CN100539006C - Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diodes - Google Patents

Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diodes Download PDF

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Publication number
CN100539006C
CN100539006C CNB2006101403734A CN200610140373A CN100539006C CN 100539006 C CN100539006 C CN 100539006C CN B2006101403734 A CNB2006101403734 A CN B2006101403734A CN 200610140373 A CN200610140373 A CN 200610140373A CN 100539006 C CN100539006 C CN 100539006C
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China
Prior art keywords
pixel
sub
contact frame
donor film
luminous layer
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CN1944069A (en
Inventor
鲁硕原
李城宅
金茂显
宋明原
金善浩
成镇旭
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Samsung Display Co Ltd
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Samsung Mobile Display Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED

Abstract

The present invention relates to a kind of laser induced thermal imaging apparatus and use this device fabrication method of organic light emitting diodes, it utilizes in a vacuum, and magnetic force is stacked to be subjected to main substrate and donor film, and is used for being subjected to form pel array on the main substrate at this.Substrate table comprises magnet or magnetic material.This is had by main substrate to be used to form the pixel region of first, second and the 3rd sub-pixel, and this donor film has and will be transferred to the organic luminous layer of this pixel region.The laser oscillator irradiating laser is to this donor film.Contact frame is suitable for being arranged between this substrate table and this laser oscillator, and is used for forming magnetic force with this substrate table.This contact frame comprises the opening that laser passes.The contact frame feed mechanism moves this contact frame on the direction of this substrate table.

Description

Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diodes
Technical field
The manufacture method that the present invention relates to laser induced thermal imaging apparatus and use the Organic Light Emitting Diode of this equipment, the manufacture method that relates in particular to laser induced thermal imaging apparatus and use the Organic Light Emitting Diode of this equipment, it uses the stacked donor film of magnetic force and is subjected to main substrate.
Background technology
Organic luminescent device comprises the luminescent layer that is formed between first and second electrodes, and luminous when applying voltage between electrode.Laser induced thermal imaging (LITI) technology can be used to make organic luminescent device.
Usually, for laser induced thermal imaging, need laser at least, be subjected to main substrate and donor substrate (or donor film).In the laser induced thermal imaging method, with laser radiation on the donor substrate that comprises base substrate, photo-thermal conversion coating (LTHC) and transfer layer (transfer layer) (or imaging layer), thereby will change into heat by the laser of base substrate at the photo-thermal conversion coating, and make the photo-thermal conversion coating be out of shape and expansion.Like this, the transfer layer of adjacent light heat conversion layer also is out of shape and expands, and transfers to (or being imaged onto) and be subjected on the main substrate.
When carrying out laser induced thermal imaging method, wherein carry out the chamber of shifting and become vacuum state usually.Yet in the prior art, problem is, when carrying out laser to the conversion of heat under vacuum state, because in donor substrate be subjected to have formed between the main substrate at interval (or gap) or impurity and transfer layer does not shift well.Therefore, in the laser induced thermal imaging method, stacked alms giver is important with being subjected to main substrate, in order to solve at interval or the problem of impurity, has worked out the whole bag of tricks.
Fig. 1 is a cutaway view, shows the prior art laser induced thermal imaging apparatus 10 that is used to address the above problem.According to Fig. 1, laser induced thermal imaging apparatus 10 comprises substrate table 12 that is positioned at chamber 11 and the laser irradiation apparatus 13 that is positioned at 11 tops, chamber.Substrate table 12 is to be used for placing the platform that is subjected to main substrate 14 and donor film 15 of introducing chamber 11 successively.
Before being subjected to main substrate 14, be laminated to each other by main substrate 14 and donor film 15 at the transfer layer that shifts donor film 15.During cascade, chamber 11 does not remain on vacuum state usually, and uses vacuum pump P to come absorption impurity.Owing to be not in vacuum state in chamber during cascade, thus gained organic light-emitting device reliability or life-span because the oxygen in the chamber 11, moisture etc. and reducing.
On the other hand, when chamber 11 when during cascade remaining on vacuum state, be difficult to definitely prevent be subjected between main substrate 14 and the donor film 15 to produce impurity 1 and at interval.
Summary of the invention
Therefore, one aspect of the present invention provides a kind of laser induced thermal imaging apparatus and uses this device fabrication method of organic light emitting diodes, it utilizes in vacuum state, and magnetic force is stacked to be subjected to main substrate and donor film and can to prevent be subjected to produce impurity and interval between main substrate and the donor film, and is used for being subjected to form pel array on the main substrate.
Aforementioned and/or other aspects of the present invention realize by a kind of laser induced thermal imaging apparatus is provided, this equipment comprises: the substrate table that comprises magnet or magnetic material, describedly be subjected to main substrate and donor film sequentially feeding and be layered on this substrate table, this is subjected to main substrate to have the pixel definition district, wherein form first, second and the 3rd sub-pixel with the bar pattern, this donor film has the organic luminous layer that will shift in this pixel definition district; Be used for the laser oscillator of laser radiation to this donor film; Contact frame is suitable for being arranged between this substrate table and this laser oscillator, is used for forming magnetic force with this substrate table, and comprises the opening that laser passes; Be used for moving the contact frame feed mechanism of this contact frame along the substrate table direction; And the chamber, described substrate table and described contact frame are arranged in this chamber, and this chamber is suitable for during cascade being in vacuum state what this was subjected to main substrate and this donor film.
According to first embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by this laser induced thermal imaging apparatus manufacturing, this method comprises: place the main substrate that is subjected to pixel definition district and have on the substrate table of magnet, form first, second and the 3rd sub-pixel with the bar pattern in this pixel definition district; Place donor film and be subjected on the main substrate at this, this donor film has the organic luminous layer that is transferred in this pixel definition district; Utilize magnetic attraction that first contact frame is attached to first donor film, this first contact frame has magnet, and first opening is formed on this first contact frame, and the laser that is used to shift the first color organic luminous layer passes this opening; The first opening irradiating laser that passes this first contact frame to this first donor film, thereby this first color organic luminous layer is transferred to first sub-pixel area; Separate this first contact frame from this first donor film; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction that second contact frame is attached to second donor film, this second contact frame has magnet, and second opening is formed on this second contact frame, and the laser that is used to shift the second color organic luminous layer passes this second opening; Thereby the second opening irradiating laser that passes this second contact frame is transferred to second sub-pixel area to this second donor film with this second color organic luminous layer; Separate this second contact frame from this second donor film; The 3rd donor film that placement has the 3rd color organic luminous layer is subjected to replace on the main substrate this second donor film at this; Utilize magnetic attraction that the 3rd contact frame is attached to the 3rd donor film, the 3rd contact frame has magnet, and the 3rd opening is formed on the 3rd contact frame, and the laser that is used to shift the 3rd color organic luminous layer passes the 3rd opening; And thereby the 3rd opening irradiating laser that passes the 3rd contact frame is transferred to the 3rd sub-pixel area to the 3rd donor film with the 3rd color organic luminous layer.
According to second embodiment of the invention on the other hand, laser induced thermal imaging apparatus comprises: the substrate table that comprises magnet or magnetic material, describedly be subjected to main substrate and donor film sequentially feeding and be layered on this substrate table, this is subjected to main substrate to have the pixel definition district, form first, second and the 3rd sub-pixel with mosaic (mosaicpattern) in this pixel definition district, this donor film has the organic luminous layer that will shift in this pixel definition district; Be used for the laser oscillator of laser radiation to this donor film; Contact frame is suitable for being arranged between this substrate table and this laser oscillator, is used for forming magnetic force with this substrate table, and comprises the opening that this laser passes; Be used on the direction of this substrate table, moving the contact frame feed mechanism of this contact frame; And the vacuum chamber that is suitable for receiving at least this substrate table and this contact frame.
According to second embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by this laser induced thermal imaging apparatus manufacturing, this method comprises: place the main substrate that is subjected to pixel definition district and have on the substrate table of magnet, form first, second and the 3rd sub-pixel with mosaic in this pixel definition district; Place donor film and be subjected on the main substrate at this, this donor film has the organic luminous layer that is transferred in this pixel definition district; Utilize magnetic attraction that first contact frame is attached to first donor film, this first contact frame has magnet, and first opening is formed on this first contact frame, and the laser that is used to shift the first color organic luminous layer passes this opening; The first opening irradiating laser that passes this first contact frame to this first donor film, thereby this first color organic luminous layer is transferred to first sub-pixel area; Separate this first contact frame from this first donor film; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction that second contact frame is attached to second donor film, this second contact frame has magnet, and second opening is formed on this second contact frame, and the laser that is used to shift the second color organic luminous layer passes this second opening; Thereby the second opening irradiating laser that passes this second contact frame is transferred to second sub-pixel area to this second donor film with this second color organic luminous layer; Separate this second contact frame from this second donor film; The 3rd donor film that placement has the 3rd color organic luminous layer is subjected to replace on the main substrate this second donor film at this; Utilize magnetic attraction that the 3rd contact frame is attached to the 3rd donor film, the 3rd contact frame has magnet, and the 3rd opening is formed on the 3rd contact frame, and the laser that is used to shift the 3rd color organic luminous layer passes the 3rd opening; And thereby the 3rd opening irradiating laser that passes the 3rd contact frame is transferred to the 3rd sub-pixel area to the 3rd donor film with the 3rd color organic luminous layer.
One side according to third embodiment of the invention, a kind of laser induced thermal imaging apparatus is provided, comprise: the substrate table that comprises magnet or magnetic material, describedly be subjected to main substrate and donor film sequentially feeding and be layered on this substrate table, this is subjected to main substrate to have the pixel definition district, form first, second and the 3rd sub-pixel with delta pattern in this pixel definition district, this donor film has the organic luminous layer that will shift in this pixel definition district; Be used for the laser oscillator of irradiating laser to this donor film; Contact frame is suitable for being arranged between this substrate table and this laser oscillator, is used for forming magnetic force with this substrate table, and comprises the opening that laser can pass; Be used for moving the contact frame feed mechanism of this contact frame in this substrate table direction; And the vacuum chamber that is suitable for receiving at least this substrate table and this contact frame.
According to third embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by this laser induced thermal imaging apparatus manufacturing, this method comprises: place the main substrate that is subjected to pixel definition district and have on the substrate table of magnet, form first, second and the 3rd sub-pixel with delta pattern in this pixel definition district; Place donor film and be subjected on the main substrate at this, this donor film has the organic luminous layer that is transferred in this pixel definition district; Utilize magnetic attraction that first contact frame is attached to first donor film, this first contact frame has magnet, and first opening is formed on this first contact frame, and the laser that is used to shift the first color organic luminous layer passes this opening; The first opening irradiating laser that passes this first contact frame to this first donor film, thereby this first color organic luminous layer is transferred to first sub-pixel area; Separate this first contact frame from this first donor film; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction that second contact frame is attached to second donor film, this second contact frame has magnet, and second opening is formed on this second contact frame, and the laser that is used to shift the second color organic luminous layer passes this second opening; Thereby the second opening irradiating laser that passes this second contact frame is transferred to second sub-pixel area to this second donor film with this second color organic luminous layer; Separate this second contact frame from this second donor film; The 3rd donor film that placement has the 3rd color organic luminous layer is subjected to replace on the main substrate this second donor film at this; Utilize magnetic attraction that the 3rd contact frame is attached to the 3rd donor film, the 3rd contact frame has magnet, and the 3rd opening is formed on the 3rd contact frame, and the laser that is used to shift the 3rd color organic luminous layer passes the 3rd opening; And thereby the 3rd opening irradiating laser that passes the 3rd contact frame is transferred to the 3rd sub-pixel area to the 3rd donor film with the 3rd color organic luminous layer.
