CN101164138B - Cartesian robot cluster tool architecture - Google Patents

Cartesian robot cluster tool architecture Download PDF

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Publication number
CN101164138B
CN101164138B CN2006800133558A CN200680013355A CN101164138B CN 101164138 B CN101164138 B CN 101164138B CN 2006800133558 A CN2006800133558 A CN 2006800133558A CN 200680013355 A CN200680013355 A CN 200680013355A CN 101164138 B CN101164138 B CN 101164138B
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China
Prior art keywords
mechanical arm
base material
assembly
vertical
processing procedure
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Expired - Fee Related
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CN2006800133558A
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Chinese (zh)
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CN101164138A (en
Inventor
M·利斯
J·胡金斯
C·卡尔森
W·T·威弗
R·劳伦斯
E·英格哈特
D·C·鲁泽克
D·塞法缇
M·库查
K·范凯特
V·霍斯金
V·沙阿
S·洪乔姆
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Applied Materials Inc
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Applied Materials Inc
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Priority claimed from US11/315,778 external-priority patent/US20060182535A1/en
Priority claimed from US11/315,984 external-priority patent/US7651306B2/en
Priority claimed from US11/315,873 external-priority patent/US7374391B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN101164138A publication Critical patent/CN101164138A/en
Application granted granted Critical
Publication of CN101164138B publication Critical patent/CN101164138B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

A method and an apparatus for processing substrates using a multi-chamber processing system that have an increased throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in vertical and horizontal directions, to access the various processing chambers retained in the processing racks. In one embodiment, a robot blade is adapted to restrain a substrate so that the accelerations experienced by the substrate during a transferring process will not cause the substrate position to change on the robot blade.

Description

Cartesian robot cluster tool architecture
Technical field
Embodiments of the invention substantially relate to a kind of integrated process system, said system contain can a plurality of base materials of Synchronous Processing a plurality of processing procedures station and mechanical arm.
Background technology
The processing procedure that forms electronic device is normally accomplished in the multi-cavity chamber process system (for example, cluster tool) of the ability that has continuous processing base material (for example semiconductor wafer) under in check processing environment.The typical case is used for the cluster tool of deposition (i.e. coating) and development photoresist and is commonly referred to as the automation photoresistance and is coated with and developer tool (track lithography tool); Or be used for carrying out semiconductor cleaning processing procedure; Be commonly referred to as wet type/burnisher; Typical cluster tool comprises the body frame structure that holds at least one base material transfer robot, said mechanical arm wafer case/wafer cassette erecting device with a plurality of process chambers that said body frame structure is connected between transmit base material.But cluster tool normally can handle base material through using with repetitive mode under in check processing environment.In check processing environment has many benefits, is included in during the transmission and in the pollution of accomplishing various substrate process step minimize substrate surfaces.Under controlled environment, handle thereby can reduce generation of defects and improve the element qualification rate.
The validity that base material is made processing procedure normally by two relevant and important factor weigh, promptly device qualification rate and cost of carry (cost of ownership, CoO).These factors are important, because these factors directly influence the production cost of electronic device, thereby have influence on the market competitiveness of device manufacturer.Though CoO receives multiple factor affecting, CoO receives system and the influence of chamber production capacity significantly, promptly per hour utilizes the base material quantity of expection processing procedure routine processes in brief.The processing procedure program is commonly defined as the device fabrication steps accomplished in the one or more process chambers in said cluster tool or the program of process recipe step.The processing procedure program generally can contain some base materials (or wafer) electronic device makes fabrication steps.Under the effort that reduces CoO, electronic device fabricators spends many times trial optimization processing procedure programs and chamber processing procedure time usually, to be issued to possible maximum base material production capacity in restriction of cluster tool framework and given situation of chamber processing procedure time.In coating of automation photoresistance and development formula cluster tool; Because the chamber processing procedure time is often short (for example; Can accomplish said processing procedure in about 1 minute); But fabrication steps quantity that need to accomplish the typical processes program is a lot, is to expend between each process chamber, transmitting said base material so be used for accomplishing the most of the time of said processing procedure program.Typical automation photoresistance coating and developing manufacture process program generally comprise following steps: one of deposition or the uniform photoresistance of multilayer (or impedance) layer on substrate surface; Then said base material is sent out said cluster tool to the stepper or the scanning tools that separate; With by said photoresist layer being exposed to the photoresistance adjustment electromagnetic radiation said substrate surface of patterning that gets off, the said patterned light blockage layer of then developing.If the base material production capacity in the cluster tool does not receive the mechanical arm restriction, production capacity that can the said processing procedure program of restriction as the then the longest process recipe step 1.This can not occur in coating of automation photoresistance and the developing manufacture process program, because said program has short processing procedure time and a large amount of fabrication steps usually.The conventional canonical system production capacity of making processing procedure, the automation photoresistance of for example carrying out typical processes is coated with and developer tool, generally is per hour between the 100-120 plate substrate.
Other key factors during CoO calculates are system dependability and System production time.These factors are very important for the rentability and/or the validity of cluster tool, and are long more because system can't handle the time of base material, and the money of user's loss is just many more, and Zhao Yin is in the forfeiture of in cluster tool, handling the chance of base material.Therefore, cluster tool user and manufacturer spend many times and attempt to research and develop the reliable processing procedure of the operating time that has increase, reliably hardware and system reliably.
Industry is for dwindling dimensions of semiconductor devices to improve the device processing speed and to reduce the living hot effort of device and reduced the tolerance of industry for process variation on the contrary.In order to minimize process variation, the key factor of coating of automation photoresistance and developing manufacture process program is that guarantee to pass through each base material of cluster tool all has the problem of identical " wafer history (wafer history) ".The wafer history of base material all is controlled to guarantee all devices manufacturing process variables that may influence device efficiency afterwards, and all base materials in the same batch is always handled in the same manner normally by processing procedure engineer monitoring and control.For guaranteeing that each base material all has identical " wafer history "; Need make each base material stand identical repeatably substrate process step (cooling processing procedure of for example consistent coating process, consistent hard baking journey, unanimity or the like), and the time of each base material between each fabrication steps is identical.It can be highstrung for process recipe variable and the variation of the time between step of filling a prescription that photoetching formula device is made processing procedure, and these variations directly influence process variation, and finally have influence on device efficiency.Therefore, need a kind ofly can carry out cluster tool and the support equipment that minimizes the time-varying processing procedure program between process variation and fabrication steps.In addition, also need to carry out giving evenly and process results repeatably, the device that reaches expection base material production capacity is simultaneously made the cluster tool and the support equipment of processing procedure.
Therefore, have the needs for a kind of system, a kind of method and a kind of equipment, said system, method and apparatus can be handled base material and make said base material meet desired device efficiency target and increase system's production capacity, therefore reduce processing procedure program CoO.
Summary of the invention
The present invention provides a kind of cluster tool of handling base material substantially; Comprise the first processing procedure frame; Contain first group of process chamber, said first group of process chamber has the two or more substrate process chambers that vertically stack, and second group of process chamber; Said second group of process chamber has the two or more substrate process chambers that vertically stack; Two or more substrate process chambers of wherein said first and second group have first side of arranging along first direction, and the first mechanical arm assembly, the said first mechanical arm assembly are suitable for transmitting the substrate process chamber in base material to the said first processing procedure frame; The wherein said first mechanical arm assembly comprises first mechanical arm; Said first mechanical arm has the mechanical arm blade that has the base material receiving surface, and wherein said first mechanical arm is to be suitable for base material is arranged on the one or more points that are contained in usually in first plane, wherein said first plane and said first direction and parallel with the vertical second direction of said first direction; First moving assembly; Have and be suitable for said first mechanical arm is arranged on usually the actuator assemblies on the third direction vertical with said first plane, and second moving assembly, have and be suitable for said first mechanical arm is arranged on the actuator assemblies on the common direction parallel with said first direction; And transit area; Wherein hold said first mechanical arm, wherein when said base material is set on the base material receiving surface of said mechanical arm blade, the width of said transit area is parallel with said second direction and than the substrate sizes of said second direction about 5% to about 50%.
Embodiments of the invention further provide a kind of cluster tool of handling base material, comprise the first processing procedure frame, and the said first processing procedure frame contains two or more groups with two or more substrate process chambers of vertically stacking; Wherein said two or more groups two or more substrate process chambers have first side of arranging along first direction, with through the said substrate process chamber of the said first side access, the second processing procedure frame; The said second processing procedure frame contains two or more groups with two or more substrate process chambers of vertically stacking; Wherein said two or more groups two or more substrate process chambers have first side of arranging along first direction, with through the said substrate process chamber of the said first side access, the first mechanical arm assembly; Be arranged between said first processing procedure frame and the said second processing procedure frame; And be suitable for base material is sent to the substrate process chamber the said first processing procedure frame from said first side, the wherein said first mechanical arm assembly comprises mechanical arm, and said mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane; The vertical moving assembly; Have and be suitable for said mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction, and move horizontally assembly, have and be suitable for said mechanical arm is arranged on the motor on the common direction parallel with said first direction; The second mechanical arm assembly; Be arranged between said first processing procedure frame and the said second processing procedure frame, and be suitable for base material is sent to the substrate process chamber the said second processing procedure frame from said first side, the wherein said second mechanical arm assembly comprises mechanical arm; Said mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane; The vertical moving assembly has and is suitable for said mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction, and moves horizontally assembly; Have and be suitable for said mechanical arm is arranged on the motor on parallel with the said first direction usually direction; And the three-mechanical arm assembly, be arranged between said first processing procedure frame and the said second processing procedure frame, and be suitable for base material is sent to the substrate process chamber the said first processing procedure frame or is sent to the substrate process chamber the said second processing procedure frame from said first side from said first side; Wherein said three-mechanical arm assembly comprises mechanical arm; Said mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane, and the vertical moving assembly has and is suitable for said mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction; And move horizontally assembly, have and be suitable for said mechanical arm is arranged on usually the motor on the direction parallel with said first direction.
Embodiments of the invention further provide a kind of cluster tool of handling base material; Comprise the first processing procedure frame; The said first processing procedure frame contains two or more groups with two or more substrate process chambers that vertically stack, and wherein said two or more groups two or more substrate process chambers that vertically stack have first side of arranging along first direction, with through the said substrate process chamber of the said first side access; And second side of arranging along second direction; With through the said substrate process chamber of the said second side access, the first mechanical arm assembly is suitable for base material is sent to the substrate process chamber the said first processing procedure frame from said first side; The wherein said first mechanical arm assembly comprises first mechanical arm; Said first mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane, and the vertical moving assembly has and is suitable for said first mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction; And move horizontally assembly; Have and be suitable for said first mechanical arm is arranged on usually the motor on the direction parallel with said first direction, and the second mechanical arm assembly, be suitable for base material is sent to the substrate process chamber the said first processing procedure frame from said second side; The wherein said second mechanical arm assembly comprises second mechanical arm; Said second mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane, and the vertical moving assembly has and is suitable for said second mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction; And move horizontally assembly, have and be suitable for said second mechanical arm is arranged on usually the motor on the direction parallel with said second direction.
Embodiments of the invention further provide a kind of cluster tool of handling base material, comprise the two or more substrate process chambers that are arranged in the cluster tool, the first mechanical arm assembly; The said first mechanical arm assembly is suitable for base material is sent to said two or more substrate process chamber, and the wherein said first mechanical arm assembly comprises first mechanical arm, and said first mechanical arm is suitable for base material is arranged on the first direction; Wherein said first mechanical arm comprises the mechanical arm blade; Have first end and base material receiving surface, wherein said base material receiving surface is suitable for holding and transmitting base material, first connecting elements; Said first connecting elements has first pivoting point and second pivoting point; Motor is rotatably connected first gear (gear) with said first connecting elements at the said second pivoting point place; Be connected with first end of said mechanical arm blade and be rotatably connected with said first connecting elements at the said first pivoting point place; And second gear, be rotatably connected with said first gear and with concentric alignment of second pivoting point of said first connecting elements, the gear of said first gear of wherein said second gear mesh is than between about 3: 1 to about 4: 3; First moving assembly; Be suitable for said first mechanical arm is arranged on usually on the second direction vertical with said first direction, and second moving assembly, have and be suitable for said first mechanical arm is arranged on the motor on the common third direction vertical with said second direction.
Embodiments of the invention further provide a kind of cluster tool of handling base material; Comprise the first processing procedure frame; The said first processing procedure frame contains two or more groups with two or more substrate process chambers that vertically stack, and wherein said two or more groups two or more substrate process chambers that vertically stack have first side of arranging along first direction, with through the said substrate process chamber of the said first side access; And second side of arranging along second direction; With through the said substrate process chamber of the said second side access, the first mechanical arm assembly is suitable for base material is sent to the substrate process chamber the said first processing procedure frame from said first side; The wherein said first mechanical arm assembly comprises first mechanical arm; Said first mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane, and the vertical moving assembly has and is suitable for said first mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction; And move horizontally assembly; Have and be suitable for said first mechanical arm is arranged on usually the motor on the direction parallel with said first direction, and the second mechanical arm assembly, be suitable for base material is sent to the substrate process chamber the said first processing procedure frame from said second side; The wherein said second mechanical arm assembly comprises second mechanical arm; Said second mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in the horizontal plane, and the vertical moving assembly has and is suitable for said second mechanical arm is arranged on usually the motor on the direction parallel with said vertical direction; And move horizontally assembly, have and be suitable for said second mechanical arm is arranged on usually the motor on the direction parallel with said second direction.
Embodiments of the invention further provide a kind of cluster tool of handling base material, comprise the two or more substrate process chambers that are arranged in the cluster tool, the first mechanical arm assembly; The said first mechanical arm assembly is suitable for base material is sent to said two or more substrate process chamber, and the wherein said first mechanical arm assembly comprises first mechanical arm, and said first mechanical arm is suitable for base material is arranged on the first direction; Wherein said first mechanical arm comprises the mechanical arm blade; Have first end and base material receiving surface, wherein said base material receiving surface is suitable for holding and transmitting base material, first connecting elements; Said first connecting elements has first pivoting point and second pivoting point; Motor is rotatably connected first gear at the said second pivoting point place with said first connecting elements; Be connected with first end of said mechanical arm blade and be rotatably connected with said first connecting elements at the said first pivoting point place; And second gear, be rotatably connected with said first gear and with concentric alignment of second pivoting point of said first connecting elements, the gear of said first gear of wherein said second gear mesh is than between about 3: 1 to about 4: 3; First moving assembly; Said first moving assembly is suitable for said first mechanical arm is arranged on vertical with the said first direction usually second direction, and second moving assembly, has to be suitable for said first mechanical arm is arranged on the motor on vertical with the said second direction usually third direction.
Embodiments of the invention further provide a kind of equipment that in cluster tool, transmits base material, comprise first mechanical arm, and said first mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in first plane; The vertical moving assembly comprises slide track component, and said slide track component contains the block (block) that is connected with the linear track of perpendicular positioning; Supporting bracket; Be connected with said first mechanical arm with said block, and actuator, said actuator is suitable for along said linear track said supporting bracket being vertically set on the upright position; And move horizontally assembly; The said assembly that moves horizontally is connected with said vertical moving assembly, and has horizontal actuator, and said horizontal actuator is suitable for being provided with in the horizontal direction said first mechanical arm and said vertical moving assembly.
Embodiments of the invention further provide a kind of equipment that in cluster tool, transmits base material, comprise first mechanical arm, and said first mechanical arm is suitable for base material is arranged on the one or more points that are contained in usually in first plane; The vertical moving assembly comprises actuator assemblies, and said actuator assemblies is suitable for vertically being provided with said first mechanical arm; Wherein said actuator assemblies further comprises vertical actuator, and said vertical actuator is suitable for vertically being provided with said first mechanical arm, and vertical slide rail; Said vertical slide rail is suitable for when said vertical actuator is transferred said first mechanical arm, guiding said first mechanical arm; Seal, have the wall of one or more formation interior zones, said interior zone is the spare part that is selected from vertical actuator and said vertical slide rail around at least one; And fan; Be communicated with said interior zone fluid, and be suitable in said sealing, producing negative pressure, and move horizontally assembly; Have horizontal actuator and horizontal guiding elements, and be suitable on parallel with first side of the said first processing procedure frame usually direction, said first mechanical arm being set.
Embodiments of the invention further provide a kind of equipment that in cluster tool, transmits base material; Comprise the first mechanical arm assembly, the said first mechanical arm assembly is suitable for base material is arranged on the first direction, and the wherein said first mechanical arm assembly comprises the mechanical arm blade; Have first end and base material receiving surface; First connecting elements, said first connecting elements has first pivoting point and second pivoting point, first gear; Be connected with first end of said mechanical arm blade and be rotatably connected with said first connecting elements at the said first pivoting point place; Second gear is rotatably connected with said first gear and aligns with second pivoting point of said first connecting elements, and first motor; Be rotatably connected with said first connecting elements; Wherein said first motor is suitable for by rotating said first connecting elements with respect to said second gear and first gear is provided with said base material receiving surface, and first moving assembly, said first moving assembly are suitable for said first mechanical arm is arranged on vertical with the said first direction usually second direction; And second moving assembly, said second moving assembly is suitable for said first mechanical arm is arranged on vertical with the said second direction usually third direction.
Embodiments of the invention further provide a kind of equipment that in cluster tool, transmits base material, comprise the first mechanical arm assembly, the said first mechanical arm assembly be suitable for base material be arranged on be contained in usually in first plane on one or more points of arc; The wherein said first mechanical arm assembly comprises the mechanical arm blade, has first end and base material receiving surface, and motor; Said motor is rotatably connected with first end of said mechanical arm blade, and first moving assembly, said first moving assembly are suitable for said first mechanical arm is arranged on vertical with the said first plane usually second direction; Wherein said first moving assembly comprises actuator assemblies, and said actuator assemblies is suitable for vertically being provided with said first mechanical arm, and wherein said actuator assemblies further comprises vertical actuator; Said vertical actuator is suitable for vertically being provided with said first mechanical arm; And vertical slide rail, said vertical slide rail is suitable for when said vertical actuator is transferred said first mechanical arm, guiding said first mechanical arm, seals; Wall with one or more formation interior zones; Said interior zone is the spare part that is selected from vertical actuator and said vertical slide rail around at least one, and fan, is communicated with said interior zone fluid; And be suitable in said sealing producing negative pressure; And second moving assembly, having second actuator, said second actuator is suitable for said first mechanical arm is arranged on vertical with the said second direction usually third direction.
Embodiments of the invention further provide a kind of equipment that in cluster tool, transmits base material, comprise the first mechanical arm assembly, and the said first mechanical arm assembly is suitable for base material is arranged on the first direction; The wherein said first mechanical arm assembly comprises the mechanical arm blade, has first end and base material receiving surface, first gear; Be connected with first end of said mechanical arm blade, second gear is rotatably connected with said first gear; And first motor, be rotatably connected with said first gear, and second motor; Be rotatably connected with said second gear, wherein said second motor is suitable for rotating said second gear with respect to said first gear, to create variable gear ratio; And first moving assembly, said first moving assembly is suitable for said first mechanical arm is arranged on vertical with the said first direction usually second direction.
Embodiments of the invention further provide a kind of equipment that transmits base material, comprise pedestal, have the substrate support surface; Reactive means; Be arranged on the said pedestal, contact member and is suitable for base material is connected towards the actuator that said reactive means promotes; And braking element, said braking element when said reactive means promote is suitable for prevailingly suppress the moving of said contact member through being provided with said base material at said contact member.
Embodiments of the invention further provide a kind of equipment that transmits base material, comprise pedestal, have stayed surface; Reactive means is arranged on the said pedestal actuator; Be connected with said pedestal, contact member is connected with said actuator; Wherein said actuator is suitable for said contact member towards being arranged on the said stayed surface, and promotes the braking element assembly by the edge of the base material of said reactive means bearing edge; Comprise braking element; And the brake actuation member, wherein said brake actuation member is suitable for said braking element is promoted towards said contact member, suppresses the restraint that said contact member moves prevailingly to create during base material transmits.
