CN100576436C - The control device of brush head of film brushing machine and method - Google Patents
The control device of brush head of film brushing machine and method Download PDFInfo
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- CN100576436C CN100576436C CN200710094244A CN200710094244A CN100576436C CN 100576436 C CN100576436 C CN 100576436C CN 200710094244 A CN200710094244 A CN 200710094244A CN 200710094244 A CN200710094244 A CN 200710094244A CN 100576436 C CN100576436 C CN 100576436C
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- brush
- rolling bearing
- silicon chip
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- soft magnet
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Abstract
The invention discloses a kind of control device of brush head of film brushing machine, comprise: a CD-ROM drive motor, the below is provided with rolling bearing, rolling bearing is positioned at one perpendicular to silicon chip and the fixing solenoid above this silicon chip, solenoidal skin generates an electromagnetic field its inside by twining hot-wire coil, the rolling bearing below is connected with a brush, and skin is with soft magnet, and this soft magnet drives the exposure level that rolling bearing moved up and down and changed brush and silicon chip by electromagnetic force.The invention also discloses a kind of control method of brush head of film brushing machine, comprising: feed electric current for the outer field coil of solenoid, form electromagnetic field; Adjust the size of electric current in the coil, rolling bearing is moved in vertical direction, regulate the brush of brush and the exposure level of silicon chip; Drive rolling bearing by CD-ROM drive motor and rotate, and then drive the brush rotation, make brush by removing its surperficial particle with the silicon chip friction.The present invention has prolonged the useful life of brush, and has improved cleaning efficiency.
Description
Technical field
The present invention relates to a kind of semiconductor surface cleaning device, relate in particular to a kind of control device of brush head of film brushing machine.The invention still further relates to a kind of control method based on said apparatus.
Background technology
Semiconductor surface cleaning device at present commonly used adopts fixing positioner, generally is screwed the height of brush, only when brush is changed by people's disposable adjustment of working, make brush and silicon chip surface reach close state of contact.Because the brush of brush can become softening relatively in the latter half in its useful life, slight bending and wearing and tearing, again because silicon chip surface particle removal efficient is relevant with the normal pressure of the relative silicon chip surface of brush, the deliquescing of brush, become curved, perhaps wearing and tearing can cause silicon chip surface particle to remove the efficient reduction, make the adjust frequency increase and the cleaning performance variation of brush in the actual use.
Summary of the invention
Technical problem to be solved by this invention provides a kind of control device of brush head of film brushing machine, and it can dynamically adjust the position of brush, and brush is closely contacted with silicon chip surface, has prolonged the useful life of brush, and has improved cleaning efficiency.For this reason, the present invention also will provide a kind of control method of brush head of film brushing machine.
In order to solve above technical problem, the invention provides a kind of control device of brush head of film brushing machine, comprise: a CD-ROM drive motor, rolling bearing is set below CD-ROM drive motor, this rolling bearing is positioned at one perpendicular to silicon chip and the fixing solenoid above silicon chip, solenoidal skin is tied with coil, has electric current in this coil, solenoid inside is generated an electromagnetic field, the rolling bearing below is connected with a brush, skin is with soft magnet, and this soft magnet drives rolling bearing by electromagnetic force and moves up and down and then change the brush of brush and the exposure level of silicon chip.
The present invention also provides a kind of control method based on said apparatus, comprising: (1) feeds electric current for the outer field coil of solenoid, forms electromagnetic field, to the soft magnet generation and the vertical and downward pressure of silicon chip direction of its inside; (2) size of electric current in the adjustment coil makes soft magnet drive rolling bearing and moves in vertical direction, regulates the brush of brush and the exposure level of silicon chip; (3) drive rolling bearing by CD-ROM drive motor and rotate, and then drive the brush rotation, make brush by removing its surperficial particle with the silicon chip friction.
Because the present invention adopts the mode of electromagnetic force to guarantee that by setting constant normal pressure brush has stable particle removal efficiency at its life period, prolonged the useful life of brush, and improved cleaning efficiency.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is the structure chart of the control device of brush head of film brushing machine of the present invention.
Embodiment
As shown in Figure 1, the control device of brush head of film brushing machine of the present invention comprises: a CD-ROM drive motor, rolling bearing is set below CD-ROM drive motor, this rolling bearing is positioned at one perpendicular to silicon chip and the fixing solenoid above silicon chip, solenoidal skin is tied with coil, has electric current in this coil, solenoid inside is generated an electromagnetic field, the rolling bearing below is connected with a brush, skin is with soft magnet, and this soft magnet drives rolling bearing by electromagnetic force and moves up and down and then change the brush of brush and the exposure level of silicon chip.
