CN101507011A - 封装的等离子敏感性器件的制造方法 - Google Patents
封装的等离子敏感性器件的制造方法 Download PDFInfo
- Publication number
- CN101507011A CN101507011A CNA2007800185843A CN200780018584A CN101507011A CN 101507011 A CN101507011 A CN 101507011A CN A2007800185843 A CNA2007800185843 A CN A2007800185843A CN 200780018584 A CN200780018584 A CN 200780018584A CN 101507011 A CN101507011 A CN 101507011A
- Authority
- CN
- China
- Prior art keywords
- plasma
- protective layer
- sensitive device
- encapsulated
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
- H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/439,474 | 2006-05-23 | ||
US11/439,474 US7510913B2 (en) | 2003-04-11 | 2006-05-23 | Method of making an encapsulated plasma sensitive device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101507011A true CN101507011A (zh) | 2009-08-12 |
Family
ID=38544377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2007800185843A Pending CN101507011A (zh) | 2006-05-23 | 2007-04-24 | 封装的等离子敏感性器件的制造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7510913B2 (zh) |
EP (1) | EP2027617A1 (zh) |
JP (1) | JP2009538504A (zh) |
KR (1) | KR101352148B1 (zh) |
CN (1) | CN101507011A (zh) |
TW (1) | TWI360247B (zh) |
WO (1) | WO2007139643A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103140952A (zh) * | 2010-09-21 | 2013-06-05 | 环球展览公司 | 用于装置和衬底封装的渗透障壁 |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6866901B2 (en) | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US20100330748A1 (en) | 1999-10-25 | 2010-12-30 | Xi Chu | Method of encapsulating an environmentally sensitive device |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US8808457B2 (en) | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US7648925B2 (en) * | 2003-04-11 | 2010-01-19 | Vitex Systems, Inc. | Multilayer barrier stacks and methods of making multilayer barrier stacks |
US7767498B2 (en) | 2005-08-25 | 2010-08-03 | Vitex Systems, Inc. | Encapsulated devices and method of making |
US20070253449A1 (en) * | 2005-12-22 | 2007-11-01 | Arnab Das | Methods and apparatus related to determining, communicating, and/or using delay information |
JP2009193774A (ja) * | 2008-02-13 | 2009-08-27 | Choshu Industry Co Ltd | 有機el素子及びその製造方法 |
JP5303199B2 (ja) * | 2008-06-13 | 2013-10-02 | ローム株式会社 | 有機el素子及び有機el素子の製造方法 |
WO2010065955A1 (en) * | 2008-12-05 | 2010-06-10 | Solopower, Inc. | Method and apparatus for forming contact layers for continuous workpieces |
US9337446B2 (en) | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
US9184410B2 (en) | 2008-12-22 | 2015-11-10 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US10049859B2 (en) | 2009-07-08 | 2018-08-14 | Aixtron Se | Plasma generating units for processing a substrate |
US20110008525A1 (en) * | 2009-07-10 | 2011-01-13 | General Electric Company | Condensation and curing of materials within a coating system |
US8590338B2 (en) | 2009-12-31 | 2013-11-26 | Samsung Mobile Display Co., Ltd. | Evaporator with internal restriction |
KR101239575B1 (ko) * | 2010-08-16 | 2013-03-05 | 고려대학교 산학협력단 | 기체 차단막 형성 장치 및 그 방법 |
US8765232B2 (en) | 2011-01-10 | 2014-07-01 | Plasmasi, Inc. | Apparatus and method for dielectric deposition |
JP2012186158A (ja) * | 2011-02-14 | 2012-09-27 | Semiconductor Energy Lab Co Ltd | 照明装置及び発光装置の作製方法及び製造装置 |
KR101900363B1 (ko) | 2012-01-16 | 2018-09-20 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조방법 |
KR101900362B1 (ko) | 2012-01-16 | 2018-11-09 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조방법 |
