CN101846506A - Roll angle measurement method based on common path parallel beams - Google Patents
Roll angle measurement method based on common path parallel beams Download PDFInfo
- Publication number
- CN101846506A CN101846506A CN 201010166499 CN201010166499A CN101846506A CN 101846506 A CN101846506 A CN 101846506A CN 201010166499 CN201010166499 CN 201010166499 CN 201010166499 A CN201010166499 A CN 201010166499A CN 101846506 A CN101846506 A CN 101846506A
- Authority
- CN
- China
- Prior art keywords
- light
- roll angle
- measurement method
- polarizing beam
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a roll angle measurement method based on common path parallel beams, comprising the steps of: polarizing and splitting beams twice to obtain two parallel beams; and simultaneously utilizing a reflection device of which a pair of reflection plane surfaces form a 90-degree angle and a pair of reverse reflectors to realize the common path and the error amplification of the two parallel beams. Therefore, the compactness of the structure, the stability of the system as well as the reliability and the flexibility of the measurement are improved.
Description
Technical field
The invention belongs to the angle field of optical measuring technologies, particularly roll angle measurement method.
Background technology
In three kinds of angular motion errors of machine tool guideway, the roll angle error is a parameter of difficult measurement in six errors.System such as lathe and three-coordinate measuring machine need measure roll angle, the angle of pitch and deflection angle in order to revise Abbe error in real time.In addition, in the Installation And Calibration of some workpiece, also need rolling angle measurement or location.
Optical measurement roll angle method mainly contains following four kinds at present:
Based on interferometric method.Although some interference system can obtain very high measurement resolution, measuring system is too complicated, cost high (as the disclosed roll angle measurement method of Chinese patent ZL01130893.1).
Measuring method based on the holographic grating diffraction.Utilize the holographic grating diffraction phenomena to realize rolling angle measurement, its shortcoming is that measuring accuracy is not high, and the while measuring head has follows cable, causes in-site measurement inconvenience (as U.S. Pat 6316779 disclosed roll angle measurement methods).
Measuring method based on the polarization benchmark.Although the polarization method is the more a kind of method of studying at present, the resolution of its measurement is difficult to improve, and system stability is difficult to guarantee (as the disclosed roll angle measurement method of Chinese patent ZL200510011877.1).
Based on the collimation laser measuring method.The measuring principle of this method is simple relatively, utilizes the geometrical optics measuring principle.U.S. Pat 5798828 discloses the method that a kind of collimation laser is measured roll angle, and this method calculates the roll angle size based on parallel rays by measuring two different local linearitys.Improve measurement sensitivity, need to increase the distance between the collimation parallel rays, and measuring head has cable, make troubles to in-site measurement.Chien-Hung Liu is being entitled as " Development ofa laser-based high-precision six-degrees-of-freedom motion errors measuringsystem for linear stage " (Review of Scientific instruments, 2005,76,055110) proposes to utilize the prism of corner cube retrodirective reflection in, thereby make not tape cable of systematic survey slip-on head, thereby overcome the shortcoming that slip-on head has cable.But so, the aerial light path of two measuring light has also increased exponentially, and air has also increased the influence of measuring.In addition, measure the method for roll angle, improve Measurement Resolution based on parallel rays, can only be by increasing the distance between the parallel rays, thus increased the volume of measuring system.
Summary of the invention
The invention provides a kind of roll angle measurement method based on common path parallel beams, adopt twice polarization spectro to obtain two parallel rayss, and utilize simultaneously by a pair of plane of reflection is mutually 90 ° reflection device and a pair of retro-reflector has realized two parallel rayss common road and error and amplify, thereby improve the compactedness of structure, the stability of system, measuring reliability and sensitivity.