Soft magnet in the said apparatus adopts cylindric soft magnet, is set on the rolling bearing, and passing in and out the remanent magnetism that itself produces behind the magnetic field repeatedly is zero.Rolling bearing can rotate by being connected with CD-ROM drive motor, and the magnetic field force induced effect of its outer field soft magnet also can drive it and moves up and down.The driving shaft of brush can directly be connected with rolling bearing, also can be connected with rolling bearing by a spring, and brush can be moved up and down with rolling bearing on the one hand, on the other hand also can be around drive shaft turns.
The control method of said apparatus comprises: (1) feeds electric current for the outer field coil of solenoid, forms electromagnetic field, to the soft magnet generation and the vertical and downward pressure of silicon chip direction of its inside; (2) size of electric current in the adjustment coil makes soft magnet drive rolling bearing and moves in vertical direction, regulates the brush of brush and the exposure level of silicon chip; (3) drive rolling bearing by CD-ROM drive motor and rotate, and then drive the brush rotation, make brush by removing its surperficial particle with the silicon chip friction.
Because electromagnetic force F is directly proportional with electric current I, as long as current constant, electromagnetic force is just constant, thereby stablizes the particle removal efficiency of brush to silicon chip surface.Softening or the wearing and tearing of the brush of brush in the use of brush, its electromagnetic force that is subjected to is certain, still can connect airtight with silicon chip surface to contact, and does not influence the efficient of cleaning.The manual adjustment of this device is also very simple in addition, only need to change electric current in the coil size can the position of mobile brush be easy to use by changing magnetic field force.
Claims (3)
1, a kind of control device of brush head of film brushing machine, it is characterized in that, comprise: a CD-ROM drive motor, below described CD-ROM drive motor, rolling bearing is set, described rolling bearing is positioned at one perpendicular to silicon chip and the fixing solenoid above this silicon chip, described solenoidal skin is tied with coil, has electric current in this coil, described solenoid inside is generated an electromagnetic field, described rolling bearing below is connected with a brush, described rolling bearing skin is with soft magnet, and this soft magnet drives described rolling bearing by electromagnetic force and moves up and down and change the brush of described brush and the exposure level of described silicon chip.
2, the control device of brush head of film brushing machine as claimed in claim 1 is characterized in that, described rolling bearing is connected by a spring with described brush.
3, a kind of control method of control device of brush head of film brushing machine according to claim 1 is characterized in that, comprises the steps:
(1) feeds electric current for the outer field coil of solenoid, form electromagnetic field, the soft magnet generation and the vertical and downward pressure of silicon chip direction of its inside;
(2) size of electric current in the adjustment coil makes soft magnet drive rolling bearing and moves in vertical direction, regulates the brush of brush and the exposure level of silicon chip;
(3) drive rolling bearing by CD-ROM drive motor and rotate, and then drive the brush rotation, make brush by removing its surperficial particle with the silicon chip friction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710094244A CN100576436C (en) | 2007-11-19 | 2007-11-19 | The control device of brush head of film brushing machine and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710094244A CN100576436C (en) | 2007-11-19 | 2007-11-19 | The control device of brush head of film brushing machine and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101441978A CN101441978A (en) | 2009-05-27 |
| CN100576436C true CN100576436C (en) | 2009-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710094244A Active CN100576436C (en) | 2007-11-19 | 2007-11-19 | The control device of brush head of film brushing machine and method |
Country Status (1)
| Country | Link |
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| CN (1) | CN100576436C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101758037B (en) * | 2009-12-30 | 2011-12-21 | 宁波大榭开发区综研化学有限公司 | Device for removing adhesive coating layer of adhesive tape and thickness measuring instrument applying device |
| CN103286084A (en) * | 2013-06-20 | 2013-09-11 | 三星高新电机（天津）有限公司 | Automatic cleaning device |
| CN106714987B (en) * | 2014-09-26 | 2019-04-02 | 盛美半导体设备（上海）有限公司 | The device and method for cleaning semi-conductor silicon chip |
| CN104576495B (en) * | 2015-01-08 | 2017-07-25 | 北京七星华创电子股份有限公司 | A kind of device for clamping wafer |
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2007
- 2007-11-19 CN CN200710094244A patent/CN100576436C/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN101441978A (en) | 2009-05-27 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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| TR01 | Transfer of patent right |
Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |