CN100550338C - Polluting device for anti-slipping sheet - Google Patents
Polluting device for anti-slipping sheet Download PDFInfo
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- CN100550338C CN100550338C CNB2007100394840A CN200710039484A CN100550338C CN 100550338 C CN100550338 C CN 100550338C CN B2007100394840 A CNB2007100394840 A CN B2007100394840A CN 200710039484 A CN200710039484 A CN 200710039484A CN 100550338 C CN100550338 C CN 100550338C
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- buffering
- assembly
- sheet
- polluting device
- smooth
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Abstract
The invention provides a kind of polluting device for anti-slipping sheet that is applied to process cavity, it includes a buffering and accepts assembly; And several are positioned a desire and install keeper in the board of this polluting device for anti-slipping sheet in order to this buffering is accepted assembly, described keeper includes a top keeper, its include smooth of top location with several in order to should the location, top smooth accept assembly with this buffering and be locked in locking part above this board wall; One below keeper, it includes smooth of a below positioning supports sheet, below location and accepts the below locking part that assembly is locked in this board wall with several in order to will this below to locate smooth, this below positioning supports sheet and this buffering.It utilizes a kind of polluting device for anti-slipping sheet that cavity pollutes, installs easily, is convenient to keep in repair, cost is low that can not cause, be installed in mechanical arm and get chip to the path of technique platform, to accept chip by mechanical arm clamps landing or landing on chip takes turns dish.
Description
Technical field
The present invention relates to a kind of polluting device for anti-slipping sheet, particularly a kind of polluting device for anti-slipping sheet that is applied to high current ion implanter.
Background technology
Along with the semiconductor subassembly technology is more and more progressive, the making of assembly is more and more accurate, accordingly, also get over precision for the requirement in the degree of depth and the distribution, therefore the mode of utilizing diffusion is traditionally gone into semiconductor subassembly inside with dopant ion or atom by diffusion into the surface, reach doping purpose method, to be subjected to caused horizontal proliferation in the restriction of solid solubility and the diffusion process because of the concentration of foreign atom, and can't be used in the sub-micron component process, the substitute is ion implantation.Ion implantation can provide the accurate control of foreign atom in the degree of depth and CONCENTRATION DISTRIBUTION, and foreign ion is the pattern with charged ion during the course, is accelerated to a certain energy and direct bump chip and enter the appropriate location of intracell.Therefore accurate control is come in the degree of depth, atom dosage and the kind available energy that distributes, time, electric current, analysis magnetic field.
The terminal point of ion implantor promptly is the position that chip is placed, general operation person can be positioned over chip the output/input platform in the atmosphere, board can be sent chip in the vacuum chamber to automatically, arrive and inject the place, after chip is finished suitable PROCESS FOR TREATMENT, chip can be sent back to the output/input platform (Load/Unload Stage) that is arranged in atmosphere, finishes all programs.But, when mechanical arm is got chip and delivered in the vacuum chamber, very easily because grasp error, and cause the chip landing to strike board chamber wall, and cause whole chamber internal contamination.
Therefore, the present invention proposes a kind of polluting device for anti-slipping sheet, to address the above problem.
Summary of the invention
Main purpose of the present invention is, a kind of polluting device for anti-slipping sheet is provided, and it can effectively prevent the chip bump chamber of landing and produce cracked situation generation, and then avoid the chamber internal contamination.
Another object of the present invention is to, a kind of polluting device for anti-slipping sheet is provided, it can effectively avoid cracked because of chip, and the technology that is produced is incured loss through delay, and the waste of unnecessary technology.
A further object of the present invention is, provides a kind of and is difficult for causing metal and particle contamination, and have low cost, easily installation and maintenance and the polluting device for anti-slipping sheet that can not connect erosion with other parts concurrently.
The invention provides a kind of polluting device for anti-slipping sheet, it includes a buffering and accepts assembly; And several are in order to the keeper in the board of buffering being accepted assembly and being positioned desire installing polluting device for anti-slipping sheet, and described keeper includes:
One top keeper, its include smooth of top location with several in order to should the location, top smooth accept assembly with this buffering and be locked in locking part above this board wall;
One below keeper, it includes smooth of a below positioning supports sheet, below location and accepts the below locking part that assembly is locked in this board wall with several in order to will this below to locate smooth, this below positioning supports sheet and this buffering.
The present invention can effectively avoid technology chips slide plate to strike process cavity, fragmentation and the chamber contamination of may producing, and the follow-up all handling procedures that cause because of pollution spend.
Further specify the present invention below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is the embodiments of the invention schematic diagram.
Fig. 3 is the end view of Fig. 2.
Label declaration
Smooth of location, 1 polluting device for anti-slipping sheet, 22 belows
12 bufferings are accepted assembly 24 below positioning supports sheets
14 top keepers, 26 locked assemblies
16 below keepers, 28 mechanical arms
Smooth 30 chip in 18 tops location takes turns dish
20 locked assemblies, 32 chambers
Embodiment
The present invention relates to a kind of polluting device for anti-slipping sheet, it mainly utilizes buffering to accept assembly, at the suitable fixation kit of collocation, buffering is accepted the position that assembly is positioned the landing of chip possibility, to accept the chip of landing.
Wherein to accept assembly can be to utilize the stainless steel soft net to be used as buffering to accept assembly to this buffering, because the stainless steel soft netting gear have be difficult for destroyed, can not cause the problem of metallic pollution and particle, and the soft net cost of stainless steel metal is low, it is all very easy to install and keep in repair, in addition, advantages such as the soft net of stainless steel metal can not connect erosion with other parts, and is therefore safer, reliable.
See also Fig. 1, it is the schematic diagram of a preferred embodiment of the present invention.As shown in the figure, the present invention includes a buffering and accepts assembly 12, in order to buffering is accepted a top keeper 14 and the below keeper 16 in the board that assembly 12 tops and below be individually fixed in need polluting device for anti-slipping sheet 1.And top keeper 14 includes smooth 18 of location, a top and suitable locked assembly 20, buffering is accepted assembly 12 smooth spreading apart.Below keeper 16 includes smooth 22 of location, a below, a below positioning supports sheet 24 and suitable locked assembly 26, and wherein these below positioning supports sheet 24 ends inwardly batch a radian, take off the chip that slips out to block smoothly.
See also Fig. 1, Fig. 2 and Fig. 3, wherein Fig. 2 and Fig. 3 are for being installed in polluting device for anti-slipping sheet of the present invention on embodiment schematic diagram and end view on the ion implantor platform.As shown in the figure, polluting device for anti-slipping sheet 1 of the present invention be utilize smooth 18 of location, top, suitably locked assembly 20, smooth 22 of location, below, a below positioning supports sheet 24 and suitably locked assembly 26 be installed in mechanical arm 28 and chip in the processing chamber (wheel chamber) and take turns on the chamber wall 32 of 30 in dish.Therefore, otherwise get chip and be placed to when carrying out on the rotation dish that ion injects or will finish when being placed to chip on the chip spin plate-spinning that ion injects and taking turns on the dish 30 when mechanical arm 28 takes turns dish 30 from chip, chip is because mechanical arm 28 pincers are got error and landing, perhaps because place error, and make chip take turns dish 30 when dropping from microarray biochip, chip will drop down onto buffering and accept on the assembly 12, and can directly not strike chamber 32 walls, so can avoid chip, and and then avoid after the chip fragmentation the too high problem of the pollution that will produce with pollute caused all and spend as costs such as board maintenances.
In sum, the present invention is a kind of polluting device for anti-slipping sheet, and it can effectively avoid technology chips slide plate to strike process cavity, fragmentation and the chamber contamination of may producing, and the follow-up all handling procedures that cause because of pollution spend.
Above-described embodiment only is used to illustrate technological thought of the present invention and characteristics, its purpose makes those skilled in the art can understand content of the present invention and is implementing according to this, when can not only limiting claim of the present invention with present embodiment, be all equal variation or modifications of doing according to disclosed spirit, still drop in the claim of the present invention.
Claims (5)
1, a kind of polluting device for anti-slipping sheet is characterized in that: include a buffering and accept assembly; And several are positioned a desire and install keeper in the board of this polluting device for anti-slipping sheet in order to this buffering is accepted assembly, and described keeper includes:
One top keeper, its include smooth of top location with several in order to should the location, top smooth accept assembly with this buffering and be locked in locking part above this board wall;
One below keeper, it includes smooth of a below positioning supports sheet, below location and accepts the below locking part that assembly is locked in this board wall with several in order to will this below to locate smooth, this below positioning supports sheet and this buffering.
2, polluting device for anti-slipping sheet according to claim 1 is characterized in that: this board is the ion implantor platform.
3, polluting device for anti-slipping sheet according to claim 1 is characterized in that: it is the soft net of stainless steel metal that this buffering is accepted assembly.
4, polluting device for anti-slipping sheet according to claim 1 is characterized in that: this below positioning supports sheet end is crooked inwardly.
5, polluting device for anti-slipping sheet according to claim 2 is characterized in that: this polluting device for anti-slipping sheet is installed in the biography sheet mechanical arm of this ion implantor platform and chip and takes turns on the chamber wall between dish.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100394840A CN100550338C (en) | 2007-04-13 | 2007-04-13 | Polluting device for anti-slipping sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100394840A CN100550338C (en) | 2007-04-13 | 2007-04-13 | Polluting device for anti-slipping sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101286471A CN101286471A (en) | 2008-10-15 |
| CN100550338C true CN100550338C (en) | 2009-10-14 |
Family
ID=40058567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100394840A Expired - Fee Related CN100550338C (en) | 2007-04-13 | 2007-04-13 | Polluting device for anti-slipping sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100550338C (en) |
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2007
- 2007-04-13 CN CNB2007100394840A patent/CN100550338C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101286471A (en) | 2008-10-15 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091014 Termination date: 20100413 |