A kind of roll angle measurement method comprises:
The collimation laser that is sent by laser instrument produces mutually perpendicular radioparent polarized light and reflected ray polarized light after through the first polarizing beam splitter polarization spectro;
Described radioparent polarized light is for measuring light I;
Described reflected ray polarized light is injected second polarizing beam splitter that is provided with along its radiation direction, and quilt is vertical reflection once more, forms and nonoverlapping measurement light II parallel with the radioparent polarized light,
Described measurement light I and II inject the first and second roll angle sensing units that are provided with along radiation direction separately respectively, form and nonoverlapping retrodirective reflection light I and II parallel with incident ray separately; Wherein, measure light I and II respectively perpendicular to the surface of contact of its incident, the surface of contact of incident is parallel with the wobble shaft for the treatment of examining system;
Described retrodirective reflection light I and II form respectively along the secondary reflection light I and the II of the reverse outgoing of light of retrodirective reflection light II and I respectively after 90 ° of crossed reflexes of secondary;
Described secondary reflection light I and II inject the second and first roll angle sensing unit respectively, and, form respectively through the probing light I of second polarizing beam splitter with by the probing light II of the first polarizing beam splitter vertical reflection respectively along reverse second and first polarizing beam splitter that is back to of light of measuring light II and I;
Probing light I and II inject first and second detectors respectively, and the first and second detector collections obtain the position variation signal of probing light I and II;
Simultaneously, first detector and second detector produce respectively and reflect the current signal of incident light position variation separately, and send into the signal processing circuit that is connected with two detectors, signal processing circuit is handled the current signal from detector, obtain reflecting the voltage signal of change in location, and the voltage signal that obtains sent into connected computing machine, as calculated after the machine difference processing, obtain the size and Orientation of tested roll angle again divided by the distance between the two roll angle sensing units, wherein sign is judged the direction of roll angle.
Above-mentioned detector can also be made as two-dimensional detector, detector can produce the signal that two-dimensional position changes simultaneously, the vertical direction position signalling of first detector and second detector obtains the roll angle signal divided by distance between the two roll angle sensing units again through after the difference.The horizontal direction position signalling of first detector and second detector obtains the horizontal direction straightness error through after the average treatment.
Described roll angle sensing unit is to be placed on the retro-reflector for the treatment of on the examining system, is used to change the direction of incident ray, makes incident ray after reflection along parallel with incident ray and nonoverlapping direction is reverse returns.In order to realize above function, described roll angle sensing unit can be prism of corner cube, hollow prism of corner cube or opal structure.
90 ° of crossed reflexes of described secondary can be penetrated the crossed reflex device that mirror constitutes by two planes that are mutually 90 ° by the plane of reflection and be realized, also can realize by the crossed reflex device that is made of two pentagonal prisms.
Among the present invention, measure light I and II all by two roll angle sensing units, secondary crossed reflex device and two polarizing beam splitters, in measuring process, inject the first roll angle sensing unit and form probing light I and end the light path that is experienced from measuring light I, and inject the second roll angle sensing unit to end the light path that is experienced identical to formed probing light II by the first polarizing beam splitter vertical reflection from measuring light II to seeing through second polarizing beam splitter.
In order further to reduce error, the optical path distance that can make probing light I and II enter corresponding detector equates, that is, the distance between described first polarizing beam splitter and second detector equals the distance between described second polarizing beam splitter and first detector.
It is pointed out that reverse the advancing of radioparent polarized light and reflected ray polarized light intersection do not influence each other; Light path is in same plane.
Adopt method of the present invention to measure roll angle, it is measured sensitivity and is significantly improved.Be entitled as " Development of a laser-based high-precisionsix-degrees-of-freedom motion errors measuring system for linear stage " (Review of Scientific instruments with people such as Chien-Hung Liu, 2005,76,055110) comparing of document record based on parallel rays measurement roll angle method, under the condition of same measuring head size, the sensitivity of measurement has improved 2 times.Simultaneously, adopt measuring method of the present invention, because two parallel rayss are by identical optical component, guaranteed the common road property of measuring light, basically eliminated the error that the randomized jitter of measuring light brings to measurement fully, improve the stability and the reliability of system, and improved the adaptability of instrument.In addition, owing to taked repeatedly reflection to make position variation signal amplify in the inventive method, therefore, under the prerequisite that guarantees Measurement Resolution, can reduce the measuring head volume, apparatus structure is more compact, the practicality of instrument strengthens, and makes based on the parallel rays roll angle measurement method and becomes practical.And, adopt method of the present invention, can not change any light path condition, measure when realizing roll angle and horizontal direction straightness error.
