CN101872133A - Light irradiation device - Google Patents
Light irradiation device Download PDFInfo
- Publication number
- CN101872133A CN101872133A CN201010166082A CN201010166082A CN101872133A CN 101872133 A CN101872133 A CN 101872133A CN 201010166082 A CN201010166082 A CN 201010166082A CN 201010166082 A CN201010166082 A CN 201010166082A CN 101872133 A CN101872133 A CN 101872133A
- Authority
- CN
- China
- Prior art keywords
- lamp
- light source
- light
- irradiation device
- light irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
Abstract
The invention provides a kind of light irradiation device, have 4 lamps, in this light irradiation device, provide the structure of the light source portion maintenance of the replacing that can easily carry out lamp or condenser etc.In this light irradiation device, be configured to 4 lamps and be in dimetric summit, the Lights section is slit into makes two lamps as two unit of one group, on unit separately, be provided with and pull out guiding element (guide rail).And, two unit are pulled out towards the opposite direction (left and right directions) that is in surface level respectively.
Description
Technical field
The present invention relates to the light irradiation device that on the exposure device of the manufacturing usefulness of semiconductor element or printed base plate, crystal liquid substrate etc., uses, relate in particular to light irradiation device with multi-lamp.
Background technology
The light source that uses in the exposure device as semiconductor element or printed base plate, liquid crystal display substrate, the main large-scale ultrahigh pressure mercury vapor lamp that uses from number kW to number 10kW.The reliability height of these lamps is from just be used in the past always.
In recent years, the large tracts of landization of liquid crystal display substrate or printed base plate constantly develops, and meanwhile, also expects the expansion in rayed zone in exposure device, also requires the maximization of exposure light source.
As its countermeasure, for example shown in the patent documentation 1, proposing has the light irradiation device that is made of light source a plurality of lamps and catoptron (condenser), and this mirror reflects is by the light of this lamp radiation.
As prior art, in Fig. 5, the structure of the light irradiation device in patent documentation 1 on the books is shown.
As light source 10, use to have two lamp 1a, 1b and two face condenser 2a, 2b.Condenser 2a, 2b are elliptical condenser mirror, are configured in separately the corresponding to mode of the 2nd focus f.In addition, condenser 2a, the 2b opening mode up that penetrates light with reflection is configured.
Fig. 6 is the figure of the structure of expression light source 10 shown in Figure 5.As shown in the drawing, to be the part that will comprise peristome be oblique with respect to the optical axis L of condenser 2a, 2b cuts for condenser 2a, 2b, is configured in the mode of the 2nd focus f of this cuing open of cutting and face S condenser 2a parallel to each other and total, 2b.As implied above, in being arranged with the device of a plurality of light sources, why the part of condenser being formed breach and arranging is because need not increase angle of collimation (visual angle) in the photoirradiated surface 8, can improve the utilization ratio of light, and improve the illumination of photoirradiated surface 8.
Return Fig. 5, turn back at the 1st level crossing 3, be incident to the locational integral lens (integrator lens) 4 of the 2nd focus f that is placed on condenser 2a, 2b from the light of light source 10.Be adjusted to by integral lens 4 at the uniform light of the Illumination Distribution of photoirradiated surface 8 via optical gate 5, on the 2nd level crossing 6, turn back, make central ray parallel and be radiated at photoirradiated surface 8 by collimation lens 7.
In order to shine more broad zone, shown in patent documentation 2, propose to possess the exposure light source of 4 lamps recently with high illumination.
[patent documentation]
[patent documentation 1] TOHKEMY 2004-245912 communique
[patent documentation 2] TOHKEMY 2008-83586 communique
Fig. 7 is illustrated in the light irradiation device with 4 lamps, the figure of an example of the configuration of lamp and condenser, and Fig. 8 is the integrally-built figure that the light source portion 10 when disposing 4 lamps as shown in Figure 7 is shown.
