CN101363747B - Quantitation device - Google Patents
Quantitation device Download PDFInfo
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- CN101363747B CN101363747B CN2007101401165A CN200710140116A CN101363747B CN 101363747 B CN101363747 B CN 101363747B CN 2007101401165 A CN2007101401165 A CN 2007101401165A CN 200710140116 A CN200710140116 A CN 200710140116A CN 101363747 B CN101363747 B CN 101363747B
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Abstract
The invention provides a measuring device used for outputting quantitative fluid to a receiving unit. The measuring device comprises a first volume unit and a detection unit. The first volume unit is provided with a first preset volume, a first input port, a first opening and a first output port. When the first output port is closed, the fluid is input through the first input port to the first volume unit. When the detection unit detects the fluid overflows from the first opening, the input of the fluid is stopped to the first volume unit. When the first output port is opened, a fluid with the first preset volume is output to the receiving unit.
Description
Technical field
The present invention relates to a kind of proportioning device, particularly a kind of output has the proportioning device of the liquid of preset volume.
Background technology
In the chemical industry processing procedure, often the chemical liquid of high concentration need be injected the chemical liquid mixing channel, in order to the chemical liquid of diluting high-concentration, have the chemical liquid of suitable concn with preparation.Generally speaking, the injection of liquid action is to carry out in the robotization mode, and it utilizes detecting device to detect, and injects the amount of liquid with decision.
The mode of existing quantitative liquid combined amount (or volume) roughly can be divided into two kinds.First kind of mode is for measuring the liquid volume that will inject mixing channel; Another kind of mode is for measuring the liquid weight that will inject mixing channel.Yet no matter be by the measurement of volume or the measurement of weight, its accuracy of measurement all will influence the solution concentration of injecting mixing channel.In these two kinds of modes, cubing is the liquid level that utilizes liquid in the detecting device detection receptacle, when the liquid level of liquid reaches a preset height, directly or indirectly control the action (open or close) of valve member by the signal of detecting device, so that liquid is injected mixing channel.And the weight measurement is to utilize platform scale or other weight measuring tool to measure the weight of liquid in containers, when detecting device records liquid weight and reaches a default value, detecting device sends signal and directly or indirectly controls the action of valve member (open or cut out), so that liquid is injected mixing channel.
Yet above-mentioned dual mode of the prior art still need be considered the problem of response delay between detecting device and the liquid control valve spare.For example, in first kind of cubing mode, when the liquid level detecting device when the liquid level that detects liquid reaches predetermined altitude, detecting device transmits a stop signal to the control valve member of importing liquid; And during the transmission stop signal produced the response delay of off-response to input liquid control valve basis signal, still continuing to provide liquid to container.Amount of liquid during this response delay outside the amount of imports will cause coarse dilute concentration.Similarly, in second kind of weight measurement mode, the outer amount of liquid of the timing period amount of imports that responds too, and cause the coarse problem of dilute concentration.
At defective of the prior art, the invention provides a kind of proportioning device, accurate quantitative liquid can more effectively be provided.
Summary of the invention
In the prior art, owing to can't accurately export quantitative liquid from container, thus cause the error of solution concentration easily, and then influence successive process.So an aspect of of the present present invention provides a kind of proportioning device, so that quantitative liquid accurately to be provided.
Another aspect of the present invention is to provide a kind of proportioning device, and it utilizes the liquid of detection overflow container, with the time of decision stop liquid input pod, and then the extra problem of importing liquid during the existing response delay of elimination.
In one embodiment, proportioning device provided by the invention is used to export quantitative liquid to a receiving element.Proportioning device comprises first volume unit and detecting unit.First volume unit has one first preset volume, and is formed with first input port, first opening and first delivery outlet.When first delivery outlet is closed, via first input port input liquid to the first volume unit.After detecting the liquid that overflows first opening when detecting unit, stop to import liquid to the first volume unit.And open first outlet, have the liquid of first preset volume to receiving element with output.
Another aspect of the present invention is to provide a kind of proportioning device, and it utilizes extra dosing container fine setting amount of liquid, uses elasticity to increase.
In another embodiment, proportioning device also comprises second volume unit.Second volume unit also comprises second opening and second input port.Second opening is connected opening or closing with first volume unit.Liquid inputs to second volume unit through second input port.When the lower edge of the liquid level of liquid in second volume unit and second opening alignd, second volume unit stored the liquid with second preset volume.Especially, second preset volume is less than first preset volume.
In another embodiment, proportioning device also comprises a catching device.Catching device couples mutually with first volume unit, for accepting the liquid that overflows from first opening.Detecting unit is the liquid that detects in the catching device.In an illustrative embodiments, catching device also comprises dividing plate, accepts part and second accepts part in order to catching device is separated into first.First accepts part accepts the liquid that overflows from first opening.Second accepts part accepts from first and accepts the liquid that overflows of part.
In an embodiment again, first accepts part also comprises default accept volume, the 3rd opening and second delivery outlet.Be spilled over to the second carrier timesharing at liquid from the 3rd opening, first accepts the part storage has the default liquid of accepting volume.After detecting the liquid that overflows at detecting unit, second delivery outlet is opened, and output first is accepted liquid in the part to receiving element.Especially, defaultly accept volume less than first preset volume.
In another embodiment, proportioning device also comprises micromatic setting, combines with first volume unit.First volume unit is constituted by flexual material, changes the shape of first volume unit by micromatic setting, in order to adjust first preset volume.
Description of drawings
Fig. 1 is the synoptic diagram of proportioning device in one embodiment of the invention;
Fig. 2 is the synoptic diagram of proportioning device in another embodiment of the present invention;
Fig. 3 is the synoptic diagram of proportioning device in further embodiment of this invention;
Fig. 4 is the synoptic diagram of proportioning device in yet another embodiment of the invention; And
Fig. 5 is a proportioning device synoptic diagram among the extra embodiment of the present invention.
Embodiment
It is following that the present invention will be described by preferred embodiment with reference to accompanying drawing so that purpose of the present invention, embodiment, feature, and advantage more clear.
With reference to Fig. 1, be the synoptic diagram of the proportioning device 10 of one embodiment of the invention.Proportioning device 10 can be used in the manufacture of semiconductor, in order to providing accurate quantification liquid in order to being deployed into suitable chemical liquid concentration, but is not limited to this.For instance, can utilize proportioning device 10 input one accurate quantification high concentration of hydrofluoric acid stoste (for example: 49%HF) to the receiving element 14 that is placed with quantitative pure water (for example: a chemical liquid mixing channel), then dilute nitration mixture, obtain the dilute hydrofluoric acid (DHF) of desired concn in the successive process in receiving element 14 middle and high concentration hydrofluorite stostes and pure water (DI).
With reference to Fig. 1, proportioning device 10 comprises first volume unit 11, detecting unit 12 and control module 13.As shown in the figure, first volume unit 11 can be a container that comprises first input port 112, first opening 113 and first delivery outlet 114.First volume unit 11 has one first preset volume (or volume), promptly when first volume unit 11 during for the hemi-closure space of single opening when closing (for example first input port 112 and first delivery outlet 114 for), first volume unit, 11 open ended maximum amount of liquid are first preset volume substantially.In other words, when the amount of liquid of input liquid to the first volume unit 11 when liquid is overflowed by first opening 113, be called liquid with first preset volume.The embodiment of the invention is by the manufacturing of control first volume unit 11, or utilization rectifies an instrument after making, and can accurately determine this first preset volume.
Detecting unit 12 is used to detect the liquid that overflows from first opening 113 (high concentration chemistry stoste (calling stoste in the following text) for example, and produce a signal and overflow first opening 113 to represent stoste.For example, detecting unit 12 can overflow weight, liquid level of stoste etc. by detection, thereby detects overflowing of stoste.Control module 13 overflows the signal of first opening 113 in order to receive the representative stoste that is produced from detecting unit 12, and by this signal controlling first input port 112 and first delivery outlet 114.Note that at this (for example: 49%HF) be example, present technique field those of ordinary skill should be known in the present invention applicable to quantitative any suitable liquid is provided, and is not limited to as the purposes of diluting though above embodiment is with high concentration chemistry stoste.
