditions of change silicon briquette degumming improve operator's working environment, reduce operator's physical impairment.Simultaneously,, reduce the cost that comes unstuck of silico briquette, match with the development trend of creating conservation-minded society to the loss of water heating can the minimizing significantly electric energy.
In addition, because the temperature of steam is relatively low, the clamping screw of silico briquette, frock and locking silico briquette, frock deflection under the effect of steam is less, therefore, when silico briquette is put into casing 21 heating, the clamping screw of can not dismantling, thereby the efficient of coming unstuck of raising silico briquette, also reduce simultaneously the silico briquette installation difficulty, improve installation effectiveness.
Particularly, provided by the present inventionly add the downside that hot water storgae 23 can be located at casing 21, and the top 212 of casing 21 and bottom 213 are the permeability type structure.According to the natural law, after being heated, steam can upwards flow, to add the downside that hot water storgae 23 is installed in casing 21, the steam that generates in the heating tank 23 is upwards flowed naturally, casing 21 bottoms 213 through having airing function enter casing 21, and frock is heated, and it is come unstuck, casing 21 is flowed out at casing through having airing function 21 tops 212 then, and process fulfils assignment.This is simple in structure, meets the natural law, is easy to realize, can simplify silicon briquette degumming system, reduces the silicon briquette degumming cost.
Obviously, if casing 21 with add hot water storgae 23 and be in parallel or staggered position, by power parts such as aspiration pumps steam is extracted in the casing 21, also can realize purpose of the present invention.
Please refer to Fig. 3, Fig. 3 is the structural representation of a kind of specific embodiment of casing provided by the present invention.
In a kind of concrete embodiment, the top 212 of casing 21 and bottom 213 form by the some bodies of rod that be arranged in parallel, and the distance between the adjacent body of rod forms steam channel; And the angle between the body of rod of the body of rod at top 212 and bottom 213 is greater than 0 degree.The casing 21 that some bodies of rod form is simple in structure, is easy to processing, helps reducing the production cost of casing 21.And, if two even plural casing 21 are set in the reative cell 22 that comes unstuck, one top 212 will be adjacent with another person's bottom 213 in the adjacent two tanks 21, when the angle between the body of rod of the body of rod at top 212 and bottom 213 is spent greater than 0, the body of rod that can guarantee the body of rod at top 212 and bottom 213 is not parallel, can prevent colloid to fall into after the angle that formation is scheduled to adds hot water storgae 23, prevents to add hot water storgae 23 and be subjected to colloid pollution.
The body of rod is straight-bar among Fig. 3, is easy to produce, and cost is low.Obviously; casing 21 has the permeability type structure can have multiple structure; it can be network structure; or body of rod structure, the corrugated body of rod structure of bending; be to be understood that; above-mentioned various structures with gas permeability function can both realize function of the present invention, all should be in protection scope of the present invention.
In further technical scheme, casing 21 provided by the present invention circumferentially can have all-sealed structure along it, and in its side hermetically sealed door 211 is set, and the frock of waiting to come unstuck enters casing 21 from hermetically sealed door 211.After frock is come unstuck end, casing 21 and frock need be shifted out the reative cell 22 that comes unstuck together, the security that circumferentially can strengthen operation for all-sealed structure of casing 21 reduces the possibility that the operator is scalded, for safety in production provides safeguard.
Can do further to improve to above-mentioned silicon briquette degumming system.
In further technical scheme, silicon briquette degumming system provided by the present invention can also comprise and add the attemperater 24 that hot water storgae 23 selectively is communicated with; This attemperater 24 and add and be provided with first magnetic valve 241 between the hot water storgae 23 adds and is provided with upper limit and lower limit in the hot water storgae 23, and when the water level in adding hot water storgae 23 was lower than lower limit, first magnetic valve 241 was opened; When the water level in adding hot water storgae 23 was higher than upper limit, first magnetic valve 241 cut out.Like this, the water yield that adds in the hot water storgae 23 is controlled, reduced the dependence of the work of coming unstuck, can improve the security reliability of the work of coming unstuck operating personnel by the magnetic valve of automatic control.
Second magnetic valve 242 can also be set at the water inlet of attemperater 24, and upper limit and lower limit are set in attemperater 24, when the water level in the attemperater 24 was lower than lower limit, second magnetic valve 242 was opened; When the water level in the attemperater 24 was higher than upper limit, second magnetic valve 242 cut out.Can further strengthen the automatic production capacity of silicon briquette degumming system like this, improve security reliability.
Simultaneously,, can carry out preheating, preferably the inlet of attemperater 24 can be communicated with the steam (vapor) outlet of the reative cell 22 that comes unstuck the water in the attemperater 24 in order to improve the temperature that adds water at low temperature in the hot water storgae 23.Promptly utilize the exhaust steam of output from the reative cell 22 that comes unstuck that the water at low temperature that adds in the attemperater 24 is carried out preheating, form the periodic duty chain, thereby improve the inflow temperature that adds in the hot water storgae 23, shorten the time of heating water at low temperature, improve the efficient of coming unstuck, reduce the heating energy consumption.