One side according to fourth embodiment of the invention, a kind of laser induced thermal imaging apparatus that is used to form the luminescent layer of Organic Light Emitting Diode is provided, a pixel comprises having first at least three sub-pixels to the 3rd luminescent layer in this Organic Light Emitting Diode, at least one of this first to the 3rd luminescent layer jointly is formed on the whole surface of pixel portion, this equipment comprises: the chamber that comprises substrate table and contact frame, this substrate table has magnet or magnetic material, this contact frame is suitable for being arranged between this substrate table and the laser oscillator, carries out laser induced thermal imaging in this chamber; This laser oscillator is used for irradiating laser to this contact frame and donor film; And contact frame feed mechanism, be used for moving this contact frame in this substrate table direction, wherein this contact frame comprises opening, described first and second sub-pixels and this opening form accordingly, and this substrate table and this contact frame form magnetic force, and wherein said chamber is suitable for and will is subjected to the stacked space of main substrate and donor film to remain on vacuum state.
According to fourth embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between first and second electrodes by this laser induced thermal imaging apparatus manufacturing, this method comprises: place have first, second and the 3rd sub-pixel area that constitute a pixel be subjected to main substrate on substrate table with magnet or magnetic material; Place donor film and be subjected on the main substrate at this, this donor film has the organic luminous layer that is transferred in this pixel definition district; The contact frame of utilizing magnetic attraction will have magnet or magnetic material is attached to first donor film, and opening is formed on this contact frame, and the laser that is used to shift the first and second color organic luminous layers passes this opening; The opening that passes this contact frame from the laser oscillator irradiating laser to this first donor film, thereby this first color organic luminous layer is transferred to this first sub-pixel area; Separate this contact frame from this first donor film; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction once more this contact frame to be attached to second donor film; And thereby the opening that passes this contact frame is transferred to this second sub-pixel area from the laser oscillator irradiating laser to this second donor film with this second color organic luminous layer, wherein the luminescent layer of the 3rd sub-pixel deposits and is formed on a pixel portion zone, forms described pixel in this pixel portion zone.
One side according to fifth embodiment of the invention, a kind of laser induced thermal imaging apparatus is provided, comprise: the substrate table that comprises magnet, be subjected to main substrate and donor film sequentially feeding and be layered on this substrate table, this is subjected to main substrate to have the pixel definition district, first and second sub-pixels and two the 3rd sub-pixels constitute a pixel in this pixel definition district, and this donor film has the organic luminous layer that will shift in this pixel definition district; Be used for the laser oscillator of irradiating laser to this donor film; Contact frame is suitable for being arranged between this substrate table and this laser oscillator, comprises the magnetic material that is used for forming with this substrate table magnetic force, and comprises the opening that laser passes; The contact frame feed mechanism is used for moving this contact frame on the direction of this substrate table; And the chamber, described substrate table and described contact frame are arranged in this chamber, and this chamber is suitable for during cascade being in vacuum state what this was subjected to main substrate and this donor film, and wherein this contact frame comprises first and second frameworks; First and second openings are formed on this first and second framework; This first and second sub-pixel is formed on this first opening, and two the 3rd sub-pixels are formed on this second opening, thereby this first and second framework is alternately installed the luminescent layer that is formed with OLED.
According to fifth embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between first and second electrodes by this laser induced thermal imaging apparatus manufacturing, this method comprises: placement has first and second pixel regions of a pixel of formation and the main substrate that is subjected to of two the 3rd sub-pixel area has on the substrate table of magnet; Place donor film and be subjected on the main substrate at this, this donor film has the organic luminous layer that is transferred in this pixel definition district; First contact frame of utilizing magnetic attraction will have magnet is attached to first donor film, and opening is formed on this contact frame, and the laser that is used to shift the first and second color organic luminous layers passes this opening; The opening irradiating laser that passes this first contact frame arrives this first donor film, thereby this first color organic luminous layer is transferred to this first sub-pixel area; Separate this first contact frame from this first donor film; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction once more first contact frame to be attached to second donor film; Thereby the opening irradiating laser that passes this first contact frame is transferred to this second sub-pixel area to this second donor film with this second color organic luminous layer; Separate this first contact frame from this second donor film, and substitute this first contact frame with second contact frame, this second contact frame comprises magnet, and opening is formed on this second contact frame, and the laser that is used to shift the 3rd color organic luminous layer of the 3rd donor film passes this opening; The 3rd donor film that placement has the 3rd color organic luminous layer is subjected to replace on the main substrate this second donor film at this; Utilize magnetic attraction that this second contact frame is attached to the 3rd donor film; And thereby the opening irradiating laser that passes this second contact frame is transferred to two the 3rd pixel regions to the 3rd donor film with the 3rd color organic luminous layer.
One side according to sixth embodiment of the invention, a kind of laser induced thermal imaging apparatus that is used to form the luminescent layer of Organic Light Emitting Diode is provided, comprise: comprise substrate table and be suitable for receiving the chamber of contact frame, this substrate table has magnet or magnetic material, this contact frame is suitable for being arranged between this substrate table and the laser oscillator, carries out laser induced thermal imaging in this chamber; This laser oscillator is used for irradiating laser to this contact frame and donor film; And the contact frame feed mechanism, being used for moving this contact frame in this substrate table direction, this contact frame comprises magnet or magnetic material, first, second and the 3rd contact frame; First sub-pixel, second sub-pixel and two the 3rd sub-pixels constitute a pixel, this first opening corresponding with first sub-pixel area is formed on this first contact frame, this second opening corresponding with second sub-pixel area is formed on this second contact frame, and three opening corresponding with two the 3rd sub-pixel area is formed on the 3rd framework; And this first, second and the 3rd contact frame thereby the luminescent layer that is formed with OLED alternately is installed, wherein this chamber is suitable for during cascade being in vacuum state what be subjected to main substrate and donor film.
According to sixth embodiment of the invention on the other hand, provide a kind of and have the method for organic light emitting diodes that is formed on the luminescent layer between first and second electrodes by this laser induced thermal imaging apparatus manufacturing, this method comprises: place have first and second pixel regions that constitute a pixel and two the 3rd sub-pixel area be subjected to main substrate on substrate table with magnet or magnetic material; Placement has the organic luminous layer that will be transferred in this pixel definition district donor film is subjected on the main substrate at this; First contact frame of utilizing magnetic attraction will have magnet or magnetic material is attached to first donor film, and opening is formed on this contact frame, and the laser that is used to shift the first color organic luminous layer passes this opening; Opening by this first contact frame from the laser oscillator irradiating laser to this first donor film, thereby shift this first color organic luminous layer to this first sub-pixel area; Separate this first contact frame from this first donor film, and substitute this first contact frame with second contact frame, this second contact frame comprises magnet or magnetic material, opening is formed on this second contact frame, and the laser that is used to shift the second color organic luminous layer of this second donor film passes this opening; Second donor film that placement has the second color organic luminous layer is subjected to replace on the main substrate this first donor film at this; Utilize magnetic attraction that this second contact frame is attached to second donor film; The opening that passes this second contact frame from the laser oscillator irradiating laser to this second donor film, thereby shift this second color organic luminous layer to this second sub-pixel area; Separate this second contact frame from this second donor film, and replace this first contact frame with second contact frame, this second contact frame comprises magnet or magnetic material, opening is formed on the 3rd contact frame, and the laser that is used to shift the 3rd color organic luminous layer of the 3rd donor film passes this opening; The 3rd donor film that placement has the 3rd color organic luminous layer is subjected to replace on the main substrate this second donor film at this; Utilize magnetic attraction that the 3rd contact frame is attached to the 3rd donor film; And the opening that passes the 3rd contact frame from the laser oscillator irradiating laser to the 3rd donor film, thereby shift the 3rd color organic luminous layer to the 3rd sub-pixel area.
Description of drawings
In conjunction with the accompanying drawings, these and other aspects of the present invention and feature will become obviously and easy to understand from following description to exemplary embodiment, in the accompanying drawing:
Fig. 1 is a cutaway view, and the conventional laser induced thermal imaging apparatus is shown;
Fig. 2 is a decomposition diagram, and an embodiment according to laser induced thermal imaging apparatus of the present invention is shown;
Fig. 3 A and Fig. 3 B are plane graphs, and an example according to the substrate table of laser induced thermal imaging apparatus of the present invention is shown;
Fig. 4 is the view that illustrates according to an example of the laser oscillator of laser induced thermal imaging apparatus of the present invention;
Fig. 5 A, Fig. 5 B and Fig. 5 C are plane graphs, and first contact frame, second contact frame and the 3rd contact frame according to first embodiment of the invention are shown respectively;
Fig. 5 D is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first, second and the 3rd contact frame shown in Fig. 5 A, 5B and the 5C is shown;
Fig. 6 is a perspective view, and the contact frame feed mechanism of laser induced thermal imaging apparatus according to an embodiment of the invention is shown;
Fig. 7 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of first embodiment of the invention is shown;
Fig. 8 A, Fig. 8 B and Fig. 8 C are plane graphs, and first contact frame, second contact frame and the 3rd contact frame according to second embodiment of the invention are shown respectively;
Fig. 8 D is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first, second and the 3rd contact frame shown in Fig. 8 A, 8B and the 8C is shown;
Fig. 9 A and Fig. 9 B are plane graphs, and first contact frame and second contact frame according to third embodiment of the invention are shown respectively;
Fig. 9 C is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first and second contact frame shown in Fig. 9 A and the 9B is shown;
Figure 10 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of third embodiment of the invention is shown;
Figure 11 A is a plane graph, and the contact frame according to fourth embodiment of the invention is shown;
Figure 11 B is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by the contact frame shown in Figure 11 A is shown;
Figure 12 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of fourth embodiment of the invention is shown;
Figure 13 A and Figure 13 B are plane graphs, illustrate respectively according to an example of first contact frame of fifth embodiment of the invention and an example of second contact frame;
Figure 13 C is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first and second contact frame shown in Figure 13 A and the 13B is shown;
Figure 13 D and 13E are plane graphs, illustrate respectively according to another example of first contact frame of fifth embodiment of the invention and another example of second contact frame;
Figure 13 F is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first and second contact frame shown in Figure 13 D and the 13E is shown;
Figure 14 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of fifth embodiment of the invention is shown;
Figure 15 A, Figure 15 B and Figure 15 C are plane graphs, and an example of a example according to first contact frame of sixth embodiment of the invention, second contact frame and an example of the 3rd contact frame are shown respectively;
Figure 15 D is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first, second and the 3rd contact frame shown in Figure 15 A, 15B and the 15C is shown;
Figure 15 E, Figure 15 F and Figure 15 G are plane graphs, and another example according to first contact frame of sixth embodiment of the invention, another example of second contact frame and another example of the 3rd contact frame are shown respectively;
Figure 15 H is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by first, second and the 3rd contact frame shown in Figure 15 E, 15F and the 15G is shown;
Figure 16 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of sixth embodiment of the invention is shown.
Embodiment
＜embodiment 1 〉
Hereinafter, exemplary embodiment of the present invention will be described with reference to the drawings.Here, when an element was described as being connected to another element, this element can be directly connected to another element or be connected to another element indirectly by three element.In addition, for clarity sake omitted optional some parts to complete understanding the present invention.In addition, similar Reference numeral is represented similar element in the full text.Fig. 2 is a perspective view, and the embodiment according to laser induced thermal imaging apparatus of the present invention is shown.With reference to figure 2, laser induced thermal imaging apparatus 100 comprises substrate table (stage) 110, laser oscillator 120, contact frame 130, contact frame feed mechanism 140 and chamber 150.
At first, the chamber that is used for laser induced thermal imaging apparatus 100 can be used as chamber 150 and uses.Substrate table 110 and contact frame 130 are installed in the chamber 150.Donor film 200 and be put in the chamber 150 by main substrate 300.For this reason, be used for donor film 200 and the feed mechanism (not shown) that is subjected to main substrate 300 to put into chambers 150 are arranged at outside the chamber 150.
Be subjected to main substrate 300 to have pixel definition district (or pixel region) according to an embodiment of the invention, wherein first, second and the 3rd sub-pixel form with the bar pattern, and donor film 200 comprises and is used to shift the transfer layer (or imaging layer) of organic luminous layer to the pixel definition district that is subjected to main substrate 300.
Substrate table 110 is arranged near the lower surface of chamber 150 or its.In described embodiments of the invention, substrate table 110 is provided with at least one electromagnet (not shown in Figure 2).Yet, it will be appreciated by those skilled in the art that and do not departing under principle of the present invention and the spirit, replace this electromagnet or except this electromagnet, can use permanent magnet or magnetic material.
To the electromagnet that be included in the substrate table 110 be described with reference to figure 3A and 3B.Fig. 3 A and 3B are plane graphs, are illustrated in respectively in the substrate table 110 to form or form with many lines to electromagnet 113 common centers.As shown in Figure 3A, when the electromagnet 113 altogether middle hearts of substrate table 110 were provided with, power at first was applied to first electromagnet 113 of the innermost concentric circles 115 of definition.In the case, power is applied to second electromagnet 113 of definition around second internal concentric 117 of this innermost concentric circles 115.Then, power is applied to the 3rd electromagnet 113 of the outer concentric circles 119 of definition second internal concentric, thereby the result produces and to realize stackedly with the magnetic attraction of the magnet of the contact frame of describing after a while, minimizes simultaneously or reduces donor film 200a and the generation that is subjected to impurity between the main substrate 300 or interval.
In addition, in described embodiment, shown in Fig. 3 B, when the electromagnet 113 of substrate table 110 forms with a plurality of horizontal and vertical lines, power only be applied to laser radiation on it electromagnet 113 or only be applied to the electromagnet 113 of corresponding line, thereby produce the magnetic attraction with the magnet of the contact frame of describing after a while.Therefore, only at the donor film 200b of the part place of laser radiation be subjected between the main substrate 300 to realize continuously local stacked, the result has finished stacked, minimizes simultaneously or reduces at interval or the generation of impurity.The electrical wiring that is used to apply power can be installed in each electromagnet.
Substrate table 110 also comprises the driving mechanism (not shown) that is used to supply with substrate table 110.When supplying with substrate table 110, laser oscillator 120 can be configured to along a direction irradiating laser.For example, longitudinally shine and substrate table 110 comprises that also when being used to supply with the driving mechanism of substrate table 110, laser can shine the whole surface of donor film 200 when laser.
In addition, substrate table 110 also can comprise and is used to receive and install the installing mechanism that is subjected to main substrate 300 and donor film 200.Installing mechanism is used for installing and is subjected to main substrate 300, and donor film 200 is supplied in chamber 150 by the feed mechanism in the pre-position of substrate table 110.
In this embodiment, installing mechanism can comprise through hole 410 and 510, guide post 420 and 520, movable plate 430 and 530, supporting member 440 and 540 and mounting groove 450 and 550.Guide post 420 is along with movable plate 430 and supporting member 440 rise or descend.Thereby guide post 420 rises to receive by through hole 410 and is subjected to main substrate 300.Thereby guide post 420 descends and be installed in by main substrate 300 to be formed in first mounting groove 450 on the substrate table 110.Those skilled in the art know how to realize installing mechanism based on disclosure herein.In addition, those skilled in the art can change installing mechanism, and it is not limited thereto.
Laser oscillator 120 can be installed in the outside or inner of chamber 150.Laser oscillator 120 can be installed makes laser be arranged on top.With reference to Fig. 4 that the schematic diagram of laser oscillator 120 is shown, CWDN:YAG laser (1604 nanometer) can be as the laser oscillator of present embodiment.Laser oscillator comprises two galvanometer scanners (galvano meter scanner) 121 and 123, scanning lens 125 and cylinder lens 127.Yet, the invention is not restricted to this.
Contact frame 130 comprises one or more electromagnets, one or more permanent magnet or magnetic material.Contact frame 130 forms magnetic force with the magnet of substrate table 110, makes to be arranged on the donor film 200 between substrate table 110 and the contact frame 130 and to be subjected to main substrate 300 energy by stacked securely.Contact frame 130 comprises the open slot (or opening) 133 that laser can pass.Therefore, contact frame 130 also is used as mask, thereby only at the precalculated position irradiating laser.In described embodiment, the magnetic material comprises ferromagnetic material and/or weak magnetic material.In described embodiment, magnetosphere (or magnetic material) comprises Fe, Ni, Cr, Fe by being selected from 2O 3, Fe 3O 4, CoFe 2O 4, magnetic nano particle, and composition thereof a kind of formation of group.
Contact frame comprises the first framework 130a_1, the second framework 130b_1 and the 3rd framework 130c_1.The first open slot 133a_1 is formed on the first framework 130a_1.According to the organic luminous layer that will shift, form first sub-pixel accordingly with the first open slot 133a_1.Magnet or magnetic material 137a_1 are positioned at the first framework 130a_1.The second open slot 133b_1 is formed on the second framework 130b_1.According to the organic luminous layer that will shift, form second sub-pixel accordingly with the second open slot 133b_1.Magnet or magnetic material 137b_1 are positioned at the second framework 130b_1.The 3rd open slot 133c_1 is formed on the 3rd framework 130c_1.According to the organic luminous layer that will shift, form the 3rd sub-pixel accordingly with the 3rd open slot 133c_1.Magnet or magnetic material 137c_1 are positioned at the 3rd framework 130c_1.Thereby first, second alternately installs the luminescent layer that is formed with OLED with the 3rd framework 130a_1,130b_1 and 130c_1.
In addition, open slot can basically form the whole surface in contact frame.Therefore, it can be fabricated to and use a contact frame.Yet in the case, magnet only can be installed in the edge of contact frame, makes donor film and be subjected to that magnetic force between the main substrate causes in fact stacked and take place unlike described herein.Therefore, in one embodiment, the area of magnet is equal to or greater than or equals 50% of contact frame area at least.
Fig. 5 A, 5B and 5C illustrate the embodiment of first, second and the 3rd contact frame of alternately installing.Fig. 5 D is a plane graph, and the bar pel array of the Organic Light Emitting Diode that first, second and the 3rd contact frame shown in Fig. 5 A, 5B and the 5C form is shown.
Corresponding its a plurality of first open slot 133a_1 that form first sub-pixel are formed on the first contact frame 130a_1 of Fig. 5 A.Corresponding its a plurality of second open slot 133b_1 that form second sub-pixel are formed on the second contact frame 130b_1 of Fig. 5 B.Corresponding its a plurality of the 3rd open slot 133c_1 that form the 3rd sub-pixel are formed on the 3rd contact frame 130c_1 of Fig. 5 C.
Contact frame feed mechanism 140 moves or exchanges contact frame 130 along the direction of substrate table, and can utilize various distinct methods manufacturings.As shown in Figure 6, contact frame feed mechanism 140 comprises support 141, connecting rod 143 and driving mechanism 145 (illustrating as calcspar).Support 141 comprises holddown groove 142.150 upper surface is connected to support 141 to connecting rod 143 in the chamber.Driving mechanism drives connecting rod 143 and support 141 up and down.At this, as shown, when feed mechanism was supplied with contact frame 130, contact frame 130 was supplied to the state that is installed on the carriage 135 with fixing protrusion 134.
The first contact frame 130a_1 and the second contact frame 130b_1 exchange by the exchange mechanism 147 (illustrating with calcspar) of for example manipulator.The first contact frame 130a_1 that utilization is arranged on the support forms after first sub-pixel, and manipulator moves on to the outside with the first contact frame 130a_1 from support, and the second contact frame 130b_1 is navigated to support, thereby realizes that exchange is to form second sub-pixel.
Next, will utilize above-mentioned laser induced thermal imaging apparatus to form method of organic light emitting diodes with reference to figure 2,5A-5C and 7 explanations.Having the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by the laser induced thermal imaging apparatus manufacturing comprises and is subjected to main substrate supplying step ST100, the first donor film supplying step ST200, the first contact frame attachment steps ST300, the first sub-pixel transfer step ST400, the first contact frame separating step ST500, the second donor film supplying step ST600, the second contact frame attachment steps ST700, the second sub-pixel transfer step ST800, the second contact frame separating step ST900, the 3rd donor film supplying step ST1000, the 3rd contact frame attachment steps ST1100, and the 3rd sub-pixel transfer step ST1200.
Supplied with by main substrate supplying step ST100 and be subjected to main substrate 300 on substrate table 110, be subjected to form organic luminous layer on the main substrate 300 with magnet or magnetic material.Be subjected to main substrate 300 definition pixel regions.The luminescent layer and the pixel region that will shift form accordingly.The stripe shape pixel forms and is arranged in the pixel region that is subjected to main substrate 300.
The first donor film supplying step ST200 supplies with first donor film with the luminescent layer that will shift and is being subjected on the main substrate 300.Here, luminescent layer can be configured to a kind of color, and is for example red.
The first contact frame attachment steps ST300 utilizes magnetic attraction that the first contact frame 130a_1 is attached to first donor film.The first contact frame 130a_1 comprises magnet or magnetic material.The first open slot 133a_1 is formed on the first contact frame 130a_1, and the laser that is used to shift the first color organic luminous layer passes the first open slot 133a_1.At this, the contact frame feed mechanism is at first supplied with and is adhered to the first contact frame 130a_1 on substrate table 110, and utilizes magnetic attraction further it to be adhered to securely.
By passing first open slot 133a_1 irradiating laser on first donor film of the first contact frame 130a_1, the first sub-pixel transfer step ST400 expands and shifts the first color organic luminous layer that comprises in first donor film and is being subjected on first sub-pixel area of main substrate 300.At this moment, the range of exposures that can adjust laser makes laser only shine first sub-pixel area in the zone corresponding with open slot.
The first contact frame separating step ST500 is by at first separating the first contact frame 130a_1 with magnetic repulsion, and then by rising the top of contact frame to chamber 150, the first contact frame 130a_1 separated from first donor film.
The second donor film supplying step ST600 moves on to first donor film outdoor from the top that is subjected to main substrate, and supplies with second donor film with second color organic luminous layer and be subjected on the main substrate 300.Just, the donor film feed mechanism replaces first donor film with second donor film.
The second contact frame attachment steps ST700 utilizes magnetic attraction that the second contact frame 130b_1 is attached to second donor film.The second contact frame 130b_1 comprises magnet or magnetic material.The second open slot 133b_1 is formed on the second contact frame 130b_1, and the laser that is used to shift the second color organic luminous layer passes the second open slot 133b_1.At this, the contact frame feed mechanism is at first supplied with and is adhered to the second contact frame 130b_1 on substrate table 110, by magnetic attraction it is adhered to securely then.
The second open slot 133b_1 irradiating laser by passing the second contact frame 130b_1 on second donor film, second sub-pixel transfer step ST800 expansion and shift the second color organic luminous layer that comprises in second donor film and be subjected on second sub-pixel area of main substrate 300.At this moment, the range of exposures that can adjust laser makes laser only shine second sub-pixel area in the zone corresponding with open slot.
The 3rd donor film supplying step ST1000 moves on to second donor film outdoor from the top that is subjected to main substrate, and supplies with the 3rd donor film with the 3rd color organic luminous layer and be subjected on the main substrate 300.Just, the donor film feed mechanism substitutes second donor film with the 3rd donor film.
The 3rd contact frame attachment steps ST1100 utilizes magnetic attraction that the 3rd contact frame 130c_1 is attached to the 3rd donor film.The 3rd contact frame 130c_1 comprises magnet or magnetic material.The 3rd open slot 133c_1 is formed on the 3rd contact frame 130c_1, and the laser that is used to shift the 3rd color organic luminous layer passes the 3rd open slot 133c_1.At this, the contact frame feed mechanism is at first supplied with and is adhered to the 3rd contact frame 130c_1 on substrate table 110, by magnetic attraction it is adhered to securely then.
The 3rd open slot 133c_1 irradiating laser by passing the 3rd contact frame 130c_1 on the 3rd donor film, the 3rd sub-pixel transfer step ST1200 expansion and shift the 3rd color organic luminous layer that comprises in the 3rd donor film and be subjected on the 3rd sub-pixel area of main substrate 300.At this moment, the range of exposures that can adjust laser makes laser only shine the 3rd sub-pixel area in the zone corresponding with open slot.
In described embodiment, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST400 can be red, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST800 can be green, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST1200 can be blue.
Alternately, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST400 can be green, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST800 can be red, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST1200 can be blue.
When describing manufacturing process, each contact frame exchange step is not described.It will be understood by those skilled in the art that and to carry out the contact frame exchange step.
＜embodiment 2 〉
Hereinafter, similar or components identical is represented by the similar or identical Reference numeral that uses among first embodiment.Owing to be subjected to main substrate and contact frame to be different among first embodiment those, therefore only describe in detail and be subjected to main substrate and contact frame.
As among Fig. 8 D as seen, the main substrate 301 that is subjected to of second embodiment comprises the pixel definition district.First sub-pixel, second sub-pixel and the 3rd sub-pixel are formed on the pixel definition district with mosaic.According to mosaic, the sub-pixel of different colours order and formation continuously.
Fig. 8 A, 8B and 8C illustrate an embodiment of first, second and the 3rd contact frame of alternately installing.Fig. 8 D is a plane graph, and the mosaic image pixel array of the Organic Light Emitting Diode that first, second and the 3rd contact frame shown in Fig. 8 A, 8B and the 8C form is shown.
Corresponding its a plurality of first open slot 133a_2 that form first sub-pixel are formed on the first contact frame 130a_2 of Fig. 8 A.Magnet or magnetic material 137a_2 are positioned on the first contact frame 130a_2.Corresponding its a plurality of second open slot 133b_2 that form second sub-pixel are formed on the second contact frame 130b_2 of Fig. 8 B.Magnet or magnetic material 137b2 are positioned on the second contact frame 130b_2.Corresponding its a plurality of the 3rd open slot 133c_2 that form the 3rd sub-pixel are formed on the 3rd contact frame 130c_2 of Fig. 8 C.Magnet or magnetic material 137c_2 are positioned on the 3rd contact frame 130c_2.Because the manufacture method of second embodiment is identical with first embodiment basically, therefore omit its detailed description.
＜embodiment 3 〉
Hereinafter, similar or components identical by with first embodiment in similar or identical Reference numeral represent.Owing to be subjected to main substrate and contact frame to be different from first embodiment, therefore only describe in detail and be subjected to main substrate and contact frame.
Fig. 9 A and 9B illustrate the embodiment of first and second contact frame of alternately installing.Fig. 9 C is a plane graph, illustrates by triangle (delta) pel array of first and second contact frame shown in Fig. 9 A and the 9B at the Organic Light Emitting Diode that is subjected to form on the main substrate 302.The 3rd embodiment uses and is subjected to main substrate 302 to form the triangular pixel array.In the triangular pixel array, each sub-pixel is arranged with delta pattern.
Corresponding its a plurality of first open slot 133a_3 that form first and second sub-pixels are formed on the first contact frame 130a_3.Corresponding its a plurality of second open slot 133b_3 that form the 3rd sub-pixel are formed on the second contact frame 130b_3.At this, two contact frame 130a_3 and 130b_3 are used alternatingly.
Describe by above-mentioned laser induced thermal imaging apparatus with reference to Fig. 2, Fig. 9 A-9C and Figure 10 and to form method of organic light emitting diodes according to third embodiment of the invention.Having the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by the laser induced thermal imaging apparatus manufacturing comprises and is subjected to main substrate supplying step ST2100, the first donor film supplying step ST2200, the first contact frame attachment steps ST2300, the first sub-pixel transfer step ST2400, the first contact frame separating step ST2500, the second donor film supplying step ST2600, first contact frame is attachment steps ST2700 again, the second sub-pixel transfer step ST2800, the second contact frame exchange step ST2900, the 3rd donor film supplying step ST3000, the second contact frame attachment steps ST3100, and the 3rd sub-pixel transfer step ST3200.
What supplied with on it by main substrate supplying step ST2100 to form organic luminous layer is subjected to main substrate 302 on the substrate table 110 with magnet or magnetic material.Pixel region is defined in and is subjected on the main substrate 302.The luminescent layer and the pixel region that will shift form accordingly.The stripe shape pixel forms and is arranged in the pixel region that is subjected to main substrate 302.
The first donor film supplying step ST2200 supplies with first donor film with the luminescent layer that will shift and is being subjected on the main substrate 302.At this, luminescent layer can be configured to a kind of color, and is for example red.
The first contact frame attachment steps ST2300 utilizes magnetic attraction that the first contact frame 130a_3 is attached to first donor film.The first contact frame 130a_3 comprises magnet or magnetic material 137a_3.The first open slot 133a_3 is formed on the first contact frame 130a_3, and the laser that is used to shift the first color organic luminous layer passes the first open slot 133a_3.At this, the contact frame feed mechanism is at first supplied with and is adhered to the first contact frame 130a_3 on substrate table 110, utilizes magnetic attraction with its firm attachment then.
The first open slot 133a_3 irradiating laser by passing the first contact frame 130a_3 on first donor film, first sub-pixel transfer step ST2400 expansion and shift the first color organic luminous layer that comprises in first donor film and be subjected on first sub-pixel area of main substrate 302.At this moment, the range of exposures that can adjust laser makes only first sub-pixel area of laser radiation in the zone corresponding with open slot.
By at first utilizing magnetic repulsion to separate the first contact frame 130a_3, and then by the top of contact frame feed mechanism rising contact frame to chamber 150, the first contact frame separating step ST2500 separates the first contact frame 130a_3 from first donor film.
The second donor film supplying step ST2600 is outdoor from moved on to by main substrate top with first donor film, and supplies with second donor film with second color organic luminous layer and be subjected on the main substrate 302.Just, the donor film feed mechanism is replaced first donor film with second donor film.
First contact frame attachment steps ST2700 again utilizes magnetic attraction once more the donor film of the first contact frame 130a_3 from step ST2500 to be attached to second donor film.At this, the contact frame feed mechanism is at first supplied with and is adhered to the first contact frame 130a_3 on substrate table 110, utilizes magnetic attraction with its firm attachment then.
Open slot irradiating laser by passing first contact frame on second donor film, second sub-pixel transfer step ST2800 expansion and shift the second color organic luminous layer that comprises in second donor film and be subjected on second sub-pixel area of main substrate 302.At this moment, the range of exposures that can adjust laser makes only second sub-pixel area of laser radiation in the zone corresponding with open slot.
The second contact frame exchange step ST2900 eliminates magnetic force or produce magnetic repulsion between the first contact frame 130a_3 and substrate table 110, thereby separate the first contact frame 130a_3 from second donor film, replace the first contact frame 130a_3 with the second contact frame 130b_3 then.The second contact frame 130b_3 has magnet or magnetic material 137b_3.Open slot 133b_3 is formed on the second contact frame 130b_3, and the laser that is used to shift the 3rd color organic luminous layer of the 3rd donor film passes open slot 133b_3.
The 3rd donor film supplying step ST3000 is outdoor from moved on to by main substrate top with second donor film, and supplies with the 3rd donor film with the 3rd color organic luminous layer and be subjected on the main substrate 302.Just, the donor film feed mechanism replaces second donor film with the 3rd donor film.
The second contact frame attachment steps ST3100 utilizes magnetic attraction that the second contact frame 130b_3 is attached to the 3rd donor film.The second contact frame 130b_3 comprises magnet or magnetic material 137b_3.The second open slot 133b_3 is formed on the second contact frame 130b_3, and the laser that is used to shift the 3rd color organic luminous layer passes the second open slot 133b_3.At this, the contact frame feed mechanism is at first supplied with and is adhered to the second contact frame 130b_3 on substrate table 110, utilizes magnetic attraction with its firm attachment then.
Open slot 133b_3 irradiating laser by passing the second contact frame 130b_3 on the 3rd donor film, the 3rd sub-pixel transfer step ST3200 expansion and shift the 3rd color organic luminous layer that comprises in the 3rd donor film and be subjected on the 3rd sub-pixel area of main substrate 302.Herein, the range of exposures that can adjust laser makes the whole zone of laser irradiation to the second contact frame 130b_3.
In the above-described embodiment, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST2400 can be red, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST2800 can be green, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST3200 can be blue.
Interchangeable, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST2400 can be green, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST2800 can be red, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST3200 can be blue.
