CN101427370A - 具有双栅极导体的改善的cmos二极管及其制造方法 - Google Patents
具有双栅极导体的改善的cmos二极管及其制造方法 Download PDFInfo
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- CN101427370A CN101427370A CNA2007800142068A CN200780014206A CN101427370A CN 101427370 A CN101427370 A CN 101427370A CN A2007800142068 A CNA2007800142068 A CN A2007800142068A CN 200780014206 A CN200780014206 A CN 200780014206A CN 101427370 A CN101427370 A CN 101427370A
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- 239000004020 conductor Substances 0.000 title claims abstract description 180
- 238000000034 method Methods 0.000 title claims description 30
- 230000009977 dual effect Effects 0.000 title abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000002955 isolation Methods 0.000 claims abstract description 44
- 239000004065 semiconductor Substances 0.000 claims description 98
- 239000002019 doping agent Substances 0.000 claims description 47
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 239000003989 dielectric material Substances 0.000 claims description 8
- 206010010144 Completed suicide Diseases 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 238000009825 accumulation Methods 0.000 abstract description 11
- 230000002596 correlated effect Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 15
- 230000008859 change Effects 0.000 description 11
- 230000006872 improvement Effects 0.000 description 9
- 238000002513 implantation Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052914 metal silicate Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- PICXIOQBANWBIZ-UHFFFAOYSA-N zinc;1-oxidopyridine-2-thione Chemical class [Zn+2].[O-]N1C=CC=CC1=S.[O-]N1C=CC=CC1=S PICXIOQBANWBIZ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7391—Gated diode structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66356—Gated diodes, e.g. field controlled diodes [FCD], static induction thyristors [SITh], field controlled thyristors [FCTh]
Abstract
Description
Claims (30)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/380,278 US7737500B2 (en) | 2006-04-26 | 2006-04-26 | CMOS diodes with dual gate conductors, and methods for forming the same |
US11/380,278 | 2006-04-26 | ||
PCT/US2007/067361 WO2007127770A2 (en) | 2006-04-26 | 2007-04-25 | Improved cmos diodes with dual gate conductors, and methods for forming the same |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101427370A true CN101427370A (zh) | 2009-05-06 |
CN101427370B CN101427370B (zh) | 2011-03-30 |
Family
ID=38647542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800142068A Expired - Fee Related CN101427370B (zh) | 2006-04-26 | 2007-04-25 | 具有双栅极导体的改善的cmos二极管及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7737500B2 (zh) |
EP (1) | EP2020029B1 (zh) |
CN (1) | CN101427370B (zh) |
TW (1) | TW200807727A (zh) |
WO (1) | WO2007127770A2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011066728A1 (zh) * | 2009-12-01 | 2011-06-09 | 中国科学院上海微系统与信息技术研究所 | 混合材料积累型全包围栅cmos场效应晶体管 |
CN102692942A (zh) * | 2011-03-18 | 2012-09-26 | 阿尔特拉公司 | 低压参考电路 |
CN104425612A (zh) * | 2013-09-05 | 2015-03-18 | 台湾积体电路制造股份有限公司 | 具有硅化物的半导体器件 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100757654B1 (ko) * | 2006-05-26 | 2007-09-10 | 매그나칩 반도체 유한회사 | 시모스 이미지 센서 및 그 제조 방법 |
US8110465B2 (en) | 2007-07-30 | 2012-02-07 | International Business Machines Corporation | Field effect transistor having an asymmetric gate electrode |
US7951678B2 (en) * | 2008-08-12 | 2011-05-31 | International Business Machines Corporation | Metal-gate high-k reference structure |
US8405123B2 (en) * | 2008-10-27 | 2013-03-26 | National Semiconductor Corporation | Split-gate ESD diodes with elevated voltage tolerance |
JP5582030B2 (ja) * | 2010-12-28 | 2014-09-03 | 富士通セミコンダクター株式会社 | Mosトランジスタおよびその製造方法 |
CN103688362B (zh) * | 2011-07-22 | 2017-03-29 | 国际商业机器公司 | 隧道场效应晶体管 |
GB2506831B (en) * | 2011-08-16 | 2015-09-02 | Fox Int Group Ltd | A method feeder |
TWI473146B (zh) * | 2012-09-18 | 2015-02-11 | Macronix Int Co Ltd | 閘極結構及其製造方法 |
JP5784652B2 (ja) * | 2013-02-14 | 2015-09-24 | 株式会社東芝 | 半導体装置 |
US8932920B2 (en) | 2013-05-29 | 2015-01-13 | International Business Machines Corporation | Self-aligned gate electrode diffusion barriers |
US9287406B2 (en) | 2013-06-06 | 2016-03-15 | Macronix International Co., Ltd. | Dual-mode transistor devices and methods for operating same |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5468669A (en) * | 1993-10-29 | 1995-11-21 | At&T Corp. | Integrated circuit fabrication |
US5382818A (en) * | 1993-12-08 | 1995-01-17 | Philips Electronics North America Corporation | Lateral semiconductor-on-insulator (SOI) semiconductor device having a buried diode |
US5759886A (en) * | 1995-09-28 | 1998-06-02 | National Semiconductor Corporation | Method for forming a layer of metal silicide over the gates of a surface-channel CMOS device |
US5683941A (en) * | 1996-07-02 | 1997-11-04 | National Semiconductor Corporation | Self-aligned polycide process that utilizes a planarized layer of material to expose polysilicon structures to a subsequently deposited metal layer that is reacted to form the metal silicide |
US6093623A (en) * | 1998-08-04 | 2000-07-25 | Micron Technology, Inc. | Methods for making silicon-on-insulator structures |
US6015993A (en) * | 1998-08-31 | 2000-01-18 | International Business Machines Corporation | Semiconductor diode with depleted polysilicon gate structure and method |
US6423613B1 (en) * | 1998-11-10 | 2002-07-23 | Micron Technology, Inc. | Low temperature silicon wafer bond process with bulk material bond strength |
US6255198B1 (en) * | 1998-11-24 | 2001-07-03 | North Carolina State University | Methods of fabricating gallium nitride microelectronic layers on silicon layers and gallium nitride microelectronic structures formed thereby |
US6759315B1 (en) * | 1999-01-04 | 2004-07-06 | International Business Machines Corporation | Method for selective trimming of gate structures and apparatus formed thereby |
US6429482B1 (en) * | 2000-06-08 | 2002-08-06 | International Business Machines Corporation | Halo-free non-rectifying contact on chip with halo source/drain diffusion |
US6559470B2 (en) * | 2000-06-22 | 2003-05-06 | Progressed Technologies, Inc. | Negative differential resistance field effect transistor (NDR-FET) and circuits using the same |
US6894324B2 (en) | 2001-02-15 | 2005-05-17 | United Microelectronics Corp. | Silicon-on-insulator diodes and ESD protection circuits |
US6852167B2 (en) * | 2001-03-01 | 2005-02-08 | Micron Technology, Inc. | Methods, systems, and apparatus for uniform chemical-vapor depositions |
US6894327B1 (en) * | 2001-12-21 | 2005-05-17 | Progressant Technologies, Inc. | Negative differential resistance pull up element |
US6864104B2 (en) * | 2002-06-28 | 2005-03-08 | Progressant Technologies, Inc. | Silicon on insulator (SOI) negative differential resistance (NDR) based memory device with reduced body effects |
US6912151B2 (en) * | 2002-06-28 | 2005-06-28 | Synopsys, Inc. | Negative differential resistance (NDR) based memory device with reduced body effects |
US6768156B1 (en) * | 2003-02-10 | 2004-07-27 | Micron Technology, Inc. | Non-volatile random access memory cells associated with thin film constructions |
US7555173B2 (en) * | 2003-04-09 | 2009-06-30 | Cornell Research Foundation, Inc. | Electro-optic modulator on rib waveguide |
US20050035410A1 (en) * | 2003-08-15 | 2005-02-17 | Yee-Chia Yeo | Semiconductor diode with reduced leakage |
US7166904B2 (en) * | 2004-02-03 | 2007-01-23 | International Business Machines Corporation | Structure and method for local resistor element in integrated circuit technology |
-
2006
- 2006-04-26 US US11/380,278 patent/US7737500B2/en not_active Expired - Fee Related
-
2007
- 2007-04-16 TW TW096113385A patent/TW200807727A/zh unknown
- 2007-04-25 WO PCT/US2007/067361 patent/WO2007127770A2/en active Application Filing
- 2007-04-25 EP EP07761243A patent/EP2020029B1/en not_active Not-in-force
- 2007-04-25 CN CN2007800142068A patent/CN101427370B/zh not_active Expired - Fee Related
-
2010
- 2010-06-14 US US12/814,930 patent/US8222702B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011066728A1 (zh) * | 2009-12-01 | 2011-06-09 | 中国科学院上海微系统与信息技术研究所 | 混合材料积累型全包围栅cmos场效应晶体管 |
CN102692942A (zh) * | 2011-03-18 | 2012-09-26 | 阿尔特拉公司 | 低压参考电路 |
CN102692942B (zh) * | 2011-03-18 | 2016-12-14 | 阿尔特拉公司 | 低压参考电路 |
CN104425612A (zh) * | 2013-09-05 | 2015-03-18 | 台湾积体电路制造股份有限公司 | 具有硅化物的半导体器件 |
CN104425612B (zh) * | 2013-09-05 | 2018-02-16 | 台湾积体电路制造股份有限公司 | 具有硅化物的半导体器件 |
Also Published As
Publication number | Publication date |
---|---|
WO2007127770A2 (en) | 2007-11-08 |
EP2020029B1 (en) | 2012-08-29 |
US7737500B2 (en) | 2010-06-15 |
EP2020029A4 (en) | 2009-09-09 |
CN101427370B (zh) | 2011-03-30 |
TW200807727A (en) | 2008-02-01 |
US20070252212A1 (en) | 2007-11-01 |
US20100252881A1 (en) | 2010-10-07 |
WO2007127770A3 (en) | 2008-11-13 |
US8222702B2 (en) | 2012-07-17 |
EP2020029A2 (en) | 2009-02-04 |
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20171102 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171102 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110330 Termination date: 20190425 |