Embodiments of the invention further provide a kind of equipment that transmits base material, comprise pedestal, have stayed surface, reactive means; Be arranged on the said pedestal, the contact member assembly comprises actuator; And contact member, have the base material contact surface and comply with member (compliant member), and be arranged between said contact surface and said actuator; Wherein said actuator is suitable for said contact surface is promoted towards the base material that leans on the surface setting of said reactive means, and the braking element assembly, comprises braking element; And the brake actuation member, being suitable for said braking element is promoted towards said contact member, said contact member moves during transmitting with the inhibition base material; And inductor, being connected with said contact member, wherein said inductor is suitable for responding to the position of said contact surface.
Embodiments of the invention further provide a kind of equipment that transmits base material, comprise the mechanical arm assembly, contain first mechanical arm; Said first mechanical arm is suitable for being arranged on the base material on the mechanical arm blade in transmission on the first direction, and first moving assembly has actuator; Said actuator is suitable for said first mechanical arm is arranged on the second direction, and second moving assembly, is connected with said first moving assembly and has second actuator; Said second actuator is suitable for said first mechanical arm and said first moving assembly are arranged on vertical with the said second direction usually third direction, and the base material grabbing device, is connected with said mechanical arm blade; Wherein said base material grabbing device is suitable for support base material, and contains reactive means, is arranged on the said mechanical arm blade; Actuator is connected contact member with said mechanical arm blade; Be connected with said actuator, wherein said actuator is suitable for by said contact member is limited base material and braking element assembly towards the edge promotion that is arranged on the base material between said contact member and said reactive means; Comprise braking element; And the brake actuation member, be suitable for said braking element is promoted towards said contact member, suppress moving of said contact member with during transmitting at base material.
Embodiments of the invention further provide a kind of method that transmits base material; Comprise base material is arranged on the substrate support; Between the base material contact member and reactive means that are arranged on the said substrate support; Utilize actuator to produce the base material grasping force, said actuator promotes said base material contact member towards said base material, and said base material is promoted towards said reactive means; And the generation restraint, said restraint is suitable for during transmitting base material, utilizing brake assemblies to suppress moving of said base material contact member.
Embodiments of the invention further provide a kind of method that transmits base material; Comprise base material is arranged on the substrate support; Between the base material contact member and reactive means that are arranged on the said substrate support, the actuator that will have connector is connected with said base material contact member, and said connector is connected said actuator with said base material contact member; Utilize actuator to apply grasping force to said base material; Said actuator promotes said base material contact member towards said base material, and said base material is promoted towards said reactive means, stores energy in and complies with in the member; The said member of complying with is arranged between said base material contact member and the said connector; After applying said grasping force, suppress moving of said connector, minimizing the amount of variability that transmits said grasping force during the base material, and respond to moving of said base material because be stored in said moving of minimizing of complying with the energy in the member by the said base material contact surface of induction.
Embodiments of the invention further provide a kind of method that transmits base material; Comprising the base material that will be arranged in first process chamber is received on the mechanical arm substrate support; The step that wherein receives said base material comprises base material is arranged on the said mechanical arm substrate support; Between the base material contact member and reactive means that are arranged on the said mechanical arm substrate support, utilize actuator to produce the base material grasping force, said actuator promotes said base material contact member towards said base material; And said base material promoted towards said reactive means; And brake assemblies is set, suppress the restraint that said base material contact member moves during transmitting base material, to produce, and utilize the first mechanical arm assembly that said base material and said mechanical arm substrate support are sent to the position in second process chamber from the position in said first process chamber; Said second process chamber is to be arranged on said first process chamber along first direction one distance is arranged; The said first mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of second direction, and wherein said second direction is vertical with said first direction usually.
Embodiments of the invention further provide a kind of method that in cluster tool, transmits base material; Comprise and utilize the first mechanical arm assembly base material to be sent to the first process chamber array that is provided with along first direction; The said first mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction; And be arranged on the desired location of second direction; Wherein said second direction is vertical with said first direction usually; Utilize the second mechanical arm assembly base material to be sent to the second process chamber array that is provided with along said first direction; The said second mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of said second direction, and utilizes the three-mechanical arm assembly base material to be sent to first and second process chamber array that is provided with along said first direction; Said three-mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of said second direction.
Embodiments of the invention further provide a kind of method that in cluster tool, transmits base material; Comprise and utilize the first mechanical arm assembly that base material is passed through the cavity chamber from first to be sent to the first process chamber array that is provided with along first direction; The said first mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction; And be arranged on the desired location of second direction; Wherein said second direction is vertical with said first direction usually; Utilize the second mechanical arm assembly that base material is passed through the cavity chamber from said first and be sent to the said first process chamber array; The said second mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction; And be arranged on the desired location of second direction, and utilize the front end robot arm that is arranged in the front end assemblies that base material is sent to said first from the base material casket and pass through the cavity chamber, wherein said front end assemblies adjoins with the transit area that contains the said first process chamber array, the said first mechanical arm assembly and the said second mechanical arm assembly in fact.
Description of drawings
The mode of characteristic that therefore can detail knowledge the invention described above promptly to the clearer and more definite description of the present invention, was summarized tout court in front, can obtain by the reference implementation example, and wherein some is shown in the drawings.But it should be noted that accompanying drawing only illustrates general embodiment of the present invention, therefore should not be considered to limitation of the scope of the invention, because the present invention can allow other equivalent embodiment.
Figure 1A is the isometric view that an embodiment of cluster tool of the present invention is shown;
Figure 1B is the plane graph according to the process system shown in Figure 1A of the present invention;
Fig. 1 C is the end view that illustrates according to an embodiment of the first processing procedure frame 60 of the present invention;
Fig. 1 D is the end view that illustrates according to an embodiment of the second processing procedure frame 80 of the present invention;
Fig. 1 E is the plane graph according to the process system shown in Figure 1B of the present invention;
Fig. 1 F illustrate can with an embodiment of the processing procedure program that contains some process recipe steps of each embodiment of said cluster tool and usefulness;
Fig. 1 G is the plane graph that the process system shown in Figure 1B is shown, and the base material transfer path that passes said cluster tool of the processing procedure program of following shown in Fig. 1 F is shown;
Fig. 2 A is the plane graph according to process system of the present invention;
Fig. 2 B is the plane graph according to process system of the present invention shown in Fig. 2 A;
Fig. 2 C is the plane graph of the process system shown in Fig. 2 B, and the base material transfer path that passes said cluster tool of the processing procedure program of following shown in Fig. 1 F is shown;
Fig. 3 A is the plane graph according to process system of the present invention;
Fig. 3 B is the plane graph of the process system shown in Fig. 3 A, and the base material transfer path that passes said cluster tool of the processing procedure program of following shown in Fig. 1 F is shown;
Fig. 4 A is the plane graph according to process system of the present invention;
Fig. 4 B is the plane graph of the process system shown in Fig. 4 A, and the base material transfer path that passes said cluster tool of the processing procedure program of following shown in Fig. 1 F is shown;
Fig. 5 A is the plane graph according to process system of the present invention;
Fig. 5 B is the plane graph of the process system shown in Fig. 5 A, and the base material transfer path that passes said cluster tool of the processing procedure program of following shown in Fig. 1 F is shown;
Fig. 6 A is the plane graph according to process system of the present invention;
Fig. 6 B is the plane graph of the process system shown in Fig. 6 A, and two possible base material transfer paths that pass said cluster tool of the processing procedure program of following shown in Fig. 1 F are shown;
Fig. 6 C is the plane graph according to process system of the present invention;
Fig. 6 D is the plane graph of the process system shown in Fig. 6 C, and two possible base material transfer paths that pass said cluster tool of the processing procedure program of following shown in Fig. 1 F are shown;
Fig. 7 A is the end view according to an embodiment of heat exchanger chambers of the present invention;
Fig. 7 B is the plane graph according to the process system shown in Figure 1B of the present invention;
Fig. 8 A is the isometric view that illustrates according to another embodiment of the cluster tool shown in Figure 1A of the present invention, and said embodiment has attached protective cover;
Fig. 8 B is the profile according to the cluster tool shown in Fig. 8 A of the present invention;
Fig. 8 C is the profile according to a configuration of the present invention;
Fig. 9 A is the isometric view that an embodiment of mechanical arm is shown, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 10 A is the isometric view that illustrates according to an embodiment of the mechanical arm nextport hardware component NextPort with single mechanical arm assembly of the present invention;
Figure 10 B is the isometric view that illustrates according to an embodiment of the mechanical arm nextport hardware component NextPort with two-shipper tool arm component of the present invention;
Figure 10 C is the profile according to an embodiment of the mechanical arm nextport hardware component NextPort shown in Figure 10 A of the present invention;
Figure 10 D is the profile according to an embodiment of mechanical arm nextport hardware component NextPort of the present invention;
Figure 10 E is the profile according to an embodiment of the mechanical arm nextport hardware component NextPort shown in Figure 10 A of the present invention;
Figure 11 A is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 B illustrates according to of the present invention and is transmitted some possible paths of said base material central point when getting into process chamber when base material;
Figure 11 C is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 D is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 E is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 F is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 G is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 H is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 I is the plane graph according to an embodiment of mechanical arm assembly of the present invention, said mechanical arm blade is shown transmits the some positions of base material to process chamber the time;
Figure 11 J is the plane graph according to an embodiment of mechanical arm assembly of the present invention;
Figure 11 K is arranged near the plane graph of the conventional SCARA mechanical arm of the mechanical arm assembly the processing procedure frame;
Figure 12 A is according to the profile that moves horizontally assembly shown in Fig. 9 A of the present invention;
Figure 12 B is according to the profile that moves horizontally assembly shown in Fig. 9 A of the present invention;
Figure 12 C is according to the profile that moves horizontally assembly shown in Fig. 9 A of the present invention;
Figure 13 A is the profile according to the vertical moving assembly shown in Fig. 9 A of the present invention;
Figure 13 B is the isometric view that an embodiment of the mechanical arm shown in Figure 13 A is shown, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 14 A is the isometric view that an embodiment of mechanical arm is shown, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 15 A is the isometric view that an embodiment of mechanical arm is shown, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 16 A illustrates the plane graph of an embodiment of mechanical arm blade assembly, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 16 B illustrates the sectional side view of an embodiment of the mechanical arm blade assembly shown in Figure 16 A, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 16 C illustrates the plane graph of an embodiment of mechanical arm blade assembly, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material;
Figure 16 D illustrates the plane graph of an embodiment of mechanical arm blade assembly, and said embodiment can be suitable in each embodiment of said cluster tool, transmitting base material.
Embodiment
The Apparatus and method for that the present invention provides a kind of use multi-cavity chamber process system (for example cluster tool) to handle base material substantially, said system has system's production capacity of increase, the system dependability of enhancing, the device qualification rate performance of improvement, repeatable higher wafer process historical (or wafer history) and less floor space (footpring).In one embodiment; Said cluster tool is suitable for carrying out coating of automation photoresistance and developing manufacture process; Wherein base material be through the coating with photosensitive material, be sent to stepper/scanner then, said stepper/scanner is exposed to said photosensitive material under the radiation of certain type; And on said photosensitive material, form pattern, some part of removing said photosensitive material in the developing manufacture process that then is to accomplish in the said cluster tool.In another embodiment, said cluster tool is suitable for carrying out wet type/cleaning processing procedure program, wherein in said cluster tool, on base material, carries out some base material cleaning processing procedures.
Fig. 1-6 illustrate can with some mechanical arms of each embodiment of the present invention and usefulness and process chamber configuration wherein some.The general two or more mechanical arms that use with parallel processing procedure collocation method configuration of each embodiment of said cluster tool 10; To transmit base material between each process chamber of (for example element 60,80 or the like) in being retained in said processing procedure frame, therefore can on said base material, carry out the processing procedure program of expecting.In one embodiment; Said parallel processing procedure collocation method comprises two or more mechanical arm assemblies 11 (element 11A, 11B and the 11C of Figure 1A and 1B); Said assembly is suitable for moving substrate on vertical (being called the z direction afterwards) and horizontal direction; Horizontal direction is direction of transfer (x direction) and the direction (y direction) vertical with said direction of transfer, therefore can in each process chamber of arranging along said direction of transfer of keeping somewhere in said processing procedure frame (for example element 60 and 80), handle said base material.An advantage of said parallel processing procedure collocation method is if one of them of said mechanical arm can't be operated, or takes off maintenance, and said system is still capable of using to be retained in said intrasystem other mechanical arms and to continue to handle base material.In general, each said embodiment has superiority, because each row or each group substrate process chamber all have the mechanical arm of two or more services, with the production capacity that increase is provided and the system dependability of enhancing.In addition, each said embodiment is normally through being configured to minimize and control the particulate that said substrate transport mechanism produces, with device qualification rate and the base material fragment problems of the CoO that avoids influencing said cluster tool.Another advantage of this collocation method is to reach flexibly modularization framework and lets the configurable needed process chamber of production capacity that said user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.Though Fig. 1-6 illustrates an embodiment of the mechanical arm assembly 11 that can be used to carry out each side of the present invention, the mechanical arm assembly 11 of other types also can be suitable for carrying out identical base material and transmit and function is set, and can not deviate from base region of the present invention.
The configuration of first cluster tool
A. System configuration
Figure 1A is the isometric view of an embodiment of cluster tool 10, and the of the present invention some aspects that can receive benefits through use are shown.Figure 1A illustrates the embodiment of said cluster tool 10, and said cluster tool contains and is suitable for three mechanical arms and the external module 5 that access vertically stacks each process chamber in the first processing procedure frame 60 and the second processing procedure frame 80.On the one hand, when accomplishing the lithographic process program,, can be stepper/scanner, carry out some extra exposed type fabrication steps with the said external module 5 that said Background Region 45 (not illustrating at Figure 1A) is connected with said cluster tool 10.An embodiment of said cluster tool 10 shown in Figure 1A, contains front-end module 24 and central module 25.
Figure 1B is the plane graph of the embodiment of the cluster tool 10 shown in Figure 1A.Said front-end module 24 generally contains one or more wafer case assemblies 105 (for example object 105A-D) and front end robot arm component 15 (Figure 1B).Said one or more wafer case assembly 105, or front-open wafer box (FOUPs) generally are to be suitable for holding the one or more one or more base materials " W " desiring in said cluster tool 10, to handle or wafer cassette 106 of wafer of containing.In one aspect, said front-end module 24 also contains one or more transmission position 9 (the for example element 9A-C of Figure 1B).
In one aspect, said central module 25 has the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C, rear robot arm component 40, the first processing procedure frame 60 and the second processing procedure frame 80.The said first processing procedure frame 60 and the second processing procedure frame 80 contain various process chamber (for example coating machine/developing machine chamber, baking chamber, cooling chamber, wet-cleaning chamber or the like; (Fig. 1 C-D) will be discussed hereinafter), those chambers are suitable for carrying out each fabrication steps in the substrate process program.
Fig. 1 C and 1D illustrate when standing in when near the side of side 60A the said first processing procedure frame 60 and the second processing procedure frame 80 being watched, and therefore the end view of an embodiment of the said first processing procedure frame 60 and the second processing procedure frame 80 can meet with the diagram shown in Fig. 1-6.The said first processing procedure frame 60 generally contains one or more groups vertical process chamber that stacks with the second processing procedure frame 80, and those chambers are suitable on base material, carrying out the semiconductor or the flat-panel screens device manufacturing fabrication steps of some expections.For example, in Fig. 1 C, the said first processing procedure frame 60 has five groups, or five are listed as the process chamber that vertically stacks.In general; These devices are made fabrication steps can be included in deposition materials on the said substrate surface, cleans said substrate surface, the said substrate surface of etching; Or said base material is exposed under the radiation of certain type, with physics or the chemical change that causes the one or more zones on the said base material.In one embodiment, the said first processing procedure frame 60 and the second processing procedure frame 80 contain the one or more process chambers that are suitable for carrying out one or more lithographic process program steps.In one aspect, processing procedure frame 60 and 80 can comprise one or more coating machines/developing machine chamber 160, one or more cooling chamber 180, one or more baking chamber 190, one or more Waffer edge exposure sphere removal (OEBR) chamber 162, roasting (PEB) chamber 130 in one or more backs of exposing to the sun, one or more support chamber 165, integrated baking/cooling chamber 800 and/or one or more HMDS (HMDS) process chamber 170.Can be suitable for making illustration coating machine/developing machine chamber, cooling chamber, baking chamber, OEBR chamber, PEB chamber that one or more aspect of the present invention is benefited, support the special routine application case the 11/112nd of the commonly assigned U.S. that chamber, integrated baking/cooling chamber and/or HMDS process chamber are further filed an application on April 22nd, 2005; Describe in No. 281, said application extremely with under the inconsistent degree of the present invention who is advocated is not incorporated herein by incorporated at this.The special routine application case the 11/111st of the commonly assigned U.S. that can be suitable for making the example of integrated baking/cooling chamber that one or more aspect of the present invention is benefited further to file an application on April 11st, 2005; No. 154 and patent application the 11/111st; Describe in No. 353, those applications extremely with under the inconsistent degree of the present invention who is advocated are not incorporated herein by incorporated at this.The special routine application case the 09/891st of the commonly assigned U.S. that can be suitable on base material carrying out one or multiple cleaning processing procedure and can be suitable for making the example of process chamber of being benefited aspect one or more of the present invention and/or system further to file an application in June 25 calendar year 2001; No. 849 and the patent application the 09/945th of filing an application in August 31 calendar year 2001; Describe in No. 454, those applications extremely with under the inconsistent degree of the present invention who is advocated are not incorporated herein by incorporated at this.
In one embodiment; Shown in Fig. 1 C; Wherein said cluster tool 10 is to be suitable for carrying out the lithography type processing procedure, and the said first processing procedure frame 60 can have eight coating machines/developing machine chamber 160 (being denoted as CD1-8), 18 cooling chamber 180 (being denoted as C1-18), eight baking chambers 190 (being denoted as B1-8), six PEB chambers 130 (being denoted as PEB1-6), two OEBR chambers 162 (being denoted as 162) and/or six HMDS process chambers 170 (being denoted as DP1-6).In one embodiment; Shown in Fig. 1 D; Wherein said cluster tool 10 is to be suitable for carrying out the lithography type processing procedure, and the said second processing procedure frame 80 can have eight coating machines/developing machine chamber 160 (being denoted as CD1-8), six integrated baking/cooling chamber 800 (being denoted as BC1-6), six HMDS process chambers 170 (being denoted as DP1-6) and/or six support chambers 165 (being denoted as S1-6).The direction of the process chamber shown in Fig. 1 C-D, position, type and quantity also are not intended to limit the scope of the invention, and only are intended to illustrate one embodiment of the present of invention.
Referring to Figure 1B, in one embodiment, transmit base material between the wafer cassette 106 that said front end robot arm component 15 is suitable in being installed in wafer case assembly 105, (seeing device 105A-D) and said one or more transmission position 9 (seeing the transmission position 9A-C of Figure 1B).In another embodiment, said front end robot arm component 15 is suitable for transmitting base material between one or more process chambers of wafer cassette 106 and the said front-end module 24 of adjacency in said first processing procedure frame 60 or the one second processing procedure frame 80 in being installed in wafer case assembly 105.Said front end robot arm component 15 generally contains and moves horizontally assembly 15A and mechanical arm 15B; Said both merging can be arranged on base material on the level and/or upright position of the expection in the said front-end module 24, or are arranged on the adjoining position in the said central module 25.Said front end robot arm component 15 is suitable for utilizing one or more mechanical arm blade 15C to transmit one or more base materials, by using the instruction of transmitting from system controller 101 (discussing hereinafter).In a program, said front end robot arm component 15 is suitable for base material is sent to from said wafer cassette 106 one of them of said transmission position 9 (for example, the device 9A-C of Figure 1B).In general; Transmitting the position is the base material build-up area; The transmission process chamber can be contained in said base material build-up area; Said transmission process chamber has the characteristic similar with heat exchanger chambers 533 (seeing Fig. 7 A) or conventional base material casket 106, and can receive base material from first mechanical arm, and therefore said base material can be shifted out and is provided with by one second mechanical arm.In one aspect, be installed in the transmission process chamber that transmits in the position and can be suitable for carrying out the one or more fabrication steps in the expection processing procedure program, for example, HMDS fabrication steps or cooling/cooling fabrication steps or base material breach alignment (notch align).In one aspect, each transmits position (the element 9A-C of Figure 1B) can be by each access of said central robot arm component (that is, the first mechanical arm assembly 11A, the second mechanical arm assembly 11B and three-mechanical arm assembly 11C).
