CN101832945A - Online detection method and device for defects of coated glass film - Google Patents
Online detection method and device for defects of coated glass film Download PDFInfo
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- CN101832945A CN101832945A CN 201010165069 CN201010165069A CN101832945A CN 101832945 A CN101832945 A CN 101832945A CN 201010165069 CN201010165069 CN 201010165069 CN 201010165069 A CN201010165069 A CN 201010165069A CN 101832945 A CN101832945 A CN 101832945A
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Abstract
The invention discloses an optical detection device for defects of coated glass film, wherein one side of a detected sample is made into a 45-degree lead angle; the light transmitted by a laser light source is expanded by an expander lens and then parallelly comes in from the side surface of the detected sample; and the light is subjected to total internal reflection in a glass-air interface and a film-air interface. When the film has no defect, the light limited to the total reflection condition is continuously reflected between an upper surface and a lower surface until the light is transmitted out from the side surface, thus a very ideal dark field is formed. Meanwhile, a defect in the film becomes a light upwards scattered by a scatterer, and a CCD (Charge Coupled Device) shoots above the detected sample to obtain a clear defect image that is judged by graphic processing and identifying software of a computer, and a defect mark and a defect prompt are provided. If a rotary mirror is added between the laser and the expander lens, detection on the entire film surface can be ensured. Different from the traditional method, the invention provides the device which has advantages of easy operation, strong contrast between a bright field and a dark field and obvious effect and can be conveniently applied to online detection of film defects.
Description
Technical field
The present invention relates to optical detective technology, specifically be meant a kind of defects of coated glass film on-line detection method and device of being used for.
Technical background
Along with the development of electronics industry and the rise of information industry, membraneous material and thin film technique have become one of emphasis of Materials Science and Engineering research field, and it has been penetrated into the every field of modern science and technology and national economy.Except that information electronics and photoelectron, all be unable to do without thin film technique and membraneous material such as Aero-Space, medicine and other manufacturing industry.
Because there are various defectives in material itself and coating process in the film, comprise that the stoichiometric proportion of deformation, crack, indentation and rete and material is not equal.By defects property can be divided into impurity defect, electricity causes defective, fault of construction, chemical imperfection, mechanics defective and thermal defect etc.; Pattern branch by defective roughly has dross defective, cratering defective, strip defective and other complicated defectives in irregular shape.The origin cause of formation of defective has following several: (1) is produced by thin film growth process, and low more as the temperature of substrate, the defect concentration in the film is big more, wherein the film defects density maximum for preparing with ion plating and sputtering method; (2) cause by substrate surface native defect, clean inadequately as plated film district environment and substrate; (3) produce by film deposition process, as the splash of material.In general, the type of defective, density, size are with film material, depositing operation and show the difference of cleanliness and difference [the 26th rolls up the 2nd phase, in April, 2004 for Ling Xiulan etc. " laser film Study of Defects ", optical instrument].
Defective is all influential to a lot of performances such as the power of membraneous material, heat, electricity, magnetic, and for example point defect, dislocation etc. can make resistance increase, and the magnetic of the alloy firm of preparation is far below block materials.Therefore, particularly important to the detection of film defects.
In existing thin film fabrication technology, carry out defects detection with optical means usually, A: utilize interference of light phenomenon B: utilize polarisation of light characteristic C: utilize scattering of light (details in a play not acted out on stage, but told through dialogues/bright-field imagery).As in [film defect checking method, patent No. ZL 200510102281.2] patent,, trigger the film interference phenomenon and observe by deposition one Langmuir film on film to be measured.Form interference fringe at film defectiveness place, the approximate effect that reaches the amplification defective, thus be convenient to observe film defects.But interferometric method its lateral resolution when detecting defective is lower, and for the surfaceness of testing sample too responsive [Lu Jun, " novel thin film defective micro measurement Study on Technology ", Zhejiang University's master thesis, 2007].
The polarization method generally is to incide the sample surface with a branch of light, by the change of the forward and backward polarization state of analytic sample surface reflection (stokes parameter), the optical characteristics of coming the MEASUREMENTS OF THIN surface.Though it is obtaining to have advantage on the subsurface information, but polarization method Data Processing in Experiment is comparatively complicated, is difficult to satisfy demand [Lu Jun, " the novel thin film defective micro measurement Study on Technology " of measurement at a high speed and online detection, Zhejiang University's master thesis, 2007].
Traditional major light inspection (Glare Light Check) method is by strong illumination film surface to be measured, there is being the perforation fault location to produce light leakage phenomena, and the protrusion defect place is being arranged because of the full stain of light tight generation, and light leak spot or full stain are corresponding identical with perforation or particulate projection size, utilize CCD camera (ChargeCoupled Device Camera) or full stain of naked-eye observation or light leak spot again, check that to reach film has flawless purpose [film defect checking method, patent No. ZL 200510102281.2].The advantage that the method has is simple to operate, can online detection, but because light leak spot is extremely small with full stain, and major light causes the CCD bias light stronger, make that in conventional CCD photodetection dynamic range having some to cause the little defective of light intensity variation is difficult to detected, promptly for a lot of tiny flaws because the light and shade of its initiation changes not obvious, cause a lot of tiny flaws to be covered by the background that major light forms easily, cause careless omission in checking process, to occur.
Summary of the invention
In order to solve the problem that film defects in the prior art is difficult for online detection, the invention provides and a kind ofly more effective film defects is carried out on-line detection method, and this method is simple to operate, easy to detect, is a kind of very effective harmless online test method.
The present invention is based on total internal reflection and scattering principle design, it comprises: test sample one side is done upwards lead angle (shown in Fig. 1 (a)) at 45, directional light is from 45 ° of lead angle side incidents of test sample, and light is at glass-air, film-air interface experiences total internal reflection (referring to index path 1 (a)) in glass:
By refraction law:
n
0*sinα＝n
1*sinβ(n
0＝1，n
1＝1.52，α＝45°)
According to total reflection law: n
1Sin θ
0=1, the cirtical angle of total reflection θ of glass-air
0=41 °.
θ
1＝β+45°＝72.7°＞θ
0
So, in glass-air interface generation total reflection.
In like manner, have in glass-film-air interface: n
1Sin θ
1=n
2So sin φ＞1 is in film-air interface generation total reflection.(annotate: above derivation all is suitable for the lead angle of any number of degrees)
When film is flawless when sunken, light is from glass one side incident, and constantly reflection between upper and lower surface is penetrated until from the side (shown in Fig. 2 (a)).Owing to be subjected to the restriction of total reflection condition, light is limited in the glass inner transverse and propagates, and can't upwards propagate, and this moment, CCD detected less than any signal, formed very desirable details in a play not acted out on stage, but told through dialogues (as shown in Figure 5).When thin-film memory during in defectives such as bubble, dross, indentations, the homogeneity of film is destroyed, total reflection condition disappears, defective becomes scatterer and to all angles scattered light, comprise upwards propagating light (shown in Fig. 1 (b)), can obtain clearly film defects image (as shown in Figure 6) by being positioned at the CCD shooting of film surface top this moment.Because not having the zone of defective on the film is to be close to perfect details in a play not acted out on stage, but told through dialogues, therefore as long as fault location has light scattering to come out, just can form high-definition contrast, as easy as rolling off a log being detected with it.The present invention forms the detection that light leaks with regard to having realized the defective under the details in a play not acted out on stage, but told through dialogues like this, rather than the faint light under the bright field changes in the conventional method, thereby has just determined method of the present invention can detect the defective the film more sensitively on ultimate principle.In order to ensure in actual applications better is detection under the details in a play not acted out on stage, but told through dialogues condition, takes the shading measure around glass, has avoided the interference of bias light, can access gem-pure defect image.Monitor in real time by computer control, captured image is differentiated by Flame Image Process and identification software, provides flaw labeling and prompting, can realize online detection well.If between laser instrument and beam expanding lens, add tilting mirror, constantly change the incident angle of incident parallel beam, can guarantee that whole face all is scanned.
Checkout equipment of the present invention comprises successively: LASER Light Source 1, beam expanding lens 2, travelling belt 3, light shield 4, test sample 5, CCD camera 6, computing machine 7, Flame Image Process and identification software 8, tilting mirror 9 (specifically seeing Fig. 3, Fig. 4).
Description of drawings
Fig. 1 injects the light path synoptic diagram of sample for light, and among Fig. 1 (a), lead angle at 45 is done in sample one side, and grey color part is a film, and the below is a glass.Directional light is with the 45 incident of (doing lead angle at 45) from the sample side, and light at the interface of glass-air, film-air total reflection takes place, and so constantly reflects in upper and lower surface.
Fig. 1 (b) is the index path of light when running into film defects in the air, and wherein 10 is film defects, and 11 penetrate light for light on behind the defect scattering.
Light penetrated index path when Fig. 2 (a) was one 45 ° of lead angles of example, and Fig. 2 (b) is that index path is injected and penetrated to light after example two added tilting mirrors.
Fig. 3 realizes the device synoptic diagram of the online detection of film defects for the present invention, and among Fig. 3: 1 is laser instrument, and 2 is beam expanding lens, and 3 is travelling belt, and 4 is light shield, and 5 is test sample, and 6 is the CCD camera, and 7 is computing machine, and 8 is Flame Image Process and identification software.
Fig. 4 is the detected device synoptic diagram of the whole face of realization for the present invention, and among Fig. 4, the part of Fig. 3 increase is tilting mirror (9) relatively.
Fig. 5 is the details in a play not acted out on stage, but told through dialogues figure when adopting the zero defect that pick-up unit of the present invention obtained, and the darkfield image that CCD (6) took when Fig. 5 (a) was zero defect, Fig. 5 (b) are through the details in a play not acted out on stage, but told through dialogues figure after the Flame Image Process.
Fig. 6 is for adopting the defect map that pick-up unit of the present invention obtained, and Fig. 6 (a) is the defect map that CCD (6) takes, and Fig. 6 (b) is through the defect map after the Flame Image Process.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in detail:
Embodiment 1:45 ° lead angle
Place test sample 5 on the travelling belt 3, CCD camera 6 is positioned at tested film top, and light shield 4 is connecting test sample 5 zones and CCD camera 6, is used to block bias light, CCD camera 6 links to each other with computing machine 7, computing machine 7 built-in shooting controls and Flame Image Process and identification software 8.
Testing process is as follows:
1, test sample 5 one sides are done lead angle at 45, are put on the travelling belt 3.CCD camera 6 is positioned at tested film top, links to each other with light shield 4 between the two.
2, the line laser bundle that sends of LASER Light Source 1 is extended to parallel beam through beam expanding lens 2, and parallel beam is from side (the doing lead angle at 45) incident of test sample 5, and refract light is at glass-air, film-air interface generation total reflection.(shown in Fig. 1 (a))
3, when film is flawless, light is limited by total reflection condition, constantly penetrates sample (as shown in Figure 2) from the side after the reflection through upper and lower surface.Owing to taked the shading measure around the film, there is not the interference of bias light, CCD camera 6 detections this moment form desirable details in a play not acted out on stage, but told through dialogues (as shown in Figure 5) less than any signal.
4, when there is defective in film, the homogeneity of film is destroyed, total reflection condition disappears, defective becomes scatterer to all directions scattered light, the part scattered light upwards penetrates film surface (shown in Fig. 1 (b)), CCD camera 6 shootings by being positioned at the film top obtain film defects image (as shown in Figure 6) clearly.Computing machine 7 control CCD cameras 6 are taken the film front with certain frequency, take the gained image and judge by computing machine 7 collections and through Flame Image Process and identification software 8, provide flaw labeling and prompting.
Embodiment 2: band tilting mirror full scan
On the basis of example 1, the Lights section is improved: increase tilting mirror 9 (as shown in Figure 4) between LASER Light Source 1 and beam expanding lens 2, test sample 5 can not done lead angle.After the directional light incident, still satisfy total reflection condition and between upper and lower surface constantly reflection penetrate (shown in Fig. 2 (b)) until from the side.Because tilting mirror can constantly change the incident direction of light, thereby can guarantee that whole face all is scanned, and the subregion can not occur by the situation of omission.
Because this method utilizes total reflection principle, the light leak situation that causes because of defect scattering during from top detection side light ray propagation, and around taked the shading measure, make flawless details in a play not acted out on stage, but told through dialogues and the image formation sharp contrast that contains defective.And be with the full scan mode of tilting mirror constantly to change incident angle by tilting mirror, can effectively avoid the film portion zone by omission.This method is with respect to the easier observation of existing film defect checking method, and effect is better.
Claims (3)
1. defects of coated glass film on-line measuring device, it is characterized in that: it comprises laser instrument (1), beam expanding lens (2), travelling belt (3), light shield (4), CCD camera (6), computing machine (7) and Flame Image Process and identification software (8); The light that laser instrument (1) sends is parallel from test sample (5) side incident after beam expanding lens (2) expansion, light is at glass-air, film-air interface experiences total internal reflection, when the film zero defect, owing to be limited by total reflection condition, light is constantly reflection between upper and lower surface, until penetrating from the side, form very desirable details in a play not acted out on stage, but told through dialogues; When the film defectiveness, the defective in the film then becomes the scatterer scattered light that makes progress, and CCD camera (6) is taken above test sample, obtains clearly that defect image is handled by computer graphical and identification software is differentiated, and provides flaw labeling and prompting.
2. a kind of defects of coated glass film on-line measuring device according to claim 1 is characterized in that: can add one and be used to the tilting mirror (9) of guaranteeing that whole face is scanned between described laser instrument (1) and beam expanding lens (2).
3. the optical detecting method based on the film defects of the described pick-up unit of claim 1 is characterized in that comprising the following steps:
Install no tilting mirror (9) situation:
A, test sample (5) one sides are done lead angle at 45, be put on the travelling belt (3), link to each other with light shield (4) between film and the CCD (6), be used to block bias light;
B, laser beam are parallel from the 45 ° of lead angle incident in test sample side glass after beam expanding lens (2) expansion, refracted ray is at glass-air, film-air interface experiences total internal reflection, because the restriction of total reflection condition, light be constantly reflection between upper and lower surface, penetrates glass until from the side;
Defective in C, the film becomes scatterer makes light to all angles scattering, comprise upwards and propagating, CCD camera (6) is taken the film front under computing machine (7) control, the defect image that obtains is differentiated by computer acquisition and by Flame Image Process and identification software (8), provides flaw labeling and prompting;
Device has tilting mirror (9) situation:
A, test sample (5) is put on the travelling belt (3), links to each other with light shield (4) between film and the CCD camera (6), be used to block bias light;
B, laser beam change incident direction behind tilting mirror (9), parallel from test sample side incident glass after beam expanding lens (2) expansion again, refracted ray is at glass-air, film-air interface experiences total internal reflection.Because the restriction of total reflection condition, light be constantly reflection between upper and lower surface, penetrates glass until from the side.And, can guarantee that whole face is scanned because of the incident direction of light constantly changes;
Defective in C, the film becomes scatterer makes light to all angles scattering, comprise upwards and propagating, CCD camera (6) is taken the film front under computing machine (7) control, the defect image that obtains is differentiated by computer acquisition and by Flame Image Process and identification software (8), provides flaw labeling and prompting.
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| CN 201010165069 CN101832945A (en) | 2010-04-29 | 2010-04-29 | Online detection method and device for defects of coated glass film |
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| CN110044931A (en) * | 2019-04-23 | 2019-07-23 | 华中科技大学 | A kind of detection device on bend glass surface and internal flaw |
| CN112505067A (en) * | 2020-10-15 | 2021-03-16 | 俞华芬 | Method for detecting defects of transparent glass after film coating |
| CN113686879A (en) * | 2021-09-09 | 2021-11-23 | 杭州利珀科技有限公司 | Optical film defect visual detection system and method |
| CN117111319A (en) * | 2023-10-18 | 2023-11-24 | 深圳市信润富联数字科技有限公司 | Parallel light source device and dark field detection system |
| CN117388314A (en) * | 2023-12-13 | 2024-01-12 | 徐州丰诚新材料科技有限公司 | Intelligent detection method and system for molding temperature of optical glass |
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