KR20130089039A (ko) | 2012-02-01 | 2013-08-09 | 삼성디스플레이 주식회사 | 증착 소스, 증착 장치 및 유기 발광 표시 장치 제조 방법 |
KR101931177B1 (ko) * | 2012-03-02 | 2018-12-21 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
US9299956B2 (en) | 2012-06-13 | 2016-03-29 | Aixtron, Inc. | Method for deposition of high-performance coatings and encapsulated electronic devices |
US10526708B2 (en) | 2012-06-19 | 2020-01-07 | Aixtron Se | Methods for forming thin protective and optical layers on substrates |
KR101937258B1 (ko) | 2012-09-04 | 2019-01-11 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
KR20140033724A (ko) * | 2012-09-10 | 2014-03-19 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그의 제조 방법 |
KR101473311B1 (ko) | 2012-12-20 | 2014-12-16 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
KR101990555B1 (ko) | 2012-12-24 | 2019-06-19 | 삼성디스플레이 주식회사 | 박막봉지 제조장치 및 박막봉지 제조방법 |
KR102120896B1 (ko) * | 2013-07-25 | 2020-06-10 | 삼성디스플레이 주식회사 | 대향 타겟 스퍼터링 장치를 이용한 유기발광표시장치 및 그 제조방법 |
KR101673016B1 (ko) | 2013-08-27 | 2016-11-07 | 삼성디스플레이 주식회사 | 박막봉지 제조장치 및 이를 이용한 표시 장치의 제조방법 |
KR102107109B1 (ko) | 2013-10-17 | 2020-05-29 | 삼성디스플레이 주식회사 | 유기 발광 장치 및 이의 제조 방법 |
CN103956373A (zh) * | 2013-12-18 | 2014-07-30 | 上海天马有机发光显示技术有限公司 | 一种疏水有机薄膜封装的有机发光显示装置及其制造方法 |
TW201539736A (zh) | 2014-03-19 | 2015-10-16 | 3M Innovative Properties Co | 用於藉白光成色之 oled 裝置的奈米結構 |
TWI574441B (zh) * | 2014-04-15 | 2017-03-11 | 聖約翰科技大學 | 可撓性發光二極體之連續加工裝置 |
CN106795386A (zh) | 2014-07-25 | 2017-05-31 | 科迪华公司 | 有机薄膜油墨组合物和方法 |
US9594287B2 (en) * | 2014-08-24 | 2017-03-14 | Royole Corporation | Substrate-less flexible display and method of manufacturing the same |
KR102314466B1 (ko) | 2014-10-06 | 2021-10-20 | 삼성디스플레이 주식회사 | 표시 장치의 제조 장치 및 표시 장치의 제조 방법 |
KR102393372B1 (ko) | 2014-11-11 | 2022-05-03 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
KR101943688B1 (ko) | 2015-06-19 | 2019-01-30 | 삼성에스디아이 주식회사 | 유기발광표시장치 |
KR101943689B1 (ko) * | 2015-06-19 | 2019-01-30 | 삼성에스디아이 주식회사 | 유기발광표시장치 |
WO2017039857A1 (en) | 2015-08-31 | 2017-03-09 | Kateeva, Inc. | Di- and mono(meth)acrylate based organic thin film ink compositions |
KR102474203B1 (ko) | 2015-12-22 | 2022-12-06 | 삼성디스플레이 주식회사 | 디스플레이 장치 제조방법 및 이에 따라 제조된 디스플레이 장치 |
JP7144864B2 (ja) | 2017-04-21 | 2022-09-30 | カティーバ, インコーポレイテッド | 有機薄膜を形成するための組成物および技術 |
US11085111B2 (en) | 2018-10-11 | 2021-08-10 | The Boeing Company | Laminate composite structural components and methods for the same |
US10923680B2 (en) | 2018-10-11 | 2021-02-16 | The Boeing Company | Multifunctional composite panels and methods for the same |
Family Cites Families (165)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2382432A (en) | 1940-08-02 | 1945-08-14 | Crown Cork & Seal Co | Method and apparatus for depositing vaporized metal coatings |
US2384500A (en) | 1942-07-08 | 1945-09-11 | Crown Cork & Seal Co | Apparatus and method of coating |
US3475307A (en) | 1965-02-04 | 1969-10-28 | Continental Can Co | Condensation of monomer vapors to increase polymerization rates in a glow discharge |
US3607365A (en) | 1969-05-12 | 1971-09-21 | Minnesota Mining & Mfg | Vapor phase method of coating substrates with polymeric coating |
US3941630A (en) | 1974-04-29 | 1976-03-02 | Rca Corporation | Method of fabricating a charged couple radiation sensing device |
US4055530A (en) | 1975-02-27 | 1977-10-25 | Standard Oil Company (Indiana) | Aqueous dispersion of addition polymer of an alpha-beta-ethylenically unsaturated monomer and suspended polypropylene particles |
US4098965A (en) | 1977-01-24 | 1978-07-04 | Polaroid Corporation | Flat batteries and method of making the same |
US4266223A (en) | 1978-12-08 | 1981-05-05 | W. H. Brady Co. | Thin panel display |
JPS55129345A (en) | 1979-03-29 | 1980-10-07 | Ulvac Corp | Electron beam plate making method by vapor phase film formation and vapor phase development |
US4313254A (en) | 1979-10-30 | 1982-02-02 | The Johns Hopkins University | Thin-film silicon solar cell with metal boride bottom electrode |
US4581337A (en) | 1983-07-07 | 1986-04-08 | E. I. Du Pont De Nemours And Company | Polyether polyamines as linking agents for particle reagents useful in immunoassays |
US4426275A (en) | 1981-11-27 | 1984-01-17 | Deposition Technology, Inc. | Sputtering device adaptable for coating heat-sensitive substrates |
JPS58156848A (ja) | 1982-03-15 | 1983-09-17 | Fuji Photo Film Co Ltd | イオン選択電極及びその製造法 |
JPS59138440A (ja) | 1983-01-27 | 1984-08-08 | 豊田合成株式会社 | セラミツクス被膜層を有する樹脂成形体 |
US4521458A (en) | 1983-04-01 | 1985-06-04 | Nelson Richard C | Process for coating material with water resistant composition |
DE3324106A1 (de) * | 1983-07-05 | 1985-01-17 | Draiswerke Gmbh, 6800 Mannheim | Verfahren zum beleimen von holz-spaenen und dergl. mit fluessigleim und vorrichtung zur durchfuehrung des verfahrens |
DE3331707A1 (de) | 1983-09-02 | 1985-03-21 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum reaktiven aufstaeuben von verbindungen von metallen und halbleitern |
US4710426A (en) | 1983-11-28 | 1987-12-01 | Polaroid Corporation, Patent Dept. | Solar radiation-control articles with protective overlayer |
US4557978A (en) | 1983-12-12 | 1985-12-10 | Primary Energy Research Corporation | Electroactive polymeric thin films |
US5032461A (en) | 1983-12-19 | 1991-07-16 | Spectrum Control, Inc. | Method of making a multi-layered article |
US4842893A (en) | 1983-12-19 | 1989-06-27 | Spectrum Control, Inc. | High speed process for coating substrates |
EP0155823B1 (en) | 1984-03-21 | 1989-07-26 | Nihon Shinku Gijutsu Kabushiki Kaisha | Improvements in or relating to the covering of substrates with synthetic resin films |
DE3427057A1 (de) | 1984-07-23 | 1986-01-23 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Anlage zum herstellen von halbleiter-schichtstrukturen durch epitaktisches wachstum |
US4722515A (en) | 1984-11-06 | 1988-02-02 | Spectrum Control, Inc. | Atomizing device for vaporization |
US4695618A (en) | 1986-05-23 | 1987-09-22 | Ameron, Inc. | Solventless polyurethane spray compositions and method for applying them |
US4954371A (en) | 1986-06-23 | 1990-09-04 | Spectrum Control, Inc. | Flash evaporation of monomer fluids |
DE3707214A1 (de) | 1987-03-06 | 1988-09-15 | Hoechst Ag | Beschichtete kunststoffolie und daraus hergestelltes kunststofflaminat |
US4768666A (en) | 1987-05-26 | 1988-09-06 | Milton Kessler | Tamper proof container closure |
US4843036A (en) | 1987-06-29 | 1989-06-27 | Eastman Kodak Company | Method for encapsulating electronic devices |
JPH0193129A (ja) | 1987-10-02 | 1989-04-12 | Mitsubishi Electric Corp | 化学気相成長装置 |
US4931158A (en) | 1988-03-22 | 1990-06-05 | The Regents Of The Univ. Of Calif. | Deposition of films onto large area substrates using modified reactive magnetron sputtering |
US4977013A (en) | 1988-06-03 | 1990-12-11 | Andus Corporation | Tranparent conductive coatings |
JP2742057B2 (ja) | 1988-07-14 | 1998-04-22 | シャープ株式会社 | 薄膜elパネル |
US4889609A (en) | 1988-09-06 | 1989-12-26 | Ovonic Imaging Systems, Inc. | Continuous dry etching system |
US5189405A (en) | 1989-01-26 | 1993-02-23 | Sharp Kabushiki Kaisha | Thin film electroluminescent panel |
US5792550A (en) | 1989-10-24 | 1998-08-11 | Flex Products, Inc. | Barrier film having high colorless transparency and method |
US5047131A (en) | 1989-11-08 | 1991-09-10 | The Boc Group, Inc. | Method for coating substrates with silicon based compounds |
US5036249A (en) | 1989-12-11 | 1991-07-30 | Molex Incorporated | Electroluminescent lamp panel and method of fabricating same |
CA2038117A1 (en) | 1990-03-29 | 1991-09-30 | Mahfuza B. Ali | Controllable radiation curable photoiniferter prepared adhesives for attachment of microelectronic devices and a method of attaching microelectronic devices therewith |
US5204314A (en) | 1990-07-06 | 1993-04-20 | Advanced Technology Materials, Inc. | Method for delivering an involatile reagent in vapor form to a CVD reactor |
US5362328A (en) | 1990-07-06 | 1994-11-08 | Advanced Technology Materials, Inc. | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem |
US5711816A (en) | 1990-07-06 | 1998-01-27 | Advanced Technolgy Materials, Inc. | Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same |
US5059861A (en) | 1990-07-26 | 1991-10-22 | Eastman Kodak Company | Organic electroluminescent device with stabilizing cathode capping layer |
FR2666190B1 (fr) | 1990-08-24 | 1996-07-12 | Thomson Csf | Procede et dispositif d'encapsulation hermetique de composants electroniques. |
JP2755844B2 (ja) | 1991-09-30 | 1998-05-25 | シャープ株式会社 | プラスチック基板液晶表示素子 |
US5336324A (en) | 1991-12-04 | 1994-08-09 | Emcore Corporation | Apparatus for depositing a coating on a substrate |
US5203898A (en) | 1991-12-16 | 1993-04-20 | Corning Incorporated | Method of making fluorine/boron doped silica tubes |
US5759329A (en) | 1992-01-06 | 1998-06-02 | Pilot Industries, Inc. | Fluoropolymer composite tube and method of preparation |
US5393607A (en) | 1992-01-13 | 1995-02-28 | Mitsui Toatsu Chemiclas, Inc. | Laminated transparent plastic material and polymerizable monomer |
US5402314A (en) | 1992-02-10 | 1995-03-28 | Sony Corporation | Printed circuit board having through-hole stopped with photo-curable solder resist |
JP3203623B2 (ja) | 1992-03-06 | 2001-08-27 | ソニー株式会社 | 有機電解液電池 |
JP2958186B2 (ja) | 1992-04-20 | 1999-10-06 | シャープ株式会社 | プラスチック基板液晶表示素子 |
US5427638A (en) | 1992-06-04 | 1995-06-27 | Alliedsignal Inc. | Low temperature reaction bonding |
US5652192A (en) | 1992-07-10 | 1997-07-29 | Battelle Memorial Institute | Catalyst material and method of making |
GB9215928D0 (en) | 1992-07-27 | 1992-09-09 | Cambridge Display Tech Ltd | Manufacture of electroluminescent devices |
US5260095A (en) | 1992-08-21 | 1993-11-09 | Battelle Memorial Institute | Vacuum deposition and curing of liquid monomers |
JPH06182935A (ja) | 1992-12-18 | 1994-07-05 | Bridgestone Corp | ガスバリア性ゴム積層物及びその製造方法 |
EP0608620B1 (en) | 1993-01-28 | 1996-08-14 | Applied Materials, Inc. | Vacuum Processing apparatus having improved throughput |
JP3090688B2 (ja) | 1993-05-17 | 2000-09-25 | 共栄制御機器株式会社 | 動的荷重測定方法及び動的荷重測定装置 |
JP3170105B2 (ja) | 1993-07-01 | 2001-05-28 | キヤノン株式会社 | 太陽電池モジュール |
US5357063A (en) | 1993-07-12 | 1994-10-18 | Battelle Memorial Institute | Method and apparatus for acoustic energy identification of objects buried in soil |
US5510173A (en) | 1993-08-20 | 1996-04-23 | Southwall Technologies Inc. | Multiple layer thin films with improved corrosion resistance |
US5440446A (en) | 1993-10-04 | 1995-08-08 | Catalina Coatings, Inc. | Acrylate coating material |
BR9407741A (pt) * | 1993-10-04 | 1997-02-12 | Catalina Coatings Inc | Revestimento de acrilato |
JP2846571B2 (ja) | 1994-02-25 | 1999-01-13 | 出光興産株式会社 | 有機エレクトロルミネッセンス素子 |
US5451449A (en) | 1994-05-11 | 1995-09-19 | The Mearl Corporation | Colored iridescent film |
US5795399A (en) | 1994-06-30 | 1998-08-18 | Kabushiki Kaisha Toshiba | Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product |
US5654084A (en) | 1994-07-22 | 1997-08-05 | Martin Marietta Energy Systems, Inc. | Protective coatings for sensitive materials |
US5464667A (en) | 1994-08-16 | 1995-11-07 | Minnesota Mining And Manufacturing Company | Jet plasma process and apparatus |
TW295677B (zh) | 1994-08-19 | 1997-01-11 | Tokyo Electron Co Ltd | |
JP3274292B2 (ja) | 1994-09-30 | 2002-04-15 | 富士写真フイルム株式会社 | カセット用収納ケース |
DE4438359C2 (de) | 1994-10-27 | 2001-10-04 | Schott Glas | Behälter aus Kunststoff mit einer Sperrbeschichtung |
US6083628A (en) * | 1994-11-04 | 2000-07-04 | Sigma Laboratories Of Arizona, Inc. | Hybrid polymer film |
US5607789A (en) | 1995-01-23 | 1997-03-04 | Duracell Inc. | Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same |
JP3364081B2 (ja) | 1995-02-16 | 2003-01-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US5620524A (en) | 1995-02-27 | 1997-04-15 | Fan; Chiko | Apparatus for fluid delivery in chemical vapor deposition systems |
US5811183A (en) | 1995-04-06 | 1998-09-22 | Shaw; David G. | Acrylate polymer release coated sheet materials and method of production thereof |
GB9507817D0 (en) | 1995-04-18 | 1995-05-31 | Philips Electronics Uk Ltd | Touch sensing devices and methods of making such |
US5771562A (en) | 1995-05-02 | 1998-06-30 | Motorola, Inc. | Passivation of organic devices |
US5554220A (en) | 1995-05-19 | 1996-09-10 | The Trustees Of Princeton University | Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
US5629389A (en) | 1995-06-06 | 1997-05-13 | Hewlett-Packard Company | Polymer-based electroluminescent device with improved stability |
US5681615A (en) | 1995-07-27 | 1997-10-28 | Battelle Memorial Institute | Vacuum flash evaporated polymer composites |
US5811177A (en) | 1995-11-30 | 1998-09-22 | Motorola, Inc. | Passivation of electroluminescent organic devices |
US5686360A (en) | 1995-11-30 | 1997-11-11 | Motorola | Passivation of organic devices |
US5684084A (en) | 1995-12-21 | 1997-11-04 | E. I. Du Pont De Nemours And Company | Coating containing acrylosilane polymer to improve mar and acid etch resistance |
US6195142B1 (en) * | 1995-12-28 | 2001-02-27 | Matsushita Electrical Industrial Company, Ltd. | Organic electroluminescence element, its manufacturing method, and display device using organic electroluminescence element |
US5660961A (en) | 1996-01-11 | 1997-08-26 | Xerox Corporation | Electrophotographic imaging member having enhanced layer adhesion and freedom from reflection interference |
US5683771A (en) | 1996-01-30 | 1997-11-04 | Becton, Dickinson And Company | Blood collection tube assembly |
US5738920A (en) * | 1996-01-30 | 1998-04-14 | Becton, Dickinson And Company | Blood collection tube assembly |
US5731661A (en) | 1996-07-15 | 1998-03-24 | Motorola, Inc. | Passivation of electroluminescent organic devices |
US5902688A (en) | 1996-07-16 | 1999-05-11 | Hewlett-Packard Company | Electroluminescent display device |
US5693956A (en) | 1996-07-29 | 1997-12-02 | Motorola | Inverted oleds on hard plastic substrate |
US5844363A (en) | 1997-01-23 | 1998-12-01 | The Trustees Of Princeton Univ. | Vacuum deposited, non-polymeric flexible organic light emitting devices |
US5895228A (en) | 1996-11-14 | 1999-04-20 | International Business Machines Corporation | Encapsulation of organic light emitting devices using Siloxane or Siloxane derivatives |
US5821692A (en) | 1996-11-26 | 1998-10-13 | Motorola, Inc. | Organic electroluminescent device hermetic encapsulation package |
US5912069A (en) | 1996-12-19 | 1999-06-15 | Sigma Laboratories Of Arizona | Metal nanolaminate composite |
US5872355A (en) | 1997-04-09 | 1999-02-16 | Hewlett-Packard Company | Electroluminescent device and fabrication method for a light detection system |
US6117266A (en) * | 1997-12-19 | 2000-09-12 | Interuniversifair Micro-Elektronica Cenirum (Imec Vzw) | Furnace for continuous, high throughput diffusion processes from various diffusion sources |
US6198220B1 (en) * | 1997-07-11 | 2001-03-06 | Emagin Corporation | Sealing structure for organic light emitting devices |
EP2098906A1 (en) * | 1997-08-29 | 2009-09-09 | Sharp Kabushiki Kaisha | Liquid crystal display device |
US6203898B1 (en) * | 1997-08-29 | 2001-03-20 | 3M Innovatave Properties Company | Article comprising a substrate having a silicone coating |
US6224948B1 (en) * | 1997-09-29 | 2001-05-01 | Battelle Memorial Institute | Plasma enhanced chemical deposition with low vapor pressure compounds |
US5902641A (en) | 1997-09-29 | 1999-05-11 | Battelle Memorial Institute | Flash evaporation of liquid monomer particle mixture |
US6045864A (en) * | 1997-12-01 | 2000-04-04 | 3M Innovative Properties Company | Vapor coating method |
US6569515B2 (en) * | 1998-01-13 | 2003-05-27 | 3M Innovative Properties Company | Multilayered polymer films with recyclable or recycled layers |
US6178082B1 (en) * | 1998-02-26 | 2001-01-23 | International Business Machines Corporation | High temperature, conductive thin film diffusion barrier for ceramic/metal systems |
US6066826A (en) * | 1998-03-16 | 2000-05-23 | Yializis; Angelo | Apparatus for plasma treatment of moving webs |
US5904958A (en) | 1998-03-20 | 1999-05-18 | Rexam Industries Corp. | Adjustable nozzle for evaporation or organic monomers |
US6361885B1 (en) * | 1998-04-10 | 2002-03-26 | Organic Display Technology | Organic electroluminescent materials and device made from such materials |
US6352777B1 (en) * | 1998-08-19 | 2002-03-05 | The Trustees Of Princeton University | Organic photosensitive optoelectronic devices with transparent electrodes |
US6040017A (en) * | 1998-10-02 | 2000-03-21 | Sigma Laboratories, Inc. | Formation of multilayered photonic polymer composites |
CA2353506A1 (en) * | 1998-11-02 | 2000-05-11 | 3M Innovative Properties Company | Transparent conductive oxides for plastic flat panel displays |
US6837950B1 (en) * | 1998-11-05 | 2005-01-04 | Interface, Inc. | Separation of floor covering components for recycling |
US6207238B1 (en) * | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition for high and/or low index of refraction polymers |
EP1145338B1 (en) * | 1998-12-16 | 2012-12-05 | Samsung Display Co., Ltd. | Environmental barrier material for organic light emitting device and method of making |
US6228434B1 (en) * | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making a conformal coating of a microtextured surface |
US6228436B1 (en) * | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making light emitting polymer composite material |
US6217947B1 (en) * | 1998-12-16 | 2001-04-17 | Battelle Memorial Institute | Plasma enhanced polymer deposition onto fixtures |
US6207239B1 (en) * | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition of conjugated polymer |
US6268695B1 (en) * | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
JP3817081B2 (ja) * | 1999-01-29 | 2006-08-30 | パイオニア株式会社 | 有機el素子の製造方法 |
US6172810B1 (en) * | 1999-02-26 | 2001-01-09 | 3M Innovative Properties Company | Retroreflective articles having polymer multilayer reflective coatings |
US6358570B1 (en) * | 1999-03-31 | 2002-03-19 | Battelle Memorial Institute | Vacuum deposition and curing of oligomers and resins |
US6660409B1 (en) * | 1999-09-16 | 2003-12-09 | Panasonic Communications Co., Ltd | Electronic device and process for producing the same |
US6866901B2 (en) * | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US7198832B2 (en) * | 1999-10-25 | 2007-04-03 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US6460369B2 (en) | 1999-11-03 | 2002-10-08 | Applied Materials, Inc. | Consecutive deposition system |
US6867539B1 (en) * | 2000-07-12 | 2005-03-15 | 3M Innovative Properties Company | Encapsulated organic electronic devices and method for making same |
US6537688B2 (en) * | 2000-12-01 | 2003-03-25 | Universal Display Corporation | Adhesive sealed organic optoelectronic structures |
JP4101522B2 (ja) | 2001-02-01 | 2008-06-18 | 株式会社半導体エネルギー研究所 | 成膜装置及び成膜方法 |
TWI222838B (en) * | 2001-04-10 | 2004-10-21 | Chi Mei Optoelectronics Corp | Packaging method of organic electroluminescence light-emitting display device |
US6397776B1 (en) * | 2001-06-11 | 2002-06-04 | General Electric Company | Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators |
US6888307B2 (en) * | 2001-08-21 | 2005-05-03 | Universal Display Corporation | Patterned oxygen and moisture absorber for organic optoelectronic device structures |
JP2003077651A (ja) * | 2001-08-30 | 2003-03-14 | Sharp Corp | 有機エレクトロルミネッセンス素子の製造方法 |
TW519853B (en) * | 2001-10-17 | 2003-02-01 | Chi Mei Electronic Corp | Organic electro-luminescent display and its packaging method |
US6888305B2 (en) * | 2001-11-06 | 2005-05-03 | Universal Display Corporation | Encapsulation structure that acts as a multilayer mirror |
US6597111B2 (en) * | 2001-11-27 | 2003-07-22 | Universal Display Corporation | Protected organic optoelectronic devices |
US6681716B2 (en) * | 2001-11-27 | 2004-01-27 | General Electric Company | Apparatus and method for depositing large area coatings on non-planar surfaces |
US6948448B2 (en) * | 2001-11-27 | 2005-09-27 | General Electric Company | Apparatus and method for depositing large area coatings on planar surfaces |
US6765351B2 (en) * | 2001-12-20 | 2004-07-20 | The Trustees Of Princeton University | Organic optoelectronic device structures |
US7012363B2 (en) * | 2002-01-10 | 2006-03-14 | Universal Display Corporation | OLEDs having increased external electroluminescence quantum efficiencies |
JP2003234179A (ja) * | 2002-02-07 | 2003-08-22 | Matsushita Electric Ind Co Ltd | Oledディスプレイ |
JP2003258189A (ja) * | 2002-03-01 | 2003-09-12 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2003292394A (ja) * | 2002-03-29 | 2003-10-15 | Canon Inc | 液相成長方法および液相成長装置 |
US8808457B2 (en) * | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US8900366B2 (en) * | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
DE10318187B4 (de) * | 2002-05-02 | 2010-03-18 | Osram Opto Semiconductors Gmbh | Verkapselungsverfahren für organische Leuchtdiodenbauelemente |
NL1020634C2 (nl) * | 2002-05-21 | 2003-11-24 | Otb Group Bv | Werkwijze voor het passiveren van een halfgeleider substraat. |
JP2004022398A (ja) * | 2002-06-18 | 2004-01-22 | Ulvac Japan Ltd | 有機エレクトロルミネッセンスの製造方法 |
US6734625B2 (en) * | 2002-07-30 | 2004-05-11 | Xerox Corporation | Organic light emitting device (OLED) with multiple capping layers passivation region on an electrode |
US7015640B2 (en) * | 2002-09-11 | 2006-03-21 | General Electric Company | Diffusion barrier coatings having graded compositions and devices incorporating the same |
US7056584B2 (en) * | 2002-10-11 | 2006-06-06 | General Electric Company | Bond layer for coatings on plastic substrates |
US6975067B2 (en) * | 2002-12-19 | 2005-12-13 | 3M Innovative Properties Company | Organic electroluminescent device and encapsulation method |
JP4138672B2 (ja) * | 2003-03-27 | 2008-08-27 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
US7018713B2 (en) * | 2003-04-02 | 2006-03-28 | 3M Innovative Properties Company | Flexible high-temperature ultrabarrier |
US7029765B2 (en) * | 2003-04-22 | 2006-04-18 | Universal Display Corporation | Organic light emitting devices having reduced pixel shrinkage |
US7820255B2 (en) * | 2003-05-29 | 2010-10-26 | Konica Minolta Holdings, Inc. | Transparent film for display substrate, display substrate using the film and method of manufacturing the same, liquid crystal display, organic electroluminescence display, and touch panel |
US6998648B2 (en) * | 2003-08-25 | 2006-02-14 | Universal Display Corporation | Protected organic electronic device structures incorporating pressure sensitive adhesive and desiccant |
US7282244B2 (en) * | 2003-09-05 | 2007-10-16 | General Electric Company | Replaceable plate expanded thermal plasma apparatus and method |
US7052355B2 (en) * | 2003-10-30 | 2006-05-30 | General Electric Company | Organic electro-optic device and method for making the same |
JP2005174701A (ja) * | 2003-12-10 | 2005-06-30 | Toyota Industries Corp | 電界発光デバイス |
JP2005251671A (ja) * | 2004-03-08 | 2005-09-15 | Fuji Photo Film Co Ltd | 表示装置 |
US7033850B2 (en) * | 2004-06-30 | 2006-04-25 | Eastman Kodak Company | Roll-to-sheet manufacture of OLED materials |
US20060063015A1 (en) * | 2004-09-23 | 2006-03-23 | 3M Innovative Properties Company | Protected polymeric film |
US7342356B2 (en) * | 2004-09-23 | 2008-03-11 | 3M Innovative Properties Company | Organic electroluminescent device having protective structure with boron oxide layer and inorganic barrier layer |
-
2006
- 2006-05-23 US US11/439,474 patent/US7510913B2/en not_active Expired - Lifetime
-
2007
- 2007-03-16 TW TW096109148A patent/TWI360247B/zh active
- 2007-04-24 CN CNA2007800185843A patent/CN101507011A/zh active Pending
- 2007-04-24 WO PCT/US2007/010068 patent/WO2007139643A1/en active Application Filing
- 2007-04-24 JP JP2009512014A patent/JP2009538504A/ja active Pending
- 2007-04-24 KR KR1020087031151A patent/KR101352148B1/ko active IP Right Grant
- 2007-04-24 EP EP07756036A patent/EP2027617A1/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103140952A (zh) * | 2010-09-21 | 2013-06-05 | 环球展览公司 | 用于装置和衬底封装的渗透障壁 |
CN103140952B (zh) * | 2010-09-21 | 2016-03-02 | 环球展览公司 | 用于装置和衬底封装的渗透障壁 |
Also Published As
Publication number | Publication date |
---|---|
WO2007139643A1 (en) | 2007-12-06 |
US7510913B2 (en) | 2009-03-31 |
EP2027617A1 (en) | 2009-02-25 |
JP2009538504A (ja) | 2009-11-05 |
KR20090028551A (ko) | 2009-03-18 |
KR101352148B1 (ko) | 2014-01-14 |
TWI360247B (en) | 2012-03-11 |
TW200744241A (en) | 2007-12-01 |
US20060216951A1 (en) | 2006-09-28 |
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