Referring to Figure 1A-B, the said first mechanical arm assembly 11A, the said second mechanical arm assembly 11B, and said three-mechanical arm assembly 11C be suitable for transmitting base material to each process chamber that is contained in said first processing procedure frame 60 and the said second processing procedure frame 80.In one embodiment; In order in said cluster tool 10, to transmit base material; The said first mechanical arm assembly 11A, the said second mechanical arm assembly 11B, and said three-mechanical arm assembly 11C have the mechanical arm assembly 11 of similar configuration; Wherein each all has at least one and moves horizontally assembly 90, vertical moving assembly 95, and mechanical arm nextport hardware component NextPort 85, and they are communicated with system controller 101.In one aspect; The side 60B of the said first processing procedure frame 60, and the side 80A of the said second processing procedure frame 80 is all along arranging with each the parallel direction of assembly 90 (describing hereinafter) that moves horizontally of each mechanical arm assembly (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, and three-mechanical arm assembly 11C).
The position that said system controller 101 is suitable for controlling each spare part that is used for accomplishing said transmission processing procedure with move.Said system controller 101 generally is that design promotes the control and the automation of whole system, and comprises CPU (CPU) (not shown), memory (not shown) usually and support circuit (or I/O) (not shown).Said CPU is used for controlling various systemic-functions, chamber processing procedure and support hardware (for example, detector, mechanical arm, motor, gas source hardware or the like) and monitors said system and the computer processor of any kind of chamber processing procedure (for example chamber temp, processing procedure program production capacity, chamber processing procedure time, input/output signal or the like) a kind of in industry is set.Said memory is connected with said CPU, and can be one or more memories that can obtain easily, the digital storage of random-access memory (ram), read-only memory (ROM), floppy disk, hard disk or any other type for example, Local or Remote.Software instruction and data can be encoded and be stored in the said memory, to instruct said CPU.Said support circuit also is connected with said CPU, supports said processor to utilize usual manner.Said support circuit can comprise high-speed cache, power supply unit, clock circuit, input/output circuitry, subsystem, reach person like that.Can on base material, carry out which kind of work by program (or computer instruction) decision that said system controller 101 reads.Preferably, said program is the software that said system controller 101 can read, and said software comprises and is used for carrying out and monitors and carry out said processing procedure program work and the relevant code of each chamber process recipe step.
Referring to Figure 1B, in one aspect of the invention, the said first mechanical arm assembly 11A is suitable for from least one side, and for example said side 60B transmits base material between access and the said process chamber in the said first processing procedure frame 60.In one aspect, said three-mechanical arm assembly 11C is suitable for from least one side, and for example said side 80A transmits base material between access and the said process chamber in the said second processing procedure frame 80.In one aspect, the said second mechanical arm assembly 11B is suitable between side 60B access and the said process chamber in the said first processing procedure frame 60, transmitting base material, and between the said process chamber of side 80A in the said second processing procedure frame 80, transmits base material.Fig. 1 E illustrates the plane graph of the embodiment of the cluster tool 10 shown in Figure 1B, and the mechanical arm blade 87 of the wherein said second mechanical arm assembly 11B extends into the process chamber in the said first processing procedure frame 60 through side 60B.With said mechanical arm blade 87 extend into process chamber and from said process chamber withdraw said mechanical arm blade 87 ability normally by be contained in said move horizontally assembly 90, vertical moving assembly 95, and mechanical arm nextport hardware component NextPort 85 in spare part pull together move, and accomplish from the instruction that said system controller 101 transmits by utilization.Said two or more mechanical arm ability of " overlapping " each other has superiority; For example said first mechanical arm assembly 11A and the said second mechanical arm assembly 11B; Or said second mechanical arm assembly 11B and said three-mechanical arm assembly 11C; Because said ability allows that base material transmits redundant (transfer redundancy), said redundancy can be improved the said reliability of trooping, operating time, and also increases the base material production capacity.Mechanical arm " overlapping " generally is two or more mechanical arm accesses and/or the ability that between the same process chamber of said processing procedure frame, independently transmits base material.The ability of two or more mechanical arms redundant ground access process chamber can be an importance, in case the locking system mechanical arm transmits bottleneck, because said ability allows that the low mechanical arm of utilization rate helps the mechanical arm of the said system of restriction production capacity.Therefore, the base material production capacity can increase, and can let the wafer history of base material have more repeatability, and can improve system dependability through the live load of each mechanical arm of balance during the processing procedure program.
In one aspect of the invention, the mechanical arm assembly of each overlapping (for example the element 11A among Fig. 1-6,11B, 11C, 11D, 11E or the like) the access simultaneously process chamber of level adjacent (x direction) or vertically adjacent (z direction) each other.For example; When the cluster tool collocation method shown in use Figure 1B and the 1C; Process chamber CD6 in can the access said first processing procedure frame 60 of the said first mechanical arm assembly 11A, and said second mechanical arm assembly 11B access simultaneously process chamber CD5, and can not collide each other or disturb.In another example; When the cluster tool collocation method shown in use Figure 1B and the 1D; Process chamber C6 in can the access said second processing procedure frame 80 of said three-mechanical arm assembly 11C, and said second mechanical arm assembly 11B access simultaneously process chamber DP6, and can not collide each other or disturb.
In one aspect, said system controller 101 is suitable for adjusting the convey program through the said base material of said cluster tool based on the optimization production capacity that process is calculated, or arround the process chamber that can't operate, works.The characteristic of allowing the optimization production capacity of said system controller 101 is called as the logic scheduler.Said logic scheduler is based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool.Said logic scheduler can be suitable for inspecting the future work inventory that each mechanical arm (for example front end robot arm component 15, the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C or the like) is asked; Said future work inventory is to exist in the memory of said system controller 101, distributes to the load of each mechanical arm to help balance.The use that using system controller 101 maximizes said cluster tool can improve the CoO of said cluster tool, makes the wafer history have more repeatability, and can improve the reliability of said cluster tool.
In one aspect, said system controller 101 also is suitable for avoiding the collision between each overlapping mechanical arm, and optimization base material production capacity.In one aspect; Said system controller 101 further programming with monitoring and control all mechanical arms in the said cluster tool move horizontally assembly 90, vertical moving assembly 95, and the moving of mechanical arm nextport hardware component NextPort 85; Avoiding the collision between said mechanical arm, and improve system's production capacity by allowing that all mechanical arms can move simultaneously.This so-called " CAS " can be implemented in many ways; But in general said system controller 101 utilizes during transmitting processing procedure and is arranged on said (a bit) mechanical arm or each inductor in the said cluster tool is monitored the position of each mechanical arm, collides avoiding.In one aspect, said system controller is suitable for during transmitting processing procedure, initiatively changing moving and/or route of each mechanical arm, to avoid collision and to minimize transfer path length.
B. The convey program example
Fig. 1 F illustrates an example through the substrate process program 500 of said cluster tool 10, and some of them fabrication steps (for example element 501-520) can be at transfer step A 1-A 10Each carry out after having accomplished.One or more fabrication steps 501-520 possibly carry out vacuum and/or fluid processes step on base material; With deposition materials on said substrate surface; Clean said substrate surface; The said substrate surface of etching, or said base material is exposed under the radiation of certain type, with physics or the chemical change that causes the one or more zones on the said base material.Executable typical processes example is lithographic process step, base material cleaning fabrication steps, CVD deposition step, ALD deposition step, electroplating process step or electroless plating fabrication steps.When the processing procedure program 500 of following Fig. 1 F to describe when base material that illustrates Fig. 1 G transmits through the cluster tool of the cluster tool general configuration shown in Figure 1B, the example of the transfer step that base material can be followed.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on 9C place, said transmission position, therefore can on said base material, accomplish said transmission step 502.In one embodiment, said transmission step 502 must be provided with or keep somewhere said base material, so that another mechanical arm can pick up said base material from said transmission position 9C.In case accomplish said transmission step 502, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize the said second mechanical arm assembly 11B to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533.In one embodiment, said fabrication steps 508 and 512 must be provided with or keep somewhere said base material, so that another mechanical arm can pick up said base material from said heat exchanger chambers 533.After carrying out said fabrication steps 512, then utilize the said second mechanical arm assembly 11B to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize the said first mechanical arm assembly 11A to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, the said first mechanical arm assembly 11A followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9A place, said transmission position.In one embodiment, said transmission step 518 must be provided with or keep somewhere said base material, so that another mechanical arm can pick up said base material from said transmission position 9A.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
In one embodiment; Fabrication steps 504,506,510,514 and 516 is respectively photoresistance application step, baking/cooling step, the step of exposure of in stepper/scanner module, carrying out, the back baking/cooling step that exposes to the sun, reach development step; The commonly assigned patent application the 11/112nd that these steps are further filed an application on April 22nd, 2005; Describe in No. 281, said application is incorporated herein by the mode of quoting at this.Said baking/cooling step and said back baking/cooling step that exposes to the sun can be carried out in single process chamber, and internal mechanical arm (not shown) perhaps also capable of using transmits between the baking zone of integrated baking/cooling chamber and cooling zone.Though Fig. 1 F-G illustrates the example that can be used in cluster tool 10, handle the processing procedure program of base material, also can carry out complicated or more uncomplicated processing procedure program and/or convey program, and can not deviate from base region of the present invention.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out between each position in said cluster tool 10 or process chamber.
The configuration of second cluster tool
A. System configuration
Fig. 2 A is the plane graph of an embodiment of cluster tool 10, and said cluster tool has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on four mechanical arm assembly 11 (Fig. 9-11 between two processing procedure framves (device 60 and 80); Element 11A, 11B, 11C and the 11D of Fig. 2 A), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the said processing procedure frame.Embodiment shown in Fig. 2 A is identical with the configuration shown in Figure 1A-F, except adding the 4th mechanical arm assembly 11D and transmitting the 9D of position, therefore uses the components identical symbol in due course.Cluster tool collocation method shown in Fig. 2 A has superiority when the base material production capacity is subject to mechanical arm; Because the interpolation of the 4th mechanical arm assembly 11D can be assisted the burden of eliminating other mechanical arms; And also set up some redundancies, said redundancy makes system can handle base material when one or more central robot arms can't operate.In one aspect; The side 60B of the said first processing procedure frame 60, and the side 80A of the said second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (Fig. 9 A and 12A-C) that moves horizontally of each mechanical arm assembly (the for example first mechanical arm assembly 11A, the second mechanical arm assembly 11B etc.).
In one aspect, the said first mechanical arm assembly 11A is suitable between side 60B access and the said process chamber in the said first processing procedure frame 60, transmitting base material.In one aspect, said three-mechanical arm assembly 11C is suitable between side 80A access and the said process chamber in the said second processing procedure frame 80, transmitting base material.In one aspect, the said second mechanical arm assembly 11B is suitable between side 60B access and the said process chamber in the said first processing procedure frame 60, transmitting base material.In one aspect, said the 4th mechanical arm assembly 11D is suitable between side 80A access and the said process chamber in the said second processing procedure frame 80, transmitting base material.In one aspect, said second mechanical arm assembly 11B and the 4th mechanical arm assembly 11D are further adapted for the process chamber in the side 60B access first processing procedure frame 60, and the process chamber in the side 80A access second processing procedure frame 80.
Fig. 2 B illustrates the plane graph of the embodiment of the cluster tool 10 shown in Fig. 2 A, and the mechanical arm blade 87 of the wherein said second mechanical arm assembly 11B extends into the process chamber in the said first processing procedure frame 60 through side 60B.With said mechanical arm blade 87 extend into process chamber and/or from process chamber withdraw said mechanical arm blade 87 ability normally by the spare part of said mechanical arm assembly 11 pull together move; Those spare parts be contained in said move horizontally assembly 90, vertical moving assembly 95, and mechanical arm nextport hardware component NextPort 85 in, and accomplish from the instruction that said system controller 101 transmits by utilization.As stated; Said second mechanical arm assembly 11B and said the 4th mechanical arm assembly 11D can be suitable for allowing " overlapping " between each mechanical arm in the said cluster tool together with said system controller 101; The logic scheduler of the said system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool; And also can use CAS, transmit base material through said system with best mode to allow mechanical arm.The use that using system controller 101 maximizes said cluster tool can improve the CoO of said cluster tool, makes the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 2 C illustrates the example of the transfer step program of passing through the cluster tool configuration shown in Fig. 2 A that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on 9C place, said transmission position, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said the 4th mechanical arm assembly 11D to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize said the 4th mechanical arm assembly 11D to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533.After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize said the 4th mechanical arm assembly 11D to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize the said second mechanical arm assembly 11B to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, the said first mechanical arm assembly 11A followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9A place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
In one aspect, said transfer path A 7May be partitioned into is two transfer step; Said two steps possibly need said the 4th mechanical arm assembly 11D to pick up said base material from said heat exchanger chambers 533; And said base material is sent to said the 4th transmission position 9D, then pick up said base material and be sent to said process chamber 534 at this by the said second mechanical arm assembly 11B.In one aspect, each transmits chamber all can be by any one central robot arm component (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C and the 4th mechanical arm assembly 11D) access.In another aspect, the said second mechanical arm assembly 11B can pick up said base material and said base material is sent to said process chamber 534 from said heat exchanger chambers 533.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
The configuration of the 3rd cluster tool
A. System configuration
Fig. 3 A is the plane graph of an embodiment of cluster tool 10, and said cluster tool has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), three mechanical arm assembly 11 (Fig. 9-11 on every side; Element 11A, 11B and the 11C of Fig. 3 A), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the said processing procedure frame.Embodiment shown in Fig. 3 A is identical with the configuration shown in Figure 1A-F; Except with the said first mechanical arm assembly 11A with transmit that side 60A that position 9A is arranged on the said first processing procedure frame 60 goes up and will said three-mechanical arm assembly 11C with transmit side 80B that position 9C is arranged on the said second processing procedure frame 80 goes up, so use the components identical symbol in due course.An advantage of this cluster tool preparation method is that said system still can utilize other two mechanical arms to continue to handle base material if one of them mechanical arm of said central module 25 can't operate.This collocation method is also removed, or minimizes, and for the needs of crash-proof controlling features, overlaps because removed the entity of the mechanical arm of next-door neighbour's setting when transmitting said base material between the process chamber of said mechanical arm in being installed in each processing procedure frame.Another advantage of this collocation method is to reach flexibly modularization framework and lets the configurable needed process chamber of production capacity that said user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.
In this configuration; The said first mechanical arm assembly 11A is suitable for the said process chamber in the said first processing procedure frame 60 of side 60A access; Said three-mechanical arm assembly 11C is suitable for the said process chamber in the said second processing procedure frame 80 of side 80B access; And the said second mechanical arm assembly 11B is suitable for the said process chamber in the said first processing procedure frame 60 of side 60B access, and the said process chamber in the said second processing procedure frame 80 of side 80A access.In one aspect, the side 80A of the side 60B of the said first processing procedure frame 60, the said second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (describing hereinafter) that moves horizontally of each mechanical arm assembly (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C).
The said first mechanical arm assembly 11A, the said second mechanical arm assembly 11B and said three-mechanical arm assembly 11C can be suitable for allowing " overlapping " between each mechanical arm together with said system controller 101, and the logic scheduler of allowing said system controller is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool.The cooperation of use cluster tool framework and system controller 101 improves CoO with the use that maximizes said cluster tool can let the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 3 B illustrates the example of the transfer step program of passing through the cluster tool shown in Fig. 3 A that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on 9C place, said transmission position, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize the said second mechanical arm assembly 11B to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize the said second mechanical arm assembly 11B to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize the said second mechanical arm assembly 11B to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, the said first mechanical arm assembly 11A followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9A place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
Four group collection tool configuration
A. System configuration
Fig. 4 A is the plane graph of an embodiment of cluster tool 10, and said cluster tool has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), two mechanical arm assembly 11 (Fig. 9-11 on every side; Element 11B and the 11C of Fig. 4 A), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the said processing procedure frame.Embodiment shown in Fig. 4 A is identical with the configuration shown in Fig. 3 A, said first mechanical arm assembly 11A on the side 60A that has got rid of the said first processing procedure frame 60 and the transmission position 9A, therefore uses the components identical symbol in due course.An advantage of this system's preparation method is the access easily for being installed in the chamber in the said first processing procedure frame 60 is provided, and therefore makes the one or more process chambers that are installed in the said first processing procedure frame 60 still when handling base material, roll off the production line and to reach the standard grade at said cluster tool.Another advantage is that the said three-mechanical arm assembly 11C and/or the second processing procedure frame 80 can be reached the standard grade when utilizing the said second mechanical arm assembly 11B to handle base material.This disposes the process chamber with short chamber processing procedure time of also allowing in the processing procedure program, using often and is arranged in the said second processing procedure frame 80; Therefore those chambers can be served by said two central robot arms (being element 11B and 11C); Transmit the restriction bottleneck and reduce mechanical arm, and therefore improve system's production capacity.This collocation method also removes or minimizes between the process chamber of said mechanical arm in being installed in the processing procedure frame when transmitting said base material the needs for the crash-proof controlling features, invades because removed the entity that each mechanical arm gets into the space of other mechanical arms.Another advantage of this collocation method is to reach flexibly modularization framework and lets the configurable needed process chamber of production capacity that said user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.
In this configuration; Said three-mechanical arm assembly 11C is suitable between side 80A access and the said process chamber in the said second processing procedure frame 80, transmitting base material; And the said second mechanical arm assembly 11B is suitable for from transmitting base material between side 60B access and the said process chamber in the said first processing procedure frame 60, and between the said process chamber of side 80A in the said second processing procedure frame 80, transmits base material.In one aspect, the side 80A of the side 60B of the said first processing procedure frame 60, the said second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (describing hereinafter) that moves horizontally of each mechanical arm assembly (i.e. the second mechanical arm assembly 11B, three-mechanical arm assembly 11C).
As as discussed above, said second mechanical arm assembly 11B and said three-mechanical arm assembly 11C can be suitable for allowing said system controller together with said system controller 101 logic scheduler is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool.The cooperation of use cluster tool framework and system controller 101 improves CoO with the use that maximizes said cluster tool can let the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 4 B illustrates the example of the transfer step program of passing through the cluster tool shown in Fig. 4 A that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on 9B place, said transmission position, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize said three-mechanical arm assembly 11C to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize the said second mechanical arm assembly 11B to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize the said second mechanical arm assembly 11B to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, the said second mechanical arm assembly 11B followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9A place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
The configuration of the 5th cluster tool
A. System configuration
Fig. 5 A is the plane graph of an embodiment of cluster tool 10, and said cluster tool has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on single processing procedure frame (element 60) four mechanical arm assembly 11 (Fig. 9-11 on every side; Element 11A, 11B, 11C and the 11D of Fig. 5 A), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame 60.Embodiment shown in Fig. 5 A and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce have three or still less the base material that system stood of mechanical arm transmit bottleneck because use four mechanical arms that can the access of redundant ground be installed in the said process chamber in the said processing procedure frame 60.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and the said bottleneck fabrication steps quantity in the processing procedure program usually is a lot of and take place in the situation that the chamber processing procedure time is very short.
In this collocation method; Said first mechanical arm assembly 11A and the said second mechanical arm assembly 11B are suitable between side 60A access and the said process chamber in said processing procedure frame 60, transmitting base material, and said three-mechanical arm assembly 11C and said the 4th mechanical arm assembly 11D are suitable between side 60B access and the said process chamber in said processing procedure frame 60, transmitting base material.
Said first mechanical arm assembly 11A and the said second mechanical arm assembly 11B; Reach said three-mechanical arm assembly 11C and said the 4th mechanical arm assembly 11D and can be suitable for allowing " overlapping " between each mechanical arm together with said system controller 101; The logic scheduler of the said system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool; And also can use CAS, transmit base material through said system with best mode to allow mechanical arm.The cooperation of use cluster tool framework and system controller 101 improves CoO with the use that maximizes said cluster tool can let the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 5 B illustrates the example of the transfer step program of passing through the cluster tool shown in Fig. 5 A that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on 9C place, said transmission position, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said three-mechanical arm assembly 11C to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said the 4th mechanical arm assembly 11D to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize said the 4th mechanical arm assembly 11D to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize the said first mechanical arm assembly 11A to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize the said first mechanical arm assembly 11A to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, the said second mechanical arm assembly 11B followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9B place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
The configuration of the 6th cluster tool
A. System configuration
Fig. 6 A is the plane graph of an embodiment of cluster tool 10, and its said cluster tool has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), eight mechanical arm assembly 11 (Fig. 9-11 on every side; Element 11A, 11B, 11C and the 11D-11H of Fig. 6 A), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame.Embodiment shown in Fig. 6 A and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce the base material that system stood with less mechanical arm and transmit bottleneck, because use eight mechanical arms that can the access of redundant ground be installed in said processing procedure frame 60 and 80 interior said process chambers.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and the said bottleneck fabrication steps quantity in the processing procedure program usually is a lot of and take place in the situation that the chamber processing procedure time is very short.
In this collocation method; Said first mechanical arm assembly 11A and the said second mechanical arm assembly 11B are suitable for the said process chamber in the said first processing procedure frame 60 of side 60A access, and said the 7th mechanical arm assembly 11G and said the 8th mechanical arm assembly 11H are suitable for the said process chamber in the said second processing procedure frame 80 of side 80A access.In one aspect, said three-mechanical arm assembly 11C and said the 4th mechanical arm assembly 11D can be from the said process chambers in the said first processing procedure frame 60 of side 60B access.In one aspect, said the 5th mechanical arm assembly 11E and said the 6th mechanical arm assembly 11F are suitable for the said process chamber in the said second processing procedure frame 80 of side 80B access.In one aspect; Said the 4th mechanical arm assembly 11D is further adapted for the said process chamber in the said second processing procedure frame 80 of side 80B access, and said the 5th mechanical arm assembly 11E is further adapted for the said process chamber in the said first processing procedure frame 60 of side 60B access.
Said mechanical arm assembly 11A-H can be suitable for allowing " overlapping " between each mechanical arm together with said system controller 101; The logic scheduler of the said system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool; And also can use CAS, transmit base material through said system with best mode to allow mechanical arm.The cooperation of use cluster tool framework and system controller 101 improves CoO with the use that maximizes said cluster tool can let the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 6 B illustrates the example of the first processing procedure program of the transfer step of passing through the cluster tool shown in Fig. 6 A that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to and transmit chamber 9F, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said the 6th mechanical arm assembly 11F to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said the 6th mechanical arm assembly 11F to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize said the 6th mechanical arm assembly 11F to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize said the 5th mechanical arm assembly 11E to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize said the 5th mechanical arm assembly 11E to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, said the 5th mechanical arm assembly 11E followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9E place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
Fig. 6 B also illustrates the example of the second processing procedure program with transfer step of accomplishing simultaneously with said first program, and the said second processing procedure program is used the different process chambers in the said second processing procedure frame 80.Shown in Fig. 1 C-D, the said first processing procedure frame generally contains some with the second processing procedure frame and is suitable for carrying out the process chamber (the for example BC1-6 of the CD1-8 of Fig. 1 C, Fig. 1 D) that the fabrication steps of expection processing procedure program is carried out in identical being used for.Therefore, in this collocation method, each processing procedure program any one process chamber that is installed in the said processing procedure frame all capable of using is carried out.In an example, the said second processing procedure program is and the identical processing procedure program of the said first processing procedure program (discussing in front) that the said second processing procedure program contains identical transfer step A 1-A 10, be depicted as A at this 1'-A 10', use the said the 7th and the 8th central robot arm (being element 11G-11H) respectively, but not the said the 5th and the 6th central robot arm component (being element 11E-11F), as stated as.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
The configuration of the 7th cluster tool
A. System configuration
Fig. 6 C is the plane graph with an embodiment of the similar cluster tool 10 of the configuration shown in Fig. 6 A, except removing one of them mechanical arm assembly (being mechanical arm assembly 11D), when reducing system-wide, high system's production capacity to be provided still.Therefore, have front end robot arm component 15, rear robot arm component 40, system controller 101 and be arranged on two processing procedure framves (element 60 and 80), seven mechanical arm assembly 11 (Fig. 9-11 on every side at cluster tool 10 described in this configuration; The element 11A-11C of Fig. 6 C, and 11E-11H), all are suitable for carrying out at least one aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame.Embodiment shown in Fig. 6 C and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce the base material that system stood with less mechanical arm and transmit bottleneck, because use seven mechanical arms that can the access of redundant ground be installed in said processing procedure frame 60 and 80 interior said process chambers.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and the said bottleneck fabrication steps quantity in the processing procedure program usually is a lot of and take place in the situation that the chamber processing procedure time is very short.
In this collocation method; Said first mechanical arm assembly 11A and the said second mechanical arm assembly 11B are suitable for the said process chamber in the said first processing procedure frame 60 of side 60A access, and said the 7th mechanical arm assembly 11G and said the 8th mechanical arm assembly 11H are suitable for the said process chamber in the said second processing procedure frame 80 of side 80A access.In one aspect, said three-mechanical arm assembly 11C and said the 5th mechanical arm assembly 11E are suitable for the said process chamber in the said first processing procedure frame 60 of side 60B access.In one aspect, said the 5th mechanical arm assembly 11E and said the 6th mechanical arm assembly 11F are suitable for the said process chamber in the said second processing procedure frame 80 of side 80B access.
Said mechanical arm assembly 11A-11C and 11E-11H can be suitable for allowing " overlapping " between each mechanical arm together with said system controller 101; The logic scheduler of the said system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in the said cluster tool; And also can use CAS, transmit base material through said system with best mode to allow mechanical arm.The cooperation of use cluster tool framework and system controller 101 improves CoO with the use that maximizes said cluster tool can let the wafer history have more repeatability, and improves system dependability.
B. The convey program example
Fig. 6 D illustrates the example of the first processing procedure program of the transfer step of passing through the cluster tool shown in Fig. 6 C that can be used to accomplish the described processing procedure program of Fig. 1 F.In this embodiment, said base material is to be shifted out from wafer case assembly 105 (object #105D) by said front end robot arm component 15, and follows transfer path A 1Be sent to and transmit chamber 9F, therefore can on said base material, accomplish said transmission step 502.In case accomplish said transmission step 502, then utilize said the 6th mechanical arm assembly 11F to follow said transfer path A 2Said base material is sent to first process chamber 531, on said base material, accomplishes in this fabrication steps 504.After accomplishing said fabrication steps 504, then utilize said the 6th mechanical arm assembly 11F to follow said transfer path A 3Said base material is sent to said second process chamber 532.After carrying out said fabrication steps 506, then utilize said the 6th mechanical arm assembly 11F to transmit said base material, follow said transfer path A 4, to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 508, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 5,, carry out fabrication steps 510 at this to said outside process system 536.After carrying out fabrication steps 510, then utilize said rear robot arm component 40 to transmit said base material, follow said transfer path A 6,, carry out fabrication steps 512 at this to said heat exchanger chambers 533 (Fig. 7 A).After carrying out said fabrication steps 512, then utilize said the 5th mechanical arm assembly 11E to transmit said base material, follow said transfer path A 7,, carry out fabrication steps 514 at this to said process chamber 534.Utilize said the 5th mechanical arm assembly 11E to follow said transfer path A then 8Transmit said base material.After said fabrication steps 516 was accomplished, said the 5th mechanical arm assembly 11E followed said transfer path A 9Said base material is sent to the transmission chamber that is arranged on 9E place, said transmission position.After carrying out said transmission step 518, then utilize said front end robot arm component 15 to transmit said base material, follow said transfer path A 10, to said wafer case assembly 105D.
Fig. 6 D also illustrates the example of the second processing procedure program with transfer step of accomplishing simultaneously with said first program, and the said second processing procedure program is used the different process chambers in the said second processing procedure frame 80.Shown in Fig. 1 C-D, the said first processing procedure frame generally contains some with the second processing procedure frame and is suitable for carrying out the process chamber (the for example BC1-6 of the CD1-8 of Fig. 1 C, Fig. 1 D) that the fabrication steps of expection processing procedure program is carried out in identical being used for.Therefore, in this collocation method, each processing procedure program any one process chamber that is installed in the said processing procedure frame all capable of using is carried out.In an example, the said second processing procedure program is and the identical processing procedure program of the said first processing procedure program (discussing in front) that the said second processing procedure program contains identical transfer step A 1-A 10, be depicted as A at this 1'-A 10', use the said the 7th and the 8th central robot arm (being element 11G-11H) respectively, but not the said the 5th and the 6th central robot arm component (being element 11E-11F), as stated as.
In addition; In one embodiment; Therefore said cluster tool 10 is not connected or is communicated with outside process system 536, and said rear robot arm component 40 is not the part of said cluster tool configuration, and said transfer step A5-A6 and fabrication steps 510 can not carried out on said base material.In this configuration, all fabrication steps and transfer step are all carried out in said cluster tool 10.
The rear robot arm component
In one embodiment; Shown in Fig. 1-6; Said central module 25 contains rear robot arm component 40, and said rear robot arm component is suitable for externally being retained between the said process chamber in the said second processing procedure frame 80 of module 5 and for example heat exchanger chambers 533 and transmits base material.Referring to Fig. 1 E, in one aspect in, said rear robot arm component 40 generally contains the routine with single arm/blade 40E selects the compliance arm (SCARA) that puts together machines.In another embodiment, said rear robot arm component 40 can be a SCARA type mechanical arm, and said mechanical arm has two arm that can independently control/blade (not shown), exchanges base material and/or transmits base material with the mode with two group.Said two arm that can independently control/blade type mechanical arms can have advantage, for example, when said mechanical arm must be before next base material be put in same position earlier when a desired location removes a base material.Illustrative two arm that can independently control/blade type mechanical arms can be buied by the Asyst Technologies company of Vermont, California.Though Fig. 1-6 illustrates the collocation method that contains rear robot arm component 40, an embodiment of said cluster tool 10 does not contain rear robot arm component 40.
Fig. 7 A illustrates an embodiment of the heat exchanger chambers 533 in the support chamber 165 (Fig. 1 D) that can be arranged on processing procedure frame (for example element 60,80).In one embodiment, said heat exchanger chambers 533 is suitable for receiving and keeping somewhere base material, and makes at least two mechanical arms in the said cluster tool 10 can deposit or pick up base material.In one aspect, at least one mechanical arm in said rear robot arm component 40 and the said central module 25 be suitable for from said heat exchanger chambers 533 deposit/or receive base material.Said heat exchanger chambers 533 generally contains substrate support assembly 601, seal 602 and be formed on said at least one access port 603 that seals on 602 the wall.Said substrate support assembly 601 generally has a plurality of support finger pieces 610 (shown in Fig. 7 A six), and those finger pieces have base material receiving surface 611 and are arranged on said lip-deep base material to support and to keep somewhere.Said to seal 602 generally be the structure with wall of the said substrate support assembly 601 of one or more inclosures, controlling the context of said base material, in the time of in said base material is retained in said heat exchanger chambers 533.Said access port 603 generally is to be positioned at the said opening that seals on 602 walls, and said opening makes the exterior mechanical arm can access and pick up or put down base material to said support finger piece 610.In one aspect; Said substrate support assembly 601 is suitable for allowing that base material is set on the said base material receiving surface 611 and removes from said base material receiving surface 611, by being suitable for said 602 the two or more mechanical arms that seal of angle access of at least 90 degree separately.
In an embodiment of said cluster tool 10; Illustrate at Fig. 7 B; Therefore the pedestal 40A of said rear robot arm component 40 is installed on the supporting seat 40C that is connected with slide track component 40B, and said pedestal 40A can be arranged on any point on the slide track component 40B length direction.In this collocation method, the process chambers that said rear robot arm component 40 can be suitable in the said first processing procedure frame 60, the said second processing procedure frame 80 and/or the said external module 5 transmit base material.Said slide track component 40B generally can contain linear spherical bearing slide rail (not shown) and linear actuator (not shown), and this knows in the art, said supporting seat 40C to be set and to be retained in the rear robot arm component 40 on the said supporting seat 40C.Said linear actuator can be can be by the linear brushless servo motor of the driving that the Danaher Motion company of Illinois State Wood Dale buys.Shown in Fig. 7 B, said slide track component 40B is oriented on the y direction.In this collocation method; For fear of with said mechanical arm assembly 11A, 11B or 11C collision, said controller can be suitable for said slide track component 40B removable and can not clash into other central robot arm components the time (element 11A, 11B etc.) only move said rear robot arm component 40.In one embodiment, said rear robot arm component 40 is to be installed on the slide track component 40B, and said slide track component can not disturb other central robot arm components through being arranged so that said rear robot arm component.
Environment control
Fig. 8 A illustrates an embodiment of the cluster tool 10 with additional environment control assembly 110, and said assembly 110 is enclosed said cluster tool 10 so that in check processing environment to be provided, to carry out each base material treatment step of expection processing procedure program therein.Fig. 8 A is illustrated in the configuration that said process chamber is provided with the cluster tool 10 shown in Figure 1A that environment seals.Said environment control assembly 110 generally contains one or more filter element 112, one or more fan (not shown) and cluster tool pedestal 10A optionally.In one aspect, one or more walls 113 are added into said cluster tool 10 enclosing said cluster tool 10, and provide in check environment to carry out said substrate process step.In general, said environment control assembly 110 is suitable for control air flow velocity, flow pattern (regime) (for example laminar flow (laminar flow) or turbulent flow (turbulent flow)), and the particle contamination degree in the said cluster tool 10.In one aspect, said environment control assembly 110 is other typical processes parameters of the compatible ventilation of may command air themperature, relative humidity, airborne static content and capable of using and conventional dust free room and the control of air-conditioning (HVAC) system also.During operation; Said environment control assembly 110 utilizes the fan (not shown) to import air from being positioned at said cluster tool 10 outside source (not shown) or zones; Said fan then transmits air through filter 111; Leave said cluster tool 10 then through said cluster tool 10, and through said cluster tool pedestal 10A.In one aspect, said filter 111 is high-effect particulate air (HEPA) filters.Said cluster tool pedestal 10A generally is the floor or the bottom section of said cluster tool, and contains some slit 10B (Figure 12 A) or allow other micropores that promoted to leave through the air of said cluster tool 10 said cluster tool 10 by said (a bit) fan.
Fig. 8 A further illustrates an embodiment of said environment control assembly 110; Said environment control assembly has the environment control assembly 110A-C of a plurality of separation; Those assemblies provide in check processing environment, to carry out each base material treatment step of expection processing procedure program therein.The environment control assembly 110A-C of each separation is arranged on each the mechanical arm assembly 11 in the said central module 25 (for example the element 11A of Fig. 1-6,11B etc.), separately to control the air-flow on each mechanical arm assembly 11.This collocation method has superiority in the collocation method shown in Fig. 3 A and the 4A especially, because said mechanical arm assembly is by the entity isolation each other of said processing procedure frame.The environment control assembly 110A-C of each separation generally contains filter element 112, fan (not shown) and cluster tool pedestal 10A optionally, to discharge controlled atmosphere.
Fig. 8 B illustrates the profile of environment control assembly 110, and said environment control assembly has single the filter element 112 that is installed on the cluster tool 10, and is to use with the y section plane parallel with the z direction to watch.In this collocation method, said environment control assembly 110 has single filter element 112, one or more fan (not shown) and cluster tool pedestal 10A.In this collocation method, air gets in the said cluster tool 10 (element A) from said environment control assembly 110 vertical transmission, around said processing procedure frame 60,80 and mechanical arm assembly 11A-C, leaves said cluster tool pedestal 10A then.In one aspect, said wall 113 is suitable in said cluster tool 10, enclosing and the formation process zone, and the said process chamber processing environment on every side that therefore is retained in the said processing procedure frame 60,80 can be controlled by the air that said environment control assembly 110 transmits.
Fig. 8 C illustrates the profile of environment control assembly 110, and said environment control assembly has the environment control assembly 110A-C of a plurality of separation that are installed on the cluster tool 10, and is to use with the y section plane parallel with the z direction to watch (seeing Figure 1A).In this collocation method; Said environment control assembly 110 contains cluster tool pedestal 10A, three environment control assembly 110A-C, the first processing procedure frame 60; The said first processing procedure frame extends to lower surface 114 or the said lower surface top of said environment control assembly 110A-C; And the second processing procedure frame 80, the said second processing procedure frame extends to lower surface 114 or the said lower surface top of said environment control assembly 110A-C.In general, each of said three environment control assembly 110A-C all contains one or more fan (not shown) and filter 111.In this collocation method, air vertically is sent in the said cluster tool 10 (seeing element A) from each environment control assembly 110A-C, between between said processing procedure frame 60,80 and mechanical arm assembly 11A-C, leaves said cluster tool pedestal 10A then.In one aspect, said wall 113 is suitable in said cluster tool 10, enclosing and the formation process zone, and the said process chamber processing environment on every side that therefore is retained in the said processing procedure frame 60,80 can be controlled by the air that said environment control assembly 110 transmits.
In another embodiment, said cluster tool 10 is to place the dust free room environment, and said dust free room environment is suitable for transmitting the air that contains small amount of fines with goal pace and passes through said cluster tool 10, leaves said cluster tool pedestal 10A then.In this collocation method, do not need said environment control assembly 110 usually, therefore can not use.The ability of the environment around control air character and the said process chamber that is retained in the said cluster tool 10 is in the control of accumulation of particulates and/or to minimize be a key factor, the device qualification rate problem that said accumulation of particulates can cause particle contamination to cause.
The mechanical arm assembly
In general; Each embodiment of said cluster tool 10 is superior to prior art arrangement; Because the mechanical arm size of components of dwindling (the for example element 11 of Fig. 9 A) causes the cluster tool floor space to dwindle, and minimize and transmit the mechanical arm design that entity that mechanical arm during the base material process gets into the space that other cluster tool spare parts (for example mechanical arm, process chamber) occupy is invaded.The entity that reduces is invaded the collision of avoiding mechanical arm and other spare parts.When reducing said cluster tool floor space, the embodiment of said mechanical arm also has specific advantages, because minimizing needs control to carry out the quantity of the axle that transmits action.Be important in this respect, because this can improve the reliability of said mechanical arm assembly, thereby the reliability of said cluster tool.Importance in this respect can be directly proportional with the reliability product of each element in the said system and more clear by the reliability of noticing system.Therefore; The mechanical arm that has three on-line time and be an actuator of 99% is that 99% actuator is good than having four on-line time always; Because each online implementing time that all has three actuators of 99% on-line time is 97.03%, each four actuator that all have 99% on-line time then is 96.06%.
The embodiment of said cluster tool 10 is also because minimizing need be used for transmission chamber (the for example element 9A-C of Figure 1B) quantity that base material transmits through said cluster tool is superior to prior art arrangement.The configuration of prior art cluster tool is installed two or more usually and is transmitted chamber in said processing procedure program; Or have temporary transient base material indwelling station, therefore said cluster tool mechanical arm can and be arranged between another mechanical arm on the middle position between one or more other process chambers at a mechanical arm on the middle position that is being arranged at during the said processing procedure program between said one or more process chamber and transmit base material.Successively base material is seated in interior space of the processes waste time in a plurality of transmission chambers of the fabrication steps that can not carry out subsequently, the workability that reduces said (a bit) mechanical arm, the said cluster tool of waste and increases the loss of said (a bit) mechanical arm.The increase of said transmission step also has harmful effect to the element qualification rate, stems from the increase that base material changes the hand number of times, and this can increase the particle contamination amount of dorsal part.In addition, the substrate process program that contains a plurality of transmission step can have different base material wafer histories naturally, expends the time in said transmission chamber only if control each base material.The time that is controlled in the said transmission chamber can increase system complexity, because increased process variables, and probably can damage accessible maximum base material production capacity.Aspect of the present invention; Said person; Avoid the difficulty place of these prior art arrangement; Because only being to carry out on the base material before the processing procedure and in all fabrication steps usually, said cluster tool configuration after accomplishing on the base material, has said transmission step (the for example step 502 of Fig. 1 F and 518) all; Therefore only can have influence on the base material wafer history a little or not usually, and also can not increase the base material delivery time of said processing procedure program significantly, because removed the transmission step between the said fabrication steps.
Receive in the situation of mechanical arm restriction in system's production capacity, the maximum base material production capacity of said cluster tool is to control by accomplishing said processing procedure program mechanical arm total quantity that is moved and the time that need be used for said mechanical arm is moved.The time that the required completion expection of mechanical arm is moved considered by distance, the base material cleannes between mechanical arm hardware, process chamber and system's control limit is limit.Usually the mechanical arm traveling time can not change because of the difference of mechanical arm type significantly, and rather consistent on industry.Therefore, system's production capacity that mobile less mechanical arm can be accomplished the cluster tool of processing procedure program can move to accomplish the cluster tool height of processing procedure program than needs are more, for example contain the cluster tool of a plurality of transmission step.
The configuration of flute card mechanical arm
Fig. 9 A illustrates an embodiment who can be used to as the mechanical arm assembly 11 of one or more mechanical arm assemblies 11 (the for example element 11A-H shown in Fig. 1-6).Said mechanical arm assembly 11 generally contains mechanical arm nextport hardware component NextPort 85, one or more vertical mechanical arm assembly 95 and one or more horizontal mechanical arm component 90.Therefore the instruction that said system controller 101 capable of using is passed on, pulling together to move base material be arranged on arbitrary expection x, y and the z position in the said cluster tool 10 by said mechanical arm nextport hardware component NextPort 85, vertical mechanical arm assembly 95 and horizontal mechanical arm component 90.
Said mechanical arm nextport hardware component NextPort 85 generally contains one or more transfer robot assemblies 86, and one or more base materials are kept somewhere, transmitted and be provided with in the instruction that said transfer robot assembly is suitable for utilizing said system controller 101 to pass on.In one embodiment, the transfer robot assembly 86 shown in Fig. 9-11 is suitable on horizontal plane, transmitting base material, for example comprises the plane of X shown in Figure 11 A and Y direction, because each transfer robot assembly 86 spare parts is mobile.In one aspect, said transfer robot assembly 86 is suitable on parallel with the substrate support surface 87C (Figure 10 C) of said mechanical arm blade 87 usually plane, transmitting base material.Figure 10 A illustrates an embodiment of said mechanical arm nextport hardware component NextPort 85, and said mechanical arm nextport hardware component NextPort contains single the transfer robot assembly 86 that is suitable for transmitting base material.Figure 10 B illustrates an embodiment of said mechanical arm nextport hardware component NextPort 85; Said mechanical arm nextport hardware component NextPort contains two transfer robot assemblies 86 that are provided with in the opposite direction each other, therefore can said mechanical arm blade 87A-B (and first connecting elements 310A-310B) be separated a bit of distance and put.Configuration shown in Figure 10 B; Or " on/down " type mechanical arm blade arrangement; Can have superiority; For example, before wanting to put the next base material of desiring in the same process chamber, to handle, from process chamber, remove base material earlier, and need not let said mechanical arm nextport hardware component NextPort 85 out of position when said " removing " base material being moved to another chamber (i.e. " exchange " base material).In one aspect of the method, the said mechanical arm of this collocation method tolerable fills up all mechanical arm blades, is that one group mode transmits the desired location in said base material to the said instrument with two or more base materials then.Base material is divided into two or more one group processing procedures can transmits the base material production capacity that the required mechanical arm amount of movement of said base material help improve said cluster tool by reducing.Though the transfer robot assembly 86 that Figure 10 A-B is described is mechanical arms (Figure 10 C) that two bars (bar) link mechanical arm 305 types, this configuration and be not intended to limit can with direction and the type at the mechanical arm assembly of this embodiment that discusses and usefulness.In general; Embodiment with mechanical arm nextport hardware component NextPort 85 of two transfer robot assemblies 86; Shown in Figure 10 B; Therefore have two transfer robot assemblies 86 that contain identical basic spare part, also be intended to describe the spare part in said (a bit) two-shipper tool arm component aspect for the discussion of single transfer robot assembly 86 after.
An advantage of cluster tool shown in Fig. 9-11 and mechanical arm configuration is to minimize the size around the zone of transfer robot assembly 86, and said therein mechanical arm spare part and base material can move freely and can not collide with said mechanical arm assembly 11 other outside cluster tool spare parts.The zone that mechanical arm and base material can move freely therein is called as " transit area " (element 91 of Figure 11 C).Said transit area 91 generally may be defined as when base material is retained on the mechanical arm blade, said mechanical arm can move freely and not can with the space (x, y and z direction) of other cluster tool spare parts collision.Though can said transit area be described as the space, the most important aspect of common said transit area is the horizontal area (x and y direction) that said transit area occupies, because said horizontal area directly influences the floor space and the CoO of cluster tool.The horizontal area of said transit area is a key factor when defining the floor space of said cluster tool; Because the horizontal zero assembly of said transit area is more little, each mechanical arm assembly (for example the element 11A of Fig. 1-6,11B, 11C or the like) just can the closer to each other or mechanical arm just can be the closer to the processing procedure frame.A factor that defines said transit area size is needs of guaranteeing that said transit area is enough big, to reduce or to avoid the mechanical arm entity to invade the space that other cluster tool spare parts occupy.Said embodiment is superior to prior art, stems from said embodiment with the mode of said mechanical arm assembly 86 spare parts withdrawals (retract) in the directed transit area of the said direction of transfer (x direction) that moves horizontally assembly 90.
Referring to Figure 11 J, said horizontal area generally may be partitioned into two parts, width " W 1" (y direction) and length " L " (x direction).Said embodiment has further advantage, because center on the reduced width " W of the empty regions of said mechanical arm 1" guarantee that said mechanical arm can be arranged on base material in the process chamber reliably.Can be by noticing that conventional SCARA mechanical arm (the for example object CR of Figure 11 K) generally had in when withdrawal, extend arm (the object A for example of a segment distance from said mechanical arm central authorities (for example object C) 1) and understand the width " W that dwindles 1" be superior to conventional many bar and link and select the put together machines benefit of arm (SCARA) type mechanical arm of compliance, it (is width " W that conventional SCARA mechanical arm increases said mechanical arm relative distance to each other 2"), because the zone around the said mechanical arm must headroom, so that said arm spare part can spin orientation and can not disturb other cluster tool spare parts (for example, other mechanical arms, processing procedure frame spare part).Also some embodiment than said is complicated for conventional SCARA type mechanical arm collocation method, because they also have more axles that need control more, with said base material orientation and be arranged in the process chamber.Referring to Figure 11 J, in one aspect in, the width W of said transit area 91 1Than said substrate sizes about 5% to about 50% (being the base material " S " of Figure 11 J).At base material is in the example of semiconductor wafer of 300mm, the width W of said transit area 1Understand between between about 315mm and about 450mm, and preferably between between about 320mm and about 360mm.Referring to Figure 1B, in an example, for the substrate process instrument of 300mm, the distance between the side 80A of the side 60B of the said first processing procedure frame 60 and the said second processing procedure frame 80 can be about 945mm (for example 315%).In another example, for the substrate process instrument of 300mm, the distance between the side 80A of the side 60B of the said first processing procedure frame 60 and the said second processing procedure frame 80 can be about 1350mm (for example 450%).It should be noted that said transit area generally is intended to describe said mechanical arm zone on every side; The withdrawal after picking up the base material that is positioned on the desired location of wherein in a single day said mechanical arm blade, said mechanical arm can move in said zone till the original position (SP) outside said mechanical arm moves to the next process chamber in the said processing procedure program.
Two bars link the mechanical arm assembly
Figure 10 A and 10C illustrate the embodiment that two bars link the transfer robot assembly 86 of mechanical arm 305 types, and said transfer robot assembly generally contains supporting bracket 321, first connecting elements 310, mechanical arm blade 87, drive system 312 (Figure 10 C), seal 313 and motor 320.In this configuration, said transfer robot assembly 86 is to be connected with said vertical moving assembly 95 through the supporting bracket 321 that is connected with said vertical actuator assemblies 560 (Figure 13 A).Figure 10 C illustrates the side cut away view of an embodiment that the said pair of bar links the transfer robot assembly 86 of mechanical arm 305 types.The drive system 312 of said pair of bar binding mechanical arm 305 generally contains one or more power conveying elements (power transmitting element); Those elements are suitable for by moving of said power conveying element said mechanical arm blade 87 being moved, for example by the rotation of motor 320.In general, said drive system 312 can contain the conventional gear that is suitable for sending from the rotation of an element or transfer action to next element, pulley or the like.Generally be intended to describe the spare part that is rotatably connected with second spare part through belt, tusk or other typical way at this employed " gear " speech, and be to be suitable for moving to another element from an element transmission.In general; Gear; As this user; Can be conventional gear type device or pulley type device, said device can comprise but for example be not limited to spur gear (spur gear), bevel gear (bevel gear), tooth bar (rack) and/or pinion (pinion), worm gear (worm gear), timing disc (timing pulley), and pulley concial disk spare parts such as (v-belt pulley).In one aspect, said drive system 312 shown in Figure 10 C, contains first pulley system 355 and second pulley system 361.Said first pulley system 355 has first pulley 358 that is connected with said motor 320; Second pulley 356 that is connected with said first connecting elements 310; And the belt 359 that connects said first pulley 358 and said second pulley 356, therefore said motor 320 can drive said first connecting elements 310.In one aspect, a plurality of bearing 356A are suitable for allowing the axle V of said second pulley 356 around said the 3rd pulley 354 1Rotation.
Said second pulley system 361 has the 3rd pulley 354 that is connected with said supporting bracket 321, the 4th pulley 352 that is connected with said blade 87 and the belt 362 that connects said the 3rd pulley 354 and said the 4th pulley 352, and therefore the rotation of said first connecting elements 310 can make said blade 87 rotate (the pivot V of Figure 11 A around the bearing axis that is connected with said first connecting elements 310 353 2).When transmitting base material; Said first pulley 358 of said motor driven; Said first pulley causes said second pulley 356 and 310 rotations of first connecting elements, and said first connecting elements 310 is transferred because said first connecting elements 310 rotates (angular rotation) and makes 352 rotations of said the 4th pulley with the angle of belt 362 around the 3rd static pulley 354.In one embodiment, said motor 320 is suitable for forming closed-loop control system with system controller 101, the position, angle that said closed-loop control system is allowed said motor 320 with all can be controlled with all spare parts that are connected with said motor 320.In one aspect, said motor 320 is stepper motor or DC servo motor.
In one aspect, the gearratio of said first pulley system 355 and second pulley system 361 (for example diameter ratio, gear teeth quantity ratio) can reach path (the element P among Figure 11 C or the 11D of expection through design 1) shape and decomposition, can be when said base material is transmitted mechanical arm assembly 86 and is provided with along said path movement.Can gearratio be defined as the driving element size with respect to the component size that is driven afterwards, perhaps in this example, for example, the gear teeth quantity of said the 3rd pulley 354 is with respect to the gear teeth quantitative proportion of said the 4th pulley 352.Therefore, for example, when said first connecting elements 310 rotation 270 was spent, this caused said blade 87 Rotate 180 degree, was equal to the gear ratio of 0.667 gearratio or 3: 2.Gear is intended to represent the D of said first gear than a speech 1Revolution causes the D of said second gear 2Revolution, or D 1: D 2Ratio.Therefore, said first gear rotation of proportional representation three circles can make said second gear take two turns in 3: 2, therefore the size of said first gear must be approximately three minutes of said second gear two.In one aspect, said the 3rd pulley 354 is between about 3: 1 to about 4: 3 for the gear ratio of said the 4th pulley 352, preferably between about 2: 1 and about 3: 2.
Figure 10 E illustrates another embodiment that two bars link the transfer robot assembly 86 of mechanical arm 305 types, and said transfer robot assembly generally contains supporting bracket 321, first connecting elements 310, mechanical arm blade 87, drive system 312 (Figure 10 E), seal 313, motor 320 and second motor 371.Embodiment shown in embodiment shown in Figure 10 E and Figure 10 C is similar, except adjusting at the position of rotation of the 3rd pulley 354 described in this collocation method said second motor 371 capable of using and from the instruction of said controller 101.Because Figure 10 C and 10E are similar, can use the components identical symbol for the sake of simplicity.In this collocation method, said transfer robot assembly 86 is connected with said vertical moving assembly 95 via the supporting bracket 321 that is connected with said vertical actuator assemblies 560 (Figure 13 A).Figure 10 E illustrates the sectional side view of an embodiment that the said pair of bar links the transfer robot assembly 86 of mechanical arm 305 types.The drive system 312 that said twin shaft links mechanical arm 305 generally contains two power conveying elements, and said two elements are suitable for utilizing moving of said motor 320 and/or said second motor 371 that said mechanical arm blade 87 is moved.In general, said drive system 312 can comprise the gear that is suitable for sending from the rotation of an element or transfer action to next element, pulley or the like.In one aspect, said drive system 312 contains first pulley system 355 and second pulley system 361.Said first pulley system 355 has first pulley 358 that is connected with said motor 320; Second pulley 356 that is connected with said first connecting elements 310; And the belt 359 that connects said first pulley 358 and said second pulley 356, therefore said motor 320 can drive said first connecting elements 310.In one aspect, a plurality of bearing 356A are suitable for allowing the axle V of said second pulley 356 around said the 3rd pulley 354 1Rotation.In one aspect, not shown in Figure 10 E, said bearing 356A is installed on the characteristic that is formed on the said supporting bracket 321, but not is formed on as shown in Figure 10 E on the 3rd pulley 354.
Said second pulley system 361 has the 3rd pulley 354 that is connected with said second motor, the 4th pulley 352 that is connected with said blade 87 and the belt 362 that connects said the 3rd pulley 354 and said the 4th pulley 352, and therefore the rotation of said first connecting elements 310 can make said blade 87 rotate (the pivot V of Figure 11 A around the bearing axis that is connected with said first connecting elements 310 353 2).Said second motor 371 is to be installed on the said supporting bracket 321.When transmitting base material; Said motor 320 drives said first pulley 358; Said first pulley causes said second pulley 356 and 310 rotations of first connecting elements, and said first connecting elements is transferred because said first connecting elements 310 makes 352 rotations of said the 4th pulley with belt 362 around the angle rotation of said the 3rd pulley 354.In this collocation method; With respect to the collocation method shown in Figure 10 C; Said the 3rd pulley can rotation when said first connecting elements 310 of said motor 320 rotations, and this makes the gear of 352 on said the 3rd pulley 354 and said the 4th pulley than changing by the relative motion of 352 on said the 3rd pulley 354 of adjustment and said the 4th pulley.Can notice that gear is than the said mechanical arm blade 87 of influence moving with respect to said first connecting elements 310.In this collocation method, the gear ratio is not fixed by the size of said gear, and can in the different phase of said mechanical arm blade transmission action, change, to reach the mechanical arm blade transfer path (seeing Figure 11 D) of expection.In one embodiment; Said motor 320, said second motor 371 and system controller 101 are suitable for forming closed-loop control system, and said system allows that the position, angle of the position, angle of said motor 320, said second motor 371 all can be controlled with all spare parts that are connected with these elements.In one aspect, said motor 320 is stepper motor or DC servo motor with said second motor 371.
Figure 11 A-D illustrates the plane graph of an embodiment of mechanical arm assembly 11, and said mechanical arm assembly uses two bars to link mechanical arm 305 collocation methods and transmits and be provided with on the desired location of base material in second process chamber of keeping somewhere in said cluster tool 10 532.Said pair of bar links mechanical arm 305 and generally contains motor 320 (Figure 10 A-C), first connecting elements 310 and mechanical arm blade 87; They make the spinning movement of said motor 320 cause 310 rotations of said first connecting elements through connection, said first connecting elements then cause said mechanical arm blade 87 along the expectation path rotation and/or shift.The advantage of this collocation method is that said mechanical arm is sent to base material on the desired location in the said cluster tool; And the spare part of said mechanical arm can not extend into instantly and occupied by another mechanical arm or system zero assembly, or the ability in the space that will be occupied.
Figure 11 A-C illustrates moving of the transfer robot assembly 86 that is contained in the mechanical arm nextport hardware component NextPort 85, by being transmitted at base material when getting into process chamber 532, immediately (for example corresponds respectively to the T of Figure 11 A-C 0-T 2) the plurality of continuous image of the position of each transfer robot assembly 86 spare parts is shown.Referring to Figure 11 A; When time T 0; Said transfer robot assembly 86 generally is to utilize said vertical moving assembly 95 spare parts to be arranged on the expection vertical orientations (z direction), and utilizes said assembly 90 spare parts that move horizontally to be arranged on the expection horizontal direction (x direction).At T 0The time the mechanical arm position, illustrate in Figure 11 A, can be called original position (object SP) at this.Referring to Figure 11 B, in time T 1The time, said first connecting elements 310 in said pair of bar binding mechanical arm 305 is with pivoting point V 1Be the center rotation, thereby the mechanical arm blade 87 that makes connection is around pivoting point V 2Shift also rotation, the position of said transfer robot assembly 86 on the x direction is to utilize saidly to move horizontally assembly 90 spare parts and said system controller 101 is adjusted simultaneously.Referring to Figure 11 C, in time T 2The time, said mechanical arm blade 87 on the y direction from the center line C of said transit area 91 1Extend desired distance (element Y 1), and be arranged on x direction position (the element X of expection 1) on, with (object FP) on the final position that base material is seated in expection, or the changing on the hand position of said process chamber 532.In case said mechanical arm is arranged on base material on the said final position, then can said base material be sent to said process chamber base material and holds on the spare part, for example (the for example element 532A of Figure 11 A) on lift pin or other substrate support spare parts.Said base material is being sent to after said process chamber holds on the spare part, then can be but the said mechanical arm blade of withdrawing out of order according to above-mentioned steps.
Figure 11 C further illustrates a possible path (object P of said base material central point 1) example, when said base material when said original position moves to said final position, shown in top Figure 11 A-C.In one aspect of the invention, the shape in said path can saidly move horizontally assembly 90 adjusts said first connecting elements 310 along the x direction position of rotation and changes with respect to the position of said transfer robot assembly 86 by utilizing.This characteristic has advantage, because the shape of said curve can be to be particularly suitable for allowing the said process chamber of mechanical arm blade 87 accesses and can not hold the transit area 91 that spare part (for example element 532A) collided or invaded other mechanical arms with each process chamber base material.It is obvious especially that this advantage becomes; When process chamber and can be from a plurality of different directions or orientation access the time through configuration, this therefore restriction can be used to reliably that the said base material of support base material holds the position and the orientation of spare part and avoids said mechanical arm blade 87 and said base material to hold the collision between spare part.
Figure 11 D illustrates and can be used to base material is transmitted the possible path P that gets into the desired location in the said process chamber 532 1-P 3Some examples.Path P shown in Figure 11 D-F 1-P 3Be intended to illustrate said base material central point, or the moving of the substrate support regional center point of said mechanical arm blade 87, when base material or substrate support zone are provided with by said mechanical arm assembly 11 spare parts.Base material transfer path P shown in Figure 11 D 2The path of base material when the transmission ratio of second pulley system 361 of transfer robot assembly 86 is 2: 1 is shown.Because the mobile of said base material is straight line when the gearratio that uses 2: 1, when this collocation method can be removed said mechanical arm blade 87 and on the Y direction, extends on directions X the needs of the said mechanical arm nextport hardware component NextPort 85 of transfer.The benefit that the mobile complexity of this collocation method reduces in some cases can by can't design not can said base material from said process chamber each homonymy transmit the reliable base material that disturbs said mechanical arm blade 87 when getting into said process chamber and hold spare part and influence.
Figure 11 E-11F illustrates the multistage that base material gets into said process chamber 532 and transmit to move.In one embodiment, the said multistage transmits to move and is divided into three transfer path (path P 1-P 3), said three paths can be used to transmit said base material and get into said process chamber 532 (Figure 11 E) or leave said process chamber (Figure 11 F).This collocation method is useful especially on the high acceleration that said base material and mechanical arm assembly 11 are experienced during the said transmission processing procedure of reduction, and also moves complexity by during said transmission processing procedure, using single axle control to reduce said mechanical arm as far as possible.The high acceleration that said mechanical arm experienced can produce vibration in said mechanical arm assembly, said vibration can influence the reliability and possible move of said base material on said mechanical arm blade of the position accuracy of said transmission processing procedure, said mechanical arm assembly.A cause believing said mechanical arm assembly 11 experience high accelerations produces when using collaborative mobile (coordinated motions).In that this is employed " collaborative moving " that a speech is intended to describe that two or more axles move simultaneously (for example, transfer robot assembly 86, move horizontally assembly 90, vertical moving assembly 95) so that base material moves to down a bit from a point.
Figure 11 E illustrates the multistage transmission of three transfer paths and moves, and the said base materials that are used for base material is sent in the said process chamber 532 that move hold on the spare part 532A.Before carrying out the mobile processing procedure of said multistage transmission; Said transfer robot assembly 86 generally is arranged on (SP of Figure 11 E) on the said original position; Said original position possibly utilize said vertical moving assembly 95 spare parts that said base material is moved to expection vertical orientations (z direction), and utilizes said assembly 90 spare parts that move horizontally to move to expection horizontal level (x direction).In one aspect, in case said base material be positioned on the said original position, utilize with that said transfer robot assembly 86, said move horizontally assembly 90 and said system controller 101 with said base material along path P 1Move to said final position (FP).In another aspect, said base material is to utilize the Control Shaft quantity that reduces along path P 1Be provided with, a Control Shaft is for example only arranged.For example, can said mechanical arm blade and said base material be moved by the transfer robot assembly 86 that control is communicated with said controller 101 and realize single Control Shaft.In this collocation method, the use of single axle can be simplified the control that said base material or mechanical arm blade move significantly, and reduces and move to the required time of said centre position from said starting point.It is to utilize said vertical moving assembly 95 spare parts on the z direction, to move that the said multistage is transmitted the next procedure that moves processing procedure; Or utilize base material to hold the said base material of spare part actuator (not shown) vertical moving and hold spare part and hold on the spare part, for example lift pin or other substrate support spare parts (the for example element 532A of Figure 11 A) said base material is sent to said process chamber base material.In one aspect, shown in Figure 11 E and 11F, said transfer robot assembly 86 be suitable for the X plane parallel with the Y direction on shift said base material W, like path P 1 with shown in the P3.
After the said base material of transmission held spare part to said process chamber, said mechanical arm blade can be followed path P then 2And P 3Withdrawal.Said path P 2, in some cases, possibly need said transfer robot assembly 86 and saidly move horizontally the collaborative of 90 of assemblies and move, can from said process chamber 532 withdrawals the time, not strike said substrate support spare part 532A to guarantee said mechanical arm blade 87.In one aspect, shown in Figure 11 E, the said path P that moves of the substrate support regional center point of said mechanical arm blade 87 is described 2Be linear path, said linear path extends on some intermediate point (IP) between said final position and said terminal point (EP) position from said final position (FP).In general, said intermediate point is the said mechanical arm blade point enough far away of having withdrawn, and therefore said point can be along path P 3Contact with any chamber spare part when moving to said final position with simplification or accelerated motion.In one aspect, in case said mechanical arm blade on said intermediate point position, said base material promptly utilizes said transfer robot assembly 86, said assembly 90 and the said system controller 101 of moving horizontally along path P 3Move to said terminal point.In one aspect, said base material only utilizes a Control Shaft to be arranged on said terminal point (EP) and locates, for example moving by the transfer robot assembly 86 that is communicated with said controller 101.In this collocation method, the use of single axle can be simplified mobile control significantly, and minimizing moves to said terminal point (EP) the required time of position from said intermediate point (IP).
Figure 11 F illustrates the multistage transmission of three transfer paths and moves, and said moving is to be used for that base material is held spare part 532A from the base materials in the said process chamber 532 to shift out.Before carrying out the mobile processing procedure of said multistage transmission; Illustrate at Figure 11 F; Said transfer robot assembly 86 generally is arranged on (SP of Figure 11 F) on the said original position; Said original position possibly utilize said vertical moving assembly 95 spare parts that said base material is moved to expection vertical orientations (z direction), and utilizes said assembly 90 spare parts that move horizontally to move to expection horizontal level (x direction).In one aspect, in case said base material be positioned on the said original position, utilize with that said transfer robot assembly 86, said move horizontally assembly 90 and said system controller 101 with said base material along path P 1Move to said centre position (IP).Therefore in general, said intermediate point is that said mechanical arm blade has stretched into point enough far away, and said point can be along path P 1Contact with any chamber spare part when moving to said intermediate point with simplification or accelerated motion.In one aspect of the method, said base material is to utilize the Control Shaft quantity that reduces along path P 1Be provided with.For example, can said mechanical arm blade and said base material be moved by the transfer robot assembly 86 that control is communicated with said controller 101 and realize single Control Shaft.In this collocation method, the use of single axle can be simplified the control that said base material or mechanical arm move significantly, and reduces and move to the required time of said centre position from said starting point.
After said base material was sent to said centre position, said mechanical arm blade can further be followed path P 2Stretch into said chamber.Said path P 2, in some cases, possibly need said transfer robot assembly 86 and saidly move horizontally the collaborative of 90 of assemblies and move, can when extending into said process chamber 532, not strike said substrate support spare part 532A to guarantee said mechanical arm blade 87.In one aspect, shown in Figure 11 F, the said path P that moves of the substrate support regional center point of said mechanical arm blade 87 is described 2Be linear path, said linear path extends to said final position (FP) from said intermediate point (IP).After said mechanical arm blade has been arranged on the said final position; Then utilize said vertical moving assembly 95 on the z direction, to move said transfer robot assembly 86, or utilize base material to hold the said base material of spare part actuator (not shown) vertical moving and hold spare part 532A and said base material is held spare part 532A from said process chamber base material shift out.
After said base material is held spare part from said process chamber shifting out, said mechanical arm blade can be followed path P 3Withdrawal.Said path P 3, in some cases, possibly need said transfer robot assembly 86 and saidly move horizontally the collaborative of 90 of assemblies and move.In one aspect, said base material only utilizes a Control Shaft to be arranged on said terminal point (EP) and locates, for example moving by the transfer robot assembly 86 that is communicated with said controller 101.In this collocation method, the use of single axle can be simplified significantly and moves control, and reduces that (FP) moves to said terminal point (EP) the required time of position from said final position.In one aspect, shown in Figure 11 F, the said path P that moves of the substrate support regional center point of said mechanical arm blade 87 is described 3Be nonlinear path, (FP) extends to some terminal point (EP) to said nonlinear path from said final position.
Single shaft mechanical arm assembly
Figure 10 D and 11G-I illustrate another embodiment of mechanical arm assembly 11; Wherein said transfer robot assembly 86A is that single shaft links 306 (Figure 10 D) configuration, to transmit and base material to be set on the desired location of keeping somewhere second process chamber 532 in said cluster tool 10.Said single shaft links 306 and generally contains motor 320 (Figure 10 D) and mechanical arm blade 87, and they make rotatablely moving of said motor 320 cause said mechanical arm blade 87 rotations through connection.The advantage of this collocation method is that said mechanical arm transmits the ability of the desired location in base material to the said cluster tool; Said ability only with more uncomplicated and have more cost-benefit single axle and control said blade 87, also reduce said mechanical arm spare part simultaneously and extends into the chance in the space that during said transmission processing procedure, possibly occupied by another mechanical arm.
Figure 10 D illustrates single shaft and links 306 sectional side view, and said single shaft links and generally contain motor 320, is connected to the supporting bracket 321 and the mechanical arm blade 87 of said motor 320.In one embodiment, person shown in Figure 10 D, said mechanical arm blade 87 is to be connected to first pulley assembly 355.Said first pulley assembly 355 has first pulley 358 that is connected with said motor 320, second pulley 356 that is connected with said mechanical arm blade 87, and the belt 359 that connects said first pulley 358 and said second pulley 356.In this configuration, said second pulley 356 is to be installed in through on said bearing 354A and the pivot 364 that said supporting bracket 321 is connected, so said motor 320 rotatable said mechanical arm blades.In an embodiment of said single shaft binding 306; Said mechanical arm blade 87 is directly to be connected with said motor 320, with the quantity that reduces the mechanical arm spare part, the cost that reduces said mechanical arm assembly and complexity, and reduce in said first pulley system of maintenance the needs of 355 spare part.Said single shaft links 306 and can have superiority, because the mobile control system of said simplification, and mechanical arm and the system dependability therefore improved.
Figure 11 G-J is the plane graph that single shaft links the transfer robot assembly 86 of 306 types, and said single shaft is shown links 306 move, by being transmitted at base material when getting into process chamber 532, and instant (object T for example 0-T 2) the plurality of continuous image of the position of each transfer robot assembly 86 spare parts is shown.Referring to Figure 11 G; When time T 0; Said transfer robot assembly 86 generally is to utilize said vertical moving assembly 95 spare parts to be arranged on the expection vertical orientations (z direction), and utilizes said assembly 90 spare parts that move horizontally to be arranged on the expection horizontal direction (x direction).At T 0The time the mechanical arm position, illustrate in Figure 11 C, can be called the original position object SP of discussion (above) at this.Referring to Figure 11 H, in time T 1The time, said mechanical arm blade 87 is with pivoting point V 1Be the center rotation, thereby make said mechanical arm blade 87 rotations, the position of said transfer robot assembly 86 on the x direction is to utilize said system controller 101 to adjust simultaneously.Referring to Figure 11 I, in time T 2The time, said mechanical arm blade 87 has rotated to the expection angle, and said mechanical arm assembly has been arranged on the x direction position of expection, and therefore said base material is on the expection final position (object FP) in said process chamber 532, or changes on the hand position.Figure 11 D discussed in the above, also illustrated to can be used to use said single shaft to link 306 with the possible path P on the desired location of the said process chamber 532 of base material transmission entering 1-P 3Some examples.Said base material is being sent to after said process chamber holds on the spare part, then can be but the said mechanical arm blade of withdrawing out of order according to above-mentioned steps.
Move horizontally assembly
Figure 12 A illustrates the said profile of getting along the plane parallel with said y direction that moves horizontally an embodiment of assembly 90.Figure 12 B is the sectional side view of an embodiment of said mechanical arm assembly 11, and the middle heart of said mechanical arm assembly is cut down the said length that moves horizontally assembly 90.Said move horizontally assembly 90 generally contain seal 460, actuator assemblies 443 and microscler mount pad 451.Said actuator assemblies 443 generally contains at least one horizontal linearity slide track component 468 and moving assembly 442.Said vertical moving assembly 95 is connected with the said assembly 90 that moves horizontally through said microscler mount pad 451.Said microscler mount pad 451 is to support the said structural member that moves horizontally the various loads that createed when assembly 90 is provided with said vertical moving assembly 95.The said assembly 90 that moves horizontally generally contains two horizontal linearity slide track components 468; Each horizontal linearity slide track component all has linear track 455, drive tab 458 and supports mount pad 452, and they support the weight of said microscler mount pad 451 and vertical moving assembly 95.This configuration thereby provide said vertical moving assembly 95 to move horizontally the smooth and easy of assembly 90 length directions and shift accurately along said.Said linear track 455 can be linear ball bearing slide rail or conventional linear slide rail (linear guide) with said drive tab 458, and they are known in the art.
Referring to Figure 12 A-B; Said moving assembly 442 generally contains microscler mount pad 451, horizontal mechanical arm actuator 367 (Figure 10 A and 12A), driving belt 440 and two or more driving belt pulley 454A, and they are suitable for controlling along the said length that moves horizontally assembly 90 position of said vertical moving assembly 95.In general; Said driving belt 440 (for example is connected with said microscler mount pad 451; Adhesion, bolt-lock or clamp) forming the successive loops that extends along the said length that moves horizontally assembly 90, and support by said two or more driving belt pulley 454A at the said end points place that moves horizontally assembly 90.Figure 12 B illustrates the configuration with four driving belt pulley 454A.In one embodiment; One among said horizontal mechanical arm actuator 367 and the said driving belt pulley 454A is connected, and therefore rotatablely moving of said pulley 454A can make the driving belt 440 and the microscler mount pad 451 that are connected with said vertical moving assembly 95 move along said horizontal linearity slide track component 468.In one embodiment, said horizontal mechanical arm actuator 367 is directly to drive linear brushless servo motor, and said servo motor is suitable for moving said mechanical arm with respect to said horizontal linearity slide track component 468.
Saidly seal 460 and generally contain pedestal 464, one or more outer wall 463 and seal top board 462.Saidly seal 460 and be suitable for covering and support the said spare part that moves horizontally in the assembly 90, for safety and reduce and pollute.Because particulate is to be produced by the mechanical spare part that rotates, slides or contact with each other, so guarantee that the said spare part that moves horizontally in the assembly 90 can the contaminated substrate surface be not very important when said base material transmits through said cluster tool 10.Therefore saidly seal 460 and form and enclose the zone, the said zone of enclosing is minimized in the said chance that the particulates that produce in 460 arrive at substrate surface that seals.Particle contamination is for the element qualification rate, so the CoO of cluster tool has direct influence.
The said top board 462 that seals contains a plurality of slits 471, and those slits make a plurality of support mount pads 452 of said horizontal linearity slide track component 468 can extend through the said top board 462 that seals, and is connected with said microscler mount pad 451.In one aspect, the width of said slit 471 (size of said opening on the y direction) is to arrive at the said chance that moves horizontally assembly 90 outsides through custom-made by size with minimize particle.
Said 460 the pedestal 464 of sealing is structural elements, said structural elements through design supporting the load that weight was createed of said microscler mount pad 451 and vertical moving assembly 95, and said vertical moving assembly 95 move the load that is createed.In one aspect; Said pedestal 464 further contains a plurality of pedestal slit 464A; Those pedestal slits are the length settings that move horizontally assembly 90 along said; To allow that getting into the said air that seals the slit 471 of top board 462 leaves said sealing via said pedestal slit 464A, leaves the slit 10B that is formed in the said cluster tool pedestal 10A then.In an embodiment of said cluster tool 10, do not use cluster tool pedestal 10A, so the said assembly 90 that moves horizontally can be arranged on the floor in the zone that said cluster tool 10 is installed with the processing procedure frame.In one aspect, said pedestal 464 is to utilize said sealing to support 461 and be arranged on said cluster tool pedestal 10A or the floor, so that the air said limited and not consistent flow path that moves horizontally assembly 90 of flowing through to be provided.In one aspect, said sealing supported 461 and also can be suitable for as conventional vibration absorber.Flow through with a direction (preferably downward) and saidly to seal the air-flow that 460 said environment control assembly 110 or dust free room environment produce and to help to reduce the said chance that the particulates that produce in 460 arrive at substrate surface that seals.In one aspect; Being formed on the said said slits 471 that seal in the top board 462 is the air capacities that flow out from said environment control assembly 110 with restriction through design with said pedestal slit 464A, therefore can seal outside and said the sealing between 460 interior zone of top board 462 and reaches at least 0.1 said " pressure drop of wg.In one aspect, form said 460 the middle section of sealing and this zone is separated with said other parts that move horizontally assembly to utilize said inwall 465.The interpolation of inwall 465 can minimize and get into said 460 the air re-circulation that seals, and as the air-flow guide features.
Referring to Figure 12 A and 13A, said seal 460 one aspect in, said driving belt is set with at driving belt 440 be formed on said 472 of driving belt slits that seal in the top board 462 and form small gaps.This collocation method can have superiority, to avoid arriving at said 460 outsides that seal at the said particulate that produces in 40 that seals.
Referring to Figure 12 C, said seal 460 on the other hand in, fan unit 481 can be connected with said pedestal 464, and is suitable for drawing air through the pedestal slit 464A that are formed in the said pedestal 464 from said 460 inside that seal.In another aspect, said fan unit 481 impels the air that contains particulate through filter 482, to discharge (seeing object A) preceding particulate of removing at said air through said cluster tool pedestal 10A or floor.In this collocation method; Fan 483 is contained in the said fan unit, is to create negative pressure in 460 said sealing through design; Therefore the said air outside that seals can be sucked in said the sealing, and limits the possibility that the said particulate that seals generation in 460 spills.In one embodiment, said filter 482 is the HEPA type filter maybe can be removed the particulate that is produced from air other type filters.In one aspect, the size of the length of said slit 471 and width and said fan 483 is through selecting so that seal 460 and outside a bit and said seal the pressure drop that produces between 460 inner any between about 0.02 inches of water(in H (～5 handkerchief) and about 1 inches of water(in H (～250 handkerchief) said.
In a said embodiment who moves horizontally assembly 90, protection belt 479 is set covers said slit 471, arrive at base material to avoid the said assembly 90 inner particulates that produce that move horizontally.In this collocation method; Said protection belt 479 forms the successive loops that extends along the said length that moves horizontally assembly 90; And be arranged in the said slit 471, to seal the open area of 462 on top board as far as possible little so that be formed on said protection belt 479 and said.In general; Said protection belt 479 is to be connected (for example adhesion, bolt-lock or clamp) with said support mount pad 452; Forming the successive loops that extends along the said length that moves horizontally assembly 90, and support by said two or more driving belt pulley (not shown) at the said end points place that moves horizontally assembly 90.In the configuration shown in Figure 12 C; Said protection belt 479 can highly be located to be connected (not shown) with said support mount pad 452 at said slit 471; And pass the said assembly 90 that moves horizontally in the passage 478 in being produced on said pedestal 464 and turn around, and form successive loops.Said (a bit) protection belt 479 is therefore around the said interior zone that moves horizontally assembly 90.
The vertical moving assembly
Figure 13 A-B illustrates an embodiment of said vertical moving assembly 95.Figure 13 A is the plane graph of said vertical moving assembly 95, and the various aspects of said design are shown.Said vertical moving assembly 95 generally contains vertical support 570, vertical actuator assemblies 560, fan component 580, supporting bracket 321 and vertically seals 590.Said vertical support 570 generally is bolt-lock, welding or is installed in the structural elements on the said microscler mount pad 451, and is suitable for supporting each spare part in the said vertical moving assembly 95.
Substantial regional 584 the tube 581 that said fan component 580 contains generally that fan 582 and formation is communicated with said fan 582 fluids.Said fan 582 generally is to be suitable for utilizing some machine tool to make the element of air flow, for example, and the fan blade of rotation, mobile bellows, mobile dividing plate or the high-accuracy mechanical gear that moves.Said fan 582 is suitable for by in enriching zone 584, creating negative pressure forming with respect to the said 590 outside negative pressure that seal at said 590 interior zones 586 that seal, and said substantial zone is communicated with a plurality of slits 585 and said interior zone 586 fluids on being formed on said tube 581.In one aspect, quantity, size and the distribution that can be the said slit 585 of circle, ellipse or rectangle is to draw air through design fifty-fifty with the All Ranges from said vertical moving assembly 95.In one aspect, interior zone 586 also can be suitable for holding spare part and and 101 a plurality of cable (not shown) that transmit signal of said system controller that are used at each mechanical arm nextport hardware component NextPort 85 and vertical moving assembly 95.In one aspect, said fan 582 is suitable for the air of discharging from said interior zone 586 is sent in the said middle section 430 that moves horizontally assembly 90, and said air is discharged from the said assembly 90 that moves horizontally through said pedestal slit 464A at this.
Said vertical actuator assemblies 560 generally contains vertical motor 507 (Figure 12 A and 13B), pulley assembly 576 (Figure 13 B) and vertical slide rail assembly 577.Said vertical slide rail assembly 577 generally contains linear track 574 and drive tab 573, and they are connected with the movable block 572 of vertical support 570 and said pulley assembly 576.Said vertical slide rail assembly 577 is suitable for guiding and provides said mechanical arm nextport hardware component NextPort 85 smooth and easy and shift, and also support said mechanical arm nextport hardware component NextPort 85 accurately and move weight and the load that is createed along the length of said vertical moving assembly 95.Said linear track 574 can be linear ball bearing slide rail, accurate axle slide type rail system or conventional linear slide rail with said drive tab 573, and they are known in the art.Typical linear roller bearing holds slide rail, accurate axle slide type rail system or conventional linear slide rail and can buy from the Daedal Division of the Parker Hannifin Corporation of SKF USA company or Binzhou Irwin.
Referring to Figure 13 A and 13B; Said pulley assembly 576 generally contains driving belt 571, movable block 572 and two or more pulley 575 (for example element 575A and 575B); They are rotatably connected with said vertical support 570 and vertical motor 507; And make supporting bracket (the for example element 321A-321B of Figure 13 B), thereby mechanical arm nextport hardware component NextPort 85, can be along the length setting of said vertical moving assembly 95.In general; Said driving belt 571 is connected (for example adhesion, bolt-lock or clamp) with said movable block 572; Forming the successive loops that extends along the length of said vertical moving assembly 95, and support (for example element 575A and 575B) by said two or more driving belt pulleys 575 at the end points place of said vertical moving assembly 95.Figure 13 B illustrates the configuration with two driving belt pulley 575A-B.In one aspect; Said vertical motor 507 is connected with one of said driving belt pulley 575B; Therefore rotatablely moving of said pulley 575B can make said driving belt 571 and said (a bit) supporting bracket, thereby mechanical arm nextport hardware component NextPort 85, moves along said vertical linearity slide track component 577.In one embodiment; Said vertical motor 507 is directly to drive linear brushless servo motor; Said servo motor is suitable for moving said mechanical arm nextport hardware component NextPort 85 with respect to said vertical slide rail assembly 577, does not therefore need said driving belt 571 and two or more pulleys 575.
Saidly vertically seal 590 and generally contain one or more outer walls 591 and seal top 592 (Fig. 9 A) and slit 593 (Fig. 9 A, 12A and 13A).Said 590 spare parts that are suitable for covering in the said vertical moving assembly 95 that vertically seal are for safety and reduce and pollute.In one aspect, saidly vertically seal 590 and be connected with said vertical support 570 and support by said vertical support 570.Because particulate is to be produced by the mechanical spare part that rotates, slides or contact with each other, so guarantee that the spare part in the said vertical moving assembly 95 can the contaminated substrate surface be not very important when transmitting said base material through said cluster tool 10.Therefore saidly seal 590 and form and enclose the zone, the said zone of enclosing is minimized in the said chance that the particulates that produce in 590 arrive at substrate surface that seals.Particle contamination is for the element qualification rate, so the CoO of cluster tool has direct influence.Therefore, in one aspect in, the size (for example flow velocity) of size of said slit 593 (being length and width) and/or said fan 582 is through disposing to such an extent that make and can minimize from the particle number that said vertical moving assembly 95 spills.In one aspect; The size of the length of said slit 593 (Z direction) and width (directions X) and said fan 582 is through selecting, and make said outer wall 591 outside a bit with in the pressure drop of 586 generations of said interior zone between about 0.02 inches of water(in H (～5 handkerchief) and about 1 inches of water(in H (～250 handkerchief).In one aspect, the width of said slit 593 is between about 0.25 inch and about 6 inches.
Said embodiment is superior to prior art design usually, and the prior art design is suitable for utilizing must folding, intussusception or indentation self is interior lifts said mechanical arm spare part with the spare part that reaches minimum upright position.The generation of subject under discussion be because the extreme lower position of said mechanical arm receive must folding, the size and the orientation of the interior vertical moving spare part of intussusception or indentation self limit, this is the interference of Zhao Yin in said vertical moving spare part.When prior art vertical moving spare part can't further be withdrawn; The position of said vertical moving spare part is commonly called " idle space (dead space) "; Or " compression height (solid height) ", because said minimum mechanical arm position receives the fact of the restriction of said withdrawal spare part height.In general; Said this problem of embodiment escape; Because there is not spare part in the said vertical moving assembly 95 bottom of said one or more transfer robot assemblies 86 in supported underneath, therefore said extreme lower position only receives the length of said linear track 574 and the size of said mechanical arm nextport hardware component NextPort 85 spare parts is limit.In one embodiment, shown in Figure 13 A-13B, said mechanical arm assembly is to be supported with the cantilever beam mode by the supporting bracket 321 that is installed on the said vertical slide rail assembly 577.It should be noted that the spare part collocation method of said supporting bracket 321 shown in Figure 10 C-10E and said mechanical arm nextport hardware component NextPort 85 and be not intended to be limited in this described scope of the present invention;, the orientation of said supporting bracket 321 and said mechanical arm nextport hardware component NextPort 85 reaches the rigidity of structure of expection because can adjusting, and/or the normal trajectories of the vertical moving assembly 95 of expection.
The embodiment of said vertical moving assembly 95 also is superior to the design of prior art vertical moving; For example must folding, person in intussusception or the indentation self, stem from moving of said mechanical arm nextport hardware component NextPort 85 because move and accuracy and/or the accuracy improved along the pressure of vertical slide rail assembly 577.Therefore; In one aspect of the invention; Moving of said mechanical arm nextport hardware component NextPort always by rigid member guiding (for example the vertical slide rail assembly 577); Said rigid member provides the said spare part rigidity of structure and position precision, when those spare parts when the length of said vertical moving assembly 95 moves.
Two arrangement of components methods that move horizontally
Figure 14 A illustrates an embodiment of mechanical arm assembly 11, and said mechanical arm assembly uses two of can be used as the one or more mechanical arm assembly 11A-H shown in above Fig. 1-6 to move horizontally assembly 90.In this collocation method, said mechanical arm assembly 11 generally contains mechanical arm nextport hardware component NextPort 85, vertical moving assembly 95 and two horizontal mechanical arm components 90 (for example element 90A and 90B).Therefore the collaborative instruction of moving and transmitting from said system controller 101 of said mechanical arm nextport hardware component NextPort capable of using 85, vertical mechanical arm assembly 95 and horizontal mechanical arm component 90A-B is arranged on base material on x, y and the z position of any expection.An advantage of this collocation method is that said vertical moving assembly 95 is during dynamically the moving of said direction of transfer (x direction); The rigidity of said mechanical arm assembly 11 structures can strengthen; Allowing has higher acceleration during moving, and therefore has the base material delivery time of improvement.
In one aspect, said vertical moving assembly 95, move horizontally assembly 90B and the said spare part that moves horizontally assembly 90A down on said and contain the identical basic spare part with top discussion, therefore use the components identical symbol in due course.In one aspect, vertical moving assembly 95 is with said down microscler mount pad 451A and go up microscler mount pad 451B and is connected, and said microscler mount pad is to utilize to be retained in each and to move horizontally the interior moving assembly 442 of assembly 90A and 90B along the setting of x direction.In another embodiment of said mechanical arm assembly 11; Single moving assembly 442 is installed in said of moving horizontally in the assembly and goes up (for example element 90A); And other move horizontally assembly (for example element 90B) effect and are merely support, to guide an end of said vertical moving assembly 95.
Base material divides into groups
More competitive on market in trial; Thereby need to reduce under the effort of cost of carry (CoO); Electronic device fabricators spends the plenty of time usually and attempts optimization processing procedure program and chamber processing procedure time, to be issued to possible maximum base material production capacity in restriction of cluster tool framework and given situation of chamber processing procedure time.In the processing procedure program with short chamber processing procedure time and a large amount of fabrication steps, most time of handling base material is occupied by the processing procedure of the said base material of transmission between each process chamber of cluster tool.In an embodiment of said cluster tool 10, said CoO be by base material is divided into groups and with two or more be that one group mode transmits and handles said base material and reduces.Therefore this type of parallel processing increases system's production capacity, and reduces mechanical arm and between said process chamber, transmit the quantity that moves that a collection of base material must carry out, and therefore reduces the loss of said mechanical arm and increases system dependability.
In an embodiment of said cluster tool 10; Said front end robot arm component 15, said mechanical arm assembly 11 (for example the element 11A of Fig. 1-6,11B or the like) and/or said rear robot arm component 40 can be suitable for transmitting base material with two or more one group modes, to improve system's production capacity by the said base material of parallel processing.For example; In one aspect; Said mechanical arm nextport hardware component NextPort 85 has a plurality of transfer robot assembly 86A that can independently control and 86B (Figure 10 B); Those transfer robot assemblies are to be used for picking up one or more base materials from a plurality of process chambers, transmit and place said base material then in a plurality of process chambers subsequently.In another aspect, each transfer robot assembly 86 (for example 86A or 86B) is suitable for separately picking up, transmits and puts down a plurality of base materials.In this situation; For example; Mechanical arm nextport hardware component NextPort 85 with two transfer robot assemblies 86 can be suitable for utilizing the first blade 87A to pick up base material " W " from first process chamber; Move to second process chamber then and pick up base material to utilize the second blade 87B, the mode that therefore two base materials can a group transmits and puts down.
In an embodiment of said mechanical arm assembly 11; Shown in Figure 15 A; Said tool arm nextport hardware component NextPort 85 contains two mechanical arm nextport hardware component NextPorts 85 (for example element 85A and 85B); Said mechanical arm nextport hardware component NextPort has at least one transfer robot assembly 86, and separates desired distance or spacing (element " A "), and is suitable for picking up or put down base material simultaneously from two different process chambers.Distance that said two mechanical arm nextport hardware component NextPorts are 85 or spacing A can be installed in the interval between two process chambers within the said processing procedure frame through being configured to correspondence, therefore make once said two process chambers of access simultaneously of said mechanical arm assembly 11.This collocation method is because can the two or more base materials of block transfer, therefore has superiority especially improving on base material production capacity and the cluster tool reliability.
Mechanical arm blade Hardware configuration method
Figure 16 A-16D illustrates an embodiment of mechanical arm blade assembly 900, and said mechanical arm blade assembly can be with said some embodiment and in order to when base material " W " transmits through said cluster tool 10 by the mechanical arm assembly, to support and to keep somewhere said base material " W ".In one embodiment; Said mechanical arm blade assembly 900 can be suitable for replacing said blade 87, therefore can be connected with said first pulley system 355 shown in Figure 10 A-10E or second pulley system, 361 spare parts at the tie point place (element CP) that is formed on the said blade pedestal 901.Mechanical arm blade assembly 900 of the present invention is suitable for grasping, " seizing ", or restriction base material " W ", so the acceleration that base material is experienced during the transmission processing procedure can not make said substrate location remove from the known location on the said mechanical arm blade assembly 900.Base material mobile during transmitting processing procedure can produce particulate and reduce the base material setting accuracy and the repeatability of said mechanical arm.Under situation worst, said acceleration can let base material drop out from said mechanical arm blade assembly 900.
The acceleration of said base material experience can be divided into three parts: horizontal radial acceleration part, horizontal axis acceleration part and normal acceleration part.The acceleration that said base material experienced produces when said base material quickens on X, Y and Z direction or slows down during said base material moves through said cluster tool 10.Referring to Figure 16 A, said horizontal radial acceleration part and said horizontal axis acceleration partly are to be shown as power F respectively AAnd F RThe power that is exposed to and the quality of said base material multiply by the base material acceleration, and to deduct any frictional force that is createed between said base material and said mechanical arm blade assembly 900 spare parts relevant.In the above-described embodiments, said radial acceleration normally is transmitted mechanical arm assembly 86 at base material and rotates into when location and take place, and can arbitrary direction (promptly+Y or-the Y direction) on work.Said axial acceleration is normally produced when being arranged on the directions X by said move horizontally assembly 90 and/or said transfer robot assembly 86 mobile at base material, and can arbitrary direction (promptly+X or-directions X) go up and act on.Said normal acceleration normally takes place when said base material is arranged on the z direction by said vertical moving assembly 95, and can arbitrary direction (promptly+Z or-the Z direction) on or cantilever beam act on when bringing out structure quake.
Figure 16 A is the schematic plan view of an embodiment that is suitable for supporting the said mechanical arm blade assembly 900 of said base material " W ".Said mechanical arm blade assembly 900 generally contains blade pedestal 901, actuator 910, brake mechanism 920, position sensor 930, grip module 905, one or more reactive means 908 (for example illustrating) and one or more substrate support spare part 909.Said grip module 905 generally contains clamp pad 906 and is installed in the one or more contact members 907 (being two contact members shown in Figure 16 A) on the said clamp pad 906.Said clamp pad 906, contact member 907, reactive means 908, and blade pedestal 901 can or can bear the acceleration that said mechanical arm blade assembly 900 experiences (10-30m/s for example by metal (for example aluminium, the SST of aluminium, coating nickel), ceramic material (for example carborundum) reliably during said transmission processing procedure 2), and not can because of and said base material between reciprocation and produce or attract the plastic material of particulate to process.Figure 16 B is the side constructed profile of the mechanical arm blade assembly 900 shown in Figure 16 A, and said profile has passed through the central cutout of said mechanical arm blade assembly 900.For the sake of simplicity, the spare part that is arranged on behind the section plane of Figure 16 B is omitted (for example contact member 907), but said brake assemblies 930 is still stayed among this figure.
Referring to Figure 16 A and 16B, said base material " W " is sent to the indwelling surface 908B of the said reactive means 908 of grasping force (F1) compressing dependence of base material " W " during use through the contact member 907 of said grip module 905 by said actuator 910.In one aspect, said contact member 907 is suitable for contact and forces the edge " E " of said base material " W " to lean on the surperficial 908B of said indwelling.In one aspect, said grasping force can between about 0.01 and about 3 kgfs (kgf) between.In one embodiment, shown in Figure 16 A, tend to let said contact member 907 spaced apart, so that support axial to said base material and radially to be provided when said base material is transmitted by said mechanical arm assembly 11 with angular distance " A ".
Limit said base material so that the processing procedure that said base material can utilize said mechanical arm blade assembly 900 to transmit reliably through said cluster tool 10 needs three steps to accomplish usually.It should be noted that one or more steps of describing below can accomplish synchronously or in regular turn, and can not depart from said base region of the present invention.Before beginning to pick up the processing procedure of base material, said grip module 905 (not shown) of on+directions X, withdrawing.Said first step is from substrate support spare part (for example transmission position 9A-H of the element 532A of Figure 11 A-11I, Fig. 2 A, 3A or the like) when picking up base material, and therefore said base material rests on respectively on the substrate support surface 908A and 909A on said reactive means 908 and the substrate support spare part 909.Next, said grip module 905 moves on-directions X, is sent to the grasping force (F of base material " W " by the contact member 907 of said actuator 910 through said grip module 905 and said reactive means 908 up to said base material 1) be limited on the said mechanical arm blade assembly 900 till.In the end in step, said brake mechanism 920 keeps said grip module 905, or " lock " in position go up, and changes said grasping force (F significantly to avoid the acceleration of said base material during said transmission processing procedure 1), thereby said base material can be moved with respect to said stayed surface.After said brake mechanism 920 limits said grip module 905, can said base material be sent to another point of said cluster tool 10.Desire is put into base material on the substrate support spare part, can reversed accomplish above-mentioned steps.
In aspect of said mechanical arm blade assembly 900, said brake mechanism 920 is to be suitable for during transmitting at least one direction moving of (for example+directions X) said grip module 905 of restriction.At the grasping force (F that supplies with said grip module 905 1) ability that moves of the opposite said grip module 905 of direction limit can avoid said (a bit) horizontal axis acceleration that said grasping force is significantly reduced; Thereby said base material can be moved; This possibly produce particulate, perhaps can avoid during transmitting, dropping from said blade assembly 900.In another aspect, said brake mechanism 920 is suitable on both direction at least moving of (for example+X and-directions X) said grip module 905 of restriction.This configuration in, with said grasping force (F 1) ability that moves of the parallel said grip module of direction limit of direction can avoid said (a bit) horizontal axis acceleration that said grasping force is significantly increased, this possibly make base material damage or be cracked, or significantly reduces, and this possibly produce particulate or let said base material drop.In another embodiment again, said brake mechanism 905 is suitable for limiting all six-freedom degrees of said grip module 905, avoiding, or minimizes moving of said base material.The ability that moves at the said grip module 905 of anticipated orientation limit is capable of using to be suitable for limiting the spare part that said grip module 905 moves and to accomplish.Can be used to limit the typical spare part that said grip module 905 moves and comprise conventional latch mechanism (for example bolt type mechanism), or other similar devices.In one aspect, the mobile of said grip module 905 is by supplying with restraint (the element F of Figure 16 A 2) mechanism limit, the example opposite brake assemblies 920A as discussed above.
In one embodiment, use location inductor 930 is responded to the position of said clamp pad 906, and makes said controller 101 any time during transmitting put the state of judging said blade assembly 900.In one aspect; Because the distance between the strength that the position of said clamp pad 906 and said actuator 910 transmit; By notice that said clamp pad 906 moves too far on-directions X; Said position sensor 930 is not suitable for sensing not that base material is arranged on the said blade assembly 900, or said base material on said stayed surface ( element 908A and 909A) be misplaced.Likewise, by the position of noticing said clamp pad 906 when existing in the acceptable position range corresponding to base material, the existence that said position sensor 930 and controller 101 can be suitable for sensing base material.In one aspect, said position sensor 930 by be arranged on a plurality of optical position inductors, the linear variable difference transformer (LVDT) on the desired point or can be used to distinguish said clamp pad 906 accept form with other analogous position induction devices of unacceptable position.
The plane graph of an embodiment of the schematically illustrated blade assembly of Figure 16 C (element 900A), said blade assembly have the opposite brake assemblies 920A that schematically illustrates of the brake mechanism 920 that replaces Figure 16 A.Said opposite brake assemblies 920A is suitable for during base material transmits, said clamp pad 906 being limited on the location.Embodiment shown in Figure 16 C is similar with the collocation method shown in Figure 16 A-B, except adding said opposite brake assemblies 920A, actuator assemblies 910A and a plurality of support spare part, therefore, for the sake of simplicity, uses the components identical symbol in due course.The embodiment of said mechanical arm blade assembly 900A generally contains blade pedestal 901, actuator assemblies 910A, opposite brake mechanism 920A, position sensor 930, grip module 905, reactive means 908 and substrate support spare part 909.In one embodiment, said clamp pad 906 is to be installed on the linear slide rail (not shown), and said linear slide rail is connected with said blade pedestal 901 to aim at and to limit said clamp pad 906 moving on anticipated orientation (for example directions X).
In one embodiment, the said actuator assemblies 910A connecting plate 916 that contains actuator 911, actuator connecting rod 911A, coupling member 912, slide track component 914, connecting elements 915 and be connected with said coupling member 912 and be connected with clamp pad 906 through said connecting elements 915.Said coupling member 912 can be generally to be used for the routine that various mobile control spare parts link together is linked joint or " float and engage (floating joint) ".In one embodiment, said connecting plate 916 is directly to be connected with the actuator connecting rod 911A of said actuator 911.Said slide track component 914 can be conventional linear slide rail assembly, or the ball bearing slide rail, and is connected with said connecting plate 916 aiming at and to guide moving of said connecting plate, thereby the moving of said clamp pad 906.Said actuator 911 is suitable for by mobile said connecting rod 911A, coupling member 912, connecting elements 915 and connecting plate 916 said clamp pad 906 being set.In one aspect, said actuator 911 is pneumatic cylinder (air cylinder), linear motor or other analogous setting and load transfer device.
In one embodiment, said opposite brake assemblies 920A contains actuator 921, and said actuator is connected with said blade pedestal 901, and links with braking contact member 922.In this collocation method, said opposite brake assemblies 921A is suitable for " pinning " or limits said clamp pad 906, stems from the restraint F that said opposite brake assemblies 920A produces 2In one embodiment, said restraint F 2Be to force (element F when said actuator 921 3) when said braking contact member 922 is leaning on said connecting plate 916, form by the frictional force that is formed on 922 of said connecting plate 916 and said braking contact members.In this collocation method, said slide track component 914 is to accept the F of braking force institute that said actuator 921 transmits through design 3The lateral load (side load) that produces.The restraint F that said clamp pad 906 is remained on the location that produces 2Equal said braking force F 3Multiply by 916 confficients of static friction that create of said braking contact member 922 and said connecting plate.The size of said actuator 921 and braking contact member 922 and said connecting plate 916 materials and surface-treated are selected can optimization, and any power that the restraint that is produced to guarantee is always produced than the said base material accelerating period during transmitting is big.In one aspect, the restraint F that is produced 2About 0.5 with about 3.5 kgfs (kgf) scope in.In one aspect; Said braking contact member 922 can be processed by rubber or polymer-based material; For example polyurethane (polyurethane), ethylene-propylene rubber (EPDM), natural rubber, butyl rubber or other polymeric materials that is fit to, and said connecting plate 916 is to be processed by aluminium alloy or stainless steel alloy.In one embodiment; Not shown; The connecting rod 911A of said actuator 911 directly links with said clamp pad 906, and the braking contact member 922 of said opposite brake assemblies 920A is suitable for contacting said connecting rod 911A or said clamp pad, moves to avoid them.