Be used for the device of roll angle measurement method of the present invention, comprise:
Be used to send the laser instrument of collimation laser;
Being used for the collimation laser polarization spectro is mutually perpendicular radioparent polarized light in polarization direction and reflected ray polarized light, and allows first polarizing beam splitter of reflected ray polarized light vertical reflection;
Be used for the reflected ray polarized light vertical reflection and second polarizing beam splitter that allows the radioparent polarized light to see through;
Be used to make the first and second roll angle sensing units of incident ray along and nonoverlapping retrodirective reflection parallel with incident ray, this roll angle sensing unit places to be treated on the examining system, can reflect synchronously that the roll angle for the treatment of examining system changes; Described roll angle sensing unit can be prism of corner cube, hollow prism of corner cube or opal structure;
Be used for incident ray is carried out the crossed reflex device of 90 ° of crossed reflexes of secondary; The crossed reflex device can be to be mutually 90 ° two planes by the plane of reflection to penetrate the crossed reflex device that mirror constitutes, and also can be the crossed reflex device that is made of two pentagonal prisms;
Be used to gather and export first detector and second detector of the detectable signal of measuring light, also be provided with the signal processing circuit that links to each other with first and second detectors simultaneously, and the computing machine that links to each other with signal processing circuit.
Wherein, the radiation direction that penetrates along laser instrument sets gradually first polarizing beam splitter and the first roll angle sensing unit; Along the collimation laser radiation direction that penetrates perpendicular to laser instrument second polarizing beam splitter and second detector are set in the both sides of first polarizing beam splitter; Along the collimation laser radiation direction that is parallel to the laser instrument ejaculation the second roll angle sensing unit and first detector are set in the both sides of second polarizing beam splitter.
Description of drawings
Fig. 1 is first kind of embodiment of the device of realization roll angle measurement method of the present invention;
Fig. 2 is the principle of work synoptic diagram of roll angle measurement method of the present invention;
Fig. 3 is second kind of embodiment of the device of realization roll angle measurement method of the present invention;
Fig. 4 is the third embodiment of the device of realization roll angle measurement method of the present invention;
Fig. 5 is that pentagonal prism among Fig. 4 is to light translation synoptic diagram;
Fig. 6 is the 4th kind of embodiment of the device of realization roll angle measurement method of the present invention;
Among the figure: 1 is the collimation laser instrument; 3,4 is polarizing beam splitter; 2,6 is plane mirror; 5,7 is photodetector; 8,9 is prism of corner cube; 10,11 is pentagonal prism; 100 is fixed cell; 200 is mobile unit.
Embodiment
Describe the present invention in detail below in conjunction with drawings and Examples, but the present invention is not limited to this.
Fig. 1 is first kind of embodiment realizing the device of roll angle measurement method of the present invention, and it is as follows that its common road parallel lines are measured the roll angle method:
(1) in fixed cell 100, the collimation laser by laser instrument 1 sends produces two linearly polarized lights through first polarizing beam splitter 3, and it is mutually perpendicular that the polarization direction is respectively
Direction and direction, wherein
Linearly polarized light sees through first polarizing beam splitter 3 for measuring light I;
And linearly polarized light is injected second polarizing beam splitter 4 that is provided with on the radiation direction of polarized light along the line, adjusts second polarizing beam splitter 4, makes linearly polarized light generation vertical reflection, form with
Parallel and the nonoverlapping measurement light II of linearly polarized light.