As shown in Figure 7,4 lamp 1a, 1b, 1c, 1d (following be the situation of lamp 1 as general name is also underlined) dispose the dimetric summit shown in the dotted line in the drawings respectively, will also be configured in around it by 4 face condenser 2a of the light reflection that each lamp radiated, 2b, 2c, 2d (following as general name is also underlined be the situation of condenser 2).
In addition, light source portion 10 has: the supporting lamp 1, condenser 2 and covering 30 thereof framework 40, and the supporting these whole base plates 50.
If when lamp was lighted for a long time, illumination can reduce, therefore need periodic replacement.In addition, catoptron neither consumables, but if produce dirty or during damage, then need to change at reflecting surface.
But, the light irradiation device of use multi-lamp is to be the purpose structure to shine more broad rayed zone with higher illumination originally as described above, and therefore employed lamp is the bigger large-scale lamp of power, therefore its condenser also becomes greatly, and opening diameter is for for example about 1m.
Therefore, using for example as shown in Figure 8 the size of light source portion of the light irradiation device of 4 lamps is that 1 limit is as more than the 2m.
In this case, if will carry out the such maintenance operation of replacing of the lamp or the condenser of light source portion in the inside of light irradiation device, operating personnel's hand is from the device outside and can't touch lamp, therefore will pierce device inside, comes and goes in inside and carries out operation.
But, poor in the inner operation that comes and goes of device, and must be noted that the part part in addition that not damage will be changed, it is comparatively difficult that operation itself also becomes.
Therefore, easy a little in order to make the maintenance operation, and consider that light source portion is taken out to the outside by light irradiation device inside carries out, but there is problem shown below.
If light source portion is taken out to the outside by the inside of light irradiation device, then as shown in Figure 8, consider to install and pull out guiding element (guide rail) 60 at the base plate 50 of light source portion, pull out light source portion from the main body of light irradiation device.
Fig. 9 is the figure that the state that the light source portion that will have 4 lamps pulls out from light irradiation device is shown.In the figure, only depict two, but also have two in illustrated inside about lamp.
But the light source portion 10 of Gou Chenging becomes very heavy like this.For example, condenser 2 is such as mentioned above glass, even condenser only, 4 have also surpassed 50kg altogether.After metal (aluminium) system covering 30 is installed on this condenser, need the framework 40 and base plate 50 that can crooked mode support with integral body.
Especially, 4 face condenser 2a, 2b, 2c, 2d are provided with in the corresponding to mode of the 2nd focal position f, if the skew of the focal position of each condenser then can't obtain desirable optical property.Therefore need thick and firm framework, and this framework of supporting thick and can crooked base plate.
In addition,, also consider 2,3 operation personnel to be taken advantage of be stated to carry out operation on the light source portion, so framework or base plate must have the structure that can bear this weight when being when carrying out the replacing operation of lamp or condenser in the light source portion more than the 2m on 1 limit.
If consider above such various conditions, the light source portion overall weight can become more than about 1000kg (1 ton).1 ton of heavy weight is pulled out in light irradiation device with the length of the 2m on 1 limit that is equivalent to light source portion, the moment that light source portion caused (moment) that overhangs after pulling out (among Fig. 9 thick arrow shown in) also becomes very big, support in selected being also included within of pulling out guiding element (guide rail) 60 of this weight, unactual.
In addition, even pull out,, just there is the whole unbalanced situation of light irradiation device because only such weight moves.In order to prevent that this situation from taking place, counterweight (counerweight) need be set, make that light irradiation device maximizes more, weightization.
Summary of the invention
The present invention in view of the above problems, it is a kind of in the light irradiation device that possesses 4 lamps that purpose is to provide, and can carry out the structure of maintenance of the light source portion such as replacing of lamp or condenser easily.
In the present invention, solve above-mentioned problem with scheme as follows.
A kind of light irradiation device possesses: 4 lamps, and 4 catoptrons, be located at above-mentioned lamp separately around, reflection is from the light of each lamp; Be configured to above-mentioned 4 lamps and be positioned at dimetric summit, be provided with at this light irradiation device: the 1st pulls out guiding element, and the 1st lamp that is configured in above-mentioned dimetric the 1st summit is pulled out towards the 1st direction of level as one group from the 2nd catoptron of the light of the 2nd lamp with reflection from the 1st catoptron of the light of the 1st lamp, the 2nd lamp that is configured on the 2nd summit adjacent with above-mentioned the 1st summit with reflection.
And, also be provided with the 2nd and pull out guiding element, the 3rd lamp that is configured in above-mentioned the 3rd summit and reflection are pulled out towards level and 2nd direction opposite with above-mentioned the 1st direction as one group from the 4th catoptron of the light of the 4th lamp from the 3rd catoptron of the light of the 3rd lamp, the 4th lamp and the reflection that are configured on the 4th summit adjacent with above-mentioned the 3rd summit.
Then, with the group of the 1st lamp and the 2nd lamp and the group of the 3rd lamp and the 4th lamp,, pull out towards the opposite direction (left and right directions) that is in surface level along the guiding element of pulling out that is provided with respectively.
The invention effect
In the present invention, can obtain following effect.
Owing to the Lights section is slit into two groups of two lamps are arranged respectively, therefore one group of condenser that is supported is the two sides, compares with the situation that 4 faces is made as a group, and the weight of condenser becomes half.If the weight of condenser becomes half, can therefore framework be attenuated, but and also attenuation of base plate.
Therefore, pull out as one two is that half of one group the weight ratio weight when pulling out 4 lamps whole is also light.In addition, the length of pulling out also becomes half, and the amount of therefore overhang (over hang) reduces, and also can select and pull out guiding element (guide rail), and can make the structure of pulling out light source portion.
And because two lamps are pulled out with left-right symmetric as one group, therefore if pull out two sides, wherein one group of counterweight as another group plays a role, and light irradiation device can out of trim yet.
Description of drawings
Fig. 1 is the figure of the schematic configuration of expression light irradiation device of the present invention.
Fig. 2 is the stereographic map of the light source portion of light irradiation device of the present invention.
The figure of Fig. 3 state that to be expression pull out the 1st and the 2nd light source cell from light irradiation device.
Fig. 4 is illustrated in the figure that 4 lamps is configured under the situation on rectangular summit the direction of light source portion being cut apart and pulling out.
Fig. 5 is the figure of the structure of the existing light irradiation device of expression.
Fig. 6 is the figure of the structure of expression light source shown in Figure 5.
Fig. 7 is the figure of an example of the structure of the light source of expression with 4 lamps.
Fig. 8 is the integrally-built figure of the light source portion of expression when disposing 4 lamps.
The figure of Fig. 9 state that to be the expression light source portion that will possess 4 lamps pull out from light irradiation device.
Description of symbols
1,1a, 1b, 1c, 1d: lamp
2,2a, 2b, 2c, 2d: condenser
3: the 1 level crossings
4: integral lens
5: optical gate
6: the 2 level crossings
7: collimation lens
8: photoirradiated surface
10: light source portion
11: the 1 light source cells
12: the 2 light source cells
30: covering
40: framework
50: base plate
60: pull out guiding element (guide rail)
70: the light source cell conveying end
F: the 2nd focus of condenser
L: optical axis
S: cutting plane
Embodiment
Fig. 1 is the figure of the schematic configuration of expression light irradiation device of the present invention.In addition, for the parts of Fig. 5 same structure, pay identical symbol.
4 catoptrons that light source 10 uses 4 lamps and will reflect from the light of each lamp.In addition, in the figure,, in fact, remaining amount small cup lamp (the 3rd lamp 1c and the 4th lamp 1d) is arranged, reach these condensers 2c, 2d in the drawing installed inside of two lamp 1a, 1b though two lamp 1a, 1b and catoptron 2a, 2b only are shown.
4 catoptrons are elliptical condenser mirror, dispose in each the corresponding to mode of the 2nd focus f.In addition, condenser is the opening mode up that penetrates with the light that will reflect, and is supported by the support unit (not shown) that supports from downside.
As shown in Figure 6,4 catoptrons need not to increase angle of collimation (visual angle) and the utilization ratio of raising light, in order to improve illumination at photoirradiated surface, can approaching mutually mode with lamp, make to form otch towards 2 positions of 90 ° of directions of adjacent condenser and be configured.
In Fig. 1, turn back and incide the integral lens 4 that is placed on the 2nd focal position at the 1st level crossing 3 from the light of the light source 10 that possesses 4 lamps and condenser.
Be adjusted at the uniform light of the Illumination Distribution of photoirradiated surface 8 by integral lens 4 and turn back at the 2nd level crossing 6, utilize collimation lens 7 to make central ray parallel and be radiated at photoirradiated surface 8 via optical gate 5.
Fig. 2 is the stereographic map of the light source portion of light irradiation device of the present invention.In addition, this figure is that expression is with the state of the 1st light source cell 11 in the way that guide rail 60 is pulled out.
As shown in the drawing, light source portion 10 with 4 lamps will cover the covering 30 of the behind of catoptron 2, be divided into two parts respectively and constitute the 1st light source cell 11 and the 2nd light source cell 12 with the framework 40 of supporting lamp 1 or condenser 2 headed by the covering 30 etc. and the base plate 50 that supports these parts, install on each of Unit two and pull out guiding element (guide rail) 60, both pull out from light irradiation device in the opposite direction.That is, light source portion is divided into two parts along following direction: with respect to the direction of the direction quadrature that light source cell is pulled out.
As if as implied above the Lights section is slit into two parts, the condenser that each light source cell supported becomes the two sides, and the weight of condenser reduces by half.Though the mode that the framework 40 of supporting condenser must can not be offset with the 2nd focal position of two condensers supports, but compared with prior art, the weight of condenser becomes half, therefore framework is attenuated.If framework attenuates, but the whole also attenuation of base plate 50 of supporting, so the whole weigh lightization of light source cell.
As implied above, the weight of the light source cell that 2 lamps are a group become pull out 4 lamps when whole below half of weight of imaginary light source portion.In fact, even consider that the operator steps down on the light source cell, also have only about 400kg.Weight when 4 lamp integral body are pulled out as a cover is more than 1 ton, and therefore the weight of half is also light than it.
In addition, the length that light source cell is pulled out is the amount 1m of a face condenser, and this is when pulling out 4 lamps half.
As implied above, light source cell is weigh lightization also, and pulls out length and also shorten, so light source cell also tails off to the amount that light irradiation device overhangs, and the moment that puts on guide rail is also showing and reduces.If the weight of this degree with pull out length, have spendable guide rail, can manufacture and design drawer structure.
The figure of Fig. 3 state that to be expression pull out the 1st and the 2nd light source cell from light irradiation device.
In light irradiation device, be formed with light source cell conveying end 70, during the light irradiation device running (when lamp is lighted), outer dress covering is installed.Then, when two light source cells, 11,12 inside from light irradiation device were drawn out, the outer dress covering of the part of light source cell conveying end 70 was promptly by removal.
In addition, this figure pulls out two light source cells 11,12 left and right directions in the figure, but also can pull out towards deep, front direction.Which also can decide and toward direction to pull out according to the space that can around light irradiation device, be guaranteed.
The length that light source cell 11,12 is pulled out, be that the length of guide rail 60 is made as in Unit two be identical length.
Like this, just become left and right symmetrically and pull out light source cell.The weight of two light source cells equates that basically therefore shown in thick arrow among the figure, when pulling out two sides' light source cell, wherein a side light source cell plays a role as the counterweight of the opposing party's light source cell, and light irradiation device can out of trim yet.
If the light source portion that makes as implied above is drawn out to outside the light irradiation device, the maintenance operating personnel just can stretch out one's hand from a side tripartite periphery in addition of the facing device of light source cell and carry out operation.Thus, carry out the maintenance operations such as replacing of lamp or condenser easily.
In addition, in the above-described embodiments, be illustrated with the situation that the mode that is in foursquare summit is configured at 4 lamps with light source portion.But,, exist 4 lamps are configured the better situation of time utilization ratio in the mode that is in rectangular summit by the shape in rayed zone.
Fig. 4 is illustrated under the situation that 4 lamps are configured in the mode that is in rectangular summit, light source portion is cut apart and the figure of the direction of pulling out.Fig. 4 (a) is the figure that is watched 4 lamps that are configured in the mode that is in rectangular summit by the top, Fig. 4 (b) and Fig. 4 (c) be expression will be shown in Fig. 4 (a) the Lights section of configured light be slit into two parts and the figure of the direction of pulling out.
Shown in Fig. 4 (a) that 4 lamps are also same as the previously described embodiments with the situation that the mode that is in rectangular summit is configured, light source portion is divided into two parts with light source cell in the direction with respect to the pull-out direction quadrature.
The method cut apart considers have: be divided into two-part method, reach and be divided into two-part method as Fig. 4 (c) short side direction that is shown in as Fig. 4 (b) long side direction that is shown in, which can, so long as cut apart just passable in the direction in the space (space) that can guarantee the light source cell after cutting apart is pulled out.
But,, preferably pull out with respect to the direction that the amount of overhanging of light irradiation device reduces towards light source cell in order to reduce to put on the load of pulling out guiding element (guide rail) a little.
Claims (2)
1. light irradiation device possesses: 4 lamps, and 4 catoptrons, be located at above-mentioned lamp separately around, reflection is from the light of each lamp; Be configured to above-mentioned 4 lamps and be positioned at dimetric summit, this light irradiation device is characterised in that to have:
The 1st pulls out guiding element, and the 1st lamp that is configured in above-mentioned dimetric the 1st summit is pulled out towards the 1st direction of level as one group from the 2nd catoptron of the light of the 2nd lamp with reflection from the 1st catoptron of the light of the 1st lamp, the 2nd lamp that is configured on the 2nd summit adjacent with above-mentioned the 1st summit with reflection; And
The 2nd pulls out guiding element, and the 3rd lamp that is configured in above-mentioned dimetric the 3rd summit and reflection are pulled out towards level and 2nd direction opposite with above-mentioned the 1st direction as one group from the 4th catoptron of the light of the 4th lamp from the 3rd catoptron of the light of the 3rd lamp, the 4th lamp and the reflection that are configured on the 4th summit adjacent with above-mentioned the 3rd summit.
2. light irradiation device as claimed in claim 1 is characterized in that,
Above-mentioned catoptron is an elliptical condenser mirror, is formed with otch at two positions that are in 90 ° of directions towards adjacent condenser.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009105089A JP5471006B2 (en) | 2009-04-23 | 2009-04-23 | Light irradiation device |
| JP105089/2009 | 2009-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101872133A true CN101872133A (en) | 2010-10-27 |
| CN101872133B CN101872133B (en) | 2015-03-25 |
Family
ID=42997070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010166082.9A Expired - Fee Related CN101872133B (en) | 2009-04-23 | 2010-04-23 | Illuminating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5471006B2 (en) |
| KR (1) | KR101373993B1 (en) |
| CN (1) | CN101872133B (en) |
| TW (1) | TWI459156B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112327580A (en) * | 2019-11-18 | 2021-02-05 | 凤凰电机公司 | Lamp holding case and light source for exposure device using the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020118817A (en) * | 2019-01-23 | 2020-08-06 | ウシオ電機株式会社 | Patterning device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002258212A (en) * | 2001-03-02 | 2002-09-11 | Ricoh Co Ltd | Lighting system for projector |
| JP2004079254A (en) * | 2002-08-13 | 2004-03-11 | Canon Inc | Light source equipment and exposure device |
| US7070301B2 (en) * | 2003-11-04 | 2006-07-04 | 3M Innovative Properties Company | Side reflector for illumination using light emitting diode |
| JP2008083586A (en) * | 2006-09-28 | 2008-04-10 | Hitachi High-Technologies Corp | Exposure light source, exposure apparatus, exposure method and method for manufacturing panel substrate for display |
| CN201047512Y (en) * | 2007-04-07 | 2008-04-16 | 上海向隆电子科技有限公司 | LED module |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5184767B2 (en) * | 2006-09-04 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | Exposure equipment |
| JP4879085B2 (en) * | 2007-05-17 | 2012-02-15 | 株式会社日立ハイテクノロジーズ | Exposure equipment |
| JP2009231719A (en) * | 2008-03-25 | 2009-10-08 | Topcon Corp | Method and device for holding elliptical mirror used for exposure device |
-
2009
- 2009-04-23 JP JP2009105089A patent/JP5471006B2/en not_active Expired - Fee Related
-
2010
- 2010-03-05 TW TW099106465A patent/TWI459156B/en not_active IP Right Cessation
- 2010-03-10 KR KR1020100021315A patent/KR101373993B1/en active IP Right Grant
- 2010-04-23 CN CN201010166082.9A patent/CN101872133B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002258212A (en) * | 2001-03-02 | 2002-09-11 | Ricoh Co Ltd | Lighting system for projector |
| JP2004079254A (en) * | 2002-08-13 | 2004-03-11 | Canon Inc | Light source equipment and exposure device |
| US7070301B2 (en) * | 2003-11-04 | 2006-07-04 | 3M Innovative Properties Company | Side reflector for illumination using light emitting diode |
| JP2008083586A (en) * | 2006-09-28 | 2008-04-10 | Hitachi High-Technologies Corp | Exposure light source, exposure apparatus, exposure method and method for manufacturing panel substrate for display |
| CN201047512Y (en) * | 2007-04-07 | 2008-04-16 | 上海向隆电子科技有限公司 | LED module |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112327580A (en) * | 2019-11-18 | 2021-02-05 | 凤凰电机公司 | Lamp holding case and light source for exposure device using the same |
| CN112327580B (en) * | 2019-11-18 | 2023-10-27 | 凤凰电机公司 | Lamp holding case and light source for exposure device using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101872133B (en) | 2015-03-25 |
| KR20100117017A (en) | 2010-11-02 |
| TW201039071A (en) | 2010-11-01 |
| JP2010256531A (en) | 2010-11-11 |
| TWI459156B (en) | 2014-11-01 |
| KR101373993B1 (en) | 2014-03-12 |
| JP5471006B2 (en) | 2014-04-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101802531B (en) | Refrigerator shelf led lighting | |
| CN102620203B (en) | Backlight module and liquid crystal display device | |
| CN102588846B (en) | Backlight module and liquid crystal display | |
| TW200641482A (en) | Backlight assembly and liquid crystal display having the same | |
| CN202452298U (en) | Backlight module | |
| US20170276863A1 (en) | Backlight module and display device | |
| CN102352986A (en) | Backlight module and liquid crystal television | |
| CN101922648A (en) | Backlight module | |
| CN102182969A (en) | Side incident LED (Light Emitting Diode) light source backlight module | |
| CN101872133A (en) | Light irradiation device | |
| US20100060119A1 (en) | Glove box with lit sealed containment | |
| CN102620206A (en) | Backlight module and liquid crystal display device comprising same | |
| CN101799145B (en) | Concentration/flood light reflector and portable type concentration/flood light | |
| CN203349065U (en) | Straight-downward type LED backlight module | |
| CN102767759A (en) | Liquid crystal display device and backlight module thereof | |
| CN102829393B (en) | Illuminating component | |
| CN102705761A (en) | Backlight module | |
| JP2010251122A (en) | Backlight, and liquid crystal display device | |
| WO2021008008A1 (en) | Multiple reflection panel lamp | |
| CN101655203A (en) | ultra-thin backlight module | |
| CN105135356B (en) | A kind of sun light lighting system | |
| CN102798059B (en) | Edge-lighting backlight module | |
| CN201599650U (en) | Backlight module | |
| CN202305432U (en) | Bottom light source assembly of automatic lamp detection machine | |
| CN204962609U (en) | Light guide lighting device of integrated LED lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150325 Termination date: 20200423 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |