CN101672625B - Measurement method of thickness of subsurface damaged layer of bucky optical material - Google Patents
Measurement method of thickness of subsurface damaged layer of bucky optical material Download PDFInfo
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- CN101672625B CN101672625B CN2009100242809A CN200910024280A CN101672625B CN 101672625 B CN101672625 B CN 101672625B CN 2009100242809 A CN2009100242809 A CN 2009100242809A CN 200910024280 A CN200910024280 A CN 200910024280A CN 101672625 B CN101672625 B CN 101672625B
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Abstract
The invention discloses a measurement method of the thickness of a subsurface damaged layer of a bucky optical material. The measurement method comprises the following steps: processing the surface of a sample by a magneto rheological process to form a specific cutting plane; cutting the subsurface damaged layer and reflecting a subsurface damage to the cutting plane; processing the cutting plane with a corrosive chemical agent to expose and amplify subsurface cracks on the cutting plane; measuring roughness values of different positions on the cutting plane by a roughness measurement tool to obtain a roughness value change curve; working out a height difference between a critical point or a climax and a starting point recorded in measurement process, or a height difference between two points projected on an original surface, i.e. the thickness d of the subsurface damaged layer of the sample, wherein the critical point or climax to level off is obtained from a roughness curve by the data processing. The measurement method can quickly and accurately measure optical samples of multiple surface shapes and multiple materials and can realize heavy-calibre and engineered application.
Description
Technical field
The present invention relates to a kind of measuring method of thickness of subsurface damaged layer of bucky optical material, be used for measuring from the plane to the sphere, multiple optical element such as aspheric surface.This method has amplification to hard fragility optical material sub-surface damage, can realize the measurement of the small sub-surface damage layer thickness that superfine grinding causes.
Background technology
At present, existing hard fragility optical material sub-surface damage measuring method, there is Technique of Magnetorheological Finishing to observe the inclined-plane comparatively accurately in conjunction with optical microscope, as: document Suratwala T I, Wong L L, Miller P E etal., Sub-surface mechanical damagedistribution during grinding of fused silica[J] .Journalof Non-Crystalline Solids, 2006,352:5601-5617 is described.Measure material and be optical glass planar sample commonly used, this method is used Technique of Magnetorheological Finishing processing one detection property slight ramp on the sample surface, utilize optical microscope that the inclined-plane is scanned, the method that combining image is handled is tried to achieve the crackle layer width on the inclined-plane, tries to achieve the sub-surface damage layer thickness by inclination angle of inclined plane again.This method is owing to will use optical microscope that the magnetorheological inclined-plane that polishes out is observed, use and debug the optical microscope complexity, and survey workpiece size had the restriction of certain size, this method processing result image is not directly perceived, is unsuitable for the practical application of through engineering approaches.And the measurement of sphere, aspheric surface sample is not described as yet.
Summary of the invention
At the existing above-mentioned defective of background technology, the measuring method that the purpose of this invention is to provide a kind of thickness of subsurface damaged layer of bucky optical material, this method utilizes magnetorheological polishing to process section plane, use the roughness concentration instrument that it is scanned, the roughness of diverse location on the measurement plane, demarcate the affected layer on the inferior surface of optical material indirectly with the variation tendency of surfaceness, but have through engineering approaches, quick, practical characteristics.
For reaching above purpose, the present invention takes following technical scheme to be achieved:
A kind of measuring method of thickness of subsurface damaged layer of bucky optical material is characterized in that, comprises the steps:
The first step, measured workpiece is installed on the magnetorheological polishing machine, adopt the technology of magnetorheological polishing, on the workpiece optical surface, process the slight ramp that an inclination angle is θ, tiltedly cut open sub-surface damage layer, crackle in the sub-surface damage layer, hole are presented on the inclined-plane, form surface crack, hole;
Second step, the inclined-plane after the use corrosive chemical processing, and remove the polishing fluid residual impurity and remove the heavy lamination of the meagre polishing that covers inferior surface crack, crackle is further exposed, amplifies;
The 3rd step, use initial boundary vicinity continuous feeding, the scanning from the inclined-plane of roughness contourgraph or white light interferometer along the inclined-plane, the roughness value at diverse location place on the continuous coverage inclined-plane, record numerical value is also write down the position coordinates X of initial boundary scan point on the inclined-plane
1
The 4th step by the roughness value data that record, obtained feed value on the inclined-plane and the change curve between the roughness value, obtained roughness value through data processing and tended to critical point stably or limit, write down the position coordinates X of this point
2
The 5th step is according to above-mentioned two point coordinate X
1And X
2, try to achieve the distance L between 2
1=X
2-X
1, promptly the crackle layer length on the inclined-plane is L
1,, obtain corresponding inferior surface crack layer depth d by inclination angle of inclined plane θ
1=L
1Sin θ;
The 6th step, use X ray stress analysis instrument on the inclined-plane, to record the internal stress zone, obtain the width L of internal stress layer
2, the width of sub-surface damage layer on the inclined-plane is L=L like this
1+ L
2,, obtain corresponding sub-surface damage layer depth d=Lsin θ again by inclination angle of inclined plane θ.