＜embodiment 4 〉
Hereinafter, similar or components identical is represented by the similar or identical Reference numeral that uses among first embodiment in the 4th embodiment.Owing to be subjected to main substrate and contact frame to be different from first embodiment, therefore only to be described in detail by main substrate and contact frame.
Figure 11 A illustrates the embodiment of contact frame 130_4.Figure 11 B is a plane graph, and the pel array of the Organic Light Emitting Diode that is formed by the contact frame 130_4 shown in Figure 11 A is shown.For and the magnet of substrate table or magnetic material form magnetic force and between substrate table 110 and contact frame 130_4, be subjected to main substrate 304 and donor film with stacked securely, contact frame 130_4 comprises magnet, it can be electromagnet or permanent magnet, and perhaps contact frame itself can utilize the magnetic material to form in described embodiment.At least one of substrate table 110 or contact frame 130_4 should comprise magnet.
In addition, contact frame 130_4 comprises the open slot 133_4 that laser can pass.Contact frame 130_4 is used for stacked, and can be simultaneously as mask so that laser radiation to the precalculated position.Open slot 133_4 can differently be provided with according to the pel array with the organic luminous layer that will be transferred.For example, when only first and second sub-pixels that form first to the 3rd sub-pixel in the pixel by the laser induced thermal imaging method, and common layer be deposited on pixel portion all on when forming the 3rd sub-pixel, open slot 133_4 can be formed on the formation position of first and second sub-pixels, and it is being arranged among colleague mutually adjacent to each other.In described embodiment, first, second and the 3rd sub-pixel are respectively red, green and blue.Yet, the invention is not restricted to this.
At this, the open slot 133_4 that is used to form first and second sub-pixels forms jointly.Therefore, thus use identical contact frame 130_4 to form first and second sub-pixels and shift the luminescent layer of first and second sub-pixels at accurate location by the control laser beam.This causes the quantity of contact frame to reduce and work simplification.After the luminescent layer of first and second sub-pixels forms, be subjected to main substrate 304 to be put into settling chamber (not shown in Figure 11 A), the 3rd sub-pixel forms by heat deposition.At this moment, because specific mask process is optional, so technology is further simplified.
With reference to Figure 11 B that wherein uses above-mentioned contact frame 130_4 to form the pixel portion of pixel is shown, a pixel comprises first to the 3rd sub-pixel.Zone except the formation district of first and second sub-pixels becomes the 3rd sub-pixel area.
With reference to Fig. 2 and Figure 12 formation method of organic light emitting diodes according to fourth embodiment of the invention is described.Making method of organic light emitting diodes comprises and is subjected to main substrate supplying step ST4000, the first donor film supplying step ST4100, contact frame attachment steps ST4200, the first sub-pixel transfer step ST4300, contact frame separating step ST4400, the second donor film supplying step ST4500, contact frame the attachment steps ST4600 and the second sub-pixel transfer step ST4700 again.
What be subjected to main substrate supplying step ST4000 supply wherein formation organic luminous layer is subjected to main substrate 304 on the mounting groove 450 of the substrate table 110 with magnet or magnetic material.Pixel region is defined in and is subjected on the main substrate 304.Will form accordingly from luminescent layer and the pixel region that donor film 200 is transferred.At the pixel region that is subjected to main substrate 304, three sub-pixels constitute a pixel.According to described embodiment, in sub-pixel, the part except first and second sub-pixel area is the 3rd sub-pixel area.
The first donor film supplying step ST4100 supplies with first donor film and is being subjected on the main substrate 304.The luminescent layer that will be transferred in first sub-pixel area that is subjected to main substrate 304 is formed on first donor film.At this, luminescent layer can be configured to a kind of color, and is for example red.
Contact frame attachment steps ST4200 utilizes magnetic attraction that contact frame 130_4 is attached to first donor film.Contact frame 130_4 comprises magnet or magnetic material 137_4.Open slot 133_4 is formed on the contact frame 130_4, and the laser that is used to shift the first color organic luminous layer passes the first open slot 133_4.In described embodiment, the contact frame feed mechanism is at first supplied with and is adhered to contact frame 130_4 on substrate table 110, utilizes magnetic attraction between substrate table 110 and the contact frame 130_4 with its firm attachment then.
Open slot 133_4 irradiating laser by passing contact frame 130_4 on first donor film, first sub-pixel transfer step ST4300 expansion and shift the first color organic luminous layer that comprises in first donor film and be subjected on first sub-pixel area of main substrate 304.At this moment, the range of exposures that can adjust laser makes only first sub-pixel area of laser radiation in the zone corresponding with open slot.
By at first separating the first contact frame 130_4 with magnetic repulsion, and then by the top of contact frame feed mechanism 140 rising contact frame to chamber 150, contact frame separating step ST4400 separates contact frame 130a_4 from first donor film.
The second donor film supplying step ST4500 outside the top that is subjected to main substrate 110 moves on to chamber 150, and supplies with first donor film second donor film and is being subjected on the main substrate 304.At this, second donor film comprises the luminescent layer that will be transferred in second sub-pixel area that is subjected to main substrate 130_4.Luminescent layer forms has second color, for example green.
Contact frame attachment steps ST4600 again uses magnetic attraction that contact frame 130_4 is attached to second donor film.At this, contact frame 130_4 comprises the open slot 133_4 that the laser of the second color organic luminous layer that is used to shift second donor film passes.
Open slot 133_4 irradiating laser by passing contact frame 130_4 on second donor film, second sub-pixel transfer step ST4700 expansion and shift the second color organic luminous layer that comprises in second donor film and be subjected on second sub-pixel area of main substrate 304.At this moment, the range of exposures that can adjust laser makes only second sub-pixel area of laser radiation in the zone corresponding with open slot 133_4.
As previously mentioned, form after the organic luminous layer of first and second sub-pixels, be subjected to main substrate 304 to be loaded into the settling chamber, make it possible to form the organic luminous layer of the 3rd sub-pixel.At this, can jointly form the organic luminous layer of the 3rd sub-pixel at pixel region by heat deposition.In described embodiment, the 3rd sub-pixel is blue.
In described embodiment, above-mentioned steps is carried out in vacuum chamber 150, and laser irradiation can change according to the layout of the organic luminous layer that will shift in each transfer step.For example, first to the 3rd sub-pixel forms 1 * 3 matrix, constitutes a pixel, and the first color organic luminous layer shifts to being formed on first row and first row, and the second color organic luminous layer shifts to being formed on first row and the secondary series.
＜embodiment 5 〉
Hereinafter, similar or components identical is represented by the similar or identical Reference numeral that uses among first embodiment in the 4th embodiment.Owing to be subjected to main substrate and contact frame to be different from first embodiment, therefore only to be described in detail by main substrate and contact frame.Figure 13 A and 13B are plane graphs, illustrate respectively according to the example of the first contact frame 130a_5 of fifth embodiment of the invention and the example of the second contact frame 130b_5.Figure 13 C illustrates and utilizes the first and second contact frame 130a_5 and 130b_5 at the pel array that is subjected to form on the main substrate 305.
A plurality of open slot 133a_5 are formed on the first contact frame 130a_5 of Figure 13 A, and first sub-pixel and second sub-pixel and open slot 133a_5 form accordingly.A plurality of open slot 133b_5 are formed on the second contact frame 130b_5 of Figure 13 B.When the second contact frame 130b_5 and the first contact frame 130a_5 crossover, two the 3rd sub-pixels and the open slot 133b_5 that are positioned at the open slot 133a_5 bottom of the first contact frame 130a_5 form accordingly.Each contact frame comprises magnet or magnetic material 137a_5 and 137b_5.Figure 13 C illustrates and the first and second contact frame 130a_5 and the corresponding pel array that is subjected to main substrate of 130b_5.
Figure 13 D and 13E illustrate another embodiment of first and second contact frame, and it is alternately installed.Figure 13 F illustrates the pel array that is formed by the first contact frame 130d_5 and the second contact frame 130e_5.A plurality of open slot 133d_5 are formed on the first contact frame 130d_5 of Figure 13 D, and first sub-pixel and second sub-pixel and open slot 133d_5 form accordingly.A plurality of open slot 133e_5 are formed on the second contact frame 130e_5 of Figure 13 E.Use the second contact frame 130e_5 and the first contact frame 130d_5, two the 3rd sub-pixels and the open slot 133d_5 that are positioned at first contact frame 130d_5 left side form accordingly.Each contact frame comprises magnet or magnetic material 137d_5 or 137e_5.Figure 13 F illustrates the pel array that is subjected to main substrate that uses the first and second contact frame 130d_5 and 130e_5 to make.
With reference to Fig. 2 and Figure 14 formation method of organic light emitting diodes according to fifth embodiment of the invention is described.Having the method for organic light emitting diodes that is formed on the luminescent layer between the electrode by the laser induced thermal imaging apparatus manufacturing comprises and is subjected to main substrate supplying step ST5100, the first donor film supplying step ST5200, the first contact frame attachment steps ST5300, the first sub-pixel transfer step ST5400, the first contact frame separating step ST5500, the second donor film supplying step ST5600, first contact frame is attachment steps ST5700 again, the second sub-pixel transfer step ST5800, the second contact frame exchange step ST5900, the 3rd donor film supplying step ST6000, the second contact frame attachment steps ST6100, and the 3rd sub-pixel transfer step ST6200.
What be subjected to main substrate supplying step ST5100 supply wherein formation organic luminous layer is subjected to main substrate 305 or 306 on the substrate table 110 with magnet or magnetic material.Pixel region is defined in and is subjected on main substrate 305 or 306.The luminescent layer and the pixel region that will shift form accordingly.Formation is subjected to the pixel region of main substrate 305 or 306 to make four sub-pixels constitute a pixel.
The first donor film supplying step ST5200 supplies with first donor film with the luminescent layer that will be transferred and is being subjected on main substrate 305 or 306.At this, luminescent layer can be configured to a kind of color, and is for example red.
The first contact frame attachment steps ST5300 utilizes magnetic attraction that first contact frame is attached to first donor film.First contact frame comprises magnet or magnetic material.First open slot forms in first contact frame, and the laser that is used to shift the first color organic luminous layer passes first open slot.At this, the contact frame feed mechanism is at first supplied with and is adhered to first contact frame at substrate table, utilizes magnetic attraction with its firm attachment then.
The first open slot irradiating laser by passing first contact frame on first donor film, first sub-pixel transfer step ST5400 expansion and shift the first color organic luminous layer that comprises in first donor film and be subjected on first sub-pixel area of main substrate.At this moment, the range of exposures that can adjust laser makes only first sub-pixel area of laser radiation in the zone corresponding with open slot.
By at first separating first contact frame with magnetic repulsion, and then by with contact frame feed mechanism rising contact frame to top, chamber, the first contact frame separating step ST5500 separates first contact frame from first donor film.
The second donor film supplying step ST5600 is outdoor from moved on to by main substrate top with first donor film, and supplies with second donor film with second color organic luminous layer and be subjected on the main substrate.Just, the donor film feed mechanism substitutes first donor film with second donor film.
First contact frame attachment steps ST5700 again utilizes magnetic attraction that first contact frame of separating from donor film among the step ST5500 is adhered again to second donor film.At this, the contact frame feed mechanism is at first supplied with and is adhered to first contact frame on substrate table, utilizes magnetic attraction with its firm attachment then.
The first open slot irradiating laser by passing first contact frame on second donor film, second sub-pixel transfer step ST5800 expansion and shift the second color organic luminous layer that comprises in second donor film and be subjected on second sub-pixel area of main substrate.At this moment, the range of exposures that can adjust laser makes only second sub-pixel area of laser radiation in the zone corresponding with open slot.
Thereby the second contact frame exchange step ST5900 eliminates magnetic force or produces first contact frame and with magnetic repulsion between the substrate table first contact frame separated from second donor film, and then with alternative first contact frame of second contact frame.Second contact frame has magnet or magnetic material.Open slot forms in second contact frame, and the laser that is used to shift the 3rd color organic luminous layer of the 3rd donor film passes this open slot.
The 3rd donor film supplying step ST6000 is outdoor from moved on to by main substrate top with second donor film, and supplies with the 3rd donor film with the 3rd color organic luminous layer and be subjected on the main substrate.Just, the donor film feed mechanism replaces second donor film with the 3rd donor film.
The 3rd contact frame attachment steps ST6100 uses magnetic attraction that second contact frame is attached to the 3rd donor film.Second contact frame comprises magnet or magnetic material.Second open slot forms in second contact frame, and the laser that is used to shift the 3rd color organic luminous layer passes the 3rd open slot.At this, the contact frame feed mechanism is at first supplied with and is adhered to second contact frame on substrate table, utilizes magnetic attraction with its firm attachment then.
Open slot irradiating laser by passing second contact frame on the 3rd donor film, the 3rd sub-pixel transfer step ST6200 expansion and shift the 3rd color organic luminous layer that comprises in the 3rd donor film and be subjected on the 3rd sub-pixel area of main substrate.At this moment, the range of exposures that can adjust laser makes the whole zone of laser radiation to second contact frame.
In each transfer step, organic luminous layer can differently shift in the pixel definition district.Laser irradiating method can change according to the layout that shifts.For example, four sub-pixels form 2 * 2 matrixes, constitute a pixel, in the first sub-pixel transfer step ST5400, the first color organic luminous layer shifts to being formed on the left upper end of pixel, and in the second sub-pixel transfer step ST5800, the second color organic luminous layer shifts to being formed on the left side of first sub-pixel, in the 3rd sub-pixel transfer step ST6200, the 3rd color organic luminous layer shifts to being formed on below first and second sub-pixels.In addition, in the first sub-pixel transfer step ST5400, the first color organic luminous layer shifts to being formed on the left upper end of pixel, in the second sub-pixel transfer step ST5800, the second color organic luminous layer shifts to being formed on below first sub-pixel, in the 3rd sub-pixel transfer step ST6200, the 3rd color organic luminous layer shifts to being formed on each right side of first and second sub-pixels.
In described embodiment, it is blue defining two sub-color of pixel.For example, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST5400 is red, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST5800 is green, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST6200 is blue.Alternately, the color of the first color organic luminous layer that shifts in the first sub-pixel transfer step ST5400 can be green, the color of the second color organic luminous layer that shifts in the second sub-pixel transfer step ST5800 can be red, and the color of the 3rd color organic luminous layer that shifts in the 3rd sub-pixel transfer step ST6200 is blue.
＜embodiment 6 〉
Hereinafter, owing to be subjected to main substrate and contact frame to be different from first embodiment, therefore only to be described in detail by main substrate and contact frame.
Figure 15 A, Figure 15 B and Figure 15 C are plane graphs, and an example of an example, second contact frame of first contact frame according to a sixth embodiment of the invention and an example of the 3rd contact frame are shown respectively.
With reference to figure 15A-15C, each of first to the 3rd contact frame 130a_6,130b_6 and 130c_6 comprises at least one permanent magnet, magnetic material or electromagnet 137a_6,137b_6 or 137c_6, and at least one open slot 133a_6,133b_6 or 133c_6.Permanent magnet, magnetic material or electromagnet are arranged on first to the 3rd contact frame 130a_6,130b_6 and the 130c_6, and form magnetic force with the magnet 113 of the substrate table 110 shown in Fig. 3 A and the 3B.Permanent magnet, magnetic material or electromagnet are between open slot 133a_6,133b_6 or 133c_6.At this, the magnetic material comprises ferromagnetic material and/or weak magnetic material.In described embodiment, the magnetic material comprises Fe, Ni, Cr, Fe by being selected from 2O 3, Fe 3O 4, CoFe 2O 4, magnetic nano particle, with and composition thereof a kind of formation of group.When magnet is electromagnet, also should form electrical wiring at each electromagnet.
Open slot 133a_6,133b_6 or 133c_6 can differently be provided with according to the pel array with the organic luminous layer that will shift.When first sub-pixel, second sub-pixel and two the 3rd sub-pixels with 2 * 2 matrix arrangements constitute a pixel, and when a plurality of pixels constitute pixel portion, shown in Figure 15 A, the first contact frame 130a_6 is included in the open slot 133a_6 of the formation position of first sub-pixel.Shown in Figure 15 B, the second contact frame 130b_6 is included in the open slot 133b_6 of the formation position of second sub-pixel.Shown in Figure 15 C, the 3rd contact frame 130c_6 is included in the public open slot 133c_6 of the formation position of two the 3rd sub-pixels.The open slot 133c_6 that forms the 3rd contact frame 130c_6 makes the 3rd sub-pixel be positioned on the same line.Forming open slot 133a_6, the 133b_6 of first to the 3rd contact frame 130a_6,130b_6 and 130c_6 and 133c_6 makes when first to the 3rd contact frame 130a_6,130b_6 and 130c_6 their mutual crossovers during crossover each other.In described embodiment, first, second and the 3rd sub-pixel are respectively red, green and blue.Yet, the invention is not restricted to this.In the case, thus each of first to the 3rd contact frame 130a_6,130b_6 and 130c_6 also forms first to the 3rd sub-pixel as mask.
Has Figure 15 D that is formed on the pel array of the organic light emitting display that is subjected to the luminescent layer on the main substrate 307 by first to the 3rd contact frame 130a_6,130b_6 and 130c_6 with reference to illustrating, pixel portion comprises a plurality of pixels, its each by one first sub-pixel, second sub-pixel and two the 3rd subpixel configuration.In this pixel, first to the 3rd sub-pixel is with 2 * 2 matrix arrangements.First sub-pixel is positioned at first row, first row, and second sub-pixel is positioned at second row, first row, and two the 3rd sub-pixels are positioned at secondary series.In described embodiment, first to the 3rd sub-pixel is respectively red, green and blue.In another embodiment, when one first sub-pixel, second sub-pixel and two the 3rd sub-pixels during with 2 * 2 matrix arrangements, two the 3rd sub-pixels can be at second row.In this case, shown in Figure 15 E, 15F and 15G, laser induced thermal imaging apparatus comprises first to the 3rd contact frame 130e_6,130f_6 and 130g_6.
Shown in Figure 15 E, open slot 133e_6 is formed on the formation position of first sub-pixel among the first contact frame 130e_6.As shown in Figure 15 F, open slot 133f_6 is formed on the formation position of second sub-pixel among the second contact frame 130f_6.As shown in Figure 15 G, open slot 133g_6 is formed on the formation position of two the 3rd sub-pixels among the 3rd contact frame 130g_6.The open slot 133g_6 that forms the 3rd contact frame 130g_6 makes the 3rd sub-pixel be positioned at colleague mutually.In other words, shown in Figure 15 H, first sub-pixel is positioned at first row, first row, and second sub-pixel is positioned at the first row secondary series, and the 3rd sub-pixel is positioned at second row.In described embodiment, first to the 3rd sub-pixel is respectively red, green and blue.
When a red sub-pixel, a green sub-pixels and two blue subpixels constitute a pixel, have the luminous efficiency of the blue subpixels of minimum luminous efficiency by compensation, can regulate the balance of each sub-pixel, can also increase color reproducibility.
In addition, when utilizing different contact frame to form each sub-pixel, only be formed on the formation position of same color sub-pixel at identical contact frame split shed groove.Compare with forming contact frame with the situation of the sub-pixel corresponding opening groove of two or more colors, this situation has the part that more comprises magnet or magnetic material, and stacked effect is owing to magnetic force increases.
Figure 16 is a flow chart, and the manufacture method according to the Organic Light Emitting Diode of sixth embodiment of the invention is shown.The manufacture method of the Organic Light Emitting Diode of Figure 16 will be described with reference to a pixel making organic light emitting display.Each pixel of organic light emitting display comprises first to the 3rd sub-pixel, and the luminescent layer that is included in each sub-pixel forms by laser induced thermal imaging technology.
With reference to Figure 16, the laser induced thermal imaging method that is formed with the pixel of OLED by laser induced thermal imaging apparatus according to one embodiment of the invention comprises and is subjected to main substrate supplying step ST7100, the first donor film supplying step ST7200, the first contact frame attachment steps ST7300, the first sub-pixel transfer step ST7400, the second contact frame exchange step ST7500, the second donor film supplying step ST7600, the second contact frame attachment steps ST7700, the second sub-pixel transfer step ST7800, the second contact frame separating step ST7900, the 3rd donor film supplying step ST8000, the 3rd contact frame attachment steps ST8100, and the 3rd sub-pixel transfer step ST8200.
Hereinafter, will set forth the laser induced thermal imaging method with reference to Figure 16 and Fig. 2 of the perspective view that laser induced thermal imaging apparatus is shown.
Supplied with by main substrate supplying step ST7100 is subjected to main substrate 307 or 308 in first mounting groove 450 of the substrate table 110 with magnet or magnetic material.Organic luminous layer is formed on and is subjected to main substrate 307 or 308.Pixel region is defined in and is subjected to main substrate 307 or 308.Will form accordingly from luminescent layer and the pixel region that donor film 200 shifts.One first sub-pixel, second sub-pixel and two the 3rd sub-pixels at the pixel region that is subjected to main substrate 307 or 308, and constitute a pixel with 2 * 2 matrix arrangements.
The first donor film supplying step ST7200 supplies with first donor film and is being subjected on main substrate 307 or 308.At this, first donor film comprises will be at the luminescent layer of first sub-pixel area transfer that is subjected to main substrate 307 or 308.At this moment, luminescent layer can be configured to first color, and is for example red.
The first contact frame attachment steps ST7300 utilizes magnetic attraction that the first contact frame 130a_6 is attached to first donor film.The first contact frame 130a_6 comprises magnet or magnetic material 137a_6.Open slot 133a_6 is formed on the first contact frame 130a_6, and the laser that is used to shift the first color organic luminous layer passes open slot.In described embodiment, the contact frame feed mechanism is at first supplied with and is adhered to the first contact frame 130a_6 on substrate table 110, utilizes magnetic attraction between the substrate table 110 and the first contact frame 130a_6 with its firm attachment then.
On first donor film, the first color organic luminous layer that first sub-pixel transfer step ST7400 expansion and shifting comprises in first donor film is on first sub-pixel area that is subjected to main substrate 307 or 308 from laser oscillator 120 irradiating lasers for first open slot by passing the first contact frame 130a_6.At this moment, the range of exposures that can adjust laser makes only first sub-pixel area of laser emission in the zone corresponding with open slot.
Thereby the second contact frame exchange step ST7500 eliminates magnetic force or produces the first contact frame 130a_6 and separates the first contact frame 130a_6 with magnetic repulsion between the substrate table 220 from first donor film, replaces the first contact frame 130a_6 with the second contact frame 130b_6 then.The second contact frame 130b_6 has magnet or magnetic material.Open slot 133b_6 is formed on the second contact frame 130b_6, and the laser that is used to shift the second colour light emitting layer of second donor film passes open slot.
The second donor film supplying step ST7600 moves first donor film outside chamber 150 from the top that is subjected to main substrate 307 or 308, and supplies with second donor film and be subjected on main substrate 307 or 308.Second donor film comprises will be at the luminescent layer of second sub-pixel area transfer that is subjected to main substrate 307 or 308.At this moment, luminescent layer can be configured to second color, and is for example green.
The second contact frame attachment steps ST7700 uses magnetic attraction that the second contact frame 130b_6 is attached to second donor film.
On second donor film, the second color organic luminous layer that second sub-pixel transfer step ST7800 expansion and shifting comprises in second donor film is on second sub-pixel area that is subjected to main substrate 307 or 308 from laser oscillator 120 irradiating lasers for open slot 133b_6 by passing the second contact frame 130b_6.
The second contact frame separating step ST7900 has eliminated magnetic force or thereby the magnetic repulsion that produces between the second contact frame 130b_6 and the substrate table 110 separates the second contact frame 130b_6 from second donor film, replaces the second contact frame 130b_6 with the 3rd contact frame 130c_6 then.The 3rd contact frame 130c_6 has magnet or magnetic material.Open slot forms on the 3rd contact frame 130c_6, and the laser that is used to shift the 3rd color organic luminous layer of the 3rd donor film passes open slot.
The 3rd donor film supplying step ST8000 moves second donor film outside chamber 150 from being subjected to main substrate 307 or 308 tops, and supplies with the 3rd donor film and be subjected on main substrate 307 or 308.The 3rd donor film comprises will be at the luminescent layer of the 3rd sub-pixel area transfer that is subjected to main substrate 307 or 308.In described embodiment, luminescent layer can be configured to the 3rd color, and is for example blue.
The 3rd contact frame attachment steps ST8100 uses magnetic attraction that the 3rd contact frame 130c_6 is attached to the 3rd donor film.
On the 3rd donor film, the 3rd color organic luminous layer that the 3rd sub-pixel transfer step ST8200 expansion and shifting comprises in the 3rd donor film is on the 3rd sub-pixel area that is subjected to main substrate 307 or 308 from laser oscillator 120 irradiating lasers for open slot by passing the 3rd contact frame 130c_6.
Described step can be carried out in process chamber 150, and laser irradiating method can change according to the layout of the organic luminous layer that is transferred in each transfer step.For example, when constituting a pixel with one first sub-pixel of 2 * 2 matrix arrangements, second sub-pixel and two the 3rd sub-pixels, thereby irradiating laser forms first sub-pixel at first row, first row in the first sub-pixel transfer step ST7400.In addition, thereby irradiating laser forms second sub-pixel at the first row secondary series in the second sub-pixel transfer step ST7800, thereby irradiating laser forms two the 3rd sub-pixels at second row, first row in the 3rd sub-pixel transfer step ST8200.Replacedly, thereby irradiating laser forms first sub-pixel at first row, first row in the first sub-pixel transfer step ST7400, thereby irradiating laser forms second sub-pixel at second row, first row in the second sub-pixel transfer step ST7800, thereby irradiating laser forms two the 3rd sub-pixels at the first row secondary series and the second row secondary series in the 3rd sub-pixel transfer step ST8200.In described embodiment, first and second sub-pixels are respectively red and green, and two the 3rd sub-pixels are blue.
Though illustrated and described some exemplary embodiment of the present invention, but it will be understood by those skilled in the art that, under the situation that does not depart from principle of the present invention or spirit, can change these embodiments, the scope of principle wherein of the present invention or spirit is by claims and equivalent definition thereof.For example, even when pel array is mosaic or stripe shape, as in the 3rd embodiment, organic luminous layer can form by two contact frame.In addition, it will be understood by those skilled in the art that when at least three sub-pixels form a pixel, can change.
The application requires the korean patent application Nos.10-2005-0080341 of on August 30th, 2005 to the submission of Korea S Department of Intellectual Property, 10-2005-0080342,10-2005-0080343,10-2005-0080344, the priority of 10-2005-0080345 and 10-2005-0080346 and relevant benefit are incorporated herein full content as a reference.

Claims (34)

1. laser induced thermal imaging apparatus comprises:
The substrate table that comprises magnet or magnetic material, this substrate table be suitable for receiving will on this substrate table, be laminated to each other be subjected to main substrate and donor film, this is had by main substrate to be used to form the pixel region of first sub-pixel, second sub-pixel and the 3rd sub-pixel, and this donor film has the organic luminous layer that will transfer to this pixel region;
Be used for the laser oscillator of irradiating laser to this donor film;
Be suitable for being arranged on the contact frame between this substrate table and this laser oscillator, this contact frame is used for forming magnetic force with this substrate table, and comprises the opening that laser passes;
Be used on the direction of this substrate table, moving the contact frame feed mechanism of this contact frame; And
The chamber, described substrate table and described contact frame are arranged in this chamber, and this chamber is suitable for during cascade being in vacuum state what this was subjected to main substrate and this donor film.
2. according to the laser induced thermal imaging apparatus of claim 1, wherein this contact frame comprises first framework with first opening that is used to form this first sub-pixel, the 3rd framework that has second framework of second opening that is used to form this second sub-pixel and have the 3rd opening that is used to form the 3rd sub-pixel, thus this first, second and the 3rd framework be suitable for alternately installing with this first, second and the 3rd sub-pixel be formed with the luminescent layer of OLED accordingly.
3. according to the laser induced thermal imaging apparatus of claim 2, the area of wherein said first opening is in 1% to 50% scope of the area of this first framework, the area of described second opening is in 1% to 50% scope of the area of this second framework, and the area of described the 3rd opening is in 1% to 50% scope of the area of the 3rd framework.
4. according to the laser induced thermal imaging apparatus of claim 1, wherein this magnet comprises permanent magnet or electromagnet, and this contact frame comprises and is selected from a kind of of the group that contains permanent magnet, electromagnet and magnetic material.
5. according to the laser induced thermal imaging apparatus of claim 1, wherein this first, second and the 3rd sub-pixel form with bar pattern, mosaic or delta pattern.
6. a manufacturing has the method for organic light emitting diodes that is formed on the luminescent layer between the electrode, and this method comprises:
Use is according to the laser induced thermal imaging apparatus of claim 1, wherein this contact frame comprises first contact frame, second contact frame and the 3rd contact frame, this donor film comprises first donor film with first color organic luminous layer, the 3rd donor film that has second donor film of the second color organic luminous layer and have the 3rd color organic luminous layer
Placement have this pixel region this be subjected to main substrate on this substrate table, this pixel region comprises first sub-pixel area that is used to form this first sub-pixel, the 3rd sub-pixel area that is used to form second sub-pixel area of this second sub-pixel and is used to form the 3rd sub-pixel;
Placing this first donor film is subjected on the main substrate at this;
Utilize magnetic attraction that this first contact frame is attached to this first donor film, this first contact frame comprises magnet and has first opening;
Thereby the first opening irradiating laser that passes this first contact frame is transferred to this first sub-pixel area to this first donor film with this first color organic luminous layer;
Separate this first contact frame from this first donor film;
Placing this second donor film is subjected on the main substrate at this;
Utilize magnetic attraction that this second contact frame is attached to this second donor film, this second contact frame comprises magnet and has second opening;
Thereby the second opening irradiating laser that passes this second contact frame is transferred to this second sub-pixel area to this second donor film with this second color organic luminous layer;
Separate this second contact frame from this second donor film;
Placing the 3rd donor film is subjected on the main substrate at this;
Utilize magnetic attraction that the 3rd contact frame is attached to the 3rd donor film, the 3rd contact frame comprises magnet and has the 3rd opening; And
Thereby the 3rd opening irradiating laser that passes the 3rd contact frame is transferred to the 3rd sub-pixel area to the 3rd donor film with the 3rd color organic luminous layer.
7. according to the method for claim 6, wherein this first, second and the 3rd sub-pixel form with bar pattern, mosaic or delta pattern.
8. one kind is used to form first, second corresponding with pixel of Organic Light Emitting Diode and the laser induced thermal imaging apparatus of the 3rd organic luminous layer, each pixel comprises at least three sub-pixels respectively, have this first, second and the 3rd organic luminous layer respectively, this equipment comprises:
Be suitable for carrying out the chamber of laser induced thermal imaging, this chamber comprises substrate table and is suitable for receiving contact frame, and this substrate table has magnet or magnetic material, and this contact frame is suitable for being arranged between this substrate table and the laser oscillator;
Be used for the laser oscillator of irradiating laser to this contact frame and donor film; And
Be used on the direction of this substrate table, moving the contact frame feed mechanism of this contact frame,
Wherein this contact frame comprises opening, and this first and second sub-pixel and this opening form accordingly, and this substrate table and this contact frame formation magnetic force,
Wherein this chamber is suitable for and will is subjected to the stacked space of main substrate and this donor film to remain on vacuum state.
9. laser induced thermal imaging apparatus according to Claim 8, wherein this opening comprises a plurality of openings, the area of this opening is in 1% to 50% scope of the area of this contact frame.
10. laser induced thermal imaging apparatus according to Claim 8, wherein this magnet comprises permanent magnet or electromagnet, this contact frame comprises and is selected from a kind of of the group that contains permanent magnet, electromagnet and magnetic material.
11. make method of organic light emitting diodes for one kind, each Organic Light Emitting Diode has one of organic luminous layer that is formed between first and second electrodes, this method comprises:
Use the laser induced thermal imaging apparatus of claim 8, wherein this donor film comprises first donor film with first color organic luminous layer and second donor film with second color organic luminous layer,
Placement is subjected to main substrate on this substrate table, this is subjected to main substrate to have pixel region, comprise first sub-pixel area that is used to form first sub-pixel, the 3rd sub-pixel area that is used to form second sub-pixel area of second sub-pixel and is used to form the 3rd sub-pixel, this first, second and the 3rd sub-pixel constitute a pixel;
Placing this first donor film is subjected on the main substrate at this;
This contact frame of utilizing magnetic attraction will have magnet or magnetic material is attached to this first donor film;
Thereby the opening that passes this contact frame shifts this first color organic luminous layer to this first sub-pixel area from this laser oscillator irradiating laser to this first donor film;
Separate this contact frame from this first donor film;
Placing this second donor film is subjected on the main substrate at this;
Utilize magnetic attraction that this contact frame is attached to this second donor film;
Thereby the opening that passes this contact frame shifts this second color organic luminous layer to this second sub-pixel area from this laser oscillator irradiating laser to this second donor film;
Wherein the 3rd color organic luminous layer of the 3rd sub-pixel deposits and is formed on this pixel region that wherein forms this sub-pixel.