Before stoste was imported first volume unit 11, first delivery outlet 114 was closed.Then, stoste has in first volume unit 11 of first preset volume via 112 inputs of first input port.Along with stoste continues input via first input port 112, stoste is full of whole first volume unit 11 gradually, overflows up to first opening 113 of stoste via first volume unit 11, makes detecting unit 12 detect the stoste of overflowing from first opening 113.
Detecting unit 12 is sent one and is represented signal that stoste overflows to control module 13 after detecting the stoste of overflowing.Control module 13 transmits a stop signal to stop to import stoste according to the signal that detecting unit 12 is produced, and makes stoste no longer input in first volume unit 11, promptly stops stoste and is overflowed by first opening 113.For example, control module 13 is located at the control valve member of first input port 112 by control, to close first input port 112, makes stoste can't enter first volume unit 11 again.The replacement mode is that control module 13 can make the stoste source of supply no longer supply stoste, and make stoste can't enter first volume unit 11 again by the control valve member of control stoste source of supply outlet.In addition, detecting unit 12 and control module 13 between can utilize transmission line or wireless mode to transmit signal (not being shown among the figure).
In sum, as shown in Figure 1,, when first opening 113 overflows, in first volume unit 11, there is stoste with first preset vol when stoste from the input of first input port 112.Then, open first delivery outlet 114, the stoste that first volume unit 11 is had inputs to receiving element 14, utilizes this receiving element 14 can accurately obtain the stoste of first preset volume from first volume unit 11.That is, the extra stoste of importing during detecting unit 12 and control module 13 response delays will be overflowed via first opening 113, and to the quantitative manner of first preset volume and have no effect.Compare existing skill, the influence of response delay between not examined device of the present invention and operation valve can provide receiving element 14 to receive the stoste of accurate quantification (for example first preset volume).
With reference to Fig. 2, be the synoptic diagram of proportioning device in another embodiment of the present invention 20.In this embodiment, except that the part assembly was identical with the explanation of Fig. 1, proportioning device 20 also comprised second volume unit 21 and gas supply device 22.As shown in the figure, second volume unit 21 has second input port 212 and second opening 213.Second opening 213 is connected opening or closing with first volume unit 11.For example, in this embodiment, second opening 213 is connected opening or closing with first input port 112 of first volume unit 11, but not as limit.For example, when desire input stoste to the second volume unit 21, open second input port 212, makes stoste input to second volume unit 21 through second input port 212, is spilled over to first volume unit 11 up to input stoste from second input port 212.The gas supply device 22 and second volume unit 21 join opening or closing.For example, gas supply device 22 utilizes the gas line 221 with control air valve to be connected opening or closing with second volume unit 21.When the liquid level of stoste in second volume unit 21 aligns substantially with the lower edge of second opening 213, there is stoste in second volume unit 21 with second preset volume.That is, when second volume unit, 21 base closeds (second input port 212 and for closed link to each other with gas supply device 22), its open ended amount of liquid is defined as second preset volume.In this embodiment, second preset volume is less than first preset volume.Get for ground, second input port 212 of second volume unit 21 can be designed to share same stoste source of supply outlet with first input port 112 of first volume unit 11, when stoste is imported first volume unit 11 via first input port 112, can make stoste via second input port, 112 inputs, second volume unit 21.That is, but second input port 212 of second volume unit 21 and second opening 213 are the I/O port of folding.Note that at this each input port (112,212) of first volume unit 11 and second volume unit 21 or delivery outlet (114,213) are preferably designed to can control its open and close effect independently, be beneficial to control, and do not exceed with shown in the embodiment.
Has the stoste of first preset volume to receiving element 14 in 11 outputs of first volume unit, if the mixing material of receiving element 14 (for example: the mixing material of stoste and pure water) after measuring, when required mixing material concentration still had deficiency, second volume unit 21 can export the stoste with second preset volume to receiving element 14.For example, if desire increases the concentration of receiving element 14 mixing materials, can from second volume unit 21, export and have the stoste of second preset volume to receiving element 14.In addition, control module 13 in the present embodiment can be according to the concentration that detects mixing material in the receiving element 14, repeatedly utilize control module 13 selectivity to transmit an input or stop signal to the second input port 212, make stoste can repeatedly input to receiving element 14, up to reaching desirable solution concentration with second preset volume.
In an illustrative embodiments, the stoste of importing second preset volume is during to receiving element 14, close second input port 212 earlier, the gas that utilizes gas supply device 22 to be provided, nitrogen for example, the stoste that will have the second quantitative preset volume via the gas line 221 of control air valve is delivered to receiving element 14 through first delivery outlet 114 of first volume unit 11.For example, overflow by second opening 213 via the stoste that gas line 221 output of control air valve utilizes nitrogen to provide an air pressure to push to have second preset volume in second volume unit 21, via first delivery outlet 114 of first volume unit 11, above-mentioned stoste is inputed to receiving element 14 again.But those of ordinary skill should be recognized, except that the mode of above-mentioned first delivery outlet 114 via first volume unit 11, also can be: directly do not export the stoste in second volume unit 21 to receiving element 14 by first volume unit 11 via alternate manner, for example.For example, the stoste that receiving trap 114 directly will have second preset volume that second opening 213 of second volume unit 21 is designed to directly lead exports receiving element 14 to.
With reference to Fig. 3, be the synoptic diagram of proportioning device in another embodiment of the present invention 30.In the present embodiment, except that the part assembly was identical with the explanation of Fig. 2, proportioning device 30 also comprised catching device 31.Catching device 31 couples mutually with first volume unit 11, in order to accept the stoste that first opening 113 overflows.In this embodiment, the stoste that detecting unit 12 detects in the catching device 31 has had the stoste of first preset volume to determine first volume unit 11.Catching device 31 has pore 311, and the design of pore 311 is for avoiding because of atmospheric pressure, causes stoste can't be normally to be overflowed by first opening 113 of first volume unit 11.For example, when stoste was overflowed via first opening 113, gas can be discharged via pore 311, keeps stoste and is normally overflowed by first opening 113.
When first opening 113 of stoste via first volume unit 11 overflows, detecting unit 12 detects by detecting the stoste of catching device 31, and decision has stoste to overflow from first opening 113.After detecting unit 12 detects the stoste of overflowing, produce a signal and overflow first opening 113, and send this signal to control module 13 to represent stoste.Control module 13 transmits stop signal to the first input port 112 according to the signal of detecting unit 12, makes liquid no longer input to first volume unit 11 from first input port 112.Identical with Fig. 1, the receiving element 14 among Fig. 3 also can accurately obtain the stoste of first preset volume from first volume unit 11.In addition, also can be identical with embodiment shown in Figure 2, the liquid that will have second preset volume exports receiving element 14 to from second volume unit 21.In this embodiment, utilize catching device 31 can reclaim the stoste of overflowing effectively, and reduce pollution environment from first opening 113.
With reference to Fig. 4, be the synoptic diagram of proportioning device in another embodiment of the present invention 40.With identical with Fig. 1, the receiving element 14 among Fig. 4 also can accurately obtain the stoste of first preset volume from first volume unit 11.In addition, also can be identical with embodiment shown in Figure 2, the stoste that will have second preset volume exports receiving element 14 to from second volume unit 21.In the present embodiment, except that the part assembly was identical with the explanation of Fig. 3, catching device 41 also comprised dividing plate 412 except that the pore 411 of similar above-mentioned pore 311, accepted part 410 and second and accepted part 420 in order to catching device 41 is separated into first.First accepts part 410 accepts the stoste of overflowing from first opening 113.Second accepts part 420 accepts from first and accepts the stoste that part 410 is overflowed.When stoste be spilled over to via first opening 113 of first volume unit 11 first accept part 410 after, stoste continues to overflow up to being full of first accepts part 410.In this embodiment, when first stoste of accepting part 410 is spilled over to second when accepting part 420, detecting unit 12 is accepted the stoste that part 410 is overflowed in order to detect by first.First carrier 410 optionally is connected opening or closing with first volume unit 11.For example, first carrier 410 has one second delivery outlet 432 and one the 3rd opening 431.Second delivery outlet 432 is connected opening or closing with first volume unit 11, and stoste is spilled over to second from the 3rd opening 431 and accepts part 420, at this moment first accepts part 410 and stores and have the default stoste of accepting volume.That is, when first carrier 410 during for semienclosed container (stoste only can when the 3rd opening 431 overflows), the amount that 410 of first carriers can be accepted liquid be the default volume of accepting.As previously mentioned, similarly, this default volume of accepting can accurately utilize the instrument decision.Therefore, identical with embodiment shown in Figure 1, has the stoste of first preset volume to receiving element 14 in 11 outputs of first volume unit, if the mixing material of receiving element 14 is after measuring, when required mixing material concentration still has deficiency, first second delivery outlet 432 of accepting part 410 can be opened according to the signal of control module 13, to export the default stoste of accepting volume of tool to receiving element 14.But those of ordinary skill should be recognized, the first predetermined stoste of accepting volume of accepting part 410 is exported to the receiving trap 14 via first volume unit 11 except that above-mentioned, also can be: directly do not export first stoste of accepting in the part 410 to receiving element 14 by first volume unit 11 via alternate manner, for example.In addition, in this embodiment, default accept volume, and preferably defaultly accept volume and be different from second preset volume less than first preset volume.Thus, implement by the cooperation of various preset volume, the present invention can accurately adjust the stoste amount of providing in variation ground, to reach required solution concentration.
But those of ordinary skill should recognize, only illustrates that in the present embodiment first of catching device 41 1 sides accept the predetermined volume of accepting of part 410.Yet, it should be noted that catching device 41 is the catching device of a solid, so the first predetermined volume of accepting of accepting part 410 still extends to catching device 41 opposite sides.For example, catching device 41 is a right cylinder, also forms a cylinder along first opening, 113 peripheries every version 412.Catching device 41 is accepted part 420 by accepting part 410 and second every version 412 formation aforesaid first, wherein first accepts part 410 for being scheduled to accept volume.Second accepts part 420 accepts from first and accepts the stoste that part 410 is overflowed, except that detecting for detecting unit 12, be positioned at second stoste of accepting part 420, can will be positioned at second stoste of accepting part 420 and be recycled to first volume unit 11 by control module 13 controls via second opening 213.
With reference to Fig. 5, be the synoptic diagram of proportioning device in another embodiment of the present invention 50.In the present embodiment, except that the part assembly was identical with the explanation of Fig. 4, first volume unit 11 also comprised micromatic setting 51.Micromatic setting 51 combines with first volume unit 11, and according to the kind of input liquid, selectivity is adjusted the shape of first volume unit 11, and then changes first preset volume.Preferably, first volume unit 11 is constituted by flexual material, and can change the shape of first volume unit 11 by micromatic setting 61, and then the preset volume of the volume unit 11 of winning is changed.This preset volume that changes can accurately determine by instrument, and makes first volume unit 11 have the preset volume of correction.Thus, proportioning device of the present invention (10,20,30,40,50) not only can provide the liquid of accurate quantification, proportioning device (20,30,40,50) but the liquid of various accurate quantifications also is provided to diversification, to meet the demand of each processing procedure.
The above is the preferred embodiments of the present invention only, is not limited to the present invention.In the above-described embodiments, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a proportioning device is used to export quantitative liquid to a receiving element, and described proportioning device comprises:
One first volume unit has one first preset volume, and described first volume unit has one first input port, one first opening and one first delivery outlet; And
One detecting unit;
Wherein, when described first delivery outlet is closed, import liquid to described first volume unit via described first input port, after detecting the liquid that overflows described first opening when described detecting unit, stop to import described liquid to described first volume unit, and open described first delivery outlet, the liquid that described first preset volume is arranged with output device is to described receiving element
It is characterized in that, described proportioning device also comprises one second volume unit, have one second preset volume, one second opening and one second input port, and described second opening is connected opening or closing with described first volume unit, wherein liquid inputs to this second volume unit through described second input port, when the liquid level of liquid aligns substantially with described second opening in described second volume unit, described second volume unit stores the liquid with described second preset volume, and described second preset volume is less than described first preset volume.
2. proportioning device according to claim 1 is characterized in that, during to described first volume unit, also simultaneously inputs to described second volume unit via described second input port via described first input port input liquid.
3. proportioning device according to claim 1 is characterized in that, also comprises a gas supply device, exports the liquid in described second volume unit to described receiving element through described first volume unit in order to gas to be provided.
4. proportioning device according to claim 1, also comprise a catching device, it is characterized in that, described catching device also comprises a dividing plate, accept part and one second accept part in order to described catching device is separated into one first, wherein said first accepts part accepts the liquid that overflows from described first opening, and described second accepts part and accept from described first and accept the liquid that overflows of part.
5. proportioning device according to claim 4 is characterized in that, described detecting unit is to detect described second liquid of accepting in the part.
6. proportioning device according to claim 4, it is characterized in that, described first accepts part has a default volume of accepting, described first accepts part has one the 3rd opening and one second delivery outlet, wherein liquid is spilled over to described second from described the 3rd opening and accepts part, described first accepts the part storage has the described default liquid of accepting volume, after detecting the liquid that overflows when described detecting unit, described second delivery outlet is opened, accept liquid in the part to described receiving element to export described first, and describedly defaultly accept volume less than described first preset volume.
7. proportioning device according to claim 6 is characterized in that, wherein said first liquid of accepting in the part exports described receiving element to via described first volume unit.
8. proportioning device according to claim 1 is characterized in that, also comprises a micromatic setting, combines with described first volume unit, and described micromatic setting is a preset volume of revising in order to adjust described first preset volume.
9. proportioning device according to claim 8 is characterized in that, wherein said first volume unit is constituted by flexual material, and the shape of described micromatic setting by changing described first volume unit is to adjust described first preset volume.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2007101401165A CN101363747B (en) | 2007-08-06 | 2007-08-06 | Quantitation device |
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| CN2007101401165A CN101363747B (en) | 2007-08-06 | 2007-08-06 | Quantitation device |
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| CN101363747A CN101363747A (en) | 2009-02-11 |
| CN101363747B true CN101363747B (en) | 2010-06-09 |
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| CN115138403A (en) * | 2022-06-07 | 2022-10-04 | 北京机械设备研究所 | Sub-microliter dropwise adding device and system |
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| CN2171108Y (en) * | 1993-03-30 | 1994-07-06 | 株洲冶炼厂 | Measuring cup for extracting quantitative liquid |
| CN2289212Y (en) * | 1996-12-25 | 1998-08-26 | 罗建文 | Constant temp. bucket with automatic water meter |
| CN2488050Y (en) * | 2001-02-27 | 2002-04-24 | 国家环境计量检测技术中心 | Adjustable overflow meter |
| CN2725281Y (en) * | 2004-09-14 | 2005-09-14 | 袁本松 | Metering liquid feeding device |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5280711A (en) * | 1993-02-25 | 1994-01-25 | Imi Cornelius Inc. | Low cost beverage dispensing apparatus |
| CN2171108Y (en) * | 1993-03-30 | 1994-07-06 | 株洲冶炼厂 | Measuring cup for extracting quantitative liquid |
| CN2289212Y (en) * | 1996-12-25 | 1998-08-26 | 罗建文 | Constant temp. bucket with automatic water meter |
| CN2488050Y (en) * | 2001-02-27 | 2002-04-24 | 国家环境计量检测技术中心 | Adjustable overflow meter |
| CN2725281Y (en) * | 2004-09-14 | 2005-09-14 | 袁本松 | Metering liquid feeding device |
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