Article (2) two, measurement light I and the II that is parallel to each other, incide respectively on first prism of corner cube 8 and second prism of corner cube 9 in the mobile unit 200, prism of corner cube 8 and 9 is the roll angle sensing unit, mobile unit 200 is connected with treating examining system, measure light I and II respectively perpendicular to the surface of contact of its incident, the surface of contact of this incident is parallel with the wobble shaft for the treatment of examining system, prism of corner cube makes these two parallel rayss that corresponding translation take place, and reverse respectively returning, form and nonoverlapping retrodirective reflection light I and II parallel with incident ray separately, retrodirective reflection light I and II are parallel to each other;
(3) retrodirective reflection light I and II are injected in the fixed cell 100 by two planes of reflection and are mutually crossed reflex device that 90 ° plane mirror 2 and 6 constitutes through 90 ° of crossed reflexes of secondary, form respectively along the secondary reflection light I and the II of the reverse outgoing of light of retrodirective reflection light II and I;
Wherein, retrodirective reflection light I injects the plane mirror 2 that is provided with along its radiation direction earlier, after 90 ° of reflections, inject again and plane mirror 2 vertically disposed plane mirrors 6,, form along secondary reflection light I along the reverse outgoing of light of retrodirective reflection light II through after 90 ° of reflections again; Retrodirective reflection light II injects the plane mirror 6 that is provided with along its radiation direction earlier, after 90 ° of reflections, inject again and plane mirror 6 vertically disposed plane mirrors 2, through after 90 ° of reflections again, form along secondary reflection light II along the reverse outgoing of light of retrodirective reflection light I.
(4) secondary reflection light I and II inject the prism of corner cube 9 and 8 in the mobile unit 200 respectively, and be back to second polarizing beam splitter 4 and first polarizing beam splitter 3 in the fixed cell 100 along the light of measuring light II and I is reverse respectively, form the probing light I that sees through second polarizing beam splitter 4 respectively and by the probing light II of first polarizing beam splitter, 3 vertical reflections;
Probing light I and II inject first detector 7 and second detector 5 respectively;
That is,
The secondary reflection light I of linearly polarized light correspondence sees through second polarizing beam splitter 4, incides on the detector 7; The secondary reflection light II of linearly polarized light correspondence reflexes on the detector 5 through first polarizing beam splitter 3;
(7) detector 7 is gathered the variation that obtains two parallel probing light I of bundle and II position respectively with 5, the change in location size is converted into electric signal, this electric signal is as calculated after the machine difference processing, obtain the size and Orientation of tested roll angle again divided by the distance between two prism of corner cubes, wherein sign is judged the direction of roll angle.
Above-mentioned detector can also be made as two-dimensional detector, detector can produce the signal that two-dimensional position changes simultaneously, the vertical direction position signalling of first detector and second detector obtains the roll angle signal divided by distance between two prism of corner cubes again through after the difference.The horizontal direction position signalling of first detector and second detector obtains the horizontal direction straightness error through after the average treatment.
Radioparent polarized light and reverse the advancing of reflected ray polarized light intersection do not influence each other; Light path is in same plane.
Clearly, the device of realizing roll angle measurement method of the present invention can also have other various deformation.
As: the crossed reflex device that is used for 90 ° of crossed reflexes of secondary can also substitute by other device, in the third embodiment of the device of realization roll angle measurement method of the present invention as shown in Figure 4, utilize two pentagonal prisms 10 and 11 to substitute two plane mirrors 2 and 6 in first kind of embodiment, it is identical with the roll angle measurement method and the effect of first kind of embodiment realization with effect that its common road parallel lines are measured roll angle method.
Fig. 5 is that pentagonal prism among Fig. 4 is to light translation synoptic diagram;
As seen from Figure 5, when incident light has a translation in the horizontal direction, then emergent light also has a translation, the effect that two pentagonal prisms make the light reflection with two to be mutually 90 ° of plane mirror effects be the same, different is to use the more convenient Installation and Debugging of pentagonal prism.
For another example: also can there be different variations the position that is used for the crossed reflex device of 90 ° of crossed reflexes of secondary, in second kind of embodiment of the device of realization roll angle measurement method of the present invention as shown in Figure 3, with be used in the fixed cell 100 90 ° of crossed reflexes of secondary, be mutually the crossed reflex device that 90 ° plane mirror 2 and 6 constitutes by two planes of reflection the front end that is placed on two polarizing beam splitters 3 and 4 be installed, it is identical with the roll angle measurement method and the effect of first kind of embodiment realization with effect that its common road parallel lines are measured roll angle method.
Equally, in the 4th kind of embodiment of the device of realization roll angle measurement method of the present invention as shown in Figure 6, with being used for crossed reflex device 90 ° of crossed reflexes of secondary, that be made of two pentagonal prisms in the fixed cell 100 front end that is placed on two polarizing beam splitters 3 and 4 is installed, it is identical with the roll angle measurement method and the effect of first and third kind of embodiment realization with effect that its common road parallel lines are measured roll angle method.
Fig. 2 has provided the principle schematic of rolling angle measurement, and its measuring principle is as follows:
When mobile unit 200 is gone up mobile at line slideway (treating examining system), when shifting axle has roll angle, two prism of corner cubes 8 and 9 have rightabout displacement respectively in the mobile unit 200, obtain two moving displacement sizes by detector 7 and 5, can calculate the size of roll angle.
Can get by Fig. 2, when mobile unit 200 has roll angle θ around shifting axle, then
Δ y wherein
2, Δ y
1Be respectively prism of corner cube 9 and 8 translation distances at vertical direction, L is the distance between the two prism of corner cube central points.Consider that roll angle is a low-angle, then formula (1) but abbreviation be
We can obtain by geometrical optics knowledge, when prism of corner cube 8 and 9 has size to be Δ y at vertical direction
2=-Δ y
1=Δ, the translation that direction is opposite since measuring light respectively twice through prism of corner cube (every through once, the light translation is amplified 2 times), so the translation of luminous point has 4 times of amplifications on the detector 5,7, promptly
Δ
5＝-Δ
7＝-4Δ (3)
Δ wherein
5, Δ
7Be respectively on the detector luminous point in the translation of vertical direction.Convolution (2), (3) can obtain
By formula (4) as can be known, under the condition that spacing is the same between two parallel rayss, Measurement Resolution of the present invention is the United States Patent (USP) (patent No.: US5798828) 4 times.
In addition, because two parallel light paths are observed the principle on road altogether, so the disturbance of air field can eliminate to greatest extent to the influence of measurement result, improved measuring stability.
What more than enumerate only is several specific embodiments of the present invention; the invention is not restricted to above embodiment; many distortion can also be arranged, and all distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention all should be thought protection scope of the present invention.
Claims (7)
1. roll angle measurement method, comprise: measurement light is entered be placed on the roll angle sensing unit for the treatment of on the examining system, gather to obtain the position signalling of the measurement light that returns from described roll angle sensing unit, obtain the size and Orientation of roll angle after treatment, it is characterized in that the procurement process of the position signalling of the described measurement light that returns is as follows:
The collimation laser that is sent by laser instrument produces mutually perpendicular radioparent polarized light and reflected ray polarized light after through the first polarizing beam splitter polarization spectro;
Described radioparent polarized light is for measuring light I;
Described reflected ray polarized light is injected second polarizing beam splitter that is provided with along its radiation direction, and quilt is vertical reflection once more, forms and nonoverlapping measurement light II parallel with the radioparent polarized light,
Described measurement light I and II inject the first and second roll angle sensing units that are provided with along radiation direction separately respectively, form and nonoverlapping retrodirective reflection light I and II parallel with incident ray separately; Wherein, measure light I and II respectively perpendicular to the surface of contact of its incident, the surface of contact of incident is parallel with the wobble shaft for the treatment of examining system;
Described retrodirective reflection light I and II form respectively along the secondary reflection light I and the II of the reverse outgoing of light of retrodirective reflection light II and I respectively after 90 ° of crossed reflexes of secondary;
Described secondary reflection light I and II inject the second and first roll angle sensing unit respectively, and, form respectively through the probing light I of second polarizing beam splitter with by the probing light II of the first polarizing beam splitter vertical reflection respectively along reverse second and first polarizing beam splitter that is back to of light of measuring light II and I;
Probing light I and II inject first and second detectors respectively, and the first and second detector collections obtain the position signalling of probing light I and II.
2. roll angle measurement method as claimed in claim 1 is characterized in that: described roll angle sensing unit is a prism of corner cube.
3. roll angle measurement method as claimed in claim 1 or 2 is characterized in that: described roll angle sensing unit is hollow prism of corner cube.
4. roll angle measurement method as claimed in claim 1 is characterized in that: described roll angle sensing unit is the opal structure.
5. roll angle measurement method as claimed in claim 1 is characterized in that: 90 ° of crossed reflexes of described secondary are penetrated the crossed reflex device that mirror constitutes by two planes that are mutually 90 ° by the plane of reflection and are realized.
6. roll angle measurement method as claimed in claim 5 is characterized in that: 90 ° of crossed reflexes of described secondary realize by the crossed reflex device that is made of two pentagonal prisms.
7. roll angle measurement method as claimed in claim 1 is characterized in that, the distance between described first polarizing beam splitter and second detector equals the distance between described second polarizing beam splitter and first detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101664995A CN101846506B (en) | 2010-05-07 | 2010-05-07 | Roll angle measurement method based on common path parallel beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101664995A CN101846506B (en) | 2010-05-07 | 2010-05-07 | Roll angle measurement method based on common path parallel beams |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101846506A true CN101846506A (en) | 2010-09-29 |
| CN101846506B CN101846506B (en) | 2012-01-11 |
Family
ID=42771201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101664995A Expired - Fee Related CN101846506B (en) | 2010-05-07 | 2010-05-07 | Roll angle measurement method based on common path parallel beams |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101846506B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102269582A (en) * | 2011-05-05 | 2011-12-07 | 华中科技大学 | Spatial three-dimensional angle measurement apparatus |
| CN102581703A (en) * | 2011-01-05 | 2012-07-18 | 财团法人精密机械研究发展中心 | Measuring device for double coaxial feed shafts |
| CN102620654A (en) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | Automatic detecting method of grating scale casing angle distortion and distortion correcting device |
| CN103477981A (en) * | 2013-09-06 | 2014-01-01 | 巴中市光雾山植物研究所 | Acer palmatum Seiryu tissue culture propagation process |
| CN104748720A (en) * | 2015-03-27 | 2015-07-01 | 中国科学院西安光学精密机械研究所 | Space angle measuring device and space angle measuring method |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN109781034A (en) * | 2019-01-22 | 2019-05-21 | 上海理工大学 | Small roll angle high-acruracy survey interferometer synchronous with straightness and measurement method |
| CN112325803A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN113566745A (en) * | 2021-07-30 | 2021-10-29 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102654392B (en) * | 2012-05-21 | 2014-12-10 | 西安交通大学 | Roll angle measurement device and method based on array-type multiple reflections |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798828A (en) * | 1996-03-13 | 1998-08-25 | American Research Corporation Of Virginbia | Laser aligned five-axis position measurement device |
| CN1335483A (en) * | 2001-08-31 | 2002-02-13 | 清华大学 | Tumble angle measuring method and measurer |
| CN1687701A (en) * | 2005-06-07 | 2005-10-26 | 北京交通大学 | Method and equipment for measuring rolling angle |
| CN2884141Y (en) * | 2005-12-30 | 2007-03-28 | 北京交通大学 | Laser, six freedom simultaneous measuring apparatus |
-
2010
- 2010-05-07 CN CN2010101664995A patent/CN101846506B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5798828A (en) * | 1996-03-13 | 1998-08-25 | American Research Corporation Of Virginbia | Laser aligned five-axis position measurement device |
| CN1335483A (en) * | 2001-08-31 | 2002-02-13 | 清华大学 | Tumble angle measuring method and measurer |
| CN1687701A (en) * | 2005-06-07 | 2005-10-26 | 北京交通大学 | Method and equipment for measuring rolling angle |
| CN2884141Y (en) * | 2005-12-30 | 2007-03-28 | 北京交通大学 | Laser, six freedom simultaneous measuring apparatus |
Non-Patent Citations (2)
| Title |
|---|
| 《光学学报》 20081231 曹睿等 《多自由度误差同时测量中的滚转角测量方法》 第2344~2348页 1-7 第28卷, 第12期 2 * |
| 《光学技术》 20041130 匡萃方等 《滚转角测量方法综述》 第699~702页 1-7 第30卷, 第6期 2 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102581703A (en) * | 2011-01-05 | 2012-07-18 | 财团法人精密机械研究发展中心 | Measuring device for double coaxial feed shafts |
| CN102269582A (en) * | 2011-05-05 | 2011-12-07 | 华中科技大学 | Spatial three-dimensional angle measurement apparatus |
| CN102269582B (en) * | 2011-05-05 | 2012-11-21 | 华中科技大学 | Spatial three-dimensional angle measurement apparatus |
| CN102620654A (en) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | Automatic detecting method of grating scale casing angle distortion and distortion correcting device |
| CN103477981B (en) * | 2013-09-06 | 2015-10-28 | 巴中七彩林业科技有限公司 | Acer palmatum Green Dragon tissue culture propagation technique |
| CN103477981A (en) * | 2013-09-06 | 2014-01-01 | 巴中市光雾山植物研究所 | Acer palmatum Seiryu tissue culture propagation process |
| CN104748720A (en) * | 2015-03-27 | 2015-07-01 | 中国科学院西安光学精密机械研究所 | Space angle measuring device and space angle measuring method |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN109781034A (en) * | 2019-01-22 | 2019-05-21 | 上海理工大学 | Small roll angle high-acruracy survey interferometer synchronous with straightness and measurement method |
| CN109781034B (en) * | 2019-01-22 | 2020-11-10 | 上海理工大学 | Micro-roll angle and linearity synchronous high-precision measurement interferometer and measurement method |
| CN112325803A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN112325803B (en) * | 2020-10-23 | 2022-03-04 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN113566745A (en) * | 2021-07-30 | 2021-10-29 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
| CN113566745B (en) * | 2021-07-30 | 2024-02-20 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101846506B (en) | 2012-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101846506B (en) | Roll angle measurement method based on common path parallel beams | |
| CN104180776B (en) | High-resolution roll angle measurement method and device based on difference interference phase method | |
| CN104634283B (en) | Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection | |
| CN2884141Y (en) | Laser, six freedom simultaneous measuring apparatus | |
| CN100460811C (en) | Method and device for improving straight line degree measurement sensitivity | |
| CN105737765A (en) | Four-freedom degree optical measuring head based on semiconductor laser assembly | |
| CN101691998B (en) | Two-dimensional laser autocollimator | |
| CN102155927A (en) | Two-dimensional micro angle measuring device based on laser auto-collimation | |
| CN104613900A (en) | Full optical path drift compensation high-precision roll angle measuring method and device | |
| CN104535019A (en) | Double-diffractive-grating heterodyning interference roll angle measuring device and method | |
| CN110160471A (en) | A kind of error measuring system and method for high-precision linear guide | |
| CN103162645B (en) | A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias | |
| CN1439864A (en) | Laser multiple degree-of-freedom measuring system and method | |
| CN103673892A (en) | Symmetric-type grating heterodyne interference secondary diffraction measuring device | |
| CN100365381C (en) | Method and apparatus for enhancing measuring sensitivity of rotating corner | |
| CN112781529B (en) | Straightness interference measuring device insensitive to incident angle | |
| CN102865834A (en) | Even-number slit-type photoelectric auto-collimator | |
| CN105806215A (en) | Roll angle measurement device and method based on bi-blazed grating heterodyne interference | |
| CN102175184A (en) | Polarized grating auto-reference auto-collimation two-dimensional angle measurement device | |
| CN102818541A (en) | High-resolution rolling-angle measuring device and measuring method | |
| CN103759655A (en) | Two-freedom homodyne grating interferometer displacement measuring system based on optical octave method | |
| CN201413130Y (en) | Measuring device based on double-frequency interference principle for measuring straightness and position | |
| CN108168466A (en) | A kind of a wide range of and high-precision rolling angle measurement device and measuring method | |
| CN102269582B (en) | Spatial three-dimensional angle measurement apparatus | |
| CN106908004B (en) | A kind of distance measurement system and its application based on vectorial field |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20140507 |