12. according to the method for claim 11, wherein this first, second and the 3rd sub-pixel form 1 * 3 matrix, and constitute a pixel,
Wherein this first color organic luminous layer is transferred to being formed on first row first and is listed as, and this second color organic luminous layer is transferred to being formed on the first row secondary series.
13. according to the method for claim 11, wherein this first, second and the 3rd color organic luminous layer be suitable for sending redness, green and blue light respectively.
14. according to the method for claim 11, wherein this first, second and the 3rd color organic luminous layer be suitable for sending green, redness and blue light respectively.
15. a laser induced thermal imaging apparatus comprises:
The substrate table that comprises magnet or magnetic material, this substrate table be suitable for receiving will on this substrate table, be laminated to each other be subjected to main substrate and donor film, this is subjected to main substrate to have the pixel region of the pixel of being used to form, each pixel comprises first sub-pixel, second sub-pixel and two the 3rd sub-pixels, and this donor film has the organic luminous layer that will transfer to this pixel region;
Be used for the laser oscillator of irradiating laser to this donor film;
Contact frame is suitable for being arranged between this substrate table and this laser oscillator, and is suitable for forming magnetic force with this substrate table, and comprises the opening that laser passes;
Be used on the direction of this substrate table, moving the contact frame feed mechanism of this contact frame; And
Be suitable for receiving at least the vacuum chamber of this substrate table and this contact frame,
Wherein this contact frame comprises first and second frameworks, first and second openings are respectively formed on this first and second framework, this first and second sub-pixel and this first opening form accordingly, two the 3rd sub-pixels and this second opening form accordingly, thus wherein this first and second framework alternately install form this Organic Light Emitting Diode with this first, second and the corresponding luminescent layer of the 3rd sub-pixel.
16. according to the laser induced thermal imaging apparatus of claim 15, wherein the area of this first opening is in 1% to 50% scope of the area of this first framework, and the area of this second opening is in 1% to 50% scope of the area of this second framework.
17. according to the laser induced thermal imaging apparatus of claim 15, wherein this contact frame comprises magnet, and in the described magnet of this magnet of this contact frame or this substrate table at least one is electromagnet or permanent magnet.
18. according to the laser induced thermal imaging apparatus of claim 15, wherein this contact frame comprises the magnetic material, it comprises being selected from and contains Fe, Ni, Cr, Fe 2O 3, Fe 3O 4, CoFe 2O 4, magnetic nano particle, with and composition thereof group a kind of.
19. make method of organic light emitting diodes for one kind, each Organic Light Emitting Diode has one of luminescent layer that is formed between first and second electrodes, this method comprises:
Use is according to the laser induced thermal imaging apparatus of claim 15, wherein this contact frame comprises first contact frame and second contact frame, this donor film comprises first donor film with first color organic luminous layer, the 3rd donor film that has second donor film of the second color organic luminous layer and have the 3rd color organic luminous layer
Placing this had on this substrate table of magnet by main substrate, this is subjected to main substrate to have pixel region, it comprises first sub-pixel area that is used to form this first sub-pixel, two the 3rd sub-pixel area that are used to form second sub-pixel area of this second sub-pixel and are used to form described two the 3rd sub-pixels, and one of them pixel comprises one first sub-pixel, second sub-pixel and two the 3rd sub-pixels;
This first donor film that placement has this first organic luminous layer is subjected on the main substrate at this;
This first contact frame of utilizing magnetic attraction will have magnet is attached to this first donor film, and this first contact frame has opening;
Thereby the opening irradiating laser that passes this first contact frame is transferred to this first sub-pixel area to this first donor film with this first color organic luminous layer;
Separate this first contact frame from this first donor film;
This second donor film that placement has this second color organic luminous layer is subjected on the main substrate at this;
Utilize magnetic attraction that this first contact frame is attached to this second donor film;
Thereby the opening irradiating laser that passes this first contact frame is transferred to this second sub-pixel area to this second donor film with this second color organic luminous layer;
Separate this first contact frame from this second donor film, and replace this first contact frame with second contact frame, this second contact frame comprises magnet, and has opening;
The 3rd donor film that placement has the 3rd color organic luminous layer is subjected on the main substrate at this;
Utilize magnetic attraction that this second contact frame is attached to the 3rd donor film; And
Thereby the opening irradiating laser that passes this second contact frame shifts the 3rd color organic luminous layer to described two the 3rd sub-pixel area on the 3rd donor film.
20. according to the method for claim 19, four sub-pixels of this of one of them pixel form 2 * 2 matrixes,
Thereby wherein this first color organic luminous layer is transferred and forms this first sub-pixel in the upper left corner of this pixel, thereby this second color organic luminous layer is transferred on this first sub-pixel right side and forms this second sub-pixel, thereby the 3rd color organic luminous layer is transferred described two the 3rd sub-pixels of formation under this first and second sub-pixel.
21. according to the method for claim 19, four sub-pixels of this of one of them pixel form 2 * 2 matrixes,
Thereby wherein this first color organic luminous layer is transferred and forms this first sub-pixel in the upper left corner of this pixel, thereby this second color organic luminous layer is transferred under this first sub-pixel and forms this second sub-pixel, thereby the 3rd color organic luminous layer is transferred and forms described two the 3rd sub-pixels on the right side of this first and second sub-pixel.
22. according to the method for claim 20, wherein this first color organic luminous layer is suitable for glowing, this second color organic luminous layer is suitable for green light, and the 3rd color organic light emitting layer is suitable for blue light-emitting.
23. according to the method for claim 20, wherein this first color organic luminous layer is suitable for green light, this second color organic luminous layer is suitable for glowing, and the 3rd color organic luminous layer is suitable for blue light-emitting.
24. one kind is used to form first, second corresponding with pixel of Organic Light Emitting Diode and the laser induced thermal imaging apparatus of the 3rd luminescent layer, each pixel comprises one first sub-pixel, one second sub-pixel and two the 3rd sub-pixels, and this equipment comprises:
Comprise substrate table and be suitable for receiving the chamber of contact frame, this substrate table has magnet or magnetic material, and this contact frame is suitable for being arranged between this substrate table and the laser oscillator, and this chamber is suitable for carrying out laser induced thermal imaging;
This laser oscillator is used for irradiating laser to this contact frame and donor film; And
The contact frame feed mechanism is used for moving this contact frame on the direction of this substrate table,
Wherein this contact frame comprises: first framework comprises magnet or magnetic material and has first opening corresponding with first sub-pixel area; Second framework comprises magnet or magnetic material and has second opening corresponding with second sub-pixel area; And the 3rd framework, comprise magnet or magnetic material and have three opening corresponding with the 3rd sub-pixel area, thus wherein this first, second and the 3rd framework the described luminescent layer that forms this Organic Light Emitting Diode alternately is installed, and
This chamber is suitable for during cascade being in vacuum state what be subjected to main substrate and this donor film.
25. according to the laser induced thermal imaging apparatus of claim 24, wherein this contact frame feed mechanism comprises:
Be used for vertically moving the vertical driver of this contact frame; And
Connecting rod is connected to this vertical driver and carriage, on this carriage contact frame is installed.
26. according to the laser induced thermal imaging apparatus of claim 24, wherein at least one of this substrate table or this contact frame comprises electromagnet or permanent magnet.
27. according to the laser induced thermal imaging apparatus of claim 24, wherein this magnetic material comprises being selected from and contains Fe, Ni, Cr, Fe 2O 3, Fe 3O 4, CoFe 2O 4, magnetic nano particle, with and composition thereof group a kind of.
28. laser induced thermal imaging apparatus according to claim 24, wherein this substrate table is suitable for receiving this that be laminated to each other and is subjected to main substrate and this donor film, this is subjected to main substrate to have pixel region, wherein form first and second sub-pixels and two the 3rd sub-pixels, this donor film has and will be transferred to the organic luminous layer that this is subjected to this pixel region on the main substrate.
29. according to the laser induced thermal imaging apparatus of claim 24, wherein this contact frame feed mechanism comprises that also being used for order exchanges this first, second and the exchange mechanism of the 3rd contact frame.
30. make method of organic light emitting diodes for one kind, each Organic Light Emitting Diode has one of luminescent layer that is formed between first and second electrodes, this method comprises:
Use the laser induced thermal imaging apparatus of claim 24, wherein this donor film comprises first donor film with first color organic luminous layer, the 3rd donor film that has second donor film of the second color organic luminous layer and have the 3rd color organic luminous layer
Place this and be subjected to main substrate on this substrate table with magnet or magnetic material, this is subjected to main substrate to have this first sub-pixel area, this second sub-pixel area and described two the 3rd sub-pixel area;
Placing this first donor film is subjected on the main substrate at this;
Use magnetic attraction that this first framework is attached to this first donor film;
Thereby this first opening that passes this first framework is transferred to this first sub-pixel area from this laser oscillator irradiating laser to this first donor film with this first color organic luminous layer;
Separate this first framework from this first donor film, and substitute this first framework with this second framework;
Placing this second donor film is subjected on the main substrate at this;
Use magnetic attraction that this second framework is attached to this second donor film;
Thereby this second opening that passes this second framework is transferred to this second sub-pixel area from this laser oscillator irradiating laser to this second donor film with this second color organic luminous layer;
Separate this second framework from this second donor film, and substitute this second framework with the 3rd framework;
Placing the 3rd donor film is subjected on the main substrate at this;
Use magnetic attraction that the 3rd framework is attached to the 3rd donor film;
Thereby the 3rd opening that passes the 3rd framework is transferred to the 3rd color organic luminous layer from this laser oscillator irradiating laser to the 3rd donor film described two the 3rd sub-pixel area.
31. according to the method for claim 30, wherein this first and second sub-pixel and this two the 3rd sub-pixels form 2 * 2 matrixes, and constitute a pixel,
Wherein thereby this first color organic luminous layer is transferred first row, first this first sub-pixel of row formation in this pixel, thereby the first row secondary series that this second color organic luminous layer is transferred in this pixel forms this second sub-pixel, thereby second row, first row and the second row secondary series that the 3rd color organic luminous layer is transferred in this pixel form the 3rd sub-pixel.
32. according to the method for claim 30, wherein this first and second sub-pixel and this two the 3rd sub-pixels form 2 * 2 matrixes, and constitute a pixel,
Wherein thereby this first color organic luminous layer is transferred first row, first this first sub-pixel of row formation in this pixel, thereby second row, first row that this second color organic luminous layer is transferred in this pixel form this second sub-pixel, thereby the first row secondary series and the second row secondary series that the 3rd color organic luminous layer is transferred in this pixel form the 3rd sub-pixel.
33. according to the method for claim 31, wherein this first, second and the 3rd sub-pixel be suitable for sending redness respectively, green and blue light.
34. according to the method for claim 31, wherein this first, second and the 3rd sub-pixel be suitable for sending green respectively, redness and blue light.
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