Can also 24 li pressure exhaust valve 25 be set at attemperater, when the pressure in the attemperater 24 during more than or equal to predetermined pressure, pressure exhaust valve 25 is opened.Not too large with the pressure of guaranteeing attemperater 24, the security reliability of raising silicon briquette degumming system.
In addition, the number of casing 21 is at least two in the above-mentioned silicon briquette degumming system, and each casing 21 sets gradually i.e. stacked setting as shown in Figure 2 along the steam direction that adds hot water storgae 23.Like this, can be simultaneously two even a plurality of silico briquette be come unstuck, thereby obviously improve the efficient of coming unstuck, can satisfy the production needs that enterprise's production capacity increases,, reduce business capital pressure for enterprise's volume increase facilitates.
Please refer again to Fig. 2, a kind of preferred embodiment in, silicon briquette degumming system provided by the present invention can be by following works.
Water is heated and keep boiling by adding hot water storgae 23, form a large amount of steam, steam is according to the effect of the power drift that makes progress; Put into frock to be come unstuck in casing 21, steam can pass casing 21, and the frock in the casing 21 is heated rapidly; After steam rises to the top, can enter in the attemperater 24 with conduit, be normal-temperature water in the attemperater 24, and because of the effect of steam, the water in the attemperater 24 constantly heats up; When attemperater 24 internal pressures arrived the default pressure of pressure exhaust valve 25, pressure exhaust valve 25 can be opened exhaust automatically.
The water yield that adds in the hot water storgae 23 reduces along with evaporation is continuous, after water level is lower than lower limit a, first magnetic valve 241 is opened automatically, the hot water of heating through steam in the attemperater 24 can enter by conduit and add in the hot water storgae 23, after the water level that adds hot water storgae 23 arrives upper limit b, first magnetic valve, 241 auto-closings; The inlet port of attemperater 24 is provided with second magnetic valve 242 simultaneously, after water level in the attemperater 24 is lower than lower limit d, second magnetic valve 242 is opened automatically, replenish new water, after water level in the attemperater 24 arrived upper limit c, second magnetic valve, 242 auto-closings stopped to add water, guarantee that the water yield in the silicon briquette degumming system keeps balance, security of system is worked reliably.
Except above-mentioned silicon briquette degumming system, the present invention also provides a kind of silicon briquette degumming method of utilizing above-mentioned silicon briquette degumming system.
Please refer to Fig. 4, Fig. 4 is the flow sheet of first kind of specific embodiment of silicon briquette degumming method provided by the present invention.
In first kind of concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S11: provide this specification foregoing silicon briquette degumming system;
S12: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S13: add hot water storgae frock is carried out Steam Heating;
S14: frock is taken out, come unstuck.
Please refer to Fig. 5, Fig. 5 is the flow sheet of second kind of specific embodiment of silicon briquette degumming method provided by the present invention.
In second kind of concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S21: provide this specification foregoing silicon briquette degumming system;
S22: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S23: add hot water storgae frock is carried out Steam Heating;
S241: frock is taken out, come unstuck;
S242: collect the exhaust steam after coming unstuck.Exhaust steam still has higher temperature after flowing out from the reative cell that comes unstuck, can be used in other link of production, and exhaust steam is carried out the secondary utilization, avoids energy loss, improves the production efficiency of enterprise.
In addition, frock is taken out, come unstuck and collects exhaust steam and can carry out synchronously, also can successively carry out.
Please refer to Fig. 6, Fig. 6 is the flow sheet of the third specific embodiment of silicon briquette degumming method provided by the present invention.
In the third concrete embodiment, silicon briquette degumming method provided by the present invention can comprise the steps:
S31: provide this specification foregoing silicon briquette degumming system;
S32: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck;
S33: utilize exhaust steam to carry out preheating, form circulation and produce chain, utilize the heat of exhaust steam, reduce heating water at low temperature energy needed, with the reduction cost that comes unstuck to adding hot water storgae.
S34: add hot water storgae frock is carried out Steam Heating;
S351: frock is taken out, come unstuck;
S352: collect the exhaust steam after coming unstuck.Exhaust steam still has higher temperature after flowing out from the reative cell that comes unstuck, can be used in other link of production, and exhaust steam is carried out the secondary utilization, avoids energy loss, improves the production efficiency of enterprise.
In addition, frock is taken out, come unstuck and collects exhaust steam and can carry out synchronously, also can successively carry out.
More than silicon briquette degumming system provided by the present invention and silicon briquette degumming method are described in detail.Used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof.Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of claim of the present invention.
Claims (11)
1. silicon briquette degumming system, it is characterized in that, comprise the casing (21) that holds the frock of waiting to come unstuck, the reative cell that comes unstuck (22) that holds described casing (21), and with described casing (21) internal communication add hot water storgae (23), this adds the steam that generates in the hot water storgae (23) described frock is come unstuck.
2. silicon briquette degumming system according to claim 1 is characterized in that, describedly adds the downside that hot water storgae (23) is located at described casing (21), and top (212) and bottom (213) of described casing (21) are the permeability type structure.
3. silicon briquette degumming system according to claim 2 is characterized in that, the top (212) of described casing (21) and bottom (213) form by the some bodies of rod that be arranged in parallel, and the distance between the adjacent described body of rod forms steam channel; And the angle between the body of rod of the body of rod of described top (212) and described bottom (213) is greater than 0 degree.
4. silicon briquette degumming system according to claim 3 is characterized in that, described casing (21) circumferentially has all-sealed structure along it, and its side is provided with hermetically sealed door (211), and the described frock of waiting to come unstuck enters described casing (21) from described hermetically sealed door (211).
5. according to each described silicon briquette degumming system of claim 1 to 4, it is characterized in that, also comprise with described adding the attemperater (24) that hot water storgae (23) selectively is communicated with; This attemperater (24) and described adding, are provided with first magnetic valve (241) between the hot water storgae (23), described adding in the hot water storgae (23), be provided with upper limit and lower limit, when the described water level that adds in the hot water storgae (23) was lower than described lower limit, described first magnetic valve (241) was opened; When the described water level that adds in the hot water storgae (23) was higher than described upper limit, described first magnetic valve (241) cut out.
6. silicon briquette degumming system according to claim 5 is characterized in that, the inlet of described attemperater (24) is communicated with the steam (vapor) outlet of the described reative cell that comes unstuck (22).
7. silicon briquette degumming system according to claim 6 is characterized in that, described attemperater (24) has pressure exhaust valve (25), and when the pressure in the described attemperater (24) during more than or equal to predetermined pressure, described pressure exhaust valve (25) is opened.
8. silicon briquette degumming system according to claim 5 is characterized in that, the number of described casing (21) is at least two, and each described casing (21) sets gradually along the described steam direction that adds hot water storgae (23).
9. a silicon briquette degumming method is characterized in that, comprises the steps:
Step 1: provide as each described silicon briquette degumming system of claim 1 to 8;
Step 2: the casing that the frock of waiting to come unstuck will be housed is put into the reative cell that comes unstuck (22);
Step 3: add hot water storgae (23) described frock is carried out Steam Heating;
Step 4: described frock is taken out, come unstuck.
10. silicon briquette degumming method according to claim 9 is characterized in that, also comprises after the described step 3:
Step 31: collect the exhaust steam after coming unstuck.
11. silicon briquette degumming method according to claim 10 is characterized in that, also comprises between described step 2 and the described step 3:
Step 21: utilize described exhaust steam that the described hot water storgae (23) that adds is carried out preheating.
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| CN102514113A (en) * | 2012-01-06 | 2012-06-27 | 无锡市奥曼特科技有限公司 | Full-automatic silicon rod viscose board degumming equipment |
| CN103506333A (en) * | 2013-09-28 | 2014-01-15 | 无锡荣能半导体材料有限公司 | Silicone wafer degumming pre-washing device |
| CN108748750A (en) * | 2018-06-12 | 2018-11-06 | 山东大海新能源发展有限公司 | A kind of silicon wafer stripping liquid using Buddha's warrior attendant wire cutting configures system |
| CN109129940A (en) * | 2018-08-20 | 2019-01-04 | 衡阳恒裕轻质保温材料有限责任公司 | A kind of autoclave aerated concrete building block process units |
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| CN101693240A (en) * | 2009-10-26 | 2010-04-14 | 张家港市超声电气有限公司 | Process for degumming and pre-cleaning silicon slices |
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| CN101409253A (en) * | 2008-11-19 | 2009-04-15 | 高佳太阳能（无锡）有限公司 | Clamper for cleaning and degumming silicon chip |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102514113A (en) * | 2012-01-06 | 2012-06-27 | 无锡市奥曼特科技有限公司 | Full-automatic silicon rod viscose board degumming equipment |
| CN103506333A (en) * | 2013-09-28 | 2014-01-15 | 无锡荣能半导体材料有限公司 | Silicone wafer degumming pre-washing device |
| CN108748750A (en) * | 2018-06-12 | 2018-11-06 | 山东大海新能源发展有限公司 | A kind of silicon wafer stripping liquid using Buddha's warrior attendant wire cutting configures system |
| CN109129940A (en) * | 2018-08-20 | 2019-01-04 | 衡阳恒裕轻质保温材料有限责任公司 | A kind of autoclave aerated concrete building block process units |
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| CN101898391B (en) | 2012-05-02 |
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