Figure 16 D schematically shows the plane graph of the embodiment of said blade assembly 900A, and said blade assembly has the configuration of the opposite brake assemblies 920A different with person shown in Figure 16 C.In this collocation method, the pivoting point " P " that said opposite brake assemblies 920A contains the lever arm 923 that at one end is connected with said braking contact member 922, then has said actuator 921 and be arranged on somewhere between the said lever arm two ends at the said lever arm other end.In one aspect, said pivoting point is connected with said blade pedestal 901, and is suitable for when the said connecting plate 916 of said braking contact member 922 oppressed dependence, supporting said lever arm 923 and is supplied to the power F of said lever arm 923 from said actuator 921 4In this collocation method, by said pivoting point " P " strategically is set, said lever arm 923 capable of using creates mechanical dominance, and said lever arm can be used to supply with surpass directly and produces the braking force F that spare part contacts accessible power with the power of said actuator 921 3, thereby restraint F 2
Figure 16 D also illustrates the embodiment of said blade assembly 900A, said blade assembly contain be arranged on 915 of said clamp pad 906 and connecting elementss comply with member 917, exist or do not exist on the said blade assembly 900A to help the induction base material.In case said restraint F 2Be applied on the connecting plate 916, whether the said extra degree of freedom of complying with the general adding of member and said position sensor 930 and controller 101 and usefulness exists on the said blade assembly 900A to respond to said base material.If there is not the existence of other degrees of freedom among the said blade assembly 900A, then prevents or suppress the restraint F that said clamp pad 906 moves 2Meeting thus make said position sensor 930 and controller 101 before base material transmits or during can't the base material base material move or loss.
Therefore; In one embodiment, said actuator assemblies 910 generally contain actuator 911, actuator connecting rod 911A, coupling member 912, slide track component 914, connecting elements 915, comply with member 917, clamp pad slide track component 918 and be connected with said coupling member 912 and through said connecting elements 915 and comply with the connecting plate 916 that member 917 is connected with said clamp pad 906.Said clamp pad slide track component 918 generally is conventional linear slide rail assembly, or the ball bearing slide rail, and is connected to aim at and to guide said clamp pad to move with said clamp pad 906.
The said member 917 of complying with generally is the elasticity spare part, for example spring, bool or other similar devices, and said device can apply grasping force F being released in 1Transmit enough power during potential energy that the deflection of said device during this time produces, to move at said base material or to make said clamp pad 906 move the amount that can measure by said position sensor 930 easily when " wrong path ".In one aspect, the said member 917 of complying with is springs, and said spring has enough low spring constant (spring rate), and makes said spring use said grasping force F 1Reach during to said base material " compression height ".In another aspect, said connecting elements 915, comply with member 917 and clamp pad 906 is to make through design using said grasping force F 1The time, said connecting elements 915 can contact with said clamp pad 906, or the bottom contact is on said clamp pad.An advantage of the collocation method of these types is to avoid grasping force F 1During transmitting, change, because saidly comply with acceleration that member 917 can't be exposed to owing to said base material and further deflection during transmitting, the loss that this can reduce the particle number that is produced and avoided said base material.
How following steps can apply said restraint F if being intended to illustrate the said member 917 of complying with 2Afterwards be used for responding to the example of the existence of said base material on said blade assembly 900A to said connecting plate 916.In said first step, said actuator 911 applies said grasping force F through the contact member 907 in the said grip module 905 with said reactive means 908 1To said base material, this makes the said amount that member 917 deflections let the slit " G " of 906 of said connecting elements 915 and said clamp pad dwindle of complying with.Said controller 101 is checked to confirm that said clamp pad 906 is positioned on the acceptable position by the information of monitoring and annotation receives from said position sensor 930 then.In case sense said base material, be the desired location place on said blade assembly 900A therefore, promptly apply said restraint F 2To said connecting plate 916 with limit said connecting plate with said grasping force (F 1) moving on the parallel direction of direction.Then if said base material moves; And/or become " removing to grasp (un-gripped) "; The then said potential energy that produces in the member 917 of complying with; Because apply the deflection during the said grasping force F1, can make said clamp pad 906 move apart said restricted connecting plate 916, said clamp pad is then by said position sensor 930 and controller 101 inductions.The mobile meeting of the said clamp pad 906 of said position sensor 930 annotations makes said controller 101 stop said transmission processing procedure or avoids transmitting processing procedure and takes place, and this can help to be avoided the infringement of said base material and system.
Though aforementioned is to embodiments of the invention, other and further embodiment of the present invention can design not deviating under the base region of the present invention, and the scope of the invention is to be defined by appended claim.

Claims (32)

1. device that in cluster tool, transmits base material, wherein said cluster tool comprises:
The first processing procedure frame, contain:
First group of two or more process chamber that vertically stacks; And
Second group of two or more process chamber that vertically stacks, two or more substrate process chambers of wherein said first and second group have first side of arranging along first direction; And
The first mechanical arm assembly is suitable for transmitting the substrate process chamber in base material to the said first processing procedure frame, and the wherein said first mechanical arm assembly comprises:
First mechanical arm; Have the mechanical arm blade and be positioned at the base material receiving surface on the said mechanical arm blade; Wherein said first mechanical arm defines transit area; And be suitable for base material is arranged on the one or more points that are contained in first plane wherein said first plane and said first direction and parallel with the vertical second direction of said first direction;
First moving assembly is suitable for said first mechanical arm is arranged on the third direction vertical with said first plane; And
Second moving assembly is suitable for said first mechanical arm is arranged on the direction parallel with said first direction; Wherein said first moving assembly comprises:
Actuator assemblies comprises:
Vertical actuator, said vertical actuator is with the slide rail coupling and be suitable for vertical said first mechanical arm that is provided with;
Slide rail, when said actuator assemblies moved said first mechanical arm, said slide rail was suitable for guiding said first mechanical arm;
Seal, have around at least one the interior zone that is selected from the assembly of the group that constitutes by said slide rail and said vertical actuator; And
Fan, said fan is communicated with said interior zone fluid, and seals inner generation less than the said pressure that seals external pressure said,
Wherein when said base material was set on the base material receiving surface of said mechanical arm blade, the width of said transit area was parallel with said second direction and bigger 5% to 50% than the substrate sizes of said second direction.
2. device as claimed in claim 1, the wherein said first mechanical arm assembly more comprises:
Second mechanical arm has the mechanical arm blade that has the base material receiving surface, and wherein said second mechanical arm is suitable for base material is arranged on the one or more points that are contained in second plane, and wherein said first plane and said second plane be a segment distance separately.
3. device as claimed in claim 1 more comprises:
The second mechanical arm assembly is suitable for transmitting first group of two or more substrate process chamber in base material to the second processing procedure frame, and the wherein said second mechanical arm assembly comprises:
Second mechanical arm; Have the second mechanical arm blade and be positioned at the base material receiving surface on the said second mechanical arm blade; Wherein said second mechanical arm defines second transit area; And be suitable for base material is arranged on the one or more points that are contained in second plane wherein said second plane and said first direction and parallel with the vertical second direction of said first direction;
First moving assembly has actuator assemblies, is suitable for said second mechanical arm is arranged on the third direction vertical with said second plane; And
Second moving assembly has actuator assemblies, is suitable for said second mechanical arm is arranged on the direction parallel with said first direction;
Wherein when said base material was set on the base material receiving surface of the said second mechanical arm blade, the width of said second transit area was parallel with said second direction and bigger by 5% to 50% than the substrate sizes of said second direction.
4. device as claimed in claim 3 more comprises:
The three-mechanical arm assembly is suitable for transmitting the substrate process chamber in base material to said first processing procedure frame and the said second processing procedure frame, and wherein said three-mechanical arm assembly comprises:
Three-mechanical arm; Have the three-mechanical arm blade and be positioned at the base material receiving surface on the said three-mechanical arm blade; Wherein said three-mechanical arm defines the 3rd transit area; And be suitable for base material is arranged on the one or more points that are contained in the 3rd plane wherein said the 3rd plane and said first direction and parallel with the vertical second direction of said first direction;
First moving assembly has actuator assemblies, is suitable for said second mechanical arm is arranged on the third direction vertical with said the 3rd plane; And
Second moving assembly has actuator assemblies, is suitable for said second mechanical arm is arranged on the direction parallel with said first direction;
Wherein when said base material was set on the base material receiving surface of said three-mechanical arm blade, the width of said the 3rd transit area was parallel with said second direction and bigger by 5% to 50% than the substrate sizes of said second direction.
5. equipment that in cluster tool, transmits base material comprises:
First mechanical arm is suitable for base material is arranged on the one or more points that are contained in first plane;
The vertical moving assembly comprises:
Slide track component contains the block that is connected with the linear track of perpendicular positioning;
Supporting bracket is connected with said first mechanical arm with said block; And
Actuator is suitable for along said linear track said supporting bracket being vertically set on the upright position;
Seal, have the one or more walls that form interior zone, said interior zone is selected from the spare part of the group of said actuator and said slide track component formation around at least one;
Slit is formed at least one wall in the said one or more walls that seal; Said supporting bracket extends through said slit;
Seal the fan that fluid is communicated with said, said fan is suitable for the pressure in said the sealing maintained less than said and seals outside pressure; And
Move horizontally assembly, be connected with said vertical moving assembly, and have horizontal actuator, and said horizontal actuator is suitable for being provided with in the horizontal direction said first mechanical arm and said vertical moving assembly.
6. equipment as claimed in claim 5; More comprise second and move horizontally assembly; Be connected with said vertical moving assembly, and have the second horizontal actuator, and the said second horizontal actuator is suitable for said first mechanical arm and the setting of said vertical moving assembly in the horizontal direction.
7. equipment as claimed in claim 5 more comprises the environment control assembly, has fan, and said fan is suitable for promoting air through filter and towards the base material that is arranged on said first mechanical arm.
8. equipment as claimed in claim 5 more comprises:
Second mechanical arm is suitable for base material is arranged on the one or more points that are contained in second plane; And
Said vertical moving assembly more comprises:
Second supporting bracket is connected with said linear track and said second mechanical arm, and wherein said second supporting bracket is connected with said linear track through the said block or second block that is connected with said linear track; And
Said actuator is further adapted for along said linear track said second supporting bracket is vertically set on the upright position;
Second plane of wherein said second mechanical arm is first plane parallel with said first mechanical arm, and said second plane is arranged on said first plane one distance is arranged.
9. equipment as claimed in claim 5, wherein said fan be further adapted for said seal outside a bit and produce the pressure drop between 5 handkerchiefs and 250 handkerchiefs between said interior zone.
10. equipment that in cluster tool, transmits base material comprises:
First mechanical arm is suitable for base material is arranged on the one or more points that are contained in first plane;
The vertical moving assembly comprises:
Actuator assemblies is suitable for vertically being provided with said first mechanical arm, and wherein said actuator assemblies more comprises:
Vertical actuator is suitable for vertically being provided with said first mechanical arm; And
Vertical slide rail, when said vertical actuator moved said first mechanical arm, said vertical slide rail was suitable for guiding said first mechanical arm;
First seals, and has the wall of one or more formation interior zones, and said interior zone is the spare part that is selected from the group of said vertical actuator and said vertical slide rail formation around at least one; And
Fan is communicated with said interior zone fluid, and is suitable for sealing the inner pressure that seals external pressure less than said first that produces said first; And
Move horizontally assembly, have horizontal actuator and horizontal guide member, said horizontal actuator is suitable on the direction parallel with first side of the said first processing procedure frame, said first mechanical arm being set with said horizontal guide member.
11. equipment as claimed in claim 10, the wherein above-mentioned assembly that moves horizontally more comprises:
Second seals, and has one or more walls, and said wall seals the inner interior zone that forms around said horizontal guiding elements and said second; And
Fan is communicated with said interior zone fluid, and is suitable for sealing the inner pressure that seals external pressure less than said second that produces said second.
12. equipment as claimed in claim 10, wherein above-mentioned vertical moving assembly more comprises:
Slit is formed in one of said one or more walls that seal;
Supporting bracket extends through said slit, and is connected with said first mechanical arm with said vertical slide rail; And
Said fan be further adapted for said seal outside a bit and produce the pressure drop between 5 handkerchiefs and 250 handkerchiefs between said interior zone.
13. equipment as claimed in claim 10 more comprises the environment control assembly, has fan, and said fan is suitable for promoting air through filter and towards the base material that is arranged on said first mechanical arm.
14. an equipment that in cluster tool, transmits base material comprises:
The first mechanical arm assembly is suitable for base material is arranged on the first direction, and the wherein said first mechanical arm assembly comprises:
The mechanical arm blade has first end and base material receiving surface;
First connecting elements has first pivoting point and second pivoting point;
First gear is connected with first end of said mechanical arm blade and is rotatably connected with said first connecting elements at the said first pivoting point place;
Second gear is rotatably connected with said first gear and aligns with second pivoting point of said first connecting elements; And
First motor is rotatably connected with said first connecting elements, and wherein said first motor is suitable for by rotating said first connecting elements with respect to said second gear and first gear is provided with said base material receiving surface;
First moving assembly is suitable for said first mechanical arm is arranged on the second direction vertical with said first direction;
Second moving assembly is suitable for said first mechanical arm is arranged on the third direction vertical with said second direction; And
Seal, said sealing at interior zone has the pressure that is generated by fan, and the pressure in the said interior zone is less than the said external pressure that seals.
15. equipment as claimed in claim 14, the second wherein above-mentioned gear compares between 3: 1 and 4: 3 with respect to the gear of said first gear.
16. equipment as claimed in claim 14; The second wherein above-mentioned gear is connected with second motor, wherein is suitable for during transmitting, adjusting the rotary speed of said first connecting elements with respect to said second gear with said first motor and the said second motor controller in communication.
17. an equipment that in cluster tool, transmits base material comprises:
The first mechanical arm assembly is suitable for base material is arranged on and is contained in first plane on one or more points of arc, and the wherein said first mechanical arm assembly comprises:
The mechanical arm blade has first end and base material receiving surface; And
Motor is rotatably connected with first end of said mechanical arm blade;
First moving assembly is suitable for said first mechanical arm is arranged on the second direction vertical with said first plane, and wherein said first moving assembly comprises:
Actuator assemblies is suitable for vertically being provided with said first mechanical arm, and wherein said actuator assemblies more comprises:
Vertical actuator is suitable for vertically being provided with said first mechanical arm; And
Vertical slide rail, when said vertical actuator moved said first mechanical arm, said vertical slide rail was suitable for guiding said first mechanical arm;
First seals, and has the wall of one or more formation interior zones, and said interior zone is selected from the spare part of the group of said vertical actuator and said vertical slide rail composition around at least one; And
Fan is communicated with said interior zone fluid, and is suitable for sealing the inner pressure that seals external pressure less than said first that produces said first; And
Second moving assembly has second actuator, and is suitable for said first mechanical arm is arranged on the third direction vertical with said second direction.
18. equipment as claimed in claim 17, the second wherein above-mentioned moving assembly more comprises:
Second seals, and has one or more walls, and said wall seals the inner interior zone that forms around said second actuator and said second; And
Fan is communicated with said interior zone fluid, and is suitable for sealing the inner pressure that seals external pressure less than said second that produces said second.
19. an equipment that in cluster tool, transmits base material comprises:
The first mechanical arm assembly is suitable for base material is arranged on the first direction, and the wherein said first mechanical arm assembly comprises:
The mechanical arm blade has first end and base material receiving surface;
First gear is connected with first end of said mechanical arm blade;
Second gear is rotatably connected with said first gear; And
First motor is rotatably connected with said first gear; And
Second motor is rotatably connected with said second gear;
Wherein said second motor is suitable for rotating said second gear with respect to said first gear, to create variable gear ratio;
First moving assembly is suitable for said first mechanical arm is arranged on the second direction vertical with said first direction; And
Seal, have interior zone, said interior zone is suitable for being in the pressure that is generated by fan, and the pressure in the said interior zone is less than the said external pressure that seals.
20. equipment as claimed in claim 19 more comprises second moving assembly, is suitable for said first mechanical arm is arranged on the third direction vertical with said second direction.
21. equipment as claimed in claim 19, wherein above-mentioned second direction is vertical with said first direction.
22. a method that in cluster tool, transmits base material comprises:
Utilize the first mechanical arm assembly that base material is transmitted along first direction; The said first mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction; And be arranged on the desired location of second direction, wherein said second direction is vertical with said first direction;
Utilize the second mechanical arm assembly that base material is transmitted along said first direction, the said second mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of said second direction;
Utilize the three-mechanical arm assembly that base material is transmitted along said first direction, said three-mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of said second direction; And
In sealing, generate pressure by fan; Said sealing around first actuator assemblies forms; Said first actuator assemblies is included within the said first mechanical arm assembly, the said second mechanical arm assembly or the said three-mechanical arm assembly; Said pressure is less than the said external pressure that seals, and wherein said first actuator assemblies is suitable for said base material is placed along said second direction.
23. method as claimed in claim 22, wherein above-mentioned three-mechanical arm assembly are to adjoin with the said first and second mechanical arm assemblies.
24. method as claimed in claim 23, wherein above-mentioned three-mechanical arm assembly are arranged on the said first and second mechanical arm inter-modules.
25. method as claimed in claim 22, first wherein above-mentioned mechanical arm assembly to the three-mechanical arm assembly and the interval of second mechanical arm assembly to the three-mechanical arm assembly are than the processing procedure surface size big 5% and 50% of base material.
26. method as claimed in claim 22; The distance of the center line of the center line of the center line of the first wherein above-mentioned mechanical arm assembly to said three-mechanical arm assembly and the center line of the said second mechanical arm assembly to said three-mechanical arm assembly is between between 315mm and 450mm, and the distance between wherein said center line is on the direction vertical with said first direction, to measure.
27. method as claimed in claim 22; Wherein during the processing procedure that transmits base material on the said first direction, the distance of center line to the center line that is arranged on the base material on the said three-mechanical arm assembly that is arranged on the base material on said first mechanical arm assembly or the said second mechanical arm assembly is than the processing procedure surface size big 5% and 50% of base material.
28. method as claimed in claim 22; More comprise and utilize the 4th mechanical arm assembly base material to be sent to first and second process chamber array that is provided with along said first direction; Said the 4th mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of said second direction.
29. a method that in cluster tool, transmits base material comprises:
Utilize the first mechanical arm assembly that base material is sent to the first process chamber array that is provided with along first direction from first chamber; The said first mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction; And be arranged on the desired location of second direction, wherein said second direction is vertical with said first direction;
Utilize the second mechanical arm assembly that base material is sent to the said first process chamber array from said first chamber; The said second mechanical arm assembly is suitable for said base material is arranged on the desired location of said first direction, and is arranged on the desired location of second direction;
The front end robot arm that utilization is arranged in the front end assemblies is sent to said first chamber with base material from the base material casket, and wherein said front end assemblies adjoins with the transit area that contains the said first process chamber array, the said first mechanical arm assembly and the said second mechanical arm assembly; And
In sealing, generate pressure below atmospheric pressure; Said sealing around first actuator assemblies forms; Said first actuator is included in said first mechanical arm assembly and the said second mechanical arm assembly, and wherein said first actuator assemblies is suitable for said base material is placed along said second direction.
30. method as claimed in claim 29; More comprise and utilize the said first or second mechanical arm assembly that base material is sent to the said first process chamber array from second chamber, wherein said second chamber be on said first direction, be arranged to and the said first process chamber array at least one process chamber between a segment distance is arranged.
31. method as claimed in claim 29 more comprises front end assemblies, has the front end robot arm that is suitable for base material is sent to from the base material casket said first chamber.
32. method as claimed in claim 29, wherein above-mentioned front end robot arm, the first mechanical arm assembly and the second mechanical arm assembly are further adapted for the transmission base material and pass in and out second chamber.
CN2006800133558A 2005-04-22 2006-04-07 Cartesian robot cluster tool architecture Expired - Fee Related CN101164138B (en)

Applications Claiming Priority (9)

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US67384805P 2005-04-22 2005-04-22
US60/673,848 2005-04-22
US11/315,778 US20060182535A1 (en) 2004-12-22 2005-12-22 Cartesian robot design
US11/315,778 2005-12-22
US11/315,873 2005-12-22
US11/315,984 US7651306B2 (en) 2004-12-22 2005-12-22 Cartesian robot cluster tool architecture
US11/315,873 US7374391B2 (en) 2005-12-22 2005-12-22 Substrate gripper for a substrate handling robot
US11/315,984 2005-12-22
PCT/US2006/013164 WO2006115745A1 (en) 2005-04-22 2006-04-07 Cartesian robot cluster tool architecture

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CN102176425A (en) 2011-09-07
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CN101164138A (en) 2008-04-16
CN102867764B (en) 2015-06-17
TW200707621A (en) 2007-02-16
KR100960765B1 (en) 2010-06-01
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CN102176425B (en) 2013-02-06
KR20070120175A (en) 2007-12-21

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