In the said method, use roughness contourgraph or white light interferometer from the inclined-plane initial boundary vicinity along the continuous feeding in inclined-plane, the scanning process, simultaneously the slight ramp that processes is carried out the check of inclination angle [theta], described inferior surface crack layer depth of the 5th, the 6th step, sub-surface damage layer depth are proofreaied and correct according to the gained error.
The measuring method of the another kind of thickness of subsurface damaged layer of bucky optical material of the present invention is characterized in that, comprises the steps:
The first step, measured workpiece is installed on the magnetorheological polishing machine, adopt the technology of magnetorheological polishing, cut a circular flat at sphere or aspheric arbitrary position, tiltedly cut open sub-surface damage layer, crackle in the sub-surface damage layer, hole are presented on the circular flat, form surface crack, hole;
In second step, the circular flat after the use corrosive chemical processing is removed the polishing fluid residual impurity and is removed the heavy lamination of the meagre polishing that covers inferior surface crack, and crackle is further exposed, amplifies;
The 3rd step, optional 1 P on the circumference of circular flat
1(X
1, Y
1, Z
1), use white light interferometer from selected analyzing spot P
1Scan to the center from the sample circumference along horizontal radius, record the roughness value data of diverse location on this radius, and record;
The 4th step by the roughness value data of the diverse location that records, obtained the feed value of radial direction and the change curve between the roughness value, obtained the roughness change curve through data processing and tended to critical point stably or limit, write down the position coordinates P of this point
2(X
2, Y
2);
The 5th step, according to spherical equation or aspheric surface equation z=f (x, y, z) and polishing degree of depth h obtain on original sphere and P
2Vertical corresponding some P
3Z coordinate Z
2The difference of obtaining at 2 is the one-tenth-value thickness 1/10 d=|Z of sub-surface damage layer
1-Z
2|.
More than in two kinds of measuring methods, to the roughness change curve that the 4th pacing gets, described data processing comprises: to the optical glass sample, be to obtain the analyzing spot position coordinates that the roughness value change curve tends to critical point correspondence stably by the S batten to realize; To the optical ceramics sample, be that the analyzing spot position coordinates of the limit correspondence by writing down the roughness change curve is realized.
The inventive method characterizes the existence of crackle on the plane in the mode of using roughness concentration on the section plane, the width of demarcating crackle layer on the section plane by variation tendency and certain data processing method of roughness value.Its advantage be fast, precision is higher, this is that the device institute of other measuring method at present is irrealizable.
Adopt the inventive method, except that the optical element that can measure optical ceramics and two kinds of materials of optical glass, can also measure different bores, the optical element of coplanar type not.Has very strong engineering application.
Description of drawings
Fig. 1 is the sub-surface damage layer structural representation.
Fig. 2 is the sub-surface damage instrumentation plan of planar sample of the present invention on the inclined-plane of polishing processing.
Fig. 3 is the measurement process flow diagram of the embodiment of the invention 1 optical glass plane prism sample.
The graph of relation of the roughness and the amount of feeding on the inclined-plane that Fig. 4 records for Fig. 3 embodiment 1.
Fig. 5 is the assay of Fig. 3 embodiment 1 inclination angle of inclined plane.
Fig. 6 is that the embodiment of the invention 2 optical ceramics spheres, aspheric mirror sample sub-surface damage are measured process flow diagram.
The graph of relation of the roughness and the amount of feeding on the circular flat that Fig. 7 records for Fig. 6 embodiment 2.
Embodiment
The present invention is described in further detail below in conjunction with drawings and the specific embodiments.
As shown in Figure 1, the sub-surface damage layer of optical element comprises inferior surface crack layer and internal stress deformation layer, and on the not damaged matrix, polished heavy lamination covers.Because of its below the surface, be difficult for directly observing.The inventive method utilizes the processes of magnetorheological polishing to go out a specific section plane.Like this, the sub-surface damage layer that is capped just reflects on section plane, forms surface crack district and internal stress district on the section plane, general designation surface damage district.Use the roughness of roughness concentration instrument diverse location on the enterprising line scanning of section plane, measurement section plane, relative size with roughness value characterizes surface damage, demarcates the surface damage zone on the section plane, obtains the thickness of optical element sub-surface damage layer indirectly.Compare background technology and have through engineering approaches, quick, practical characteristics.The present invention tiltedly cuts open planar sample along dotted line, and inclination angle of inclined plane is θ, runs through polishing heavy lamination, sub-surface damage layer and not damaged matrix, is studying sub-surface damage (shown in red dotted line among Fig. 1) on the inclined-plane.
Fig. 2, Fig. 3 show the processing instance of optical glass planar sample.Measurement to certain K9 optical glass planar sample sub-surface damage layer thickness: carry out sub-surface damage at the optical surface of Fig. 3 Step1 behind W20 abrasive particle grinding 20min and detect: shown in Fig. 3 Step2, use the processes of magnetorheological polishing to go out the slight ramp (Fig. 2) of inclination angle as θ=6 ', along the direction of the magnetorheological polishing shown in the arrow, on the inclined-plane, can embody apart from the profile information of original plane different depth.Use the inclined-plane after the magnetorheological polishing processing of HF acid corrosion agent treated, the clean surface also further exposes the crackle on the inclined-plane, amplifies.Use the initial boundary vicinity dotted line scanning (Fig. 2, Fig. 3 Step3) of roughness contourgraph from the inclined-plane, by the spacing of setting along the direction of arrow along the inclined-plane feeding, constantly measure the roughness (Fig. 2, Fig. 3 Step4) at dotted line place, record the line roughness value at diverse location dotted line place on the inclined-plane successively.Obtain the relation curve of inclined-plane feeding and roughness, as shown in Figure 4.In the measuring process, the initial boundary scan point coordinate X on record inclined-plane
1=80.The processing of S batten is carried out to curve in the back, obtains roughness value and tends to analyzing spot coordinate X stably
2=240.The length of crackle layer is L on the inclined-plane like this
1=(X
2-X
1) * 0.01mm=1.2mm.It is very little to record on the inclined-plane internal stress layer width by the X ray internal stress, the width of crackle layer is ignored relatively, the width of sub-surface damage layer is about 1.2mm on the inclined-plane like this, inclination angle of inclined plane θ by known polishing, according to d=Lsin θ=1.2sin6 ', obtain the sub-surface damage layer thickness 2.09 μ m of optical glass surface.
Further, also available roughness contourgraph accurately obtains the profile scan on inclined-plane: inclination angle of inclined plane is 6 minutes 49 seconds (Fig. 5), like this according to d=Lsin θ=1.2sin6 ' 49 ", the sub-surface damage layer thickness on this optical glass optical surface accurately can be proofreaied and correct is 2.37 μ m.
As shown in Figure 6, a kind of concrete practical measuring examples of optical ceramics spherical mirror sub-surface damage layer thickness, carrying out sub-surface damage at the optical surface of the Step1 of Fig. 6 behind W40 abrasive particle grinding 20min detects: shown in Step2 among Fig. 6: use the technology of the magnetorheological polishing detection property circular flat of dishing out on the sphere sample of radius-of-curvature as R, its horizontal radius is r.Section plane and original sphere have just formed spherical crown (Fig. 6 Step2), and the planar circumferential place is shallow apart from original surface, and circle centre position is dark apart from original surface.Use corrosive chemical that section plane is handled, the inferior surface crack on the section plane is exposed amplify; Among Fig. 6 Step3 and the Step4: use white light interferometer at the circular flat that cuts, from the analyzing spot P of circumference
1(X
1, Y
1, Z
1) along radial direction to center of circle feeding successively, measure circular flat along the change curve (Fig. 7) of diverse location roughness on the horizontal radius with feeding.Optical ceramics spare is different with the constituent of optical glass, and the roughness change curve that records is also different, and as shown in Figure 7, the present embodiment sample adopts optical ceramics, and limit will appear in the roughness change curve, find out the coordinate P at circular scan point place on change curve
1(X
1, Y
1, Z
1) and change curve on limit coordinate P
2(X
2, Y
2, Z
1), by spherical equation X
2+ Y
2+ Z
2=R
2And polishing degree of depth h obtains on original sphere and P
2(X
2, Y
2, Z
1) vertical corresponding some P
3(X
2, Y
2, Z
2) Z coordinate Z
2The difference of obtaining at 2 is the one-tenth-value thickness 1/10 d=|Z of sub-surface damage layer
1-Z
2|.In this example, the broadband of inferior surperficial internal stress layer is also very little on the inclined-plane that the X ray internal stress measuring obtains, and ignores, and the thickness that then obtains sub-surface damage layer on the spherical optics element is d=|Z
2-Z
1|.Concrete measurement data: pole location is 0.08mm (Fig. 7), radius R=100mm, and polishing degree of depth h=0.1mm, r=3.1mm is by spherical equation X
2+ Y
2+ Z
2=10000 and polishing degree of depth h=0.1mm, d=0.0443mm.
Claims (4)
1. the measuring method of a thickness of subsurface damaged layer of bucky optical material is characterized in that, comprises the steps:
The first step, measured workpiece is installed on the magnetorheological polishing machine, adopt the technology of magnetorheological polishing, on the workpiece optical surface, process the slight ramp that an inclination angle is θ, tiltedly cut open sub-surface damage layer, crackle in the sub-surface damage layer, hole are presented on the inclined-plane, form surface crack, hole;
Second step, use the inclined-plane after the corrosive chemical processing, remove the polishing fluid residual impurity and cover the heavy lamination of meagre polishing of inferior surface crack, crackle is further exposed, amplifies;
The 3rd step, use initial boundary vicinity continuous feeding, the scanning from the inclined-plane of roughness contourgraph or white light interferometer along the inclined-plane, the roughness value at diverse location place on the continuous coverage inclined-plane, record numerical value is also write down the position coordinates X of initial boundary scan point on the inclined-plane
1
The 4th step by the roughness value data that record, obtained feed value on the inclined-plane and the change curve between the roughness value, obtained roughness value through data processing and tended to critical point stably or limit, write down the position coordinates X of this point
2
The 5th step is according to above-mentioned two point coordinate X
1And X
2, try to achieve the distance L between 2
1=X
2-X
1, i.e. the length L of the crackle layer on the inclined-plane
1,, obtain corresponding inferior surface crack layer depth d by inclination angle of inclined plane θ
1=L
1Sin θ;
The 6th step, use X ray stress analysis instrument on the inclined-plane, to record the internal stress zone, obtain the width L of internal stress layer
2, the width of sub-surface damage layer on the inclined-plane is L=L like this
1+ L
2,, obtain corresponding sub-surface damage layer depth d=Lsin θ again by inclination angle of inclined plane θ.
2. the measuring method of thickness of subsurface damaged layer of bucky optical material as claimed in claim 1, it is characterized in that, use roughness contourgraph or white light interferometer from the inclined-plane initial boundary vicinity along the continuous feeding in inclined-plane, the scanning process, simultaneously the slight ramp that processes is carried out the check of inclination angle [theta], described inferior surface crack layer depth of the 5th, the 6th step, sub-surface damage layer depth are proofreaied and correct according to the gained error.
3. the measuring method of a thickness of subsurface damaged layer of bucky optical material is characterized in that, comprises the steps:
The first step is installed on measured workpiece on the magnetorheological polishing machine, adopts the technology of magnetorheological polishing, dissects out a circular flat in arbitrary position of sphere, and the crackle in the sub-surface damage layer, hole are presented on the circular flat, forms surface crack, hole;
Second step, use the circular flat after the corrosive chemical processing, remove the polishing fluid residual impurity and cover the heavy lamination of meagre polishing of inferior surface crack, crackle is further exposed, amplifies;
The 3rd step, optional 1 P on the circumference of circular flat
1(X
1, Y
1, Z
1), use white light interferometer from selected analyzing spot P
1Scan to the center from the sample circumference along horizontal radius, record the roughness value data of diverse location on this radius, and record;
The 4th step by the roughness value data of the diverse location that records, obtained feed value on the horizontal radius and the change curve between the roughness value, obtained the roughness change curve through data processing and tended to critical point stably or limit, write down the position coordinates P of this point
2(X
2, Y
2);
In the 5th step, obtain on original sphere and P according to spherical equation and polishing degree of depth h
2Vertical corresponding some P
3Z coordinate Z
2The difference of obtaining at 2 is the one-tenth-value thickness 1/10 d=|Z of sub-surface damage layer
1-Z
2|.
4. as the measuring method of claim 1 or 3 described thickness of subsurface damaged layer of bucky optical material, it is characterized in that, the roughness change curve that the 4th pacing is got, described data processing comprises: to the optical glass sample, be to realize by the analyzing spot position coordinates that the S batten obtains roughness change curve trend stationary point correspondence; To the optical ceramics sample, be that the analyzing spot position coordinates of the limit correspondence by writing down the roughness change curve is realized.
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| CN112289700A (en) * | 2020-12-08 | 2021-01-29 | 西安奕斯伟硅片技术有限公司 | Silicon wafer detection method |
| CN112834304B (en) * | 2021-01-20 | 2024-01-23 | 中国工程物理研究院机械制造工艺研究所 | Subsurface damage detection method based on metallographic mosaic |
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| CN115116881A (en) * | 2022-08-25 | 2022-09-27 | 西安奕斯伟材料科技有限公司 | Method and system for measuring depth of damaged layer on surface of wafer |
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